CN110858029A - Scanning driver and optical fiber scanner - Google Patents
Scanning driver and optical fiber scanner Download PDFInfo
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- CN110858029A CN110858029A CN201810973625.4A CN201810973625A CN110858029A CN 110858029 A CN110858029 A CN 110858029A CN 201810973625 A CN201810973625 A CN 201810973625A CN 110858029 A CN110858029 A CN 110858029A
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- 239000013307 optical fiber Substances 0.000 title claims description 43
- 239000000463 material Substances 0.000 claims abstract description 274
- 239000010409 thin film Substances 0.000 claims description 88
- 125000006850 spacer group Chemical group 0.000 claims description 30
- 239000000835 fiber Substances 0.000 claims description 11
- 239000000725 suspension Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 14
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 description 16
- 238000002955 isolation Methods 0.000 description 15
- 239000000843 powder Substances 0.000 description 13
- 239000004020 conductor Substances 0.000 description 10
- 238000000465 moulding Methods 0.000 description 9
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- 238000000576 coating method Methods 0.000 description 8
- 239000013078 crystal Substances 0.000 description 6
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- 239000002033 PVDF binder Substances 0.000 description 4
- 230000008602 contraction Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 4
- 238000004026 adhesive bonding Methods 0.000 description 3
- 238000000748 compression moulding Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 239000011265 semifinished product Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
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- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
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- Optics & Photonics (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a scanning driver, which comprises a first actuating part, an isolating part and a second actuating part which are integrally formed and sequentially connected from back to front, wherein at least one of the first actuating part and the second actuating part is a sheet-shaped stacked piezoelectric material actuator, the sheet-shaped stacked piezoelectric material actuator comprises a middle isolating sheet, a plurality of first piezoelectric material sheets parallel to the middle isolating sheet are sequentially stacked on one side of the middle isolating sheet, and a plurality of second piezoelectric material sheets parallel to the middle isolating sheet are sequentially stacked on the other side of the middle isolating sheet. The invention has the beneficial effects that: the integrally formed structure avoids a series of processes of subsequent scanner assembly, alignment, debugging and the like, improves the manufacturing efficiency, improves the reliability of devices, can prevent disassembly and disassembly, and increases the overall reliability and durability; and the amplitude of the actuator can be increased by adopting a structure in which a plurality of pieces are stacked.
Description
Technical Field
The present invention relates to the field of scan driver structures, and in particular, to a scan driver and an optical fiber scan driver.
Background
The single fiber resonance type piezoelectric scanner is a new type scanner which utilizes the resonance characteristics of the fiber cantilever in two directions to realize static or dynamic image scanning, and compared with an MEMS (Micro-Electro-Mechanical System) scanner, the single fiber resonance type piezoelectric scanner has smaller volume, lower cost, simple and convenient manufacturing process and easier integration.
In the structure of the single fiber resonance piezoelectric scanner with two-dimensional vibration mode, the drivers vibrating in two directions are connected by a certain connecting piece, and the vibration directions of the two drivers are crossed, so that the two-dimensional scanning function is realized. However, in this structure, there are some problems: after long-time scanning work, the two drivers and the connecting piece are loosened, so that the vibration frequency cannot be accurately controlled; the connector can cause energy loss; the connecting piece can increase the volume and the weight of the equipment; in the manufacture of such small volume devices, there can be mass production difficulties in splicing two drives using a connector.
Disclosure of Invention
The invention aims to provide a scanning driver and an optical fiber scanner adopting the scanning driver, which are used for improving the accuracy and stability of the scanning driver and facilitating the processing performance and can obtain larger scanning amplitude with smaller scanner volume.
In order to achieve the above object, a first aspect of the present invention provides a scan driver, comprising a first actuator, a spacer, and a second actuator, which are integrally formed and sequentially connected from back to front, wherein the first actuator vibrates along a first axis direction, the second actuator vibrates along a second axis direction, both the first axis and the second axis are perpendicular to the front and back directions and are not parallel to each other, at least one of the first actuator and the second actuator is a stacked piezoelectric actuator,
the slice stacking piezoelectric material actuator comprises a middle isolation sheet, wherein a plurality of first piezoelectric material slices parallel to the middle isolation sheet are sequentially stacked on one side of the middle isolation sheet, a plurality of second piezoelectric material slices parallel to the middle isolation sheet are sequentially stacked on the other side of the middle isolation sheet, each first piezoelectric material slice and each second piezoelectric material slice are provided with two first surfaces parallel to the middle isolation sheet, and a layer of electrode is uniformly distributed on the first surfaces of each first piezoelectric material slice and each second piezoelectric material slice.
The optical fiber scanning driver adopting the scanning driver comprises an optical fiber and the scanning driver, wherein the optical fiber is fixedly connected with the scanning driver, and the front end of the optical fiber exceeds the scanning driver to form an optical fiber cantilever. First actuating portion drive optic fibre cantilever vibrates along the primary shaft direction, and second actuating portion drive optic fibre cantilever vibrates along the secondary shaft direction, and integrated into one piece's two-way driver can reduce part quantity, makes the scanning process more stable, and the connecting portion between first actuating portion and the second actuating portion can not appear not hard up that long-time operation leads to, has the volume production of being convenient for, makes fast, the error is little, repeatability is high, advantages such as yields height. By employing a multi-sheet stack configuration, the amplitude of the actuator can be increased.
The first actuating part and the second actuating part control the optical fiber to generate vibration in the synthetic direction of the vibration in the first axis direction and the vibration in the second axis direction according to the driving signal sent by the control part, the natural frequency of the second actuating part is far greater than that of the first actuating part, so that the optical fiber cantilever is further driven to swing, and the emitting end at the tail end of the cantilever section performs grid scanning in a three-dimensional space to emit laser with modulation information so as to display an image. In order to drive the fiber cantilever to realize grid-type scanning by the fiber scanner in the invention, the natural frequencies of the first actuating part and the second actuating part must be different, namely, the first actuating part and the second actuating part can be regarded as a filter, and only a driving signal matched with the natural frequency of the actuating part can realize considerable vibration amplitude.
Preferably, the obtained first axis is perpendicular to the second axis, so that the scanning track of the scanning driver is a regular rectangle, and when the scanning driver is particularly applied to an optical fiber scanning driver, a regular projection picture is conveniently displayed. Of course, the first axis is not perpendicular to the second axis, and the optical fiber scanning driver can be applied to the optical fiber scanning driver, and by modulating the optical signal input to the optical fiber, a regular projection picture can be obtained.
