CN207578159U - Center gear ring height adjuster in a kind of silicon single crystal flake grinding technics - Google Patents
Center gear ring height adjuster in a kind of silicon single crystal flake grinding technics Download PDFInfo
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- CN207578159U CN207578159U CN201721415476.7U CN201721415476U CN207578159U CN 207578159 U CN207578159 U CN 207578159U CN 201721415476 U CN201721415476 U CN 201721415476U CN 207578159 U CN207578159 U CN 207578159U
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- gear ring
- screw thread
- elevating lever
- center gear
- thread elevating
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Abstract
Center gear ring height adjuster in a kind of silicon single crystal flake grinding technics, at least three threaded hole is evenly arranged with around the center of center gear ring, the screw thread elevating lever with its thread fitting is provided in each threaded hole, the clamping joint for protruding from center gear ring upper surface is formed after corresponding threaded hole is both passed through at the top of every screw thread elevating lever, the clamping joint coordinates with spanner to turn screw thread elevating lever, and in screw thread elevating lever upper edge, its short transverse is provided with graduated scale.The utility model on the gear ring of center by setting several threaded holes, and the screw thread elevating lever of ruler with a scale is set in each threaded hole, in the height for needing adjustment center gear ring, by turning every screw thread elevating lever successively, and control the lifting scale of every screw thread elevating lever by observing and recording the graduated scale on every screw thread elevating lever, it is achieved thereby that the height adjustment of center gear ring, not only safety is time saving and energy saving, but also the height adjusted is also easily controlled.
Description
Technical field
The utility model is related to arrive the grinding process of silicon single crystal flake, in specifically a kind of silicon single crystal flake grinding technics in
Heart gear ring height adjuster.
Background technology
The grinding technics main purpose of silicon single crystal flake is to remove the stria generated in silicon single crystal flake cutting action and damaging layer,
And make silicon chip surface that there is certain geometric accuracy.Since current monocrystalline cutting technique is mostly using wire cutting, substantially
While improving production efficiency, wire cutting technology can make silicon chip surface leave stria, while generate the two-sided of about 20 ~ 50 μm of depth
Damaging layer, this just needs to carry out twin grinding to silicon chip, to improve the form accuracy of silicon chip.
Twin grinding processing is carried out to silicon chip frequently with twin grinding technology for silicon chip of the diameter less than 200mm at present,
Upper and lower abrasive disk makees opposite direction rotation, and upper and lower abrasive disk adds in suitable hydro-abrasion material, silicon chip is made to be done with wandering star disk
Opposite planetary motion, and silicon chip segmentation is accelerated, pressurization progress twin grinding processing.Hydro-abrasion material（Grinding fluid）Mainly by grinding
Sand（Alumina powder）, pure water and suspending agent composition.Grinding resistance is small, not disfiguring workpiece, and two sides Even Grinding production effect
Rate is high.There is thickness control system, the product thickness tolerance after processing can control.
The wandering star disk of twin grinder has inside and outside gear ring to drive used at present, and planet is done among upper and lower abrasive disk
Movement.But center gear ring drives wandering star disk for a long time, can make to be that engaging portion grinds groove, wandering star disk can be caused to jump at work
Moving, which causes silicon chip to crush, scraps, it is also possible to wandering star be caused to be coiled bad.Therefore, adjustment center gear ring is needed after a period of operation
Height, allowed wearing part.Present center gear ring method of adjustment is：Jack-up center gear ring, center gear ring is taken out, is passed through
Following resin gasket is increased or decreased to adjust the height of center gear ring.This method is not only time-consuming and laborious, and the height adjusted
Degree is not easy to control, and center gear ring weight ratio is larger, there is the danger hurted sb.'s feelings.
Utility model content
To solve existing to adjust the method for center gear ring height using the resin gasket under the gear ring of center is increased or decreased
Existing adjustment height is not easy to control, time-consuming and laborious and has the problem of security risk, and the utility model provides a kind of silicon list
Gear ring height adjuster in center in wafer grinding technique, the device by setting several threaded holes on the gear ring of center, and
The screw thread elevating lever of setting ruler with a scale, by turning every screw thread elevating lever, realizes adjustment centre tooth in each threaded hole
The height of circle, not only safety is time saving and energy saving, but also the height adjusted is also easily controlled.
