CN216356517U

CN216356517U - Scanning actuator and optical fiber scanner

Info

Publication number: CN216356517U
Application number: CN202023349436.1U
Authority: CN
Inventors: 不公告发明人
Original assignee: Chengdu Idealsee Technology Co Ltd
Current assignee: Chengdu Idealsee Technology Co Ltd
Priority date: 2020-12-31
Filing date: 2020-12-31
Publication date: 2022-04-19
Anticipated expiration: 2030-12-31

Abstract

The utility model discloses a scanning actuator, which comprises a first actuating part and a second actuating part which are sequentially connected, wherein the first actuating part comprises a substrate and a piezoelectric driving layer arranged on the upper surface and/or the lower surface of the substrate, the second actuating part comprises a substrate and a piezoelectric driving layer arranged on the left surface and/or the right surface of the substrate, the piezoelectric driving layer comprises a plurality of first electrodes and second electrodes which are sequentially arranged in a crossed manner along the front-back direction, and piezoelectric ceramic units arranged between the adjacent first electrodes and second electrodes, each piezoelectric ceramic unit is polarized along the front-back direction, and the fixed end of the substrate of the second actuating part is fixedly connected with the free end of the substrate of the first actuating part. Each adjacent first electrode and second electrode and the piezoelectric ceramic unit between the first electrode and the second electrode form a driving unit, and the D33 direction change of the piezoelectric ceramic unit can be used for driving the actuator to vibrate, so that the driving power consumption is remarkably reduced.

Description

Scanning actuator and optical fiber scanner

Technical Field

The utility model relates to the technical field of scanning display, in particular to a scanning actuator and an optical fiber scanner.

Background

Scanning display imaging is a new display technology, and can be used for various display scenes such as projection display, near-eye display and the like.

The scanning display imaging can be realized by a fiber scanner, in addition to a Digital Micromirror Device (DMD) which is widely used at present.

A typical fiber scanner configuration is shown in fig. 1, and the fiber scanner mainly includes: a scanning actuator adopting a fast-slow axis structure, and an optical fiber for scanning light. The scanning actuator fixed on the base comprises a slow shaft, an isolation part and a fast shaft in sequence from back to front, some optical fiber scanners do not need to be provided with the isolation part, the slow shaft is used for vibrating at a relatively slow frequency in a first direction (vertical direction, namely the Y-axis direction of a reference coordinate system in figure 1), the fast shaft is used for vibrating at a relatively fast frequency in a second direction (horizontal direction, namely the X-axis direction of the reference coordinate system in figure 1), the vibration of the slow shaft is accumulated on the fast shaft through the isolation part, or the vibration of the slow shaft is directly accumulated on the fast shaft in an embodiment without the isolation part, so that the optical fiber can be driven to perform two-dimensional scanning in the first direction and the second direction, two-dimensional grid type scanning is realized, and an image is projected.

When the optical fiber scanner is used for realizing large-screen display or splicing display, a large number of optical fiber scanners are generally required to work simultaneously, and images emitted by the optical fiber scanners are spliced on a display screen. At this time, a slight increase in power consumption of a single fiber scanner will cause a significant increase in overall power consumption, and thus the equipment cost, the use cost, the heat dissipation requirement and the like are all increased significantly. Therefore, how to reduce the power consumption of a single scanner becomes a technical problem to be solved urgently.

Meanwhile, whether the scanner is easy to manufacture, how consistent the scanner is produced in batches, and whether the scanner is convenient to accurately position and assemble also restrict the imaging quality. To obtain a stable scanning range and accurately control the scanning trajectory, the scanning trajectory of the fiber scanner needs to have precise consistency, and any mounting structure is not firm and has a position error, so that the vibration of the actuator becomes uncontrollable or generates a disordered vibration component. How to avoid uncontrolled or chaotic vibration components is also one of the important factors to improve the quality of the scan.

SUMMERY OF THE UTILITY MODEL

Embodiments of the present invention provide a scanning actuator and an optical fiber scanner, which are used to at least solve the above technical problems caused by the increase of power consumption.

In order to achieve the above object of the present invention, a first aspect of an embodiment of the present invention provides a scan actuator, including a first actuating portion and a second actuating portion connected in sequence, where the first actuating portion includes a substrate and a piezoelectric driving layer disposed on an upper surface and/or a lower surface of the substrate, a front end and a rear end of the substrate are respectively a fixed end and a free end, a thickness direction of the substrate is a vertical direction, the piezoelectric driving layer includes a plurality of first electrodes and second electrodes disposed in sequence along the front-rear direction, and piezoelectric ceramic units disposed between adjacent first electrodes and second electrodes, each piezoelectric ceramic unit is polarized along the front-rear direction, polarization directions of any two adjacent piezoelectric ceramic units are opposite, the first electrodes are electrically connected to each other, and the second electrodes are electrically connected to each other;

the second actuating part comprises a substrate and a piezoelectric driving layer arranged on the left surface and/or the right surface of the substrate, the front end and the rear end of the substrate are respectively a fixed end and a free end, the thickness direction of the substrate is taken as the horizontal direction, the piezoelectric driving layer comprises a plurality of first electrodes and second electrodes which are sequentially arranged in a crossed manner along the front-rear direction, and piezoelectric ceramic units arranged between the adjacent first electrodes and second electrodes, each piezoelectric ceramic unit is polarized along the front-rear direction, the polarization directions of any two adjacent piezoelectric ceramic units are opposite, the first electrodes are electrically connected with each other, and the second electrodes are electrically connected with each other;

and the fixed end of the substrate of the second actuating part is fixedly connected with the free end of the substrate of the first actuating part.

In a preferred embodiment, the first actuating part is a slow-axis actuator, the second actuating part is a fast-axis actuator, and the vibration frequency of the fast-axis actuator is far greater than that of the slow-axis actuator.

