CN109307932A - A kind of fibre-optic scanner - Google Patents
A kind of fibre-optic scanner Download PDFInfo
- Publication number
- CN109307932A CN109307932A CN201710624949.2A CN201710624949A CN109307932A CN 109307932 A CN109307932 A CN 109307932A CN 201710624949 A CN201710624949 A CN 201710624949A CN 109307932 A CN109307932 A CN 109307932A
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- Prior art keywords
- piezoelectric actuator
- optical fiber
- absorbing mass
- electromagnet
- magnetic absorbing
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Mechanical Optical Scanning Systems (AREA)
Abstract
The invention discloses a kind of fibre-optic scanners, comprising: shell;Piezoelectric actuator;Optical fiber is fixed on the piezoelectric actuator, and the optical fiber includes the optical fiber cantilever that can be vibrated;One or more magnetic absorbing mass are arranged on the piezoelectric actuator;One or more electromagnet, setting is on the housing, when the piezoelectric actuator and the electromagnet are powered, the piezoelectric actuator moves under the collective effect of the magnetic field force that the electromagnet generates and the Piezoelectric Driving power that the driving signal being applied on the piezoelectric actuator generates, so that the optical fiber cantilever be driven to vibrate.It is superimposed by the magnetic field force that electromagnet generates with Piezoelectric Driving power caused by the driving signal of piezoelectric actuator, is capable of increasing the amplitude of oscillation of piezoelectric actuator, and then increase the amplitude of oscillation of optical fiber.
Description
Technical field
The present invention relates to optical imaging field more particularly to a kind of fibre-optic scanners.
Background technique
Fibre optic scanner can be scanned according to the pre-designed track of designer, to export image, to substitute
Traditional LCD (Liquid Crystal Display;Liquid crystal display), LCOS (Liquid Crystal on Silicon;
Attached silicon/the liquid crystal on silicon of liquid crystal) and OLED (Organic Light-Emitting Diode;Organic Light Emitting Diode) image source
Deng being integrated into HMD (Head Mount Display;Head-mounted display), micro projector and vehicle-mounted HUD (Head Up
Display;Head-up display) etc. in equipment, and can be also used for medical endoscope, the equipment such as scanning tunneling microscope
In, using very extensive.
The prior art needs to increase the amplitude of fluctuation of optical fiber, i.e., to improve the resolution ratio of fibre optic scanner scan image
The amplitude of oscillation, and the amplitude of oscillation of optical fiber is influenced by several factors, such as: fiber lengths, the frequency of driving signal, piezoelectric actuator pendulum
Width etc..
Under normal circumstances, fiber work can be made to reach the maximized purpose of the amplitude of oscillation in its resonant frequency, meanwhile, for pressure
For electric drive, the resonant frequency of piezoelectric actuator can be made to be overlapped with the resonant frequency of optical fiber, to reach secondary amplification
Purpose then can only be electric by increasing the driving of piezoelectric actuator if in the manner described above, the amplitude of oscillation of optical fiber does not reach requirement also
The mode of pressure improves the amplitude of oscillation of piezoelectric actuator, and then improves the amplitude of oscillation of optical fiber.
But by taking piezoelectric actuator is piezoceramic material as an example, within the scope of certain voltage, the amplitude of oscillation meeting of piezoelectric ceramics
When increasing with the increase of driving voltage, and being more than the breakdown voltage of piezoelectric ceramics, piezoelectric ceramics is by depolarization, so that piezoelectricity
The reduction of the amplitude of oscillation high degree of ceramics, it is seen then that, can by way of increasing the amplitude of oscillation of the size of driving voltage to improve optical fiber
To increase the amplitude of oscillation of optical fiber to a certain extent, but it will receive the limitation of material breakdown piezoelectric voltage.Therefore, fibre optic scanner is still
Other modes are needed to increase the amplitude of oscillation of optical fiber, to improve the resolution ratio of fibre optic scanner scan image.
