CN113741027A - Grating type scanning actuator and optical fiber scanner - Google Patents

Grating type scanning actuator and optical fiber scanner Download PDF

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Publication number
CN113741027A
CN113741027A CN202010462572.7A CN202010462572A CN113741027A CN 113741027 A CN113741027 A CN 113741027A CN 202010462572 A CN202010462572 A CN 202010462572A CN 113741027 A CN113741027 A CN 113741027A
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actuating part
actuator
actuating
bending stiffness
optical fiber
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CN113741027B (en
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不公告发明人
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Chengdu Idealsee Technology Co Ltd
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Chengdu Idealsee Technology Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/103Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements

Abstract

The invention discloses a grid type scanning actuator, which comprises a base, a first actuating part and a second actuating part, wherein the first actuating part and the second actuating part are sequentially connected, the first actuating part is provided with a bending rigidity enhancing structure, and the bending rigidity enhancing structure is used for enhancing the bending rigidity of the first actuating part in a third direction, or the bending rigidity enhancing structure is used for enhancing the bending rigidity of the first actuating part in the third direction and reducing the bending rigidity of the first actuating part in a second direction, so that the bending rigidity of the first actuating part in the third direction is far greater than the bending rigidity of the first actuating part in the second direction. A fiber optic scanner employing the grating scan actuator is also disclosed. The bending stiffness of the first actuating part in the third direction is increased by arranging the bending stiffness enhancing structure on the first actuating part, so that the influence of the vibration of the second actuating part on the first actuating part can be reduced or even eliminated, the first actuating part is difficult to respond in the third direction, and the generation of a disordered vibration component is eliminated.

Description

Grating type scanning actuator and optical fiber scanner
Technical Field
The invention relates to the technical field of scanning imaging devices, in particular to a grating type scanning actuator and an optical fiber scanner.
Background
The fiber scanner is a display technology that uses a scanning actuator to control the swing of a fiber to emit a pattern, and the illuminated pattern has sharp color saturation, high contrast, high brightness and very small structural volume, and is mainly used in Fiber Scanning Display (FSD) technology and Fiber Scanning Endoscope (FSE) technology.
The actuator of the grating type optical fiber scanner mainly comprises a second actuating part as a fast axis and a first actuating part as a slow axis, wherein two ends of the second actuating part and two ends of the first actuating part are respectively a fixed end and a free end, the fixed end of the second actuating part is fixedly connected with the free end of the first actuating part, the free end of the first actuating part vibrates relative to the fixed end of the first actuating part along a second direction perpendicular to the first direction, the free end of the second actuating part vibrates relative to the fixed end of the second actuating part along a third direction perpendicular to the first direction, and preferably, the second direction is perpendicular to the third direction. The optical fiber is fixed to the free end of the second actuator in a cantilever-supported manner.
In order to obtain a stable scanning range and accurately control the scanning track, the scanning track of the end of the actuator needs to have accurate consistency with the scanning track of the first actuating part and the scanning track of the second actuating part, but since the first actuating part needs to bear the weight of the second actuating part and the optical fiber at the same time and the vibration of the second actuating part is added, the first actuating part is very susceptible to the influence of the vibration of the second actuating part to generate a disordered vibration component. How to avoid the cluttered vibration component is one of the important factors to improve the scanning quality.
Disclosure of Invention
The embodiment of the invention provides a grating type scanning actuator and an optical fiber scanner, which are used for solving the technical problem that a first actuating part is easy to generate disordered vibration components.
In order to achieve the above object, a first aspect of the embodiments of the present invention provides a grid scanning actuator, including a base, and a first actuating portion and a second actuating portion connected in sequence, where the first actuating portion is a slow-axis actuating portion, and a free end of the slow-axis actuating portion vibrates in a second direction perpendicular to the first direction with respect to a fixed end of the slow-axis actuating portion; the second actuating part is a fast-axis actuating part, the free end of the second actuating part vibrates relative to the fixed end of the second actuating part along a third direction perpendicular to the first direction, the second direction is perpendicular to the third direction, the first actuating part is provided with a bending rigidity enhancing structure, the bending rigidity enhancing structure is used for increasing the bending rigidity of the first actuating part in the third direction, or the bending rigidity enhancing structure is used for increasing the bending rigidity of the first actuating part in the third direction and reducing the bending rigidity of the first actuating part in the second direction, so that the bending rigidity of the first actuating part in the third direction is far greater than the bending rigidity of the first actuating part in the second direction.
