CN203131430U - Distribution system of chemical liquid - Google Patents
Distribution system of chemical liquid Download PDFInfo
- Publication number
- CN203131430U CN203131430U CN 201320057575 CN201320057575U CN203131430U CN 203131430 U CN203131430 U CN 203131430U CN 201320057575 CN201320057575 CN 201320057575 CN 201320057575 U CN201320057575 U CN 201320057575U CN 203131430 U CN203131430 U CN 203131430U
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- chemical liquids
- pneumatic valve
- knock out
- out drum
- chemical liquid
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Abstract
The utility model provides a distribution system of chemical liquid. The system comprises two same subsystems which are respectively connected with a machine platform and work alternately. Each subsystem comprises a first chemical liquid passage and a second chemical liquid passage, wherein the first chemical liquid passage and the second chemical liquid passage are connected with an on-line mixing unit, and the first chemical liquid passage comprises a first pneumatic valve, a first buffer tank, a second pneumatic valve and a metering pump. The first pneumatic valve, the first buffer tank, the second pneumatic valve and the metering pump are sequentially connected. The second chemical liquid passage comprises a third pneumatic valve, a second buffer tank, a fourth pneumatic valve, a membrane pump and a pulse eliminating device, wherein the third pneumatic valve, the second buffer tank, the fourth pneumatic valve, the membrane pump and the pulse eliminating device are sequentially connected. The on-line mixing unit is used for mixing the chemical liquid flown from the first chemical liquid passage and the second chemical liquid passage and then conveying the chemical fluid to the machine platform. The effect of chemical liquid flow due to pressure surge when a factory end feeds liquid can be avoided, the stability of the device and matching proportion accuracy are improved due to the double-system design, and the distribution system of the chemical liquid is easy to achieve.
Description
Technical field
The utility model relates to chemical liquids distribution design technical field, relates in particular to a kind of different proportioning chemical liquids distribution system.
Background technique
Intergrated circuit adopts semiconductor wafer manufacturing usually, and the normally easy crisp material of this wafer is made, during making ic component, these wafers will pass through some treatment steps usually, wafer can be exposed to or bear the processing of the solution of various different proportionings in processing procedure, reaching certain effects, and the chemical liquids of these different proportionings needs be delivered to the work board through a distribution system.If the unreasonable or imperfection of chemical liquids distribution system design then can cause the stability of equipment and manufacturing efficiency to reduce.
Existing different proportioning chemical liquids distribution system as shown in Figure 1, chemical liquids A flows into from the first chemical liquids path in this distribution system, entered in the buffer tank by the control of first pneumatic valve, control its flow by second pneumatic valve and metering pump again, chemical liquids B flows into from the second chemical liquids path then by producer supply, utilize hand valve, the 3rd pneumatic valve, and flow controller control its flow, it is entered in the on-line mixing unit mix with chemical liquids A, be transported to board at last.In this kind design, because direct feed flow is held by factory, pressure surge is bigger, and it is bigger that the flow of chemical liquids B is influenced by it; And have only a cover distribution system, for the chemical liquids of different proportionings, the proportioning ratio of liquid made liquid proportioning ratio accurate inadequately, thereby influences the stability of system works when the residual liquid in the system pipeline can influence different proportioning.
The model utility content
The utility model solves mainly that existing different proportioning chemical liquids distribution system exists in technology that flowed fluctuation is big, chemical liquids proportioning ratio is subjected to that residual liquid influences big technical problem in the system pipeline.
The utility model provides a kind of chemical liquids distribution system, and this system comprises the identical subtense angle of two covers of the alternation that links to each other with board respectively, and described subtense angle comprises the first chemical liquids path and the second chemical liquids path that links to each other with the on-line mixing unit,
Wherein, the first chemical liquids path comprises connection successively:
First pneumatic valve is used for the control chemical liquids and flows into;
First knock out drum is used for eliminating factory's end liquid supply pressure fluctuation to the influence of flow;
Second pneumatic valve is used for cooperating the described first knock out drum fluid infusion, discharge opeing;
Metering pump is used for control chemical liquids flow;
Wherein, the second chemical liquids path comprises connection successively:
The 3rd pneumatic valve is used for the control chemical liquids and flows into;
Second knock out drum is used for eliminating factory's end liquid supply pressure fluctuation to the influence of flow;
The 4th pneumatic valve is used for cooperating the described second knock out drum fluid infusion, discharge opeing;
Diaphragm pump is used for control chemical liquids flow;
Pulsation damper is used for eliminating flow pulse, makes stability of flow;
Wherein, the on-line mixing unit transfers to board after the chemical liquids of the described first chemical liquids path and the outflow of the second chemical liquids path is mixed.
