CN207977351U - Piezoelectric device, optical fiber scanning driver, fibre-optic scanner and projection arrangement - Google Patents
Piezoelectric device, optical fiber scanning driver, fibre-optic scanner and projection arrangement Download PDFInfo
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- CN207977351U CN207977351U CN201820285587.9U CN201820285587U CN207977351U CN 207977351 U CN207977351 U CN 207977351U CN 201820285587 U CN201820285587 U CN 201820285587U CN 207977351 U CN207977351 U CN 207977351U
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 60
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 18
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- 241000446313 Lamella Species 0.000 description 2
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- 241000276425 Xiphophorus maculatus Species 0.000 description 1
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Abstract
The utility model discloses a kind of piezoelectric device, optical fiber scanning driver, fibre-optic scanner and projection arrangements, are related to optical imaging field.Piezoelectric device includes dielectric layer and fits in the piezoelectric layer of dielectric layer, and piezoelectric device includes fixing end and free end, and piezoelectric device extends along the direction of fixing end to free end.The thickness of piezoelectric layer is gradually reduced along the direction of fixing end to free end or the thickness of the end of the close free end of piezoelectric layer is gradually reduced along the direction of fixing end to free end.Optical fiber scanning driver includes piezoelectric device.Fibre-optic scanner includes optical fiber scanning driver and is set to the scanning optical fiber of optical fiber scanning driver.Projection arrangement includes fibre-optic scanner.Piezoelectric device is used as optic fibre cantilev, and can increase the amplitude of fluctuation of vibration to ensure imaging clearly.
Description
Technical field
The utility model is related to optical imaging fields more particularly to a kind of piezoelectric device, optical fiber scanning driver, optical fiber to sweep
Imaging apparatus and projection arrangement.
Background technology
Compared to traditional projection display apparatus, the outstanding advantage that laser projection is shown is exactly volume smaller, Ke Yiji
At in various handheld devices, such as：Embedded mobile phone or the micro projector for making independent centimetre of scale dimensions, to side
Just user carries, and carries out Projection Display whenever and wherever possible.
Optical fiber scanning is a kind of realization method that laser projection is shown, scanner driver is (such as：Piezoelectric actuator, electromagnetism drive
Dynamic device etc.) bending vibration under electric signal or electromagnetic signal excitation, fiber-optic vibration is driven, is being imaged spot projection by optical fiber
On face, to form image.
Currently, optical fiber scanning driver is generally passed through in the prior art based on piezoelectric driving plate or Piezoelectric Driving pipe
Increase the driving voltage of piezoelectric driving plate or Piezoelectric Driving pipe to increase the sweep speed and amplitude of fluctuation of optical fiber scanning driver
Degree provides the purpose with high refresh rate and large-sized image to realize, but uses high voltage drive optical fiber scanning driver,
The driving circuit complexity of fibre-optic scanner can be caused to increase, and then hardware cost is caused to increase.
Utility model content
A kind of piezoelectric device of the utility model embodiment offer, optical fiber scanning driver, fibre-optic scanner and projection dress
It sets, piezoelectric device is used as optic fibre cantilev, and can increase the amplitude of fluctuation of vibration to ensure imaging clearly.
In order to realize that above-mentioned purpose of utility model, the utility model embodiment first aspect provide a kind of piezoelectric device,
Suitable for optical fiber scanning driver.Piezoelectric device includes dielectric layer and fits in the piezoelectric layer of dielectric layer, and piezoelectric device includes solid
Fixed end and free end, piezoelectric device extend along the direction of fixing end to free end.The thickness of piezoelectric layer is along fixing end to freedom
The direction at end is gradually reduced or the thickness of the end of the close free end of piezoelectric layer gradually subtracts along the direction of fixing end to free end
It is small.
In the utility model preferred embodiment, above-mentioned piezoelectric device is bimorph formula piezoelectric device, dielectric layer
Thickness is uniformly distributed.
In the utility model preferred embodiment, above-mentioned piezoelectric device is bimorph formula piezoelectric device, piezoelectricity device
The width of part is gradually reduced along the direction of fixing end to free end or piezoelectric device is fixed close to the width edge of the end of free end
End to the direction of free end is gradually reduced.
In the utility model preferred embodiment, above-mentioned dielectric layer is cylindric dielectric layer, and cylindric dielectric layer is along it
Multiple mounting grooves are axially evenly distributed with, the number of piezoelectric layer merges with the matching of the number of mounting groove may be disposed at mounting groove.
In the utility model preferred embodiment, the depth of above-mentioned each mounting groove is along the direction of fixing end to free end
It is gradually reduced.
In the utility model preferred embodiment, above-mentioned dielectric layer is rectangular-shape dielectric layer, rectangular-shape dielectric layer
The outer surfaces of opposite two side walls can be respectively arranged with piezoelectric layer.
