CN207689755U - A kind of fibre optic scanner structure - Google Patents

A kind of fibre optic scanner structure Download PDF

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Publication number
CN207689755U
CN207689755U CN201721813647.1U CN201721813647U CN207689755U CN 207689755 U CN207689755 U CN 207689755U CN 201721813647 U CN201721813647 U CN 201721813647U CN 207689755 U CN207689755 U CN 207689755U
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China
Prior art keywords
actuator
optical fiber
sliding slot
fibre optic
optic scanner
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CN201721813647.1U
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Chinese (zh)
Inventor
姚长呈
周旭东
王凌空
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Chengdu Idealsee Technology Co Ltd
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Chengdu Idealsee Technology Co Ltd
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Abstract

The utility model discloses a kind of fibre optic scanner structures, including:Optical fiber guides light and goes out the light from preceding end-fire;Actuator supports optical fiber and so that optical fiber front end is vibrated under the driving of voltage in cantilever fashion;Fixed seat has the sliding slot for allowing actuator to be translated along optical axis;Fine tuning structure is used to drive actuator to be translated along optical axis in the sliding slot;Fixed structure is used to the actuator after translation being fixed in the sliding slot.Position of the actuator in sliding slot is adjusted by micro-adjusting mechanism, adjust the length that actuator exceeds fixed seat, realize the adjusting to the jib-length of actuator, so that the intrinsic frequency of the cantilever of actuator is close with the intrinsic frequency of optical fiber cantilever, amplified using the subresonance of actuator and optical fiber, it thereby may be ensured that the cantilever free end of optical fiber obtains peak swing, optical fiber scanning made to be operated in scan amplitude.

Description

A kind of fibre optic scanner structure
Technical field
The utility model is related to fibre optic scanner technical field more particularly to a kind of fibre optic scanner structures.
Background technology
Fibre optic scanner is frequency of the optical fiber to resonate with actuator under the driving of actuator (such as piezoelectric type actuator) Area carries out resonance scanning, to realize preferable scanning effect, need that the resonant frequency of optical fiber cantilever, actuator resonance frequency is made to have Overlapping region is completely overlapped, and scan frequency is located in this frequency range section, to realize maximum scan amplification effect and optimal Scan performance.During actual, since optical fiber needs are pasted on the actuator, it is relatively tired to paste technique for fibre diameter very little Difficulty, it is difficult to ensure that optical fiber cantilever length accuracy, in addition the otherness of optical fiber parameter, shape and structure fine difference, it is difficult to make Its frequency and actuator frequency match.
Utility model content
The utility model embodiment provides a kind of fibre optic scanner structure, to the jib-length by adjusting actuator Method simplifies technique to match the resonant frequency of optical fiber cantilever, reduces and adjusts difficulty, ensures the working performance of scanner.
In order to realize that above-mentioned purpose of utility model, the utility model provide a kind of fibre optic scanner structure, including optical fiber;
Actuator supports optical fiber and the cantilever free end of optical fiber is driven to be vibrated in cantilever fashion;
Fixed seat has the sliding slot for allowing actuator to be translated along optical axis;
Fine tuning structure is used to drive actuator to be translated along optical axis in the sliding slot;
Fixed structure is used to the actuator after translation being fixed in the sliding slot;
Optical fiber guides light and projects the light from the cantilever free end.
The length of cantilever and the relationship of resonant frequency meet:
Wherein βnFor the solution of frequency transcendental equation, E is the elasticity modulus of optical fiber, and R is section radius, and ρ is Line mass-density, L is jib-length.
In use, the preliminary scan frequency needed first by determining system, the approximation that optical fiber is gone out by theory deduction is outstanding Arm lengths.Optical fiber is fixedly connected with actuator, makes the jib-length of optical fiber close to the resonant frequency of needs.Then pass through fine tuning Position of the institutional adjustment actuator in sliding slot adjusts the length that actuator exceeds fixed seat, that is, realizes the cantilever to actuator The adjusting of length so that the intrinsic frequency of the cantilever of actuator is close with the intrinsic frequency of optical fiber cantilever, utilizes actuator and light Fine subresonance amplification thereby may be ensured that the cantilever free end (i.e. optical fiber cantilever) of optical fiber obtains peak swing, make optical fiber Scanning work is in scan amplitude.
