CN107565353A - A kind of semiconductor light source pumping multi-resonant chamber solid laser device - Google Patents
A kind of semiconductor light source pumping multi-resonant chamber solid laser device Download PDFInfo
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- CN107565353A CN107565353A CN201710997365.XA CN201710997365A CN107565353A CN 107565353 A CN107565353 A CN 107565353A CN 201710997365 A CN201710997365 A CN 201710997365A CN 107565353 A CN107565353 A CN 107565353A
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Abstract
The present invention provides a kind of semiconductor light source pumping multi-resonant chamber solid laser device, including multiple tubular resonators, multiple coolings hollow metal pipe, high-brightness light emitting diode or semiconductor laser dot matrix, coaxial support ring group, total reflective mirror, output window, dc source and control system, for industrial processes and other high-power applications（Such as laser weapon, laser impact intensified）For field, the solid state laser can obtain bigger continuous power output and pulse power compared with traditional structure；Its final shaping focuses on the coupling that laser beam is the donut laser beam of multiple tubular resonator outputs, available for application fields such as high power laser processing；Further, since being the output of donut laser beam, focus on thermal lensing effect in transmitting procedure over long distances more than km level and be less than the traditional structure solid state laser with power.
Description
Technical field
The present invention relates to solid state laser field, more particularly to a kind of semiconductor light source pumping multi-resonant chamber Solid State Laser
Device device.
Background technology
Laser is the device that can launch laser, and currently used mainly have that fixed laser, gas laser etc. are several,
Wherein gas laser is the device that laser is produced by the use of gas as operation material.It is by the activation gas in discharge tube, one
Three major part compositions such as resonator and driving source for being formed to total reflective mirror.Main energisation mode have electric excitation, air-operated drive,
Light stimulus and chemical pumping etc..Wherein electric excitation mode is the most frequently used.Under appropriate discharging condition, electron collision excitationNe and energy are utilized
Amount transfer is excited, and gas particle is selectively excited on certain high level, so as to form the particle between certain low-lying level
Number reversion, produces stimulated emission transition.
Solid state laser is the laser by the use of solid laser material as operation material, and working media is as matrix material
A small amount of active ions are uniformly mixed in the crystal or glass of material or other activated materials are formed, by this small amount of active ions of incorporation
Or the crystal or glass of other activated materials make cylindrical shape, both ends just constitute traditional solid state laser plus eyeglass
Resonator.For this solid state laser, the heat accumulation of solid cylinder intra resonant cavity is that the stable power output of continuous wave carries
The main bottleneck risen.Certainly, reducing cylinder resonator diameter can be with improving radiating effect, but can reduce resonator volume,
It equally can also reduce power output.
Compound cylinder structure laser technology is currently used primarily in gas laser such as application documents《Compound cylinder is put
The construction method and device of electric high power gas laser》, application number：CN201210557750.X, Authorization Notice No.：CN
102983486 B, shown in Fig. 6, but because it is gas laser therefore following defect be present：
1st, this application file is gas laser, and gas laser operation material is gas, and is mixed with auxiliary gas, is relied on
Gas flow and molecular thermalmotion is uniformly distributed to realize, although therefore its have inner cylinder and outer cylinder, they are to pass through cone
Mirror reflection concatenation, so, actually they are a resonators, if increase cylinder number, also necessarily increases cavity length,
And then increase light modulation difficulty and device complexity.
2nd, because this application file is gas laser, therefore its power supply is radio-frequency power supply, and technical difficulty is big, to environment meeting
Produce larger electromagnetic radiation pollution.
3rd, because this application file only has cooling device in outermost layer and innermost layer, without intermediate layer, also without intermediate layer
Cooling device, thus can not high efficiency reduce system operating temperatures, therefore power output can be influenceed.
4th, because this application file is gas laser, resonator is horizontal positioned, and vibration easily causes deviation, therefore not
It is adapted to outdoor moving.
5th, the wavelength difference of gas laser and solid state laser output laser is larger, and application field also has bigger difference.
