CN207498457U - A kind of coating apparatus that can improve cutting tool coating thickness evenness - Google Patents
A kind of coating apparatus that can improve cutting tool coating thickness evenness Download PDFInfo
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- CN207498457U CN207498457U CN201721593838.1U CN201721593838U CN207498457U CN 207498457 U CN207498457 U CN 207498457U CN 201721593838 U CN201721593838 U CN 201721593838U CN 207498457 U CN207498457 U CN 207498457U
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- magnet
- coating
- cutting tool
- improve cutting
- thickness evenness
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Abstract
A kind of coating apparatus that can improve cutting tool coating thickness evenness, the vacuum system being connect including coating chamber and with the coating chamber, cathode arc source is equipped in coating chamber, the bottom of the coating chamber is equipped with rotating platform, and the rotating platform is equipped with several particle buildup devices；The particle buildup device includes bar shaped pillar, and the bar shaped pillar is uniformly arranged several grooves for being useful for installation magnet from top to bottom.
Description
Technical field
The utility model is related to vacuum coating equipment more particularly to a kind of dresses for cutting tool surface hard plated film
It puts.
Background technology
Chemical deposition or physical vapour deposition (PVD) are used to hard alloy or ceramic tool surface in the prior art
Method carries out various hard coat plated films, to improve the wearability of cutting tool.Physical vaporous deposition due to its have environmental protection,
Harmless, the features such as temperature requirement is low and be widely used, wherein application it is more be multi-arc ion coating and sputter coating.
Large capacity equipment and low capacity equipment two ways may be used to realize in multi-arc ion coating and sputter coating technology.
Generally using 12 arc sources or 16 arc sources etc., large capacity equipment is being set large capacity equipment since arc source
It can be evenly distributed for interior, so as to make the layer thickness uniformity of deposition very high, same stove cutter, the coating layer thickness being deposited
Difference is even higher up to 0.3-0.5 μm, this causes the precision that cutting tool is processed in cutting to be not easy to ensure, and for sword
The especially sharp cutter of mouth, this thickness difference may cause internal stress excessively to be concentrated and coating shedding even cutting edge crumbles, from
And generate scrap.
Low capacity physical vapour deposition (PVD) is standby to have the advantages of convenient and efficient, consumption manpower and materials are less, but low capacity is set
Standby generally to use two arc sources or three arc sources, since arc source is few, distribution is not very uniformly, so as to the painting of deposition
Layer thickness is nor very uniformly.
Therefore, it is necessary to carry out improvement further to existing technology, so as to fulfill under the premise of skinny device, pass through
The method of some devices is set to improve the uniformity of cutter coat thickness.It is equal that film improves by planet pivoted frame in Ye You enterprises
The device of even property, however this device only ensure that through upward thickness evenness, if electric arc source position sum number amount does not change,
This device cannot ensure the uniformity of thickness in broadwise.
Utility model content
For case above, the utility model provides a kind of plated film dress that can improve cutting tool coating thickness evenness
It puts, after the device, the uniformity of coating layer thickness is guaranteed, and coating adhesion also increases.
It is adopted the following technical scheme that：
A kind of coating apparatus that can improve cutting tool coating thickness evenness, including coating chamber and with the coating chamber
The vacuum system of connection, coating chamber is interior to be equipped with cathode arc source, and the bottom of the coating chamber is equipped with rotating platform, the rotary flat
Several particle buildup devices are uniformly distributed on platform；The particle buildup device includes bar shaped pillar, and the bar shaped pillar is from upper
Several grooves for being useful for installation magnet are uniformly arranged under.
The outer surface of the magnet is concordant with the outer surface holding of the bar shaped pillar.
The midpoint of two blocks of magnet of magnet or centre among the bar shaped pillar is with cathode arc source in same water
In plane.
The magnet includes upper magnet and lower magnet, and upper magnet is entrenched in the groove on bar shaped pillar top, lower part
Magnet is entrenched in the groove of bar shaped pillar bottom end, and the upper and lower part magnet strength is consistent.
Centre position setting middle part magnet between the upper and lower part magnet, the magnet strength of the middle part magnet
It is lower than the magnet strength of upper and lower part magnet.
The upper, middle and lower portion is all the magnet of activity, can simply take down, can simply enclose.
With reference to test data table, preferred scheme is：The magnet strength of the upper and lower part magnet be 20 Gausses, institute
It is 10 Gausses to state middle part magnet strength.
The bar shaped pillar is made of ferromagnetic metalloid.
The advantageous effect reached of the utility model：The magnetic field generated by magnet, to that will be deposited on cutting tool
Near careless and sloppy particle, generate the effect of aggregation, so as to deposit to the number of particles on cutter than be not provided with magnet than
It is more, thickness is caused to increase；Simultaneously because there is particle in magnetic field of short duration acceleration, particle can be made to be deposited with large energy
Onto cutter, faint corrasion is equivalent to, helps to enhance the adhesive force of coating.
Description of the drawings
Fig. 1 is the schematic diagram of coating apparatus.