In the utility model preferred embodiment, the thickness of above-mentioned dielectric layer is gradually reduced along first end to second end.
The utility model embodiment second aspect provides a kind of optical fiber scanning driver, including above-mentioned piezoelectric device.
The utility model embodiment third aspect provides a kind of fibre-optic scanner, including the driving of above-mentioned optical fiber scanning
Device and scanning optical fiber, scanning optical fiber are set to the surface of the piezoelectric layer of optical fiber scanning driver and prolong along the extending direction of piezoelectric layer
It stretches.
The utility model embodiment fourth aspect provides a kind of projection arrangement, including above-mentioned fibre-optic scanner.
One or more technical solution in the utility model embodiment, at least has the following technical effect that or excellent
Point：
The piezoelectric device that the utility model embodiment provides can be suitable for the optic fibre cantilev of optical fiber scanning driver,
Overall thickness is gradually reduced along the direction of fixing end to free end so that its vibration frequency increases, to increase its amplitude of fluctuation；Together
When, driving voltage and reduction vibration damping can also be reduced since the overall thickness of piezoelectric device is gradually reduced, to further
Increase amplitude of fluctuation, improves the precision of fibre-optic scanner, ensure the imaging clearly of projection arrangement.In addition, piezoelectric device has
Simple in structure, the features such as cost is relatively low and is easily assembled.
Description of the drawings
Fig. 1 is the structural schematic diagram at the first visual angle of the optical fiber scanning driver that the utility model first embodiment provides；
Fig. 2 is the structural schematic diagram at the second visual angle of the optical fiber scanning driver that the utility model first embodiment provides；
Fig. 3 is the structural schematic diagram for the first dielectric layer that the utility model first embodiment provides；
Fig. 4 is the structural schematic diagram for second of dielectric layer that the utility model first embodiment provides；
Fig. 5 is the structural schematic diagram for another piezoelectric device that the utility model first embodiment provides；
Fig. 6 is the structural schematic diagram for the optical fiber scanning driver that the utility model second embodiment provides；
Fig. 7 is the structural schematic diagram at the first visual angle of the optical fiber scanning driver that the utility model 3rd embodiment provides；
Fig. 8 is the structural schematic diagram at the second visual angle of the optical fiber scanning driver that the utility model 3rd embodiment provides；
Fig. 9 is the optical fiber scanning activation configuration schematic diagram that the utility model fourth embodiment provides.
Icon：100- optical fiber scanning drivers；110- pedestals；120- piezoelectric devices；121- fixing ends；The free ends 122-；
123- dielectric layers；The first piezoelectric layers of 124-；The second piezoelectric layers of 125-；130- scans optical fiber；
200- optical fiber scanning drivers；210- pedestals；220- piezoelectric devices；221- fixing ends；The free ends 222-；223- is situated between
Matter layer；The first piezoelectric layers of 224-；The second piezoelectric layers of 225-；The first deformations of 226-；The second deformations of 227-；230- scans light
It is fine；
300- optical fiber scanning drivers；310- pedestals；320- piezoelectric devices；321- fixing ends；The free ends 322-；323- is situated between
Matter layer；The first mounting grooves of 3231-；The second mounting grooves of 3232-；3233- third mounting grooves；The 4th mounting grooves of 3234-；324- piezoelectricity
Layer；The first piezoelectric layers of 3241-；The second piezoelectric layers of 3242-；3243- third piezoelectric layers；The 4th piezoelectric layers of 3244-；
400- optical fiber scanning drivers；410- pedestals；420- piezoelectric devices；421- fixing ends；The free ends 422-；423- is situated between
Matter layer；424- piezoelectric layers；The first piezoelectric layers of 4241-；The second piezoelectric layers of 4242-；4243- third piezoelectric layers；The 4th piezoelectricity of 4244-
Layer.
Specific implementation mode
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts
The every other embodiment obtained, shall fall within the protection scope of the present invention.
First embodiment
The utility model embodiment provides a kind of projection arrangement comprising fibre-optic scanner (figure is not painted).
Referring to Fig.1 and 2, fibre-optic scanner includes optical fiber scanning driver 100 and scanning optical fiber 130.Optical fiber is swept
It includes pedestal 110 and piezoelectric device 120 to retouch driver 100.Piezoelectric device 120 includes the fixing end 121 being oppositely arranged and freedom
End 122, wherein for being connect with pedestal 110, the direction that free end 122 is directed away from pedestal 110 extends fixing end 121.Scanning
Optical fiber 130 is set to the surface of the piezoelectric layer of piezoelectric device 120 and extends to form cantilever along the extending direction of piezoelectric layer.
