CN207530298U - A kind of semiconductor light source pumps multi-resonant chamber solid laser device - Google Patents
A kind of semiconductor light source pumps multi-resonant chamber solid laser device Download PDFInfo
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- CN207530298U CN207530298U CN201721331390.6U CN201721331390U CN207530298U CN 207530298 U CN207530298 U CN 207530298U CN 201721331390 U CN201721331390 U CN 201721331390U CN 207530298 U CN207530298 U CN 207530298U
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Abstract
The utility model provides a kind of semiconductor light source pumping multi-resonant chamber solid laser device, including multiple tubular resonators, multiple coolings hollow metal pipe, high-brightness light emitting diode or semiconductor laser dot matrix, coaxial support ring group, total reflective mirror, output window, DC power supply and control system, for industrial processes and other high-power applications(Such as laser weapon, laser impact intensified)For field, which can obtain the continuous power output and pulse power of bigger compared with traditional structure;Its final shaping focuses on the coupling that laser beam is the donut laser beam of multiple tubular resonator outputs, available for application fields such as high power laser processing;In addition, due to being the output of donut laser beam, focus on thermal lensing effect in transmission process over long distances more than km grade and be less than the traditional structure solid state laser with power.
Description
Technical field
The utility model is related to solid state laser fields, and multi-resonant chamber solid is pumped more particularly to a kind of semiconductor light source
Laser device.
Background technology
Laser is the device that can emit laser, and currently used mainly have that fixed laser, gas laser etc. are several,
Wherein gas laser is the device that laser is generated by the use of gas as operation material.It by discharge tube activation gas, one
Three major part compositions such as resonator and driving source for formed to total reflective mirror.Main energisation mode have electric excitation, air-operated drive,
Light stimulus and chemical pumping etc..Wherein electric excitation mode is the most frequently used.Under appropriate discharging condition, electron collision excitationNe and energy are utilized
Amount transfer excitation etc., gas particle is selectively excited on certain high level, so as to form the particle between certain low-lying level
Number reversion, generates stimulated emission transition.
Solid state laser is the laser by the use of solid laser material as operation material, and working media is as matrix material
A small amount of active ions are uniformly mixed in the crystal or glass of material or other activated materials are formed, by this small amount of active ions of incorporation
Or the crystal or glass of other activated materials make cylindrical shape, both ends just constitute traditional solid state laser plus eyeglass
Resonator.For this solid state laser, the heat accumulation of solid cylinder intra resonant cavity is that continuous wave stabilization output power carries
The main bottleneck risen.Certainly, reducing cylinder resonator diameter can be with improving radiating effect, but can reduce resonator volume,
It equally can also reduce output power.
Compound cylinder structure laser technology is currently used primarily in gas laser such as application documents《Compound cylinder is put
The construction method and device of electric high power gas laser》, application number:CN201210557750.X, Authorization Notice No.:CN
102983486 B, shown in Fig. 6, but since it is that therefore there are following defects for gas laser:
1st, this application file is gas laser, and gas laser operation material is gas, and is mixed with auxiliary gas,
By gas flowing and molecular thermalmotion be uniformly distributed to realize, although therefore its have inner cylinder and outer cylinder, they are logical
Axicon lens reflection concatenation is crossed, so, actually they are a resonators, if increasing cylinder number, also necessarily increase resonator
Length, and then increase light modulation difficulty and device complexity.
2nd, since this application file is gas laser, power supply is radio-frequency power supply, and technical difficulty is big, to environment meeting
Generate larger electromagnetic radiation pollution.
3rd, since this application file only has cooling device in outermost layer and innermost layer, without middle layer, also without middle layer
Cooling device, thus can not high efficiency reduce system operating temperatures, therefore output power can be influenced.
4th, since this application file is gas laser, resonator is horizontal positioned, and vibration be easy to cause deviation, therefore not
It is suitble to outdoor moving.
5th, the wavelength difference of gas laser and solid state laser output laser is larger, and application field also has bigger difference.
