CN207487557U - Gas distributor aperture inspection man fills - Google Patents
Gas distributor aperture inspection man fills Download PDFInfo
- Publication number
- CN207487557U CN207487557U CN201721606246.9U CN201721606246U CN207487557U CN 207487557 U CN207487557 U CN 207487557U CN 201721606246 U CN201721606246 U CN 201721606246U CN 207487557 U CN207487557 U CN 207487557U
- Authority
- CN
- China
- Prior art keywords
- gas distributor
- positioning plate
- inspection
- positioning
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Measuring Volume Flow (AREA)
Abstract
The utility model discloses gas distributor aperture inspection man dress, including positioning plate and the inspection upper plate being connected on positioning plate；Position is provided with opening among the positioning plate；Several are provided on the inspection upper plate for placing the through-hole of gas distributor；The area of the opening is more than the area of through-hole；Pass through positioning plate connecting detection equipment, further upper plate will be examined to be located in positioning plate by positioning pin, fastening is bolted again, gas distributor is further installed on through-hole, be detected, not only ensure that the precision of detection, and can multiple gas distributors be carried out at the same time detection, easy to operate, detection efficiency is high.
Description
Technical field
The gas distributor that the utility model is related to be used in the distribution device in gas-fluid for the treatment of reactor by semiconductor technological element
Aperture inspection technology field, in particular to one kind be used for semiconductor arts piece transmit gas chemistry substance, to lead to
Chemical vapor deposition atomic layer deposition or the like is crossed, the gas of the film of depositing homogeneous or thin layer on semiconductor arts piece surface
Examine tooling in the aperture of body distributor.
Background technology
Chemical vapor deposition atomic layer deposition is that the committed step of thin-film device, cardinal principle are prepared in semiconductor technology
It is that traditional chemical vapor depsotition equipment comprising a chemical substance gas distributor, participates in the chemical substance reacted from gas
It is overflowed in body distributor, eventually enters into conversion zone and be deposited on semiconductor arts piece；Component is uniform, thickness is uniform, interface is steep
High and steep is the basic demand of film growth, and the uniformity for improving film growth is that the core of sustained improvement chemical vapor depsotition equipment is appointed
Business, it is to improve the main method of uniformity to improve the processing technology of gas distributor and structure；Lead in the structure of gas distributor
Often containing hundreds of or even thousands of isodiametric apertures, the fine difference in each aperture forms deposit thickness uniformity in processing
It directly affects, product completion of processing must use the pore-size distribution in projecting apparatus detection gas distributor aperture, and it is uneven to reject aperture
Even product ensures the quality of shipment product；Traditional inspection technique is piecemeal to examine, and every is verified, and needs people
Work operation continues to examine next, can not realize unattended inspection, occupy a large amount of manpowers.
Invention content
The utility model aim is to provide a kind of easy to use, efficient, high gas distributor apertures of accuracy of detection
Diameter examines tooling, solves more than technical problem.
In order to realize above-mentioned technical purpose, reach above-mentioned technology requirement, technical solution is used by the utility model：
Gas distributor aperture inspection man fills, it is characterized in that：Including positioning plate and the inspection upper plate being connected on positioning plate；
Position is provided with opening among the positioning plate；Several are provided on the inspection upper plate for placing gas distribution
The through-hole of device；The area of the opening is more than the area of through-hole.
As preferred technical solution：The positioning plate is quadrilateral structure, is bolted in detection device
On.
As preferred technical solution：The inspection upper plate is identical with the shape of positioning plate.
As preferred technical solution：Pass through the first positioning finger setting, spiral shell between the positioning plate and inspection upper plate
It tethers and connects.
As preferred technical solution：The number of openings is 9.
As preferred technical solution：The gas distributor coordinates with through-hole, and is located in inspection by the second positioning pin
It tests on upper plate.