Summary of the invention
The object of the present invention is to provide a kind of fibre-optic scanners, for improving the amplitude of oscillation of optical fiber in fibre optic scanner.
In order to achieve the above-mentioned object of the invention, the embodiment of the present invention provides a kind of fibre-optic scanner, comprising:
Shell;
Piezoelectric actuator;
Optical fiber is fixed on the piezoelectric actuator, and the optical fiber includes the optical fiber cantilever that can be vibrated;
One or more magnetic absorbing mass are arranged on the piezoelectric actuator;
One or more electromagnet are arranged on the housing, when the piezoelectric actuator and the electromagnet are powered,
The piezoelectric actuator is generated in the magnetic field force that the electromagnet generates and the driving signal being applied on the piezoelectric actuator
Piezoelectric Driving power collective effect under move, so that the optical fiber cantilever be driven to vibrate.
Optionally, the piezoelectric actuator be two-dimensional piezoelectric driver, including X-direction piezoelectric actuator and with X-direction hang down
Straight Y-direction piezoelectric actuator;
One or more magnetic absorbing mass are arranged on the X-direction piezoelectric actuator;Or
One or more magnetic absorbing mass are arranged on the Y-direction piezoelectric actuator;Or
Described device includes multiple magnetic absorbing mass, and multiple magnetic absorbing mass are separately positioned on the X-direction Piezoelectric Driving
On device and the Y-direction piezoelectric actuator.
Optionally, described device includes two magnetic absorbing mass, is arranged in the X-direction piezoelectric actuator or the Y-direction pressure
In the upper and lower surface of the free end of electric drive, wherein the free end of the X-direction piezoelectric actuator and the optical fiber cantilever phase
It is bordered by, the free end of the Y-direction piezoelectric actuator is connect with the X-direction piezoelectric actuator.
Optionally, described device includes two electromagnet, and described two electromagnet surround described two on the housing
Magnetic absorbing mass is symmetrical arranged.
Optionally, the X-direction piezoelectric actuator and the Y-direction piezoelectric actuator are piezoelectric ceramic wafer.
Optionally, the magnetic absorbing mass is laminated structure, and the magnetic absorbing mass is pasted on the surface of the piezoelectric ceramic wafer.
Optionally, the magnetic absorbing mass is one of magnet or iron plate or a variety of.
Optionally, it when the electromagnet is powered, in fibre-optic scanner work, controls the electromagnet and generates
Magnetic field waveform according to the driving signal being applied on the piezoelectric actuator waveform convertion.
One or more technical solution in the embodiment of the present invention, at least has the following technical effect that or advantage:
In the scheme of the embodiment of the present invention, fibre-optic scanner includes shell, and piezoelectric actuator is fixed on piezoelectric actuator
On optical fiber, one or more magnetic absorbing mass on the piezo actuator are set, and be arranged on shell one or more electricity
Magnet, when piezoelectric actuator and electromagnet are powered, the piezoelectric actuator the magnetic field that electromagnet generates magnetic field force with apply
It is moved under the collective effect for the Piezoelectric Driving power that the driving signal being added on the piezoelectric actuator generates, to drive optical fiber outstanding
Arm vibration, is superimposed by the magnetic field force that electromagnet generates with Piezoelectric Driving power caused by the driving signal of piezoelectric actuator, energy
Enough increase the amplitude of oscillation of piezoelectric actuator, and then increases the amplitude of oscillation of optical fiber.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention without any creative labor, may be used also for those of ordinary skill in the art
To obtain other drawings based on these drawings:
Fig. 1 is the structural schematic diagram of fibre-optic scanner provided in an embodiment of the present invention;
Fig. 2 is the structural schematic diagram of XY type piezoelectric actuator provided in an embodiment of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Referring to FIG. 1, Fig. 1 is the structural schematic diagram of fibre-optic scanner provided in an embodiment of the present invention, optical fiber scanning dress
It sets including shell 10;Piezoelectric actuator 20;Optical fiber 30 is fixed on the piezoelectric actuator 20, and the optical fiber 30 includes can
The optical fiber cantilever of vibration;One or more magnetic absorbing mass 40 are arranged on the piezoelectric actuator 20;One or more electromagnet
50, it is arranged on the shell 10, when the piezoelectric actuator 20 and electromagnet 50 are powered, the piezoelectric actuator 20 is in institute
State the magnetic field force and the Piezoelectric Driving power for the driving signal generation being applied on the piezoelectric actuator 20 of the generation of electromagnet 50
It is moved under collective effect, so that the optical fiber cantilever be driven to vibrate.
