CN1256663A - Piezoelectric actuator, method of manufacture, and ink-jet print head - Google Patents

Piezoelectric actuator, method of manufacture, and ink-jet print head Download PDF

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Publication number
CN1256663A
CN1256663A CN99800148A CN99800148A CN1256663A CN 1256663 A CN1256663 A CN 1256663A CN 99800148 A CN99800148 A CN 99800148A CN 99800148 A CN99800148 A CN 99800148A CN 1256663 A CN1256663 A CN 1256663A
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China
Prior art keywords
electrode layer
piezo
activator
layer
pressure chamber
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Granted
Application number
CN99800148A
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Chinese (zh)
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CN1329196C (en
Inventor
谷川彻
德永洋
西正太
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Sony Corp
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Sony Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14209—Structure of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B41J2002/14225—Finger type piezoelectric element on only one side of the chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14258—Multi layer thin film type piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49004—Electrical device making including measuring or testing of device or component part
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

A piezoelectric actuator comprising a first sheet of a piezoelectric material and a second sheet of a predetermined material. An upper electrode layer of conductor is formed on one side of the first sheet, and a lower electrode layer of conductor is formed either on the other side of the first sheet or on one side of the second sheet. The first and second sheets are stacked with the lower electrode layer between and sintered. The upper electrode layer or the lower electrode layer is patterned to form a plurality of electrodes corresponding to individual pressure compartments of a pressure application structure.

Description

Piezo-activator and manufacture method thereof and ink jet-print head
Technical field
The present invention relates to piezo-activator and manufacture method thereof and ink jet-print head, be fit to be applied to the inkjet printing machine equipment.
Background technology
Up to now, in the inkjet printing machine equipment, printing ink sprays from the nozzle corresponding to tracer signal, can be recorded on the recording medium such as paper and film based on the character of described tracer signal and figure.
Figure 11 illustrates the example of the structure of already used traditional ink jet-print head 1 in the inkjet printing machine equipment.This ink jet-print head comprises channel plate 2, and one surface 2A is fixed on the nozzle plate 3, and another surperficial 2B is fixed on the piezo-activator 4.
In this case, the pressure chamber 2C that forms by a plurality of sunk parts with the interval set along arrow x 1Shown direction is arranged on the side 2A on a surface of channel plate 2.Can be provided to printing ink respectively these pressure chambers 2C from the ink cartridge (not shown) continuously by a public passage 2D.
In addition, in the edge of each pressure chamber 2C, form a path 2E, at direction (the arrow z of channel plate thickness 1Direction) plate 2 that expresses channel, form by the formed nozzle 3A of a plurality of through holes, to set at interval along arrow x 1The direction break-through correspond respectively to the nozzle plate 3 of each path 2E.
On the other hand, shown in Figure 11 and 12, piezo-activator 4 by a plurality of along arrow x 1Direction be arranged on the oscillating plate 5 that forms by flexible material a surface and form towards the piezoelectric element 6 of the pressure chamber 2C of channel plate 2 respectively through described oscillating plate 5, it is fixed on the described channel plate 2, and another surface attachment that makes oscillating plate 5 is on another surperficial 2B of channel plate 2.
At this moment, at piezoelectric element thickness direction (arrow z 1Direction) makes each piezoelectric element 6 polarization on.As shown in Figure 9, on surface of piezoelectric element 6 and another surface, form upper electrode 7A and lower electrode 7B respectively.Therefore,,, piezoelectric element 6 is gone up in direction (direction opposite with arrow z1) produced deflection, make the inboard displacement of oscillating plate 5 to corresponding pressure chamber 2C according to piezo-electric effect by between upper electrode 7A and lower electrode 7B, causing voltage difference.
Therefore, in such ink jet-print head 1, by between the upper electrode 7A of piezoelectric element 6 and lower electrode 7B, producing voltage difference and making the inboard displacement of oscillating plate 5 to corresponding pressure chamber 2C, in pressure chamber 2C, can produce pressure, the printing ink among the described pressure chamber 2C can outwards be sprayed from nozzle 3A through path 2E under this pressure corresponding to this deflection.
In ink jet-print head 1, for example, as disclosing among the Japanese patent gazette H6-320739, piezo-activator 4 utilizes adhesive that each piezoelectric element 6 is bonded on the oscillating plate 5 after oscillating plate 5 and piezoelectric element 6 form respectively and makes.
Yet,, be difficult to a plurality of tiny piezoelectric elements 6 critically are adhered on the fixed position of oscillating plate 5 according to traditional manufacture method.In this respect, if the bonded position deviation fixed position of piezoelectric element 6 so, can not produce the pressure based on the deflection of piezoelectric element 6 in corresponding pressure chamber 2C, so, print and become unstable.
In addition, it is big more that the size of electric field to be printed usually becomes, and the piezoelectric element bending is big more.Therefore, in order to adopt low voltage drive tradition ink jet-print head 1, each piezoelectric element 6 should form thin as far as possible, make that the distance between upper electrode 7A and the lower electrode 7B is short, meanwhile, form thin as far as possible oscillating plate 5, in fact, the thickness of traditional oscillating plate 5 and each piezoelectric element 6 is respectively less than 30 μ m.
Yet in order to shorten the natural vibration circulation and to improve corresponding speed, oscillating plate 5 is by making as its material such as glass with high Young's modulus and ceramic material.But, utilize glass or ceramic material to be difficult to make the thin slice of thickness less than 30 μ m.Up to now, oscillating plate 5 is by being that the glass plate of hundreds of micron or ceramic wafer grind below being thinned to 30 μ m and make to thickness always.
So, in traditional ink jet-print head 1, drawn problem high and time-consuming because of oscillating plate 5 manufacturing costs and that produce rate variance.In addition, obtain the piezoelectric element 6 of thickness, need to realize having more large-duty piezo-activator 4 always less than 30 μ m by grinding in the mode identical with oscillating plate 5.
