JP2002214544A - Optical modulator, optical modulation element and method of manufacturing the same, and projection system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical modulator, an optical modulation element, a method of manufacturing the optical modulation element, and a projection system using the method with which the desired reflective direction or the desired diffracted light can be obtained according to the difference of applied voltage, selective voltage application to the piezoelectric body, or the level of the applied voltage, analog control (or modulation), and line drive can be performed, and then, satisfactory projection can be carried out. SOLUTION: A negative electrode as a mirror plane 3 is arranged on the upper surface of the laminated piezoelectric body 2, the pixel 2 which disconnects the laminated piezoelectric body 2 at fixed intervals is arranged in an in-line state on the substrate, and the optical modulation element 1 is formed by alternately making the these pixel groups 21-2n a fixing part and a moving part. By using this, the specified voltage is applied to the pixel of the moving part from the substrate side, the incident light to the mirror plane 3 is reflected or diffracted with the distortion of the pixel by the applied voltage, and is modulated. The modulated light is controlled as an analog signal and line drive is carried out in the projection system.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light modulator, a light modulator, a method of manufacturing the same, and a projection system suitable for devices requiring high-speed performance, such as a projection video apparatus and an electrophotographic printer. Things.

[0002]

2. Description of the Related Art Projection devices called projectors are:
Cathode ray tube: CRT (Cathode Ray Tube), liquid crystal display: LCD (Liquid Crystal Display), and digital mirror device: DMD (Digital Micro Mirror)
Devices) are common, but these form an image by projecting a frame surface. Among them, LCD
Since the DMD and the DMD have a large number of pixels, the manufacturing method becomes complicated, which leads to an increase in cost.

[0003] A device using a diffraction grating is disclosed in Japanese Patent Application Laid-Open No. 10-510374, in which a pixel portion is moved by electrostatic force (or electrostatic attraction). However, since the manufacturing method is complicated, variations occur in the dimensions, accuracy, and the like of the diffraction grating, resulting in an increase in cost.

A device using this diffraction grating has a light reflecting material 104 on the upper surface as shown in FIGS. 27 and 28, for example.
A pair of branched movable ribbons 100 provided with A are arranged to face each other in a pattern so as to alternately mesh with each other, and a plurality of such movable ribbons are arranged on a substrate 102 at a height H: λ /
2 (λ is the wavelength of the incident light), and a light reflecting material 104 is fixed between the ribbons 100 on a substrate 102.

When an appropriate voltage is applied between the ribbon 100 and the substrate 102, the ribbon 100 is attracted to the substrate 102 by electrostatic force, as shown in FIG. (That is, the thickness of the ribbon) changes to λ / 4. Therefore, the reflected light L ₂ of the incident light is shifted in phase by λ / 2 between the adsorbed ribbon 100 and the fixed light reflecting material 104, and the light is diffracted. Image is formed.

[0006]

However, the above-mentioned CR
TLV, etc., and a GLV (Gratin
g Light Valve) has the following problems.

1. Problems in CRT, LCD and DMD (1) Since these are all surface devices for frame images, surface defects are likely to occur due to an increase in the number of pixels, and the yield is likely to deteriorate. Therefore, UXGA (Ultra Extended G
Raphics Array) is the limit and requires sophisticated and expensive large-scale manufacturing equipment. (2) The device structure and peripheral circuits (for liquid crystal drive, vertical and horizontal drive) are complicated and expensive. (3) There are few devices that can select a widespread lamp light and laser light having good color rendering properties, and it is expensive. (4) CRTs are heavy and large, are unsuitable for desktop projectors and the like, and are vulnerable to impact. (5) In a CRT or LCD, color unevenness is likely to occur on a screen, leading to deterioration in color reproducibility. (6) The LCD uses a polarizer or an analyzer, and the liquid crystal itself has a low light transmittance, so that the luminous efficiency is low. (7) LCDs are more expensive than CRTs, but DMDs are more expensive, and the price is a bottleneck when large-sized video equipment is spread. (8) Lamp light passing through a phosphor or a color filter, which is a light emitting source of a CRT or LCD, has a smaller chromaticity than laser light. (9) Since the LCD and DMD are digitally driven,
If the data amount is small, gradation stripes appear. (10) In LCDs and DMDs, lattice fringes and moire fringes due to lattices occur. (11) Due to the structure of the device, it is difficult to handle aspects,
Further, performing lens correction involves image distortion and image quality deterioration. (12) When the horizontal and vertical deflection frequencies are changed in response to double speed, mode switching of a personal computer, and the like, the CRT stabilizes the high voltage due to the fluctuation of the horizontal deflection frequency to the high voltage control circuit and the like, and increases the beam sweep speed. R for
(Red), G (green), and B (blue) output circuits also require significant power and cost. (13) The CRT needs to be cooled with a liquid or the like to prevent heat generation in order to improve the brightness, which causes an increase in weight.

2. Problems in Devices Using Diffraction Gratings (1) The manufacturing process is complicated. (2) Since the mirror movable part operates with electrostatic force, it is unstable and easily malfunctions due to external static electricity or electromagnetic force. (3) The mirror portion of the movable portion has distortion (warp or the like), and the reflection efficiency is reduced. (4) The operating point of the mirror movable portion is likely to vary (in the initial stage, there is a temperature characteristic, and it changes with time). (5) It is difficult to make the height of the movable mirror surface and the non-movable mirror surface uniform. (6) The characteristics are easily changed partially due to expansion and contraction due to the intense beam incident on the mirror surface. (7) It is easy to malfunction due to shock or vibration. (8) Since the amount of movement of the movable portion is determined mechanically, it cannot be corrected after fabrication. (9) The movable part is difficult to control with an analog amount. (10) Since it can be used only by digital driving, if the data amount is small, gradation stripes appear. (11) Production costs are high.

On the other hand, Japanese Patent No. 2927545 discloses a system in which the inverse reflection effect of a piezoelectric element is used, the light reflection angle is changed by applying a voltage, and the light reflection angle is guided to scanning means via clipping means.

However, in this known system,
Since the reflected light is controlled from both sides of the light flux and guided through the slit by the clipping means, the reflected light (that is, the lost light amount) with respect to the emitted light increases, and the accuracy of the light amount adjustment becomes insufficient. There is a problem in obtaining the maximum luminance (maximum drop amount). Moreover, the arrangement of the clipping means complicates the means for adjusting the amount of light.

An object of the present invention is to provide a high-reliability, low-cost light modulator, a light modulator, a method of manufacturing the same, and a projection system capable of projecting using stable and good reflection. is there.

[0012]

That is, the present invention comprises a piezoelectric body provided with a reflecting surface for reflecting light, and the reflection angle of incident light on the reflecting surface is reduced by the inverse piezoelectric effect of the piezoelectric body. A light modulator (hereinafter, referred to as a light modulator) that has a light-shielding means for controlling the amount of light by modulating and modulating the reflected light and shielding the reflected light only on one side of the light beam;
This is referred to as a first light modulation device of the present invention. ).

According to the first light modulation device of the present invention, the piezoelectric body is distorted by the presence or absence of a voltage applied to the piezoelectric body due to the inverse piezoelectric effect of the piezoelectric body provided with the reflecting surface. The angle of reflection of the incident light is changed and modulated by the reflecting surface. Therefore, by the difference of the applied voltage to the piezoelectric body or the selective application of the voltage or the magnitude thereof, the reflected light in the desired reflection direction is obtained, and only one side of the luminous flux of the reflected light is blocked by the light blocking means. Since the light amount is controlled, the light amount can be reliably adjusted in an analog manner with a simple mechanism, and a sufficiently high luminance light amount can be obtained. Then, by configuring this to be capable of line driving, it is possible to provide a projection and video system with a simplified structure.

According to another aspect of the present invention, there is provided an optical modulator comprising a piezoelectric body provided with a reflection surface for reflecting light, wherein incident light is diffracted and modulated on the reflection surface by an inverse piezoelectric effect of the piezoelectric body. The present invention relates to a device (hereinafter, referred to as a second light modulation device of the present invention).

According to the second light modulation device of the present invention, the incident light is diffracted and modulated on the reflection surface by the phase difference by utilizing the same distortion of the piezoelectric material as the first light modulation device. You. Therefore, by configuring this so that analog control and line driving are possible, it is possible to provide a projection and video system with a simplified structure.

According to the present invention, there is provided a piezoelectric body provided with a reflecting surface for reflecting light, and a reflection angle of incident light is changed on the reflecting surface by the inverse piezoelectric effect of the piezoelectric body and modulated. The present invention relates to a light modulation element (hereinafter, referred to as a first light modulation element of the present invention) used in the light modulation device according to the first aspect.

According to the first light modulating device of the present invention, since it is a light modulating device based on the piezoelectric material used in the above first light modulating device of the present invention, the first light modulating device of the present invention Thus, it is possible to provide a light modulation element having the same effect as described above.

Further, the present invention provides a light modulation device comprising a piezoelectric body provided with a reflection surface for reflecting light, wherein incident light is diffracted and modulated on the reflection surface by an inverse piezoelectric effect of the piezoelectric body. The present invention relates to an element (hereinafter, referred to as a second light modulation element of the present invention).

According to the second light modulating device of the present invention, since it is a light modulating device based on a piezoelectric material used in the above second light modulating device of the present invention, the second light modulating device of the present invention Thus, it is possible to provide a light modulation element having the same effect as described above.

Further, according to the present invention, there is provided a piezoelectric body provided with a reflection surface for reflecting light, and the reflection angle of incident light is changed on the reflection surface by the inverse piezoelectric effect of the piezoelectric body to be modulated. 34. A method for manufacturing the light modulation element according to claim 33, comprising a step of forming each of the piezoelectric bodies from a single piezoelectric plate (hereinafter, a method for manufacturing the light modulation element). This is referred to as a first manufacturing method of the present invention.)

According to the first manufacturing method of the present invention, since the first light modulation element of the present invention is formed by using the piezoelectric members individually formed from a single piezoelectric plate, A piezoelectric body having a uniform material and structure can be obtained, and a manufacturing method with good reproducibility can be provided in which the same effects as those of the first light modulation element of the present invention can be obtained.