The larger the area of the electrode layer laid on the surface of each piezoelectric material sheet is, the larger the drivable range of the piezoelectric material sheet is, and the larger the obtained amplitude is.
Optionally, an electrical isolation layer is arranged between two layers of electrodes between any two adjacent first piezoelectric material pieces or between any two adjacent second piezoelectric material pieces.
Optionally, a layer of electrode is shared between any two adjacent first piezoelectric material pieces or between any two adjacent second piezoelectric material pieces.
The integrated into one piece's two-way driver with bidirectional vibration function can reduce part quantity, makes the scanning process more stable, and the connecting portion between first actuating portion and the second actuating portion can not appear moving about for a long time and lead to not hard up, and integrated into one piece's two-way driver has the volume production of being convenient for, makes advantages such as quick, the error is little, repeatability is high, yields height.
Compare in adopting fixed modes such as gluing or buckle, screw among the prior art between first actuating portion and the second actuating portion, the mode of gluing or buckle can lead to connecting not hard up because long-time high frequency vibration, directly influences the vibration performance of scanner, and the fixed mode of screw is then the volume slightly bigger, and the structure shows slightly complicacy to current fixed mode technology degree of difficulty is big, the preparation is consuming time, the repeatability is poor, the yields is low.
In the application field of the micro structure of the optical fiber scanner, the improvement of the scanning emergent image quality by the integrally formed second actuating part and the first actuating part is remarkable, and the improvement is mainly reflected by the following factors: in the optical fiber scanner, the second actuating part and the first actuating part vibrate at high frequency, in the process of integrally forming the first direction driver and the second direction driver, the scanner is compact enough to realize high-efficiency performance under the pressure of tens of megapascals, and meanwhile, the rigidity is extremely high and is incomparable by using an adhesive mode, so that the interconnected part is prevented from being loosened due to high-frequency vibration by the integral forming.
The size of the second actuating part and the first actuating part in the optical fiber scanner is very small, and the thickness of the second actuating part and the first actuating part is about several millimeters, so that the second actuating part and the first actuating part are easily damaged when a connecting piece is adopted in the interconnection process of the second actuating part and the first actuating part; and utilize mould integrated into one piece, avoided a series of processes such as follow-up scanner equipment, alignment, debugging, reduce the complexity, promote the preparation efficiency, consequently adopt integrated into one piece can greatly reduced the degree of difficulty in the manufacturing process and promote the device reliability, can prevent dismantling, prevent the disintegration simultaneously, increase whole reliability and durability.
The second actuating part and the first actuating part control the vibration section of the optical fiber to generate vibration in the synthetic direction of the vibration in the second axis direction and the vibration in the first axis direction according to the driving signal sent by the control component, so that the cantilever section is further driven to swing, and the emitting end at the tail end of the cantilever section emits laser with modulation information in a three-dimensional scanning track in a three-dimensional space so as to display an image.
The electrodes of each first piezoelectric material piece and each second piezoelectric material piece are connected with an external drive circuit so as to apply an alternating electric field to each piezoelectric material piece through the electrodes. The first piezoelectric material pieces are simultaneously extended or shortened under the action of the alternating electric field applied by the electrodes, the second piezoelectric material pieces are simultaneously extended or shortened under the action of the alternating electric field applied by the electrodes, and the extension and contraction directions of the first piezoelectric material pieces and the second piezoelectric material pieces are opposite at any moment.
When the first actuating part and/or the second actuating part are/is sheet-shaped stacked piezoelectric material actuators, synchronous reverse expansion and contraction of the first piezoelectric material sheet and the second piezoelectric material sheet of each actuating part can drive the actuating parts to vibrate in a direction perpendicular to the middle partition sheet.
When the first actuating part is a sheet stacking piezoelectric material actuator, the second actuating part is a bimorph actuator, a piezoelectric material tube actuator, a multilayer tube nested piezoelectric material actuator or a sheet stacking piezoelectric material actuator, and when the second actuating part is the sheet stacking piezoelectric material actuator, the first actuating part is the bimorph actuator, the piezoelectric material tube actuator, the multilayer tube nested piezoelectric material actuator or the sheet stacking piezoelectric material actuator.
The bimorph actuator comprises a middle spacer, wherein two piezoelectric material sheets are adhered to two sides of the middle spacer, and two surfaces of each piezoelectric material sheet, which are parallel to the middle spacer, are provided with a layer of electrode layer.
The piezoelectric material tube actuator comprises a piezoelectric material tube, wherein the outer surface of the piezoelectric material tube is provided with at least one pair of outer electrodes which are symmetrical relative to the axis of the piezoelectric material tube, and the inner surface of the piezoelectric material tube is provided with an inner electrode matched with the outer electrodes. So that the actuating parts vibrate along the corresponding axes after the inner electrodes and the outer electrodes are connected with an external driving device.
The multilayer tube nested piezoelectric material actuator comprises at least two layers of piezoelectric material tubes, the piezoelectric material tubes are sequentially and tightly sleeved along the radial direction, at least one pair of outer electrodes symmetrical with respect to the axis of each piezoelectric material tube is arranged outside each piezoelectric material tube, and an inner electrode matched with the outer electrode is arranged inside each piezoelectric material tube. Preferably, the outer electrodes of the piezoelectric material tubes of the respective layers correspond in distribution position in the circumferential direction. The outer electrodes with the same function on each layer of piezoelectric material tube are located at the same position in the circumferential direction and are sequentially arranged along the radial direction, and the same function means that the outer electrodes with the same function drive each layer of piezoelectric material tube to synchronously vibrate along the same axis. That is, after the inner electrode and the outer electrode of each layer of piezoelectric material tube are connected to an external driver, the free ends of each layer of piezoelectric material tube vibrate synchronously in the same direction at any time. More preferably, the number of pairs of outer electrodes of each piezoelectric material tube is the same, and the distribution positions in the circumferential direction are the same.
Optionally, an electrical isolation layer is disposed between the inner electrode of any one of the piezoelectric material tubes located at the outer layer and the outer electrode of the piezoelectric material tube located at the inner side of the laminated piezoelectric material tube and adjacent to the laminated piezoelectric material tube. In this case, the inner electrodes of each layer of piezoelectric material tube may be provided as a plurality of inner electrode subsections corresponding to at least one outer electrode, or may be electrode layers that cover the entire inner wall of the piezoelectric material tube. The inner electrode sections can be insulated or electrically connected with each other.