Optionally, the fine tuning structure include be set to actuator surface, the rack extended along optical axis direction and It stretches into the sliding slot of fixed seat and gear member move with drive rack that is meshed with the rack, by screwing gear member drive Rack moves horizontally, to realize the translation of actuator.
Further, the gear member includes the auxiliary section for being circumferentially provided with the gear teeth and the tune for being set to auxiliary section one end Section portion, the auxiliary section are stretched into the sliding slot of fixed seat and are meshed with the rack.
Optionally, the fine tuning structure includes the adjusting bolt that sliding slot is stretched into end, and adjusting bolt is along optical axis side To setting and positioned at the rear of actuator.The length adjustment actuators of sliding slot are stretched into the cunning by adjusting adjusting bolt end Along the distance of optical axis translation in slot.
Further, the adjusting bolt is installed on by screw thread in fixed seat, and the end of adjusting bolt is from actuator Rear stretch into sliding slot.The rear end face of actuator is close to the end of adjusting bolt, to be adjusted by screwing adjusting bolt Bolt end stretches into the length of sliding slot, adjusts actuator position in sliding slot.
It is further preferred that the fine tuning structure further includes the connector for being fixedly arranged on actuator rear end, the cunning Slot includes an accommodating connector and the connection groove section that guides connector to be slided along optical axis direction, and connector is placed in sliding slot The rear end face of connection groove section, connector is close to the end of adjusting bolt, between the front end face of connector and the side wall of connection groove section It is provided with compressed spring.To, no matter adjusting bolt is to be screwed in into sliding slot or to screwing out outside sliding slot, compressed spring is always Connector is compressed, in turn, connector is remained to be fitted closely with adjusting bolt end.This enables to actuator in fixation Structure fixes before actuator the state for being just in stable position always, is convenient for application, the fixation of fixed structure, ensures fixed structure Being accurately positioned during application.
Optionally, the fixed structure includes the interconnecting piece for being fixedly connected with actuator and sliding slot.The connection Portion can be to be formed by curing by binder, or by welding the welded connection formed.
Optionally, the fixed structure includes the hold-down bolt that sliding slot is stretched into end, is consolidated actuator by hold-down bolt Due in sliding slot.
Further, the hold-down bolt is installed on by screw thread in fixed seat, and the end of hold-down bolt is from actuator Side stretch into sliding slot, it is preferred that the hold-down bolt is perpendicular to optical axis.
Optionally, the actuator may include that piezoelectric actuator, electrostrictive actuator, magnetic deformation actuator etc. are logical It crosses one or more in all kinds of actuating elements of electric signal driving.
Further alternative, the actuator may include any one in piezoelectric bimorph or piezoelectric ceramic tube or two Kind, the actuator may also comprise the maintaining part of support optical fiber in cantilever fashion and the piezoelectricity being arranged in the outer surface of maintaining part Potsherd, piezoelectric ceramic piece drive maintaining part to vibrate under the driving of buckling voltage.
Further, the actuator can be vibrated along one, two or more directions perpendicular to optical axis.
Optionally, the fibre optic scanner structure may also include a driving fixed seat along perpendicular to optical axis direction Second actuation means of vibration.Such as, the actuator is vibrated along one perpendicular to optical axis direction, while the second actuating dress Driving fixed seat is set to vibrate along a direction perpendicular to optical axis and different from the actuator vibration direction, so that Optical-fiber two-dimensional scanning is realized along two radial vibrations in fibre optical transmission end.
One or more technical solution in the utility model embodiment, at least has the following technical effect that or excellent Point:
Position of the actuator in sliding slot is adjusted by micro-adjusting mechanism, adjusts the length that actuator exceeds fixed seat, i.e., in fact Now to the adjusting of the jib-length of actuator so that the intrinsic frequency phase of the intrinsic frequency of the cantilever of actuator and optical fiber cantilever Closely, amplified using the subresonance of actuator and optical fiber, thereby may be ensured that the cantilever free end of optical fiber obtains peak swing, make Optical fiber scanning is operated in scan amplitude.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of embodiment of the utility model;
Fig. 2 is the structural schematic diagram of fine tuning structure in embodiment illustrated in fig. 1;
Fig. 3 is the structural schematic diagram of another embodiment of the utility model;
Fig. 4 is the structural schematic diagram of the third embodiment of the utility model;
Fig. 5 is the right side structural representation of embodiment illustrated in fig. 4;
Fig. 6 is the structural schematic diagram of the 4th kind of embodiment of the utility model;
Fig. 7 is a kind of structural schematic diagram for the embodiment being provided with the second actuation means of the utility model.