Further, the present invention provides a light modulation element comprising a piezoelectric body provided with a reflection surface for reflecting light, wherein incident light is diffracted and modulated on the reflection surface by an inverse piezoelectric effect of the piezoelectric body. , Comprising a step of forming the individual piezoelectric members from a single piezoelectric plate (hereinafter, referred to as a second manufacturing method of the present invention).
It is related to.

According to the second manufacturing method of the present invention, since it is formed in the same manner as the above-described second light modulating element of the present invention using the piezoelectric members individually formed from a single piezoelectric plate, A piezoelectric material having a uniform material and structure can be obtained, and a manufacturing method with good reproducibility can be provided in which the same effects as those of the second light modulation element of the present invention can be obtained.

Further, according to the present invention, a movable mirror device or a variable angle mirror device made of a piezoelectric material in each of the above-mentioned light modulators and each light modulation element, or another variable angle mirror device is arranged in-line. The present invention relates to a projection system (hereinafter, referred to as a projection system of the present invention) in which the amount of reflected light is controlled by a blocking means such as a mirror as necessary.

According to the projection system of the present invention, the movable mirror device, the variable angle mirror device, or another variable angle mirror device comprising the light modulator or the light modulation element described above is arranged in-line. Since the amount of reflected light is controlled by the blocking means, it is possible to control the reflected light guided by receiving the desired modulation by the mirror device to the desired amount of light required for the intended projection and to drive the line. In addition, it is possible to provide a projection system capable of favorably performing projection.

[0026]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The first and second light modulators, the first and second light modulators, the first and second light modulators of the present invention described above.
In the manufacturing method and the projection system of (1), when the reflection of incident light is used, the light corresponding to the pixel is arranged by disposing the piezoelectric body in an inline shape (particularly, by dividing each pixel or each block). This is desirable because the modulation can be controlled individually. In addition, it is desirable that the light shielding means is provided only on one side of the light beam and arranged in an inline direction, and in particular, that the light shielding means is divided into blocks, in that the individual control can be realized.

Also, in the case of utilizing the diffraction of incident light, it is desirable that the piezoelectric elements are arranged in-line so that light modulation corresponding to pixels can be individually controlled. Preferably, the incident light is diffracted by the unevenness of the reflecting surface.

Preferably, the reflection or diffraction of the incident light is controlled in an analog manner by an applied voltage.
In this case, it is desirable that the amount of expansion and contraction of the piezoelectric body is proportional to the reflection angle or the amount of diffraction of the incident light, and the amount of light is quantitatively controlled by controlling the voltage applied to the piezoelectric body.

It is preferable that the in-line piezoelectric body is provided separately. In this case, the reflected or diffracted light in the in-line direction may be swept in the horizontal or vertical direction. It is desirable that the amount of the reflected light or the diffracted light be controlled in an analog manner by the in-line reflecting means as the light shielding means provided in the optical path.

In addition, when the reflection or diffraction of the incident light is corrected to a normal value by superimposing a voltage corresponding to the error on the applied voltage, the group of piezoelectric bodies may be interposed between these reflection surfaces. It is desirable to vibrate in the longitudinal direction by an amount corresponding to the gap. In addition, it is preferable that the reflection of the group of piezoelectric bodies is slid in a sweep direction and velocity-modulated.

It is preferable that a control voltage calculated so as to fix the number of frames is applied to the piezoelectric body.

[0032] The reflection surface may be formed of a reflection film covering the piezoelectric body, and the piezoelectric body may be partially covered with a ground electrode or a common electrode.

Also, the piezoelectric member may include a fixed portion and a movable portion alternately arranged, and the movable portion may be expanded or contracted in accordance with a voltage applied to the movable portion. The reflecting surface may be inclined, and further,
It is preferable that the movable portions are arranged on both sides of the fixed portion, and the directions of diffraction are determined so that diffracted lights from these movable portions do not interfere with each other.

It is preferable that the piezoelectric body is formed of a laminated body of piezoelectric elements, electrodes are provided in the laminating direction, and the reflection surface is formed in the laminating direction or another direction.

Further, the incident light may be diffracted by the reflection surface provided on the piezoelectric body to change its optical path. In this case, the piezoelectric bodies are laminated and an odd number of the laminated bodies is formed. It is desirable to apply a voltage to the piezoelectric body of the layer or the even layer.

Thus, it is desirable that a plurality of in-line diffracted lights obtained in different directions from the reflecting surface be synthesized and projected.

In this case, the pixel voltage application electrodes are separated for each pixel pitch, and a reflection surface electrode is provided to face the pixel voltage application electrodes, and the reflection surface electrodes are electrically connected in-line between the pixels. Have been
Further, in a direction orthogonal to the in-line direction, it is preferable that the reflection surface electrode is separated between the pixel of the movable portion and the pixel of the fixed portion.

In this case, it is desirable to cut out a single piezoelectric plate into individual piezoelectric members, and to cut the single piezoelectric plate halfway to form a group of piezoelectric members having one end connected continuously. You may.

Piezoelectric ceramics or electrostrictive ceramics are used as the piezoelectric body, single-wavelength light such as laser light, infrared light or ultraviolet light is used as the incident light, and a striped light beam is used as the incident light. It is desirable.

With such a configuration, the projection,
It can be suitably used for projection, printing, transfer, and optical switching. In this case, a color filter may be provided on the reflection surface, and the reflected light or the diffracted light from the piezoelectric body is swept by a scanning system. And can be imaged.

Next, a preferred embodiment of the present invention will be specifically described.

Embodiment 1 In this embodiment, the mirror surface (reflection surface) of the piezoelectric body is driven with an analog amount, and single wavelength light (including infrared rays and ultraviolet rays).
And ON / OFF of visible light or control of light amount. This mainly relates to an optical device used in a projection or projection image device such as a projector, and the device reflects light to use reflected light utilizing an inverse piezoelectric effect of converting electric energy into mechanical energy. The mirror surfaces are arranged in a single in-line, and the reflection direction is analog-controlled by expansion and contraction by the inverse piezoelectric effect.

FIGS. 1A and 1B are a plan view and a sectional view taken along line bb of FIG. 1A of a basic structure of a light modulating element (PLV: Piezoelectric Light Valve) constituting the optical device. is there.

As shown in FIG. 1B, this light modulation element (hereinafter, sometimes referred to as a piezoelectric element or PLV) 1 is used.
Is, for example, lead titanate / lead zirconate (PbTiO ₃ .P
A laminated structure in which an aluminum (or gold) film (and, if necessary, a transparent color filter 4) is provided as a mirror surface 3 on the upper surface of a laminated piezoelectric body 2 formed of a piezoelectric material composed of bZrO ₃ ) Substrate (not shown)
Is formed on. The number of layers of the laminated piezoelectric body 2 may be determined according to the material and thickness of the piezoelectric body, the applied voltage, and the required movable amount, and may be one or more. In this case, by using an inexpensive ceramic material as the substrate, the optical device is inexpensive, has good shock resistance, vibration resistance, and heat resistance, and has high reliability.

In this light modulating element, FIG.
(A), the single in-line-shaped laminated piezoelectric body 2 in which a (not shown for simplicity) electrode is divided as pixel groups 2 ₁ to 2 _n at regular intervals. For example, the length L: 350 .mu.m, the width W: pixel groups 2 ₁ to 2 _n of 150μm is at the gap l = 50 [mu] m in total 1024
Since they are arranged in-line and are cut out from blocks made of the same material, they are characterized in that they are all formed of the same material in the same structure.

[0046] Then, 2 ₁ to 2 _n of these groups of pixels,
By the mirror-3 inclined in the range of for example 0 to 0.5 degrees as a virtual line corresponding to the voltage applied, since the direction of the reflected light L ₂ of the incident light L ₁ is changed, analog this quantity of reflected light Can be controlled and guided.

In this case, as described above, since all pixels have the same material and the same structure, even if the mirror surface 3 changes in temperature or changes with time when no voltage is applied, each pixel changes equally. The influence is canceled, the relative position is kept constant, and the quality is not degraded. In addition, the relative position is stabilized even when voltage is applied, and a good reflection angle can be obtained.

Further, as shown in FIG. 1A, by arranging the pixels in a single in-line manner, the number of pixels can be reduced and the structure can be simplified as compared with a surface device such as a DMD or LCD, so that manufacturing is easy. The yield is also improved. On the other hand, an ultra-high image quality UXGA (1600 pieces x 1
200), 1600 for inline pixels to face pixels:
A difference of 1200 times occurs at 1920000, which results in a difference in productivity and yield and a difference in technical limit, and it is expected that there is a limit in the development of a surface pixel device.

It is also characteristic that the voltage applied to the pixel can be applied in either an analog amount or a digital amount. Normally, in the movable method using the electrostatic force as described above, variation occurs even when driven by an analog amount.
Unfortunately, the piezoelectric element 1 is a solid-state element using the inverse piezoelectric effect, and the movable amount and the applied voltage are substantially proportional to each other. Therefore, the piezoelectric element 1 can be used in an analog manner. In addition, a piezoelectric element having a low response speed can be used, and the cost can be reduced.

When the piezoelectric element 1 is mounted, sealing measures such as covering the surface with glass or the like are required to protect the PLV from dust and external force. Therefore, it is desirable to select a material having excellent thermal conductivity. Note that the color filter 4 may be attached when using a white light source to eliminate the need for spectral operation of three colors of red, blue, and green, so that a dichroic mirror, a prism, or the like may not be used.

The angle of the mirror surface 3 can be kept constant by controlling the applied voltage for each pixel 2 even if the angle of the mirror surface 3 fluctuates during the manufacture of the pixel. However, since the hysteresis is small, such control is usually performed on the element. There is no need to call.

The light source of the piezoelectric element 1 is desirably laser light, but the laser light generator has room for improvement in cost, size, safety, etc., but has good color reproducibility and is suitable for a projector. ing. Since PLV is mirror reflection, it can be used with laser light and visible light, and is a highly developed device.

Each pixel of the piezoelectric element 1 described above corresponds to FIG.
4 to FIG. 4 (all of b-
(corresponding to section b-line).