Since the second actuating part vibrates along the third direction, the random vibration component caused by the second actuating part to the first actuating part is mainly concentrated in the third direction, and the influence of the vibration of the second actuating part on the first actuating part can be reduced or even eliminated by increasing the bending rigidity of the first actuating part in the third direction, so that the first actuating part is difficult to respond in the third direction, and the generation of the random vibration component is eliminated; reducing the bending stiffness of the first actuation portion in the second direction may reduce the driving power or obtain a larger amplitude at the same driving power.
Preferably, first actuating portion and second actuating portion be piezoelectric actuator, first actuating portion and second actuating portion equally be stiff end and free end respectively along the both ends of first direction, the stiff end of second actuating portion and the free end fixed connection of first actuating portion, the stiff end and the base fixed connection of first actuating portion.
Optionally, bending rigidity reinforcing structure include that the cross-section is isosceles triangle, follows the shaft-like main part that the first direction extends, the main part include along the bottom surface of first direction extension and perpendicular to second direction and two inclined planes that extend along the first direction, the contained angle between two inclined planes is the obtuse angle, the bottom surface subsides have bimorph, the main part is under bimorph's drive, its free end is for its stiff end along the vibration of second direction. The isosceles triangle section with the obtuse angle at the vertex angle enables the thickness of the first actuating part in the second direction to be smaller than the width of the first actuating part in the third direction, the thickness enables the bending rigidity of the first actuating part in the second direction to be obviously smaller than the bending rigidity of the first actuating part in the third direction, and the width enables the bending rigidity of the first actuating part in the third direction to be obviously larger than the bending rigidity of the first actuating part in the second direction.
Optionally, the bending stiffness enhancing structure includes a strip-shaped main body with a rectangular cross section and extending along a first direction, the thickness of the strip-shaped main body in a second direction is smaller than the width of the strip-shaped main body in a third direction, at least one surface of the strip-shaped main body perpendicular to the second direction is attached with a bimorph, and a free end of the strip-shaped main body vibrates along the second direction relative to a fixed end of the strip-shaped main body under the driving of the bimorph. The thickness is such that the bending stiffness of the first actuator in the second direction is substantially less than the bending stiffness thereof in the third direction, and the width is such that the bending stiffness thereof in the third direction is substantially greater than the bending stiffness thereof in the second direction.
Preferably, the bending stiffness enhancing structure comprises reinforcing members uniformly distributed in the first actuating portion and extending along the third direction, and the elastic modulus of the reinforcing members is greater than that of the first actuating portion. The reinforcing member can be a reinforcing rib, a reinforcing strip, a reinforcing fiber and the like. The reinforcing member extending along the third direction has a larger elastic modulus than that of the first actuating portion, so that the bending stiffness of the first actuating portion in the third direction can be obviously increased, and the influence of the vibration of the second actuating portion on the first actuating portion can be reduced or even eliminated. Meanwhile, the reinforcing piece and the first actuating part are made of different materials, so that the connecting force between the reinforcing piece and the first actuating part is smaller than that between the first actuating part and the second actuating part, and the bending rigidity of the first actuating part in the second direction can be reduced by the reinforcing piece compared with the first actuating part without the reinforcing piece.