According to the utility model, each adjacent first electrode and second electrode of the slow axis actuator and the piezoelectric ceramic unit positioned between the first electrode and the second electrode form a driving unit, and the polarization direction of the piezoelectric ceramic unit is consistent with the overall extension and contraction direction of the piezoelectric driving layer, so that the D33 direction type variable driving actuator of the piezoelectric ceramic unit can be used for vibrating, and compared with the D31 or D32 direction type variable using the piezoelectric ceramic unit, the direction variable of the piezoelectric ceramic unit is nearly doubled, therefore, a larger swing amplitude can be realized by using lower voltage, and the driving power consumption is obviously reduced. Each adjacent first electrode and second electrode of the fast axis actuator and the piezoelectric ceramic unit between the first electrode and the second electrode form a driving unit, and the polarization direction of the piezoelectric ceramic unit is consistent with the expansion and contraction direction of the whole piezoelectric driving layer, so that the D33 direction type variable driving actuator of the piezoelectric ceramic unit can be used for vibrating, and compared with the D31 or D32 direction type variable of the piezoelectric ceramic unit, the D3578 direction type variable driving actuator of the piezoelectric ceramic unit is nearly doubled, therefore, the larger swing can be realized by using lower voltage, and the driving power consumption is also obviously reduced.

The second actuating part and the first actuating part are both of sheet (plate) structures, so that the complexity of a machining process and the machining difficulty are reduced, the reliability is improved, the cost is reduced, and the mass production is easy. The sheet structure has high forming precision and assembling precision, accurate packaging and positioning, can save a packaged lens adjusting mechanism, and is easy for batch production.

Optionally, the substrate and the base plate may be glass fiber plates, copper plates or steel plates.

In some embodiments of the present invention, a piezoelectric driving layer is disposed on an upper surface of the substrate of the second actuator, and a piezoelectric driving layer is not disposed on a lower surface of the substrate, where the piezoelectric driving layer includes a plurality of first electrodes and second electrodes disposed on the upper surface of the substrate and intersecting in sequence along a front-back direction, and a piezoelectric ceramic unit disposed between each adjacent first electrode and second electrode, each piezoelectric ceramic unit is polarized along the front-back direction, polarization directions of any two adjacent piezoelectric ceramic units are opposite, each first electrode is electrically connected to each other, and each second electrode is electrically connected to each other. The piezoelectric ceramic unit is a piezoelectric material polarized in the front-rear direction, and preferably, the lower surface of the piezoelectric ceramic unit is closely attached to the substrate, and the length of the piezoelectric ceramic unit extending in the left-right direction corresponds to the width of the substrate in the left-right direction. Further preferably, the length of the portion of the upper surface of the substrate, in which the piezoelectric ceramic units are arranged in the front-rear direction, is equivalent to the length of the substrate in the front-rear direction, so that the area of the piezoelectric driving layer is distributed over the upper surface of the substrate as much as possible, and the volume of the device is minimized on the premise of meeting the performance requirement. Preferably, the first electrode and the second electrode are closely attached to the front side or the back side of the adjacent piezoelectric ceramic unit.

Optionally, in another embodiment of the present invention, a piezoelectric driving layer is disposed on a lower surface of a substrate of the second actuating portion, a piezoelectric driving layer is not disposed on an upper surface of the substrate, the piezoelectric driving layer includes a plurality of first electrodes and second electrodes disposed on the lower surface of the substrate and sequentially crossed in a front-back direction, and a piezoelectric ceramic unit disposed between each adjacent first electrode and second electrode, each piezoelectric ceramic unit is polarized in the front-back direction, polarization directions of any two adjacent piezoelectric ceramic units are opposite, each first electrode is electrically connected to each other, and each second electrode is electrically connected to each other. The piezoelectric ceramic unit is a piezoelectric material polarized in the front-rear direction, and preferably, the lower surface of the piezoelectric ceramic unit is closely attached to the substrate, and the length of the piezoelectric ceramic unit extending in the left-right direction corresponds to the width of the substrate in the left-right direction. Further preferably, the length of the portion of the lower surface of the substrate, in which the piezoelectric ceramic units are arranged in the front-rear direction, is equivalent to the length of the substrate in the front-rear direction, so that the area of the piezoelectric driving layer is as large as possible over the lower surface of the substrate, and the volume of the device is minimized on the premise of meeting the performance requirement. Preferably, the first electrode and the second electrode are closely attached to the front side or the back side of the adjacent piezoelectric ceramic unit.

Optionally, in another embodiment of the present invention, piezoelectric driving layers are disposed on both an upper surface and a lower surface of a substrate of the second actuating portion, a first piezoelectric driving layer is disposed on the upper surface of the substrate, the first piezoelectric driving layer includes a plurality of first electrodes and second electrodes disposed on the upper surface of the substrate and sequentially crossed in a front-back direction, and piezoelectric ceramic units disposed between the adjacent first electrodes and second electrodes, each piezoelectric ceramic unit is polarized in the front-back direction, polarization directions of any two adjacent piezoelectric ceramic units are opposite, each first electrode of the first piezoelectric driving layer is electrically connected to each other, and each second electrode of the first piezoelectric driving layer is electrically connected to each other; the lower surface of base plate be provided with second piezoelectricity drive layer, second piezoelectricity drive layer including set up in a plurality of first electrodes and the second electrode that set gradually the cross arrangement along the fore-and-aft direction of base plate lower surface and set up the piezoceramics unit between each adjacent first electrode and second electrode, each piezoceramics unit all polarizes along the fore-and-aft direction, and the polarization direction of two arbitrary adjacent piezoceramics units is opposite, the equal electric connection each other of each first electrode on second piezoelectricity drive layer, the equal electric connection each other of each second electrode on second piezoelectricity drive layer.

The piezoelectric ceramic unit is a piezoelectric material polarized in the front-rear direction, and preferably, the lower surface of the piezoelectric ceramic unit is closely attached to the substrate, and the length of the piezoelectric ceramic unit extending in the left-right direction corresponds to the width of the substrate in the left-right direction. Further preferably, the length of the portion of the upper surface and the lower surface of the substrate, in which the piezoelectric ceramic units are arranged in the front-rear direction, is equivalent to the length of the substrate in the front-rear direction, so that the area of the piezoelectric driving layer is as full as possible on the surface of the substrate, and the volume of the device is minimized on the premise of meeting the performance requirement. Preferably, the first electrode and the second electrode are closely attached to the front side or the back side of the adjacent piezoelectric ceramic unit.