That is, FIG. 2 shows that the laminated piezoelectric bodies 2 are laminated in the vertical direction (the direction of the arrow) in the same manner as in FIG. It is arranged leaving the space 10 on one side. And a positive electrode (not shown)
By applying a predetermined voltage between the cathodes, the laminated piezoelectric body 2 is distorted by the inverse piezoelectric effect, the open portion 12 side of the electrode 8 is deformed, and the mirror surface 3 is in a range of, for example, 0 to 0.5 degrees like a virtual line. in order to tilt the optical path of the reflected light L ₂ of the incident light L ₁ to the mirror surface 3 is changed.

FIG. 3 shows that the laminated piezoelectric members 2 are laminated in the lateral direction (the direction of the arrow), and the laminated piezoelectric members are formed in a U-shaped cross section, and the metal electrodes 9a (positive electrode) and 9b
(Negative electrode) at the center and exterior 1 on both sides.
1a and 11b are arranged. When a predetermined voltage is applied to the positive electrode 9a, the laminated piezoelectric body 2 is distorted due to the inverse piezoelectric effect, and the exterior 11b side is deformed, and the mirror surface 3 is deformed.
Is tilted like a virtual line, the incident light L ₁ on the mirror surface 3 is
The optical path of the reflected light L ₂ of the changes.

FIG. 4 is a view showing a bus stacked in the direction of arrow D.
A piezoelectric body 2 made of an immorph is arranged on both sides of the positive electrode 9a,
Metal electrodes 9b (negative electrodes) are provided on the outside of these piezoelectric bodies 2 respectively.
Pole) is provided. A predetermined voltage is applied to the positive electrode 9a.
Is applied to the laminated piezoelectric body 2 by the inverse piezoelectric effect.
Contracts in the direction of arrow E, and each of the mirror surface 3 and the electrode 9b
Is deformed like an imaginary line, the mirror surface 3 and one of the surfaces
Light L incident on the electrode 9b side ₁Reflected light L_TwoLight path changes
You.

Therefore, any of FIGS. 2 to 4 can be used as the laminated piezoelectric body 2 and the mirror surface 3 in FIG. 1 described above.

The device shown in FIG. 3 may be formed as shown in FIG. That is, the main body 16 made of ordinary ceramic
For example, lead titanate / lead zirconate (PbTiO ₃ .P
An active part (piezoelectric body) 17 made of (bZrO ₃ ) is built in the piezoelectric driver 15 and formed on a substrate 18. In this case, the positional relationship of the active portion 17 in the main body 16 is such that the distances l ₁ and l ₂ between the edge of the main body 16 in the L direction and the active portion 17 are equal, and the end of the main body 16 in the width W direction is active. the distance w ₁ is larger with parts 17, w ₂ is reduced. When a voltage is applied to the active portion 17, the piezoelectric member 15 expands in the X direction and contracts in the Y direction at the same time as the active portion 17, so that the piezoelectric body 15 bends like an imaginary line, and the mirror surface 3 is displaced by θ angle before and after the bending. . Note that such a configuration can be applied to other embodiments described later.

FIG. 6 is a graph showing the relationship between the frequency θ and the angle θ of the mirror surface 3 displaced in accordance with the voltage applied to the piezoelectric driver 15 in FIG. That is, as shown in FIG. 6, the smaller the L (indicating L in FIG. 5), the higher the resonance frequency becomes,
The drive frequency is also increased (up to about 80%). Similarly, FIG.
Is smaller, the resonance frequency increases.

Next, a driving system or a projection system of the light modulation device 20 when the light modulation device 1 according to the present embodiment is incorporated will be described with reference to FIG. The light modulation element 1 is driven and controlled by the controller 24, and the green laser light source 2
Outgoing light L ₁ from 2, reflector 23a, collimation lens 39, is guided via the reflecting mirror 23b, is incident on the mirror surface of each pixel of the optical modulation element 1, produces a modulated reflected light L ₂ . Of the reflected light, unnecessary reflected light L ₂ ′ is guided to and absorbed by the light absorber 32 by the reflecting mirror 23 c as a shielding material, and the required reflected light L ₂ is emitted from the light modulator 21.

The light guiding section 28 includes the light modulating section 21 described above.
And a red light source 27 having the same configuration as that of the above.
a, since the reflecting mirror 26b that transmits green light and blue light is provided, the green light emitted from the light modulating unit 21 is transmitted through the reflecting mirrors 26a and 26b and emitted from the light guiding unit 28,
The red and blue lights are emitted from the respective light sources 25 and 27 and then reflected by the respective reflecting mirrors 26a and 26b to be reflected by the light guiding unit 2
8, all of which become band-like rays L ₂ and enter the projection lens 29.

The light L ₃ focused by the projection lens 29 is transmitted to the polygon mirror 3 as a scanner.
It is reflected by 0 and scanned on the screen 31.
That is, since the polygon mirror 30 rotates in the direction of the arrow,
The light L ₄ reflected by each reflection surface 30 a of the polygon mirror 30 is swept on the screen 31, and an image or the like is projected on the screen 31.

Normally, the aspect correspondence by the lens is generally used. When the screen is enlarged in the left and right direction by the lens, the resolution is reduced in accordance with the enlargement of the screen. Since no correction lens is used, the linearity of the raster is not impaired and the resolution is not reduced.

[0064] Light modulator portion 21 described above uses a white light source 33 as the light source as shown in FIG. 8, the dichroic mirror 4 the emitted light L ₁ passes through the collie mation lens 39
The light may be separated into three colors of red, blue and green by Oa and 40b. That is, green is transmitted using the dichroic mirrors 40a and 40b that transmit green, red is separated by the dichroic mirror 40a, blue is separated by the dichroic mirror 40b, and the separated colors (red, green, and blue). Are guided to a polygon mirror 30 via a collimation lens (not shown) in the same manner as in FIG.

The method of sweeping by the drive system in the above-described light modulation device 20 includes the vertical sweep shown in FIG.
Two types of horizontal sweep shown in (b) are possible. FIG.
In the vertical sweeping of FIG. 7A, the angle of incidence of light passing through the projection lens 29 from the light guiding unit 28 into the polygon mirror 30 in FIG. 7 is changed, and the light is swept and projected from the upper end of the screen 31 toward the lower end. The sweeping is performed by sweeping and projecting from the left end to the right end of the screen 31, and the sweep frequency can be set to a low frequency of 60 Hz or more.

In the case of a CRT, it is necessary to double both the horizontal and the vertical if the speed is doubled, and the computer display is a multi-scan and the horizontal frequency is one.
The light modulation device 20 according to the present embodiment can be easily performed, as compared with a case where hardware needs to support 5 kHz to 60 kHz.

Further, in the horizontal sweep which has already been practically used, the number of pixels may be the same as the number of lines, so that the element can be formed smaller than in the vertical sweep. However, since speed is required, fine processing technology of the element and a high-speed drive circuit are required. is necessary.
However, since the piezoelectric element has a feature that the resonance frequency is increased by cutting it small and the speed is increased,
Although practical use in horizontal sweeping is possible, it is important from the viewpoint of cost to keep up with the progress of microfabrication technology.

On the other hand, in the case of the vertical sweep, although the number of pixels required for the horizontal resolution is required, a device having a low speed can be used. Is advantageous.

Further, at the time of projection or projection, the direction of specular reflection and the direction of scanner reflection are added or subtracted, so that the image quality tends to deteriorate. In order to prevent this, in the present embodiment, it is possible to make correction by driving the light modulation element 1 by generating an electric signal in which the plus and minus components are corrected at the time of projection or projection. Is a necessary measure for high image quality.

FIG. 10 is an image diagram in which the amount of light varies in the light modulation device 20 described above. That is, the mirror surface 3 of the light modulation element 1 is set so that the reflection direction can be changed at a maximum of about 0.5 degree by an applied voltage, and when no voltage is applied, the light is totally reflected by the mirror 23c. At 23c, a state is set in which a part is reflected (cut off) for luminance correction.

[0071] As shown in FIG. 10, corresponding to the mirror surface 3 of the individual pixels 2 mirror 23c are arranged in line like as a light-shielding means, provided only one side of the light beam L _w, the light beam in the mirror 23c since L quantity only in the dark side of _w is controlled, the light quantity adjustment with the analog and reliably performed, the polygon mirror 3 the quantity of sufficiently high intensity
0 can be supplied. The mirror 23c having such a simple structure
The mirror 23c may be configured using a light absorber.

Further, by arranging the pixels 2 in an inline manner (particularly, each pixel or divided into several blocks), it is possible to control the light modulation corresponding to each pixel individually, by (divided for every block es) are arranged along a line direction on only one side of the light beam L _w, it can be individually controlled.

Thus, when an intermediate voltage is applied, the amount of light reflected by the mirror 23c does not reach the polygon mirror 30, so that the amount of light can be controlled by an analog amount. The same effect can be obtained even if the setting method is reversed, but it is desirable from the viewpoint of safety that no light beam is projected or projected when no voltage is applied.

In the case of projecting using diffracted light by the projector shown in FIG. 10, the light-shielding plate 23c is not always necessary, and a beam splitter is provided on the input (anti-) emission side of the PLV1 so as to reduce incident light. The reflected light may be separated.

Further, since the projection and projection lenses of the surface element system need to focus on the four corners, a high-performance and large-aperture lens is required. What is necessary is just to let a lens pass. Therefore, the weight of the device can be reduced, and
Since gamma correction in a CD is unnecessary, there is no need to worry about image quality deterioration, and in digital driving using DMD or GLV, the contrast ratio is likely to deteriorate due to the reciprocating movement of light at the time of on / off. Such deterioration does not occur in driving.

Further, DMD and G manufactured by semiconductor technology are used.
It is necessary to reduce the size of the LV from the viewpoint of cost, and it is necessary to increase the magnification of the optical system in accordance with the reduction in size. Therefore, the image quality is easily deteriorated.
For this reason, the design of the optical system is easy, and it can be said that it is suitable for super-large images. However, large-scale equipment is not required, and existing ceramic manufacturing equipment can sufficiently cope with it, and new equipment investment can be reduced.

FIG. 11 shows a white light source as shown in FIG.
It is an image figure which drives green and blue directly by each PLV1, and shows the example which does not use a dichroic mirror. That is, since monochromatic light (red, green, and blue) that has been dispersed needs to be incident on the pixels 1 arranged in line, light from the prism (or diffraction grating) 34 is also extracted in line.

