CN111258057A - Scanning driver and optical fiber scanner - Google Patents
Scanning driver and optical fiber scanner Download PDFInfo
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- CN111258057A CN111258057A CN201811456168.8A CN201811456168A CN111258057A CN 111258057 A CN111258057 A CN 111258057A CN 201811456168 A CN201811456168 A CN 201811456168A CN 111258057 A CN111258057 A CN 111258057A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
Abstract
The invention discloses a scanning driver, which comprises a base body extending along the front-back direction, wherein the back end of the base body is a fixed end, the front end of the base body is a free end, and at least one actuator for driving the free end of the base body to vibrate along an axis vertical to the front-back direction is arranged on the surface of the base body extending along the front-back direction; a fiber scanner employing the scan driver is also disclosed. The invention realizes that the actuator drives the base body to vibrate, and when the free end of the base body vibrates, the free end of the base body can vibrate in one dimension and in two dimensions, thus having wide application range; by adopting the structure that a plurality of actuator units are overlapped and attached, the expansion and contraction amplitude of the actuator can be increased, and the torsion amplitude of the base body can be increased.
Description
Technical Field
The invention relates to the technical field of scanning driver structures, in particular to a scanning driver and an optical fiber scanner.
Background art
The single fiber resonance type piezoelectric scanner is a novel scanner for realizing static or dynamic image scanning by utilizing the resonance characteristic of a fiber cantilever in the driving direction, and compared with an MEMS (Micro-Electro-mechanical system) scanner, the single fiber resonance type piezoelectric scanner has the advantages of smaller volume, lower cost, simple and convenient manufacturing process and easier integration. However, the existing scanning driver has the problems of high processing difficulty, difficult adjustment of the direction of a vibration shaft, difficult increase of amplitude and the like.
Disclosure of Invention
The embodiment of the invention provides a scanner driver and an optical fiber scanner, which are used for reducing the processing difficulty, facilitating the adjustment of the direction of a vibration shaft and further facilitating the increase of the amplitude.
In order to achieve the above object, according to one aspect of the present invention, there is provided a scan driver including a base extending in a front-rear direction, a rear end of the base being a fixed end, a front end of the base being a free end, and at least one actuator for driving the free end of the base to vibrate along an axis perpendicular to the front-rear direction being provided on a surface of the base extending in the front-rear direction.
The actuator is driven by electric power to do telescopic motion along the front-back direction, so that the machine body is driven to do twisting motion, and the free end of the base body vibrates along an axis vertical to the front-back direction.
Specifically, when an actuator contracts in the front-rear direction, the base body bends towards the side where the actuator is located, so that the base body is driven to move towards the side from the using end; when the actuator is elongated in the front-rear direction, the base is bent toward the other side of the actuator opposite to the axis of the base.
The attachment position of the actuator on the surface of the substrate and the length of the actuator extending in the front-back direction are not limited, and the actuator can be adjusted to enable the substrate to twist and swing, so that a corresponding structure can be configured by a person skilled in the art according to requirements. By adopting the structure, the direction of the vibration shaft of the base body can be conveniently adjusted, the adjustment can be realized by changing the binding surface of the actuator, and the processing difficulty and the adjustment difficulty are reduced.
When the surface of the base body is provided with at least two actuators, the actuators respectively drive the free end of the base body to vibrate along the same axis or along non-parallel axes the number of which is not more than the number of the actuators.
The section of the substrate, which is cut by a plane perpendicular to the front-back direction, is a closed figure formed by line segments and/or curves, such as a rectangle, a square, a quadrangle, a circle, a polygon, an ellipse, a rounded square, an irregular closed figure and the like. Preferably, the base is a column having the same cross section of each portion taken by a plane perpendicular to the front-rear direction, and the elastic modulus thereof is preferably in a range of more than 40 GPa. The base is used to convert the telescopic motion of the actuator into a twisting motion of the base.
Preferably, the surface of the base body is provided with one or two first actuators for driving the free end of the base body to vibrate along a first axis and one or two second actuators for driving the free end of the base body to vibrate along a second axis, and the first axis and the second axis are not parallel to each other. The first actuators and the second actuators are distributed on a surface of the base body extending in the front-rear direction, and the layout position has an angle greater than 0 degree and smaller than 180 degrees in the circumferential direction. When the first actuator and the second actuator simultaneously drive the free end of the base body to vibrate, the swinging track of the free end of the base body is a composite track which vibrates along two axes. Thus, the first axis and the second axis are perpendicular to each other in order to facilitate the setting of the driving signal to control the swing locus.