The beneficial effects of the utility model are：Gas distributor aperture inspection man fills, compared with traditional structure：It is fixed to be provided with
Position bottom plate and the inspection upper plate being connected on positioning plate；Position is provided with opening among the positioning plate；Described
It examines and several is provided on upper plate for placing the through-hole of gas distributor；The area of the opening is more than the face of through-hole
Product；In actual use, by positioning plate connecting detection equipment, further upper plate will be examined to be located in positioning bottom by positioning pin
Plate, then fastening is bolted, gas distributor further on through-hole is installed, is detected, not only ensure that detection
Precision, and can multiple gas distributors be carried out at the same time detection, easy to operate, detection efficiency is high.
Description of the drawings
Fig. 1 is the utility model three-dimensional explosive view；
Fig. 2 is the utility model assembling figure；
In figure：1. positioning plate, 2. examine upper plates, 3. openings, 4. through-holes, 5. first positioning pins, the 6, second positioning pin,
101. gas distributor.
Specific embodiment
The utility model is further described below in conjunction with the accompanying drawings；
In the accompanying drawings：Gas distributor aperture inspection man fills, and including positioning plate 1 and is connected on positioning plate 1
Examine upper plate 2；The positioning plate 1 is quadrilateral structure, is bolted on detection device；：The positioning bottom
It is positioned, is bolted by the first positioning pin 5 between plate 1 and inspection upper plate 2；The 1 intermediate position of positioning plate is provided with
Opening 3；Several are provided on the inspection upper plate 2 for placing the through-hole 4 of gas distributor 101；The opening 3
Area is more than the area of through-hole 4；In actual use, by 1 connecting detection equipment of positioning plate, further upper plate 2 will be examined to lead to
It crosses the first positioning pin 5 and is located in positioning plate 1, then fastening is bolted, gas distributor further is installed on through-hole 4
101, be detected, not only ensure that the precision of detection, and can multiple gas distributors 101 be carried out at the same time detection, operate
Convenient, detection efficiency is high.
In Fig. 1, Fig. 2：The inspection upper plate 2 is identical with the shape of positioning plate 1, convenient for controlling size, positioning peace
Dress, and it is beautiful.
In Fig. 1, Fig. 2：4 quantity of through-hole is 9, and multiple gas distributors 101 are carried out at the same time detection, improve
The efficiency of detection.
The specific implementation of the utility model：Being made of aluminum alloy material has certain thickness, length and width size and projecting apparatus row
Journey is suitable, does not influence the positioning plate 1 of light transmission；Four angles design counter sink of positioning plate 1, for by positioning plate 1
It is fixed on projecting apparatus workbench；Hole and the threaded hole of the first positioning pin 5 are processed on positioning plate 1, is examined convenient for Fast Installation
Upper plate 2；
First positioning pin 5 is terraced structure, it is ensured that examines the quick positioning of upper plate 2 and positioning plate 1
Installation；
Second positioning pin 6 so that gas distributor 101 realizes that primary inspection is more with upper plate 2 is examined quickly to connect
The purpose of a 101 pore-size distribution of gas distributor.
Above-described embodiment is only intended to clearly illustrate the description that the utility model is made, and not to the limit of embodiment
It is fixed, to those of ordinary skill in the art, other various forms of variations can also be made on the basis of the above description
Or change, there is no necessity and possibility to exhaust all the enbodiments, and the obvious variation thus amplified out
Or among changing still in the scope of protection of the utility model.
Claims (6)
1. gas distributor aperture inspection man fills, it is characterized in that：Including positioning plate（1）And it is connected to positioning plate（1）On
Inspection upper plate（2）；The positioning plate（1）Intermediate position is provided with opening（3）；The inspection upper plate（2）Upper setting
There are several for placing gas distributor（101）Through-hole（4）；The opening（3）Area be more than through-hole（4）Face
Product.
2. gas distributor aperture inspection man dress according to claim 1, it is characterized in that：The positioning plate（1）For
Quadrilateral structure is bolted on detection device.
3. gas distributor aperture inspection man dress according to claim 1, it is characterized in that：The inspection upper plate（2）With
Positioning plate（1）Shape it is identical.
4. gas distributor aperture inspection man dress according to claim 1, it is characterized in that：The positioning plate（1）With
Examine upper plate（2）Between pass through the first positioning pin（5）Positioning, is bolted.