Fig. 8 is the structural schematic diagram for the embodiment that the utility model another kind is provided with the second actuation means.
In figure, 1- optical fiber, 101- optical fiber cantilevers,
2- actuators, 201- piezoelectric bimorphs, 202- piezoelectric ceramic tubes, 2031- maintaining parts, 2032- piezoelectric ceramic pieces,
3- fixed seats, 301- relief holes, 302- sliding slots, 3021- connection groove sections
4- fine tuning structures, 411- racks, 412- gear members, the auxiliary sections 4121-, 4122- adjustment portions, 421- adjusting bolts, 422- connectors, 423- compressed springs,
5- fixed structures, 501- interconnecting pieces, 502- hold-down bolts, 503- protective layers,
The second actuation means of 6-, 601- pedestals, 602- actuators.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts The every other embodiment obtained, shall fall within the protection scope of the present invention.
The utility model embodiment provides a kind of fibre optic scanner structure, to the jib-length by adjusting actuator Method simplifies technique to match the resonant frequency of optical fiber cantilever, reduces and adjusts difficulty, ensures the working performance of scanner.
A kind of fibre optic scanner structure that the utility model embodiment provides, as shown in Figure 1 comprising:
Optical fiber 1;
Actuator 2 supports optical fiber 1 and the cantilever free end of optical fiber 1 is driven to be vibrated in cantilever fashion;
Fixed seat 3 has the sliding slot 302 for allowing actuator 2 to be translated along 1 optical axis of optical fiber;
Fine tuning structure 4 is used to drive actuator 2 to be translated along 1 optical axis of optical fiber in the sliding slot 302;
Fixed structure 5 is used to the actuator 2 after translation being fixed in the sliding slot 302;
Optical fiber 1 guides light and projects the light from the cantilever free end.
The length of cantilever and the relationship of resonant frequency meet:
Wherein βnFor the solution of frequency transcendental equation, E is the elasticity modulus of optical fiber, and R is section radius, and ρ is Line mass-density, L is jib-length.
In use, the preliminary scan frequency needed first by determining system, the approximation that optical fiber 1 is gone out by theory deduction is outstanding Arm lengths.Optical fiber 1 is fixedly connected with actuator 2, makes the jib-length of optical fiber 1 close to the resonant frequency of needs.Then pass through Micro-adjusting mechanism adjusts position of the actuator 2 in sliding slot 302, adjusts the length that actuator 2 exceeds fixed seat 3, that is, realizes to causing The adjusting of the jib-length of dynamic device 2 so that the intrinsic frequency of the cantilever of actuator 2 is close with the intrinsic frequency of optical fiber cantilever 101, Amplified using the subresonance of actuator 2 and optical fiber 1, thereby may be ensured that the cantilever free end (i.e. optical fiber cantilever) of optical fiber obtains Peak swing makes optical fiber scanning be operated in scan amplitude.
The front end of actuator 2 is free end, and 2 rear end of actuator is fixing end, the freedom of the front and actuator 2 of optical fiber 1 End is fixedly connected, and part of the optical fiber 1 beyond 2 front end of actuator constitutes optical fiber cantilever 101, and the fixing end of actuator 2 can be along optical fiber 1 Optical axis is translationally slidably mounted in the sliding slot 302 of fixed seat 3, and trimmed structure 4 makes the fixing end of actuator 2 in sliding slot It is positioned to required position in 302.
In some embodiments of the utility model, as shown in Fig. 2, the fine tuning structure 4 includes being set to 2 table of actuator It is meshed in face, the rack 411 extended along 1 optical axis direction of optical fiber and the sliding slot 302 for stretching into fixed seat 3 and with the rack 411 It with the gear member 412 that drive rack 411 moves, is moved horizontally with carry-over bar 411 by screwing gear member 412, to realize actuating The translation of device 2.
Further, the gear member 412 includes being circumferentially provided with the auxiliary section 4121 of the gear teeth and being set to auxiliary section The adjustment portion 4122 of 4121 one end, the auxiliary section 4121 stretch into the sliding slot 302 of fixed seat 3 and with 411 phase of the rack Engagement.The relief hole 301 for penetrating and rotating for the auxiliary section 4121 is provided in fixed seat 3.Tooth described in the present embodiment Item 411 is set to the lower surface of actuator 2, but rack 411 can also be set to the upper surface, left surface and right table of actuator 2 Face etc., as long as ensureing rack 411 along 1 optical axis direction of optical fiber, i.e. front-rear direction, extension.
