CN102878429A - Liquid-replenishing device - Google Patents

Liquid-replenishing device Download PDF

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Publication number
CN102878429A
CN102878429A CN2012103878396A CN201210387839A CN102878429A CN 102878429 A CN102878429 A CN 102878429A CN 2012103878396 A CN2012103878396 A CN 2012103878396A CN 201210387839 A CN201210387839 A CN 201210387839A CN 102878429 A CN102878429 A CN 102878429A
Authority
CN
China
Prior art keywords
liquid
ultra
pure water
chemical
supply device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2012103878396A
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Chinese (zh)
Other versions
CN102878429B (en
Inventor
初国超
何金群
王营营
裴立坤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Sevenstar Electronics Co Ltd
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Beijing Sevenstar Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Sevenstar Electronics Co Ltd filed Critical Beijing Sevenstar Electronics Co Ltd
Priority to CN201210387839.6A priority Critical patent/CN102878429B/en
Publication of CN102878429A publication Critical patent/CN102878429A/en
Priority to US14/127,970 priority patent/US9275880B2/en
Priority to PCT/CN2013/073236 priority patent/WO2014056305A1/en
Application granted granted Critical
Publication of CN102878429B publication Critical patent/CN102878429B/en
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Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4673—Plural tanks or compartments with parallel flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85954—Closed circulating system

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

The invention discloses a liquid-replenishing device, which comprises a liquid storage tank, a chemical liquid medicine supply pipeline, an ultrapure water supply pipeline, an ultrapure water quantitative supply pipeline and a circulating pipeline, wherein the chemical liquid medicine supply pipeline provides chemical liquid medicine for the liquid storage tank; the ultrapure water supply pipeline provides ultrapure water for the liquid storage tank; the ultrapure quantitative supply pipeline quantitatively replenishes ultrapure water for the liquid storage tank; and one end of the circulating pipeline is connected with a liquid outlet of the liquid storage tank, and the other end of the circulating pipeline is connected with an inlet of the liquid storage tank. The liquid-replenishing device can quantitatively replenish liquid at regular time along with repeated use of the chemical liquid medicine and change of the concentration of the liquid medicine, and the certain concentration of the liquid medicine can be maintained, so that a process effect is guaranteed, and the liquid-replenishing device is simple in operation.