Preferably, the bending stiffness enhancing structure includes a strip-shaped main body formed by a plurality of unit modules, the plurality of unit modules are sequentially connected along a first direction, any two adjacent unit modules are hinged through a hinge shaft extending in a third direction, the elastic modulus of the hinge shaft is greater than that of the unit modules, a bimorph is attached to at least one surface of the strip-shaped main body perpendicular to a second direction, and the free end of the strip-shaped main body vibrates in the second direction relative to the fixed end of the strip-shaped main body under the driving of the bimorph. Compared with the first actuating part which adopts the integrated main body made of the same material as the unit modules, the hinge shaft extending along the third direction can obviously increase the bending rigidity of the first actuating part in the third direction due to the fact that the elastic modulus of the hinge shaft is larger than that of the unit modules, and further the influence of the vibration of the second actuating part on the first actuating part is reduced or even eliminated. Meanwhile, the hinge structure between the adjacent unit modules can reduce the bending stiffness of the first actuating portion in the second direction.
Optionally, the base is provided with a containing hole for fixing the first actuating portion, the connecting sheet is installed in the containing hole and is fixedly connected with the base, and the fixing connection mode includes ultraviolet adhesive bonding, bolt fixing, clamping and the like.
The invention is used for reducing or even eliminating the generation of the disordered vibration component of the first actuating part.
Preferably, the natural frequency of the second actuator is much greater than the natural frequency of the first actuator to meet the requirements of grid scanning, while also avoiding resonant interference between the first and second actuators.
A second aspect of the embodiments of the present invention provides an optical fiber scanner, including the grating type scanning actuator and an optical fiber, where the optical fiber is fixedly connected to a free end of the second actuating portion in a cantilever-supported manner, a light-emitting end of the optical fiber is used as a front end, a free end of the optical fiber, which is located at a front side of the optical fiber and exceeds the second actuating portion, forms an optical fiber cantilever, and a portion of the optical fiber, which is located at a rear side of the optical fiber cantilever, is fixedly connected to the second actuating portion.
One or more technical solutions in the embodiments of the present invention have at least the following technical effects or advantages:
the bending stiffness of the first actuating part in the third direction is increased by arranging the bending stiffness enhancing structure on the first actuating part, so that the influence of the vibration of the second actuating part on the first actuating part can be reduced or even eliminated, the first actuating part is difficult to respond in the third direction, and the generation of a disordered vibration component is eliminated. The bending stiffness enhancing structure can also reduce the bending stiffness of the first actuating portion in the second direction, and then can reduce the driving power, or obtain larger amplitude under the same driving power.
Drawings
FIG. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic structural view of a rod-shaped first actuating portion having an isosceles triangle main body, taken along a cross section perpendicular to a first direction;
FIG. 3 is a schematic structural view of a strip-shaped first actuator having a rectangular main body cross section, taken along a cross section perpendicular to a first direction;
FIG. 4 is a schematic structural view of a rod-shaped main body with an isosceles triangle section, wherein a first actuating portion with a reinforcing member disposed therein is sectioned at a section perpendicular to a first direction;
FIG. 5 is a schematic structural view of a rod-shaped main body with an isosceles triangle section, wherein a first actuating portion with a reinforcing member disposed therein is sectioned at a section perpendicular to a third direction;
FIG. 6 is a schematic structural view of a strip-shaped main body with a rectangular cross section, in which a first actuating portion with a reinforcing member is disposed, the first actuating portion being sectioned perpendicular to a first direction;
FIG. 7 is a schematic structural view of a strip-shaped main body with a rectangular cross section, in which a first actuating portion of a reinforcing member is disposed, the first actuating portion being sectioned perpendicular to a third direction;
FIG. 8 is a schematic structural view of a first actuating portion of a strip-shaped body composed of a plurality of unit modules;
fig. 9 is a schematic top view of a strip-shaped body composed of a plurality of unit modules.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention provides a grid type scanning actuator, which is used for solving the technical problem that a first actuating part is easy to generate disordered vibration components.