In some embodiments of the utility model, as shown in Figure 3, Figure 4, the fine tuning structure 4 stretches into cunning including end The adjusting bolt 421 of slot 302, adjusting bolt 421 are arranged along 1 optical axis direction of optical fiber and positioned at the rears of actuator 2.Pass through adjusting 421 end of adjusting bolt stretch into the length adjustment actuators 2 of sliding slot 302 in the sliding slot 302 along 1 optical axis of optical fiber translate away from From.
Further, the adjusting bolt 421 is installed on by screw thread in fixed seat 3, the end of adjusting bolt 421 from Sliding slot 302 is stretched at the rear of actuator 2.The rear end face of actuator 2 is close to the end of adjusting bolt 421, to be adjusted by screwing Section bolt 421 adjusts the length that sliding slot 302 is stretched into 421 end of adjusting bolt, adjusts the position in sliding slot 302 of actuator 2.
It is further preferred that as shown in fig. 6, the fine tuning structure 4 further includes the connection for being fixedly arranged on 2 rear end of actuator Part 422, the sliding slot 302 include an accommodating connector 422 and connector 422 are guided to be slided along 1 optical axis direction of optical fiber Connection groove section 3021, connector 422 are placed in the connection groove section 3021 of sliding slot 302, and the rear end face of connector 422 is close to adjusting bolt 421 end is provided with compressed spring 423 between the front end face and the side wall of connection groove section 3021 of connector 422.To no Pipe adjusting bolt 421 is to be screwed in into sliding slot 302 or to screwing out outside sliding slot 302, compressed spring 423 compresses connector always 422, in turn, connector 422 is remained to be fitted closely with adjusting bolt 421 end.This enables to actuator 2 in fixation Structure 5 fixes before actuator 2 state for being just in stable position always, is convenient for application, the fixation of fixed structure 5, ensures to fix Being accurately positioned during the application of structure 5.
In some embodiments of the utility model, as shown in Figure 3, Figure 4, the fixed structure 5 includes connecting for fixed Connect the interconnecting piece 501 of actuator 2 and sliding slot 302.The interconnecting piece 501 can be to be formed by curing by binder, or By welding the welded connection formed.
In some embodiments of the utility model, as shown in fig. 6, the fixed structure 5 stretches into sliding slot 302 including end Hold-down bolt 502, actuator 2 is fixed in sliding slot 302 by hold-down bolt 502.
Further, the hold-down bolt 502 is installed on by screw thread in fixed seat 3, the end of hold-down bolt 502 from Sliding slot 302 is stretched into the side of actuator 2, it is preferred that the hold-down bolt 502 is perpendicular to 1 optical axis of optical fiber.It is further preferred that It is provided with layer protective layer 503 between the end and actuator 2 of the hold-down bolt 502, to avoid hold-down bolt 502 to causing Dynamic device 2 causes to damage.Plastic material, such as PET can be used in the protective layer 503;Metal material, tempered glass can also be used Deng the material with certain degree of hardness or cushioning effect.When the material of protective layer 503 is harder, the area of the protective layer 503 The generally higher than area of the distal end faces of hold-down bolt 502 avoids stress from concentrating and make protective layer 503 to disperse pressing force Actuator 2 is caused to damage.
Optionally, as shown in Figure 2 and Figure 3, the actuator 2 is internally provided with the through-hole passed through for optical fiber 1, and optical fiber 1 is solid Surely it is set in the through-hole, is such as fixedly arranged in through-hole by bonding.
In some embodiments of the utility model, the actuator 2 may include piezoelectric actuator, electrostriction actuating It is one or more in all kinds of actuating elements that device, magnetic deformation actuator etc. are driven by electric signal.
In some exemplary embodiments of the utility model, the actuator 2 may include piezoelectric bimorph 201 or piezoelectricity pottery Any one in porcelain tube 202 or two kinds, as shown in Figure 2 and Figure 3.The actuator 2 may also comprise supports light in cantilever fashion The maintaining part 2031 of fibre 1 and the piezoelectric ceramic piece 2032 being arranged in the outer surface of maintaining part 2031, as shown in Figure 4, Figure 5, piezoelectricity Potsherd 2032 drives maintaining part 2031 to vibrate under the driving of buckling voltage.