The content of the invention
In order to solve above-mentioned problem, the present invention provides a kind of semiconductor light source pumping multi-resonant chamber solid state laser
Device, the device has more preferable resonator radiating effect relative to conventional solid laser, beneficial to the power of solid state laser
Lifting, bigger continuous power output and pulse power can be obtained compared with traditional structure solid state laser, can be used as laser
The special source of the high, precision and frontier manufacture field such as welding, laser cutting, laser impact intensified, to be provided up to this purpose, the present invention
A kind of semiconductor light source pumping multi-resonant chamber solid laser device, including tubular resonator group, cooling hollow metal circular tube
With semiconductor pumped light source, the tubular resonator group has N number of tubular resonator, and N is positive integer, and N is more than 2, the circle
Tubular resonator mean radius in tubular resonator group is from outside to inside into arithmetic progression distribution and equal length and using same
Axle arranges that two end faces of the tubular resonator in the tubular resonator group are respectively in two planes parallel to each other
On, be disposed with thickness fixation in the tubular resonator group between two neighboring tubular resonator with tubular resonator
Coaxial intermediate layer cooling hollow metal circular tube, the quantity of the intermediate layer cooling hollow metal circular tube is N-1, and the cooling is empty
It is cold that heart metal circular tube includes at least one intermediate layer cooling hollow metal circular tube, innermost layer cooling hollow metal circular tube and outermost layer
But hollow metal pipe, each cooling hollow metal circular tube form cooling hollow metal circular tube group, the cooling hollow metal circular tube
It is hollow-core construction between inwall and outer wall, circulating cooling liquid, the cooling hollow gold is connected with the cooling hollow metal circular tube
The surface metal clad base material for belonging to each intermediate layer cooling hollow metal circular tube inwall in pipe group and outer wall is bottom plate
Wiring board, the semiconductor pumped light source of intensive arrangement paster encapsulation, the light of the semiconductor pumped light source project on wiring board
Main way is arranged as radially, and the disposed inboard of innermost layer tubular resonator has innermost layer cold in the tubular resonator group
But hollow metal pipe, the outer wall surface metal clad base material of innermost layer cooling hollow metal circular tube are the wiring board of bottom plate, line
The semiconductor pumped light source of intensive arrangement paster encapsulation, the inner wall surface of innermost layer cooling hollow metal circular tube do not have then on the plate of road
Arrange semiconductor pumped light source, it is cold on the outside of outermost layer tubular resonator to be disposed with outermost layer in the tubular resonator group
But hollow metal pipe, the inner wall surface metal clad base material of outermost layer cooling hollow metal circular tube are the wiring board of bottom plate, line
The semiconductor pumped light source of intensive arrangement paster encapsulation, the outer wall surface of outermost layer cooling hollow metal circular tube do not have then on the plate of road
Arrange semiconductor pumped light source.
Further improvement of the present invention, hollow metal pipe is used in the solid state laser cooling, for ease of arranging output window
With total reflective mirror, the selection of its length is equal to tubular cavity length, the selection of two end face and at least one tubular resonator
Identical end face is coplanar.
Further improvement of the present invention, the solid state laser each two adjacent cooling hollow metal pipe and pipe
Coaxial support ring is embedded between shape resonator, coaxial support ring must be disposed with tubular resonator both ends, each end face
On have a 2N coaxial support ring, claim a coaxial support ring group, there are two coaxial support ring groups two end faces, defeated for ease of arranging
Exit window and total reflective mirror, the end face of coaxial support ring outwardly are arranged as coplanar with tubular resonator both ends difference.
Further improvement of the present invention, the solid state laser can be justified according to tubular resonator, cooling with hollow metal
The length and intensity of pipe, more than one group coaxial support ring group of arrangement can be increased in middle appropriate location, with the coaxial support of group
Ring both ends of the surface difference is coplanar.
Further improvement of the present invention, each coaxial support annulate shaft in the coaxial support ring group of the solid state laser
5 ~ 10mm can be taken as needed to length, and the coaxial support ring with group requires that length is the same, with the coaxial support ring both ends of the surface of group
It is coplanar respectively.
Further improvement of the present invention, each coaxial support ring external diameter of the solid state laser are adjacent equal to its outer ring
Cooling hollow metal pipe or tubular resonator internal diameter, it is adjacent that each coaxial support ring internal diameter is equal to its inner ring
Cooling hollow metal pipe or the external diameter of tubular resonator.
Further improvement of the present invention, the resonant cavity of solid state laser and its annex are using vertical arrangement, the solid
There are total reflective mirror, the supporting construction support resonant cavity of solid state laser and its annex of the total reflective mirror below laser resonant cavity.
Further improvement of the present invention, the thickness of the tubular resonator in the tubular resonator group is 0.05-
0.5mm, it is attached in the tubular clear glass substrate of equal length.