Alternatively, the inner electrode of any one of the piezoelectric material tubes located in the outer layer is the same electrode as the outer electrode of the piezoelectric material tube located inside and immediately adjacent to the laminated piezoelectric material tube. At this time, each inner electrode of each piezoelectric material tube positioned on the outer layer is an outer electrode of the piezoelectric material tube positioned on the inner side and adjacent to the inner side. Each inner electrode and each outer electrode of each piezoelectric material tube are in one-to-one correspondence.
Preferably, each electrode of the second actuating portion is connected with a thin film conductive layer, each thin film conductive layer is attached to the surface of the scanning driver in an insulating manner and extends to the rear end portion of the first actuating portion, the insulating attachment means that each thin film conductive layer is attached to the scanning driver, the thin film conductive layers are insulated from each other, each thin film conductive layer is insulated from an electrode which is not related to the thin film conductive layer, and an electrode which is not related to each thin film conductive layer is an electrode which is not connected with the thin film conductive layer. Each electrode of the first actuating part extends to the rear end part of the first actuating part.
Further, when the second actuating portion is a sheet-shaped stacked piezoelectric material actuator or a bimorph, it is preferable that rear end portions of the electrode layers are electrically connected to thin film conductive layers respectively, and the thin film conductive layers are attached to outer surfaces of the spacer portion and the first actuating portion in an insulating manner and extend to a rear end of the first actuating portion. The insulating coating means that each thin film conducting layer is coated on the scanner and insulated from other conducting parts on the scanning driver. Specifically, for example, the thin film conductive layers are insulated from each other and from the electrode or the thin film conductive layer on the first actuation portion.
Further, when the second actuating portion is a piezoelectric material tube actuator or a multilayer tube nested piezoelectric material actuator, preferably, each electrode layer is electrically connected to a thin film conductive layer, and the thin film conductive layer is attached to the outer surfaces of the second actuating portion, the isolating portion and the first actuating portion in an insulating manner and extends to the rear end of the first actuating portion. The insulating coating means that all the thin film conducting layers are coated on the scanner and insulated from other conducting parts on the scanning driver. Specifically, for example, the thin film conductive layers are insulated from each other, from each other to other electrodes on the second actuator portion, and from each other to the electrode or the thin film conductive layer on the first actuator portion.
The integral molding refers to that an integral component comprising the first actuating part, the isolating part and the second actuating part is integrally manufactured and molded by adopting an integral molding process. For example, the first actuating portion, the isolating portion and the second actuating portion each include a main body made of a piezoelectric ceramic powder material, an integral member including the first actuating portion, the isolating portion and the second actuating portion is obtained by filling piezoelectric ceramic powder into a die, press-molding the piezoelectric ceramic powder, baking the die, polarizing the first actuating portion and the second actuating portion as needed, and adding driving electrodes to the first actuating portion and the second actuating portion. For a scanning driver comprising a sheet-like stacked piezoelectric material actuator and a bimorph actuator, the spacer and the piezoelectric ceramic powder are press-molded in a mold during integral molding. For a scanning driver comprising a sheet-stacked piezoelectric material actuator and a multilayer tube nested piezoelectric material actuator, an electrode hole for filling an electrode is formed in a semi-finished product after compression molding by a mold.
Further, the scan driver further includes a fixing portion integrally formed with the first actuating portion.
Similarly, the integral forming means that the integral component comprising the fixing part, the first actuating part, the isolating part and the second actuating part is integrally manufactured and formed by adopting an integral forming process. For example, the fixing portion, the first actuating portion, the isolating portion and the second actuating portion all comprise main bodies made of piezoelectric ceramic powder materials, piezoelectric ceramic powder is filled into a die to be pressed and formed, an integral component comprising the fixing portion, the first actuating portion, the isolating portion and the second actuating portion can be obtained through baking, then the first actuating portion and the second actuating portion are polarized as required, and driving electrodes are additionally arranged on the first actuating portion and the second actuating portion.
The integrated forming of the fixing section can further prevent the first actuating part from being connected on the fixing section to be loose. Prevent dismantling, prevent disassembling, increase whole reliability and durability.
Furthermore, the film conducting layer of the second actuating part extending to the rear end of the first actuating part continuously extends to the rear end of the fixing part and is attached to the outer surface of the fixing part in an insulating manner. The insulating coating means that the film conducting layers and the electric conductors on the fixing part are insulated from each other.
When the first actuating portion is a sheet-shaped stacked piezoelectric actuator, preferably, the fixed portion includes a plurality of sequentially stacked third piezoelectric material sheets, each of the first piezoelectric material sheets and the second piezoelectric material sheets is connected to a corresponding third piezoelectric material sheet, a conductor for connecting electrodes of the first actuating portion is disposed between an outer surface of the fixed portion and two adjacent third piezoelectric material sheets, preferably, the conductor is a thin film conductive layer attached to a surface of the third piezoelectric material sheet, one end of each thin film conductive layer is correspondingly connected to one electrode of the first actuating portion, and the other end of each thin film conductive layer extends to the rear end of the fixed portion. Preferably, the number of the third piezoelectric material pieces is equal to the sum of the number of the first piezoelectric material pieces and the number of the second piezoelectric material pieces, and each third piezoelectric material piece is correspondingly connected with one first piezoelectric material piece or one second piezoelectric material piece.
When the first actuating portion is a bimorph actuator, preferably, the fixing portion includes at least two piezoelectric material pieces stacked, each piezoelectric material piece of the bimorph is respectively and correspondingly connected with the piezoelectric material piece of one fixing portion, an electric conductor for connecting electrodes of the first actuating portion is arranged between the outer surface of the fixing portion and the piezoelectric material piece of the fixing portion, preferably, the electric conductor is a thin film conductive layer attached to the surface of the piezoelectric material piece of the fixing portion, one end of each thin film conductive layer is correspondingly connected with one electrode of the first actuating portion, and the other end of each thin film conductive layer extends to the rear end of the fixing portion.