Piezoelectric device 120 provided in this embodiment is bimorph formula piezoelectric device.Piezoelectric device 120 includes dielectric layer
123, the first piezoelectric layer 124 and the second piezoelectric layer 125.First piezoelectric layer 124 and the second piezoelectric layer 125 are relatively arranged on dielectric layer
123 both sides.
Please continue to refer to Fig. 1 and Fig. 2, dielectric layer 123 is similar to platy structure comprising the first surface being oppositely arranged
(figure does not mark) and second surface (figure does not mark).One end of dielectric layer 123 is connect with pedestal 110, and the other end is directed away from base
The direction of seat 110 extends.
First piezoelectric layer 124 is set to first surface and extends along the direction of fixing end 121 to free end 122, also, the
One end of one piezoelectric layer 124 is connect with pedestal 110, and the other end of the first piezoelectric layer 124 extends to the separate pedestal of dielectric layer 123
110 end.
Second piezoelectric layer 125 is set to second surface and extends along the direction of fixing end 121 to free end 122, also, the
One end of two piezoelectric layers 125 is connect with pedestal 110, and the other end of the second piezoelectric layer 125 extends to the separate pedestal of dielectric layer 123
110 end.
Hold above-mentioned, one end of one end of dielectric layer 123, one end of the first piezoelectric layer 124 and the second piezoelectric layer 125 forms solid
The other end of fixed end 121, the other end of dielectric layer 123, the other end of the first piezoelectric layer 124 and the second piezoelectric layer 125 is formed certainly
By end 122.It is understood that dielectric layer 123, the first piezoelectric layer 124 and the second piezoelectric layer 125 form optic fibre cantilev.
Further, the thickness of the first piezoelectric layer 124 is gradually reduced along the direction of fixing end 121 to free end 122, and second
The thickness of piezoelectric layer 125 is gradually reduced along the direction of fixing end 121 to free end 122.Also that is, when the first piezoelectric layer 124 is arranged
When first surface, between the end face of the close fixing end 121 of first surface to the first piezoelectric layer 124 and separate first surface
Distance is more than first surface to the close free end 122 of the first piezoelectric layer 124 and the distance between the end face of separate first surface.
Similarly, therefore not to repeat here for second piezoelectric layer 125 and the first piezoelectric layer 124.
Also that is, the first piezoelectric layer 124 and the second piezoelectric layer 125 are respectively along the direction thickness of fixing end 121 to free end 122
It is gradually reduced so that optic fibre cantilev, which is formed, is similar to wedge structure.Setting in this way can increase piezoelectric device 120
Amplitude of fluctuation reduces by 120 driving voltage of piezoelectric device and reduces mechanical oscillation damping, to realize projection arrangement imaging clearly.
Specified otherwise is needed, in some realization methods of the present embodiment, the thickness of dielectric layer 123 is along fixing end
121 remain unchanged to the direction of free end 122, such as Fig. 1 and Fig. 2 shows the case where, the thickness of dielectric layer 123 is along fixing end 121
It is remained unchanged to the direction of free end 122, that is, 123 thickness of dielectric layer is uniformly distributed.
In other realization methods of the present embodiment, as shown in figure 3, the thickness of dielectric layer 123 along fixing end 121 to from
It is gradually reduced by the direction at end 122.
In still other realization method of the present embodiment, as shown in figure 4, the end of the close free end 122 of dielectric layer 123
Thickness be gradually reduced along the direction of fixing end 121 to free end 122.
Hold above-mentioned, the thickness of the thickness of dielectric layer 123, the thickness of the first piezoelectric layer 124 and the second piezoelectric layer 125 edge simultaneously
When the direction of fixing end 121 to free end 122 is gradually reduced, the optic fibre cantilev amplitude of oscillation can be further increased and reduce optical fiber and hanged
Arm beam driving voltage and vibration damping.
Fig. 5 is please referred to, in some realization methods of the present embodiment, the end of the close free end 122 of the first piezoelectric layer 124
The thickness in portion is gradually reduced along the direction of fixing end 121 to free end 122.Similarly, the close free end of the second piezoelectric layer 125
The thickness of 122 end is gradually reduced along the direction of fixing end 121 to free end 122.Certainly, first in the realization method
Piezoelectric layer 124 and the second piezoelectric layer 125 can also be combined with the dielectric layer 123 shown in Fig. 3 and Fig. 4, and therefore not to repeat here.
Scanning optical fiber 130 can be set to the first piezoelectric layer 124 and extend along the extending direction of the first piezoelectric layer 124, sweep
The second piezoelectric layer 125 can also be set to and extend along the extending direction of the second piezoelectric layer 125 by retouching optical fiber 130, not gone to live in the household of one's in-laws on getting married herein
It states.