Used technical solution is the utility model to solve above-mentioned technical problem：In a kind of silicon single crystal flake grinding technics
Center gear ring height adjuster is evenly arranged at least three threaded hole, each threaded hole around the center of center gear ring
The screw thread elevating lever with its thread fitting is inside provided with, the bottom of every screw thread elevating lever is fixed at the inner ring of a bearing
In, each bearing is fixed in a bearing block, after both passing through corresponding threaded hole at the top of every screw thread elevating lever
The clamping joint for protruding from center gear ring upper surface is formed, which coordinates with spanner to turn screw thread elevating lever, in screw thread liter
Its short transverse of drop bar upper edge is provided with graduated scale.
As a kind of preferred embodiment of the utility model, the bottom level of the bearing block, so that its steady placement.
As another preferred embodiment of the utility model, the top surface of the bearing is provided with the bearing end of sealing bearing
Lid.
As another preferred embodiment of the utility model, the threaded hole is 4,6 or 8, and is uniformly distributed, often
Screw thread elevating lever height in a threaded hole is equal.
As another preferred embodiment of the utility model, the clamping joint is the indent for being arranged on screw thread elevating lever top
Polygonal hole（Such as triangle, quadrangle, pentagon, hexagon, octagon）, the indent polygonal hole with it is polygon on spanner
Shape protrusion matches.
Advantageous effect：The utility model is set by setting several threaded holes on the gear ring of center in each threaded hole
The screw thread elevating lever of ruler with a scale is put, in the height for needing adjustment center gear ring, by turning every screw thread elevating lever successively,
And the lifting scale of every screw thread elevating lever is controlled by observing and recording the graduated scale on every screw thread elevating lever, so as to fulfill
The height adjustment of center gear ring, not only safety is time saving and energy saving, but also the height adjusted is also easily controlled；With prior art phase
Than the present apparatus is simple in structure, easy to use, all needs to remove center gear ring without adjusting gear ring height every time, can arbitrarily adjust
Whole center gear ring height, is no longer limited to, securely and reliably by gasket.
Description of the drawings
Fig. 1 is the structure diagram of the utility model center gear ring；
Fig. 2 is the structure diagram of the utility model screw thread elevating lever；
Reference numeral：1st, center gear ring, 2, threaded hole, 3, screw thread elevating lever, 4, bearing, 5, bearing block, 6, bearing (ball) cover,
7th, clamping joint, 8, graduated scale.
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work
All other embodiments obtained shall fall within the protection scope of the present invention.
As illustrated in fig. 1 and 2, center gear ring height adjuster in a kind of silicon single crystal flake grinding technics, around center gear ring 1
Center be evenly arranged at least three threaded hole 2, the screw thread elevating lever with its thread fitting is provided in each threaded hole 2
3, the bottom of every screw thread elevating lever 3 is fixed in the inner ring of a bearing 4, and 3 bottom of screw thread elevating lever is arranged on axis
The purpose held in 4 is that lighter when twisting screw thread elevating lever 3, preventing screw thread elevating lever 3 from directly withstanding on chassis causes to turn round
Dynamic screw thread elevating lever 3 is more laborious, and screw thread elevating lever 3 and center gear ring 1 is caused to damage；Each bearing 4 is fixed at an axis
In bearing 5, the top of every screw thread elevating lever 3, which both passes through to be formed after corresponding threaded hole 2, protrudes from 1 upper table of center gear ring
The clamping joint 7 in face, which coordinates with spanner to turn screw thread elevating lever 3, in its short transverse of 3 upper edge of screw thread elevating lever
It is provided with graduated scale 8.
It is the basic embodiment of the utility model above, can be further optimized, improves and limit on the basis of above
It is fixed：
Such as, the bottom level of the bearing block 5, so that its steady placement, the effect of bearing block 5 is can not only to fill axis
4 are held, the lower end of screw thread elevating lever 3 can also be made have larger forced area, makes center gear ring 1 more steady；
For another example, the top surface of the bearing 4 is provided with the bearing (ball) cover 6 of sealing bearing 4, it is possible to reduce grinding fluid and silica flour enter
Bearing 4 leads to the damage of bearing 4；
For another example, the threaded hole 2 is 4,6 or 8, and preferably 6, the screw thread elevating lever 3 in each threaded hole 2 is high
It spends equal.