Further, the actuator 2 can be vibrated along one, two or more directions perpendicular to 1 optical axis of optical fiber.
In some embodiments of the utility model, as shown in Figure 7, Figure 8, the optical fiber scanning may also include a driving Fixed seat 3 is along the second actuation means 6 vibrated perpendicular to 1 optical axis direction of optical fiber.
As typical embodiment, second actuation means 6 include that a pedestal 601 and a fixing end are fixed on The free end of actuator 602 on pedestal 601, actuator 602 is fixedly connected with fixed seat 3.The actuator 602 may include piezoelectricity One kind in all kinds of actuating elements that actuator, electrostrictive actuator, magnetic deformation actuator etc. are driven by electric signal or It is a variety of.Further, which may include any one in piezoelectric bimorph or piezoelectric ceramic tube or two kinds, should Actuator 602 can also include that the axis connecting pole parallel with 1 optical axis of optical fiber and the piezoelectricity being arranged in the outer surface of connecting pole are made pottery Tile, the free end that piezoelectric ceramic piece is used to be drivingly connected column are vibrated along perpendicular to the direction of 1 optical axis of optical fiber.
As the embodiment of two-dimension vibration scanning, the actuator 2 shakes along one perpendicular to 1 optical axis direction of optical fiber It is dynamic, while the second actuation means 6 drive fixed seat 3 along one perpendicular to 1 optical axis of optical fiber and different from 2 side of vibration of the actuator To direction vibrate so that 1 transmitting terminal of optical fiber along two radial vibrations, realizes optical-fiber two-dimensional scanning.
In more typical embodiment, the actuator 2 is the first piezoelectric bimorph along X axis vibration, described the The actuator 602 of two actuation means 6 is the second piezoelectric bimorph along Y axis vibration.
The utility model is limited it should be noted that above-described embodiment illustrates rather than the utility model, And those skilled in the art can design alternative embodiment without departing from the scope of the appended claims.In right In it is required that, any reference mark between bracket should not be configured to limitations on claims.Word "comprising" or " packet Include " do not exclude the presence of element or step not listed in the claims.Word "a" or "an" before element is not arranged Except there are multiple such elements.The use of word first, second, and third does not indicate that any sequence, can be by these lists Word is construed to title.
One or more technical solution in the utility model embodiment, at least has the following technical effect that or excellent Point:
Position of the actuator in sliding slot is adjusted by micro-adjusting mechanism, adjusts the length that actuator exceeds fixed seat, i.e., in fact Now to the adjusting of the jib-length of actuator so that the intrinsic frequency phase of the intrinsic frequency of the cantilever of actuator and optical fiber cantilever Closely, amplified using the subresonance of actuator and optical fiber, thereby may be ensured that the cantilever free end of optical fiber obtains peak swing, make Optical fiber scanning is operated in scan amplitude.
All features disclosed in this specification or disclosed all methods or in the process the step of, in addition to mutually exclusive Feature and/or step other than, can combine in any way.
Any feature disclosed in this specification (including any accessory claim, abstract and attached drawing), except non-specifically chatting It states, can be equivalent by other or be replaced with similar purpose alternative features.That is, unless specifically stated, each feature is An example in a series of equivalent or similar characteristics.
The utility model is not limited to specific implementation mode above-mentioned.The utility model expands to any in this specification The new feature of middle disclosure or any new combination, and disclose any new method or process the step of or any new group It closes.

Claims (10)

1. a kind of fibre optic scanner structure, which is characterized in that including:
Optical fiber (1);
Actuator (2) supports optical fiber (1) and the cantilever free end of optical fiber (1) is driven to be vibrated in cantilever fashion;
Fixed seat (3) has the sliding slot (302) for allowing actuator (2) to be translated along optical fiber (1) optical axis;
Fine tuning structure (4) is used to drive actuator (2) to be translated along optical fiber (1) optical axis in the sliding slot (302);
Fixed structure (5) is used to the actuator (2) after translation being fixed in the sliding slot (302);
Optical fiber (1) guides light and projects the light from the cantilever free end.
2. a kind of fibre optic scanner structure as described in claim 1, which is characterized in that the fine tuning structure (4) includes setting It is placed in actuator (2) surface, the rack (411) extended along optical fiber (1) optical axis direction and the sliding slot (302) for stretching into fixed seat (3) The interior and gear member (412) moved with drive rack (411) that is meshed with the rack (411).