Utility model content
Above-mentioned in order to solve the problems, such as, the utility model provides a kind of semiconductor light source pumping multi-resonant chamber solid and swashs
Light device device, which has better resonator heat dissipation effect relative to conventional solid laser, conducive to solid state laser
Power ascension can obtain the continuous power output and pulse power of bigger compared with traditional structure solid state laser, can conduct
The special source of the high, precision and frontiers manufacture field such as laser welding, laser cutting, laser impact intensified, for this purpose, this practicality
Novel a kind of semiconductor light source pumping multi-resonant chamber solid laser device of offer, including tubular resonator group, cooling hollow
Metal circular tube and semiconductor pumped light source, the tubular resonator group have N number of tubular resonator, and N is positive integer, and N is more than
2, the tubular resonator mean radius in the tubular resonator group is distributed from outside to inside into arithmetic progression and equal length
And use is coaxially arranged, two end faces of the tubular resonator in the tubular resonator group are respectively parallel to each other two
It is disposed with that thickness is fixed and tubular in a plane, in the tubular resonator group between two neighboring tubular resonator
The coaxial middle layer cooling hollow metal circular tube of resonator, the quantity of the middle layer cooling hollow metal circular tube is N-1, described
Cooling hollow metal circular tube includes at least one middle layer cooling hollow metal circular tube, innermost layer cooling hollow metal circular tube and most
Outer layer cooling hollow metal circular tube, each cooling hollow metal circular tube form cooling hollow metal circular tube group, the cooling hollow gold
It is hollow-core construction to belong between round tube inner wall and outer wall, and circulating cooling liquid, the cooling are connected in the cooling hollow metal circular tube
The surface metal clad base material of each middle layer cooling hollow metal circular tube inner wall and outer wall in hollow metal pipe group is
The wiring board of bottom plate, the semiconductor pumped light source of intensive arrangement patch encapsulation, the light of the semiconductor pumped light source on wiring board
Line projects Main way and is arranged as radially, there is most the disposed inboard of innermost layer tubular resonator in the tubular resonator group
Inner layer cooling hollow metal circular tube, the outer wall surface metal clad base material of innermost layer cooling hollow metal circular tube are the circuit of bottom plate
Plate, the semiconductor pumped light source of intensive arrangement patch encapsulation, the inner wall surface of innermost layer cooling hollow metal circular tube on wiring board
Then without arranging semiconductor pumped light source, it is disposed with most on the outside of outermost layer tubular resonator in the tubular resonator group
Outer layer cooling hollow metal circular tube, the inner wall surface metal clad base material of outermost layer cooling hollow metal circular tube are the circuit of bottom plate
Plate, the semiconductor pumped light source of intensive arrangement patch encapsulation, the outer wall surface of outermost layer cooling hollow metal circular tube on wiring board
Then without arranging semiconductor pumped light source.
Further improvement of the utility model, the solid state laser cooling hollow metal pipe are defeated for ease of arranging
Exit window and total reflective mirror, length selection are equal to tubular cavity length, the selection of two end face and at least one tubular resonance
The identical end face of chamber is coplanar.
Further improvement of the utility model, the solid state laser each two adjacent cooling hollow metal pipe with
Embedded with coaxial support ring between tubular resonator, coaxial support ring must be disposed at tubular resonator both ends, each
There is 2N coaxial support ring on end face, claim a coaxial support ring group, two end faces are there are two coaxial support ring group, for ease of cloth
Output window and total reflective mirror are put, the end face of coaxial support ring outwardly is arranged as distinguishing with tubular resonator both ends coplanar.
Further improvement of the utility model, the solid state laser can be according to tubular resonator, the hollow gold of cooling
Belong to the length and intensity of pipe, one group or more coaxial support ring group of arrangement can be increased in intermediate appropriate location, with the coaxial of group
Support ring both ends of the surface difference is coplanar.
Further improvement of the utility model, each coaxial support in the coaxial support ring group of the solid state laser
Ring axial length can take 5 ~ 10mm as needed, the same with the coaxial support ring requirement length of group, with the coaxial support ring two of group
End face difference is coplanar.
Further improvement of the utility model, each coaxial support ring outer diameter of the solid state laser are equal to its outer ring
Adjacent cooling hollow metal pipe or the internal diameter of tubular resonator, each coaxial support ring internal diameter are equal to its inner ring phase
Adjacent cooling hollow metal pipe or the outer diameter of tubular resonator.
Further improvement of the utility model, the resonant cavity of solid state laser and its attachment are described using vertical arrangement
There is total reflective mirror below resonant cavity of solid state laser, the support construction support resonant cavity of solid state laser of the total reflective mirror and its attached
Part.
Further improvement of the utility model, the thickness of the tubular resonator in the tubular resonator group are
0.05-0.5mm is attached in the tubular clear glass substrate of equal length.