When the first actuating portion is a piezoelectric material tube actuator, preferably, the fixing portion includes a piezoelectric material tube, the piezoelectric material tube of the fixing portion is connected with the piezoelectric material tube of the first actuating portion, the inner wall and the outer wall of the piezoelectric material tube of the fixing portion are both provided with a conductive body for connecting each electrode of the first actuating portion, preferably, the conductive body is a thin film conductive layer which is attached to the inner wall and the outer wall of the piezoelectric material tube of the fixing portion in an insulating manner, one end of each thin film conductive layer on the inner wall of the piezoelectric material tube of the fixing portion is correspondingly connected with one inner electrode of the first actuating portion, and the other end of each thin film conductive layer extends to the rear end of the fixing portion; one end of each film conducting layer on the outer wall of the piezoelectric material tube of the fixing part is correspondingly connected with an outer electrode of the first actuating part, and the other end of each film conducting layer extends to the rear end of the fixing part.
When the first actuating part is a multilayer tube nested piezoelectric material actuator, preferably, the fixing part comprises a plurality of piezoelectric material tubes which are sequentially and tightly sleeved along the radial direction, the piezoelectric material tube of each multilayer tube nested piezoelectric material actuator is respectively connected with one piezoelectric material tube of the corresponding fixing part, the inner surface and the outer surface of each piezoelectric material tube of the fixing part are respectively provided with a conductive body used for connecting each electrode of the first actuating part, preferably, the conductive bodies are thin film conductive layers attached to the inner surface and the outer surface of each piezoelectric material tube of the fixing part, one end of each thin film conductive layer is correspondingly connected with one electrode of the first actuating part, and the other end of each thin film conductive layer extends to the rear end of the fixing part.
The piezoelectric material sheet and the piezoelectric material tube mentioned in the present invention are made of piezoelectric materials, and the piezoelectric materials include two types: organic piezoelectric materials, i.e., piezoelectric polymers like polyvinylidene fluoride (PVF2), polyvinylidene fluoride (PVDF); the inorganic piezoelectric material mainly comprises two main types of piezoelectric crystals with single crystal structures and piezoelectric ceramics with polycrystalline structures, wherein the single crystal piezoelectric materials are orderly grown crystals such as quartz crystals, lithium niobate crystals and the like, the piezoelectric ceramics with the polycrystalline structures are artificially synthesized piezoelectric polycrystalline bodies, and the commonly used piezoelectric ceramics comprise barium titanate, lead zirconate titanate, niobate and the like.
The thin film conducting layer can be prepared by a processing method similar to a conducting metal layer on a printed circuit board, or the thin film conducting metal layer can be pasted on a scanning driver and is electrically connected with the corresponding electrode in a connecting mode such as welding.
In a second aspect, an optical fiber scanner is provided, which includes any one of the scan drivers described above, and an optical fiber, where the optical fiber is fixedly connected to the scan driver, and a front end of the optical fiber extends beyond the scan driver to form an optical fiber cantilever. The fixed connection mode can adopt conventional connection structures such as gluing, fixing piece fastening, welding and the like.
Optionally, the optical fiber located at the rear side of the optical fiber cantilever is fixedly connected with the outer surface of the scan driver.
One or more technical solutions in the embodiments of the present invention have at least the following technical effects or advantages:
the integrated forming structure avoids a series of processes such as follow-up scanner assembling, aligning and debugging, reduces complexity and improves manufacturing efficiency, so that the difficulty in the manufacturing process can be greatly reduced and the reliability of the device can be improved by adopting the integrated forming structure, and meanwhile, the integrated forming structure can prevent disassembly and increase the overall reliability and durability. And the amplitude of the actuator can be increased by adopting a structure in which a plurality of pieces are stacked.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural diagram of one embodiment in the first class of embodiments;
FIG. 3 is a schematic top view of the scan driver shown in FIG. 2;
FIG. 4 is a schematic cross-sectional structural view of a sheet stack piezoelectric material actuator;
FIG. 5 is a schematic cross-sectional view of another sheet stack piezoelectric material actuator;
FIG. 6 is a schematic cross-sectional structural view of a bimorph actuator;
FIG. 7 is a cross-sectional structural schematic of a piezoelectric material tube actuator;
FIG. 8 is a schematic cross-sectional structural view of a multi-layer tube nested piezoelectric material actuator;
FIG. 9 is a schematic cross-sectional view of another multi-layered tube nested piezoelectric material actuator;
fig. 10 is a schematic cross-sectional structural view of a third multilayer tube nested piezoelectric material actuator.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without any inventive step, are within the scope of the present invention.
Embodiments of the present invention provide a scan driver, so as to improve accuracy and stability of the scan driver and facilitate processing performance.
Various types of embodiments of the present invention are described below, and there are further various embodiments of each type of embodiment that have unique features.
Class 1 examples:
a scanning driver comprises a first actuating part 1, a separating part 2 and a second actuating part 3 which are integrally formed and sequentially connected from back to front, wherein the first actuating part 1 vibrates along a first axis direction, the second actuating part 3 vibrates along a second axis direction, the first axis and the second axis are both vertical to the front and back direction and are not parallel to each other, the first actuating part 1 and the second actuating part 3 are both sheet-shaped stacked piezoelectric material actuators, and the scanning driver is shown in a combined graph of FIG. 1 and FIG. 5,
the sheet-shaped stacked piezoelectric material actuator comprises a middle spacer 601, wherein a plurality of first piezoelectric material sheets 602 parallel to the middle spacer 601 are sequentially stacked on one side of the middle spacer 601, a plurality of second piezoelectric material sheets 603 parallel to the middle spacer 601 are sequentially stacked on the other side of the middle spacer 601, each first piezoelectric material sheet 602 and each second piezoelectric material sheet 603 are provided with two first surfaces parallel to the middle spacer 601, and a layer of electrode 604 is uniformly distributed on the first surfaces of each first piezoelectric material sheet 602 and each second piezoelectric material sheet 603.
The optical fiber 5 scanning driver adopting the scanning driver comprises an optical fiber 5 and the scanning driver, wherein the optical fiber 5 is fixedly connected with the scanning driver, and the front end of the optical fiber 5 exceeds the scanning driver to form an optical fiber 5 cantilever. The first actuator 1 drives the optical fiber 5 cantilever to vibrate in the first axial direction, and the second actuator 3 drives the optical fiber 5 cantilever to vibrate in the second axial direction.
