CN2899202Y - Pump solid laser of large-power light - Google Patents

Pump solid laser of large-power light Download PDF

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Publication number
CN2899202Y
CN2899202Y CN 200620113290 CN200620113290U CN2899202Y CN 2899202 Y CN2899202 Y CN 2899202Y CN 200620113290 CN200620113290 CN 200620113290 CN 200620113290 U CN200620113290 U CN 200620113290U CN 2899202 Y CN2899202 Y CN 2899202Y
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CN
China
Prior art keywords
laser
cavity
high power
pump
light
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Expired - Fee Related
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CN 200620113290
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Chinese (zh)
Inventor
李强
王志敏
于振声
左铁钏
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Beijing University of Technology
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Beijing University of Technology
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Abstract

The utility model discloses a pump solid laser of large-power light, in which the resonance cavity comprise a whole reflector and a partly reflection coupled output reflector, a laser cavity is a china diffusive reflection cavity of whole cavity water cooling double light pump, which comprises a light gathering cavity, a laser crystal, a pump light and a filtering light pipe. The cavity center of the resonance cavity is provided with the laser crystal, the external sheath is provided with the filtering light pipe. Two pump lights are arranged on the symmetric place on two sides. The light gathering cavity, the laser crystal, the pump light and the filtering light pipe are fastened in an organic glass box and is soaked in the circular cooling water with an organic glass box cover on the top, and which is a closed system. The flow region of the circular cooling water is connected with the laser circular cooling system by a water-in port and a water-out port. The laser cavity is externally connected with two diaphragms. The advantages are of high power output, high quality beam of light, wide stable region, wide adjustable range, the stays always in the output reflector face, favorable of optical fibre transmission.