In addition, in traditional ink jet-print head 1, because oscillating plate 5 and each piezoelectric element 6 of forming are extremely thin, these oscillating plates 5 and piezoelectric element 6 are impaired easily.As mentioned above, except productivity ratio is low, when making oscillating plate 5 and each piezoelectric element 6, also drawn the problem of storing aspect.
Brief summary of the invention
The present invention has considered the problems referred to above, proposes a kind of piezo-activator that can boost productivity significantly and manufacture method and ink jet-print head.
According to the present invention, for fear of these problems, the pressure chamber that we provide one deck to be arranged in each pressure chamber of covering forms a lip-deep vibration level of unit; Superimposed on this vibration level by the lower electrode layer that conductive material forms; By piezoelectric laminated being combined on this lower electrode layer that piezoelectric forms, its size covers a plurality of pressure chambers and polarizes on its thickness direction; On the superimposed piezoelectric layer in piezo-activator of upper electrode layer that forms by conductive material; It is to be formed by a plurality of electrodes that separate that upper electrode layer or lower electrode layer have one deck at least, forms each pressure chamber of unit and forms with respect to pressure chamber.
The result, because in this piezo-activator of piezoelectric layer, only be located immediately at upper electrode layer each electrode below part and/or be located immediately at the part of each electrode top of upper electrode layer can be crooked in response to the voltage that applies, these parts of upper electrode layer and shell of compression and the appropriate section of lower electrode layer and vibration level play an independent actuators respectively.
So, in this piezo-activator, do not need to form actuator by meticulous piezoelectric being attached to form on the vibration level of each pressure chamber of unit corresponding to pressure chamber, therefore can improve its production capacity significantly.
In addition, according to the present invention, we provide the piezo-activator manufacture method, first step is, forms first of the softness made by piezoelectric and the softness made by predetermined material second and form the lower electrode layer of being made by conductive material forming on first the surface on the upper electrode layer that formed by conductive material, another surface at first or on the surface at second; Second step is, first and second accumulation are got up and encrypts, and lower electrode layer is between the two; Third step is to make first to polarize on its thickness direction; The 4th step is upper electrode layer to be carried out pattern handle a plurality of electrodes that correspond respectively to each pressure chamber of pressure chamber formation unit with formation.
The result, in piezo-activator according to this piezo-activator manufacture method preparation, because first piezoelectric layer forms by first, since only be directly the part below each electrode of upper electrode layer and/or directly the partial response above each electrode at lower electrode layer in the voltage that applies and bending, so these parts of upper electrode layer and shell of compression and play independent actuators respectively by the appropriate section of second lower electrode layer that forms and vibration level.
Therefore, according to this piezo-activator manufacture method, needn't can improve the productivity ratio of piezo-activator thus significantly by forming actuator on the vibration level that meticulous piezoelectric element is pasted each pressure chamber that corresponds respectively to pressure chamber formation unit.
In addition.According to the present invention, in the piezo-activator manufacture method, first step is, forms multi-layer sheet, and wherein upper electrode layer is superimposed on a surface of piezoelectric layer, and vibration level is superimposed on another surface of piezoelectric layer, and lower electrode layer is between the two; Second step is to be built up the enhancement Layer with pre-sizing and shape perforate on a multiple-plate side surface or opposite side surface.
The result, according to this piezo-activator manufacture method, owing to can under the condition of multi-layer sheet being reinforced, store and transport multi-layer sheet by enhancement Layer, can prevent that also described multi-layer sheet is damaged and can improve yield rate even multi-layer sheet is extremely thin, can improve the productivity ratio of piezo-activator thus significantly.
In addition, according to the present invention, in ink jet-print head, the vibration level that piezo-activator is placed by each pressure chamber on the surface that forms the unit for the overburden pressure chamber, the lower electrode layer that is formed by superimposed conductive material on vibration level, its big I that is formed by piezoelectric cover a plurality of pressure chambers and superimposed on the lower electrode layer and the piezoelectric layer that polarizes and be made up of the superimposed upper electrode layer on piezoelectric layer that conductive material forms on its thickness direction.In upper electrode layer or the lower electrode layer at least one deck be formed with the electrode of a plurality of separation and correspond respectively to each pressure chamber that pressure chamber forms the unit.
The result, in this ink jet-print head of the piezoelectric layer of piezo-activator, owing to only be located immediately at the part of each electrode below of upper electrode layer and/or the partial response of each electrode top that is located immediately at lower electrode layer in the voltage that applies and bending, so the appropriate section of these parts of upper electrode layer and shell of compression and lower electrode layer and vibration level plays independent actuators respectively.
So, in this ink jet-print head, will meticulous piezoelectric element be attached to and correspond respectively on the vibration level of each pressure chamber that pressure chamber forms the unit and form piezo-activator, can improve the productivity ratio of ink jet-print head thus significantly.
The accompanying drawing summary
Fig. 1 is the block diagram that shows the structure of inkjet printing machine equipment of the present invention.
Fig. 2 is the part perspective view that shows the structure of ink jet-print head.
Fig. 3 is the sectional view that shows the structure of ink jet-print head.
Fig. 4 is the sectional view that shows the structure of piezo-activator.
Fig. 5 is the sectional view of manufacture process of the piezo-activator of explanation first embodiment of the invention.
Fig. 6 is the sectional view of manufacture process of the piezo-activator of explanation first embodiment of the invention.
Fig. 7 is the sectional view of manufacture process of the piezo-activator of explanation second embodiment of the invention.
Fig. 8 is the sectional view of manufacture process of the piezo-activator of explanation second embodiment of the invention.
Fig. 9 is the perspective view that shows the 3rd structure.
Figure 10 is the sectional view that shows according to the structure of the piezo-activator of another embodiment.
Figure 11 is the sectional view that shows the structure of traditional ink jet-print head.
