CN207619519U - A kind of auxiliary gas air supply system for sputter coating - Google Patents
A kind of auxiliary gas air supply system for sputter coating Download PDFInfo
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- CN207619519U CN207619519U CN201721723909.5U CN201721723909U CN207619519U CN 207619519 U CN207619519 U CN 207619519U CN 201721723909 U CN201721723909 U CN 201721723909U CN 207619519 U CN207619519 U CN 207619519U
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- CN
- China
- Prior art keywords
- air supply
- branched pipe
- gas
- pipeline
- pipe
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- 238000004544 sputter deposition Methods 0.000 title claims abstract description 25
- 239000007789 gas Substances 0.000 claims abstract description 44
- 238000009826 distribution Methods 0.000 claims abstract description 39
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 20
- 230000011218 segmentation Effects 0.000 claims abstract description 14
- 229910052786 argon Inorganic materials 0.000 claims abstract description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 10
- 239000001301 oxygen Substances 0.000 claims abstract description 10
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 10
- 239000011521 glass Substances 0.000 abstract description 17
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 13
- 229910052709 silver Inorganic materials 0.000 abstract description 13
- 239000004332 silver Substances 0.000 abstract description 13
- 239000011248 coating agent Substances 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Abstract
A kind of auxiliary gas air supply system for sputter coating, including supply station, supply air line and gas distribution module, supply air line includes main line and branch line, main line includes the oxygen pipeline being connect with supply station, nitrogen pipeline and argon gas pipeline, every main line is respectively connected with five branched pipes, the branched pipe of oxygen pipeline, it is connected by four-way pipe between the branched pipe of nitrogen pipeline and the branched pipe of argon gas pipeline, it is respectively connected with the distribution circuit being connect with gas distribution module on each four-way pipe, gas distribution module includes five segmentation air supply units, air supply unit is segmented to be arranged in sputtering chamber, and it is arranged along sputtering chamber length direction, it is supplied for sputtering chamber by segmentation air supply unit, each segmentation air supply unit is connected to a distribution circuit, every branched pipe is equipped with valve.The utility model may be implemented in different parts in sputtering chamber and be passed through different types of auxiliary gas, and control the dosage of auxiliary gas, improve the uniformity of double silver-colored glass and three silver medal glass film layers.
Description
Technical field
The utility model is related to coated glass production technical field, specifically a kind of auxiliary gas for sputter coating
Body air supply system.
Background technology
Magnetron sputtering technique is applied large-area glass plated film field, large-area coating film glass to be mainly used in building curtain
Wall, therefore, the appearance color uniformity of coated glass become an important performance indexes of coated glass finished product.With plated film skill
Requirement of the continuous improvement and market of art to coated glass performance is continuously improved, and the market of double silver and three silver coating glass needs
It asks and increasingly increases.But compared with single silver coating glass, the film layer structure of double silver and three silver coating glass is increasingly complex, product
The adjusting of color homogeneity is with control as a technical barrier of production.
Invention content
The color homogeneity item adjusting of double silver and three silver coating glass products and control difficulty in for the above-mentioned prior art
Big problem, the utility model provide a kind of auxiliary gas air supply system for sputter coating, by assisting gas gas supply system
The improvement of system realizes that different parts are passed through different types of auxiliary gas in sputtering chamber, and controls the dosage of auxiliary gas, changes
The uniformity of kind double silver-colored glass and three silver medal glass film layers.
In order to solve the above technical problems, the technical solution adopted in the utility model is：
A kind of auxiliary gas air supply system for sputter coating, including supply station, supply air line and gas distribution module,
The supply air line includes main line and branch line, and main line includes the oxygen pipeline being connect with supply station, nitrogen pipeline
With argon gas pipeline, every main line is respectively connected with five branched pipes, the branched pipe of oxygen pipeline, the branched pipe of nitrogen pipeline and
It is connected by four-way pipe between the branched pipe of argon gas pipeline, point being connect with gas distribution module is respectively connected on each four-way pipe
With pipeline, gas distribution module includes five segmentation air supply units, and segmentation air supply unit is arranged in sputtering chamber, and along sputtering chamber
Length direction is arranged, is supplied for sputtering chamber by segmentation air supply unit, and each air supply unit that is segmented is connected to a distribution circuit, often
Branched pipe is equipped with valve, with the opening and closing of branched pipe and gas flow where control.