Preferably, respectively there is a liquid level sensor bottom, middle part and the top of described first knock out drum and second knock out drum, when the bottoms level sensor sends signal, shows that liquid in the corresponding knock out drum has discharged to finish; When the middle part liquid level sensor sends signal, show that the liquid in the corresponding knock out drum arrives the precalculated position; When the top liquid level sensor sends signal, show that corresponding knock out drum fluid infusion finishes.
Preferably, the described second chemical liquids path is applicable to that factory holds direct feed flow.
Pressure surge was to the influence of chemical liquids flow when the utility model can be avoided owing to factory's end feed flow, and Dual System Design has improved stability and the proportioning ratio precision of equipment simultaneously, is easy to realize.
Description of drawings
Fig. 1 is existing chemical liquids distribution system configuration figure;
Fig. 2 is the structural drawing of the utility model system.
Embodiment
Below in conjunction with drawings and the specific embodiments the utility model is done detailed explanation.
Fig. 2 is the structural drawing of the utility model system, the utility model provides a kind of chemical liquids distribution system, this system comprises the identical subtense angle of two covers of the alternation that links to each other with board respectively, and described subtense angle comprises the first chemical liquids path and the second chemical liquids path that links to each other with the on-line mixing unit
Wherein, the first chemical liquids path comprises connection successively:
First pneumatic valve is used for the control chemical liquids and flows into;
First knock out drum is used for eliminating factory's end liquid supply pressure fluctuation to the influence of flow;
Second pneumatic valve is used for cooperating the described first knock out drum fluid infusion, discharge opeing;
Metering pump is used for control chemical liquids flow;
Wherein, the second chemical liquids path comprises connection successively:
The 3rd pneumatic valve is used for the control chemical liquids and flows into;
Second knock out drum is used for eliminating factory's end liquid supply pressure fluctuation to the influence of flow;
The 4th pneumatic valve is used for cooperating the described second knock out drum fluid infusion, discharge opeing;
Diaphragm pump is used for control chemical liquids flow;
Pulsation damper is used for eliminating flow pulse, makes stability of flow;
Wherein, the on-line mixing unit transfers to board after the chemical liquids of the described first chemical liquids path and the outflow of the second chemical liquids path is mixed.
Preferably, respectively there is a liquid level sensor bottom, middle part and the top of described first knock out drum and second knock out drum, when the bottoms level sensor sends signal, shows that liquid in the corresponding knock out drum has discharged to finish; When the middle part liquid level sensor sends signal, show that the liquid in the corresponding knock out drum arrives the precalculated position; When the top liquid level sensor sends signal, show that corresponding knock out drum fluid infusion finishes.
Preferably, the described second chemical liquids path is applicable to that factory holds direct feed flow.
The utility model distribution system design is the identical systems of two cover functions, in the first chemical liquids path, first knock out drum is used for eliminating factory's end liquid supply pressure fluctuation to the influence of flow, and control its flow with second pneumatic valve and metering pump, make the chemical liquids of this path enter the on-line mixing unit with small flow and mix with the chemical liquids of the second chemical liquids path, be delivered to board at last.Bottom, neutral position and the top of first knock out drum in the first chemical liquids path has three liquid level sensors, is used for the information to system feedback knock out drum liquid volume.When bottom sensor is sent signal, illustrate that liquid in the knock out drum has discharged to finish, if this moment the arts demand certain liq, can open first pneumatic valve of front, close second pneumatic valve of back, knock out drum is carried out fluid infusion; When the sensor of centre sends signal, illustrate that the liquid in the knock out drum arrives certain position; When uppermost sensor sends signal, illustrate that fluid infusion finishes first pneumatic valve that need close the front; The chemical liquids amount ratio of the first chemical liquids path is less, and available metering pump is controlled its flow, and its second pneumatic valve of installing previously is used for cooperating its work, and second pneumatic valve is opened when metering pump is worked, and second pneumatic valve cut out when metering pump stopped.
The second chemical liquids path is compared with the first chemical liquids path, its previous section is the same, also add second knock out drum therein and eliminate factory's end pressure fluctuation to the influence of flow, just liquid pump is common membrane pump with pneumatic drive and installs a pulsation damper thereafter additional, this is because the chemical liquids large usage quantity of the second chemical liquids path generally speaking, control its flow so locate available membrane pump with pneumatic drive and pulsation damper, it is to make stability of flow for the flow pulse of eliminating membrane pump with pneumatic drive that pulsation damper is installed, make chemical liquids flow into the on-line mixing unit then, be delivered to board at last.
Design the same distribution system of two covers simultaneously, can be with another set of when the chemical liquids proportioning need change, no chemical liquids is residual in this system pipeline, can not impact distributing precision, and two cover systems can improve the stability of work.