Accordingly, as shown in the figure, the light emitted from the white light source 33 is emitted separately for each of the red, green and blue color components by the prism (or diffraction grating) 34, and the reflected light of the reflecting mirror 133 for each emitted light. To the PLV 1 for each color, it is possible to extract modulated light for each color.

Embodiment 2 FIG. 12 is a schematic plan view of a light modulation device 1A of the present embodiment. In this case, as in the first embodiment described above, reflected light is used, and all pixels are made of the same material and have the same structure. These pixels are arranged on, for example, a ceramic substrate (not shown). While driven, the embodiment differs from the first embodiment, one side surface of the piezoelectric unit 2 ₁ to 2 _n are connected by the electrode 36, the piezoelectric body 2 _n of one end coupled to one end of the bimorph piezoelectric element 35 The bimorph piezoelectric element 35 has a moving amount of 5 at a frequency of 10 kHz or more.
0 μm (corresponding to the pixel gap) is to be vibrated in the arrow direction.

As shown in the figure, since there is a gap l between the pixels 2, when the vertical sweep or the horizontal sweep is performed, the gap l between the pixels becomes a black line on the screen, which easily deteriorates the image quality. Therefore, the above-mentioned vibration is a measure for preventing this and improving the image quality. By sliding the mirror surface 3 by the width l between pixels in the direction of the arrow at a high frequency, the black line generated in the gap 1 is visually recognized. Can be eliminated. However, in the future, if the fine processing technology advances and if the gap 1 can be made much smaller (for example, 1/20) as compared with the pixel width W, this measure is not necessary.

Further, the pixel 2 together with the light amount variable mirror is used.
By fixing the mirror and moving the mirror surface horizontally in the scanner sweep direction + or-, the velocity modulation commonly used in CRTs can be performed, and this also makes it easy to achieve high image quality. Can be achieved. In this case, horizontal contour correction is performed during horizontal sweep,
At the time of vertical sweep, vertical contour correction is performed.

FIG. 13A is a schematic perspective view showing a method of cutting the light modulation element according to the first and second embodiments. That is, a part of a copper foil 46 of a piezoelectric plate 37 (a negative electrode is not shown) using a cutter 52 such as an ultra-thin diamond blade or the like and a copper foil portion 46 for an electrode (+) provided on one edge. Can be cut out or all can be cut out to a predetermined size (for example, 150 μm). That is, as in an example of the cutting mode shown in FIG. 13B, only the copper region 46 can be cut by cutting only the region a, or by cutting the entire region including the region a. All the cuts shown in (a) can be performed.

As described above, the pixels 2 are formed in-line by cutting from a single laminated piezoelectric or bimorph piezoelectric substrate block. There is no variation in the quality of the pixels 2 and there is no variation in the individual pixels 2 due to environmental fluctuations such as temperature, so that manufacture and design are easy.

FIG. 14 shows a block diagram of a drive control circuit of the projection system. P from controller 24
The synchronization signal and the corrected data are output to the LV1 and the mirror scanner driver 38.
And the polygon mirror scanner 30 is driven. For such various control or modulation signals, a DSP (Digital
Signal Processor) and PLD (Programmable Logic Dev)
It is possible to respond by software such as ice), and also to the optical system and the scanning system on the hardware side without changing the design.

Embodiment 1 utilizing reflected light as described above
According to the second embodiment, the mirror 3 is attached to the piezoelectric element 1 as a light modulation element, and the reflection direction of the mirror 3 can be changed in accordance with the voltage applied to the piezoelectric element 1. When laser light or visible light is incident on the mirror surface 3 of the piezoelectric element 1 arranged in a row, the angle of the mirror surface 3 is changed when the piezoelectric element 1 is charged, and projection or projection is performed in a single in-line shape during this operation. Since the image is projected by sweeping (polarizing) the mirror scanner vertically or horizontally, the following (1) to (10)
The following remarkable effects can be obtained. (1) Since the manufacturing process is simple due to the in-line structure, the manufacturing control is easy and the cost can be reduced. (2) Since the flatness of the mirror surface is maintained both when it is movable and when it is not movable, the reflection efficiency is high, and since the reflected light is directly projected, the light efficiency is good and the contrast ratio can be increased. (3) Since the mirror reflection angle of the movable portion can be varied by an analog amount, a continuous sweep locus that is not a dot image can be projected, and moiré fringes hardly occur. (4) By performing analog drive and vertical sweep,
A material having a slow response such as a piezoelectric body can be used. (5) The smaller the size of the piezoelectric element, the lower the resonance frequency is. Therefore, the speed is expected to increase in the future due to the development of fine processing technology. . (6) An image close to a movie with no visible scanning lines can be output by vibration. (7) Difficulty in increasing the image quality in a planar image element increases cumulatively with an increase in the number of pixels, but PLV is advantageous because the number of pixels is small. (8) PLV can respond to changes in aspect such as cinema such as 4: 3, 16: 9 and (1: 2.35) by performing an in-line sweep with an electric drive change, and can also use unused pixels. No space and no waste. (9) In the CRT, the horizontal and vertical frequencies change depending on the double speed and the display mode of the computer, so that the deflection circuit needs to be switched. However, in the PLV, the polarization system does not feel flicker due to the electrical processing of the video signal. (For example, 60 Hz or more and 120 Hz or less). (10) By attaching a transparent color filter to the mirror surface, three-color spectroscopy such as a dichroic mirror or a prism can be omitted.

Thus, the conventional CRT, LCD, DM
Problems in the D and GLV methods can be eliminated.

Embodiment 3 FIGS. 15 and 16 show a light modulation element 1B of this embodiment, which uses diffracted light utilizing the inverse piezoelectric effect of converting electric energy into mechanical energy, as described above. It comprises a group of laminated piezoelectric bodies 2 having a mirror surface for reflecting light and constituting a movable part and a fixed part for diffracting light.

That is, the light modulating element 1B is composed of a large number of pixels 2 divided as shown in FIG.
As shown in FIG. 16 which is a cross section taken along the line I-XVI, a positive electrode 42a, a laminated piezoelectric body 2, and a negative electrode 42b disposed on a substrate 18 made of ceramics or the like are laminated in this order in a plurality of stages. In the structure in which the mirror surface 3 is arranged by vapor deposition of gold, one side end thereof is connected so that the positive electrode 42a covers the laminated piezoelectric body 2, and the copper foil (+) 43 on the substrate surface is formed.
a using a solder 41, and one side end of the negative electrode 42b is opposed to the copper foil (-) 43b on the substrate surface.
And the mirror surface 3 are connected to each other and joined to the copper foil 43b by solder 41, and an insulating material 45 is provided between the electrodes in a region surrounded by both electrodes to be insulated.

As shown in FIG. 15, this light modulating element 1B has a cutting groove width 1 of 0.5 μm to 5 μm every width 5 μm.
Divided by 1.0μm to pixels 5 ₁ to 5 _n is 6480 sequences, eg, pixels 5 ₁ fixing unit, the pixel 5 ₂ as a movable part, they are alternately arranged, similar to the above described embodiments Is line driven.

This light modulation element 1B utilizes diffracted light,
Although the light is modulated by the same phenomenon as in FIGS. 27 and 28, the number of steps may be determined according to the material and thickness of the piezoelectric element, the applied voltage, and the required movable amount of the movable part (for example, λ / 4). In addition, as in the above-described example, since a single laminated pressure body block is divided and manufactured, all pixels are formed of the same material and have the same structure.

FIG. 17A is a plan view of the light modulating element 1B having the above-described structure, and FIG. 17B is a plan view of FIG.
FIG. 3 shows an enlarged plan view of a part of FIG. That is, FIG.
Piezoelectric structure 44 having width W: 200 μm and length L: 40 mm
The piezoelectric structure 44 is separated into 6480 pieces, which are alternately divided into a movable portion and a fixed portion. This cutting can be performed by the method shown in FIG. 13, and the manufacturing process is simple, the manufacturing control is easy, and the cost can be reduced.

The light modulating element 1B thus configured is
As in Embodiments 1 and 2 described above using the light modulation device 20 shown in FIG. 7, the movable unit is driven up by about 120 nm by the applied voltage controlled by the controller 24. Steps are formed on the respective mirror surfaces 3, and it is possible to utilize diffraction caused by interference of reflected light of light guided from the light source. When the movable portion is not raised, the light is totally reflected together with the fixed portion, and when the movable portion is raised, light can be diffracted. This operation can be performed by line driving and surface driving.

As described above, when no voltage is applied, the light modulating element 1B totally reflects when light hits the mirror surface, and applies a voltage to the alternately arranged movable portions to apply a voltage to the mirror surface portion by λ / 4, the light is bent and the light is bent, so that the light is not totally reflected from the mirror surface to the front. In addition, it is possible to utilize front reflected light, and to utilize diffracted light,
The drive can be digital drive or analog drive. However, in order to avoid the influence of other pixels, it is preferable to perform digital driving.

As shown in FIG. 17B, the amount of applied voltage is changed between the A-end and the B-end of the group of pixels 2, that is, for example, a high voltage is applied to the B-end and the A-end is changed. The voltage can be gradually lowered (or no voltage is applied) to give a gradient to the applied voltage. Thereby, the A-end side can be contracted and the whole can be inclined.

With such a configuration, even if the mirror surface 3 when no voltage is applied expands and contracts due to a change in temperature or a change with time due to the influence of the external temperature, the structure is relatively changed and the influence is cancelled. It is kept constant, the quality does not deteriorate, the relative position is stable even when voltage is applied, and good diffraction is obtained. In addition, the amount of expansion and contraction of the movable part can be made constant by the magnitude of the applied voltage, and the use of the laminated piezoelectric body 2 provides good expansion and contraction accuracy and a high expansion and contraction response speed. Moreover, since there is little hysteresis, it is not usually necessary to control the device by applying a bias voltage.

Since the light modulation element 1B has aluminum or gold deposited on the uppermost portion, the light modulation element 1B can serve both as an electrode and a light reflection surface, and has a simple structure. Furthermore, since the hardness is higher than that of the above-described ribbon type GLV, the flatness of the mirror surface 3 is high even when the mirror is movable, so that the reflection efficiency and the diffraction efficiency are high and the contrast ratio can be increased.