The first actuating part 1 and the second actuating part 3 control the optical fiber 5 to generate vibration in the synthetic direction of the vibration in the first axis direction and the vibration in the second axis direction according to the driving signal sent by the control component, the natural frequency of the second actuating part 3 is far greater than that of the first actuating part 1, so that the cantilever of the optical fiber 5 is further driven to swing, and the emergent end of the tail end of the cantilever section is subjected to grid scanning in a three-dimensional space to emit laser with modulation information so as to display an image. In order to make the fiber 5 scanner in the present invention able to drive the fiber 5 cantilever to realize grid scanning, the natural frequencies of the first actuating part 1 and the second actuating part 3 must be different, i.e. both can be regarded as a kind of filter, and only the driving signal matched with the natural frequency of the actuating part itself can realize considerable vibration amplitude.
Preferably, the first axis is perpendicular to the second axis, so that the scanning trajectory of the scanning driver is a regular rectangle, and when the scanning driver is applied to the optical fiber 5 scanning driver, a regular projection picture can be conveniently displayed. Of course, the optical fiber 5 scan driver can be applied when the first axis is not perpendicular to the second axis, and a regular projection picture can be obtained by modulating the optical signal input into the optical fiber 5.
The larger the area of the electrodes arranged on the surface of each piezoelectric material piece is, the larger the drivable range of the piezoelectric material piece is, and the larger the obtained amplitude is.
Alternatively, as shown in fig. 4, an electrically isolating layer is provided between two layers of electrodes 604 located between any two adjacent first sheets of piezoelectric material 602 or between any two adjacent second sheets of piezoelectric material 603.
Alternatively, as shown in fig. 5, a layer of electrodes 604 is shared between any two adjacent first piezoelectric material pieces 602 or between any two adjacent second piezoelectric material pieces 603.
The second actuating part 3 and the first actuating part 1 control the vibration section of the optical fiber 5 to generate vibration in the synthetic direction of the vibration in the second axis direction and the vibration in the first axis direction according to the driving signal sent by the control component, so that the cantilever section is further driven to swing, and the emergent end of the tail end of the cantilever section emits laser with modulation information in a three-dimensional scanning track in a three-dimensional space so as to display an image.
The electrodes 604 of each first sheet 602 of piezoelectric material and each second sheet 603 of piezoelectric material are each connected to an external drive circuit to apply an alternating electric field to each sheet of piezoelectric material through the electrodes 604. Each of the first pieces of piezoelectric material 602 is simultaneously elongated or shortened by the alternating electric field applied by the respective electrode 604, each of the second pieces of piezoelectric material 603 is simultaneously elongated or shortened by the alternating electric field applied by the respective electrode 604, and the directions of expansion and contraction of the first pieces of piezoelectric material 602 and the second pieces of piezoelectric material 603 are opposite at any one time.
Since the rear end of the first actuating portion 1 is fixedly mounted in use, and the rear end of the second actuating portion 3 is connected to the first actuating portion 1 through the isolation portion 2, when the first actuating portion 1 and/or the second actuating portion 3 are sheet-stack piezoelectric material actuators, synchronous reverse expansion and contraction of the first piezoelectric material sheet 602 and the second piezoelectric material sheet 603 of each actuating portion drives the actuating portions to vibrate in a direction perpendicular to the middle isolation sheet 601.
Furthermore, the rear end parts of the electrodes of the second actuating part 3 are respectively electrically connected with a thin film conductive layer 7, and the thin film conductive layer 7 is insulated and attached to the outer surfaces of the isolating part 2 and the first actuating part 1 and extends to the rear end of the first actuating part 1. The insulating coating means that each thin film conducting layer 7 is coated on the scanner and insulated from other conducting parts on the scanning driver. Specifically, the thin film conductive layers 7 are insulated from each other, and the thin film conductive layers 7 are insulated from the electrodes 604 or the thin film conductive layers 7 on the first actuation portion 1.
The integral molding refers to that an integral component comprising the first actuating part 1, the isolating part 2 and the second actuating part 3 is integrally manufactured and molded by adopting an integral molding process. For example, the first actuator 1, the isolation part 2, and the second actuator 3 each include a body made of a piezoelectric ceramic powder material, and an integral member including the first actuator 1, the isolation part 2, and the second actuator 3 is obtained by filling piezoelectric ceramic powder into a mold, press-molding the piezoelectric ceramic powder, and baking the piezoelectric ceramic powder, and then polarizing the first actuator 1 and the second actuator 3 as needed, and adding a driving electrode to the first actuator 1 and the second actuator 3. For the scanning driver comprising the sheet stacking piezoelectric material actuator and the bimorph actuator, the isolation sheet and the piezoelectric ceramic powder are loaded into a mould for compression molding when the scanning driver is integrally molded. For a scan driver including a sheet stacked piezoelectric material actuator and a multilayer tube nested piezoelectric material actuator, a semi-finished product after being press-molded by a mold has an electrode hole for filling the electrode 604.
Further, the scan driver further includes a fixing portion 4 integrally formed with the first actuating portion 1.
Similarly, the integral molding refers to that an integral component composed of the fixing part 4, the first actuating part 1, the isolating part 2 and the second actuating part 3 is integrally manufactured and molded by adopting an integral molding process. For example, the fixing portion 4, the first actuating portion 1, the isolating portion 2, and the second actuating portion 3 each include a main body made of a piezoelectric ceramic powder material, an integral member including the fixing portion 4, the first actuating portion 1, the isolating portion 2, and the second actuating portion 3 is obtained by baking after piezoelectric ceramic powder is loaded into a die to be press-molded, then the first actuating portion 1 and the second actuating portion 3 are polarized as required, and driving electrodes are additionally provided in the first actuating portion 1 and the second actuating portion 3.
Furthermore, the film conductive layer 7 of the second actuating part 3 extending to the rear end of the first actuating part 1 continues to extend to the rear end of the fixing part 4 and is attached to the outer surface of the fixing part 4 in an insulating manner. The insulating coating means that the thin film conductive layers 7 are insulated from each other and the thin film conductive layers 7 are insulated from the conductors on the fixing portion 4.