When the number of the first actuators is two, the arrangement positions of the two first actuators are symmetrical about the center of the base body, namely, the arrangement positions of the two first actuators have an included angle of 180 degrees in the circumferential direction. The two act in a matching way and simultaneously drive the free end of the base body to vibrate along the first axis. Specifically, at any time, the two expansion and contraction directions are opposite, namely, when one of the first actuators is contracted, the other first actuator is expanded, so that the base body is driven to bend towards the same side at the same time, and vice versa, the base body is driven to bend towards the other side at the same time. Similarly, when the number of the second actuators is two, the arrangement positions of the two second actuators are symmetrical with respect to the center of the substrate, that is, the arrangement positions of the two second actuators have an included angle of 180 degrees in the circumferential direction. The amplification of the twisting degree of the machine body can be realized by arranging two first actuators or two second actuators.
Optionally, the actuator may be made of a piezoelectric material, an electrostrictive material, a ferroelectric material, a magnetostrictive material, or other materials that can achieve a stretching function or a high-frequency stretching function.
Preferably, the actuator is a piezoelectric actuator, so that high-frequency expansion and contraction can be realized, and the working condition requirement of high-frequency vibration is met. Further, the piezoelectric actuator comprises a piezoelectric material body, the piezoelectric material body is polarized along the front-back direction, and electrodes are arranged on the front end face and the back end face of the piezoelectric material body.
At least one of the actuators comprises a plurality of actuator units which are sequentially attached from front to back. Each actuator unit is driven by electric power to make telescopic motion along the front-back direction. Similarly, each actuator unit can also be made of piezoelectric material, electrostrictive material, ferroelectric material, magnetostrictive material, and other materials capable of realizing a stretching function or high-frequency stretching. By adopting the structure that a plurality of actuator units are overlapped and attached, the expansion amplitude of the actuator can be increased, the twisting amplitude of the matrix is increased, the swing amplitude of the optical fiber cantilever is increased, and the field angle of an emergent image of the optical fiber cantilever is effectively increased.
Preferably, the actuator unit is a piezoelectric actuator unit, the piezoelectric actuator unit includes a piezoelectric material body, the piezoelectric material body is polarized along the front-back direction, electrodes are disposed on the front end face and the back end face of the piezoelectric material body, and any two adjacent piezoelectric actuator units share one electrode or are provided with an insulating isolation layer.
The piezoelectric actuator units may polarize the piezoelectric material bodies before being attached, or polarize the entire piezoelectric material bodies of the plurality of piezoelectric actuator units after being attached.
Preferably, the piezoelectric actuator unit has a plate-shaped or sheet-shaped piezoelectric material body, the extension direction of the piezoelectric material body is perpendicular to the front-back direction, electrodes are disposed on the front and back surfaces of the plate-shaped or sheet-shaped piezoelectric material body, and the plurality of piezoelectric actuator units are sequentially attached and fixedly disposed on the surface of the base body in the front-back direction. The front side and the rear side of each piezoelectric actuator unit are respectively provided with an electrode, further, an electrode can be shared between any two adjacent piezoelectric actuator units, or an independent electrode is arranged on each of the two sides of each of the two piezoelectric actuator units, and at the moment, an insulating isolation layer needs to be arranged between the two piezoelectric actuator units. Preferably, the piezoelectric material bodies of the piezoelectric actuator units have the same polarization direction, so that the polarities of the two adjacent electrodes between the two adjacent piezoelectric actuators are opposite.
The shape of the plate-shaped or sheet-shaped piezoelectric material body is not limited, and taking the triangular plate-shaped piezoelectric material body as an example, two sides of the triangular plate-shaped piezoelectric material body are respectively provided with a layer electrode to form a piezoelectric actuator unit. The piezoelectric actuator units are sequentially attached and fixedly arranged on the surface of the substrate along the front-to-back direction.
For the electrodes of the piezoelectric actuator unit, it is preferable that an electrode lead terminal for power connection is connected to each electrode.