The valve is solenoid electric valve.
The segmentation air supply unit is equipped with multiple ventholes.
Compared with prior art, the utility model has the beneficial effects that：
In the utility model, each segmentation air supply unit can select different types of auxiliary gas, sputter in this way
Interior can adjust the type of different location auxiliary gas and the flow of each auxiliary gas as needed, it is ensured that Ge Gewei
It is almost the same to set deposition efficiency, film forming thickness is almost the same, even film layer, the uniformity control for double silver and three silver coating glass
It makes highly beneficial.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the distribution schematic diagram of each branched pipe；
It is marked in figure：1, supply station, 2, oxygen pipeline, 3, nitrogen pipeline, 4, argon gas pipeline, the 5, first air supply unit, 6,
Second air supply unit, 7, third air supply unit, the 8, the 4th air supply unit, the 9, the 5th air supply unit, 10, four-way pipe, 11, electromagnetism control
Valve processed, 12, branched pipe, the 13, first distribution circuit, the 14, second distribution circuit, 15, third distribution circuit, the 16, the 4th distribution pipe
Road, the 17, the 5th distribution circuit.
Direction shown in arrow in figure is the flow direction of gas.
Specific implementation mode
Below in conjunction with the accompanying drawings, by specific embodiment, the technical solution of the utility model is further described.
As shown, a kind of auxiliary gas air supply system for sputter coating, including supply station 1, supply air line are gentle
Body distribution module, there are three air storing cavities for the tool of supply station 1, contain oxygen, nitrogen and argon gas respectively, each air storing cavity is correspondingly arranged one
A air supply opening, and it includes main line, 12 and of branched pipe that solenoid valve and flowmeter, the supply air line, which is arranged, on air supply opening
Distribution circuit, main line are equipped with three, are connected respectively with the air supply opening of three air storing cavities, form oxygen pipeline 2, nitrogen
The end of pipeline 3 and argon gas pipeline 4, oxygen pipeline 2 connects five branched pipes 12, is denoted as branched pipe V1.1, branched pipe respectively
V1.2, branched pipe V1.3, branched pipe V1.4 and branched pipe V1.5, likewise, the end of nitrogen pipeline 3 connects five branched pipes
12, it is denoted as branched pipe V2.1, branched pipe V2.2, branched pipe V2.3, branched pipe V2.4 and branched pipe V2.5, argon gas pipeline 4 respectively
End connect five branched pipes 12, be denoted as respectively branched pipe V3.1, branched pipe V3.2, branched pipe V3.3, branched pipe V3.4 and
Branched pipe V3.5 is equipped with solenoid electric valve 11 on above-described each branched pipe 12, to realize that branched pipe 12 opens and closes and stream
The independent control of amount；The distribution circuit include the first distribution circuit 13, the second distribution circuit 14, third distribution circuit 15,
4th distribution circuit 16 and the 5th distribution circuit 17, the gas distribution module include that setting is sputtering indoor multiple segmentations
Air supply unit, it is five that segmentation air supply unit, which is set gradually along sputtering chamber length direction, that is, glass in the direction of advance of sputtering chamber,
It is the first air supply unit 5, the second air supply unit 6, third air supply unit 7, the 4th air supply unit 8 and the 5th air supply unit 9 respectively,
Each air supply unit is equipped with multiple ventholes；Wherein, branched pipe V1.1, branched pipe V2.1 and branched pipe V3.1 are both connected to one
On a four-way pipe 10, the first distribution circuit 13 is also associated on four-way pipe 10, the first distribution circuit 13 is gone back and the first air supply unit 5
Connection；Branched pipe V1.2, branched pipe V2.2 and branched pipe V3.2 are both connected on a four-way pipe 10, are also connected on four-way pipe 10
There are the second distribution circuit 14, the second distribution circuit 14 also to be connected with the second air supply unit 6；Branched pipe V1.3, branched pipe V2.3 and
Branched pipe V3.3 is both connected on a four-way pipe 10, and third distribution circuit 15, third distribution pipe are also associated on four-way pipe 10
Road 15 is also connected with third air supply unit 7；Branched pipe V1.4, branched pipe V2.4 and branched pipe V3.4 are both connected to a four-way pipe
On 10, the 4th distribution circuit 16 is also associated on four-way pipe 10, the 4th distribution circuit 16 is also connected with the 4th air supply unit 8；
Branched pipe V1.5, branched pipe V2.5 and branched pipe V3.5 are both connected on a four-way pipe 10, on four-way pipe 10 also
It is connected with the 5th distribution circuit 17, the 5th distribution circuit 17 is also connected with the 5th air supply unit 9.