Preferably, the fixing portion 4 includes a plurality of sequentially stacked third piezoelectric material pieces, each of the first piezoelectric material piece 602 and the second piezoelectric material piece 603 is connected to a corresponding third piezoelectric material piece, a conductive body for connecting each electrode 604 of the first actuating portion 1 is disposed between the outer surface of the fixing portion 4 and two adjacent third piezoelectric material pieces, the conductive body is preferably a thin film conductive layer 7 attached to the surface of the third piezoelectric material piece, one end of each thin film conductive layer 7 is correspondingly connected to one electrode 604 of the first actuating portion 1, and the other end extends to the rear end of the fixing portion 4. Preferably, the number of the third pieces of piezoelectric material is the same as the sum of the numbers of the first pieces of piezoelectric material 602 and the second pieces of piezoelectric material 603, and each third piece of piezoelectric material is connected to one first piece of piezoelectric material 602 or one second piece of piezoelectric material 603.
referring to fig. 1, the present class of embodiments differs from the class 1 embodiment in that the second actuation portion 3 in the present class of embodiments is a bimorph actuator. Further, as shown in fig. 6, the bimorph actuator includes a middle spacer 611, a piezoelectric material sheet 612 is attached to both sides of the middle spacer 611, and two surfaces of each piezoelectric material sheet 612, which are parallel to the middle spacer 611, are provided with an electrode layer 613.
Preferably, as shown in fig. 2 and 3, each electrode of the second actuator 3 is connected to a thin film conductive layer 7, each thin film conductive layer 7 is attached to the surface of the scan driver in an insulating manner and extends to the rear end of the first actuator 1, the attaching in the insulating manner means that each thin film conductive layer 7 is attached to the scan driver, the thin film conductive layers 7 are insulated from each other, each thin film conductive layer 7 is insulated from an electrode that is not related to each thin film conductive layer 7, and an electrode that is not related to each thin film conductive layer 7 is an electrode that is not connected to the thin film conductive layer 7.
More preferably, the rear end portions of the electrode layers 613 are electrically connected to a thin film conductive layer 7, respectively, and the thin film conductive layer 7 is attached to the outer surfaces of the spacer 2 and the first actuating portion 1 in an insulating manner and extends to the rear end of the first actuating portion 1. The insulating coating means that each thin film conducting layer 7 is coated on the scanner and insulated from other conducting parts on the scanning driver. Specifically, the thin film conductive layers 7 are insulated from each other, and the thin film conductive layers 7 are insulated from the electrodes or the thin film conductive layers 7 on the first actuating portion 1.
referring to fig. 1, the present embodiment is different from the embodiment of the type 1 in that the second actuating portion 3 in the present embodiment is a piezoelectric material tube actuator, as shown in fig. 7, the piezoelectric material tube actuator includes a piezoelectric material tube 621, an outer surface of the piezoelectric material tube 621 is provided with at least one pair of outer electrodes 622 symmetrical with respect to an axial center line of the piezoelectric material tube 621, and an inner surface of the piezoelectric material tube 621 is provided with an inner electrode 623 matching with the outer electrode 622. So that the actuator vibrates along its corresponding axis when the inner and outer electrodes 623, 622 are connected to an external driving device.
More preferably, each electrode layer of the second actuator 3 is electrically connected to a thin film conductive layer 7, and the thin film conductive layer 7 is attached to the outer surfaces of the second actuator 3, the spacer 2, and the first actuator 1 in an insulating manner and extends to the rear end of the first actuator 1. The insulating coating means that each thin film conducting layer 7 is coated on the scanner and insulated from other conducting parts on the scanning driver. Specifically, the thin film conductive layers 7 are insulated from each other, the thin film conductive layers 7 are insulated from other electrodes on the second actuator 3, and the thin film conductive layers 7 are insulated from the electrodes on the first actuator 1 or the thin film conductive layers 7.
referring to fig. 1, the present embodiment is different from embodiment 1 in that the second actuator portion 3 in the present embodiment is a multilayer tube nested piezoelectric material actuator, as shown in fig. 8-10, the multilayer tube nested piezoelectric material actuator includes at least two layers of piezoelectric material tubes 631, the piezoelectric material tubes 631 are sequentially and tightly nested in a radial direction, at least one pair of external electrodes 632 symmetric with respect to the axial center of the piezoelectric material tubes 631 is disposed outside each layer of piezoelectric material tubes 631, an internal electrode 633 matched with the external electrode 632 is disposed inside each layer of piezoelectric material tubes 631, as shown in fig. 7 and 8, a pair of external electrodes 632 symmetric with respect to the axial center of the piezoelectric material tubes 631 is disposed outside each layer of piezoelectric material tubes 631, as shown in fig. 10, two pairs of external electrodes 632 symmetric with respect to the axial center of the piezoelectric material tubes 631 are disposed outside each layer of piezoelectric material tubes 631, of course, the number of pairs of the outer electrodes can be selected according to actual working conditions. Preferably, the outer electrodes 632 of the piezoelectric material tubes 631 of the respective layers are distributed at positions corresponding to each other in the circumferential direction. That is, the outer electrodes 632 of the respective piezoelectric material tubes 631 having the same function are located at the same position in the circumferential direction and arranged in sequence in the radial direction, and the same function means that the outer electrodes 632 of the respective piezoelectric material tubes 631 having the same function drive the respective piezoelectric material tubes 631 to vibrate synchronously along the same axis. That is, after the inner electrodes 633 and the outer electrodes 632 of the respective layers of piezoelectric material tubes 631 are connected to an external driving device, the free ends of the respective layers of piezoelectric material tubes 631 are vibrated synchronously in the same direction at any time. More preferably, the number of pairs of the outer electrodes 632 of each of the piezoelectric material tubes 631 is the same and the distribution positions in the circumferential direction are the same.
Alternatively, as shown in fig. 8, an electrical isolation layer is provided between the inner electrode 633 of any one of the piezoelectric material tubes 631 located at the outer layer and the outer electrode 632 of the piezoelectric material tube 631 located at the inner side of the laminated piezoelectric material tube 631 and immediately adjacent to the laminated piezoelectric material tube 631. At this time, the internal electrodes 633 of each layer of the piezoelectric material tube 631 may be provided as a plurality of internal electrode 633 subsections corresponding to at least one external electrode 632, or may be electrode layers that are coated on the entire inner wall of the piezoelectric material tube 631. The inner electrode 633 segments may be insulated from each other or electrically connected to each other.
Alternatively, as shown in fig. 9, the inner electrode 633 of any one of the piezoelectric material tubes 631 located at the outer layer is the same as the outer electrode 632 of the piezoelectric material tube 631 located inside the laminated piezoelectric material tube 631 and immediately adjacent to the laminated piezoelectric material tube 631. At this time, each inner electrode 633 of each outer piezoelectric material tube 631 is an outer electrode 632 of the piezoelectric material tube 631 located inside and adjacent to the inner electrode. The inner electrodes 633 and the outer electrodes 632 of each piezoelectric material tube 631 are in a one-to-one correspondence relationship.