The present invention provides a kind of semiconductor light source pumping multi-resonant chamber solid laser device, including multiple tubular resonance
Chamber, multiple cooling hollow metal pipe, high-brightness light emitting diode or semiconductor laser dot matrix, coaxial support ring group, it is all-trans
Mirror, output window, dc source and control system, for industrial processes and other high-power applications（Such as laser weapon, laser-impact
Strengthen）For field, the solid state laser can obtain bigger continuous power output and pulse power compared with traditional structure,
Its final shaping focuses on the coupling that laser beam is the donut laser beam of multiple tubular resonator outputs, available for big
Multiple application fields such as power laser processing；Further, since be the output of donut laser beam, it is poly- over long distances more than km level
Thermal lensing effect is less than the solid circular laser beam of the traditional structure solid state laser with power in burnt transmitting procedure.
The present invention has following advantage compared with prior art and gas laser；
1st, the present invention contains multiple tubular resonators, and they are multiple independent resonators, through constraining shaping, their output
It is multiple parallel donuts on outbound course, can be by one piece of focus lamp to these concentric circles annular collimated laser beams
Realize and focus on.Each tubular resonator can regard an independent solid state laser as, and the present apparatus focuses on equivalent to one piece
Eyeglass realizes the light beam coupling to multiple independent solid state lasers, and this coupling process is different from fiber coupling or multiple mirrors
The combination coupling of piece, relatively ingenious, succinct, effect is good.
2nd, the present invention uses semiconductor light source pumping, and power technology needed for semiconductor is relatively easy, it might even be possible to noiseless
The solar panel of sound replaces the very big generator car power supply of sound.
3rd, the present invention is adapted to selected tubular resonator knot using the semiconductor light source of the tubular arrangement with cooling device
Structure need, and it is this with cooling device tubular arrangement semiconductor light source can layered arrangement, so be beneficial to raising pump
Pu light source power, system operating temperatures are reduced, improve power output.
4th, the part such as semiconductor light source that multiple tubular resonators of the invention, the tubular with cooling device are arranged is equal
Using vertical coaxially arranged, can so avoid because Action of Gravity Field causes coaxiality deviation.
5th, the present invention includes multiple coaxial support rings, and the same of system associated components is maintained jointly with the supporting construction of total reflective mirror
Axle degree, if suitably being reinforced to device, field movement over long distances is adapted to, disclosure satisfy that association area is often mobile needs
Will.
6th, total reflective mirror of the invention and output window can with multiple tubular resonators, the tubular with cooling device arranges
The part such as semiconductor light source be integrally formed, need not so dimmed after transporting for long-distance and jolting, can immediately
Come into operation.
Brief description of the drawings
Fig. 1 is the multiple tubular cavity resonator structure schematic diagrames one of the present invention；
Fig. 2 is the multiple tubular cavity resonator structure schematic diagrames two of the present invention；
Fig. 3 is cooling hollow metal circular tube schematic diagram in intermediate layer of the present invention；
Fig. 4 is cooling hollow metal circular tube schematic diagram in innermost layer of the present invention；
Fig. 5 is outermost layer cooling hollow metal circular tube schematic diagram of the present invention；
Fig. 6 is prior-art illustration of the present invention；
Illustrate：
1st, tubular resonator group；2nd, intermediate layer cooling hollow metal circular tube；3rd, innermost layer cooling hollow metal circular tube；4th, most
Outer layer cooling hollow metal circular tube；5th, semiconductor pumped light source；6th, cooling liquid inlet pipe；7th, coolant outlet；8th, coaxial branch
Pushing out ring group.
Embodiment
The present invention is described in further detail with embodiment below in conjunction with the accompanying drawings：
The present invention provides a kind of semiconductor light source pumping multi-resonant chamber solid laser device, and the device swashs relative to conventional solid
Light utensil has more preferable resonator radiating effect, beneficial to the power ascension of solid state laser, with traditional structure solid state laser phase
Than bigger continuous power output and pulse power can be obtained, laser welding, laser cutting, laser impact intensified etc. can be used as
The special source of high, precision and frontier manufacture field.
As a kind of specific embodiment of the present invention, the present invention proposes a kind of solid laser device as Figure 1-5, including
Tubular resonator group 1, multiple cooling hollow metal circular tubes, semiconductor pumped light source 5 and coaxial support ring group 8, the pipe
Tubular resonator mean radius in shape resonator group 1 is distributed into arithmetic progression from outside to inside, their equal lengths, in device
Middle use is coaxially arranged, and two end faces difference of these tubular resonators is coplanar, i.e., their two end faces are respectively mutual
In two parallel planes；Certain thickness and tubular resonator is disposed between the two neighboring tubular resonator
Coaxial intermediate layer cooling hollow metal circular tube, one fewer than tubular resonator number of its quantity, multiple intermediate layer coolings are empty
Heart metal circular tube forms intermediate layer cooling hollow metal circular tube group, is hollow knot between cooling hollow metal circular tube inwall and outer wall
Structure, circulating cooling liquid is connected with therebetween, for being layered the tubular resonator group 1 and its pumping system of cooling solid laser；Institute
State the surface metal clad of each cooling hollow metal circular tube inwall and outer wall in the cooling hollow metal circular tube group of intermediate layer
Base material is the wiring board of bottom plate, the semiconductor pumped light source 5 of intensive arrangement paster encapsulation, semiconductor pumped light source 5 on wiring board
Light project Main way be arranged as radially.