As it can be seen that in the embodiment of the present invention, when being powered by piezoelectric actuator 20 and electromagnet 50, the magnetic field in the magnetic field of generation
Power is superimposed with Piezoelectric Driving power caused by the driving signal of piezoelectric actuator 20, is capable of increasing the amplitude of oscillation of piezoelectric actuator 20,
To increase the amplitude of oscillation of optical fiber 30.After the amplitude of oscillation of optical fiber 30 increases, the image resolution of scanned imagery device imaging can be improved
Rate, and increase the specification (i.e. the width and height of image) of image.
In the embodiment of the present invention, piezoelectric actuator 20 can be one-dimensional piezoelectric actuator or two-dimensional piezoelectric driver, two
Dimension piezoelectric actuator can be XY type piezoelectric actuator, tubular type piezoelectric actuator or be made of four rectangular-shaped piezoelectric ceramics
Square fibre optic scanner etc., can be that XY type piezoelectric actuator is with two-dimensional piezoelectric driver in the embodiment of the present invention
Example is illustrated.Specifically, as shown in Fig. 2, two-dimensional piezoelectric driver includes X-direction piezoelectric actuator 201 and vertical with X-direction
Y-direction piezoelectric actuator 202, be powered when, X-direction piezoelectric actuator 201 is swung in X direction, Y-direction piezoelectric actuator
202 swing along Y-direction, wherein X-direction refers to the direction vertical with the upper and lower surface of X-direction piezoelectric actuator 201, and Y-direction is
Refer to the direction vertical with the left and right side of Y-direction piezoelectric actuator 202.
In the embodiment of the present invention, X-direction piezoelectric actuator 201 and Y-direction piezoelectric actuator 202 can be inlayed and be fixedly arranged at one
It rises, in another embodiment, X-direction piezoelectric actuator 201 and Y-direction piezoelectric actuator 202 can also be integrally formed pressure
Electroceramics, then by two parts polarize respectively so that X-direction piezoelectric actuator 201 energization when vibrate in X direction, Y-direction
Piezoelectric actuator 202 is vibrated when being powered along Y-direction, in other embodiments, X-direction piezoelectric actuator 201 and Y-direction scanning
Driver 202 can also be fixedly connected by other means, and the present invention is without limitation.
In the embodiment of the present invention, it is one in the number of magnetic absorbing mass 40 that the number of magnetic absorbing mass 40, which can be one or more,
When, a magnetic absorbing mass 40 can be arranged on X-direction piezoelectric actuator 201 or Y-direction piezoelectric actuator 202, specifically, such as
Fruit needs to increase optical fiber 30 in the amplitude of oscillation of X-direction, then magnetic absorbing mass 40 can be arranged on X-direction piezoelectric actuator 201, if
It needs to increase the amplitude of oscillation of optical fiber 30 in the Y direction, then magnetic absorbing mass 40 can be arranged on piezoelectric actuator 202 in the Y direction.In magnetic
When the number of body 40 is multiple, it is preferred that it can be 2-4, such as: in number 2 of magnetic absorbing mass 40, as shown in Figure 1, can
Two magnetic absorbing mass 40 to be separately positioned in the upper and lower surface of X-direction piezoelectric actuator 201, or it is respectively set in the Y direction
On the left and right surface of piezoelectric actuator 202, or one of magnetic absorbing mass 40 can also be arranged in X-direction piezoelectric actuator
On 201, the setting of another magnetic absorbing mass 40 is in the Y direction on piezoelectric actuator 202.Preferably, the number of magnetic absorbing mass 40 can be 4
A, two of them are arranged in the upper and lower surface of X-direction piezoelectric actuator 201, and piezoelectric actuator in the Y direction is arranged in other two
On 202 left and right surface, to increase the amplitude of oscillation of optical fiber 30 in the x direction and the y direction simultaneously.