Description

Liquid supply device
Technical field
The present invention relates to the Semiconductor Cleaning Technology field, particularly a kind of liquid supply device.
Background technique
In semicon industry, on a lot of operations, all need silicon chip is carried out various cleanings, in the process of cleaning, can use various chemical liquids, and concentration and the component ratio of various chemical liquids are different, when mixing match or after using a period of time, the concentration of liquid all can change, and needs a certain amount of liquid of supply or ultra-pure water.Generally speaking, chemical liquids all needs to be placed on (such as groove or tank) in the chemical vessel, at first adds the chemical liquids of certain capacity in container, the concentration that the concentration of this liquid has met the demands.In use chemical liquids can be by Reusability in the container, and in the process of iterative cycles, the concentration of liquid can change, and needs again to replenish chemical liquids or ultra-pure water.Therefore need regularly the chemical liquids in the container to be carried out quantitative supply.At present, liquid or ultrapure supply of groundwater are adopted metering pump etc. more, need SC sigmal control or feedback etc., although can realize accurate supply, volume is large and corresponding control and structure etc. are complicated, and cost is higher.
Summary of the invention
The technical problem that (one) will solve
The technical problem to be solved in the present invention is, for the deficiencies in the prior art, provides a kind of liquid supply device, can realize the accurate supply of the multiple volume flow rate of liquid, thus can set time will be accurate quantitative the liquid timing allocation to the related process unit.
(2) technological scheme
The invention provides a kind of liquid supply device, comprise: liquid container, for described liquid container provide chemical liquid the chemical liquid supply pipeline, for described liquid container provide ultra-pure water the ultra-pure water supply pipeline, be the quantitative supply pipeline of ultra-pure water and the circulation loop of the quantitative supply ultra-pure water of described liquid container, one end of described circulation loop is connected with described liquid container liquid outlet, and the other end connects described liquid container import.
Wherein, described chemical liquid supply pipeline is provided with chemical liquid and supplies with pneumatic valve.
Wherein, described ultra-pure water supply pipeline is provided with ultra-pure water and supplies with pneumatic valve.
Wherein, the quantitative supply pipeline of described ultra-pure water is provided with the quantitative supply pneumatic valve of ultra-pure water, total supply pneumatic valve and metering pump.
Wherein, be provided with successively on the described circulation loop and the chemical liquids in the described liquid container be transported to the technique pneumatic valve, liquid transmission pump, hand valve of corresponding technique unit and with the hot filtration apparatus of the chemical liquids heating and filtering in the described liquid container.
Wherein, liquid supply device also comprises: be used for chemical liquid with technique unit and be recovered to reclaim line in the described liquid container.
Wherein, liquid supply device also comprises: be positioned at the liquid level sensor that the liquid container side is used for the sensing chemical liquids.
Wherein, described liquid container is two parallel liquid containers.
(3) beneficial effect
Liquid supply device provided by the invention can be along with the Reusability of chemical liquid, the change in concentration of liquid, and supply at regular time and quantity can be kept certain concentration of chemical, thereby guarantees technological effect, and is simple to operate.
Description of drawings
Fig. 1 is the structural representation of liquid supply device of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples are used for explanation the present invention, but are not used for limiting the scope of the invention.
As shown in Figure 1, liquid supply device provided by the invention, comprise: two parallel liquid containers (1,2), be described liquid container (1,2) provide the chemical liquid supply pipeline (3 of chemical liquid, 4), the ultra-pure water supply pipeline (5,6) of ultra-pure water is provided for described liquid container (1,2), be described liquid container (1,2) the quantitative supply pipeline (7 of ultra-pure water of quantitative supply ultra-pure water, 8) and circulation loop (10,11), described circulation loop (10,11) a end and described liquid container (1,2) liquid outlet connects, and the other end connects described liquid container (1,2) import.
Described chemical liquid supply pipeline (3,4) is provided with chemical liquid and supplies with pneumatic valve (3 ', 4 '); Described ultra-pure water supply pipeline (5,6) is provided with ultra-pure water and supplies with pneumatic valve (5 ', 6 '); The quantitative supply pipeline of described ultra-pure water (7,8) is provided with the quantitative supply pneumatic valve of ultra-pure water (7 ', 8 '), total supply pneumatic valve 9 ' and metering pump (10 ', 11 ').
Described circulation loop (10,11) be provided with successively on described liquid container (1,2) chemical liquids in is transported to the technique pneumatic valve (12 ' of corresponding technique unit, 13 '), liquid transmission pump (14 ', 15 '), the hand valve (16 ', 17 ') with the hot filtration apparatus (18 ', 19 ') of the chemical liquids heating and filtering in the described liquid container (1,2).
Liquid supply device also comprises: be used for the chemical liquid of technique unit is recovered to the reclaim line (12,13) in the described liquid container and is positioned at the liquid level sensor (20 ', 21 ') that liquid container (1,2) side is used for the sensing chemical liquids.
Working principle:
As shown in Figure 1, liquid container 1 with the left side illustrates: at first by controller 14(controller) unlatching chemical liquid supply pneumatic valve 3 ', to liquid container 1 interior injection chemical liquids, supply with the opening time of pneumatic valve 3 ' by the control chemical liquid and inject the chemical liquids of setting volume, also can pass through the feedback signal of the liquid level sensor 20 ' on liquid container 1 side, when reaching the setting liquid level, close chemical liquid and supply with pneumatic valve 3 ', stop to inject chemical liquids.Open ultra-pure water and supply with pneumatic valve 5 ', to liquid container 1 interior injection ultra-pure water (UPW), inject volume flow rate by elapsed time control, after reaching requirement, close ultra-pure water and supply with pneumatic valve 5 ', stop fluid injection.Open the hand valve 16 ' on the circulation loop 10, open technique pneumatic valve 12 ' and liquid transmission pump 14 ', liquid in the liquid container 1 is transported to hot filtration apparatus 18 ' carries out circulating-heating, feedback by temperature transducer, after reaching the technological requirement temperature, liquid is transported to processing chamber and participates in process, liquid after the technique is recycled in the liquid container 1 so that the use of next manufacturing process by reclaim line 12, through after the repeated multiple times process cycles, owing to reasons such as moisture evaporations, concentration of chemical in the liquid container 1 will increase, so want regularly the liquid in the liquid container 1 to be carried out a certain amount of moisturizing.Demarcate at first as requested and calibrate metering pump 10 ', make the folding amount of its each diaphragm satisfy the volume requirement of fluid infusion, and guarantee that 7 li of the quantitative supply pipelines of ultra-pure water do not have bubble to exist and (exist needs first total supply pneumatic valve 9 ' and the quantitative supply pneumatic valve 7 ' of ultra-pure water and metering pump 10 ' to be opened if any bubble, with the quantitative supply pipeline 7 bubble emptyings of ultra-pure water, then close successively metering pump 10 ', the quantitative supply pneumatic valve 7 ' of ultra-pure water and total supply pneumatic valve 9 '), the demarcation of metering pump 10 ' and calibration steps are: the opening degree of controlling metering pump 10 ' interior diaphragm by the knob on the adjustment quantitative pump 10 ', the swing of corresponding its knob in the time of can knowing the liquid that different volumes is provided by test before, and then the demarcation of realization metering pump 10 '.Then operate in the following order: open total supply pneumatic valve 9 ' by controller 14 controls, then open metering pump 10 ', close afterwards total supply pneumatic valve 9 ', open the quantitative supply pneumatic valve 7 ' of ultra-pure water, close metering pump 10 ', liquid flows out, and closes the quantitative supply pneumatic valve 7 ' of ultra-pure water, finish quantitative liquid replenishing, release.
When using liquid supply device of the present invention, when liquid entering hole pressure changes, as long as the folding amount of metering pump 10 ' is constant, can guarantee that the amount of fluid infusion can not change, validity and repeatability are higher, and have avoided the pressure surge of factory's end or liquid feeding pipeline on the impact of amount infused.
Above mode of execution only is used for explanation the present invention; and be not limitation of the present invention; the those of ordinary skill in relevant technologies field; in the situation that does not break away from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all technological schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.