The disposed inboard of the innermost layer tubular resonator of solid state laser of the present invention has innermost layer cooling hollow gold
Belong to pipe 3, innermost layer cooling hollow metal circular tube 3 only has outer wall surface and is disposed with pump light source, and does not have then in its inner wall surface
There is arrangement pump light source.
Outermost layer cooling hollow gold is disposed with the outside of the outermost layer tubular resonator of solid state laser of the present invention
Belong to pipe 4, outermost layer cooling hollow metal circular tube 4 only has inner wall surface and is disposed with pump light source, and does not have then in its outer wall surface
There is arrangement pump light source.
Multiple tube walls of tubular resonator 1 of solid state laser of the present invention are very thin, beneficial to resonance cavity radiating.
Solid state laser of the present invention, it can be justified while multiple tube walls of tubular resonator 1 are thinning by increasing
The number of plies of tubular resonator 1 improves power.
Hollow metal pipe is used in solid state laser cooling of the present invention, and its length is equal to tubular cavity length, its
Two end faces and the identical end face of multiple tubular resonators are coplanar.
The present invention is coaxial with being embedded between hollow metal pipe and tubular resonator for the solid state laser cooling
Support ring, multiple coaxial support ring groups are equal into a coaxial support ring group 8, each coaxial support ring external diameter on an end face
The adjacent cooling in outer ring is equal to inner ring with hollow metal pipe or the internal diameter of tubular resonator, each coaxial support ring internal diameter
Adjacent cooling can take 5 ~ 10mm as needed with hollow metal pipe or the external diameter of tubular resonator, its axial length, but
Coaxial support ring with group requires that length is the same, and one group of coaxial support ring is respectively embedded with tubular resonator group both ends, coaxial branch
The end face of pushing out ring outwardly is arranged as coplanar with tubular resonator both ends difference.
The present invention for the solid state laser can according to tubular resonator, cooling hollow metal pipe length and
Intensity, it can increase the one or more groups of coaxial support ring groups 8 of arrangement in middle appropriate location, with the coaxial support ring both ends of group
Face difference is coplanar.
The present invention is to prevent that tubular resonator, cooling hollow metal pipe etc. are same caused by the factors such as Action of Gravity Field
Axle degree changes, tubular resonator and cooling with hollow metal pipe using vertical arrangement, total reflective mirror in lower surface, total reflective mirror
Supporting construction is also the support of whole resonator components.
The above described is only a preferred embodiment of the present invention, it is not the limit for making any other form to the present invention
System, and any modification made according to technical spirit of the invention or equivalent variations, still fall within present invention model claimed
Enclose.
Claims (8)
1. a kind of semiconductor light source pumping multi-resonant chamber solid laser device, including tubular resonator group（1）, cooling hollow
Metal circular tube and semiconductor pumped light source（5）, it is characterised in that：The tubular resonator group（1）There is N number of tubular resonance
Chamber, N are positive integer, and N is more than 2, the tubular resonator group（1）In tubular resonator mean radius from outside to inside into etc.