In the embodiment of the present invention, X-direction piezoelectric actuator 201 or Y-direction piezoelectric actuator 202 is can be set in magnetic absorbing mass 40
Any position on, it is preferred that as shown in Figure 1, magnetic absorbing mass 40 can be set in X-direction piezoelectric actuator 201 or Y-direction piezoelectricity
On the free end of driver 202, wherein the free end of X-direction piezoelectric actuator 201 is bordered by with 301 phase of optical fiber cantilever, i.e.,
Close to optical fiber cantilever 301, the free end of Y-direction piezoelectric actuator 202 is connect with the X-direction piezoelectric actuator 201.
In the embodiment of the present invention, magnetic absorbing mass 40 can be magnet, or the material that can be adsorbed by magnet, such as: contain
There is the substance of iron, nickel or cobalt these ingredients, further, for the ease of magnetic absorbing mass 40 to be pasted onto the surface of scanner driver 20
On, and mitigate weight, magnetic absorbing mass 40 can be laminated structure, then in the embodiment of the present invention, magnetic absorbing mass 40 can for flat thin magnet or
One of iron plate is a variety of, for example: assuming that then two magnetic absorbing mass 40 can be when the number of magnetic absorbing mass 40 is two
Flat thin magnet, or be iron plate, or respectively flat thin magnet and iron plate.
In the embodiment of the present invention, according to setting position of the magnetic absorbing mass 40 on piezoelectric actuator 20, electromagnet 50 is arranged
On the corresponding position of shell 10, in fibre-optic scanner work, the waveform in magnetic field caused by electromagnet 50 is controlled
It is converted according to the drive signal waveform for being applied to piezoelectric actuator 20, so that piezoelectric actuator 20 is generated in the excitation of driving signal
Piezoelectric Driving power be superimposed with the magnetic field force in magnetic field, to increase the amplitude of oscillation of piezoelectric actuator 20, specific principle is as follows:
In the embodiment of the present invention, piezoelectric actuator 20 is it can be seen that piezoelectric cantilever, and piezoelectric cantilever is in cyclic drive
Under voltage drive, the movement of end face be can simplify as a spring oscillator by time-varying active force, spring oscillator be one not
Consider frictional resistance, does not consider the quality of spring, do not consider the Utopian physical model of the size and shape of spring, then piezoelectricity
The kinetics equation of driver 20 can indicate are as follows:
Wherein, m is the equivalent mass of piezoelectric actuator 20, and x is the displacement of the end face of the free end of piezoelectric actuator 20, c
For equivalent damped coefficient, w is the natural angular frequency of piezoelectric actuator 20, and U is driving voltage, F be piezoelectric actuator 20 by
The equivalent power arrived, directly proportional to driving voltage U, k is the coefficient of relationship with equivalent force F and driving voltage U, and w ' is driving signal
Angular frequency, x refers to the steady state solution of the amplitude of piezoelectric actuator 20, since x is directly proportional to k*U (amplitude of power), increase
Driving voltage is capable of increasing the Oscillation Amplitude (i.e. the amplitude of oscillation) of piezoelectric actuator 20, if driving voltage asymptotic breakdown voltage and the amplitude of oscillation are still
It, then can be by the size of increase equivalent force F, to increase the amplitude of oscillation of piezoelectric actuator 20 when not reaching requirement so.