Claims (8)

1. liquid supply device, it is characterized in that, comprise: liquid container, for described liquid container provide chemical liquid the chemical liquid supply pipeline, for described liquid container provide ultra-pure water the ultra-pure water supply pipeline, be the quantitative supply pipeline of ultra-pure water and the circulation loop of the quantitative supply ultra-pure water of described liquid container, one end of described circulation loop is connected with described liquid container liquid outlet, and the other end connects described liquid container import.
2. liquid supply device as claimed in claim 1 is characterized in that, described chemical liquid supply pipeline is provided with chemical liquid and supplies with pneumatic valve.
3. liquid supply device as claimed in claim 1 is characterized in that, described ultra-pure water supply pipeline is provided with ultra-pure water and supplies with pneumatic valve.
4. liquid supply device as claimed in claim 1 is characterized in that, the quantitative supply pipeline of described ultra-pure water is provided with the quantitative supply pneumatic valve of ultra-pure water, total supply pneumatic valve and metering pump.
5. liquid supply device as claimed in claim 1, it is characterized in that, be provided with successively on the described circulation loop and the chemical liquids in the described liquid container be transported to the technique pneumatic valve, liquid transmission pump, hand valve of corresponding technique unit and with the hot filtration apparatus of the chemical liquids heating and filtering in the described liquid container.
6. liquid supply device as claimed in claim 1 is characterized in that, liquid supply device also comprises: be used for chemical liquid with technique unit and be recovered to reclaim line in the described liquid container.
7. liquid supply device as claimed in claim 1 is characterized in that, liquid supply device also comprises: be positioned at the liquid level sensor that the liquid container side is used for the sensing chemical liquids.
8. liquid supply device as claimed in claim 1 is characterized in that, described liquid container is two parallel liquid containers.
CN201210387839.6A 2012-10-12 2012-10-12 Liquid-replenishing device Active CN102878429B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201210387839.6A CN102878429B (en) 2012-10-12 2012-10-12 Liquid-replenishing device
US14/127,970 US9275880B2 (en) 2012-10-12 2013-03-27 Liquid replenishing device
PCT/CN2013/073236 WO2014056305A1 (en) 2012-10-12 2013-03-27 Liquid replenishment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210387839.6A CN102878429B (en) 2012-10-12 2012-10-12 Liquid-replenishing device

