CN204224697U - A kind of positional structure of electric arc target of multi-arc ion plating equipment - Google Patents
A kind of positional structure of electric arc target of multi-arc ion plating equipment Download PDFInfo
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- CN204224697U CN204224697U CN201420664166.9U CN201420664166U CN204224697U CN 204224697 U CN204224697 U CN 204224697U CN 201420664166 U CN201420664166 U CN 201420664166U CN 204224697 U CN204224697 U CN 204224697U
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Abstract
A positional structure for the electric arc target of multi-arc ion plating equipment, relates to ion beam coating equipment technical field.The utility model comprises vacuum cavity, arranges work rest at the center of vacuum cavity, and in work rest surrounding, on the wall of the every side of vacuum cavity, interval arranges the first electric arc target and the second electric arc target successively respectively; First electric arc target comprises several uniform single metal targets from top to bottom; Second electric arc target comprises several uniform polynary element targets from top to bottom; Helically arrange respectively between single metal targets in the first often adjacent electric arc target and the second electric arc target and polynary element target; Total single metal targets and total polynary element target in the height direction from top to bottom respectively interval arrange and spacing equal.The same heat of the utility model prepares the PVD hard coating of multilayered structure, and the constituent content of the PVD coating prepared is basically identical, and thickness evenness and Coating composition homogeneity obtain guarantee.
Description
Technical field
The utility model relates to ion beam coating equipment technical field.
Background technology
The piston ring coating of latest generation manufactures by physical vaporous deposition (PVD) arc ion plating.Arc ion plating (aip), comparatively simple owing to having device structure, cathode arc target is the evaporation source of cathode material, is again ion source; Ionization level is high, and sedimentation rate is high; Incident ionic energy is large, and the advantages such as film/base bonding force is high, and coating quality is good, piston ring industry have obtained and has applied more and more widely.In order to improve efficiency and the life-span of piston system, high hardness wear-resisting friction coat is widely adopted gradually, require on the basis of single high hardness wear-resisting coating, by adding suitable polynary element, reduce the frictional coefficient of coating, improve wear resisting property simultaneously, reduce coating stress, improve the bonding force of coating, increase the deposit thickness of coating.
In order to realize the PVD hard coating preparing this composite parts, the cathode arc source system that existing filming equipment generally adopts is that each circular cathode arc source is uniformly distributed in the height direction, and adjacent wall electric arc target presents symmetrical.Although by this structure filming equipment, the target of differing materials composition is settled in different arc source positions, also multi-element composite coating can be prepared, but because the restriction in the design of electric arc target location layout, it all can not reach perfect condition in coated component homogeneity, such as: its coating prepared or be to keep a kind of composition, the coating of the different elemental composition of multilayer cannot be prepared, be exactly that its coated component content is uneven, its each element component content of the coating of different positions has larger scattered error, cannot ensure that coating has consistent performance characteristic.
Utility model content
The utility model object is for above problem, provides one both can prepare multilayer multiple elements design hard PVD coating, can ensure again the positional structure of the electric arc target of the uniform multi-arc ion plating equipment of Coating composition content.
The utility model comprises vacuum cavity, arranges work rest at the center of vacuum cavity, and in work rest surrounding, on the wall of the every side of vacuum cavity, interval arranges the first electric arc target and the second electric arc target successively respectively; Described first electric arc target comprises several uniform single metal targets from top to bottom; Described second electric arc target comprises several uniform polynary element targets from top to bottom; Helically arrange respectively between single metal targets in the first often adjacent electric arc target and the second electric arc target and polynary element target; Total single metal targets and total polynary element target in the height direction from top to bottom respectively interval arrange and spacing equal.
The electric arc target location layout of multi-arc ion plating equipment described in the utility model, can realize reaching following useful technique effect:
(1) adopt the multi-arc ion plating equipment of electric arc target location layout described in the utility model, in coating process, under certain vacuum degree condition, pass into N2, light separately single-element Cr target wherein, CrN coating can be prepared; After CrN coating terminates, then light single-element Cr target and polynary element target CrMe simultaneously, then can be prepared on CrN coating basis and prepare multiple elements design Cr(Me) N coating, realize the PVD hard coating that same heat prepares multilayered structure;
(2) adopt the multi-arc ion plating equipment of electric arc target location layout described in the utility model, its single metal targets and polynary element target spaced apart in short transverse, all electric arc target in the height direction again keep be uniformly distributed.Such electric arc target location layout, ensure that single-element target and polynary element target all present in the height direction and be uniformly distributed, the constituent content of the PVD coating prepared thus is basically identical, and thickness evenness and Coating composition homogeneity obtain guarantee.
First electric arc target described in the utility model and the second electric arc target add up to 3 ~ 6 groups.
The number of single metal targets described in the utility model is 2 ~ 4.