Finally, the clamping joint 7 is the indent polygonal hole for being arranged on 3 top of screw thread elevating lever（Such as triangle, four sides
Shape, pentagon, hexagon, octagon etc.）, which matches with the polygon protrusion on spanner.
The utility model is stuck in a wherein screw thread elevating lever 3 in the height for needing adjustment center gear ring 1, by spanner and pushes up
On the clamping joint 7 in portion, spanner is then turned, bottom end bearing 4 can rotate at this time, only need smaller power that can twist screw thread lifting
Bar 3, and then center gear ring 1 is driven to move up and down, the position after being lifted by 8 records center gear ring 1 of graduated scale then, then is used
Spanner turns remaining screw thread elevating lever 3 successively using identical method, and center gear ring 1 is made to lift to identical scale, realizes
The level of center gear ring 1, it is therefore prevented that tilt.
It is obvious to a person skilled in the art that the utility model is not limited to the details of above-mentioned exemplary embodiment, and
And in the case of the spirit or essential attributes without departing substantially from the utility model, it can realize that this practicality is new in other specific forms
Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this practicality is new
The range of type is indicated by the appended claims rather than the foregoing description, it is intended that by containing in the equivalent requirements of the claims is fallen
All changes in justice and range are embraced therein.Any reference numeral in claim should not be considered as limitation
Involved claim.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in each embodiment can also be properly combined, forms those skilled in the art
The other embodiment being appreciated that.
Claims (5)
1. a kind of center gear ring height adjuster in silicon single crystal flake grinding technics, it is characterised in that：Around center gear ring（1）'s
Center is evenly arranged at least three threaded hole（2）, each threaded hole（2）It is inside provided with and is lifted with the screw thread of its thread fitting
Bar（3）, every screw thread elevating lever（3）Bottom be fixed at a bearing（4）Inner ring in, each bearing（4）Fixation is set
It puts in a bearing block（5）It is interior, every screw thread elevating lever（3）Top both pass through corresponding threaded hole（2）Protrusion is formed afterwards
In center gear ring（1）The clamping joint of upper surface（7）, the clamping joint（7）Coordinate to turn screw thread elevating lever with spanner（3）, in spiral shell
Line elevating lever（3）Its short transverse of upper edge is provided with graduated scale（8）.
2. center gear ring height adjuster in a kind of silicon single crystal flake grinding technics according to claim 1, feature exist
In：The bearing block（5）Bottom level so that it steady is placed.
3. center gear ring height adjuster in a kind of silicon single crystal flake grinding technics according to claim 1, feature exist
In：The bearing（4）Top surface be provided with sealing bearing（4）Bearing (ball) cover（6）.
4. center gear ring height adjuster in a kind of silicon single crystal flake grinding technics according to claim 1, feature exist
In：The threaded hole（2）It is 4,6 or 8, each threaded hole（2）Interior screw thread elevating lever（3）It is highly equal.
5. center gear ring height adjuster in a kind of silicon single crystal flake grinding technics according to claim 1, feature exist
In：The clamping joint（7）To be arranged on screw thread elevating lever（3）The indent polygonal hole on top, the indent polygonal hole and spanner
On polygon protrusion match.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721415476.7U CN207578159U (en) | 2017-10-30 | 2017-10-30 | Center gear ring height adjuster in a kind of silicon single crystal flake grinding technics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721415476.7U CN207578159U (en) | 2017-10-30 | 2017-10-30 | Center gear ring height adjuster in a kind of silicon single crystal flake grinding technics |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207578159U true CN207578159U (en) | 2018-07-06 |
Family
ID=62729959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721415476.7U Active CN207578159U (en) | 2017-10-30 | 2017-10-30 | Center gear ring height adjuster in a kind of silicon single crystal flake grinding technics |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207578159U (en) |
-
2017
- 2017-10-30 CN CN201721415476.7U patent/CN207578159U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 471000 No. 99 Binhe North Road, Luoyang hi tech Industrial Development Zone, Henan Patentee after: Mesk Electronic Materials Co., Ltd Address before: 471000 No. 99 Binhe North Road, Luoyang hi tech Industrial Development Zone, Henan, Luoyang Patentee before: MCL ELECTRONIC MATERIALS Ltd. |