In order to facilitate the arrangement of the electrode lead terminals, the piezoelectric material body of the piezoelectric actuator unit is in a shape of a bulge or a groove, and when the adjacent piezoelectric actuator units are attached, the adjacent piezoelectric actuator units are staggered from each other in the circumferential direction by a certain angle. Thus, when the piezoelectric material body has the projection, the projection of the piezoelectric material body can be used as an electrode lead terminal; when the piezoelectric material body has a recess, a side wall of the piezoelectric actuator unit located in the recess of the adjacent piezoelectric actuator unit may be used as an electrode lead terminal. The two structures enable a part of the piezoelectric actuator unit to be used as an electrode lead terminal, the piezoelectric actuator unit does not need to be additionally provided with the electrode lead terminal, the structure that the piezoelectric actuator unit is sequentially attached and overlapped is simplified, the rigidity of the actuator formed by the piezoelectric actuator unit is improved, and the frequency response characteristic is improved.
In another aspect, embodiments of the present invention provide an optical fiber scanner, including at least one scan driver as described above, and an optical fiber, where the optical fiber is fixedly connected to a substrate or an actuator of the scan driver, and a portion of a front end of the optical fiber, which exceeds the substrate or the actuator fixedly connected to the optical fiber, forms an optical fiber cantilever.
The scanning driver drives the optical fiber cantilever to vibrate, modulated light is introduced into the optical fiber, and the modulated light is emitted in the vibration process of the optical fiber cantilever to form an image.
Holes for the optical fibers to pass through are formed in the substrate and/or the actuator, and the optical fibers are fixedly arranged in the holes; or the optical fiber is fixed to the outer surface of the substrate and/or the actuator. The substrate is used for converting the telescopic motion of the actuator into the twisting motion of the substrate so as to drive the optical fiber cantilever to do scanning swinging motion, namely, the telescopic force is transmitted to the optical fiber cantilever to enable the optical fiber cantilever to scan and swing.
When the optical fiber scanner comprises at least two scanning drivers as described above, the scanning drivers are connected in sequence from front to back, in any two adjacent scanning drivers, the fixed end of the base body of the scanning driver at the front side is fixedly connected with the free end of the base body of the scanning driver at the back side, the optical fiber is fixedly connected with the base body or the actuator of the scanning driver at the foremost end, and the part of the front end of the optical fiber, which exceeds the base body or the actuator fixedly connected with the optical fiber, forms an optical fiber cantilever. Therefore, each scanning driver drives the scanning driver or the optical fiber cantilever connected with the scanning driver to vibrate, and the final motion track of the optical fiber cantilever is the combined track of the vibration tracks of the scanning drivers.
One or more technical solutions in the embodiments of the present invention have at least the following technical effects or advantages:
when the actuator contracts along the front-back direction, the base body bends towards the side where the actuator is located, so that the base body is driven to move towards the side from the using end; when the actuator is elongated in the front-rear direction, the base is bent to the other side of the actuator opposite to the axis of the base, thereby realizing that the actuator drives the base to vibrate. When the free end of the base body vibrates, the free end of the base body can vibrate in one dimension and in two dimensions, and the application range is wide. By adopting the structure that a plurality of actuator units are overlapped and attached, the expansion amplitude of the actuator can be increased, the twisting amplitude of the matrix is increased, the swing amplitude of the optical fiber cantilever is increased, and the field angle of an emergent image of the optical fiber cantilever is effectively increased.