In order to achieve the above object, a first aspect of the embodiments of the present invention provides a grid scanning actuator, as shown in fig. 1, including a base 10, and a first actuating portion 20 and a second actuating portion 30 connected in sequence, where the first actuating portion 20 is a slow-axis actuating portion, and a free end of the first actuating portion vibrates in a second direction perpendicular to the first direction with respect to a fixed end of the first actuating portion; the second actuating portion 30 is a fast axis actuating portion, the free end of the second actuating portion vibrates in a third direction perpendicular to the first direction relative to the fixed end of the second actuating portion, the second direction is perpendicular to the third direction, the first actuating portion 20 has a bending stiffness enhancing structure, the bending stiffness enhancing structure is used for increasing the bending stiffness of the first actuating portion 20 in the third direction, or the bending stiffness enhancing structure is used for increasing the bending stiffness of the first actuating portion 20 in the third direction and reducing the bending stiffness of the first actuating portion 20 in the second direction, so that the bending stiffness of the first actuating portion 20 in the third direction is far greater than the bending stiffness of the first actuating portion 20 in the second direction.
Since the second actuating portion 30 vibrates in the third direction, the random vibration component caused by the second actuating portion 30 is mainly concentrated in the third direction, and increasing the bending stiffness of the first actuating portion 20 in the third direction can reduce or even eliminate the influence of the vibration of the second actuating portion 30 on the first actuating portion 20, so that the first actuating portion 20 is difficult to respond in the third direction, and the generation of the random vibration component is eliminated; reducing the bending stiffness of the first actuation portion 20 in the second direction may reduce the driving power or obtain a larger amplitude at the same driving power.
Preferably, the first actuating portion 20 and the second actuating portion 30 are both piezoelectric actuators, two ends of the first actuating portion 20 and the second actuating portion 30 along the first direction are respectively a fixed end and a free end, the fixed end of the second actuating portion 30 is fixedly connected with the free end of the first actuating portion 20, and the fixed end of the first actuating portion 20 is fixedly connected with the base 10.
Optionally, as shown in fig. 2, the bending stiffness enhancing structure includes a rod-shaped main body 201 having an isosceles triangle cross section and extending along a first direction, the main body includes a bottom surface extending along the first direction and perpendicular to a second direction and two inclined surfaces extending along the first direction, an included angle between the two inclined surfaces is an obtuse angle, the bottom surface is attached with the bimorph 40, and a free end of the main body vibrates along the second direction relative to a fixed end of the main body under the driving of the bimorph 40. The isosceles triangle section with the obtuse vertex angle enables the thickness of the first actuating portion 20 in the second direction to be smaller than the width of the first actuating portion in the third direction, the thickness enables the bending rigidity of the first actuating portion 20 in the second direction to be obviously smaller than the bending rigidity of the first actuating portion in the third direction, and the width enables the bending rigidity of the first actuating portion 20 in the third direction to be obviously larger than the bending rigidity of the first actuating portion in the second direction. Further preferably, the bimorph 401 is disposed on the inclined surface of the main body to correct the movement locus of the first actuator.
Optionally, as shown in fig. 3, the bending stiffness enhancing structure includes a strip-shaped main body 202 having a rectangular cross section and extending along a first direction, a thickness of the strip-shaped main body in the second direction is smaller than a width of the strip-shaped main body in a third direction, at least one surface of a surface of the strip-shaped main body perpendicular to the second direction is attached with the bimorph 40, and a free end of the strip-shaped main body vibrates in the second direction with respect to a fixed end of the strip-shaped main body under the driving of the bimorph 40. The thickness is such that the bending stiffness of the first actuator 20 in the second direction is substantially less than the bending stiffness thereof in the third direction, and the width is such that the bending stiffness thereof in the third direction is substantially greater than the bending stiffness thereof in the second direction.