The resonant frequency of the bending vibration of cantilever beam can be expressed as：
Wherein：A be with twin lamella thickness, thickness of dielectric layers and twin lamella and medium relative density relevant one be
Number, λiIt is the solution of transcendental equation, t is overall thickness, and L is length, EpFor elasticity modulus, ρpFor line density.
By above formula as can be seen that cantilever beam resonant frequency can in the case that when total thickness t reduces, length L is constant
It realizes and improves；Meanwhile total thickness t is gradually reduced makes vibration damping smaller, is further conducive to increase amplitude of fluctuation and reduce to drive
Dynamic voltage.
When piezoelectric device 120 (i.e.：Optic fibre cantilev) total thickness t reduce when, situation constant optical fiber cantilever beam length L
Under, the vibration frequency f of optic fibre cantilev is improved, and is conducive to increase amplitude of fluctuation；Simultaneously as total thickness t is gradually reduced, make drive
Dynamic voltage and vibration damping reduce, and are further conducive to increase amplitude of fluctuation.Therefore, the cantilever of optical fiber scanning driver 100
Beam amplitude of oscillation with bigger in vibration processes, achievees the purpose that improving performance.
Hold it is above-mentioned, the overall thickness of piezoelectric device 120 is gradually reduced along the direction of fixing end 121 to free end 122 so that its
Vibration frequency increases, to increase its amplitude of fluctuation；It can also be dropped simultaneously as the overall thickness of piezoelectric device 120 is gradually reduced
Low driving voltage and reduction vibration damping improve the precision of fibre-optic scanner to further increase amplitude of fluctuation, ensure
The imaging clearly of projection arrangement.
Second embodiment
Fig. 6 is please referred to, the present embodiment provides a kind of optical fiber scanning drivers 200 comprising pedestal 210 and piezoelectric device
220.Piezoelectric device 220 includes the fixing end 221 being oppositely arranged and free end 222, wherein fixing end 221 is used for and pedestal 210
Connection, the direction that free end 222 is directed away from pedestal 210 extend.Scanning optical fiber (figure is not painted) is set to piezoelectric device 220
The surface of piezoelectric layer simultaneously extends to form cantilever along the extending direction of piezoelectric layer.
Piezoelectric device 220 provided in this embodiment is bimorph formula piezoelectric device.Piezoelectric device 220 includes dielectric layer
223, the first piezoelectric layer 224 and the second piezoelectric layer 225.Wherein, the structure and connection relation and first embodiment of dielectric layer 223
Dielectric layer 123 is similar, and dielectric layer 223 (is schemed not including being oppositely arranged and being respectively used to the first surface of the first piezoelectric layer 224 of fitting
Mark) and second surface (scheme do not mark) for be bonded the second piezoelectric layer 225；The structure of first piezoelectric layer 224 and connection are closed
System is similar with the first piezoelectric layer 124 of first embodiment；The structure and connection relation of second piezoelectric layer 225 and first embodiment
Second piezoelectric layer 125 is similar.It is appreciated that dielectric layer 223, the first piezoelectric layer 224 and the second piezoelectric layer 225 form optical fiber cantilever
Beam.
The thickness of dielectric layer 223 can be remained unchanged along the direction of fixing end 221 to free end 222, that is, be uniformly distributed；It is situated between
The thickness of matter layer 223 can also be gradually reduced along the direction of fixing end 221 to free end 222；The close free end of dielectric layer 223
The thickness of 222 end can also be gradually reduced along the direction of fixing end 221 to free end 222, and therefore not to repeat here.
The thickness of first piezoelectric layer 224 is gradually reduced along the direction of fixing end 221 to free end 222 or the first piezoelectric layer
The thickness of the end of 224 close free end 222 is gradually reduced along the direction of fixing end 221 to free end 222.Similarly, second
The thickness of piezoelectric layer 225 is gradually reduced along the direction of fixing end 221 to free end 232 or the close freedom of the second piezoelectric layer 225
The thickness of the end at end 222 is gradually reduced along the direction of fixing end 221 to free end 222.Therefore not to repeat here.
Further, the end of the close free end 222 of piezoelectric device 120 has the first deformations 226 being oppositely arranged
With the second deformations 227, also, the first deformations 226 are set to a side wall perpendicular to first surface and second surface, and
Two deformations 227 are set to another side wall perpendicular to first surface and second surface.Also that is, optic fibre cantilev is far from pedestal
210 end set has the first deformations 226 and the second deformations 227.
First deformations 226 sequentially pass through the first piezoelectric layer 224, dielectric layer 223 and the second piezoelectric layer 225, also, first
Deformations 226 are increasingly towards the second deformations 227 along the direction perpendicular to fixing end 221 to free end 222 and draw close.Second deformation
Portion 227 sequentially passes through the first piezoelectric layer 224, dielectric layer 223 and the second piezoelectric layer 225, also, the second deformations 227 are along vertical
The first deformations 226 are increasingly towards in the direction of fixing end 221 to free end 222 to draw close.Piezoelectricity is realized in setting in this way
The width of the first surface of the end of the close free end 222 of device 220 is gradually reduced the close free end with dielectric layer 223
The width of the second surface of 222 end is gradually reduced, also that is, the width of the end of the close free end 222 of piezoelectric device 220
Degree is gradually reduced along the direction of fixing end 221 to free end 222.