In some embodiments of the present invention, a piezoelectric driving layer is disposed on a left surface of the substrate of the first actuating portion, a piezoelectric driving layer is not disposed on a right surface of the substrate, the piezoelectric driving layer includes a plurality of first electrodes and second electrodes disposed on the left surface of the substrate and intersecting in sequence along a front-back direction, and a piezoelectric ceramic unit disposed between each adjacent first electrode and second electrode, each piezoelectric ceramic unit is polarized along the front-back direction, polarization directions of any two adjacent piezoelectric ceramic units are opposite, each first electrode is electrically connected to each other, and each second electrode is electrically connected to each other. The piezoelectric ceramic unit is a piezoelectric material polarized in the front-back direction, and preferably, the right surface of the piezoelectric ceramic unit is closely attached to the substrate, and the length of the piezoelectric ceramic unit extending in the vertical direction is equivalent to the width of the substrate in the vertical direction. Further preferably, the length of the portion of the left surface of the substrate, on which the piezoelectric ceramic units are arranged in the front-rear direction, is equivalent to the length of the substrate in the front-rear direction, so that the area of the piezoelectric driving layer is distributed over the left surface of the substrate as much as possible, and the volume of the device is minimized on the premise of meeting the performance requirement. Preferably, the first electrode and the second electrode are closely attached to the front side or the back side of the adjacent piezoelectric ceramic unit.

Optionally, in another embodiment of the present invention, a piezoelectric driving layer is disposed on a right surface of the substrate of the first actuating portion, a piezoelectric driving layer is not disposed on a left surface of the substrate, the piezoelectric driving layer includes a plurality of first electrodes and second electrodes disposed on the right surface of the substrate and sequentially crossed in a front-back direction, and a piezoelectric ceramic unit disposed between each adjacent first electrode and second electrode, each piezoelectric ceramic unit is polarized in the front-back direction, polarization directions of any two adjacent piezoelectric ceramic units are opposite, each first electrode is electrically connected to each other, and each second electrode is electrically connected to each other. The piezoelectric ceramic unit is a piezoelectric material polarized in the front-rear direction, and preferably, the left surface of the piezoelectric ceramic unit is closely attached to the substrate, and the length of the piezoelectric ceramic unit extending in the vertical direction corresponds to the width of the substrate in the vertical direction. Further preferably, the length of the portion of the right surface of the substrate, on which the piezoelectric ceramic units are arranged in the front-rear direction, is equivalent to the length of the substrate in the front-rear direction, so that the area of the piezoelectric driving layer is distributed on the right surface of the substrate as much as possible, and the volume of the device is minimized on the premise of meeting the performance requirement. Preferably, the first electrode and the second electrode are closely attached to the front side or the back side of the adjacent piezoelectric ceramic unit.

Optionally, in another embodiment of the present invention, piezoelectric driving layers are disposed on both left and right surfaces of a substrate of the first actuation portion, a first piezoelectric driving layer is disposed on the left surface of the substrate, the first piezoelectric driving layer includes a plurality of first electrodes and second electrodes disposed on the left surface of the substrate and intersecting in sequence along a front-back direction, and piezoelectric ceramic units disposed between the adjacent first electrodes and second electrodes, each piezoelectric ceramic unit is polarized along the front-back direction, polarization directions of any two adjacent piezoelectric ceramic units are opposite, the first electrodes of the first piezoelectric driving layer are all electrically connected to each other, and the second electrodes of the first piezoelectric driving layer are all electrically connected to each other; the right surface of base plate be provided with second piezoelectricity drive layer, second piezoelectricity drive layer including set up in a plurality of first electrodes and the second electrode that set gradually the cross setting along the fore-and-aft direction on base plate right surface and set up the piezoceramics unit between each adjacent first electrode and second electrode, each piezoceramics unit all polarizes along the fore-and-aft direction, and the polarization direction of arbitrary two adjacent piezoceramics units is opposite, the equal electric connection each other of each first electrode on second piezoelectricity drive layer, the equal electric connection each other of each second electrode on second piezoelectricity drive layer.

The piezoelectric ceramic unit is a piezoelectric material polarized in the front-back direction, and preferably, the piezoelectric ceramic unit is closely attached to the substrate, and the length of the piezoelectric ceramic unit extending in the vertical direction corresponds to the width of the substrate in the vertical direction. Further preferably, the length of the portion of the left surface and the right surface of the substrate, where the piezoelectric ceramic units are arranged in the front-back direction, is equivalent to the length of the substrate in the front-back direction, so that the area of the piezoelectric driving layer is as full as possible on the surface of the substrate, and the volume of the device is minimized on the premise of meeting the performance requirement. Preferably, the first electrode and the second electrode are closely attached to the front side or the back side of the adjacent piezoelectric ceramic unit.

The optical fiber is fixedly connected with the free end of the second actuating part in a cantilever supporting mode, the light-emitting end of the optical fiber is taken as the front end, the front part of the optical fiber exceeds the free end of the second actuating part to form an optical fiber cantilever, and the part of the optical fiber, which is positioned at the rear side of the optical fiber cantilever, is fixedly connected with the second actuating part.

The motion trail of the free end of the second actuating part relative to the fixed end of the first actuating part is the composition of the vibration trails of the second actuating part and the first actuating part, and the vibration direction of the free end of the second actuating part relative to the fixed end of the second actuating part is perpendicular to the vibration direction of the free end of the first actuating part relative to the fixed end of the first actuating part, so that the fiber cantilever can perform Lissajous type scanning or grid type scanning under the driving of the piezoelectric actuator. Preferably, the natural frequency of the second actuator is much greater than the natural frequency of the first actuator to meet the requirements of grid scanning while also avoiding resonant interference between the second actuator and the first actuator.