Figure 12 is the sectional view that shows the structure of piezo-activator in traditional ink jet-print head.
Realize preferred mode of the present invention
To be described in detail with reference to the attached drawings the present invention.
(1) first embodiment
(1-1) according to the structure of the inkjet printing machine equipment of this embodiment of the present invention
In Fig. 1,10 represent generally according to inkjet printing machine equipment of the present invention.Pictorial data D1 to be supplied is input in the image processing unit 11.
Image processing unit 11 is sent to print head controller 13 with the print data D2 that produces after the signal that the control signal that provides based on system controller 12 is stipulated input image data D1 is handled (as the extension process of packed data).
The control signal S2 that print data D2 that print head controller 13 provides based on image processing unit 11 and system controller 12 provide forms the driving signal S3 that contains the zigzag driving pulse, and this signal is sent to ink jet-print head 14.Adopt this arrangement, print head controller 13 drives control ink jet-print head 14 by this driving signal S3, prints line by line by printing ink being sprayed to record-paper 15.
At this moment, system controller 12 is by print head position/walk paper controller 16 control paper advance mechanism (not shown)s, makes record-paper 15 delegation that goes ahead when the printing of finishing delegation each time.In addition, system controller 12 makes ink jet-print head 14 move on the desired position through print head position/walk paper controller 16 control printhead driving mechanism (not shown)s when needing.
In this respect, printing ink offers this ink jet-print head 14 from ink cartridge 17.
(1-2) structure of ink jet-print head 14
At this moment, shown in Fig. 2 and 3, ink jet-print head 14 comprises attached to the nozzle plate 21 on the channel plate 20 1 side surface 20A with attached to the piezo-activator 22 on the opposite side surface 20B of described channel plate 20.
In this case, the pressure chamber 20C that forms by a plurality of sunk parts with the interval set at arrow x 2Direction on be arranged on the opposite side surface 20B of channel plate 20.Printing ink can be provided to the pressure chamber 20C from described ink cartridge 17 (Fig. 1) by public passage 20D and the narrow printing ink input path 20E that is arranged in each pressure chamber 20C back side respectively.
In addition, at the front edge place of each pressure chamber 20C, by at its thickness direction (arrow z 2Direction) plate 20 of expressing channel forms path 20F, the nozzle 21A that is formed by a plurality of through holes forms by the nozzle plate 21 that corresponds respectively to path 20F with the break-through on the direction of arrow x of fixed knot distance.
On the other hand, as shown in Figure 4, the electrode layer 33 of the lower electrode layer 31 that piezo-activator 22 is first piezoelectric layers 30 of being formed by piezoelectric, formed by conductive material, second piezoelectric layer 32 that is formed by piezoelectric and the polarization usefulness that formed by conductive material constitutes, they are stacked gradually from the top, and upper electrode layer 34 is at arrow x 2Direction on form by the superimposed a plurality of upper electrode 34A on first piezoelectric layer 30 of each the pressure chamber 20C that separately forms towards channel plate 20.
In this case, first piezoelectric layer 30 is at its thickness direction (arrow z 2Direction) go up polarization.In addition, lower electrode 31 ground connection, the driving pulse that comprises in the driving signal S3 (Fig. 1) that provides from print head controller 13 (Fig. 1) will offer each upper electrode 34A respectively.
Therefore, in this ink jet-print head 14, when driving pulse offers corresponding upper electrode 34A, the part described in first piezoelectric layer 30 between upper electrode 34A and the lower electrode 31 by piezo-electric effect polarizable electrode layer 33 and second piezoelectric layer 32 on the direction of the relevant pressure chamber of channel plate 20 20C medial movement (with arrow z 2On the opposite direction) bending, in pressure chamber 20C, will produce pressure, therefore, the printing ink among the pressure chamber 20C can outwards spray from respective nozzles 21A (Fig. 2 and 3) through path 20F (Fig. 2 and 3).
(1-3) according to the process for making of the piezo-activator 22 of the embodiment of the invention
In fact, the piezo-activator 22 of ink jet-print head 14 can produce according to following technical process as illustrated in Figures 5 and 6.
At first, the piezoelectric of powdered is mixed mutually with adhesive, and the pasty state liquid of generation flows out with film shape, by making evaporate and drying, with two flexible sheets of the thickness of formation shown in Fig. 5 A, be called first and second 40 and 41 of semi-finished products less than 30 μ m.
Then, shown in Fig. 5 B, by utilizing printing process, electro-plating method, sputtering method or vacuum evaporation method respectively conductive material coating to be applied on first 40 the whole surface on a surface and on two surfaces of second 41, form thickness for example less than first to the 3rd conductive layer 42-44 of 2 μ m.
At this moment, if adopt the formation method of printing process, so, can use silver, silver-colored palladium, nickel or copper as conductive material as first to the 3rd conductive layer 42-44.In addition, in the situation of utilizing sputtering method or vacuum evaporation method, can adopt gold as conductive material.
Then, shown in Fig. 5 C, with be formed with on it first 40 of first conductive layer 42 and above it and below be formed with second 41 of the second and the 3rd conductive layer 43,44 and pile up, make another surface second conductive layer 43 surperficial and second 41 of the sheet 40 of winning face-to-face mutually, under this condition, by their pressurizations are made it closely knit, they are pressed into a slice.
Then, shown in Fig. 5 D, between the first and the 3rd conductive layer 42 and 44 of the multi-layer sheet 45 that the 3rd conductive layer 44, closely knit second 41, second conductive layer 43, closely knit first 40 and first conductive layer 42 are stacked gradually, apply the voltage of every millimeter (mm) thickness several kilovolts (kV), make first 40 at its thickness direction (arrow z 2Direction) go up polarization.