Therefore, when piezoelectric actuator 20 works, pass through electromagnet 50 and the magnetic absorbing mass being arranged on piezoelectric actuator 20
40 pairs of piezoelectric actuators 20 apply external force, i.e. magnetic field force, as shown in formula (1), be equivalent to piezoelectric actuator 20 be subject to it is equivalent
Power F due to magnetic field force presence and increase so that the practical amplitude of oscillation of piezoelectric actuator 20 increases with it, as optical fiber 30, due to
The amplitude of oscillation of the end face of piezoelectric actuator 20 increases, and the amplitude of oscillation of optical fiber 30 also increases with it.
Wherein, the waveform in magnetic field refers to the waveform and the waveform phase of driving signal in magnetic field according to the waveform convertion of driving signal
Same or approximately uniform, the identical frequency for referring to magnetic field of waveform is identical as the frequency of the driving signal of piezoelectric actuator 20, phase
Difference is zero or minimum, to the amplitude of signal there is no limit.In practical applications, the response of voltage drive and piezoelectric actuator 20
Between delay pre-compensation can be carried out in the form of phase so that the magnetic field force and piezoelectric actuator that are generated by electromagnet 50
After the 20 Piezoelectric Driving power superpositions generated, the amplitude of piezoelectric actuator 20 can reach maximum value.
Next, being illustrated to the set-up mode of electromagnet 50.
In the embodiment of the present invention, the number of electromagnet 50 can be one or more, specifically, the number of electromagnet 50 and
Setting position can be configured according to 40 facilities of magnetic absorbing mass on piezoelectric actuator 20, according to a kind of possible embodiment party
Formula, it is assumed that magnetic absorbing mass 40 is provided on the free end of X-direction piezoelectric actuator 201, then on the housing 10 with X-direction Piezoelectric Driving
Electromagnet for driving the magnetic absorbing mass 40 is set on the corresponding position in the free end of device 201, and the number of electromagnet 50 can be 1
It is a, as shown in Figure 1, electromagnet 50 can be set on the corresponding position at the top of shell 10, or the bottom of shell 10 is set
On the corresponding position in portion, in alternatively possible embodiment, the number of electromagnet 50 can also be two, respectively in shell 10
Top and bottom around magnetic absorbing mass 40 be symmetrical arranged, in other possible embodiments, the number of electromagnet 50 can be with 3
Or 4, it is configured on the housing 10 around magnetic absorbing mass 40, to be driven to magnetic absorbing mass 40, those skilled in the art
The set-up mode of electromagnet can be selected according to actual needs, and the present invention is without limitation.
In the embodiment of the present invention, as previously mentioned, on X-direction piezoelectric actuator 201 and Y-direction piezoelectric actuator 202
Magnetic absorbing mass 40 can be set, then can correspond to magnetic absorbing mass 40 on X-direction and Y-direction piezoelectric actuator and electromagnet 50 is respectively set,
Magnetic field force to be generated by electromagnet 50 increases the amplitude of oscillation of piezoelectric actuator 20 in the x direction and the y direction.
In the embodiment of the present invention, the effect of shell 10 is packaged fiber scanning means, the shape of shell 10 can with cylindrical type,
(to indicate internal structure, partial shell is omitted in Fig. 1) as shown in Figure 1, shell 10 can also be prismatic, such as: quadrangular
Or hexagonal prisms etc., the present invention are without limitation.
In the embodiment of the present invention, as shown in Figure 1, fibre-optic scanner further includes the clamping for clamping piezoelectric actuator 20
Structure 60, the fixing end of Y-direction scanner driver 202 are fixed on clamp structure 60, thus to entire piezoelectric actuator 20 into
Row is fixed.