Further preferably, the scanning actuator and the optical fiber are fixedly packaged in a housing, and a fixed end of the first actuating portion is fixedly connected with the housing. Further optionally, a corresponding lens group (not shown in the figures) is further fixed at the light-emitting end of the package. When the optical fiber scanning device works, the optical fiber scanning device is driven by the electrode to drive the optical fiber cantilever to sweep at a set track and a set frequency, and meanwhile, the end face of the optical fiber cantilever emits light so as to project a corresponding image. The scanning methods herein include, but are not limited to: grid-type scanning, spiral-type scanning, lissajou-type scanning, and the like.

Of course, in some embodiments, the number of scanning fibers is at least one, and may be two or more, and is not limited herein.

One or more technical solutions in the embodiments of the present invention have at least the following technical effects or advantages:

Drawings

FIG. 1 is a schematic diagram of an exemplary fiber scanner of the prior art;

FIG. 2a is a schematic diagram of an illustrative scanning display module according to an embodiment of the present invention;

FIG. 2b is a schematic diagram of a fiber scanner in the illustrative scanning display module of FIG. 2 a;

FIG. 3 is a schematic view of a scanning actuator and a fiber scanner according to the present invention;

FIG. 4 is a schematic structural diagram of a first actuator of a scanning actuator according to an embodiment of the present invention;

FIG. 5 is a schematic diagram of the vibration structure of the first actuator of the scanning actuator of the present invention;

FIG. 6 is a schematic diagram of another embodiment of a first actuator portion of a scanning actuator in accordance with the present invention;

FIG. 7 is a schematic diagram of a second actuator portion of a scanning actuator according to an embodiment of the present invention;

FIG. 8 is a schematic view of the vibrating structure of the second actuator portion of the scanning actuator of the present invention;

fig. 9 is a schematic structural diagram of another embodiment of the second actuating portion of the scanning actuator of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Illustrative scanning display module

As shown in fig. 2a, an illustrative scanning display module according to the present application mainly includes:

the laser system comprises a processor 100, a laser group 110, a fiber scanner 120, a transmission fiber 130, a light source modulation circuit 140, a scanning driving circuit 150 and a beam combining unit 160. Wherein:

the processor 100 may be a Graphics Processing Unit (GPU), a Central Processing Unit (CPU), or other chips or circuits having a control function and an image Processing function, and is not limited in particular.

When the system works, the processor 100 may control the light source modulation circuit 140 to modulate the laser group 110 according to image data to be displayed, where the laser group 110 includes a plurality of monochromatic lasers, and the lasers emit light beams of different colors respectively. As shown in fig. 2a, three-color lasers of Red (R), Green (G) and Blue (B) can be specifically used in the laser group. The light beams emitted by the lasers in the laser group 110 are combined into a laser beam by the beam combining unit 160 and coupled into the transmission fiber 130.

The processor 100 can also control the scan driving circuit 150 to drive the fiber scanner 120 to scan out the light beam transmitted in the transmission fiber 130.

The light beam scanned and output by the fiber scanner 120 acts on a certain pixel point position on the medium surface, and forms a light spot on the pixel point position, so that the pixel point position is scanned. Under the action of the fiber scanner 120, the output end of the transmission fiber 130 scans according to a certain scanning track, so that the light beam moves to the corresponding pixel point position for scanning. During actual scanning, the light beam output by the transmission fiber 130 will form a light spot with corresponding image information (e.g., color, gray scale or brightness) at each pixel location. In a frame time, the light beam traverses each pixel position at a high enough speed to complete the scanning of a frame of image, and because the human eye observes the object and has the characteristic of 'visual residual', the human eye cannot perceive the movement of the light beam at each pixel position but sees a frame of complete image.

With continued reference to FIG. 2b, a specific configuration of the fiber scanner 120 is shown, which includes: an actuator 121, a fiber optic cantilever 122, a lens 123, a scanner enclosure 124, and a fixed component 125. The actuator 121 is fixed in the scanner package 124 by a fixing component 125, the transmission fiber 130 extends at a free end of the actuator 121 to form a fiber suspension 122 (also referred to as a scanning fiber), and when the scanning actuator 121 is driven by a scanning driving signal to vibrate in a vertical direction (the vertical direction is parallel to a Y axis in the reference coordinate system in fig. 2a and 2b, in this embodiment, the vertical direction may also be referred to as a first direction) and a horizontal direction (the horizontal direction is parallel to an X axis in the reference coordinate system in fig. 2a and 2b, in this embodiment, the horizontal direction may also be referred to as a second direction), and the front end of the fiber suspension 122 is driven by the scanning actuator 121 to sweep along a predetermined track and emit a light beam, and the emitted light beam can be scanned and imaged through the lens 123.

It should be noted that, in the embodiment of the present application, the rear end of the scanning actuator refers to an end of the scanning actuator that does not vibrate and is used as a fixed end, and may also be referred to as a fixed end; the front end of the scanning actuator is the other end of the scanning actuator opposite to the rear end, and can also be called as a free end, and is the most significant part of deformation and amplitude on the scanning actuator. The light-emitting end of the optical fiber cantilever may be referred to as a tip end of the optical fiber cantilever or a free end of the optical fiber cantilever. It should be understood that such description is not intended as a limitation on the present application.

The above-mentioned illustrative optical display module is an exemplary one, and in practical applications, the specific architecture of the optical display module is not limited to that shown in fig. 2a and 2b, and may be changed, for example: the light source modulation circuit 140 and the scan driving circuit 150 may be combined into a processing circuit; for another example: the processor 100 may be independent from the optical display module, rather than being a constituent unit in the optical display module, and so on, and for different variations, it is not described in detail here.

As mentioned above, a slight increase in the power consumption of a single fiber scanner will result in a significant increase in the overall power consumption, and therefore the equipment cost, the use cost, the heat dissipation requirement, etc. will all rise significantly. Therefore, how to reduce the power consumption of a single scanner becomes a technical problem to be solved urgently.