In addition, the both ends of the first deformations 226 can extend respectively to fixing end 221 and free end 222；Similarly, second
The both ends of deformations 227 can also extend respectively to fixing end 221 and free end 222.In such manner, it is possible to the width of piezoelectric device 220
Degree is gradually reduced along the direction of fixing end 221 to free end 222.
Need specified otherwise, the width of first surface and the width of second surface that can reduce simultaneously, first surface
Width and the width of second surface can not also reduce simultaneously.
It holds above-mentioned, passes through and the first deformations 226 and the second deformations 227 are set so that the width of piezoelectric device 220 is along solid
The direction of fixed end 221 to free end 222 is gradually reduced or piezoelectric device 220 is fixed close to the width edge of the end of free end 221
End 221 is gradually reduced to the direction of free end 222, can further increase the amplitude of fluctuation of optic fibre cantilev, and reduce
Driving voltage and vibration damping is reduced, to realize projection arrangement imaging clearly.
3rd embodiment
Please refer to Fig. 7 and Fig. 8, the utility model embodiment provides a kind of optical fiber scanning driver 300 comprising pedestal
310 and piezoelectric device 320.Piezoelectric device 320 includes the fixing end 321 being oppositely arranged and free end 322, wherein fixing end 321
For being connect with pedestal 310, the direction that free end 322 is directed away from pedestal 310 extends.Scanning optical fiber (figure is not painted) is set to
The surface of the piezoelectric layer 324 of piezoelectric device 320 simultaneously extends to form cantilever along the extending direction of piezoelectric layer 324.
A kind of four tube-separating type piezoelectric devices are present embodiments provided, piezoelectric device 320 includes dielectric layer 323 and piezoelectric layer
324.Wherein, one end of dielectric layer 323 is connect with pedestal 310, and the direction that the other end is directed away from pedestal 310 extends.Piezoelectric layer
324 are set to piezoelectric layer 324 along the extending direction of dielectric layer 323.
Dielectric layer 323 is cylindric dielectric layer 323.It can be hollow to need specified otherwise, cylindric dielectric layer 323
Structure can also be solid construction.Preferably, dielectric layer 323 is hollow shape structure, it is outstanding that optical fiber can be further increased in this way
The amplitude of fluctuation of arm beam.
The diameter (i.e. thickness) of cylindric dielectric layer 323 can be kept not along the direction of fixing end 321 to free end 322
Become, the diameter of cylindric dielectric layer 323 can also be gradually reduced along the direction of fixing end 321 to free end 322.When cylindrical shape is situated between
When matter layer 323 is hollow-core construction, it is understood that make the wall thickness of cylindric dielectric layer 323 along fixing end 321 to free end 322
Direction is gradually reduced.
Cylindric dielectric layer 323 is evenly distributed with the first mounting groove 3231, the second mounting groove 3232, third peace along its axial direction
Tankage 3233 and the 4th mounting groove 3234.First mounting groove 3231 and third mounting groove 3233 are oppositely arranged, the second mounting groove
3232 and the 4th mounting groove 3234 be oppositely arranged.It is appreciated that the installation of the first mounting groove 3231, the second mounting groove 3232, third
Slot 3233 and the 4th mounting groove 3234 are arranged along the axial circumference array of cylindric dielectric layer 323, also, each mounting groove is along Jie
Periphery wall of the extending direction of matter layer 323 through cylindric dielectric layer 323.
Preferably, the depth of each mounting groove is gradually reduced along the direction of fixing end 321 to free end 322.Also that is,
The notch of 321 end of close fixing end of one mounting groove 3231 is close more than the first mounting groove 3231 to the distance between slot bottom
The notch of 322 end of free end is the distance between to slot bottom；The notch of 321 end of close fixing end of second mounting groove 3232 is extremely
The distance between slot bottom is more than the notch of 322 end of close free end of the second mounting groove 3232 the distance between to slot bottom；The
The notch of 321 end of close fixing end of three mounting grooves 3233 is close more than third mounting groove 3233 to the distance between slot bottom
The notch of 322 end of free end is the distance between to slot bottom；The notch of 321 end of close fixing end of 4th mounting groove 3234 is extremely
The distance between slot bottom is more than the notch of 322 end of close free end of the 4th mounting groove 3234 the distance between to slot bottom.