3. a kind of fibre optic scanner structure as claimed in claim 2, which is characterized in that the gear member (412) includes week To the auxiliary section (4121) for being provided with the gear teeth and it is set to the adjustment portion (4122) of auxiliary section (4121) one end, the auxiliary section (4121) it stretches into the sliding slot (302) of fixed seat (3) and is meshed with the rack (411).
4. a kind of fibre optic scanner structure as described in claim 1, which is characterized in that the fine tuning structure (4) includes end The adjusting bolt (421) of sliding slot (302) is stretched at end, and adjusting bolt (421) is arranged along optical fiber (1) optical axis direction and is located at actuator (2) rear.
5. a kind of fibre optic scanner structure as claimed in claim 4, which is characterized in that the adjusting bolt (421) passes through Screw thread is installed in fixed seat (3), and sliding slot (302) is stretched into the end of adjusting bolt (421) from the rear of actuator (2).
6. a kind of fibre optic scanner structure as claimed in claim 4, which is characterized in that the fine tuning structure (4) further includes It is fixedly arranged on the connector (422) of actuator (2) rear end, the sliding slot (302) includes an accommodating connector (422) and draws The connection groove section (3021) that connector (422) is slided along optical fiber (1) optical axis direction is led, connector (422) is placed in sliding slot (302) The rear end face of connection groove section (3021), connector (422) is close to the end of adjusting bolt (421), the front end face of connector (422) Compressed spring (423) is provided between the side wall of connection groove section (3021).
7. a kind of fibre optic scanner structure as described in claim 1, which is characterized in that the fixed structure (5) includes using In the interconnecting piece (501) for being fixedly connected with actuator (2) and sliding slot (302).
8. a kind of fibre optic scanner structure as described in claim 1, which is characterized in that the fixed structure (5) includes end The hold-down bolt (502) of sliding slot (302) is stretched at end, and actuator (2) is fixed in sliding slot (302) by hold-down bolt (502).
9. a kind of fibre optic scanner structure as described in claim 1, which is characterized in that the actuator (2) includes piezoelectricity It is one or more in actuator, electrostrictive actuator or magnetic deformation actuator.
10. a kind of fibre optic scanner structure as described in claim 1, which is characterized in that further include a driving fixed seat (3) Along the second actuation means (6) perpendicular to the vibration of optical fiber (1) optical axis direction.
CN201721813647.1U 2017-12-22 2017-12-22 A kind of fibre optic scanner structure Active CN207689755U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109669267A (en) * 2019-01-18 2019-04-23 成都理想境界科技有限公司 A kind of scan actuator and fibre optic scanner
CN111381364A (en) * 2018-12-29 2020-07-07 成都理想境界科技有限公司 Optical fiber scanner
CN111381363A (en) * 2018-12-29 2020-07-07 成都理想境界科技有限公司 Scanning driver and optical fiber scanner
CN112595408A (en) * 2020-12-10 2021-04-02 四川度飞科技有限责任公司 Novel dynamic resonance sensing device
CN113741027A (en) * 2020-05-27 2021-12-03 成都理想境界科技有限公司 Grating type scanning actuator and optical fiber scanner

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111381364A (en) * 2018-12-29 2020-07-07 成都理想境界科技有限公司 Optical fiber scanner
CN111381363A (en) * 2018-12-29 2020-07-07 成都理想境界科技有限公司 Scanning driver and optical fiber scanner
CN111381363B (en) * 2018-12-29 2022-11-08 成都理想境界科技有限公司 Scanning driver and optical fiber scanner
CN109669267A (en) * 2019-01-18 2019-04-23 成都理想境界科技有限公司 A kind of scan actuator and fibre optic scanner
CN109669267B (en) * 2019-01-18 2021-01-05 成都理想境界科技有限公司 Scanning actuator and optical fiber scanner
CN113741027A (en) * 2020-05-27 2021-12-03 成都理想境界科技有限公司 Grating type scanning actuator and optical fiber scanner
CN113741027B (en) * 2020-05-27 2024-03-08 成都理想境界科技有限公司 Grating type scanning actuator and optical fiber scanner
CN112595408A (en) * 2020-12-10 2021-04-02 四川度飞科技有限责任公司 Novel dynamic resonance sensing device

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