Further, there is a feature that the uppermost portion is used as a ground electrode to provide a shielding effect. Thus, since the structure is hardly affected by unnecessary static electricity and electromagnetic force, spontaneous polarization can be prevented. The movable part can be lowered instead of raised.

When the light modulation element 1B is mounted, sealing measures such as covering the surface with glass or the like are necessary to protect the PLV from dust and external force. Therefore, it is desirable to select a material having excellent thermal conductivity. In addition to controlling the amount of expansion and contraction of the movable portion by the applied voltage, as described above, the mirror surface can be tilted by changing the balance of the electrodes by providing a difference between the applied voltages at both ends of the piezoelectric element ( FIG.
(B)). Furthermore, using this principle, red, green,
By using the blue λ / 4 depending on the location, it is not always necessary to commercialize the device for each color.

If the response speed of the bimorph type (bimetal) is increased instead of the lamination, a lateral in-line arrangement can be considered, whereby an appropriate inclination can be obtained and the cost can be reduced.

The sweeping method is divided into horizontal sweeping and vertical sweeping.
A street is possible. In a horizontal sweep that is already in practical use,
Since the number of pixels only needs to be the number of lines, the element can be formed smaller than in the vertical sweep. However, speed is required and fine processing technology of the element and a high-speed drive circuit are required. On the other hand, in the case of the vertical sweep, although pixels are required for the required horizontal resolution, an element having a low speed can be used, and no special fine processing is required, which is advantageous in manufacturing.

Fourth Embodiment An optical modulator 1C according to the present embodiment uses diffracted light utilizing the inverse piezoelectric effect of converting electric energy into mechanical energy, as in the third embodiment. ,
As shown in FIG. 19, a mirror surface for reflecting light and a group of laminated piezoelectric bodies 2F and 2F ′ of a movable part for diffracting light are formed, and are basically the same as those of the third embodiment. 20
The structure of the laminated piezoelectric body is different as shown in FIG.

That is, as shown in the schematic plan view of FIG.
This light modulation element has a width W of the piezoelectric structure 47 shown in FIG.
At 7 μm, the length L is w: 15 in the direction of 205 mm.
1024 pixels 6 _{1 to} 6 _n are formed by being divided every 0 μm, and 7a columns in the length L direction of the piezoelectric structure 47.
Since the pixels are divided into 7b and 7a 'columns, a total of 3072 pixel groups are formed. And 7b row is fixed, 7a
Columns 7a 'and 7a' are movable portions that are driven up and down, for example, by λ / 4 (180 nm at maximum).

Therefore, the movable parts 7a and 7a 'and the fixed part 7b
The optical path difference of light with respect to a column is used, and the movable parts 7a and 7a 'are used so that light does not interfere with the line drive.
Is used, and the diffraction direction is determined.

FIG. 19 is a sectional view taken along line XIX-XIX in FIG. This light modulation element 1c is provided on a substrate 18 with a piezoelectric structure 2F.
Is provided, the outer surface of the uppermost surface of the movable portions 7a and 7a 'is covered with a negative electrode, the mirror surface 3 is formed by a vapor deposition film of aluminum whose upper surface is connected to the negative electrode, and the copper foil 43 on the substrate surface is common to each pixel. Of the positive electrode. Substrate 18
Is made of ceramics and has impact resistance, vibration resistance and heat resistance.

FIG. 20A shows a material for forming the above-mentioned pixel, that is, a length L: 205 mm and a width W: 7 μm.
FIG. 20B shows a partial pixel group cut out from the piezoelectric structure 47.
As shown in the drawing, in the length direction, the 7a and 7a 'rows are divided into a width W ₁ : 1.5 μm, and the 7b row into a width W ₂ : 3 μm.
Groove l ₂ cut between each: 0.5 [mu] m is formed, also in the width direction is cut out in the individual pixels wide W1.5Myuemu, the groove width l ₁ cut between pixels 0.5μ
m.

The light modulating element 1C thus configured is
Similar to the above-described embodiment, the optical modulator 20 is driven by using the light modulation device 20 illustrated in FIG.
The movable portion has two rows (7a, 7a ') in the length direction, and the fixed portion 7b
Are formed in a line, and are driven in line in the same manner as in the above-described embodiments.

Then, 7a performing the same operation as described above
The pixels in the column and the column 7a 'are further cut and divided in the width direction, so that, even if, for example, distortion or applied voltage non-uniformity occurs in the length direction for each column, the whole is averaged. Since the reflection angle of the row can be kept uniform, stable diffracted light can be obtained.

That is, similarly to the third embodiment, when no voltage is applied, the light incident on the mirror surface is totally reflected, and further, a voltage is applied to the rows 7a and 7a 'on both sides to make the light incident on the mirror surface portion. Λ / 4
By raising the light, light diffraction occurs and the light is bent, so that it is not totally reflected from the mirror surface to the front. Further, it is possible to utilize front reflected light and diffracted light, and it is possible to digitally or analogly drive both the input signal and the output signal.

The number of layers of the piezoelectric element is determined by the material and thickness of the piezoelectric element, the applied voltage, and the required movable amount of the movable part (for example, λ
/ 4), it can be formed in an arbitrary number of stacked layers. Since a single in-line laminated piezoelectric element provided with electrodes is cut at regular intervals to produce the piezoelectric element, all the piezoelectric elements are formed of the same material.

With such a configuration, the mirror surface 3 when no voltage is applied changes its structure relatively even if it expands and contracts due to a change in temperature or a change with time due to the influence of the external temperature. The position is kept constant, the quality does not deteriorate, and the relative position is stable even when voltage is applied, so that good diffraction can be obtained.

Further, the amount of expansion and contraction of the movable part can be made constant by the magnitude of the applied voltage, and the use of the laminated piezoelectric element improves the expansion and contraction accuracy and the expansion and contraction response speed. In addition, since there is little hysteresis, there is no need to control the element with a bias voltage. However, when there is a variation in pixel height, correction can be made by applying a bias voltage.

Since the light modulating element 1C also has the mirror surface 3 made of aluminum or gold at the uppermost part, it can be used both as an electrode and a light reflecting part, and has a simple structure. Also, GLV
Since the hardness is higher than that of the ribbon type, the flatness of the mirror surface 3 is high even when the mirror is movable, and the reflection efficiency and the diffraction efficiency are high.

Further, it is characterized in that a shielding effect is provided by using the uppermost portion as a ground-side electrode, and the structure is less susceptible to unnecessary static electricity, so that spontaneous polarization can be prevented. . In order to increase the speed, the fixed portion can be simultaneously moved by applying a reverse voltage, and the movable portion can be lowered.

When the piezoelectric element 1C is mounted, it is necessary to seal the surface with glass or the like in order to protect the PLV from dust and external force. However, the ceramic substrate has excellent heat conductivity for heat dissipation. It is desirable to choose one.

In the piezoelectric element 1C, the input voltage applied to the movable portion may be an analog amount or a digital amount. However, in the case of the above-described known ribbon-shaped in-line arrangement, the direction of light diffraction is the same as that of other pixels. Because it is a direction, it cannot be used analogly and is limited to digital quantities that diffract at levels that do not affect other pixels. Since the use of the analog amount is possible in this manner, the use of a piezoelectric element having a low speed becomes possible, and the cost can be reduced.

Also in the case of the present embodiment, two sweeping methods, horizontal sweeping and vertical sweeping, are possible. In the horizontal sweep which has already been practically used, the number of pixels is only required to be the number of lines. Therefore, although the element can be formed smaller than in the vertical sweep, speed is required, and fine processing technology of the element and a high-speed drive circuit are required. On the other hand, in the case of the vertical sweep, although only pixels necessary for the horizontal resolution are required, elements having a low speed can be used, and special fine processing is not required, which is advantageous in manufacturing. .

According to the third and fourth embodiments using the above-described diffracted light, the pixel group on which the mirror surface 3 is formed is divided in-line into the fixed part and the movable part, and the pixel group is applied at the time of irradiation with laser light or the like. Since the angle of the mirror surface 3 is changed in accordance with the presence or absence of a voltage or the magnitude of the voltage, and the light is projected by utilizing the diffraction of light, the remarkable effects shown in the following (1) to (5) are obtained. be able to.

(1) Since the manufacturing process is simple, manufacturing management is easy and cost can be reduced. (2) Since the flatness of the mirror surface is maintained both when it is movable and when it is not movable, the total reflection efficiency and the diffraction efficiency are high, and the contrast ratio can be increased. (3) The amount of expansion and contraction of the movable portion can be changed by an analog amount, and fine adjustment can be performed. (4) Even when changed by an analog amount, the light is diffracted in the horizontal direction with respect to the element, so that other pixels are not affected. (5) By performing the vertical sweep, a device having a low speed can be used.

Thus, the conventional CRT, LCD, DM
The problems in the method using D and GLV can be solved.

Embodiment 5 FIG. 21 shows a light modulation element (GPLV: Gratin) of this embodiment.
g Piezoelectric Light Valve) 1D shows a plan view.
This also uses diffracted light utilizing the inverse piezoelectric effect of converting electrical energy into mechanical energy, and the laminated piezoelectric body 2 provided with a mirror surface 3 as a negative electrode formed by vapor deposition of aluminum (or gold) is used. The laminated piezoelectric body 2 is formed on a substrate (not shown) made of ceramics or the like, and includes a fixed portion 53 and pixels 50 _l to 50 _{n serving as the} movable portion 50.

These laminated piezoelectric members 2 are formed by stacking four or more layers of piezoelectric members each having a thickness of several tens of microns in a direction perpendicular to the in-line direction.
C is formed in every other row, and a voltage application electrode is provided on the layer that becomes the movable portion 50. As shown in FIG. 21, for example, the movable parts 50 in rows A, B, and C are arranged between the fixed parts 53 in the inline direction, and the movable parts 50 in rows A, B, and C are about 50 to 200 μm in the inline direction. Fig. 2
Are separated as 4, a total of 800 to 2000 pixels 50 _l to 50 _n (not illustrated in FIG. 21 50 _{1-50 3.)} Is formed. Then, when a voltage is applied to the voltage application electrode, the thickness of the layer is increased, and at the same time, in the orthogonal direction (FIG. 22).
(Up-down direction in the figure).