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CN102878429B CN102878429B (en) 2015-02-11

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Cited By (6)

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Publication number Priority date Publication date Assignee Title
WO2014056305A1 (en) * 2012-10-12 2014-04-17 北京七星华创电子股份有限公司 Liquid replenishment device
CN106222686A (en) * 2016-06-29 2016-12-14 唐以松 A kind of solution for hydro-electrolytic hydroxide mixed gas equipment adds tank automatically
CN107797576A (en) * 2017-11-15 2018-03-13 奥士康科技股份有限公司 A kind of decoction constant volume added automatically system
CN110274999A (en) * 2019-07-19 2019-09-24 重庆科技学院 Modified is bubbled sulfuric acid standard humidity generator and its variable data accurate calculation method
CN113670650A (en) * 2020-05-14 2021-11-19 镇江乐华电子科技有限公司 Liquid injection method of ultrathin slicing machine and ultrathin slicing machine
CN114405921A (en) * 2022-03-30 2022-04-29 智程半导体设备科技(昆山)有限公司 Wafer tank type cleaning machine with automatic liquid supplementing function

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JP6800818B2 (en) * 2017-06-30 2020-12-16 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing equipment and substrate processing method

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CN1540725A (en) * 2003-04-24 2004-10-27 株式会社海上 Soup concentration controller of semiconductor processing appts.
CN101667040A (en) * 2008-09-02 2010-03-10 浩硕科技股份有限公司 Method for controlling etching solution concentration
CN201514952U (en) * 2009-09-29 2010-06-23 上海昕通半导体设备有限公司 Automatic circulating liquid infusion system for etching liquid of crystalline silicon solar energy battery plate
CN102208327A (en) * 2011-01-30 2011-10-05 北京七星华创电子股份有限公司 Device and method for managing semiconductor cleaning solution
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014056305A1 (en) * 2012-10-12 2014-04-17 北京七星华创电子股份有限公司 Liquid replenishment device
CN106222686A (en) * 2016-06-29 2016-12-14 唐以松 A kind of solution for hydro-electrolytic hydroxide mixed gas equipment adds tank automatically
CN106222686B (en) * 2016-06-29 2018-02-13 唐以松 A kind of solution for hydro-electrolytic hydroxide mixed gas equipment adds tank automatically
CN107797576A (en) * 2017-11-15 2018-03-13 奥士康科技股份有限公司 A kind of decoction constant volume added automatically system
CN107797576B (en) * 2017-11-15 2024-01-02 奥士康科技股份有限公司 Automatic adding system for constant volume of liquid medicine
CN110274999A (en) * 2019-07-19 2019-09-24 重庆科技学院 Modified is bubbled sulfuric acid standard humidity generator and its variable data accurate calculation method
CN113670650A (en) * 2020-05-14 2021-11-19 镇江乐华电子科技有限公司 Liquid injection method of ultrathin slicing machine and ultrathin slicing machine
CN114405921A (en) * 2022-03-30 2022-04-29 智程半导体设备科技(昆山)有限公司 Wafer tank type cleaning machine with automatic liquid supplementing function

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US20140305515A1 (en) 2014-10-16
US9275880B2 (en) 2016-03-01
CN102878429B (en) 2015-02-11
WO2014056305A1 (en) 2014-04-17

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