An embodiment of the present invention provides a scanning actuator, as shown in fig. 3, including a first actuator 1 and a second actuator 2 connected in sequence, as shown in fig. 5-8, the first actuator 1 includes a substrate 14 and a piezoelectric driving layer 13 disposed on the upper surface and/or the lower surface of the substrate 14, the front and rear ends of the substrate 14 are respectively a fixed end 11 and a free end 12, the thickness direction of the substrate 14 is a vertical direction, the piezoelectric driving layer 13 includes a plurality of first electrodes 131 and second electrodes 132 sequentially crossing each other in a front-rear direction, and piezoelectric ceramic units 133 disposed between the first electrodes 131 and the second electrodes 132, each piezoelectric ceramic unit 133 being polarized in the front-rear direction, the polarization directions of any two adjacent piezoelectric ceramic units 133 are opposite, the first electrodes 131 are electrically connected to each other, and the second electrodes 132 are electrically connected to each other;

the second actuating part 2 comprises a substrate 24 and a piezoelectric driving layer 23 arranged on the left surface and/or the right surface of the substrate 24, the front end and the back end of the substrate 24 are respectively a fixed end 21 and a free end 22, the thickness direction of the substrate 24 is the horizontal direction, the piezoelectric driving layer 23 comprises a plurality of first electrodes 231 and second electrodes 232 which are sequentially arranged in a crossed manner along the front-back direction, and piezoelectric ceramic units 233 which are arranged between the adjacent first electrodes 231 and second electrodes 232, each piezoelectric ceramic unit 233 is polarized along the front-back direction, the polarization directions of any two adjacent piezoelectric ceramic units 233 are opposite, the first electrodes 231 are electrically connected with each other, and the second electrodes 232 are electrically connected with each other;

the fixed end 21 of the base plate 24 of the second actuating part 2 is fixedly connected with the free end 12 of the base plate 14 of the first actuating part 1.

In a preferred embodiment, the first actuating part 1 is a slow axis actuator and the second actuating part 2 is a fast axis actuator, the vibration frequency of the fast axis actuator being much higher than that of the slow axis actuator.

The driving unit is formed by each adjacent first electrode 131 and second electrode 132 of the slow axis actuator and the piezoelectric ceramic unit 133 positioned between the first electrode 131 and the second electrode 132, and the polarization direction of the piezoelectric ceramic unit 133 is consistent with the overall extension and contraction direction of the piezoelectric driving layer 13, so that the D33 direction type variable driving actuator of the piezoelectric ceramic unit 133 can be used for vibrating, and compared with the D32 or D31 direction type variable of the piezoelectric ceramic unit 133, the driving unit is nearly doubled, therefore, a larger swing can be realized by using lower voltage, and the driving power consumption is obviously reduced. Each of the adjacent first electrode 231 and second electrode 232 of the fast axis actuator and the piezoelectric ceramic unit 233 located between the first electrode 231 and the second electrode 232 constitute a driving unit, and the polarization direction of the piezoelectric ceramic unit 233 coincides with the overall extension and contraction direction of the piezoelectric driving layer 23, so that the D33 direction type variable driving actuator vibration of the piezoelectric ceramic unit 233 is nearly doubled compared with the D32 or D31 direction type variable of the piezoelectric ceramic unit 233, and thus a larger swing can be realized with a lower voltage, and also the driving power consumption is significantly reduced.

According to the utility model, the second actuating part 1 and the first actuating part 2 are both of a sheet (plate) structure, so that the complexity and the difficulty of a processing process are reduced, the reliability is improved, the cost is reduced, and the mass production is easy. The sheet structure has high forming precision and assembling precision, accurate packaging and positioning, can save a packaged lens adjusting mechanism, and is easy for batch production.

Optionally, the substrate 14 and the substrate 24 may be glass fiber plates, copper plates, or steel plates.

In some embodiments of the present invention, as shown in fig. 4 and 5, the piezoelectric driving layer 13 is disposed on the upper surface of the substrate 14, the piezoelectric driving layer 13 is not disposed on the lower surface of the substrate 14, the piezoelectric driving layer 13 includes a plurality of first electrodes 131 and second electrodes 132 disposed on the upper surface of the substrate 14 and sequentially crossed in the front-back direction, and a piezoelectric ceramic unit 133 disposed between each adjacent first electrode 131 and second electrode 132, each piezoelectric ceramic unit 133 is polarized in the front-back direction, the polarization directions of any two adjacent piezoelectric ceramic units 133 are opposite, each first electrode 131 is electrically connected to each other, and each second electrode 132 is electrically connected to each other. The piezoelectric ceramic unit 133 is a piezoelectric material polarized in the front-rear direction, and preferably, the lower surface of the piezoelectric ceramic unit 133 is closely attached to the substrate 14, and the length of the piezoelectric ceramic unit 133 extending in the left-right direction corresponds to the width of the substrate 14 in the left-right direction. Further preferably, the length of the portion of the upper surface of the substrate 14 where the piezoelectric ceramic units 133 are arranged in the front-rear direction is equivalent to the length of the substrate 14 in the front-rear direction, so that the area of the piezoelectric driving layer 13 is as large as possible to cover the upper surface of the substrate 14, and the volume of the device is minimized on the premise of meeting the performance requirement. Preferably, each of the first electrode 131 and the second electrode 132 is closely attached to the front side or the rear side of the adjacent piezoelectric ceramic unit 133.