Preferably, as shown in fig. 4 to 7, the bending stiffness enhancing structure includes reinforcing members 210 uniformly distributed inside the first actuating portion 20 and extending in the third direction, and an elastic modulus of the reinforcing members 210 is greater than an elastic modulus of the first actuating portion 20. The reinforcing member 210 may be a reinforcing rib, a reinforcing bar, a reinforcing fiber, or the like. The reinforcing member 210 extending in the third direction has a larger elastic modulus than that of the first actuating portion 20, so that the bending stiffness of the first actuating portion 20 in the third direction can be significantly increased, and the influence of the vibration of the second actuating portion 30 on the first actuating portion 20 can be reduced or even eliminated. Meanwhile, the reinforcing member 210 and the first actuating portion 20 are made of different materials, so that the connecting force between the reinforcing member 210 and the first actuating portion 20 is smaller than the connecting force between molecules of the first actuating portion 20, and thus the reinforcing member 210 can be arranged to reduce the bending stiffness of the first actuating portion 20 in the second direction compared with the first actuating portion 20 without the reinforcing member 210.
Preferably, as shown in fig. 8 and 9, the bending stiffness enhancing structure includes a strip-shaped main body formed by a plurality of unit modules 220, the plurality of unit modules 220 are sequentially connected along a first direction, any two adjacent unit modules 220 are hinged by a hinge shaft 221 extending in a third direction, the hinge shaft 221 has an elastic modulus greater than that of the unit modules 220, at least one of surfaces of the strip-shaped main body perpendicular to the second direction is attached with the bimorph 40, and a free end of the strip-shaped main body vibrates in the second direction with respect to a fixed end thereof under the driving of the bimorph 40. Compared to the first actuating portion 20 using a one-piece body of the same material as the unit module 220, the hinge shaft 221 extending in the third direction can significantly increase the bending stiffness of the first actuating portion 20 in the third direction due to its elastic modulus greater than that of the unit module 220, thereby reducing or even eliminating the influence of the vibration of the second actuating portion 30 on the first actuating portion 20. Meanwhile, the hinge structure between the adjacent unit modules 220 can reduce the bending stiffness of the first actuating portion 20 in the second direction.
Optionally, the base 10 is provided with a receiving hole for fixing the first actuating portion 20, the connecting sheet is installed in the receiving hole and is fixedly connected with the base 10, and the fixing connection mode includes ultraviolet adhesive bonding, bolt fixing, clamping and the like.
The present invention is intended to reduce or even eliminate the generation of a random vibration component of the first actuator 20.
Preferably, the natural frequency of the second actuator 30 is much greater than the natural frequency of the first actuator 20 to meet the requirements of grid scanning, while also avoiding resonant interference between the first actuator 20 and the second actuator 30.
The second aspect of the embodiment of the present invention provides an optical fiber scanner, which includes the grating type scanning actuator and the optical fiber, the optical fiber is fixedly connected with the free end of the second actuating portion 30 in a cantilever supporting manner, the light emitting end of the optical fiber is used as the front end, the front portion of the optical fiber exceeds the free end of the second actuating portion 30 to form an optical fiber cantilever, and the portion of the optical fiber located at the rear side of the optical fiber cantilever is fixedly connected with the second actuating portion 30.
It should be noted that the above-mentioned embodiments illustrate rather than limit the invention, and that those skilled in the art will be able to design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" or "comprises" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The use of the words first, second, third, etc. do not denote any order, but rather the words are to be construed as names.
One or more technical solutions in the embodiments of the present invention have at least the following technical effects or advantages:
the bending stiffness of the first actuating part in the third direction is increased by arranging the bending stiffness enhancing structure on the first actuating part, so that the influence of the vibration of the second actuating part on the first actuating part can be reduced or even eliminated, the first actuating part is difficult to respond in the third direction, and the generation of a disordered vibration component is eliminated. The bending stiffness enhancing structure can also reduce the bending stiffness of the first actuating portion in the second direction, and then can reduce the driving power, or obtain larger amplitude under the same driving power. .
All features disclosed in this specification, except features that are mutually exclusive, may be combined in any way.
Any feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.
The invention is not limited to the foregoing embodiments. The invention extends to any novel feature or any novel combination of features disclosed in this specification and any novel method or process steps or any novel combination of features disclosed.