The utility model provides a kind of semiconductor light source pumping multi-resonant chamber solid laser device, including multiple tubulars
Resonator, it is multiple cooling with hollow metal pipe, high-brightness light emitting diode or semiconductor laser dot matrix, coaxial support ring group,
Total reflective mirror, output window, DC power supply and control system, for industrial processes and other high-power applications(Such as laser weapon, laser
Shock peening)For field, which can obtain continuous power output and the pulse of bigger compared with traditional structure
Power, final shaping or focusing laser beam are the couplings of the donut laser beam of multiple tubular resonators outputs, can
For multiple application fields such as high power laser processing;In addition, due to being the output of donut laser beam, it is long more than km grade
Thermal lensing effect is less than the solid circular laser beam of the traditional structure solid state laser with power in Range Focusing transmission process.
The utility model has following advantage compared with the prior art and gas laser;
1st, the utility model contains multiple tubular resonators, they are multiple independent resonators, through constraining shaping, it
Output be multiple parallel donuts on outbound course, can be by one piece of focus lamp to these concentric circles annular flats
Row laser beam, which is realized, to be focused on.Each tubular resonator can regard an independent solid state laser as, and the present apparatus is equivalent to use
One piece of focusing lens realizes the light beam coupling to multiple independent solid state lasers, and this coupling process is different from fiber coupling
Or the combination coupling of multiple eyeglasses, relatively ingenious, succinct, effect is good.
2nd, the utility model is pumped using semiconductor light source, and power technology needed for semiconductor is relatively easy, it might even be possible to use
Asonant solar panel replaces the very big generator car power supply of sound.
3rd, the utility model is suitble to selected tubular resonance using the semiconductor light source of the tubular arrangement with cooling device
Cavity configuration needs, and the semiconductor light source of this tubular arrangement with cooling device can layered arrangement, in this way conducive to carrying
High pumping light source power reduces system operating temperatures, improves output power.
4th, the portions such as semiconductor light source that multiple tubular resonators of the utility model, the tubular with cooling device are arranged
Part, in this way can be to avoid leading to coaxiality deviation using vertical coaxially arranged due to gravity.
5th, the utility model includes multiple coaxial support rings, and system associated components are maintained jointly with the support construction of total reflective mirror
Concentricity, if suitably being reinforced to device, it is mobile over long distances to be adapted to field, disclosure satisfy that related field often moves
It needs.
6th, the total reflective mirror of the utility model can be with multiple tubular resonators, the tubular with cooling device with output window
The components such as the semiconductor light source of arrangement are integrally formed, and are not needing to dim after transporting for long-distance and jolting in this way, can be with
It comes into operation immediately.
Description of the drawings
Fig. 1 is the multiple tubular cavity resonator structure schematic diagrames one of the utility model;
Fig. 2 is the multiple tubular cavity resonator structure schematic diagrames two of the utility model;
Fig. 3 is the utility model middle layer cooling hollow metal circular tube schematic diagram;
Fig. 4 is the utility model innermost layer cooling hollow metal circular tube schematic diagram;
Fig. 5 is the utility model outermost layer cooling hollow metal circular tube schematic diagram;
Fig. 6 is the utility model prior-art illustration;
It illustrates:
1st, tubular resonator group;2nd, middle layer cooling hollow metal circular tube;3rd, innermost layer cooling hollow metal circular tube;
4th, outermost layer cooling hollow metal circular tube;5th, semiconductor pumped light source;6th, cooling liquid inlet pipe;7th, coolant outlet;8th, it is same
Axis support ring group.
Specific embodiment
The utility model is described in further detail with specific embodiment below in conjunction with the accompanying drawings:
The utility model provides a kind of semiconductor light source pumping multi-resonant chamber solid laser device, and the device is relative to biography
Solid state laser of uniting has better resonator heat dissipation effect, conducive to the power ascension of solid state laser, with traditional structure solid
Laser compares the continuous power output and pulse power that can obtain bigger, can be used as laser welding, laser cutting, laser punching
Hit the special source of the high, precision and frontiers manufacture fields such as reinforcing.