Drawings
FIG. 1 is a schematic diagram of a scan driver according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of another embodiment of a scan driver according to the present invention;
FIG. 3 is a schematic diagram of a scan driver employing an actuator composed of a plurality of actuator units;
fig. 4 is a schematic structural view of an actuator constituted by a plurality of piezoelectric actuator units;
FIG. 5 is a schematic structural view of an actuator formed of piezoelectric actuator units having a triangular cross section;
FIG. 6 is a schematic structural view of a piezoelectric actuator unit having a triangular cross-section of a piezoelectric material body;
FIG. 7 is a schematic view showing an arrangement structure of electrode lead terminals of a piezoelectric actuator unit in which a section of a piezoelectric material body is circular;
FIG. 8 is a schematic structural view of a piezoelectric actuator unit having a piezoelectric material body with a protrusion;
fig. 9 is a schematic structural view of a piezoelectric actuator unit having a square-shaped piezoelectric material body section and grooves;
fig. 10 is a schematic structural view of a piezoelectric actuator unit having a circular cross section of a piezoelectric material body and grooves;
FIG. 11 is a schematic diagram of an embodiment of a fiber scanner employing a scan driver according to the present invention;
FIG. 12 is a schematic diagram of another embodiment of a fiber scanner employing a scan driver according to the present invention;
FIG. 13 is a schematic structural diagram of a third embodiment of a fiber scanner employing a scan driver according to the present invention;
FIG. 14 is a schematic structural diagram of an embodiment of a fiber scanner employing two scan drivers according to the present invention;
FIG. 15 is a schematic diagram of another embodiment of a fiber scanner employing two scan drivers in accordance with the present invention;
FIG. 16 is a schematic structural diagram of a third embodiment of a fiber scanner employing two scan drivers in accordance with the present invention;
FIG. 17 is a schematic structural diagram of a fourth embodiment of a fiber scanner employing two scan drivers according to the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In one aspect, the embodiment of the present invention provides a scan driver, which includes a base 1 extending in a front-back direction, a fixed end 11 at a rear end of the base 1, a free end 12 at a front end of the base 1, and at least one actuator 2 for driving the free end 12 of the base 1 to vibrate along an axis perpendicular to the front-back direction on a surface of the base 1 extending in the front-back direction.
The actuator 2 is driven by electric power to do telescopic motion along the front-back direction, so that the machine body is driven to do twisting motion, and the free end 12 of the base body 1 vibrates along an axis perpendicular to the front-back direction.
Specifically, when a certain actuator 2 contracts in the front-rear direction, the base 1 bends toward the side where the actuator 2 is located, thereby driving the base to move from the end to the side; when the actuator is elongated in the front-rear direction, the base 1 is bent toward the other side of the actuator opposite to the axis of the base 1.
The attachment position of the actuator 2 on the surface of the base 1 and the length extending in the front-rear direction are not limited, and the actuator 2 can be adjusted to be capable of twisting and swinging the base 1, and a person skilled in the art can configure a corresponding structure according to requirements.
The surface of the substrate 1 may be provided with one actuator 2, or two or more actuators 2.
When only one actuator is provided on the surface of the base 1, the free end 12 of the base 1 vibrates along an axis perpendicular to the front-rear direction, and the axis is coplanar with the axis of the base 1 and the center line of the actuator.
When the surface of the base 1 is provided with two actuators, the two actuators may drive the base 1 to vibrate along one axis, and may also drive the base 1 to vibrate along two axes, of course, both axes are perpendicular to the front-back direction.
When the two actuators drive the base body 1 to vibrate along the same axis, the arrangement positions of the two actuators are symmetrical about the center of the base body 1, namely, the arrangement positions of the two actuators have an included angle of 180 degrees in the circumferential direction. The two cooperate to drive the free end 12 of the base 1 to oscillate along the first axis. Specifically, at any time, the two expansion and contraction directions are opposite, that is, when one actuator contracts, the other actuator expands, so that the base body 1 is driven to bend towards the same side at the same time, and conversely, the base body 1 is driven to bend towards the other side at the same time.
When two actuators drive the base body 1 to vibrate along two different axes, as shown in fig. 2, the arrangement positions of the two actuators have an included angle greater than 0 degree and smaller than 180 degrees in the circumferential direction, and when the two actuators simultaneously drive the free end 12 of the base body 1 to vibrate, the swing track of the free end 12 of the base body 1 is a composite track of the two axes. Thus, the first axis and the second axis are perpendicular to each other in order to facilitate the setting of the driving signal to control the swing locus.
When the surface of the substrate 1 is provided with a plurality of actuators, said plurality of actuators comprises a plurality of actuators or actuator pairs for driving the substrate 1 in vibration along different axes. The actuator pair refers to two actuators for driving the actuators to vibrate along the same axis, and the arrangement mode of the two actuators is the same as that when the two actuators drive the base body 1 to vibrate along the same axis.
As a preferred embodiment, the surface of the base body 1 is provided with one or two first actuators 21 for driving the free end 12 of the base body 1 to oscillate along a first axis and one or two second actuators 22 for driving the free end 12 of the base body 1 to oscillate along a second axis, the first axis and the second axis being non-parallel to each other. The first actuators 21 and the second actuators 22 are distributed on the surface of the base 1 extending in the front-rear direction, and the layout position has an angle larger than 0 degree and smaller than 180 degrees in the circumferential direction. When the first actuator 21 and the second actuator 22 simultaneously drive the free end 12 of the base 1 to vibrate, the swing locus of the free end 12 of the base 1 is a resultant locus of vibration along two axes. Thus, the first axis and the second axis are perpendicular to each other in order to facilitate the setting of the driving signal to control the swing locus.