Specific implementation process is as follows:
In the first chemical liquids path, chemical liquids enters in first knock out drum through first pneumatic valve, three liquid level sensors on first knock out drum feed back the wherein information of liquid volume, whether knock out drum are carried out fluid infusion with prompting, can utilize the switching of pneumatic valve to cooperate its fluid infusion, discharge opeing simultaneously.Because the chemical liquids consumption in the first chemical liquids path is less, so control the size of its flow with pneumatic valve and metering pump, makes it enter the on-line mixing unit and mix with the chemical liquids of another path.
In the chemical liquids distribution system, chemical liquids in the second chemical liquids path is by factory's end supply, entered in second knock out drum by the 3rd pneumatic valve, the influence of avoiding the fluctuation of factory end pressure to cause, then by the 4th pneumatic valve, membrane pump with pneumatic drive, pulsation damper control liquid flow in the mixed cell with the first chemical liquids path in chemical liquids carry out proportioning and mix.Wherein pneumatic valve opens and the SC sigmal control of closing by the feedback of the liquid level sensor on the knock out drum.If the bottom sensor of second knock out drum has signal feed back, then chemical liquids uses up in the knock out drum, can carry out fluid infusion to it, and the 3rd pneumatic valve is opened, and the 4th pneumatic valve cuts out; When top sensor has signal feed back, illustrate that the buffering pot liquid is full, this moment, the 3rd pneumatic valve cut out.When arts demand liquid, the 4th pneumatic valve is opened, and cooperates membrane pump with pneumatic drive to control its flow, makes it enter the on-line mixing device with stable flow rate, is delivered to board at last.
The above only is preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvement and replacement, these improvement and replacement also should be considered as protection domain of the present utility model.
Claims (3)
1. a chemical liquids distribution system is characterized in that, this system comprises the identical subtense angle of two covers of the alternation that links to each other with board respectively, and described subtense angle comprises the first chemical liquids path and the second chemical liquids path that links to each other with the on-line mixing unit,
Wherein, the first chemical liquids path comprises connection successively:
First pneumatic valve is used for the control chemical liquids and flows into;
First knock out drum is used for eliminating factory's end liquid supply pressure fluctuation to the influence of flow;
Second pneumatic valve is used for cooperating the described first knock out drum fluid infusion, discharge opeing;
Metering pump is used for control chemical liquids flow;
Wherein, the second chemical liquids path comprises connection successively:
The 3rd pneumatic valve is used for the control chemical liquids and flows into;
Second knock out drum is used for eliminating factory's end liquid supply pressure fluctuation to the influence of flow;
The 4th pneumatic valve is used for cooperating the described second knock out drum fluid infusion, discharge opeing;
Diaphragm pump is used for control chemical liquids flow;
Pulsation damper is used for eliminating flow pulse, makes stability of flow;
Wherein, the on-line mixing unit transfers to board after the chemical liquids of the described first chemical liquids path and the outflow of the second chemical liquids path is mixed.
2. the system as claimed in claim 1, it is characterized in that, respectively there is a liquid level sensor bottom, middle part and the top of described first knock out drum and second knock out drum, when the bottoms level sensor sends signal, shows that liquid in the corresponding knock out drum has discharged to finish; When the middle part liquid level sensor sends signal, show that the liquid in the corresponding knock out drum arrives the precalculated position; When the top liquid level sensor sends signal, show that corresponding knock out drum fluid infusion finishes.
3. the system as claimed in claim 1 is characterized in that, the described second chemical liquids path is applicable to that factory holds direct feed flow.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320057575 CN203131430U (en) | 2013-01-31 | 2013-01-31 | Distribution system of chemical liquid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320057575 CN203131430U (en) | 2013-01-31 | 2013-01-31 | Distribution system of chemical liquid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203131430U true CN203131430U (en) | 2013-08-14 |
Family
ID=48939408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320057575 Withdrawn - After Issue CN203131430U (en) | 2013-01-31 | 2013-01-31 | Distribution system of chemical liquid |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203131430U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103090190A (en) * | 2013-01-31 | 2013-05-08 | 北京七星华创电子股份有限公司 | Chemical liquid distribution system |
| CN110848574A (en) * | 2019-11-20 | 2020-02-28 | 浙江善蒸坊食品股份有限公司 | Automatic grouting system and grouting method thereof |
-
2013
- 2013-01-31 CN CN 201320057575 patent/CN203131430U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103090190A (en) * | 2013-01-31 | 2013-05-08 | 北京七星华创电子股份有限公司 | Chemical liquid distribution system |
| CN103090190B (en) * | 2013-01-31 | 2014-06-25 | 北京七星华创电子股份有限公司 | Chemical liquid distribution system |
| CN110848574A (en) * | 2019-11-20 | 2020-02-28 | 浙江善蒸坊食品股份有限公司 | Automatic grouting system and grouting method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130814 Effective date of abandoning: 20140625 |
|
| RGAV | Abandon patent right to avoid regrant |