As a kind of specific embodiment of the utility model, the utility model proposes a kind of solid state lasers as shown in Figs. 1-5
Device, including tubular resonator group 1, multiple cooling hollow metal circular tubes, semiconductor pumped light source 5 and coaxial support ring group 8,
Tubular resonator mean radius in the tubular resonator group 1 is distributed from outside to inside into arithmetic progression, their length phases
Deng in a device using coaxially arranged, and two end faces difference of these tubular resonators is coplanar, i.e. their two end faces
Respectively in two planes parallel to each other;Certain thickness and pipe is disposed between the two neighboring tubular resonator
The coaxial middle layer cooling hollow metal circular tube of shape resonator, one fewer than tubular resonator number of quantity, multiple centres
Layer cooling hollow metal circular tube composition middle layer cooling hollow metal circular tube group, between cooling hollow metal circular tube inner wall and outer wall
For hollow-core construction, it is connected with circulating cooling liquid therebetween, for being layered the tubular resonator group 1 of cooling solid laser and its pumping
System;The surface patch of each cooling hollow metal circular tube inner wall and outer wall in the middle layer cooling hollow metal circular tube group
There is the wiring board that metal base is bottom plate, the semiconductor pumped light source 5 of intensive arrangement patch encapsulation, semiconductor pumped on wiring board
The light of light source 5 projects Main way and is arranged as radially.
The disposed inboard of the innermost layer tubular resonator of solid state laser described in the utility model has innermost layer cooling sky
Heart metal circular tube 3, innermost layer cooling hollow metal circular tube 3 only have outer wall surface and are disposed with pump light source, and in its inner wall surface
Then without arrangement pump light source.
It is empty that outermost layer cooling is disposed on the outside of the outermost layer tubular resonator of solid state laser described in the utility model
Heart metal circular tube 4, outermost layer cooling hollow metal circular tube 4 only have inner wall surface and are disposed with pump light source, and in its outer wall surface
Then without arrangement pump light source.
Multiple 1 tube walls of tubular resonator of solid state laser described in the utility model are very thin, conducive to resonance cavity radiating.
Solid state laser described in the utility model can pass through increasing while multiple 1 tube walls of tubular resonator are thinning
The number of plies of tubular resonator 1 is added to improve power.
Solid state laser cooling hollow metal pipe described in the utility model, length are equal to tubular Resonant Intake System
Degree, two end face and the identical end face of multiple tubular resonators are coplanar.
The utility model is embedded with the solid state laser cooling between hollow metal pipe and tubular resonator
Coaxial support ring, multiple coaxial support rings form a coaxial support ring group 8, each coaxial support ring outer diameter on an end face
The cooling adjacent equal to outer ring hollow metal pipe or the internal diameter of tubular resonator, each coaxial support ring internal diameter are equal to
The outer diameter of inner ring adjacent cooling hollow metal pipe or tubular resonator, axial length can take 5 as needed ~
10mm, but it is the same with the coaxial support ring requirement length of group, one group of coaxial support ring is respectively embedded at tubular resonator group both ends,
The end face of coaxial support ring outwardly is arranged as distinguishing with tubular resonator both ends coplanar.
The utility model can be according to the length of tubular resonator, cooling hollow metal pipe for the solid state laser
Degree and intensity can increase the one or more groups of coaxial support ring groups 8 of arrangement, with the coaxial support ring of group in intermediate appropriate location
Both ends of the surface difference is coplanar.
To prevent tubular resonator, cooling, with hollow metal pipe etc., factors cause the utility model due to gravity etc.
Concentricity variation, with hollow metal pipe using vertical arrangement, total reflective mirror is all-trans in lower face for tubular resonator and cooling
The support construction of mirror is also the support of entire resonator components.
The above descriptions are merely preferred embodiments of the present invention, is not to make any other to the utility model
The limitation of form, and any modification made according to the technical essence of the utility model or equivalent variations, it is new to still fall within this practicality
Type range claimed.
Claims (8)
1. a kind of semiconductor light source pumps multi-resonant chamber solid laser device, including tubular resonator group(1), cooling hollow
Metal circular tube and semiconductor pumped light source(5), it is characterised in that:The tubular resonator group(1)There is N number of tubular resonance
Chamber, N are positive integer, and N is more than 2, the tubular resonator group(1)In tubular resonator mean radius from outside to inside into etc.