When the number of the first actuators 21 is two, the arrangement positions of the two first actuators 21 are symmetrical with respect to the center of the base 1, that is, the arrangement positions have an angle of 180 degrees in the circumferential direction. The two cooperate to drive the free end 12 of the base 1 to oscillate along the first axis. Specifically, at any time, the two expansion and contraction directions are opposite, that is, when one of the first actuators 21 contracts, the other first actuator 21 expands, so that the base body 1 is driven to bend towards the same side at the same time, and conversely, the base body 1 is driven to bend towards the other side at the same time. Similarly, when the number of the second actuators 22 is two, the arrangement positions of the two second actuators 22 are symmetrical with respect to the center of the base 1, that is, the arrangement positions have an angle of 180 degrees in the circumferential direction.
Optionally, the actuator may be made of a piezoelectric material, an electrostrictive material, a ferroelectric material, a magnetostrictive material, or other materials that can achieve a stretching function or a high-frequency stretching function.
Preferably, the actuator is a piezoelectric actuator, so that high-frequency expansion and contraction can be realized, and the working condition requirement of high-frequency vibration is met. Further, the piezoelectric actuator comprises a piezoelectric material body, the piezoelectric material body is polarized along the front-back direction, and electrodes are arranged on the front end face and the back end face of the piezoelectric material body.
At least one of the actuators includes a plurality of actuator units 201 sequentially attached in a front-to-rear direction, as shown in fig. 3. Each actuator unit 201 is driven by electric power to make a telescopic movement in the front-rear direction. Similarly, each actuator unit 201 may also be made of piezoelectric material, electrostrictive material, ferroelectric material, magnetostrictive material, or other materials capable of achieving a stretching function or high-frequency stretching.
Preferably, the actuator unit 201 is a piezoelectric actuator unit, and as shown in fig. 4, the piezoelectric actuator unit includes a piezoelectric material body 2011, the piezoelectric material body 2011 is polarized in the front-back direction, electrodes 2012 are disposed on both front and back end surfaces of the piezoelectric material body 2011, and any two adjacent piezoelectric actuator units share one electrode 2012 or are disposed with an insulating isolation layer.
The piezoelectric actuator units may be polarized to the piezoelectric material bodies 2011 before being attached, or may be polarized to the whole piezoelectric material bodies 2011 of the plurality of piezoelectric actuator units after being attached.
Preferably, the piezoelectric material body 2011 of the piezoelectric actuator unit is plate-shaped or sheet-shaped, the extension direction of the piezoelectric material body 2011 is perpendicular to the front-back direction, the front and back surfaces of the plate-shaped or sheet-shaped piezoelectric material body 2011 are provided with the electrodes 2012, and the plurality of piezoelectric actuator units are sequentially attached and fixedly arranged on the surface of the substrate 1 in the front-back direction. The structure that a plurality of piezoelectric actuator units are piled up can increase flexible range, and then increase the distortion range of base member, just also increased the swing range of optical fiber cantilever 31, effectively enlarged the angle of view of the emergent image of optical fiber cantilever 31. An electrode 2012 is arranged on each of the front and rear sides of each piezoelectric actuator unit, and further, an electrode 2012 can be shared between any two adjacent piezoelectric actuator units, or an independent electrode 2012 is arranged on each of the two sides of each of the two piezoelectric actuator units, and at this time, an insulating isolation layer needs to be arranged between the two piezoelectric actuator units. Preferably, the piezoelectric material bodies 2011 of the piezoelectric actuator units have the same polarization direction, so that the polarities of the two adjacent electrodes 2012 located between the two adjacent piezoelectric actuators are opposite.
The shape of the plate-shaped or sheet-shaped piezoelectric material body 2011 is not limited, and for example, as shown in fig. 5 and 6, a triangular plate-shaped piezoelectric material body 2011 is provided with one layer electrode 2012 on each of both sides thereof, thereby constituting one piezoelectric actuator unit. The plurality of piezoelectric actuator units are sequentially attached and fixedly disposed on the surface of the base 1 in the front-to-rear direction.