Fig. 2 is the rotation in the coating apparatus for improved in one embodiment of the utility model cutting tool coating thickness evenness
The schematic diagram of platform.
Fig. 3 is the grain in the coating apparatus for can be improved in one embodiment of the utility model cutting tool coating thickness evenness
The structure diagram of sub- aggregation apparatus.
Fig. 4 is the sectional view of the face coat of cutting tool in one embodiment of the utility model.
Fig. 5 is schematic diagram after the spherical surface of the face coat of cutting tool in one embodiment of the utility model is ground.
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of making the creative labor
All other embodiments obtained shall fall within the protection scope of the present invention.
Fig. 1 is the schematic diagram of coating apparatus, for making the device of the film on cutting tool surface, including coating chamber 1, plating
Film room 1 is connected with the vacuum system 110 for coating chamber to be vacuumized, and the bottom of coating chamber 1 is equipped with rotating platform 101, rotation
Particle buildup device 102 on platform 101 is set, cutting tool, the rotating platform 101 are fixed on the particle buildup device 102
The cutting tool is driven to rotate.
Attached drawing 2, it is illustrated that the view to look down from coating chamber top, particle buildup device 102 are fixed on rotating platform 101
On, cutting tool is fixed on particle buildup device 102, and rotating platform 101 drives particle buildup device 102 to rotate, so as to make
Cutter is through upward uniform coating thickness.
The particle buildup device includes bar shaped pillar, and the bar shaped pillar is uniformly arranged from top to bottom to be useful for installing
Several grooves of magnet；The outer surface of the magnet is concordant with the outer surface holding of the bar shaped pillar；The bar shaped
Pillar is made of ferromagnetic metalloid.
As shown in Figure 3,102 be particle buildup device, and 101 be turntable, and 203 are mounted on for upper magnet on corresponding
On portion's groove 103,205 are mounted on for middle part magnet in corresponding central slot 104,207 for lower magnet be mounted on it is corresponding under
On portion's groove 105, magnet width and the centre strut width fits at three positions, magnet are fixed.204th, 206,208 be to implement
Square blade used in example, respectively it is corresponding be placed in upper magnet 203, middle part magnet 205, lower magnet 207 illustrate it is corresponding
Position.209 be cathode arc source, and middle part magnet 205 with cathode arc source 209 in same level, install by cathode arc source 209
The completely new Ti targets of excited particles are useful for, added with a back bias voltage between cathode arc source 209 and the utility model device.
When cathode arc source 209 is excited, a large amount of particles are generated, are spread in coating chamber, an additional bias makes particle
It deposits on cutter.The particle buildup device 102, the magnetic field generated by magnet, to that will be deposited on cutting tool
Neighbouring careless and sloppy particle, generates the effect of aggregation, so as to deposit to the number of particles on cutter than being not provided with the more of magnet,
Thickness is caused to increase；Simultaneously because there is particle in magnetic field of short duration acceleration, particle can be made to be deposited to large energy
On cutter, faint corrasion is equivalent to, helps to enhance the adhesive force of coating.
Attached drawing 4 is in the coating system course of work of the present embodiment, and N is passed through in coating chamber2Gas, arc source is using high
Current low voltage excitation target generates particle, while make the N near target2Gas ionization forms another particle, two kinds of particles
Formation TiN coatings on matrix are deposited on after reaction.Diagram 302 is described matrix blade, it is illustrated that 301 be the TiN coatings, it is illustrated that
303 be coating TiN and the interface of base blade.Coating layer thickness on interface needs to borrow SEM detections
Attached drawing 5 calculates the schematic diagram of coating layer thickness using mechanical milling method, most in production due to its convenient and efficient property
Coating layer thickness is detected using this method, it is illustrated that the arc spherical shape that 301 coating encloses only diameter for one, it is illustrated that 3031 and 3032
It is interface, wherein 3031 be using the coating of the utility model device and matrix interface, 3032 be without using this reality
With the coating of new device and the interface of matrix.Rule of thumb, zigzag interface often shows poor coating attachment
Power, and smooth interface shows preferable coating adhesion.Specific adhesive force numerical value needs borrow scarification tester to do cut
It tests to determine.
The present embodiment needs the sample for making multigroup different variables to be compared：
Group 1：Magnet is not provided on the utility model device, multiple cutting tip samples is placed, is placed in a stove and makes
TiN coatings.
Group 2：Three positions of the utility model device are respectively provided with magnet, place the sample as group 1, make same
Coating.
Group 3：Three positions of the utility model device are respectively provided with magnet, each column upper section and lower magnet intensity one
It causes, magnet strength is inconsistent on different pillars.The sample as group 1 is placed, makes same coating.
Concrete operations are as follows：
The first step, to all samples, surface is ground polishing, and the roughness for keeping sample surfaces is consistent, then same
Batten part carries out cleaning process, the cleannes for maintaining like sample surfaces.