Optionally, in another embodiment of the present invention, the piezoelectric driving layer 13 is disposed on the lower surface of the substrate 14, the piezoelectric driving layer 13 is not disposed on the upper surface of the substrate 14, the piezoelectric driving layer 13 includes a plurality of first electrodes 131 and second electrodes 132 disposed on the lower surface of the substrate 14 and sequentially crossed in the front-back direction, and a piezoelectric ceramic unit 133 disposed between each adjacent first electrode 131 and second electrode 132, each piezoelectric ceramic unit 133 is polarized in the front-back direction, the polarization directions of any two adjacent piezoelectric ceramic units 133 are opposite, each first electrode 131 is electrically connected to each other, and each second electrode 132 is electrically connected to each other. The piezoelectric ceramic unit 133 is a piezoelectric material polarized in the front-rear direction, and preferably, the lower surface of the piezoelectric ceramic unit 133 is closely attached to the substrate 14, and the length of the piezoelectric ceramic unit 133 extending in the left-right direction corresponds to the width of the substrate 14 in the left-right direction. Further preferably, the length of the portion of the lower surface of the substrate 14 where the piezoelectric ceramic units 133 are arranged in the front-rear direction is equivalent to the length of the substrate 14 in the front-rear direction, so that the area of the piezoelectric driving layer 13 is as large as possible to cover the lower surface of the substrate 14, and the volume of the device is minimized on the premise of meeting the performance requirement. Preferably, each of the first electrode 131 and the second electrode 132 is closely attached to the front side or the rear side of the adjacent piezoelectric ceramic unit 133.

Optionally, in another embodiment of the present invention, as shown in fig. 6, the piezoelectric driving layers 13 are disposed on both the upper surface and the lower surface of the substrate 14, the first piezoelectric driving layer 13 is disposed on the upper surface of the substrate 14, the first piezoelectric driving layer 13 includes a plurality of first electrodes 131 and second electrodes 132 disposed on the upper surface of the substrate 14 and sequentially crossed in the front-back direction, and piezoelectric ceramic units 133 disposed between the adjacent first electrodes 131 and second electrodes 132, each piezoelectric ceramic unit 133 is polarized in the front-back direction, the polarization directions of any two adjacent piezoelectric ceramic units 133 are opposite, the first electrodes 131 of the first piezoelectric driving layer 13 are electrically connected to each other, and the second electrodes 132 of the first piezoelectric driving layer 13 are electrically connected to each other; the lower surface of the substrate 14 is provided with a second piezoelectric driving layer 13, the second piezoelectric driving layer 13 includes a plurality of first electrodes 131 and second electrodes 132 arranged on the lower surface of the substrate 14 in a sequentially crossing manner along the front-back direction, and piezoelectric ceramic units 133 arranged between the adjacent first electrodes 131 and second electrodes 132, each piezoelectric ceramic unit 133 is polarized along the front-back direction, the polarization directions of any two adjacent piezoelectric ceramic units 133 are opposite, the first electrodes 131 of the second piezoelectric driving layer 13 are electrically connected with each other, and the second electrodes 132 of the second piezoelectric driving layer 13 are electrically connected with each other.

The piezoelectric ceramic unit 133 is a piezoelectric material polarized in the front-rear direction, and preferably, the lower surface of the piezoelectric ceramic unit 133 is closely attached to the substrate 14, and the length of the piezoelectric ceramic unit 133 extending in the left-right direction corresponds to the width of the substrate 14 in the left-right direction. Further preferably, the length of the portion of the upper surface and the lower surface of the substrate 14, in which the piezoelectric ceramic units 133 are arranged in the front-rear direction, is equivalent to the length of the substrate 14 in the front-rear direction, so that the area of the piezoelectric driving layer 13 is as large as possible over the surface of the substrate 14, and the volume of the device is minimized on the premise of meeting the performance requirement. Preferably, each of the first electrode 131 and the second electrode 132 is closely attached to the front side or the rear side of the adjacent piezoelectric ceramic unit 133.

In some embodiments of the present invention, as shown in fig. 7 and 8, the piezoelectric driving layer 23 is disposed on the left surface of the substrate 24, the piezoelectric driving layer 23 is not disposed on the right surface of the substrate 24, the piezoelectric driving layer 23 includes a plurality of first electrodes 231 and second electrodes 232 disposed on the left surface of the substrate 24 and sequentially crossed in the front-back direction, and piezoelectric ceramic units 233 disposed between the adjacent first electrodes 231 and second electrodes 232, each piezoelectric ceramic unit 233 is polarized in the front-back direction, the polarization directions of any two adjacent piezoelectric ceramic units 233 are opposite, the first electrodes 231 are electrically connected to each other, and the second electrodes 232 are electrically connected to each other. The piezoelectric ceramic unit 233 is a piezoelectric material polarized in the front-rear direction, and preferably, the right surface of the piezoelectric ceramic unit 233 is closely attached to the substrate 24, and the length of the piezoelectric ceramic unit 233 extending in the vertical direction corresponds to the width of the substrate 24 in the vertical direction. Further preferably, the length of the portion of the left surface of the substrate 24 where the piezoelectric ceramic units 233 are arranged in the front-rear direction is equivalent to the length of the substrate 24 in the front-rear direction, so that the area of the piezoelectric driving layer 23 is as full as possible on the left surface of the substrate 24, and the volume of the device is minimized on the premise of meeting the performance requirement. Preferably, the first electrode 231 and the second electrode 232 are closely attached to the front side or the rear side of the adjacent piezoelectric ceramic unit 233.

Optionally, in another embodiment of the present invention, the piezoelectric driving layer 23 is disposed on the right surface of the substrate 24, the piezoelectric driving layer 23 is not disposed on the left surface of the substrate 24, the piezoelectric driving layer 23 includes a plurality of first electrodes 231 and second electrodes 232 disposed on the right surface of the substrate 24 and sequentially crossed in the front-back direction, and piezoelectric ceramic units 233 disposed between the adjacent first electrodes 231 and second electrodes 232, each piezoelectric ceramic unit 233 is polarized in the front-back direction, the polarization directions of any two adjacent piezoelectric ceramic units 233 are opposite, the first electrodes 231 are electrically connected to each other, and the second electrodes 232 are electrically connected to each other. The piezoelectric ceramic unit 233 is a piezoelectric material polarized in the front-rear direction, and preferably, the left surface of the piezoelectric ceramic unit 233 is closely attached to the substrate 24, and the length of the piezoelectric ceramic unit 233 extending in the vertical direction corresponds to the width of the substrate 24 in the vertical direction. It is further preferable that the length of the portion of the right surface of the substrate 24 where the piezoelectric ceramic units 233 are arranged in the front-rear direction is equivalent to the length of the substrate 24 in the front-rear direction, so that the area of the piezoelectric driving layer 23 is as large as possible over the right surface of the substrate 24, and the volume of the device is minimized on the premise of meeting the performance requirement. Preferably, the first electrode 231 and the second electrode 232 are closely attached to the front side or the rear side of the adjacent piezoelectric ceramic unit 233.