As for the electrodes 2012 of the piezoelectric actuator unit, it is preferable that each electrode 2012 is connected with a lead terminal of the electrode 2012 for power connection, as shown in fig. 7.
In order to facilitate the arrangement of the lead terminals of the electrodes 2012, the piezoelectric material body 2011 of the piezoelectric actuator unit has protrusions 2014 extending perpendicular to the front-back direction or recesses 2015 penetrating the piezoelectric material body 2011 in the front-back direction, and adjacent piezoelectric actuator units are circumferentially offset by a certain angle when bonded. Thus, when the piezoelectric material body 2011 has the projection 2014, as shown in fig. 8, the projection 2014 of the piezoelectric material body 2011 can be made to be a lead terminal of the electrode 2012; when the piezoelectric material body 2011 has the groove 2015, as shown in fig. 9 and 10, a side wall of the piezoelectric actuator unit located in the groove 2015 of the adjacent piezoelectric actuator unit may be used as a lead terminal of the electrode 2012. According to the two structures, a part of the piezoelectric actuator unit is used as the electrode lead terminal 2013, the electrode lead terminal 2013 is not additionally arranged on the piezoelectric actuator unit, the structure that the piezoelectric actuator units are sequentially attached and overlapped is simplified, the rigidity of the actuator formed by the piezoelectric actuator units is improved, and the frequency response characteristic is improved.
In another aspect, the present invention provides an optical fiber scanner, comprising at least one scanning driver as described above and an optical fiber, wherein the optical fiber is fixedly connected to the substrate 1 or the actuator of the scanning driver, and a portion of the front end of the optical fiber, which exceeds the substrate 1 or the actuator fixedly connected to the optical fiber, forms an optical fiber cantilever 31.
The scanning driver drives the optical fiber cantilever 31 to vibrate, modulated light is introduced into the optical fiber, and the modulated light is emitted to form an image in the vibration process of the optical fiber cantilever 31.
As shown in fig. 11, the fiber scanner in this embodiment includes a scanning driver, and an actuator 2 is provided on a base 1. In both embodiments, as shown in fig. 12 and 13, the fiber scanner comprises a scanning drive, and at least two actuators 2 are arranged on a substrate 1. And in the embodiment shown in fig. 13, each actuator includes a plurality of actuator units 201 attached in sequence in the front-to-rear direction, and each actuator unit 201 is driven by electric power to perform telescopic movement in the front-to-rear direction. Of course, the number of the actuators on the base body and the number of the actuators adopting the actuator unit structure can be adjusted according to actual working conditions.
When the optical fiber scanner comprises at least two scanning drivers as described above, the scanning drivers are connected in sequence from front to back, in any two adjacent scanning drivers, the fixed end of the base body of the scanning driver at the front side is fixedly connected with the free end of the base body of the scanning driver at the back side, the optical fiber is fixedly connected with the base body 1 or the actuator of the scanning driver at the foremost end, and the part of the front end of the optical fiber, which exceeds the base body 1 or the actuator fixedly connected with the optical fiber, forms the optical fiber cantilever 31. Therefore, each scanning driver drives the scanning driver or the optical fiber cantilever connected with the scanning driver to vibrate, and the final motion track of the optical fiber cantilever is the combined track of the vibration tracks of the scanning drivers.
In the embodiments shown in fig. 14-17, each fiber scanner comprises two scan drivers connected in series, each scan driver has at least one actuator 2 disposed on a substrate 1, and the substrate of the scan driver on the front side vibrates in a direction perpendicular to the substrate of the scan driver on the back side. In the embodiment shown in fig. 16 and 17, the actuator of each scan driver includes a plurality of actuator units 201 sequentially attached in the front-to-rear direction, and each actuator unit 201 is driven by power to perform telescopic motion in the front-to-rear direction. Of course, each actuator in each scan driver is an integrated actuator or an actuator constituted by the actuator unit 201. Alternatively, as in the embodiment shown in fig. 15 and 17, the two scan drives have a segment of the substrate in common, so that the segment of the substrate in common is simultaneously acted upon by the actuators on the two scan drives.
It should be noted that the above-mentioned embodiments illustrate rather than limit the invention, and that those skilled in the art will be able to design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" or "comprises" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The use of the words first, second, third, etc. do not denote any order, but rather the words are to be construed as names.