Piezoelectric layer 324 includes the first piezoelectric layer 3241, the second piezoelectric layer 3242, third piezoelectric layer 3243 and the 4th piezoelectric layer
3244.The thickness of piezoelectric layer 324 is gradually reduced along the direction of fixing end 321 to free end 322, also that is, the first piezoelectric layer 3241
Thickness, the thickness of the second piezoelectric layer 3242, the thickness of third piezoelectric layer 3243 and the 4th piezoelectric layer 3244 thickness edge respectively
The direction of fixing end 321 to free end 322 is gradually reduced.It is arranged in this way, can realizes that the increase of piezoelectric device 320 is swung
Amplitude reduces driving voltage and reduces the effect of vibration damping, to realize projection arrangement imaging clearly
Wherein, the first piezoelectric layer 3241 is set to the first mounting groove 3231, and preferably, the first piezoelectric layer 3241 is remote
The peripheral surface flush of end face and cylindric dielectric layer 323 from 3231 slot bottom of the first mounting groove.Second piezoelectric layer 3242 is arranged
In the second mounting groove 3232, and preferably, end face and circle of second piezoelectric layer 3242 far from 3232 slot bottom of the second mounting groove
The peripheral surface flush of tubular dielectric layer 323.Third piezoelectric layer 3243 is set to third mounting groove 3233, and preferably,
The peripheral surface flush of end face of the third piezoelectric layer 3243 far from 3233 slot bottom of third mounting groove and cylindric dielectric layer 323.The
Four piezoelectric layers 3244 are set to the 4th mounting groove 3234, and preferably, the 4th piezoelectric layer 3244 far from the 4th mounting groove
The peripheral surface flush of the end face of 3234 slot bottoms and cylindric dielectric layer 323.
In another realization method of the present embodiment, the close free end 322 of the first piezoelectric layer 3241 can also be
The thickness of end is gradually reduced along fixing end 321 to free end 322, the end of the close free end 322 of the second piezoelectric layer 3242
Thickness be gradually reduced along fixing end 321 to free end 322, the thickness of the end of the close free end 322 of third piezoelectric layer 3243
Degree is gradually reduced the thickness edge with the end of the close free end 322 of the 4th piezoelectric layer 3244 along fixing end 321 to free end 322
Fixing end 321 to free end 322 is gradually reduced, and therefore not to repeat here.
It should be further noted that when cylindric dielectric layer 323 is only in the first mounting groove 3231 and third mounting groove
3233 when being respectively set the first piezoelectric layer 3241 and third piezoelectric layer 3243, you can is formed real similar to first embodiment or second
Apply the bimorph formula piezoelectric device of example.Similarly, when cylindric dielectric layer 323 is only installed in the second mounting groove 3232 and the 4th
When the second piezoelectric layer 3242 and four piezoelectric layers 3244 is respectively set in slot 3234, i.e., can also it be formed similar to first embodiment or
The bimorph formula piezoelectric device of two embodiments.
Fourth embodiment
Fig. 9 is please referred to, the present embodiment provides a kind of optical fiber scanning driver 400, the optical fiber scanning with 3rd embodiment
Driver 300 is roughly the same, and the two is square rod formula piezoelectric device difference lies in the piezoelectric device 420 of the present embodiment.
Piezoelectric device 420 includes the fixing end 421 being oppositely arranged and free end 422, wherein fixing end 421 is used for and base
Seat 410 connects, and the direction that free end 422 is directed away from pedestal 410 extends.
Piezoelectric device 420 includes dielectric layer 423 and piezoelectric layer 424.It is understood that the piezoelectric device of the present embodiment
420 dielectric layer 423 is rectangular-shape dielectric layer.
Four lateral walls of rectangular-shape dielectric layer 423 are the first side wall (figure does not mark) respectively, (figure is not for second sidewall
Standard), third side wall (figure non-standard) and the 4th side wall (scheming non-standard).Wherein, the first side wall and third side wall are oppositely arranged,
Second sidewall and the 4th side wall are oppositely arranged.The both side edges of the first side wall are connect with second sidewall and the 4th side wall respectively, third
End that the both side edges of side wall are connect with the separate and the first side wall of second sidewall respectively and the 4th side wall are far from the first side wall
End connects.
Rectangular-shape dielectric layer 423 can be hollow-core construction, can also be solid construction.Preferably, rectangular-shape is situated between
Matter layer 423 is hollow shape structure, can further increase the amplitude of fluctuation of optic fibre cantilev in this way.
In addition, the thickness of rectangular-shape dielectric layer 423 can be remained unchanged along the direction of fixing end 421 to free end 422,
The thickness of rectangular-shape dielectric layer 423 can also be gradually reduced along the direction of fixing end 421 to free end 422.Work as rectangular-shape
When dielectric layer 423 is hollow-core construction, it is understood that make the wall thickness of rectangular-shape dielectric layer 423 along fixing end 421 to free end
422 direction is gradually reduced.