In this case, consideration is used in and applies voltage method between first and second conductive layer 42 and 43 as the method that makes first 40 polarization.Yet, according to the method, exist in the possibility that occurs deflection in the multi-layer sheet because of polarization causes when shrinking when first 40.Therefore, according to present embodiment, except the 3rd conductive layer 44 being provided below second 41, adopting piezoelectric to form second 41, between the first and the 3rd conductive layer 42 and 44, apply voltage and make first and second 40 and 41 the two all polarizes, can preventing the unnecessary bending of appearance in multi-layer sheet 36.
Then, as shown in Figure 6A,, form one deck photoresist layer 46 by on first conductive layer 42 of multi-layer sheet 45, adhering to photosensitive dry film or applying liquid photoresist.Then, by with predetermined pattern this photoresist layer 46 being exposed and developing, shown in Fig. 6 B, described photoresist layer 46 is formed and the identical electrode pattern of piezo-activator 22 (Fig. 2 and 3).
Then, shown in Fig. 6 C, adopt the photoresist layer of still staying on first conductive layer 42 46 (hereinafter referred to as residue photoresist layer 46A) as mask, utilize abrasive jet cleaning method or lithographic method to remove first conductive layer 42 of exposure, first conductive layer 42 is formed and the identical electrode pattern of required piezo-activator 22 (Fig. 2 and 3).
In addition, shown in Fig. 6 D, from multi-layer sheet 45, remove residue photoresist layer 46A, in addition, when needing according to cut this multi-layer sheet 45 corresponding to the size of required piezo-activator 22.
Therefore, can obtain to make closely knit first and second 40 and 41 to become first and second piezoelectric layers 30 and 32 and make first to the 3rd conductive layer 42-44 become the piezo-activator 22 of upper electrode layer 34, lower electrode layer 31 and polarizable electrode layer 33 respectively respectively.
The piezo-activator 22 that so forms is bonded on another surperficial 20C of channel plate 20, make each upper electrode 34A each pressure chamber 20C towards channel plate 20, and utilize this adhesive that the nozzle plate 21 that is formed with nozzle 21A on it is bonded on the surperficial 20A of channel plate 20, can obtain the ink jet-print head 14 shown in Fig. 2 and 3.
(1-4) operation of present embodiment and effect
According to said structure, after forming first to the 3rd conductive layer 42-44 on first and second 40 that form by piezoelectric and surface of 41 or two surfaces, with these first and second 40 and 41 closely knit be a slice, make first 40 polarization of the multi-layer sheet 45 of generation, make first conductive layer 42 form pattern by abrading method or lithographic method, make piezo-activator 22.
In the piezo-activator of so making 22, respectively, form figuratum first conductive layer 42 and play upper electrode, play piezoelectric layer for first 40, second conductive layer 43 plays lower floor's electrode, second 41 and the 3rd conductive layer 44 play oscillating plate, and in described piezoelectric layer, the part that only is clipped between each upper electrode (34A) and the lower electrode (31) plays piezoelectric element 6 (Figure 11) in traditional ink jet-print head 1 (Figure 11) respectively.
So, in ink jet-print head 14, do not need to determine that a plurality of tiny piezoelectric elements 6 adhere to their processing procedure in the position on the oscillating plate 5 with pinpoint accuracy and required polishing process in traditional ink jet-print head 1 (Figure 11), therefore, can make piezo-activator 22 simple and economically.
In addition, in this case, because the thickness of multi-layer sheet 45 can be the same thick with piezoelectric element 6 and the oscillating plate 5 (Figure 11) in being combined in traditional ink jet-print head 1 (Figure 11), therefore, described multi-layer sheet 45 is not easy impaired and can stores and transports easily.
According to said structure, because after forming first to the 3rd conductive layer 42-44 on first and second 40 and surface of 41 or two surfaces, with these first and second 40 and 41 closely knit be a slice, make first 40 polarization of the multi-layer sheet 45 of generation, utilize abrasive jet cleaning method or lithographic method on first conductive layer 42, to form conductive pattern simultaneously, make piezo-activator 22, upward make ink jet-print head 14 by another the surperficial 20C that it is attached to channel plate 20, therefore, the manufacture process of piezo-activator 22 and ink jet-print head 14 can be simplified, piezo-activator and the ink jet-print head that to boost productivity significantly can be realized.
(2) second embodiment
(2-1) according to the process for making of the piezo-activator 22 of second embodiment
With reference to the process for making of second embodiment of figure 7 and 8 explanations above-mentioned piezo-activator 22 as shown in Figure 4,, in following paragraph, adopt identical label to represent each several part here corresponding to Fig. 5 and 6.
At first, shown in Fig. 7 A, adopt with the first embodiment situation in identical mode form thickness less than first and second 40 of the flexibilities that is called semi-finished products of 30 μ m and 41.
In addition, adopt such as materials such as potteries and form by semi-finished products formed the 3rd 50.In this case, play enhancement Layer for making this 3rd 50 in piezo-activator 22 manufacture processes, therefore, the 3rd 50 to the first and second 40 and 41 of formation are thicker.
Then, shown in Fig. 7 B, utilize printing process, electro-plating method, sputtering method or method of evaporating,, form thickness for example less than first to the 3rd conductive layer 42-44 of 2 μ m by coated with conductive material on two surfaces of surface of first 40 and second 41.
In addition, as shown in Figure 9, corresponding to forming the identical one or more perforate 50A of size and dimension and piezo-activator to be made 22 on the 3rd 50 of described the 3rd 50 sizes.
Then, shown in Fig. 7 C, first to the 3rd 40,41 and 50 is piled up, make conductive layer 44, second slice 41, second conductive layer 43, first 40, first conductive layer 42 and the 3rd 50 locate successively from the bottom, under this condition, become a slice to first to the 3rd 40,41 with 50 densification.