FIG. 22 is a sectional view taken along the line XXII-XXII of FIG. 21. FIG. 22 (a) shows a state where no voltage is applied.
(B) shows a state in which the negative electrode: mirror surface 3 disposed opposite to the voltage application electrode 51 is displaced by λ / 4 by the applied voltage.

As shown in FIG. 22A, a + electrode 51 joined to the lower end of this light modulation element 1D by a conductive material.
Is extended to the mirror surface 3 side between the laminated piezoelectric bodies 2 of the pixels, and the negative electrode 3 is extended to the + electrode 51 side on both sides of the movable portion 50 so as to face the same, and these extended electrodes are It is arranged to mesh. And, the + electrode 51 is A, B, C
The columns are connected, and in the in-line direction and the orthogonal direction, each of the pixels 50 ₁ to 50 _n is separated as shown in FIG. Further, the negative electrode 3 is integrated with the fixed portion 53 and the movable portion 50 as a mirror surface and as a common electrode, but in the in-line direction, each of A, B, and C is separated by a dividing line 134 as shown in FIG. I have.

FIG. 23 is an enlarged view of a part of the mirror surface 3 of the laminated piezoelectric body 2 in FIG. As described above, the boundary between the fixed portion 53 and the movable portion 50 has the mirror surface 3 separated in the in-line direction, and the adhesive force between the piezoelectric members of the fixed portion 53 and the movable portion 50 is weak in the distal end region 50a. Although the mirror surfaces 3 of the part 53 and the movable part 50 are connected (that is, integrated as a common ground electrode), it becomes possible to dent as shown in FIG. .

Accordingly, the multilayer piezoelectric body 2 expands and contracts in the tip region 50a between the tip of the + electrode 51 extended to the negative electrode side and the negative electrode by the application of a voltage, and the mirror surface of the movable portion 50 in the direction orthogonal to the in-line direction. Only 3 is shown in FIG.
24, and in the in-line direction, the central portion of the mirror surface 3 of the movable portion 50 is recessed for each pixel as shown in FIG. Since the amount of expansion and contraction is proportional to the amount of applied voltage, if a voltage corresponding to the λ / 4 wavelength of a desired color in red, green, and blue is applied, the mirror surface 3 of the movable portion 50 is applied by applying this voltage. The amount can be depressed to diffract incident light corresponding to a desired color.

FIG. 24 (a sectional view taken along the line XXIV-XXIV in FIG. 22B) shows the division of the above-mentioned + electrode 51. In other words, a single multilayer piezoelectric block is cut to the tip of the positive electrode 51 between the respective movable portions 50 ₁ to 50 _n, each pixel in the line direction is divided. Such a + electrode 51
May be divided in advance, which has the advantage of eliminating the occurrence of cracks and facets that occur when dividing later. However, the division may be performed simultaneously with the cutting.

With this configuration, even if the mirror surface 3 when no voltage is applied expands and contracts due to a change in temperature or a change with time due to the influence of the external temperature, the pixels have the same material and the same structure. It changes equally, the influence is canceled, the relative position is kept constant, the quality is not degraded, the relative position is stable even when voltage is applied, and good diffraction is obtained. Further, since the multilayer piezoelectric body 2 is used, the expansion / contraction accuracy is high, the expansion / contraction response speed is high, and the hysteresis is small, so that it is not usually necessary to control the element by applying a bias voltage.

Since the light modulating element 1D has aluminum or gold deposited on the uppermost part, the light modulating element 1D can serve both as an electrode and a light reflecting surface, and has a simple structure. Furthermore, since the hardness is higher than that of the GLV ribbon type described above, the mirror surface 3
Has a high flatness, a high reflection efficiency and a high diffraction efficiency, and a large contrast ratio.

As described above, this light modulating element (GPL
V) Since the mirror surface side of 1D is integrally formed as a ground electrode, there is an effect that electrical conduction is measured between pixels. Therefore, even if a concave portion is generated by applying a voltage, an operation (an inverse piezoelectric effect by applying a voltage) is possible.

[0130] Light modulation element 1D of the thus constructed present embodiment, when exposed to white light or laser light from the light source 55 to a mirror 3, the incident light L ₁ is left as shown in Figure 25 by the optical diffraction It is bent reflected light L ₂ in. The separated reflected light L ₂ of the reflecting mirror 56a, is reflected by 56b,
The reflected light L ₃ is transmitted to the reflecting mirror 57 and the dichroic mirror 5.
Synthesized by 8 (the better but projection can be one synthesized is efficient.), And the reflected light L _4, which is the synthesized sweep mirror 59 (galvanometer or polygon) is scanned in the horizontal direction or the vertical direction The image is projected on the screen 31. In this case, as shown in FIG. 25, the image can be enlarged with the projection lens 60 interposed.

Reference numeral 26 denotes a block diagram of an example of a drive control circuit of the projection system according to the present embodiment.
1 from the controller unit 24 based on the detected value of GPL.
The synchronization signal and the corrected data output are instructed to the V1D and the galvanomirror scanner driver 38, whereby the GPLV1D and the galvanomirror scanner 59 are driven. For such various control or modulation signals, a DSP (Digital Signal Processor) or a PLD (Pr
It can be supported by software such as grammable logic device), and can be supported without changing the design of the optical system and scan system on the hardware side.

As described above, the light modulation device 1 of the present embodiment
D takes advantage of the fact that if the laminated piezoelectric body 2 expands in the laminating direction due to the application of a voltage, the plane orthogonal to this contracts, and is selectively proportionally applied to the movable portion 50 to be proportional to the amount of applied voltage. Λ, which is the condition for light diffraction,
/ 4, that is, by applying a voltage corresponding to a λ / 4 wavelength of a desired color (red, green, blue).

That is, if the flat mirror surface portion 3 is depressed, a diffraction phenomenon occurs even if it is not necessarily λ / 4. For example, in the case of a green wavelength of 520 nm, λ / 4 is 130 nm, The incident light is canceled and does not return directly to the front, but becomes incident light whose direction is separated by color separation on both sides.
However, when the color is switched by a single GPLV, the position of the mirror is fixed. For example, when the mirror is installed at the position of the green reflected light, blue and red change the concave amount of the mirror surface to change the reflected light. It is based on the principle that the angles need to be adjusted.

That is, in the case of blue and red, the respective colors do not return to the mirror position at the respective concave amounts of λ / 4, and the primary reflected light returns to the same position in the following relationship, and also returns to a part in front of the mirror. . Therefore, the amount of depression (λ /
When the mirror position is determined in 4), it is necessary to make a concave of λ / 3 for red (780 nm) and λ / 6 for blue (390 nm). When the wavelength is changed by the color rendering property, the recess amount may be changed at the above ratio.

In general, the emission line spectrum of a xenon lamp or the like can be seen at all wavelengths in the visible light region. Therefore, by selecting the three wavelengths which are the widest on the chromaticity diagram, an image with high color rendering can be reproduced. And the red / blue / green wavelengths are wavelengths at which a maximum triangle is formed on this chromaticity diagram.
However, in practical use, selecting a wavelength with high visibility allows the user to enjoy an image with high brightness.

The concrete color projection method is as follows (1).
Methods such as (3) are conceivable. (1) The projection order is changed to red / blue / green for each line. In this case, when viewed from the side, the color stripe state can be easily recognized. (2) Red / blue / green and projected colors are changed in order for each frame. In this case, the color is recognized by blinking or the like. (3) The color order is changed for each line and for each frame. In this case, color stripes, flicker, and the like are less noticeable, and the frame frequency can be reduced. In any case, there is an effect that a color image can be projected without using a rotating color filter or the like even when a single light modulation element is used.

In general, a white light source using a lamp has a bright line spectrum, and the emission intensity varies depending on the wavelength. In the present embodiment, however, since the height of λ / 4 can be changed arbitrarily by the amount of applied voltage, the emission intensity is reduced. By tuning to a strong wavelength, it is possible to suppress a decrease in luminance. Therefore, as shown in FIG. 26, it is also possible to add a function of feeding back while monitoring the projection state.

When a polygon scanner is used as the sweeping mirror, it is desirable to project the image after correcting it with an f-θ lens. In the case of using a galvanomirror, light utilization efficiency can be improved by projecting reciprocally without providing a retrace period at the time of scanning.

The light modulating element 1D is a single GPLV
In this case, it is possible to increase the luminance by separating the incident light into three colors of red / blue / green in advance and then making each light incident on a GPLV dedicated to each color.

In the GPLV driving method, the change in luminance may be performed by PWM (pulse width modulation), and the color may be switched by an applied voltage value.

In order to improve the light diffraction efficiency, a polarization separation / conversion device combining a polarization beam splitter and a half-wave plate is inserted before GPLV incidence, so that both S-wave and P-wave can be effectively used. Will be possible.

According to the fifth embodiment described above, by utilizing the fact that the laminated piezoelectric body expands in the laminating direction by voltage application and the plane orthogonal to this expands and contracts in proportion to the amount of applied voltage, the three primary colors ( Since a desired light color is guided to the screen 31 and projected by applying a voltage at which the wavelengths of red, green, and blue) are diffracted at equal angles, the remarkable effects shown in the following (1) to (7) are obtained. Obtainable.

(1) Light diffraction is possible with a low-cost piezoelectric element. (2) The material can be inexpensive, and the pixels can be enlarged to improve the workability. (3) Since the pixels are large, the projection magnification can be reduced and a bright image can be projected. (4) Since a desired light color can be diffracted at an equal angle by an applied voltage, color switching can be performed line by line, frame by frame, or a combination thereof. (5) In the case of mirror reflection, clipping with a non-reflective surface device having a plurality of apertures is necessary, but is not required in the present system, and it is not necessary to prepare them. (6) Since the incident light is separated into right and left in-line, it is not affected by other pixel lights. Further, since the outgoing light is separated symmetrically, outgoing light can be easily synthesized, and the light efficiency can be improved. (7) Not only laser light of three colors but also white light
Since three colors can be switched by the PLV, a rotating color filter or the like is not required. (8) Since all three colors pass through the same optical path, no color shift occurs. (9) By tuning each color to the maximum value of the emission line spurious, the maximum energy can be extracted and automation is easy.