Second step by 1 requirement of group setting variable with quantifying, enters stove and carries out coating deposition work.After the completion, more renew target
Material, by group 2 requirements setting variable with quantitative, the coating of repeating groups 1 deposits work, then 3 sample of making group.Every group of completion above
The Ti targets that more renew afterwards, the deposition parameter for depositing work use three times is the same, and the time of deposition is the same.
Third walks, and all samples are done with mechanical ball mill, cut test (pressurization 100N), SEM detections.To top, middle part, under
Portion's numerical value is averaged respectively.
Data preparation is as follows into table 1：
Table 1
By the above results it is found that not using the utility model device, such as 1 top of group, 1 middle part of group, 1 lower part of group are three groups thick
Number of degrees value difference is not at 0.35 μm or so；According to the utility model device, magnet is enclosed,
2 and 1 comparison of group are such as organized, thickness has about 0.35 μm or so of increase；2 tops are organized at this time, 2 lower parts of group, organize 1 middle part
Numerical value, which differs 0.02 μm or so, to be ignored, and it is uniform to basically reach thickness；Group 2 is with 3 comparison of group as can be seen that magnet strength increases
By force, thickness should mutually have 0.30-0.50 μm to increase.Coating adhesion enhances and faint increase with magnet strength.
According to the data of table one, following two preferred schemes are obtained：
Preferred embodiment one：Bar shaped pillar is equipped with upper magnet and lower magnet, and middle part does not set magnet, and upper and lower part magnetic
Iron intensity is consistent.
Preferred embodiment two：Bar shaped pillar is equipped with upper magnet and lower magnet, between the upper and lower part magnet
Centre position setting middle part magnet；The magnet strength of the upper and lower part magnet is 20 Gausses, and the middle part magnet strength is
10 Gausses.
Above example is only to illustrate the technical solution of the utility model, rather than its limitations；Although with reference to aforementioned reality
Example is applied the utility model is described in detail, it will be understood by those of ordinary skill in the art that：It still can be to preceding
The technical solution recorded in embodiment is stated to modify or carry out equivalent replacement to which part technical characteristic；And these are repaiied
Change or replace, the spirit and scope for the utility model embodiment technical solution that it does not separate the essence of the corresponding technical solution.
Claims (9)
1. a kind of coating apparatus that can improve cutting tool coating thickness evenness connects including coating chamber and with the coating chamber
The vacuum system connect, coating chamber is interior to be equipped with cathode arc source, it is characterised in that：
The bottom of the coating chamber is equipped with rotating platform, and several particle buildup devices are uniformly distributed on the rotating platform；
The particle buildup device includes bar shaped pillar, and the bar shaped pillar is uniformly arranged from top to bottom is useful for installation magnet
Several grooves.
2. a kind of coating apparatus that can improve cutting tool coating thickness evenness according to claim 1, feature exist
In：The magnet is installed as removable installation.
3. a kind of coating apparatus that can improve cutting tool coating thickness evenness according to claim 2, feature exist
In：The outer surface of the magnet is concordant with the outer surface holding of the bar shaped pillar.
4. according to a kind of coating apparatus that can improve cutting tool coating thickness evenness of claim 1-3 any one of them,
It is characterized in that：The midpoint of two blocks of magnet of magnet or centre among the bar shaped pillar is with cathode arc source same
On horizontal plane.
5. a kind of coating apparatus that can improve cutting tool coating thickness evenness according to claim 4, feature exist
In：The magnet includes upper magnet and lower magnet, and upper magnet is entrenched in the groove on bar shaped pillar top, and lower magnet is embedding
The groove in bar shaped pillar bottom end is closed, and the upper and lower part magnet strength is consistent.
6. a kind of coating apparatus that can improve cutting tool coating thickness evenness according to claim 5, feature exist
In：Centre position setting middle part magnet between the upper and lower part magnet.
7. a kind of coating apparatus that can improve cutting tool coating thickness evenness according to claim 6, feature exist
In：The magnet strength of the middle part magnet is lower than the magnet strength of upper and lower part magnet.
8. a kind of coating apparatus that can improve cutting tool coating thickness evenness according to claim 7, feature exist
In：The magnet strength of the upper and lower part magnet is 20 Gausses, and the middle part magnet strength is 10 Gausses.
9. a kind of coating apparatus that can improve cutting tool coating thickness evenness according to claim 7, feature exist
In：The bar shaped pillar is made of ferromagnetic metalloid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721593838.1U CN207498457U (en) | 2017-11-24 | 2017-11-24 | A kind of coating apparatus that can improve cutting tool coating thickness evenness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721593838.1U CN207498457U (en) | 2017-11-24 | 2017-11-24 | A kind of coating apparatus that can improve cutting tool coating thickness evenness |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207498457U true CN207498457U (en) | 2018-06-15 |
Family
ID=62506083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721593838.1U Active CN207498457U (en) | 2017-11-24 | 2017-11-24 | A kind of coating apparatus that can improve cutting tool coating thickness evenness |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207498457U (en) |
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2017
- 2017-11-24 CN CN201721593838.1U patent/CN207498457U/en active Active
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