Description

High power pump high power solid laser
Technical field
The utility model relates to a kind of solid state laser, particularly a kind of high light beam quality high power pump high power solid laser.
Background technology
The laser processing range of application is very extensive, obtains to use comparatively widely in industries such as machinery, electronics, automobile, Aero-Space, iron and steel, shipbuilding, military projects at present, and occupy increasing proportion in gross national product.Great-power solid laser has the advantage that high power is exported, wavelength is short, the metal absorptivity is high, is easy to Optical Fiber Transmission, has not only improved the flexibility of system, can be assembled into online flexible manufacturing system with the industrial robot coupling simultaneously and realizes flexibility processing.Lamp pumped great-power solid laser is to be proved to be reliable laser in the present commercial Application, and with diode pumping great-power solid laser, slab laser, that fiber laser is compared price is relatively low.
The lamp pumped great-power solid laser commercial Application requires under the condition that guarantees high light beam quality, high power laser light output.For the laser of lamp pumping, because the spectrum broad of pumping lamp emission, the power conversion in the non-absorption spectrum of pump light district is a heat; The quantum efficiency of fluorescence process is less than 1, and the part photon energy is lost to and is converted to heat in the parent lattice; The energy difference of pumping band and fluorescence energy inter-stage is lost to by radiationless transition and is converted to heat in the parent lattice, and the strong thermal lensing effect that causes in laser bar can cause the reduction of output beam quality, can cause the reduction of power output when serious.Improve laser output power and beam quality, all be summed up as the laser overall efficiency, because the efficient of the spectrum of pumping lamp and efficient, laser pump cavity, the efficient of laser crystal are not high enough, and factor such as cavity resonator structure, thereby make the electro-optical efficiency of laser not high, have only 3%, and power output is restricted, single chamber power output has only about 400W.
Summary of the invention
The purpose of this utility model is that by a kind of high power pump high power solid laser is provided, the cavity resonator structure that changes existing solid state laser is unreasonable, thereby makes the electro-optical efficiency of laser not high, the problem that power output is restricted.
The utility model is to adopt following technological means to realize.
A kind of high power pump high power solid laser, its resonant cavity are that total reflective mirror and partial reflection output coupling mirror constitute, and laser cavity is the double lamp pumped ceramic diffuse-reflective cavity of full chamber water-cooled, is made up of laser pump cavity, laser crystal, pumping lamp, optical filtering pipe; Laser crystal is placed at the cavity center of described resonant cavity; Its outer pipe that filters that is arranged with; The bilateral symmetry position is placed with two pumping lamps; Above-mentioned laser pump cavity, laser crystal, pumping lamp, optical filtering Guan Jun are fixed on the polymethyl methacrylate box, are soaked in the recirculated cooling water, add a cover the polymethyl methacrylate lid above, and the polymethyl methacrylate box is a closed system; The recirculated cooling water zone of flowing through is connected with the laser circulating cooling system by water inlet, delivery port; Two diaphragms of the outer connection of laser cavity.
Aforesaid laser pump cavity is to be made of two identical aluminium oxide ceramics bodies.
Aforesaid surface of ceramic body is mixed the glaze layer of samarium oxide for plating.
Aforesaid ceramic body is the hard-pressed bale structure of distortion.
Aforesaid resonant cavity be the symmetrical parallel planar structure.
Aforesaid pumping lamp adopts krypton lamp.
Aforesaid laser crystal adopts the Nd:YAG crystal, and the doping content scope of Nd:YAG crystal is 0.8-1.0at%.
The coatings of aforesaid laser crystal is through polishing.
The diameter of the diameter of aforesaid laser crystal (9) and aforesaid two pumping lamps (8) is close.
The utility model compared with prior art has remarkable advantages and beneficial effect.
A kind of high power pump high power solid laser of the utility model, owing to adopted above-described optimal design, so when work, the pump light that two pumping lamps send constitutes efficient diffuse reflection through laser pump cavity, being radiated at laser crystal equably through the pipe that filters again is on the Nd:YAG rod, make laser crystal can produce effectively, absorb uniformly, form population inversion, vibrate in the resonant cavity of total reflective mirror and partial reflection output coupling mirror formation, the laser of high-power high light beam quality is exported by the partial reflection output coupling mirror.Cooling water flows through along pumping lamp, optical filtering pipe through the zone, and flow velocity cools off greatly and equably, can obtain high power output; The beam quality height; Wide stability region, adjustable extent is big; With a tight waist always at output minute surface place, help Optical Fiber Transmission.
Description of drawings
Fig. 1. the principle assumption diagram of laser;
Fig. 2. the theory structure sectional view of laser cavity;
Fig. 3. power supply pump power and output laser power;
Fig. 4. measure the power density diagram of output laser beam.
Embodiment
Below in conjunction with accompanying drawing specific embodiment of the utility model is illustrated:
See also shown in Figure 1ly, be the theory structure of this laser, its resonant cavity is that total reflective mirror 1 and partial reflection output coupling mirror 2 constitute; The structure of laser cavity 4 is the complete double lamp pumped ceramic diffuse-reflective cavity of chamber water-cooled as shown in Figure 2, is made up of laser pump cavity 7, laser crystal 9, pumping lamp 8, the pipe 10 that filters; Laser pump cavity 7 is the high reflectance diffuse reflecting pump cavities that are made of two identical aluminium oxide ceramics bodies; It is the Nd:YAG rod that laser crystal 9 is placed at the cavity center; Its outer pipe 10 that filters that is with; Bilateral symmetry is placed two pumping lamps 8; Laser pump cavity 7, laser crystal 9, pumping lamp 8, the pipe 10 that filters all are fixed in the polymethyl methacrylate box 13, be soaked in the recirculated cooling water, the polymethyl methacrylate box adds a cover 12, make the polymethyl methacrylate box become closed system, recirculated cooling water flow through the zone 11, be connected with the laser circulating cooling system by water inlet 5, delivery port 6; Two diaphragms 3 of laser cavity 4 outer connections.During work, the pump light that two pumping lamps 8 send constitutes efficient diffuse reflection through laser pump cavity 7, being radiated at laser crystal 9 equably through the pipe 10 that filters again is on the Nd:YAG rod, make laser crystal 9 can produce effectively, absorb uniformly, form population inversion, vibrate in the resonant cavity of total reflective mirror 1 and partial reflection output coupling mirror 2 formations, the laser of high-power high light beam quality is by 2 outputs of partial reflection output coupling mirror.Cooling water flows through along pumping lamp 8, the pipe 10 that filters through zone 11, and flow velocity cools off greatly and equably, and cooling water is provided by the cooling recirculation system of outside.
The behavioral illustrations of laser component is as follows: laser pump cavity 7 is the high reflectance diffuse reflecting pump cavities that are made of two identical aluminium oxide ceramics bodies, to realize that to the laser crystal 9 that is positioned over the cavity center be Nd:YAG rod uniform pumping, the glaze layer of samarium oxide is mixed in the housing surface plating, improves reflectivity; Two pumping lamps 8 are driven by Laser Power Devices, laser crystal 9 is light pumping after laser pump cavity 7 diffuse reflections that the Nd:YAG rod is sent by pumping lamp 8, laser crystal 9 is that diameter and the symmetry of the Nd:YAG rod diameter of placing two pumping lamps 8 is close, and laser crystal 9 is that the doping content of Nd:YAG rod and power parameter, the spectrum parameter of pumping lamp 8 are complementary; Laser crystal 9 is that the filter glass pipe 10 filtering wavelength of Nd:YAG rod overcoat are longer than the infrared light of 1064nm and less than the ultraviolet light of 310nm; The length of laser pump cavity 7, laser crystal 9, pumping lamp 8, the pipe 10 that filters is complementary.Resonant cavity adopts the symmetrical parallel planar cavity, and its advantage is: big mode volume can obtain high power output; The beam quality height; Wide stability region, adjustable extent is big; With a tight waist always at output minute surface place, help Optical Fiber Transmission.
Laser output power and beam quality all are summed up as efficiency of laser.The efficient of lamp LD pumped YAG lasers relates to the spectrum and the efficient of pumping lamp, the efficient of laser pump cavity, factors such as the efficient resonant cavity structure of laser crystal, in the structural design of laser, these factors of Laser Devices have been taken all factors into consideration, specifically taked following measure: the shape of (1) laser pump cavity, structure and material is through optimal design, laser pump cavity adopts ceramic diffuse reflector, special glaze layer on the surface of ceramic body, ceramic body to the reflectivity of gain media absorption bands greater than 97%, the gain media absorption bands that shortwave fluorescence below the 400nm is transformed into, shaped design had both been considered high pumping efficiency, consider uniformity again, adopt the hard-pressed bale structure of distortion the gain media pumping.(2) pumping lamp adopts krypton lamp, the spectrum parameter of pumping lamp and the material of fluorescent tube are through optimizing, the gas composition that is krypton lamp is gentle at all according to maximum pumping current and luminescent spectrum optimization, and consideration luminous efficiency, the fluorescent tube of krypton lamp adopts the quartz glass tube of mixing the cerium special material, to the UV Absorption less than 310nm.(3) parameter of laser crystal and plated film are through optimizing, and laser crystal adopts the Nd:YAG crystal, and the doping content scope of Nd:YAG crystal is 0.8-1.0at%, and the coatings of laser bar is through follow-up polishing, to guarantee high-power high damage threshold.(4) cooling of laser pump cavity is through optimizing.(5) adopt the pressure type of cooling for improvement because of the speculum thermal deformation speculum is forced cooling.
Laser pump cavity is made of two identical aluminium oxide ceramic bodies.Aluminium oxide ceramics body size 160mm * 50mm * 16mm, appearance is smooth, and the glaze layer of samarium oxide is mixed in the surface plating.Corner angle are R1mm-R1.5mm, and geomery and position of related features are 0.1mm.Laser crystal Nd:YAG is of a size of φ 9mm * 155mm, and pumping lamp is the krypton lamp of φ 8mm * 150mm, adopts double lamp pumpedly, and the Maximum pumping of power supply is 16kW.The optical filtering pipe is of a size of φ 15mm * 140mm.Resonant cavity adopts the symmetrical parallel planar cavity.
Adopt the optimum transmission outgoing mirror, measure the power of output laser, the power output of laser is with the increase of pump power near-linear, when the maximum power supply pump power of 16kW, and power output 647W, power supply pump power and output laser power such as Fig. 3.Adopt high power light beam optical quality diagnostic equipment, the power density of output laser beam is measured, as Fig. 4.Because girdling the waist of laser output laser at the outgoing mirror place, use the lens focus outgoing laser beam, adopt " over " to measure the output laser beam quality, promptly girdling the waist with high power light beam optical quality diagnostic equipment measurement lens focus comprises the radius and the respective distance of laser intensity 86% with the focal length place, the beam quality of trying to achieve outgoing laser beam is 22mmmrad.Consider overall electro-optical efficiency.The maximum power output of measurement under the high light beam quality condition and the electrical power of injection, the overall electro-optical efficiency of trying to achieve laser is 4%.
It should be noted that at last: above embodiment only in order to the explanation the utility model and and the described technical scheme of unrestricted the utility model; Therefore, although this specification has been described in detail the utility model with reference to each above-mentioned embodiment,, those of ordinary skill in the art should be appreciated that still and can make amendment or be equal to replacement the utility model; And all do not break away from the technical scheme and the improvement thereof of the spirit and scope of utility model, and it all should be encompassed in the middle of the claim scope of the present invention.