Each of the above embodiments can be modified based on the technical idea of the present invention.

For example, the material, laminated structure, shape, dimensions, etc. of the piezoelectric element may be variously changed. In addition to dividing the piezoelectric element into a fixed part and a movable part, all of the piezoelectric element is made a movable part and the applied voltage is controlled. The amount of movement may be selectively changed by
The operation direction of the pixel is not limited to ascending or descending, but can be arbitrarily changed.

It is preferable to use the light modulation element according to the above-described embodiment alone. In combination with this, a mirror of a surface device such as a DMD is arranged in-line, and the modulated reflected light is used. It is also possible to drive the line by controlling the amount of light by the blocking means.

[0147]

As described above, the first light modulation device, the first light modulation element, and the method for manufacturing the same of the present invention utilizing reflected light are applicable to a piezoelectric material having a uniform material and structure. Since the piezoelectric body is distorted due to the inverse piezoelectric effect of the piezoelectric body depending on the presence or absence or magnitude of the voltage application, the reflection angle of the reflecting surface is changed and modulated. Therefore, a desired reflection direction or diffracted light can be obtained by the difference of the applied voltage to the piezoelectric body or the selective application of the voltage or its magnitude, and only one side of the luminous flux of the reflected light is shielded by the light shielding means. Since the light amount is controlled, the light amount can be reliably adjusted in an analog manner with a simple mechanism, and a sufficiently high luminance light amount can be obtained. Then, by configuring this to be capable of line driving, a projection and video system with a simplified structure can be obtained.

Further, the second light modulation device, the second light modulation element and the method of manufacturing the second light modulation device of the present invention utilizing the diffracted light are described in the first light modulation device.
In the same manner as in the optical modulation device, the incident light is diffracted and modulated on the reflection surface by the phase difference by utilizing the distortion of the piezoelectric body having the uniform material and structure due to the inverse piezoelectric effect of the piezoelectric body. Therefore, by configuring this so that analog control and line driving can be performed, a projection and video system with a simplified structure can be obtained.

[Brief description of the drawings]

FIGS. 1A and 1B are schematic diagrams of a light modulation device according to a first embodiment of the present invention, in which FIG. 1A is a plan view and FIG. 1B is a cross-sectional view taken along line bb of FIG.

FIG. 2 is a schematic view showing a modification of the embodiment.

FIG. 3 is a schematic diagram showing another modified example of the embodiment.

FIG. 4 is a schematic diagram showing still another modified example of the embodiment.

FIG. 5 is a schematic diagram showing a modification of FIG. 3;

FIG. 6 is a graph showing a relationship between an angle and a frequency in FIG. 5;

FIG. 7 is a diagram showing a schematic configuration of a projection system incorporating a light modulation device (PLV).

FIG. 8 is a schematic diagram showing a modification of a part of the light modulation device.

FIG. 9 is a diagram showing a sweep direction.

FIG. 10 is an image diagram showing variable light intensity in the projection system of the light modulation device (PLV).

FIG. 11 is an image diagram of spectroscopy by a prism and the like.

FIG. 12 shows an optical modulator (PL) according to the second embodiment.
It is a schematic diagram of V).

FIGS. 13A and 13B are schematic perspective views showing a method for cutting the light modulation element, wherein FIG. 13A is an overall image view, and FIG. 13B is a perspective view showing an example of a cutting mode.

FIG. 14 is a block diagram showing a drive control circuit of the light modulation device.

FIG. 15 shows an optical modulator (PL) according to the third embodiment.
It is a schematic diagram of V).

16 is a sectional view taken along the line XVI-XVI of FIG.

FIG. 17 shows the light modulation device of the embodiment, and FIG.
2 is a schematic plan view of the whole, and FIG. 2B is an enlarged view of a part of FIG.

FIG. 18 shows an optical modulator (PL) according to the fourth embodiment.
It is a schematic plan view which shows V).

19 is a schematic sectional view taken along line XIX-XIX in FIG. 18;

FIG. 20 shows the light modulation element of the embodiment, and (a)
2 is a schematic plan view of the whole, and FIG. 2B is an enlarged view of a part of FIG.

FIG. 21 is a diagram showing an optical modulator (GPL) according to the fifth embodiment.
It is a schematic plan view of a part of V).

22 is a sectional view taken along the line XXII-XXII of FIG. 21, and (a)
Indicates a non-operation time, and (b) indicates an operation time.

FIG. 23 is an enlarged view of a part of FIG.

FIG. 24 is a schematic sectional view taken along line XXIV-XXIV of FIG. 22 (b).

FIG. 25 is a schematic diagram of a projection system using the light modulation element of the embodiment.

FIG. 26 is a block diagram showing a drive control circuit of the projection system incorporating the light modulation element.

FIG. 27 is a schematic plan view of a light modulation element according to a conventional example.

FIG. 28 is an enlarged sectional view of a part taken along line XXVIII-XXVIII of FIG. 27;

FIG. 29 is a cross-sectional view showing a state during the operation.

[Explanation of symbols]

1, 1A, 1B, 1C ... light modulation element (piezoelectric element), 2 ...
Laminated piezoelectric _{material, 2 1 ~2 n, 5 1} ~5 n, 6 1 ~6 n, 50 1 ~
50 ₃ : pixel, 3: mirror surface (negative electrode), 4: color filter, 7a, 7b ... row, 8, 36 ... electrode, 9a, 42
a, 51: positive electrode, 9b, 42b: negative electrode, 10: space, 1
1a, 11b: exterior, 12: open part, 15: piezoelectric body, 1
6: Main body, 17: Active part, 18: Substrate, 20: Light modulator, 21: Light modulator, 22: Green laser light source, 23a,
23b, 23c, 26a, 26b, 56, 57: Reflecting mirror, 24: Controller, 25: Blue light source, 27: Red light source, 28: Light guiding unit, 29: Projection lens, 30: Polygon mirror (scanner), 30a ... Reflective surface, 31 screen, 32 light absorber, 33 white light source, 34 prism or diffraction grating, 35 bimorph piezoelectric element, 37 piezoelectric plate, 38 mirror scanner driver, 39 collimation lens, 40a, 40
b: dichroic mirror, 41: solder, 43, 46: copper foil, 44, 47: piezoelectric structure, 45: insulating material, 50: movable portion, 50a: tip region, 52: cutter, 53: fixed portion, 55 ... Light source, 58 ... Dichroic mirror, 59 ...
Galvano scanner mirror, 60 ... Projection lens, 61 ...
Light receiving element (monitor), 133: mirror, 134: dividing line, L: element length or piezoelectric structure length, L ₁ : outgoing light,
L ₂ ~L ₅ ... reflected light, L _w ... light _{flux, l, l 1, l 2} ... gap,
W, W ₁ , W ₂ ... element width

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01L 41/08 M

Claims (85)

