CN202473854U - Automatic buffer liquid charging device - Google Patents
Automatic buffer liquid charging device Download PDFInfo
- Publication number
- CN202473854U CN202473854U CN2012200541812U CN201220054181U CN202473854U CN 202473854 U CN202473854 U CN 202473854U CN 2012200541812 U CN2012200541812 U CN 2012200541812U CN 201220054181 U CN201220054181 U CN 201220054181U CN 202473854 U CN202473854 U CN 202473854U
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- liquid level
- pipeline
- surge tank
- liquid
- automatic
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Abstract
The utility model discloses an automatic buffer liquid charging device which comprises a technical groove, a main channel for feeding a liquid to the technical groove, a buffer tank, a liquid level test tube and a precise flow sensor, wherein an inlet end of the buffer tank is connected with the main channel through a pipeline, and an outlet end is connected with the technical groove through a pipeline; the liquid level test tube is arranged on one side of the buffer tank, and communicated with the buffer tank to form a U-shaped communicating vessel; a liquid level sensor is arranged in the liquid level test tube; and the precise flow sensor is arranged on the pipeline which connects the outlet end of the buffer tank and the technical groove. The utility model can implement precise and automatic charging of the chemical liquid, and reduce the solution strength error; the liquid level test tube and the precise flow sensor are combined for dual outputs, so that the technologist can visually monitor the liquid addition amount, thereby ensuring the technical stability.
Description
Technical field
The utility model relates to a kind of liquid supply device, relates in particular to a kind of automatic buffering liquid supply device of process for etching.
Background technology
In the process that the making herbs into wool of crystal silicon solar batteries is produced, require the size and the degree of depth thereof of control matte at present, this just needs the accuracy of amount infused.
Dosing method through single accurate flow sensor control; Can not effectively confirm the difference of the adding amount of actual adding amount and theory; Under the situation that practical large-scale is produced; Liquor strength can produce difference, and the loss of weight amount of silicon chip is reduced or rising, causes the sunken luminous effect of silicon chip undesirable.
Therefore, need a kind of device that can accurately confirm amount infused, better control solution concentration, make the polycrystalline silicon suede better effects if of large-scale production.
The utility model content
The utility model purpose: the purpose of the utility model be at present can't the accurate quantification amount infused etc. problem, a kind of automatic buffering liquid supply device that can the accurate quantification fluid infusion is provided.
Technical scheme: the described automatic buffering liquid supply device of the utility model, comprise technology groove and give the major trunk roads of said technology groove dosing, also comprise surge tank, liquid level testing tube and accurate flow sensor.
The entrance point of said surge tank is connected with said major trunk roads through pipeline, and the port of export is connected with said technology groove through pipeline; Said liquid level testing tube is arranged on a side of said surge tank, is communicated with said surge tank to constitute U type linker; Be provided with liquid level sensor in the said liquid level testing tube; Said accurate flow sensor is arranged on the said surge tank port of export and the pipeline that said technology groove is connected.Through the numerical value that liquid level sensor in the liquid level testing tube and accurate flow sensor return, the amount infused of can accurately annotating.
For the accurate liquid level of control surge tank, said liquid level sensor is three, and high liquid level sensor, middle liquid level sensor and low liquid level sensor are separately positioned on top, middle part and the bottom of said liquid level testing tube.During use, in high liquid level sensor difference in height be adjusted into 20mm, the liquid level that guarantees surge tank within the specific limits,
The pipeline that the entrance point of said surge tank is connected with said major trunk roads is provided with first automatic valve; The unlatching of first automatic valve is controlled by liquid level sensor, and during liquid level sensor, first automatic valve is opened in liquid level is low to moderate; The paramount liquid level sensor of feed flow place, first automatic valve is closed.
The pipeline that the port of export of said surge tank is connected with said technology groove is provided with second automatic valve.
Be provided with the 3rd automatic valve for the major trunk roads of said technology groove dosing.
Beneficial effect: 1, the utility model can be realized the accurately filling automatically of chemical liquid, reduces the error of solution concentration; Adopt the liquid level testing tube to combine the dual output of accurate flow sensor, make the technologist can monitor the amount of adding soup intuitively, guarantee the stability of technology; 2, the utility model pipeline all adopts corrosion resistant highly purified PFA material, is applicable to the filling of all chemical liquids.Utilize the control of automatic buffer device and accurate flow sensor, fluid infusion concentration error≤± 1% of soup satisfies technological requirement; 3, the utility model has combined liquid level testing tube and the dual quantitative structure of accurate flow sensor, and accurate quantitatively filling amount infused is simple in structure and Operation and Maintenance is easy.
Description of drawings
Fig. 1 is the utility model structural representation.
Embodiment
Be elaborated in the face of the utility model technical scheme down, but the protection range of the utility model is not limited to said embodiment.
Embodiment: the utility model cushions liquid supply device automatically, comprises technology groove 1 and gives the major trunk roads 2 of said technology groove 1 dosing, also comprises surge tank 3, liquid level testing tube 4 and accurate flow sensor 5.
The entrance point of said surge tank 3 is connected with said major trunk roads 2 through pipeline, and the port of export is connected with said technology groove 1 through pipeline; Said liquid level testing tube 4 is arranged on a side of said surge tank 3, is communicated with said surge tank 3 to constitute U type linker; Be provided with liquid level sensor 6 in the said liquid level testing tube 4; Said accurate flow sensor 5 is arranged on said surge tank 3 ports of export and the pipeline that said technology groove 1 is connected.