Piezoelectric layer 424 includes the first piezoelectric layer 4241, the second piezoelectric layer 4242, third piezoelectric layer 4243 and the 4th piezoelectric layer
4244.The thickness of piezoelectric layer 424 is gradually reduced along the direction of fixing end 421 to free end 422.Also that is, the first piezoelectric layer 4241
Thickness, the thickness of the second piezoelectric layer 4242, the thickness of third piezoelectric layer 4243 and the 4th piezoelectric layer 4244 thickness edge respectively
The direction of fixing end 421 to free end 422 is gradually reduced.
Wherein, the first piezoelectric layer 4241 fits in the first side wall.Second piezoelectric layer 4242 fits in second sidewall.Third pressure
Electric layer 4243 fits in third side wall.4th piezoelectric layer 4244 fits in the 4th side wall.
In another realization method of the present embodiment, the close free end 422 of the first piezoelectric layer 4241 can also be
The thickness of end is gradually reduced along fixing end 421 to free end 422, the end of the close free end 422 of the second piezoelectric layer 4242
Thickness be gradually reduced along fixing end 421 to free end 422, the thickness of the end of the close free end 422 of third piezoelectric layer 4243
Degree is gradually reduced the thickness edge with the end of the close free end 422 of the 4th piezoelectric layer 4244 along fixing end 421 to free end 422
Fixing end 421 to free end 422 is gradually reduced, and therefore not to repeat here.
It should be further noted that when rectangular-shape dielectric layer 423 is only respectively set in the first side wall and third side wall
When the first piezoelectric layer 4241 and third piezoelectric layer 4243, you can form double piezoelectricity similar to the first embodiment or the second embodiment
Chip-type piezoelectric device.Similarly, when only the second piezoelectricity is respectively set in second sidewall and the 4th side wall in rectangular-shape dielectric layer 423
When layer 4242 and four piezoelectric layers 4244, i.e., it can also form the bimorph formula similar to the first embodiment or the second embodiment
Piezoelectric device.
The utility model is limited it should be noted that above-described embodiment illustrates rather than the utility model,
And those skilled in the art can design alternative embodiment without departing from the scope of the appended claims.In right
In it is required that, any reference mark between bracket should not be configured to limitations on claims.Word "comprising" or " packet
Include " do not exclude the presence of element or step not listed in the claims.Word "a" or "an" before element is not arranged
Except there are multiple such elements.The utility model can be by means of including hardware of several different members and by means of appropriate
The computer of programming is realized.In the unit claims listing several devices, several in these devices can be
It is embodied by the same hardware branch.The use of word first, second, and third does not indicate that any sequence, can incite somebody to action
These words are construed to title.
One or more technical solution in the utility model embodiment, at least has the following technical effect that or excellent
Point：The optical fiber that piezoelectric device (120,220,320,420) can be suitable for optical fiber scanning driver (100,200,300,400) is outstanding
Arm beam, overall thickness is gradually reduced along the direction of fixing end to free end so that its vibration frequency increases, to increase its swing
Amplitude；Simultaneously as the overall thickness of piezoelectric device (120,220,320,420) be gradually reduced can also reduce driving voltage and
Reduce vibration damping and improve the precision of fibre-optic scanner to further increase amplitude of fluctuation, ensures the imaging of projection arrangement
Clearly.In addition, piezoelectric device (120,220,320,420) has the characteristics that simple in structure, cost is relatively low and is easily assembled.
All features disclosed in this specification or disclosed all methods or in the process the step of, in addition to mutually exclusive
Feature and/or step other than, can combine in any way.
Any feature disclosed in this specification (including any accessory claim, abstract and attached drawing), except non-specifically chatting
It states, can be replaced by other alternative features that are equivalent or have similar purpose.That is, unless specifically stated, each feature is only
It is an example in a series of equivalent or similar characteristics.
The utility model is not limited to specific implementation mode above-mentioned.The utility model expands to any in this specification
The new feature of middle disclosure or any new combination, and disclose any new method or process the step of or any new group
It closes.
Claims (10)
1. a kind of piezoelectric device, it is suitable for optical fiber scanning driver, the piezoelectric device includes that dielectric layer and fitting in is given an account of
The piezoelectric layer of matter layer, which is characterized in that the piezoelectric device includes fixing end and free end, and the thickness of the piezoelectric layer is described in
The direction of fixing end to the free end is gradually reduced or the thickness of the end close to the free end of the piezoelectric layer is along institute
The direction for stating fixing end to the free end is gradually reduced.
2. piezoelectric device according to claim 1, which is characterized in that the piezoelectric device is bimorph formula piezoelectricity device
Part, the thickness of dielectric layers are uniformly distributed.