5. gas distributor aperture inspection man dress according to claim 1, it is characterized in that：The through-hole（4）Quantity is 9
It is a.
6. gas distributor aperture inspection man dress according to claim 1, it is characterized in that：The gas distributor
（101）With through-hole（4）Cooperation, and by the second positioning pin（6）It is located in inspection upper plate（2）On.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721606246.9U CN207487557U (en) | 2017-11-27 | 2017-11-27 | Gas distributor aperture inspection man fills |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721606246.9U CN207487557U (en) | 2017-11-27 | 2017-11-27 | Gas distributor aperture inspection man fills |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207487557U true CN207487557U (en) | 2018-06-12 |
Family
ID=62471519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721606246.9U Active CN207487557U (en) | 2017-11-27 | 2017-11-27 | Gas distributor aperture inspection man fills |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207487557U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107966088A (en) * | 2017-11-27 | 2018-04-27 | 靖江先锋半导体科技有限公司 | A kind of gas distributor aperture inspection man dress |
-
2017
- 2017-11-27 CN CN201721606246.9U patent/CN207487557U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107966088A (en) * | 2017-11-27 | 2018-04-27 | 靖江先锋半导体科技有限公司 | A kind of gas distributor aperture inspection man dress |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20140273497A1 (en) | Wet Processing Systems and Methods with Replenishment | |
| CN106245078B (en) | Device and method for adjusting the azimuth uniformity in plating | |
| US20050109460A1 (en) | Adjustable gas distribution system | |
| US20150176124A1 (en) | Methods for Rapid Generation of ALD Saturation Curves Using Segmented Spatial ALD | |
| CN207487557U (en) | Gas distributor aperture inspection man fills | |
| TWI834486B (en) | Removing bubbles from plating cells | |
| Lossen et al. | Pattern transfer printing (PTPTM) for c-Si solar cell metallization | |
| TW201421409A (en) | System and method for manufacturing semiconductor | |
| US8220502B1 (en) | Measuring volume of a liquid dispensed into a vessel | |
| Lee et al. | Application of a CFD tool in designing a fountain plating cell for uniform bump plating of semiconductor wafers | |
| US9223319B2 (en) | High dilution ratio by successively preparing and diluting chemicals | |
| US20120148742A1 (en) | Combinatorial site-isolated deposition of thin films from a liquid source | |
| TWI304185B (en) | A dispatch integration method for semiconductor | |
| CN107966088A (en) | A kind of gas distributor aperture inspection man dress | |
| CN216348520U (en) | Gas distributor flatness inspection tool and combined inspection tool | |
| ITUD20090042A1 (en) | PINZA DI BERNOULLI | |
| CN104103482B (en) | Wafer process cavity | |
| DE112011105584T5 (en) | Plasma deposition apparatus and plasma deposition method | |
| US11566329B2 (en) | Device for electroless metallization of a target surface of at least one workpiece | |
| CN106756894A (en) | A kind of apparatus for plasma chemical vapor deposition | |
| CN106480432A (en) | The apparatus for plasma chemical vapor deposition that gas component is automatically controlled | |
| Lee et al. | A simulation study on capacity planning in hybrid flowshops for maximizing throughput under a budget constraint | |
| CN207498457U (en) | A kind of coating apparatus that can improve cutting tool coating thickness evenness | |
| CN221344694U (en) | Device for rapidly inflating and breaking vacuum chamber | |
| Bluck et al. | Process and productivity results from a carrier-based linear transport PVD system for RDL seed layer deposition in fan-out packaging applications |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 214500 No. 195, Xingang Avenue, Jingjiang Economic Development Zone, Taizhou City, Jiangsu Province Patentee after: Jiangsu Xianfeng Precision Technology Co.,Ltd. Address before: 214500 No.8 Deyu Road, Chengnan Park, Jingjiang City, Taizhou City, Jiangsu Province Patentee before: JINGJIANG XIANFENG SEMICONDUCTOR TECHNOLOGY CO.,LTD. |