Then, shown in Fig. 7 D, between the first and the 3rd conductive layer 42 and 44 of multi-layer sheet 51, apply the voltage of every millimeter (mm) thickness several kilovolts (kV), stack gradually the 3rd conductive layer 44, closely knit second 41, second conductive layer 43 on the multi-layer sheet 51, closely knit first 40 and 42, the first 40 of first conductive layers polarize on its thickness direction.
In addition, shown in Fig. 8 A, utilization such as technology such as photoetching are handled each part of first conductive layer 42 that exposes respectively from each perforate 50A of the 3rd 50, form the identical pattern of electrode pattern with the upper electrode 34 (Fig. 4) of piezo-activator 22 (Fig. 4).
In addition, each available part of the multi-layer sheet 51 that exposes respectively from each perforate 50A of the 3rd 50 will be separated.Therefore, can obtain the piezo-activator 22 that the available part A dv by multi-layer sheet 51 forms, multi-layer sheet 51 comprises closely knit first and second 40 and 41, they are respectively as first and second piezoelectric layers 30 and 32 (Fig. 4), and first to the 3rd conductive layer 42-44, they are respectively as upper electrode layer 34, lower electrode layer 31 and polarizable electrode layer 33 (Fig. 4).
In this respect, will be attached on another surperficial 20B of channel plate 20 after the piezo-activator 22 that so obtains.Yet shown in Fig. 8 A, this process can be carried out under the 3rd 50 condition of reinforcing that employing is formed by enhancement Layer.
More particularly, as above described with reference to figure 8A, shown in Fig. 8 B, after on each part that pattern is applied to first conductive layer 42 that exposes respectively from each perforate 50A of the 3rd 50, under the condition shown in Fig. 8 B, from its opposite side surface 20B channel plate 20 is attached on the 3rd conductive layer 44 of each available part A dv of multi-layer sheet 51.
In fact, by a plurality of channel plates 20 of each the perforate 50A that corresponds respectively to the 3rd 50 to be installed with the same alignment so of each perforate 50A, after adhesive being applied on another surperficial 20B of each channel plate 20, determine the position of described multi-layer sheet 51, can once all finish such operation, so that face-to-face mutually, and it is close on each channel plate 20 by another surperficial 20B of each available part A dv of the 3rd 50 multi-layer sheet of reinforcing 51 and each channel plate 20.
In addition, shown in Fig. 8 C, each available part A dv of instrument cutting multi-layer sheet 51 such as wafer dicing saw for example will be utilized.Under the condition of reinforcing by the 3rd 50, be respectively fixed on the channel plate 20 by each available part A dv the multi-layer sheet 51 of piezo-activator 22, piezo-activator 22 is not is not stored and transported under condition thin and that can disconnect, therefore, can improve the yield rate of piezo-activator 22.
(2-2) operation of present embodiment and effect
According to said structure, first and second conductive layers 42 and 44 are formed on the surface of first and second 40 of being formed by semi-finished products and 41, semi-finished products utilizes piezoelectric to form, with these first and second 40 and 41 closely knit be a slice after, make first 40 polarization, handle by first conductive layer 42 being carried out pattern, make piezo-activator 22.
In addition, because formed by ceramic material the 3rd 50 will closely knitly become a slice with 41 with first and second 40 in the sequence of operations process, perforate 50A on the 3rd 50 has size and the shape identical with required piezo-activator 22, can reinforce multi-layer sheet 51 for closely knit the 3rd 50, it becomes the source of piezo-activator 22 as enhancement Layer.
Therefore,, can store and transport piezo-activator 22 (multi-layer sheet 51) easily, can make piezo-activator (multi-layer sheet 51) be not easy breakage according to the manufacture method of this piezo-activator 22.Can improve the yield rate when making piezo-activator 22.
According to said structure, because after on first and second 40 that utilize that piezoelectric forms by semi-finished products and a surface of 41, forming first and second conductive layers 42 and 43 respectively, with these first and second 40 and 41 closely knit for a slice with the 3rd 50 that forms by the ceramic material semi-finished products, make first 40 polarization of the multi-layer sheet 51 of acquisition like this, first conductive layer 42 is carried out pattern to be handled, make piezo-activator 22, by multi-layer sheet 51 is reinforced, make it become the source of piezo-activator 22, thereby can prevent the breakage of piezo-activator 22 (multi-layer sheet 51) during fabrication, and can improve yield rate.Therefore, can improve the productivity ratio of piezo-activator 22 significantly.
(3) other embodiment
Above-described embodiment relates to handle is applied to ink jet-print head 14 and manufacture method thereof according to piezo-activator of the present invention and manufacture method thereof situation.Yet the present invention is not limited thereto, but be fit to be applied to ink jet-print head 14 other piezo-activator and manufacture method thereof in addition.
In addition, the above embodiments relate to and the upper electrode layer 34 corresponding to the piezo-activator 22 of each pressure chamber 20C of channel plate 20 is carried out pattern handle so that form the situation of a plurality of top electrode 34A.Yet the present invention is not limited thereto, but can also the two carries out pattern and handles to lower electrode layer 31 or to lower electrode layer 31 and upper electrode layer 34.For example, in the situation of lower electrode layer 31 being carried out the pattern processing, when carrying out, can form second conductive layer 43 that has this pattern in advance as the described processing of Fig. 5 B.
In addition, the above embodiments relate to and will be pressed into a slice as second piezoelectric layer 32 of oscillating plate and polarizing electrode 33 and first piezoelectric layer 30, upper electrode layer 34 and lower electrode layer 31.Yet, the present invention is not limited thereto, but can also be after forming existing pattern or not having the upper electrode layer 34 and lower electrode layer 31 of pattern, by utilizing adhesive that they are bonded on the oscillating plate that is formed by predetermined material, on a surface of first piezoelectric layer 30 and another surface, form piezo-activator.
In addition, the above embodiments relate to structure and resemble channel plate 20 and the jet board of ink 21 that pressure chamber forms the unit, are shown in the situation that the pressure chamber that is made of a plurality of sunk parts is set on the surface as Fig. 2 and 3.Yet the present invention is not limited thereto, but can also adopt various structures widely.