The number of polynary element target described in the utility model is 2 ~ 4.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the front layout of the first electric arc target and the second electric arc target.
Embodiment
As shown in Figure 1, 2, comprise vacuum cavity 1, arrange work rest 2 at the center of vacuum cavity 1, in work rest 2 surrounding, on the wall of the every side of vacuum cavity 1, interval arranges the first electric arc target 3, second electric arc target 4, the 3rd electric arc target 5, the 4th electric arc target 6 successively respectively; Described first electric arc target 3 comprises three Cr targets 7; Described second electric arc target 4 comprises three CrAl targets 8; Described 3rd electric arc target 5 comprises two Cr targets 7; Described 4th electric arc target 6 comprises two CrAl targets 8; Each target spacing in first electric arc target 3, second electric arc target 4, the 3rd electric arc target 5, the 4th electric arc target 6 is equal.
Helically arrange respectively between Cr target 7 in first electric arc target 3 and the second electric arc target 4, second electric arc target 4 and the 3rd electric arc target 5, the 3rd electric arc target 5 and the 4th electric arc target 6, the 4th electric arc target 6 and the first electric arc target 3 and CrAl target 8; Total Cr target 7 and CrAl target 8 in the height direction from top to bottom respectively interval arrange and spacing equal.
When preparing PVD coating in N2 atmosphere, only open and light the first electric arc target 3 and the 3rd electric arc target 5, then institute's coated coating is CrN; Meanwhile, five Cr targets 7 of the first electric arc target 3 and the 3rd electric arc target 5 present in the height direction and are uniformly distributed, to ensure that for plating workpiece plate the thickness evenness of CrN coating.
When CrN thickness of coating reaches the pre-after date of technique, then the second electric arc target 4 is lighted in unlatching and the 4th electric arc target 6, four groups of electric arc target work simultaneously, then institute's coated coating is CrAlN coating; Simultaneously, five polynary element Cr Al targets 8 of the second electric arc target 4 and the 4th electric arc target 6, and all targets present in the height direction and are uniformly distributed, ensure that the thickness evenness for plating workpiece institute coated coating CrAlN, consider between the electric arc target of configuration Cr target 7 and the electric arc target of configuration CrAl target 8 spaced apart, also ensure that being uniformly distributed of Al constituent content in CrAlN coating simultaneously.Thus, achieve the process program of preparation multilayer multi-element layers, and ensure that thickness evenness, homogeneity of ingredients are good.
Certainly, above diagram is only preferred embodiment of the present utility model, not limits practical range of the present utility model with this, therefore every principle according to the utility model is done equivalence change or modified, and all should be covered by protection domain of the present utility model.
Claims (4)
1. the positional structure of the electric arc target of a multi-arc ion plating equipment, it is characterized in that: comprise vacuum cavity, arrange work rest at the center of vacuum cavity, in work rest surrounding, on the wall of the every side of vacuum cavity, interval arranges the first electric arc target and the second electric arc target successively respectively; Described first electric arc target comprises several uniform single metal targets from top to bottom; Described second electric arc target comprises several uniform polynary element targets from top to bottom; Helically arrange respectively between single metal targets in the first often adjacent electric arc target and the second electric arc target and polynary element target; Total single metal targets and total polynary element target in the height direction from top to bottom respectively interval arrange and spacing equal.
2. the positional structure of the electric arc target of a kind of multi-arc ion plating equipment according to claim 1, is characterized in that: described first electric arc target and the second electric arc target add up to 3 ~ 6 groups.
3. the positional structure of the electric arc target of a kind of multi-arc ion plating equipment according to claim 1, is characterized in that: the number of described single metal targets is 2 ~ 4.
4. the positional structure of the electric arc target of a kind of multi-arc ion plating equipment according to claim 1, is characterized in that: the number of described polynary element target is 2 ~ 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420664166.9U CN204224697U (en) | 2014-11-10 | 2014-11-10 | A kind of positional structure of electric arc target of multi-arc ion plating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201420664166.9U CN204224697U (en) | 2014-11-10 | 2014-11-10 | A kind of positional structure of electric arc target of multi-arc ion plating equipment |
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| CN204224697U true CN204224697U (en) | 2015-03-25 |
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| CN201420664166.9U Active CN204224697U (en) | 2014-11-10 | 2014-11-10 | A kind of positional structure of electric arc target of multi-arc ion plating equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104372303A (en) * | 2014-11-10 | 2015-02-25 | 仪征双环设备制造有限公司 | Position structure of arc targets of multi-arc ion coating apparatus |
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2014
- 2014-11-10 CN CN201420664166.9U patent/CN204224697U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104372303A (en) * | 2014-11-10 | 2015-02-25 | 仪征双环设备制造有限公司 | Position structure of arc targets of multi-arc ion coating apparatus |
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