More preferably, each electrode layer of the second actuator 3 is electrically connected to a thin film conductive layer 7, and the thin film conductive layer 7 is attached to the outer surfaces of the second actuator 3, the spacer 2, and the first actuator 1 in an insulating manner and extends to the rear end of the first actuator 1. The insulating coating means that each thin film conducting layer 7 is coated on the scanner and insulated from other conducting parts on the scanning driver. Specifically, the thin film conductive layers 7 are insulated from each other, the thin film conductive layers 7 are insulated from other electrodes on the second actuator 3, and the thin film conductive layers 7 are insulated from the electrodes on the first actuator 1 or the thin film conductive layers 7.
referring to fig. 1, the present embodiment is different from the embodiment of class 1 in that the first actuating portion 1 in the present embodiment is a bimorph actuator, and as shown in fig. 6, the bimorph actuator includes a middle spacer 611, two sides of the middle spacer 611 are attached with a sheet of piezoelectric material 612, and two surfaces of each sheet of piezoelectric material 612 parallel to the middle spacer 611 are provided with an electrode layer 613.
Further, for the embodiment provided with the fixing portion 4, the fixing portion 4 includes at least two piezoelectric material sheets stacked, the piezoelectric material sheet 612 of each bimorph is respectively and correspondingly connected with one piezoelectric material sheet of the fixing portion 4, an electric conductor for connecting electrodes of the first actuating portion 1 is arranged between the outer surface of the fixing portion 4 and the piezoelectric material sheet of the fixing portion 4, preferably, the electric conductor is a thin film conductive layer attached to the surface of the piezoelectric material sheet of the fixing portion 4, one end of each thin film conductive layer is correspondingly connected with one electrode of the first actuating portion 1, and the other end extends to the rear end of the fixing portion 4.
Class 6 example:
referring to fig. 1, the present embodiment is different from the embodiment of the type 1 in that the first actuating portion 1 in the present embodiment is a piezoelectric material tube 621 actuator, the piezoelectric material tube 621 actuator includes a piezoelectric material tube 621, an outer surface of the piezoelectric material tube 621 is provided with at least one pair of outer electrodes 622 symmetrical with respect to an axial center line of the piezoelectric material tube 621, and an inner surface of the piezoelectric material tube 621 is provided with an inner electrode 623 matching with the outer electrodes 622. So that the actuator vibrates along its corresponding axis when the inner and outer electrodes 623, 622 are connected to an external driving device.
Further, for the embodiment provided with the fixing portion 4, the fixing portion 4 includes a piezoelectric material tube, the piezoelectric material tube of the fixing portion 4 is connected to the piezoelectric material tube 621 of the first actuating portion 1, the inner wall and the outer wall of the piezoelectric material tube of the fixing portion 4 are both provided with an electric conductor for connecting each electrode of the first actuating portion 1, preferably, the electric conductor is a thin film conductive layer that is attached to the inner wall and the outer wall of the piezoelectric material tube of the fixing portion 4 in an insulating manner, one end of each thin film conductive layer on the inner wall of the piezoelectric material tube of the fixing portion 4 is correspondingly connected to one inner electrode 623 of the first actuating portion 1, and the other end extends to the rear end of the fixing portion 4; one end of each thin film conducting layer 7 on the outer wall of the piezoelectric material tube of the fixing portion 4 is correspondingly connected with an external electrode 622 of the first actuating portion 1, and the other end extends to the rear end of the fixing portion 4.
referring to fig. 1, the present embodiment is different from the embodiment of type 1 in that the first actuator portion 1 in the present embodiment is a multilayer tube nested piezoelectric material actuator, the multilayer tube nested piezoelectric material actuator includes at least two layers of piezoelectric material tubes 631, the piezoelectric material tubes 631 are sequentially and tightly nested in a radial direction, at least one pair of outer electrodes 632 symmetrical with respect to an axis of the piezoelectric material tubes 631 is disposed outside each layer of piezoelectric material tubes 631, and an inner electrode 633 matched with the outer electrodes 632 is disposed inside each layer of piezoelectric material tubes 631. Preferably, the outer electrodes 632 of the piezoelectric material tubes 631 of the respective layers are distributed at positions corresponding to each other in the circumferential direction. That is, the outer electrodes 632 with the same function of each piezoelectric material tube 631 are located at the same position in the circumferential direction and are sequentially arranged in the radial direction, and the same function means that the outer electrodes 632 with the same function drive each piezoelectric material tube 631 to synchronously vibrate along the same axis. That is, after the inner electrodes 633 and the outer electrodes 632 of the respective layers of piezoelectric material tubes 631 are connected to an external driving device, the free ends of the respective layers of piezoelectric material tubes 631 are vibrated synchronously in the same direction at any time. More preferably, the pairs of the outer electrodes 632 of the respective layers of piezoelectric material tubes 631 are the same and the distribution positions in the circumferential direction are the same.
Alternatively, an electrical isolation layer is provided between the inner electrode 633 of any one of the piezoelectric material tubes 631 located at the outer layer and the outer electrode 632 of the piezoelectric material tube 631 located inside the laminated piezoelectric material tube 631 and immediately adjacent to the laminated piezoelectric material tube 631. In this case, the internal electrodes 633 of each piezoelectric material tube 631 may be provided as a plurality of internal electrode 633 subsections corresponding to at least one external electrode 632, or may be electrode layers that cover the entire inner wall of the piezoelectric material tube 631. The inner electrode 633 segments may be insulated from each other or electrically connected to each other.
Alternatively, the inner electrode 633 of any one of the piezoelectric material tubes 631 located at the outer layer is the same as the outer electrode 632 of the piezoelectric material tube 631 located inside the laminated piezoelectric material tube 631 and immediately adjacent to the laminated piezoelectric material tube 631. At this time, each inner electrode 633 of each outer piezoelectric material tube 631 is an outer electrode 632 of the piezoelectric material tube 631 located inside and adjacent to the inner electrode. The inner electrodes 633 and the outer electrodes 632 of each piezoelectric material tube 631 are in a one-to-one correspondence relationship.
Preferably, each electrode of the second actuator 3 is connected to a thin film conductive layer 7, each thin film conductive layer 7 is attached to the surface of the scan driver in an insulating manner and extends to the rear end of the first actuator 1, the insulating attachment means that each thin film conductive layer 7 is attached to the scan driver, the thin film conductive layers 7 are insulated from each other, each thin film conductive layer 7 is insulated from an electrode which is not related to the thin film conductive layer 7, and an electrode which is not related to each thin film conductive layer 7 is an electrode which is not connected to the thin film conductive layer 7. Each electrode of the first actuating part 1 extends to the rear end of the first actuating part 1.