In the embodiment of the present invention, the piezoelectric material for constituting piezoelectric actuator 20 can be inorganic piezoelectric material (including piezoelectricity
Crystal and piezoelectric ceramics), organic piezoelectric materials or composite piezoelectric material etc., the embodiment of the present invention to this with no restriction.The present invention
In embodiment, X-direction piezoelectric actuator 201 and Y-direction piezoelectric actuator 202 can be piezoelectric ceramics, and piezoelectric ceramics can be
Chip architecture, chip architecture include but is not limited to that monocrystalline chip architecture, double wafer structure, stacked monocrystalline chip architecture or stacked are double
Chip architecture.
In the embodiment of the present invention, optical fiber 30 can be single mode optical fiber, multimode fibre;On the other hand, optical fiber 30 can be double
Cladded-fiber;And optical fiber 30 can be single-core fiber or multi-core optical fiber;In addition, optical fiber 30 can also be photonic crystal fiber,
Photonic crystal fiber has many peculiar properties, such as: mode transmission, a covering can be only supported in very wide bandwidth range
The arrangement mode of area's stomata being capable of greatly Effect Mode property etc.;In the specific implementation process, optical fiber 30 can also be it
His special optical fiber, the present invention are without limitation.
One or more technical solution in the embodiment of the present invention, at least has the following technical effect that or advantage:
In the scheme of the embodiment of the present invention, fibre-optic scanner includes shell, and piezoelectric actuator is fixed on piezoelectric actuator
On optical fiber, one or more magnetic absorbing mass on the piezo actuator are set, and be arranged on shell one or more electricity
Magnet, when piezoelectric actuator and electromagnet are powered, the piezoelectric actuator the magnetic field that electromagnet generates magnetic field force with apply
It is moved under the collective effect for the Piezoelectric Driving power that the driving signal being added on the piezoelectric actuator generates, to drive optical fiber outstanding
Arm vibration, is superimposed by the magnetic field force that electromagnet generates with Piezoelectric Driving power caused by the driving signal of piezoelectric actuator, energy
Enough increase the amplitude of oscillation of piezoelectric actuator, and then increases the amplitude of oscillation of optical fiber.
All features disclosed in this specification or disclosed all methods or in the process the step of, in addition to mutually exclusive
Feature and/or step other than, can combine in any way.
Any feature disclosed in this specification (including any accessory claim, abstract and attached drawing), except non-specifically chatting
It states, can be replaced by other alternative features that are equivalent or have similar purpose.That is, unless specifically stated, each feature is only
It is an example in a series of equivalent or similar characteristics.
The invention is not limited to specific embodiments above-mentioned.The present invention, which expands to, any in the present specification to be disclosed
New feature or any new combination, and disclose any new method or process the step of or any new combination.
Claims (8)
1. a kind of fibre-optic scanner characterized by comprising
Shell;
Piezoelectric actuator;
Optical fiber is fixed on the piezoelectric actuator, and the optical fiber includes the optical fiber cantilever that can be vibrated;
One or more magnetic absorbing mass are arranged on the piezoelectric actuator;
One or more electromagnet, setting are on the housing, described when the piezoelectric actuator and the electromagnet are powered
Piezoelectric actuator is in the magnetic field force that the electromagnet generates and the pressure that the driving signal being applied on the piezoelectric actuator generates
It is moved under the collective effect of electrical drive power, so that the optical fiber cantilever be driven to vibrate.
2. device as described in claim 1, which is characterized in that the piezoelectric actuator is two-dimensional piezoelectric driver, including the side X
To piezoelectric actuator and the Y-direction piezoelectric actuator vertical with X-direction;
One or more magnetic absorbing mass are arranged on the X-direction piezoelectric actuator;Or
One or more magnetic absorbing mass are arranged on the Y-direction piezoelectric actuator;Or
Described device includes multiple magnetic absorbing mass, multiple magnetic absorbing mass be separately positioned on the X-direction piezoelectric actuator and
On the Y-direction piezoelectric actuator.
3. device as claimed in claim 2, which is characterized in that described device includes two magnetic absorbing mass, is arranged in the X-direction
In the upper and lower surface of the free end of piezoelectric actuator or the Y-direction piezoelectric actuator, wherein the X-direction piezoelectric actuator
Free end be mutually bordered by with the optical fiber cantilever, the free end of the Y-direction piezoelectric actuator and the X-direction piezoelectric actuator
Connection.