Said liquid level sensor 6 is three, and high liquid level sensor 6-1, middle liquid level sensor 6-2 and low liquid level sensor 6-3 are separately positioned on top, middle part and the bottom of said liquid level testing tube.
The pipeline that the entrance point of said surge tank 3 is connected with said major trunk roads 2 is provided with first automatic valve 7; The pipeline that the port of export of said surge tank 3 is connected with said technology groove 1 is provided with second automatic valve 8; Be provided with the 3rd automatic valve 9 for the major trunk roads 2 of said technology groove 1 dosing.
Dosing amount in the technology groove 1 is mainly by 9 controls of the 3rd automatic valve.Quantitatively add when mending solution for again technology groove 1, control corresponding second automatic valve 8 and get final product.The switch of first automatic valve 7 on the entrance point of surge tank 3 and the pipeline that said major trunk roads 2 are connected is by high liquid level sensor 6-1 and middle liquid level sensor 6-2 control; In liquid level is low to moderate during liquid level sensor 6-2; First automatic valve 7 is opened automatically; During the paramount liquid level sensor 6-1 of feed flow place, first automatic valve 7 is closed.
Described automatic valve, surge tank and pipeline are processed by PFA or PP material.
As stated, although represented and explained the utility model that with reference to specific preferred embodiment it shall not be construed as the restriction to the utility model self.Under the spirit and scope prerequisite of the utility model that does not break away from the accompanying claims definition, can make various variations in form with on the details to it.
Claims (5)
1. one kind is cushioned liquid supply device automatically, comprises technology groove (1) and gives the major trunk roads (2) of said technology groove (1) dosing, it is characterized in that, also comprises surge tank (3), liquid level testing tube (4) and accurate flow sensor (5);
The entrance point of said surge tank (3) is connected with said major trunk roads (2) through pipeline, and the port of export is connected with said technology groove (1) through pipeline;
Said liquid level testing tube (4) is arranged on a side of said surge tank (3), is communicated with said surge tank (3) to constitute U type linker; Be provided with liquid level sensor (6) in the said liquid level testing tube (4);
Said accurate flow sensor (5) is arranged on said surge tank (3) port of export and the pipeline that said technology groove (1) is connected.
2. automatic buffering liquid supply device according to claim 1; It is characterized in that: said liquid level sensor (6) is three; High liquid level sensor (6-1), middle liquid level sensor (6-2) and low liquid level sensor (6-3) are separately positioned on top, middle part and the bottom of said liquid level testing tube.
3. automatic buffering liquid supply device according to claim 1 is characterized in that: the pipeline that the entrance point of said surge tank (3) is connected with said major trunk roads (2) is provided with first automatic valve (7).
4. automatic buffering liquid supply device according to claim 1 is characterized in that: the pipeline that the port of export of said surge tank (3) is connected with said technology groove (1) is provided with second automatic valve (8).
5. automatic buffering liquid supply device according to claim 1 is characterized in that: be provided with the 3rd automatic valve (9) for the major trunk roads (2) of said technology groove (1) dosing.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2012200541812U CN202473854U (en) | 2012-02-20 | 2012-02-20 | Automatic buffer liquid charging device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2012200541812U CN202473854U (en) | 2012-02-20 | 2012-02-20 | Automatic buffer liquid charging device |
Publications (1)
Publication Number | Publication Date |
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CN202473854U true CN202473854U (en) | 2012-10-03 |
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Family Applications (1)
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CN2012200541812U Expired - Lifetime CN202473854U (en) | 2012-02-20 | 2012-02-20 | Automatic buffer liquid charging device |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105655444A (en) * | 2016-03-15 | 2016-06-08 | 江苏东鋆光伏科技有限公司 | Efficient and automatic removing device for porous silicon on surface of etching battery piece |
CN106483047A (en) * | 2015-08-26 | 2017-03-08 | 上海依达医疗器械有限公司 | A kind of non-freezing solution box assembly of freezing point osmotic pressure analyzer |
CN113030389A (en) * | 2021-03-15 | 2021-06-25 | 河南省计量科学研究院 | Exhaled gas alcohol content detector calibrating device and calibrating method thereof |
CN114447539A (en) * | 2022-01-27 | 2022-05-06 | 江苏龙恒新能源有限公司 | Automatic liquid supplementing device for secondary texturing of crystalline silicon battery piece |
-
2012
- 2012-02-20 CN CN2012200541812U patent/CN202473854U/en not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106483047A (en) * | 2015-08-26 | 2017-03-08 | 上海依达医疗器械有限公司 | A kind of non-freezing solution box assembly of freezing point osmotic pressure analyzer |
CN105655444A (en) * | 2016-03-15 | 2016-06-08 | 江苏东鋆光伏科技有限公司 | Efficient and automatic removing device for porous silicon on surface of etching battery piece |
CN105655444B (en) * | 2016-03-15 | 2017-04-12 | 江苏东鋆光伏科技有限公司 | Efficient and automatic removing device for porous silicon on surface of etching battery piece |
CN113030389A (en) * | 2021-03-15 | 2021-06-25 | 河南省计量科学研究院 | Exhaled gas alcohol content detector calibrating device and calibrating method thereof |
CN114447539A (en) * | 2022-01-27 | 2022-05-06 | 江苏龙恒新能源有限公司 | Automatic liquid supplementing device for secondary texturing of crystalline silicon battery piece |
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Legal Events
Date | Code | Title | Description |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20121003 |