One or more technical solutions in the embodiments of the present invention have at least the following technical effects or advantages:
when the actuator contracts along the front-back direction, the base body bends towards the side where the actuator is located, so that the base body is driven to move towards the side from the using end; when the actuator is elongated in the front-rear direction, the base is bent to the other side of the actuator opposite to the axis of the base, thereby realizing that the actuator drives the base to vibrate. When the free end of the base body vibrates, the free end of the base body can vibrate in one dimension and in two dimensions, and the application range is wide. By adopting the structure that a plurality of actuator units are overlapped and attached, the expansion amplitude of the actuator can be increased, the twisting amplitude of the matrix is increased, the swing amplitude of the optical fiber cantilever is increased, and the field angle of an emergent image of the optical fiber cantilever is effectively increased.
All features disclosed in this specification, except features that are mutually exclusive, may be combined in any way.
Any feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.
The invention is not limited to the foregoing embodiments. The invention extends to any novel feature or any novel combination of features disclosed in this specification and any novel method or process steps or any novel combination of features disclosed.
Claims (10)
1. A scanning driver is characterized by comprising a base body extending along the front-back direction, the back end of the base body is a fixed end, the front end of the base body is a free end, and at least one actuator used for driving the free end of the base body to vibrate along an axis perpendicular to the front-back direction is arranged on the surface of the base body extending along the front-back direction.
2. A scan drive as claimed in claim 1, wherein, when the surface of the substrate is provided with at least two actuators, each actuator drives the free end of the substrate to oscillate along the same axis or along non-parallel axes no more than the number of actuators.
3. A scan drive as claimed in claim 1, wherein the actuators comprise one or two first actuators for driving the free end of the substrate into oscillation along a first axis and one or two second actuators for driving the free end of the substrate into oscillation along a second axis, the first axis and the second axis being non-parallel to each other.
4. A scan driver as claimed in any of claims 1 to 3, wherein each actuator element is made of a piezoelectric, electrostrictive, ferroelectric or magnetostrictive material.
5. A scan driver according to any one of claims 1 to 3, wherein at least one of the actuators comprises a plurality of actuator units sequentially attached in a front-to-rear direction, each actuator unit being driven by electric power to perform a telescopic motion in a front-to-rear direction.
6. A scan driver as claimed in claim 5, wherein each actuator element is made of a piezoelectric, electrostrictive, ferroelectric or magnetostrictive material.
7. The scan driver as claimed in claim 5, wherein said actuator unit is a piezoelectric actuator unit, said piezoelectric actuator unit includes a piezoelectric material body, the piezoelectric material body is polarized in a front-back direction, the front end face and the back end face of the piezoelectric material body are provided with electrodes, and any two adjacent piezoelectric actuator units share one electrode or are provided with an insulating spacer.
8. The scan driver as claimed in claim 7, wherein said piezoelectric actuator units have a shape of a protrusion or a recess, and adjacent piezoelectric actuator units are circumferentially offset from each other by a predetermined angle when they are attached.
9. An optical fiber scanner comprising at least one scan drive according to any of claims 1 to 6 and an optical fiber, the optical fiber being fixedly attached to the substrate or actuator of the scan drive, the portion of the fiber tip beyond the substrate or actuator fixedly attached to the optical fiber forming a fiber cantilever.
10. A scanning driver according to claim 9, wherein when the optical fiber scanner comprises at least two scanning drivers as described above, the scanning drivers are connected in series in a front-to-back direction, and in any two adjacent scanning drivers, the fixed end of the base of the scanning driver at the front side is fixedly connected to the free end of the base of the scanning driver at the back side, the optical fiber is fixedly connected to the base or actuator of the scanning driver at the foremost end, and the portion of the front end of the optical fiber beyond the base or actuator fixedly connected to the optical fiber forms an optical fiber cantilever.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811456168.8A CN111258057A (en) | 2018-11-30 | 2018-11-30 | Scanning driver and optical fiber scanner |
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| CN201811456168.8A CN111258057A (en) | 2018-11-30 | 2018-11-30 | Scanning driver and optical fiber scanner |
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| CN111258057A true CN111258057A (en) | 2020-06-09 |
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| CN201811456168.8A Pending CN111258057A (en) | 2018-11-30 | 2018-11-30 | Scanning driver and optical fiber scanner |
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