In addition, the above embodiments relate to the situation of only first conductor layer 42 of multi-layer sheet 45 being carried out the pattern processing.Yet, the present invention is not limited to this, but as shown in figure 10 when first conductor layer 42 to multi-layer sheet 45 carries out the pattern processing, can utilize abrasive cleaning to carry out pattern and handle, keep with first conductor layer 42 or allow space between each top electrode 34A at least so that only be located immediately at part under each top electrode 34A of first 40 (being equivalent to first piezoelectric layer 30).
Adopt this arrangement, can make the part that plays the independent actuators effect under each the top electrode 34A that is located immediately at piezo-activator 22 respectively not be subject to the influence of adjacent actuators.In addition, adopt this arrangement, can control the treating capacity of utilizing the sand blasting method of cleaning more roughly.
In addition, the above embodiments relate to utilizes piezoelectric to form second 41 situation, and second is the source of second piezoelectric layer 32, and its effect is as vibration level.Yet, the invention is not restricted to this, but can also adopt other various materials widely.
In addition, the above embodiments relate to second piezoelectric layer 32 and polarizable electrode layer 33 formation vibration levels, produce the situation of pressure in each pressure chamber 20C of channel plate 20.Yet, the invention is not restricted to this, but can also adopt the structure of other various structures widely as vibration level.
In addition, the above embodiments relate to five layers, and promptly upper electrode layer 34, first piezoelectric layer 30, lower electrode layer 31, second piezoelectric layer 32 and polarizable electrode layer 33 form the situation of piezo-activator 22.Yet, the invention is not restricted to this, omit the piezo-activator that polarizable electrode layer adopts four-layer structure but can form.
In this case, in definite position and this piezo-activator is attached on another surperficial 20B of channel plate 20, after applying voltage between each top electrode 34A and the lower electrode layer 31, can only between each top electrode 34A and lower electrode layer 31, produce polarization.In this case, although, can carry out initialization to this,, can prevent when piezo-activator being attached on the channel plate 20 owing to the crooked inconvenience that occurs in piezo-activator because of deflection appears in the polarization processing in piezo-activator for this reason.
In addition, can adopt four layers, construct piezo-activator 22 as upper electrode layer 34, first piezoelectric layer 30, lower electrode layer 31 with by the vibration level that the predetermined material beyond the piezoelectric forms.Yet, in this case,, need to adopt to have the material of the ceramic material of high Young's modulus as vibration level such as zirconia and aluminium oxide etc. owing to must increase vibration frequency.
In addition, can adopt three layers, promptly upper electrode layer 34, first piezoelectric layer 30 and lower electrode layer 31 form piezo-activator.In this case, if form thickness be the many lower electrode layers 31 of upper electrode layer 34 twices and in the part on the face side of channel plate 20 as vibration level.In this case, can adopt such as nickel etc. and have the metal of high Young's modulus and good China ink resistance and conductivity ceramics material as lower electrode layer 31.
In addition, the foregoing description in Fig. 5,6,7 and 8 relates to the situation of utilizing semi-finished products to prepare piezo-activator 22.Yet, the invention is not restricted to this, prepare piezo-activator 22 but also can utilize by stacking gradually conductive material and piezoelectric such as sputtering method, print process and galvanoplastic.In a word, if piezo-activator 22 is to utilize can directly to stack gradually upper electrode layer, first piezoelectric layer, lower electrode layer and vibration level and without the multi-layer sheet manufacture method manufacturing of adhesive, can adopt the manufacture method of other various multi-layer sheet manufacture methods as piezo-activator 22 widely.
In addition, the above embodiments relate to the situation of ceramic material as the 3rd 50 material that adopt.Yet, the invention is not restricted to this, but can also adopt other various materials as the 3rd 50 material, as long as have high intensity through closely knit the 3rd 50, what can prevent that bending causes when storing multi-layer sheet 51 is unexpected damaged.
In addition, the above embodiments relate on first conductive layer 42 that the side surface by multi-layer sheet 51 forms stacked and form the 3rd 50 situation with multi-layer sheet 51.Yet, the invention is not restricted to this, but also can be on the 3rd conductor layer 44 that form pile up and form (promptly can pile up also closely knit from bottom by the order of the 3rd the 50, the 3rd conductor layer 44, second slice 41, second conductor layer 43, first 40 and first conductor layer 42) with described multi-layer sheet 51 first to the 3rd 40,41 and 50 with the 3rd 50 by the opposite side of multi-layer sheet 51 surface.
In addition, the above embodiments relate to the situation that perforate 50A is set in the 3rd 50, as shown in Figure 9.Yet, the invention is not restricted to this, but can adopt the shape of other different shape as perforate 50A.
Industrial applicibility
The present invention can be used in the inkjet printing machine equipment.

Claims (21)

1. a piezo-activator that produces pressure in each pressure chamber of pressure chamber formation unit forms in the unit at pressure chamber, and the pressure chamber that is formed by a plurality of sunk parts is set on a surface, and described piezo-activator comprises:
Be arranged in the vibration level of described lip-deep each described pressure chamber of covering of described pressure chamber formation unit;
Be layered in the lower electrode layer that forms by conductive material on the described vibration level;
Be layered in first piezoelectric layer that the piezoelectric by in its thickness direction polarization on the described lower electrode layer forms, its big I covers a plurality of described pressure chambers;
Be layered in the upper electrode layer that forms by conductive material on described first piezoelectric layer; It is characterized in that:
The a plurality of electrodes that have at least one deck separately to be formed by each the described pressure chamber that forms the unit with respect to pressure chamber in described upper electrode layer or the described lower electrode layer form.