Further, for the embodiment provided with the fixing portion 4, the fixing portion 4 includes a plurality of piezoelectric material tubes tightly sleeved in sequence along the radial direction, each piezoelectric material tube of each multilayer tube nested piezoelectric material actuator is respectively connected with one piezoelectric material tube of the corresponding fixing portion 4, the inner surface and the outer surface of each piezoelectric material tube of the fixing portion 4 are respectively provided with a conductive body for connecting each electrode of the first actuating portion 1, preferably, the conductive bodies are thin film conductive layers 7 attached to the inner surface and the outer surface of each piezoelectric material tube of the fixing portion 4, one end of each thin film conductive layer 7 is correspondingly connected with one electrode of the first actuating portion 1, and the other end extends to the rear end of the fixing portion 4.
It should be noted that the above-mentioned embodiments illustrate rather than limit the invention, and that those skilled in the art will be able to design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word "comprising" or "comprises" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The use of the words first, second, third, etc. do not denote any order, but rather the words are to be construed as names.
One or more technical solutions in the embodiments of the present invention have at least the following technical effects or advantages:
the integrated forming structure avoids a series of processes such as follow-up scanner assembling, aligning and debugging, reduces complexity and improves manufacturing efficiency, so that the difficulty in the manufacturing process can be greatly reduced and the reliability of the device can be improved by adopting the integrated forming structure, and meanwhile, the integrated forming structure can prevent disassembly and increase the overall reliability and durability. And the amplitude of the actuator can be increased by adopting a structure in which a plurality of pieces are stacked.
All features disclosed in this specification, except features that are mutually exclusive, may be combined in any way.
Any feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.
The invention is not limited to the foregoing embodiments. The invention extends to any novel feature or any novel combination of features disclosed in this specification and any novel method or process steps or any novel combination of features disclosed.
Claims (10)
1. A scanning driver is characterized by comprising a first actuating part, an isolating part and a second actuating part which are integrally formed and sequentially connected in the backward-forward direction, wherein the first actuating part vibrates in the direction of a first shaft, the second actuating part vibrates in the direction of a second shaft, the first shaft and the second shaft are both vertical to the forward-backward direction and are not parallel to each other, at least one of the first actuating part and the second actuating part is a sheet-shaped stacked piezoelectric material actuator,
the slice stacking piezoelectric material actuator comprises a middle spacer, wherein a plurality of first piezoelectric material slices parallel to the middle spacer are sequentially stacked on one side of the middle spacer, a plurality of second piezoelectric material slices parallel to the middle spacer are sequentially stacked on the other side of the middle spacer, each first piezoelectric material slice and each second piezoelectric material slice are respectively provided with two first surfaces parallel to the middle spacer, and a layer of electrode is uniformly distributed on the first surfaces of each first piezoelectric material slice and each second piezoelectric material slice.
2. The scan driver as claimed in claim 1, wherein when said first actuation portion is a sheet stacked piezoelectric material actuator, the second actuation portion is a bimorph actuator, a piezoelectric material tube actuator, a multilayer tube nested piezoelectric material actuator, or a sheet stacked piezoelectric material actuator, and when said second actuation portion is a sheet stacked piezoelectric material actuator, the first actuation portion is a bimorph actuator, a piezoelectric material tube actuator, a multilayer tube nested piezoelectric material actuator, or a sheet stacked piezoelectric material actuator.
3. A scan driver as claimed in claim 2, wherein the bimorph actuator comprises a central spacer, the central spacer being flanked by a sheet of piezoelectric material, two surfaces of each sheet of piezoelectric material parallel to the central spacer being provided with an electrode layer.
4. The scan driver as claimed in claim 2, wherein the piezoelectric tube actuator comprises a piezoelectric tube, an outer surface of the piezoelectric tube is provided with at least one pair of outer electrodes symmetrical with respect to an axial center of the piezoelectric tube, and an inner surface of the piezoelectric tube is provided with inner electrodes matching with the outer electrodes.
5. The scan driver as claimed in claim 2, wherein the multi-layered tube nested piezoelectric actuator comprises at least two layers of piezoelectric material tubes, the piezoelectric material tubes are closely nested in a radial direction, at least one pair of external electrodes symmetrical with respect to an axial center of the piezoelectric material tubes are disposed on an outer portion of each of the layers of piezoelectric material tubes, and internal electrodes matched with the external electrodes are disposed on an inner portion of each of the layers of piezoelectric material tubes.
6. The scan driver as claimed in any of claims 1 to 5, wherein each electrode of the second actuator portion is connected to a thin conductive layer, and each thin conductive layer is attached to the surface of the scan driver in an insulated manner and extends to the rear end of the first actuator portion.
7. The scan driver of any one of claims 1 to 6, further comprising a fixing portion integrally formed with the first actuating portion.
8. The scan driver as claimed in claim 7, wherein the thin film conductive layer of the second actuator portion extending to the rear end of the first actuator portion continues to the rear end of the fixed portion and is attached to the outer surface of the fixed portion in an insulating manner.
9. The scan driver as claimed in claim 7, wherein the fixed portion is provided with thin film conductive layers for connecting the electrodes of the first actuating portions, each of the thin film conductive layers having one end connected to a corresponding one of the electrodes of the first actuating portion and the other end extending to the rear end of the fixed portion.
10. An optical fiber scan drive comprising a scan drive according to any of claims 1 to 9 and an optical fiber, the optical fiber being fixedly connected to the scan drive and the leading end of the optical fiber extending beyond the scan drive to form a fiber suspension.
Priority Applications (1)
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| CN201810973625.4A CN110858029A (en) | 2018-08-24 | 2018-08-24 | Scanning driver and optical fiber scanner |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810973625.4A CN110858029A (en) | 2018-08-24 | 2018-08-24 | Scanning driver and optical fiber scanner |
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| CN110858029A true CN110858029A (en) | 2020-03-03 |
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| CN201810973625.4A Pending CN110858029A (en) | 2018-08-24 | 2018-08-24 | Scanning driver and optical fiber scanner |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113741027A (en) * | 2020-05-27 | 2021-12-03 | 成都理想境界科技有限公司 | Grating type scanning actuator and optical fiber scanner |
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