Claims (10)

1. A grid type scanning actuator comprises a base, a first actuating part and a second actuating part which are sequentially connected, wherein the first actuating part is a slow-axis actuating part, and the free end of the first actuating part vibrates along a second direction vertical to the first direction relative to the fixed end of the first actuating part; the second actuating part is a fast-axis actuating part, the free end of the second actuating part vibrates relative to the fixed end of the second actuating part along a third direction perpendicular to the first direction, and the second direction is perpendicular to the third direction.
2. The grating scan actuator of claim 1, wherein the first and second actuating portions are piezoelectric actuators, and the first and second actuating portions are fixed and free along the first direction, respectively, the fixed end of the second actuating portion is fixedly connected to the free end of the first actuating portion, and the fixed end of the first actuating portion is fixedly connected to the base.
3. A grid scanning actuator as claimed in claim 1, wherein said bending stiffness enhancing structure comprises a rod-shaped body having an isosceles triangle cross section and extending in a first direction, said body comprising a bottom surface extending in the first direction and perpendicular to a second direction and two inclined surfaces extending in the first direction, an included angle between the two inclined surfaces being an obtuse angle, said bottom surface being coated with a bimorph, the body being driven by the bimorph to oscillate in the second direction at its free end with respect to its fixed end.
4. A grid scanning actuator as claimed in claim 3, wherein the isosceles triangle with obtuse vertex angles has a cross-section such that the first actuator portion has a thickness in the second direction which is substantially smaller than its width in the third direction, said thickness being such that the first actuator portion has a bending stiffness in the second direction which is substantially smaller than its bending stiffness in the third direction, and said width being such that the first actuator portion has a bending stiffness in the third direction which is substantially larger than its bending stiffness in the second direction.
5. A grid scanning actuator as claimed in claim 1, wherein the bending stiffness enhancing structure comprises a strip-like body having a rectangular cross-section and extending in a first direction, the strip-like body having a thickness in a second direction smaller than a width in a third direction, at least one of surfaces of the strip-like body perpendicular to the second direction having a bimorph attached thereto, the strip-like body being driven by the bimorph to vibrate in the second direction at a free end thereof with respect to a fixed end thereof.
6. A grid scanning actuator as claimed in claim 5, wherein the thickness is such that the bending stiffness of the first actuator portion in the second direction is substantially less than the bending stiffness thereof in the third direction, and the width is such that the bending stiffness thereof in the third direction is substantially greater than the bending stiffness thereof in the second direction.
7. A grid scanning actuator according to any of claims 1 to 6, wherein the bending stiffness enhancing structure comprises reinforcing members extending in the third direction and evenly distributed inside the first actuator portion, and the modulus of elasticity of the reinforcing members is greater than the modulus of elasticity of the first actuator portion.
8. A grid scanning actuator as claimed in claim 7, wherein the reinforcement comprises one or more of reinforcing ribs, reinforcing bars and reinforcing fibers.
9. A grid scanning actuator as claimed in claim 1, wherein the bending stiffness enhancing structure comprises a strip-shaped body formed by a plurality of unit modules, the plurality of unit modules are sequentially connected in a first direction, any two adjacent unit modules are hinged by a hinge shaft extending in a third direction, the hinge shaft has an elastic modulus greater than that of the unit modules, bimorphs are attached to at least one of surfaces of the strip-shaped body perpendicular to the second direction, and the free end of the strip-shaped body vibrates in the second direction with respect to the fixed end thereof under the driving of the bimorphs.
10. An optical fiber scanner, comprising the grating type scanning actuator as claimed in any one of claims 1 to 9, and an optical fiber, wherein the optical fiber is fixedly connected with the free end of the second actuator in a cantilever-supported manner, the free end of the optical fiber is taken as a front end, the front portion of the optical fiber exceeds the free end of the second actuator to form an optical fiber cantilever, and the part of the optical fiber located at the rear side of the optical fiber cantilever is fixedly connected with the second actuator.
CN202010462572.7A 2020-05-27 2020-05-27 Grating type scanning actuator and optical fiber scanner Active CN113741027B (en)

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CN209784655U (en) * 2018-12-29 2019-12-13 成都理想境界科技有限公司 Scanning actuator, optical fiber scanner and projection device

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