2. piezo-activator as claimed in claim 1 is characterized in that:
Described vibration level, described lower electrode layer, described first piezoelectric layer and described upper electrode layer are to utilize predetermined multi-layer sheet manufacture method stacked formation in turn.
3. piezo-activator as claimed in claim 1 is characterized in that:
A stacked side surface that is formed with described upper electrode layer corresponds respectively to each described electrode of upper electrode layer and/or lower electrode layer and separates on its of first piezoelectric layer.
4. piezo-activator as claimed in claim 1 is characterized in that:
Described vibration level comprises:
Be layered in described lower electrode layer below by formed second piezoelectric layer of piezoelectric.
5. piezo-activator as claimed in claim 4 is characterized in that:
Described vibration level comprises:
Be layered in second piezoelectric layer below by the formed electrode layer of conductive material.
6. piezo-activator as claimed in claim 1 is characterized in that:
Described vibration level comprises:
Be layered in described lower electrode layer below by the formed ceramic layer of ceramic material.
7. piezo-activator as claimed in claim 1 is characterized in that:
Described vibration level is made up of the part of described lower electrode layer.
8. a piezo-activator manufacture method that produces pressure in each pressure chamber of pressure chamber formation unit forms on the unit at pressure chamber, and the pressure chamber that is formed by a plurality of sunk parts is set on a surface, and described method comprises:
First step, first of forming by the piezoelectric of softness of formation and second of forming by the predetermined material of softness, on described first surface, form the upper electrode layer that forms by conductive material, and on another described first surperficial or described second surface, form the lower electrode layer that forms by conductive material;
Second step has described first and second accumulations of described lower electrode layer to get up closely knit the centre;
Third step makes described first to polarize on its thickness direction; And
The 4th step is carried out pattern to described upper electrode layer and is handled, and corresponds respectively to a plurality of electrodes that described pressure chamber forms each described pressure chamber of unit thereby form.
9. piezo-activator manufacture method as claimed in claim 8 is characterized in that:
In second step,
Be deposited on described first side surface the 3rd of softness who wherein is provided with perforate or second opposite side surface with pre-sizing and shape, with described the 3rd with described first and second closely knit.
10. piezo-activator manufacture method as claimed in claim 8 is characterized in that:
In described the 4th step,
Described first side surface is carried out pattern with described upper electrode layer handle, form each described pressure chamber of unit and separate so that make it correspond respectively to described pressure chamber.
11. piezo-activator manufacture method as claimed in claim 8 is characterized in that:
In described first step,
Adopt piezoelectric as second described material, the polarizable electrode layer that is formed by conductive material is formed on the described second opposite side surface; And
In described third step,
By between described upper electrode layer and described polarizable electrode layer, applying voltage, make described first in the polarization of its thickness direction.
12. piezo-activator manufacture method as claimed in claim 8 is characterized in that:
In described first step,
With the described material of ceramic material as second.
13. piezo-activator manufacture method as claimed in claim 8 is characterized in that:
In described first step,
Form the described lower electrode layer of thickness greater than described upper electrode layer; And
The effect of vibrating device will be played in the opposite side surface of described lower electrode layer, to produce described pressure to spraying described printing ink in the described pressure chamber.
14. a piezo-activator manufacture method is characterized in that described method comprises:
First step, form multi-layer sheet, on it upper electrode layer that is formed by conductive material is layered on the surface of the piezoelectric layer that is formed by piezoelectric, and be layered in the vibration level that forms by prescribed material on another surface of described piezoelectric layer by the lower electrode layer that forms by conductive material, and it is stacked and form the enhancement Layer with prescribed strength, the wherein perforate that on a described multiple-plate side surface or opposite side surface, has prescribed level and shape with described multi-layer sheet setting;
Second step is implemented predetermined process to described multi-layer sheet; And
Third step makes described multiple-plate part of using of exposing from the described perforate of described enhancement Layer be separated with described multiple-plate other parts.
15. an ink jet-print head, described ink jet-print head comprises:
Pressure chamber forms the unit, and the pressure chamber of wherein storing printing ink is by forming at lip-deep a plurality of sunk parts; With
Be arranged in the piezo-activator that described pressure chamber forms on the surface of unit and produce pressure selectively in each described pressure chamber;
Described piezo-activator comprises:
Be arranged in the vibration level of lip-deep each described pressure chamber of covering of described pressure chamber formation unit;
Be layered in the lower electrode layer that forms by conductive material on the described vibration level;
Be layered in first piezoelectric layer on the described lower electrode layer by what piezoelectric formed; Piezoelectric polarizes on its thickness direction, and its big I covers a plurality of described pressure chambers; With
The upper electrode layer that forms by the conductive material that is layered on described first piezoelectric layer; It is characterized in that:
In described upper electrode layer or the described lower electrode layer at least one deck form by a plurality of electrodes, described electrode be separately and form corresponding to pressure chamber forms each described pressure chamber of unit.
16. ink jet-print head as claimed in claim 15 is characterized in that:
The described upper electrode layer of described vibration level, described lower electrode layer, described first piezoelectric layer and described piezo-activator is the multilayer manufacture method direct stacked formation successively that utilizes regulation.
17. ink jet-print head as claimed in claim 15 is characterized in that:
A side surface that is laminated with described upper electrode layer of described first piezoelectric layer be corresponding to described upper electrode layer and/each described electrode of described lower electrode layer separates.
18. ink jet-print head as claimed in claim 15 is characterized in that:
The described vibration level of piezo-activator comprises:
Be layered in second piezoelectric layer that forms by piezoelectric under the described lower electrode layer.
19. ink jet-print head as claimed in claim 15 is characterized in that:
The described vibration level of piezo-activator comprises:
Be layered in the electrode layer that forms by conductive material under second piezoelectric layer.
20. ink jet-print head as claimed in claim 15 is characterized in that:
The described vibration level of piezo-activator comprises:
Be layered in the ceramic layer that forms by ceramic material under the described lower electrode layer.