Optionally, in another embodiment of the present invention, as shown in fig. 9, the piezoelectric driving layers 23 are disposed on both the left surface and the right surface of the substrate 24, the first piezoelectric driving layer 23 is disposed on the left surface of the substrate 24, the first piezoelectric driving layer 23 includes a plurality of first electrodes 231 and second electrodes 232 disposed on the left surface of the substrate 24 and sequentially crossed in the front-back direction, and piezoelectric ceramic units 233 disposed between the adjacent first electrodes 231 and second electrodes 232, each piezoelectric ceramic unit 233 is polarized in the front-back direction, the polarization directions of any two adjacent piezoelectric ceramic units 233 are opposite, the first electrodes 231 of the first piezoelectric driving layer 23 are electrically connected to each other, and the second electrodes 232 of the first piezoelectric driving layer 23 are electrically connected to each other; the right surface of the substrate 24 is provided with a second piezoelectric driving layer 23, the second piezoelectric driving layer 23 includes a plurality of first electrodes 231 and second electrodes 232 arranged on the right surface of the substrate 24 in a sequentially crossing manner along the front-back direction, and piezoelectric ceramic units 233 arranged between the adjacent first electrodes 231 and second electrodes 232, each piezoelectric ceramic unit 233 is polarized along the front-back direction, the polarization directions of any two adjacent piezoelectric ceramic units 233 are opposite, the first electrodes 231 of the second piezoelectric driving layer 23 are electrically connected with each other, and the second electrodes 232 of the second piezoelectric driving layer 23 are electrically connected with each other.

The piezoelectric ceramic unit 233 is a piezoelectric material polarized in the front-rear direction, and preferably, the piezoelectric ceramic unit 233 is closely attached to the substrate 24, and the length of the piezoelectric ceramic unit 233 extending in the vertical direction corresponds to the width of the substrate 24 in the vertical direction. It is further preferable that the length of the portion of the left and right surfaces of the substrate 24 where the piezoelectric ceramic units 233 are arranged in the front-rear direction is equivalent to the length of the substrate 24 in the front-rear direction, so that the area of the piezoelectric driving layer 23 is as large as possible over the surface of the substrate 24, and the volume of the device is minimized on the premise of meeting the performance requirement. Preferably, the first electrode 231 and the second electrode 232 are closely attached to the front side or the rear side of the adjacent piezoelectric ceramic unit 233.

The second aspect of the present invention provides an optical fiber scanner using the scanning actuator, which includes any one of the scanning actuators described above and an optical fiber, the optical fiber is fixedly connected to the free end of the second actuating portion 1 in a cantilever-supported manner, the light-emitting end of the optical fiber is used as the front end, the front portion of the optical fiber exceeds the free end of the second actuating portion 1 to form an optical fiber cantilever 3, and the portion of the optical fiber located at the rear side of the optical fiber cantilever 3 is fixedly connected to the second actuating portion 1.

The motion track of the free end of the second actuator 1 relative to the fixed end of the first actuator 2 is the composition of the vibration tracks of the second actuator 1 and the first actuator 2, and the vibration direction of the free end of the second actuator 1 relative to the fixed end thereof is perpendicular to the vibration direction of the free end of the first actuator 2 relative to the fixed end thereof, so that the fiber cantilever 3 can perform lissajous-type scanning or grid-type scanning under the driving of the piezoelectric actuator. Preferably, the natural frequency of the second actuator 1 is much higher than the natural frequency of the first actuator 2, so as to meet the requirements of grid scanning, and avoid resonance interference between the second actuator 1 and the first actuator 2.

Further preferably, the scanning actuator and the optical fiber are fixedly packaged in the housing 4, and the fixed end of the first actuator 2 is fixedly connected to the housing 4. Further optionally, a corresponding lens group (not shown in the figures) is further fixed at the light-emitting end of the package. When the optical fiber scanning device works, the optical fiber scanning device is driven by the electrode to drive the optical fiber cantilever 3 to sweep at a set track and a set frequency, and meanwhile, the end face of the optical fiber cantilever 3 emits light so as to project a corresponding image. The scanning methods herein include, but are not limited to: grid-type scanning, spiral-type scanning, lissajou-type scanning, and the like.

It should be noted that the above-mentioned embodiments illustrate rather than limit the utility model, and that those skilled in the art will be able to design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" or "comprises" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The use of the words first, second, third, etc. do not denote any order, but rather the words are to be construed as names.

All features disclosed in this specification, except features that are mutually exclusive, may be combined in any way.

Any feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.

The utility model is not limited to the foregoing embodiments. The utility model extends to any novel feature or any novel combination of features disclosed in this specification and any novel method or process steps or any novel combination of features disclosed.

Claims

1. A scanning actuator is characterized by comprising a first actuating part and a second actuating part which are sequentially connected, wherein the first actuating part comprises a substrate and a piezoelectric driving layer arranged on the upper surface and/or the lower surface of the substrate, the front end and the rear end of the substrate are respectively a fixed end and a free end, the thickness direction of the substrate is a vertical direction, the piezoelectric driving layer comprises a plurality of first electrodes and second electrodes which are sequentially arranged in a crossed manner along the front-rear direction, and piezoelectric ceramic units arranged between every two adjacent first electrodes and second electrodes, each piezoelectric ceramic unit is polarized along the front-rear direction, the polarization directions of any two adjacent piezoelectric ceramic units are opposite, all the first electrodes are electrically connected with each other, and all the second electrodes are electrically connected with each other;

2. The scan actuator of claim 1, wherein the first actuating portion is a slow axis actuator and the second actuating portion is a fast axis actuator, the fast axis actuator having a frequency of vibration substantially greater than a frequency of vibration of the slow axis actuator.