Difference column distribution and equal length simultaneously use coaxially arranged, the tubular resonator group(1)In tubular resonator two
A end face is respectively in two planes parallel to each other, the tubular resonator group(1)In two neighboring tubular resonator
Between be disposed with the fixed middle layer cooling hollow metal circular tube coaxial with tubular resonator of thickness(2), the middle layer
Cooling hollow metal circular tube(2)Quantity for N-1, the cooling hollow metal circular tube includes at least one middle layer cooling hollow
Metal circular tube(2), innermost layer cooling hollow metal circular tube(3)With outermost layer cooling hollow metal circular tube(4), each cooling hollow gold
Belong to pipe composition cooling hollow metal circular tube group, be hollow-core construction between the cooling hollow metal circular tube inner wall and outer wall, institute
It states and circulating cooling liquid is connected in cooling hollow metal circular tube, each middle layer cooling in the cooling hollow metal circular tube group
Hollow metal pipe(2)The surface metal clad base material of inner wall and outer wall is the wiring board of bottom plate, intensive arrangement patch on wiring board
The semiconductor pumped light source of piece encapsulation(5), the semiconductor pumped light source(5)Light project Main way be arranged as radially,
The tubular resonator group(1)The disposed inboard of middle innermost layer tubular resonator has innermost layer cooling hollow metal circular tube
(3), innermost layer cooling hollow metal circular tube(3)Outer wall surface metal clad base material be bottom plate wiring board, it is close on wiring board
The semiconductor pumped light source of collection arrangement patch encapsulation(5), innermost layer cooling hollow metal circular tube(3)Inner wall surface then without cloth
Put semiconductor pumped light source(5), the tubular resonator group(1)It is disposed on the outside of middle outermost layer tubular resonator outermost
Layer cooling hollow metal circular tube(4), outermost layer cooling hollow metal circular tube(4)Inner wall surface metal clad base material for bottom plate
Wiring board, the semiconductor pumped light source of intensive arrangement patch encapsulation on wiring board(5), outermost layer cooling hollow metal circular tube(4)
Outer wall surface then without arranging semiconductor pumped light source(5).
2. a kind of semiconductor light source pumping multi-resonant chamber solid laser device according to claim 1, it is characterised in that:
The length selection of cooling hollow metal circular tube is equal to tubular cavity length, cooling hollow round metal in the solid state laser
Two end faces selection of pipe is coplanar with the identical end face of at least one tubular resonator.
3. a kind of semiconductor light source pumping multi-resonant chamber solid laser device according to claim 1, it is characterised in that:
The adjacent cooling of the solid state laser each two between hollow metal pipe and tubular resonator be embedded with coaxial support ring,
Coaxial support ring must be disposed at tubular resonator both ends, there is 2N coaxial support ring on each end face, claims one together
Axis support ring group(8), there are two coaxial support ring groups for two end faces(8), the end face of coaxial support ring outwardly is arranged as and pipe
Shape resonator both ends difference is coplanar.
4. a kind of semiconductor light source pumping multi-resonant chamber solid laser device according to claim 3, it is characterised in that:
The solid state laser can be according to the length and intensity of tubular resonator, cooling hollow metal pipe, in intermediate appropriate position
One group or more coaxial support ring group of arrangement can be increased by putting(8), it is coplanar with the coaxial support ring both ends of the surface difference organized.
5. a kind of semiconductor light source pumping multi-resonant chamber solid laser device according to claim 3 or 4, feature exist
In:Each coaxial support ring axial length in the coaxial support ring group of the solid state laser takes 5 ~ 10mm as needed,
The same with the coaxial support ring requirement length of group, the coaxial support ring both ends of the surface difference with group is coplanar.
6. a kind of semiconductor light source pumping multi-resonant chamber solid laser device according to claim 1, it is characterised in that:
Each coaxial support ring outer diameter of the solid state laser is equal to adjacent cooling hollow metal pipe or the pipe in its outer ring
The internal diameter of shape resonator, each coaxial support ring internal diameter are equal to adjacent cooling hollow metal pipe or the tubular of its inner ring
The outer diameter of resonator.
7. a kind of semiconductor light source pumping multi-resonant chamber solid laser device according to claim 1, it is characterised in that:
The resonant cavity of solid state laser and its attachment arrange there is total reflective mirror below the resonant cavity of solid state laser using vertical,
The support construction support resonant cavity of solid state laser and its attachment of the total reflective mirror.
8. a kind of semiconductor light source pumping multi-resonant chamber solid laser device according to claim 1, it is characterised in that:
The thickness of tubular resonator in the tubular resonator group is 0.05-0.5mm.
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CN107565353A (en) * | 2017-10-17 | 2018-01-09 | 金陵科技学院 | A kind of semiconductor light source pumping multi-resonant chamber solid laser device |
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CN107565353A (en) * | 2017-10-17 | 2018-01-09 | 金陵科技学院 | A kind of semiconductor light source pumping multi-resonant chamber solid laser device |
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