Claims (6)

1, a kind of high power pump high power solid laser, its resonant cavity is that total reflective mirror (1) and partial reflection output coupling mirror (2) constitute, laser cavity (4) is the double lamp pumped ceramic diffuse-reflective cavity of full chamber water-cooled, is made up of laser pump cavity (7), laser crystal (9), pumping lamp (8), the pipe (10) that filters; It is characterized in that:
Laser crystal (9) is placed at the cavity center of described resonant cavity; Its outer pipe (10) that filters that is arranged with; The bilateral symmetry position is placed with two pumping lamps (8);
Above-mentioned laser pump cavity (7), laser crystal (9), pumping lamp (8), the pipe (10) that filters all are fixed in the polymethyl methacrylate box (13), are soaked in the recirculated cooling water, add a cover polymethyl methacrylate lid (12) above, and the polymethyl methacrylate box is a closed system; The recirculated cooling water zone (11) of flowing through is connected with the laser circulating cooling system by water inlet (5), delivery port (6); Outer two diaphragms (3) that connect of laser cavity (4).
2, high power pump high power solid laser according to claim 1 is characterized in that: described laser pump cavity (7) is to be made of two identical shaped aluminium oxide ceramics bodies.
3, high power pump high power solid laser according to claim 1 is characterized in that: described ceramic body is the hard-pressed bale structure of distortion.
4, high power pump high power solid laser according to claim 1 is characterized in that: described resonant cavity for the symmetrical parallel planar structure.
5, high power pump high power solid laser according to claim 1 is characterized in that: described pumping lamp (8) adopts krypton lamp.
6, high power pump high power solid laser according to claim 1 is characterized in that: the diameter of the diameter of described laser crystal (9) and aforesaid two pumping lamps (8) is close.
CN 200620113290 2006-04-29 2006-04-29 Pump solid laser of large-power light Expired - Fee Related CN2899202Y (en)

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Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109888606A (en) * 2019-03-25 2019-06-14 中国科学院理化技术研究所 A kind of slab laser module based on diffuse-reflective cavity pumping
CN110323658A (en) * 2018-03-31 2019-10-11 深圳市创鑫激光股份有限公司 Laser export head and laser

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110323658A (en) * 2018-03-31 2019-10-11 深圳市创鑫激光股份有限公司 Laser export head and laser
CN110323658B (en) * 2018-03-31 2021-08-24 深圳市创鑫激光股份有限公司 Laser output head and laser
CN109888606A (en) * 2019-03-25 2019-06-14 中国科学院理化技术研究所 A kind of slab laser module based on diffuse-reflective cavity pumping

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Granted publication date: 20070509

Termination date: 20100429