21. ink jet-print head as claimed in claim 15 is characterized in that:
The described vibration level of piezo-activator is made up of the described lower electrode layer of a part.
CNB998001481A 1998-02-18 1999-02-18 Piezoelectric actuator, method of manufacture, and ink-jet print head Expired - Fee Related CN1329196C (en)

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US20030126027A1 (en) * 2001-12-31 2003-07-03 Kimberly-Clark Worldwide Integrated web ring site and method for presenting information
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US7141915B2 (en) * 2003-07-22 2006-11-28 Ngk Insulators, Ltd. Actuator device
DE602004031427D1 (en) * 2003-07-22 2011-03-31 Ngk Insulators Ltd MEMBER ELEMENT AND DEVICE WITH CONTROLLER ELEMENT
JP4525094B2 (en) * 2004-01-30 2010-08-18 ブラザー工業株式会社 Inkjet head manufacturing method
JP5194333B2 (en) * 2005-02-24 2013-05-08 Ｔｄｋ株式会社 Piezoelectric element and piezoelectric device
JP4543847B2 (en) * 2004-09-14 2010-09-15 ブラザー工業株式会社 Line-type inkjet printer
JP5089860B2 (en) * 2004-12-03 2012-12-05 富士フイルム株式会社 Piezoelectric actuator and liquid discharge head
JP2006341509A (en) * 2005-06-09 2006-12-21 Brother Ind Ltd Inkjet head
US8113635B2 (en) 2007-01-16 2012-02-14 Brother Kogyo Kabushiki Kaisha Liquid discharge apparatus and check method of the same
US20080259134A1 (en) * 2007-04-20 2008-10-23 Hewlett-Packard Development Company Lp Print head laminate
US20090199392A1 (en) * 2008-02-11 2009-08-13 General Electric Company Ultrasound transducer probes and system and method of manufacture
JP5639738B2 (en) * 2008-02-14 2014-12-10 日本碍子株式会社 Method for manufacturing piezoelectric / electrostrictive element
US8197031B2 (en) * 2009-05-22 2012-06-12 Xerox Corporation Fluid dispensing subassembly with polymer layer
JP6098803B2 (en) * 2013-03-26 2017-03-22 セイコーエプソン株式会社 Method for manufacturing liquid jet head
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US11247459B2 (en) * 2019-07-22 2022-02-15 Canon Kabushiki Kaisha Liquid charging apparatus, liquid charging method, and manufacturing method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6048115B2 (en) * 1980-09-30 1985-10-25 松下電器産業株式会社 Method of manufacturing piezoelectric ceramic substrate
JPS63128948A (en) * 1986-11-19 1988-06-01 Sharp Corp Ink jet head
JPH0236578A (en) * 1988-07-26 1990-02-06 Mitsubishi Kasei Corp Laminated type piezoelectric element
JPH02251457A (en) * 1989-03-27 1990-10-09 Seiko Epson Corp Liquid jet head and manufacture thereof
JPH0577416A (en) * 1991-09-20 1993-03-30 Seikosha Co Ltd Ink jet head
JP3175269B2 (en) * 1992-03-18 2001-06-11 セイコーエプソン株式会社 Inkjet print head
JPH08252920A (en) * 1995-03-16 1996-10-01 Brother Ind Ltd Production of laminated type piezoelectric element
EP0800920B1 (en) * 1996-04-10 2002-02-06 Seiko Epson Corporation Ink jet recording head
JP3290897B2 (en) * 1996-08-19 2002-06-10 ブラザー工業株式会社 Inkjet head
WO1999042292A1 (en) * 1998-02-18 1999-08-26 Sony Corporation Piezoelectric actuator, method of manufacture, and ink-jet print head

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1732576B (en) * 2002-12-23 2012-05-09 罗伯特·博世有限公司 Piezoelectric actuator
CN100361817C (en) * 2003-06-30 2008-01-16 兄弟工业株式会社 Inkjet printing head
CN1660691B (en) * 2004-02-25 2010-05-26 索尼株式会社 Fluid actuating apparatus and method for manufacturing a fluid actuating apparatus, and electrostatically-actuated fluid discharge apparatus and process for producing an electrostatically-actuated flu
CN102398421A (en) * 2010-09-09 2012-04-04 研能科技股份有限公司 Piezoelectric actuator module and manufacturing method of piezoelectric inkjet head applicable to piezoelectric actuator module
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US9266326B2 (en) 2012-07-25 2016-02-23 Hewlett-Packard Development Company, L.P. Piezoelectric actuator and method of making a piezoelectric actuator
CN104245324A (en) * 2012-07-25 2014-12-24 惠普发展公司，有限责任合伙企业 Piezoelectric actuator and method of making a piezoelectric actuator
CN110858029A (en) * 2018-08-24 2020-03-03 成都理想境界科技有限公司 Scanning driver and optical fiber scanner
CN111405455A (en) * 2019-01-02 2020-07-10 京东方科技集团股份有限公司 Sound production device, manufacturing method thereof and display device
US11134334B2 (en) 2019-01-02 2021-09-28 Boe Technology Group Co., Ltd. Sounding device, manufacturing method thereof and display device
CN111405455B (en) * 2019-01-02 2022-06-07 京东方科技集团股份有限公司 Sound production device, manufacturing method thereof and display device
CN111510093A (en) * 2020-04-27 2020-08-07 济南晶正电子科技有限公司 Piezoelectric film body for manufacturing bulk acoustic wave device and preparation method thereof
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CN112590396A (en) * 2020-12-11 2021-04-02 京东方科技集团股份有限公司 Ink jet module and ink jet printing equipment
US11584131B2 (en) 2020-12-11 2023-02-21 Boe Technology Group Co., Ltd. Inkjet assembly, inkjet printing apparatus and inkjet printing method for use in preparation of display component

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US7100254B2 (en) 2006-09-05
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