3. piezoelectric device according to claim 1, which is characterized in that the piezoelectric device is bimorph formula piezoelectricity device
The width of part, the piezoelectric device is gradually reduced along the direction of the fixing end to the free end or the piezoelectric device is close
The width of the end of the free end is gradually reduced along the direction of the fixing end to the free end.
4. piezoelectric device according to claim 1, which is characterized in that the dielectric layer is cylindric dielectric layer, the circle
Tubular dielectric layer is evenly distributed with multiple mounting grooves along its axial direction, and the number of the piezoelectric layer and the number of the mounting groove match
Merging may be disposed at the mounting groove.
5. piezoelectric device according to claim 4, which is characterized in that the depth of each mounting groove is along the fixing end to institute
The direction for stating free end is gradually reduced.
6. piezoelectric device according to claim 1, which is characterized in that the dielectric layer is rectangular-shape dielectric layer, described
The outer surface of the opposite two side walls of rectangular-shape dielectric layer can be respectively arranged with the piezoelectric layer.
7. according to claim 1,3~6 any one of them piezoelectric devices, which is characterized in that the thickness of the dielectric layer is along institute
The direction for stating fixing end to the free end is gradually reduced.
8. a kind of optical fiber scanning driver, which is characterized in that including such as claim 1~7 any one of them piezoelectric device.
9. a kind of fibre-optic scanner, which is characterized in that including optical fiber scanning driver and scanning optical fiber, the optical fiber scanning drives
Dynamic device is optical fiber scanning driver according to any one of claims 8, and the scanning optical fiber is set to the pressure of the optical fiber scanning driver
The surface of electric layer simultaneously extends to form cantilever along the extending direction of the piezoelectric layer.
10. a kind of projection arrangement, which is characterized in that including fibre-optic scanner according to claim 9.
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|---|---|---|---|
| CN201820285587.9U CN207977351U (en) | 2018-02-28 | 2018-02-28 | Piezoelectric device, optical fiber scanning driver, fibre-optic scanner and projection arrangement |
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| CN201820285587.9U CN207977351U (en) | 2018-02-28 | 2018-02-28 | Piezoelectric device, optical fiber scanning driver, fibre-optic scanner and projection arrangement |
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| CN207977351U true CN207977351U (en) | 2018-10-16 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110212083A (en) * | 2018-02-28 | 2019-09-06 | 成都理想境界科技有限公司 | Piezoelectric device, optical fiber scanning driver, fibre-optic scanner and projection arrangement |
| CN111258057A (en) * | 2018-11-30 | 2020-06-09 | 成都理想境界科技有限公司 | Scanning driver and optical fiber scanner |
| WO2020135754A1 (en) * | 2018-12-29 | 2020-07-02 | 成都理想境界科技有限公司 | Scanning actuator, scanning driver and optical scanner |
| CN111381361A (en) * | 2018-12-27 | 2020-07-07 | 成都理想境界科技有限公司 | Scanning driver, optical fiber scanning device and projection display equipment |
| CN111751983A (en) * | 2019-03-29 | 2020-10-09 | 成都理想境界科技有限公司 | Small light spot optical fiber cantilever and scanning light imaging display device |
| US20210181518A1 (en) * | 2019-12-13 | 2021-06-17 | Hamamatsu Photonics K.K. | Light source module |
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2018
- 2018-02-28 CN CN201820285587.9U patent/CN207977351U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110212083A (en) * | 2018-02-28 | 2019-09-06 | 成都理想境界科技有限公司 | Piezoelectric device, optical fiber scanning driver, fibre-optic scanner and projection arrangement |
| CN110212083B (en) * | 2018-02-28 | 2024-05-28 | 成都理想境界科技有限公司 | Piezoelectric device, optical fiber scanning driver, optical fiber scanning device and projection device |
| CN111258057A (en) * | 2018-11-30 | 2020-06-09 | 成都理想境界科技有限公司 | Scanning driver and optical fiber scanner |
| CN111381361A (en) * | 2018-12-27 | 2020-07-07 | 成都理想境界科技有限公司 | Scanning driver, optical fiber scanning device and projection display equipment |
| WO2020135754A1 (en) * | 2018-12-29 | 2020-07-02 | 成都理想境界科技有限公司 | Scanning actuator, scanning driver and optical scanner |
| CN111751983A (en) * | 2019-03-29 | 2020-10-09 | 成都理想境界科技有限公司 | Small light spot optical fiber cantilever and scanning light imaging display device |
| US20210181518A1 (en) * | 2019-12-13 | 2021-06-17 | Hamamatsu Photonics K.K. | Light source module |
| US12078813B2 (en) * | 2019-12-13 | 2024-09-03 | Hamamatsu Photonics K.K. | Light source module |
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