4. device as claimed in claim 3, which is characterized in that described device includes two electromagnet, described two electromagnet
It is symmetrical arranged on the housing around described two magnetic absorbing mass.
5. device as described in claim 1, which is characterized in that the X-direction piezoelectric actuator and the Y-direction Piezoelectric Driving
Device is piezoelectric ceramic wafer.
6. device as claimed in claim 5, which is characterized in that the magnetic absorbing mass is laminated structure, and the magnetic absorbing mass is pasted onto
On the surface of the piezoelectric ceramic wafer.
7. such as device of any of claims 1-6, which is characterized in that the magnetic absorbing mass is one in magnet or iron plate
Kind is a variety of.
8. such as device of any of claims 1-6, which is characterized in that in fibre-optic scanner work, control
The waveform in the magnetic field that the electromagnet generates is made according to the waveform convertion for the driving signal being applied on the piezoelectric actuator.
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CN201710624949.2A CN109307932A (en) | 2017-07-27 | 2017-07-27 | A kind of fibre-optic scanner |
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CN201710624949.2A CN109307932A (en) | 2017-07-27 | 2017-07-27 | A kind of fibre-optic scanner |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110376736A (en) * | 2019-04-30 | 2019-10-25 | 成都理想境界科技有限公司 | A kind of scanning display module and near-eye display device |
CN113712503A (en) * | 2021-09-06 | 2021-11-30 | 温州医科大学 | OCT probe applied to fundus operation |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101755233A (en) * | 2007-07-20 | 2010-06-23 | 皇家飞利浦电子股份有限公司 | Fiber-optic scanner |
CN103105675A (en) * | 2013-03-09 | 2013-05-15 | 陈云辉 | Optical fiber fibrillation needle type scanning device, micro display device, camera and endoscope |
CN103782223A (en) * | 2011-09-02 | 2014-05-07 | 奥林巴斯株式会社 | Optical scanning device and endoscope, microscope, projector equipped with the same |
CN104568885A (en) * | 2015-01-05 | 2015-04-29 | 天津医科大学 | Optical-fiber-driving double-scanning fluorescence probe |
CN104956250A (en) * | 2013-01-29 | 2015-09-30 | 奥林巴斯株式会社 | Optical scanning device |
CN106255442A (en) * | 2014-05-02 | 2016-12-21 | 奥林巴斯株式会社 | Fibre-optic scanner and optical scanning-type endoscope |
-
2017
- 2017-07-27 CN CN201710624949.2A patent/CN109307932A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101755233A (en) * | 2007-07-20 | 2010-06-23 | 皇家飞利浦电子股份有限公司 | Fiber-optic scanner |
CN103782223A (en) * | 2011-09-02 | 2014-05-07 | 奥林巴斯株式会社 | Optical scanning device and endoscope, microscope, projector equipped with the same |
CN104956250A (en) * | 2013-01-29 | 2015-09-30 | 奥林巴斯株式会社 | Optical scanning device |
CN103105675A (en) * | 2013-03-09 | 2013-05-15 | 陈云辉 | Optical fiber fibrillation needle type scanning device, micro display device, camera and endoscope |
CN106255442A (en) * | 2014-05-02 | 2016-12-21 | 奥林巴斯株式会社 | Fibre-optic scanner and optical scanning-type endoscope |
CN104568885A (en) * | 2015-01-05 | 2015-04-29 | 天津医科大学 | Optical-fiber-driving double-scanning fluorescence probe |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110376736A (en) * | 2019-04-30 | 2019-10-25 | 成都理想境界科技有限公司 | A kind of scanning display module and near-eye display device |
CN113712503A (en) * | 2021-09-06 | 2021-11-30 | 温州医科大学 | OCT probe applied to fundus operation |
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