3. The scan actuator as claimed in claim 1, wherein the second actuator portion has a piezoelectric driving layer disposed on a top surface of the substrate, and has no piezoelectric driving layer disposed on a bottom surface of the substrate, the piezoelectric driving layer includes a plurality of first electrodes and second electrodes disposed on the top surface of the substrate and crossing each other in a front-back direction, and a piezoelectric ceramic unit disposed between each adjacent first electrode and second electrode, each piezoelectric ceramic unit is polarized in the front-back direction, and the polarization directions of any two adjacent piezoelectric ceramic units are opposite, each first electrode is electrically connected to each other, and each second electrode is electrically connected to each other.

4. The scan actuator as claimed in claim 1, wherein the second actuator portion has a piezoelectric driving layer disposed on a lower surface of the substrate, and the piezoelectric driving layer is not disposed on an upper surface of the substrate, the piezoelectric driving layer includes a plurality of first electrodes and second electrodes disposed on the lower surface of the substrate and crossing each other in a front-back direction, and a piezoelectric ceramic unit disposed between each adjacent first electrode and second electrode, each piezoelectric ceramic unit is polarized in the front-back direction, and the polarization directions of any two adjacent piezoelectric ceramic units are opposite, each first electrode is electrically connected to each other, and each second electrode is electrically connected to each other.

5. The scan actuator as claimed in claim 1, wherein the second actuator portion has piezoelectric driving layers disposed on both upper and lower surfaces of the substrate, the substrate has a first piezoelectric driving layer disposed on the upper surface thereof, the first piezoelectric driving layer includes a plurality of first electrodes and second electrodes disposed on the upper surface of the substrate and crossing each other in a front-back direction, and piezoelectric ceramic units disposed between the adjacent first electrodes and second electrodes, each piezoelectric ceramic unit is polarized in the front-back direction, and the polarization directions of any two adjacent piezoelectric ceramic units are opposite to each other, the first electrodes of the first piezoelectric driving layer are electrically connected to each other, and the second electrodes of the first piezoelectric driving layer are electrically connected to each other; the lower surface of base plate be provided with second piezoelectricity drive layer, second piezoelectricity drive layer including set up in a plurality of first electrodes and the second electrode that set gradually the cross arrangement along the fore-and-aft direction of base plate lower surface and set up the piezoceramics unit between each adjacent first electrode and second electrode, each piezoceramics unit all polarizes along the fore-and-aft direction, and the polarization direction of two arbitrary adjacent piezoceramics units is opposite, the equal electric connection each other of each first electrode on second piezoelectricity drive layer, the equal electric connection each other of each second electrode on second piezoelectricity drive layer.

6. The scan actuator as claimed in claim 1, wherein the first actuator portion has a piezoelectric driving layer disposed on a left surface of the substrate, and has no piezoelectric driving layer disposed on a right surface of the substrate, the piezoelectric driving layer includes a plurality of first electrodes and second electrodes disposed on the left surface of the substrate and crossing each other in a front-back direction, and a piezoelectric ceramic unit disposed between each adjacent first electrode and second electrode, each piezoelectric ceramic unit is polarized in the front-back direction, and the polarization directions of any two adjacent piezoelectric ceramic units are opposite, each first electrode is electrically connected to each other, and each second electrode is electrically connected to each other.

7. The scan actuator as claimed in claim 1, wherein the substrate right surface of the first actuator portion is provided with a piezoelectric driving layer, the substrate left surface is not provided with the piezoelectric driving layer, the piezoelectric driving layer includes a plurality of first electrodes and second electrodes disposed on the substrate right surface and crossing each other in a front-back direction, and a piezoelectric ceramic unit disposed between each adjacent first electrode and second electrode, each piezoelectric ceramic unit is polarized in the front-back direction, the polarization directions of any two adjacent piezoelectric ceramic units are opposite, each first electrode is electrically connected to each other, and each second electrode is electrically connected to each other.

8. The scan actuator as claimed in claim 1, wherein the left surface and the right surface of the substrate of the first actuator portion are each provided with a piezoelectric driving layer, the left surface of the substrate is provided with a first piezoelectric driving layer, the first piezoelectric driving layer includes a plurality of first electrodes and second electrodes arranged on the left surface of the substrate and crossing each other in a front-back direction, and a piezoelectric ceramic unit arranged between each adjacent first electrode and second electrode, each piezoelectric ceramic unit is polarized in the front-back direction, and the polarization directions of any two adjacent piezoelectric ceramic units are opposite, the first electrodes of the first piezoelectric driving layer are electrically connected to each other, and the second electrodes of the first piezoelectric driving layer are electrically connected to each other; the right surface of base plate be provided with second piezoelectricity drive layer, second piezoelectricity drive layer including set up in a plurality of first electrodes and the second electrode that set gradually the cross setting along the fore-and-aft direction on base plate right surface and set up the piezoceramics unit between each adjacent first electrode and second electrode, each piezoceramics unit all polarizes along the fore-and-aft direction, and the polarization direction of arbitrary two adjacent piezoceramics units is opposite, the equal electric connection each other of each first electrode on second piezoelectricity drive layer, the equal electric connection each other of each second electrode on second piezoelectricity drive layer.

9. An optical fiber scanner using a scanning actuator, comprising a scanning actuator according to any one of claims 1 to 8 and an optical fiber, wherein the optical fiber is fixedly connected to the free end of the first actuating portion in a cantilever-supported manner, the light-emitting end of the optical fiber is used as the front end, the free end of the optical fiber, which is beyond the first actuating portion, is used to form an optical fiber cantilever, and the portion of the optical fiber, which is located at the rear side of the optical fiber cantilever, is fixedly connected to the first actuating portion.

10. The fiber optic scanner of claim 9, wherein the scanning actuator and the fiber are fixedly housed in a housing, and a fixed end of the second actuator portion is fixedly connected to the housing.