In actual use, can be as needed, each segmentation air supply unit can use different gas, and right
Gas usage is controlled, and to realize in sputtering chamber, according to the needs of different location, is passed through variety classes, different tolerance
Auxiliary gas so that each position deposition efficiency is almost the same, film forming thickness is almost the same, even film layer, in favor of double
The uniformity controlling of silver and three silver coating glass.
Claims (3)
1. a kind of auxiliary gas air supply system for sputter coating, it is characterised in that：Including supply station（1）, supply air line and
Gas distribution module, the supply air line include main line and branched pipe（12）, main line includes and supply station（1）Connection
Oxygen pipeline（2）, nitrogen pipeline（3）With argon gas pipeline（4）, every main line is respectively connected with five branched pipes（12）, oxygen hose
Road（2）Branched pipe（12）, nitrogen pipeline（3）Branched pipe（12）And argon gas pipeline（4）Branched pipe（12）Between pass through
Four-way pipe connects, and is respectively connected with the distribution circuit being connect with gas distribution module on each four-way pipe, gas distribution module includes
Five segmentation air supply units, segmentation air supply unit is arranged in sputtering chamber, and is arranged along sputtering chamber length direction, is supplied by segmentation
Unit supplies for sputtering chamber, and each air supply unit that is segmented is connected to a distribution circuit, every branched pipe（12）It is equipped with valve,
With branched pipe where control（12）Opening and closing and gas flow.
2. a kind of auxiliary gas air supply system for sputter coating according to claim 1, it is characterised in that：Described
Valve is solenoid electric valve.
3. a kind of auxiliary gas air supply system for sputter coating according to claim 1, it is characterised in that：Described
It is segmented air supply unit and is equipped with multiple ventholes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721723909.5U CN207619519U (en) | 2017-12-12 | 2017-12-12 | A kind of auxiliary gas air supply system for sputter coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721723909.5U CN207619519U (en) | 2017-12-12 | 2017-12-12 | A kind of auxiliary gas air supply system for sputter coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207619519U true CN207619519U (en) | 2018-07-17 |
Family
ID=62823186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721723909.5U Active CN207619519U (en) | 2017-12-12 | 2017-12-12 | A kind of auxiliary gas air supply system for sputter coating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207619519U (en) |
-
2017
- 2017-12-12 CN CN201721723909.5U patent/CN207619519U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240103 Address after: Zone C, 4th Floor, Building 1, No. 328 Guanghua Road, Xiaokunshan Town, Songjiang District, Shanghai, 200000 Patentee after: Shanghai Beibo Vacuum Coating Technology Co.,Ltd. Address before: 3rd Floor, No. 328 Guanghua Road, Songjiang Science and Technology Park, Songjiang District, Shanghai, 200000 RMB Patentee before: SHANGHAI NORTHGLASS COATING TECHNOLOGY INDUSTRIAL Co.,Ltd. |
|
| TR01 | Transfer of patent right |