[Claims] 1. A piezoelectric body provided with a reflecting surface for reflecting light, the angle of reflection of incident light is changed and modulated on the reflecting surface by the inverse piezoelectric effect of the piezoelectric body, and the reflected light is further modulated. A light modulation device, comprising: a light-blocking means for controlling the amount of light by shielding the light only on one side of the light beam, and controlling the amount of light by the light-shielding means. 2. The light modulation device according to claim 1, wherein the piezoelectric body is arranged in-line, and the light blocking means is provided only on one side of the light beam and arranged in an in-line direction. 3. The light modulation device according to claim 2, wherein said light blocking means is divided in blocks and arranged in an inline manner. 4. An optical modulator, comprising: a piezoelectric body provided with a reflection surface for reflecting light, wherein incident light is diffracted and modulated on the reflection surface by an inverse piezoelectric effect of the piezoelectric body. 5. The light modulation device according to claim 3, wherein the piezoelectric body is arranged in-line, and the incident light is diffracted by unevenness of the reflection surface formed by the inverse piezoelectric effect. 6. The light modulation device according to claim 1, wherein reflection or diffraction of the incident light is controlled in an analog manner by an applied voltage. 7. The piezoelectric device according to claim 1, wherein an amount of expansion and contraction of the piezoelectric body is proportional to a reflection angle or a diffraction amount of the incident light, and a light amount is quantitatively controlled by controlling a voltage applied to the piezoelectric body.
3. The light modulation device according to 1. 8. The light modulation device according to claim 2, wherein the in-line piezoelectric body is provided separately. 9. The optical modulator according to claim 8, wherein the reflected or diffracted light in the in-line direction is swept in a horizontal or vertical direction. 10. The optical modulator according to claim 1, wherein the reflection or diffraction of the incident light is corrected to a normal value by superimposing a voltage component corresponding to an error on the applied voltage. 11. The optical modulation device according to claim 1, wherein the group of piezoelectric bodies is vibrated in the arrangement direction by an amount corresponding to a gap between the reflection surfaces. 12. The method according to claim 1, wherein the group of piezoelectric bodies is velocity-modulated by sliding in the direction of sweeping the reflecting surface.
3. The light modulation device according to 1. 13. The optical modulation device according to claim 1, wherein a control voltage subjected to arithmetic processing so as to fix the number of frames is applied to the piezoelectric body. 14. The light modulation device according to claim 1, wherein the reflection surface is formed of a reflection film that covers the piezoelectric body. 15. The light modulation device according to claim 1, wherein the piezoelectric body is partially covered with a ground electrode or a common electrode. 16. The optical modulation device according to claim 8, wherein the piezoelectric body comprises a fixed portion and a movable portion alternately arranged, and the movable portion expands and contracts in accordance with a voltage applied to the movable portion. apparatus. 17. The light modulation device according to claim 16, wherein the reflection surface is inclined when the movable section rises. 18. The optical modulation device according to claim 16, wherein the movable portions are arranged on both sides of the fixed portion, and a diffraction direction is determined so that diffracted lights from these movable portions do not interfere with each other. 19. The optical modulation device according to claim 1, wherein the amount of the reflected light is controlled in an analog manner by an in-line reflecting means provided in the optical path as the light shielding means. 20. The piezoelectric device according to claim 1, wherein the piezoelectric body is formed of a laminate of piezoelectric elements, electrodes are provided in the stacking direction, and the reflection surface is formed in the stacking direction or another direction. Light modulator as described. 21. The light modulation device according to claim 1, wherein a piezoelectric ceramic or an electrostrictive ceramic is used as the piezoelectric body. 22. The light modulation device according to claim 1, wherein a single wavelength light such as a laser beam, infrared light, or ultraviolet light is used as the incident light. 23. The light modulation device according to claim 1, wherein a band-like light beam split into light is used as the incident light. 24. The light modulation device according to claim 1, wherein a color filter is provided on the reflection surface. 25. The light modulation device according to claim 1, wherein the light modulation device is used for projection, projection, printing, transfer, or optical switching. 26. The light modulation device according to claim 25, wherein the reflected light from the piezoelectric body is swept by a scanning system to form an image. 27. The incident light is diffracted by the reflection surface provided on the piezoelectric body to change its optical path.
The light modulation device according to claim 16. 28. The optical modulation device according to claim 27, wherein the piezoelectric bodies are stacked, and a voltage is applied to odd-numbered or even-numbered layers of the stacked bodies. 29. The light modulation device according to claim 27, wherein a plurality of in-line diffracted lights obtained in different directions from the reflection surface are combined and projected. 30. The light modulation device according to claim 27, wherein the pixel voltage application electrodes are separated for each pixel pitch, and a reflection surface electrode is provided to face the pixel voltage application electrodes. 31. The light modulation device according to claim 30, wherein the reflection surface electrode is electrically connected between pixels in an inline direction. 32. The light modulation device according to claim 31, wherein the reflective surface electrode is separated between a pixel of the movable portion and a pixel of the fixed portion in a direction orthogonal to the in-line direction. 33. A piezoelectric body provided with a reflecting surface for reflecting light, wherein a reflection angle of incident light is changed and modulated on the reflecting surface by an inverse piezoelectric effect of the piezoelectric body. An optical modulator used in the optical modulator according to claim 1. 34. The light modulation device according to claim 33, wherein the piezoelectric body is arranged in an inline shape. 35. A light modulation element having a piezoelectric body provided with a reflection surface for reflecting light, wherein incident light is diffracted and modulated on the reflection surface by an inverse piezoelectric effect of the piezoelectric body. 36. The piezoelectric body is arranged in-line,
36. The light modulation device according to claim 35, wherein the incident light is diffracted by unevenness of the reflection surface formed by the inverse piezoelectric effect. 37. The reflection or diffraction of the incident light is analog-controlled by an applied voltage.
5. The light modulation element according to 5. 38. The method according to claim 33, wherein the amount of expansion and contraction of the piezoelectric body and the reflection angle or the amount of diffraction of the incident light are proportional, and the amount of light is quantitatively controlled by controlling the voltage applied to the piezoelectric body. Light modulator as described. 39. The light modulation device according to claim 34, wherein the in-line piezoelectric body is provided separately. 40. The light modulation device according to claim 39, wherein the reflected or diffracted light in the in-line direction is swept in a horizontal or vertical direction. 41. The light modulation device according to claim 33, wherein the reflection or diffraction of the incident light is corrected to a normal value by superimposing a voltage component corresponding to the error on the applied voltage. 42. The light modulation element according to claim 33, wherein the group of piezoelectric bodies is vibrated in the arrangement direction by an amount corresponding to a gap between the reflection surfaces. 43. The light modulation element according to claim 33, wherein the group of piezoelectric bodies is slid in the direction of sweeping the reflection surface to be velocity-modulated. 44. A control voltage arithmetically processed to fix the number of frames is applied to the piezoelectric body.
Or the light modulation element according to 35. 45. The light modulation device according to claim 33, wherein the reflection surface is formed of a reflection film covering the piezoelectric body. 46. The light modulation element according to claim 33, wherein the piezoelectric body is partially covered with a ground electrode or a common electrode. 47. The light modulation according to claim 39, wherein the piezoelectric body comprises a fixed portion and a movable portion alternately arranged, and the movable portion expands and contracts according to a voltage applied to the movable portion. element. 48. The light modulation device according to claim 47, wherein the reflection surface is inclined when the movable section is raised. 49. The optical modulation device according to claim 47, wherein the movable portions are arranged on both sides of the fixed portion, and the directions of diffraction are determined so that diffracted lights from these movable portions do not interfere with each other. 50. The method according to claim 33, wherein the piezoelectric body is formed of a laminated body of piezoelectric elements, an electrode is provided in the laminating direction, and the reflection surface is formed in the laminating direction or another direction. Light modulator as described. 51. The piezoelectric body according to claim 33, wherein a piezoelectric ceramic or an electrostrictive ceramic is used.
2. The light modulation device according to 1. 52. A single wavelength light such as a laser beam, infrared light or ultraviolet light is used as the incident light.
5. The light modulation element according to 5. 53. The light modulation device according to claim 33, wherein a band-like light beam split into light is used as the incident light. 54. The light modulation device according to claim 33, wherein a color filter is provided on the reflection surface. 55. The light modulation element according to claim 33, which is used for projection, projection, printing, transfer, or optical switching. 56. The incident light is diffracted by the reflection surface provided on the piezoelectric body to change its optical path.
The light modulation device according to claim 47. 57. The light modulation element according to claim 56, wherein the piezoelectric bodies are stacked, and a voltage is applied to odd-numbered or even-numbered layers of the stacked bodies. 58. The light modulation device according to claim 56, wherein a plurality of in-line diffracted lights obtained in different directions from the reflection surface are combined and projected. 59. The light modulation device according to claim 56, wherein the pixel voltage application electrodes are separated for each pixel pitch, and a reflection surface electrode is provided to face the pixel voltage application electrodes. 60. The light modulation device according to claim 59, wherein the reflection surface electrode is electrically connected between the pixels in an inline direction. 61. The light modulation element according to claim 60, wherein in a direction orthogonal to the in-line direction, the reflection surface electrode is separated between the pixel of the movable portion and the pixel of the fixed portion. 62. A piezoelectric body provided with a reflecting surface for reflecting light, wherein a reflection angle of incident light is changed and modulated on the reflecting surface by an inverse piezoelectric effect of the piezoelectric body. 34. The method for manufacturing a light modulation element according to claim 33, further comprising a step of forming each of the piezoelectric bodies from a single piezoelectric plate. 63. disposing the piezoelectric body in an in-line state;
A method for manufacturing the light modulation device according to claim 63. 64. A method of manufacturing a light modulation element, comprising a piezoelectric body provided with a reflection surface for reflecting light, wherein incident light is diffracted and modulated on the reflection surface by an inverse piezoelectric effect of the piezoelectric body. A method for manufacturing a light modulation element, comprising a step of forming individual piezoelectric members from a single piezoelectric plate. 65. The method according to claim 64, wherein the piezoelectric body is arranged in-line, and the incident light is diffracted by unevenness of the reflection surface formed by the inverse piezoelectric effect. 66. The method according to claim 62, wherein the single piezoelectric plate is cut into individual piezoelectric members. 67. The method of manufacturing an optical modulation element according to claim 62, wherein the single piezoelectric plate is cut halfway to obtain a piezoelectric group having one end connected continuously. 68. The method for manufacturing a light modulation element according to claim 63, wherein the in-line piezoelectric body is provided separately. 69. The method of manufacturing an optical modulation element according to claim 62, wherein a vibration means for vibrating the group of piezoelectric bodies in an arrangement direction by an amount corresponding to a gap between these reflection surfaces is formed. . 70. The method of manufacturing an optical modulation element according to claim 62, wherein a sliding means for sliding the group of piezoelectric bodies in the direction of sweeping the reflecting surface is formed. 71. The method of manufacturing a light modulation element according to claim 62, wherein a reflection film covering the piezoelectric body is formed on the reflection surface. 72. The method according to claim 62, wherein the piezoelectric body is partially covered with a ground electrode or a common electrode. 73. The method of manufacturing an optical modulation element according to claim 68, wherein the piezoelectric bodies are formed in alternately arranged fixed portions and a movable portion that expands and contracts according to an applied voltage. 74. The method according to claim 73, wherein the movable section is disposed on both sides of the fixed section. 75. The method according to claim 62, wherein the piezoelectric body is formed of a laminate of piezoelectric elements, electrodes are provided in the stacking direction, and the reflection surface is formed in the stacking direction or another direction. A method for manufacturing a light modulation element. 76. The method according to claim 62, wherein the piezoelectric body is formed of piezoelectric ceramics or electrostrictive ceramics. 77. The method according to claim 62, wherein a color filter is provided on the reflection surface. 78. The method for manufacturing a light modulation element according to claim 62, wherein the light modulation element for projection, projection, printing, transfer, or optical switching is manufactured. 79. When manufacturing a light modulation element in which the incident light is diffracted by the reflection surface provided on the piezoelectric body to change the optical path, a pixel voltage application electrode material is changed to a reflection surface facing the pixel voltage application electrode material. 67. The method of manufacturing a light modulation element according to claim 66, wherein cutting is performed while leaving the electrode to form each pixel voltage application electrode. 80. The method according to claim 79, wherein the piezoelectric bodies are stacked, and a voltage is applied to odd-numbered or even-numbered layers of the stacked bodies. 81. The method for manufacturing a light modulation element according to claim 79, wherein a plurality of in-line diffracted lights obtained in different directions from the reflection surface are combined and projected. 82. The method for manufacturing a light modulation element according to claim 79, wherein the pixel voltage application electrodes are separated for each pixel pitch, and a reflection surface electrode is provided to face the pixel voltage application electrodes. 83. The method according to claim 82, wherein the reflective surface electrode is electrically connected between the pixels in an inline direction. 84. The method according to claim 83, wherein the reflection surface electrode is separated between the pixel of the movable portion and the pixel of the fixed portion in a direction orthogonal to the in-line direction. 85. A movable mirror device, a variable angle mirror device, or another variable angle mirror device made of the piezoelectric material according to any one of claims 1 to 61, and the variable mirror device is arranged in an in-line manner. A projection system in which the amount of light is controlled by a blocking means such as a mirror as needed.