Difference column distribution and equal length simultaneously use coaxially arranged, the tubular resonator group（1）In tubular resonator two
Individual end face is respectively in two planes parallel to each other, the tubular resonator group（1）In two neighboring tubular resonator
Between be disposed with thickness fixation the intermediate layer cooling hollow metal circular tube coaxial with tubular resonator（2）, the intermediate layer
Cooling hollow metal circular tube（2）Quantity be N-1, the cooling hollow metal circular tube includes at least one intermediate layer cooling hollow
Metal circular tube（2）, innermost layer cooling hollow metal circular tube（3）With outermost layer cooling hollow metal circular tube（4）, each cooling hollow gold
Belong to pipe composition cooling hollow metal circular tube group, be hollow-core construction between the cooling hollow metal circular tube inwall and outer wall, institute
State and circulating cooling liquid is connected with cooling hollow metal circular tube, each intermediate layer cooling in the cooling hollow metal circular tube group
Hollow metal pipe（2）The surface metal clad base material of inwall and outer wall is the wiring board of bottom plate, intensive arrangement patch on wiring board
The semiconductor pumped light source of piece encapsulation（5）, the semiconductor pumped light source（5）Light project Main way be arranged as radially,
The tubular resonator group（1）The disposed inboard of middle innermost layer tubular resonator has innermost layer cooling hollow metal circular tube
（3）, innermost layer cooling hollow metal circular tube（3）Outer wall surface metal clad base material be bottom plate wiring board, it is close on wiring board
The semiconductor pumped light source of collection arrangement paster encapsulation（5）, innermost layer cooling hollow metal circular tube（3）Inner wall surface there is no cloth then
Put semiconductor pumped light source（5）, the tubular resonator group（1）Outermost is disposed with the outside of middle outermost layer tubular resonator
Layer cooling hollow metal circular tube（4）, outermost layer cooling hollow metal circular tube（4）Inner wall surface metal clad base material for bottom plate
Wiring board, the semiconductor pumped light source of intensive arrangement paster encapsulation on wiring board（5）, outermost layer cooling hollow metal circular tube（4）
Outer wall surface then without arranging semiconductor pumped light source（5）.
A kind of 2. solid laser device according to claim 1, it is characterised in that：Cooled down in the solid state laser empty
The length selection of heart metal circular tube is equal to tubular cavity length, two end faces selection of cooling hollow metal circular tube and at least
The identical end face of 1 tubular resonator is coplanar.
A kind of 3. semiconductor light source pumping multi-resonant chamber solid laser device according to claim 1, it is characterised in that：
The adjacent cooling of the solid state laser each two with being embedded with coaxial support ring between hollow metal pipe and tubular resonator,
Coaxial support ring must be disposed with tubular resonator both ends, there is 2N coaxial support ring on each end face, claims one together
Axle supports ring group（8）, there are two coaxial support ring groups two end faces（8）, the end face of coaxial support ring outwardly is arranged as and pipe
Shape resonator both ends difference is coplanar.
A kind of 4. semiconductor light source pumping multi-resonant chamber solid laser device according to claim 3, it is characterised in that：
The solid state laser can be according to the length and intensity of tubular resonator, cooling hollow metal pipe, in middle appropriate position
More than one group coaxial support ring group of arrangement can be increased by putting（8）, it is coplanar with the coaxial support ring both ends of the surface difference organized.
5. a kind of semiconductor light source pumping multi-resonant chamber solid laser device according to claim 3 and 4, its feature exist
In：Each coaxial support ring axial length in the coaxial support ring group of the solid state laser takes 5 ~ 10mm as needed,
Coaxial support ring with group requires that length is the same, and the coaxial support ring both ends of the surface difference with group is coplanar.
A kind of 6. semiconductor light source pumping multi-resonant chamber solid laser device according to claim 1, it is characterised in that：
Each coaxial support ring external diameter of the solid state laser is equal to adjacent cooling hollow metal pipe or the pipe in its outer ring
The internal diameter of shape resonator, each coaxial support ring internal diameter are equal to adjacent cooling hollow metal pipe or the tubular of its inner ring
The external diameter of resonator.
A kind of 7. semiconductor light source pumping multi-resonant chamber solid laser device according to claim 1, it is characterised in that：
The resonant cavity of solid state laser and its annex arrange there is total reflective mirror below the resonant cavity of solid state laser using vertical,
The supporting construction support resonant cavity of solid state laser and its annex of the total reflective mirror.
8. a kind of semiconductor light source pumping multi-resonant chamber solid laser device according to claim 1, its feature exist
In：, the thickness of the tubular resonator in the tubular resonator group is 0.05-0.5mm.
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| CN201710997365.XA CN107565353B (en) | 2017-10-17 | 2017-10-17 | Semiconductor light source pumping multi-resonant cavity solid laser device |
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| CN107565353B CN107565353B (en) | 2023-04-25 |
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| US20070133643A1 (en) * | 2005-12-12 | 2007-06-14 | Seguin Herb J J | Effective excitation, optical energy extraction and beamlet stacking in a multi-channel radial array laser system |
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| CN207530298U (en) * | 2017-10-17 | 2018-06-22 | 金陵科技学院 | A kind of semiconductor light source pumps multi-resonant chamber solid laser device |
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| US20020185701A1 (en) * | 2001-06-07 | 2002-12-12 | Walling John Curtis | Narrow spectral bandwidth tunable pulsed solid-state laser system |
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