CN216348520U - Gas distributor flatness inspection tool and combined inspection tool - Google Patents
Gas distributor flatness inspection tool and combined inspection tool Download PDFInfo
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- CN216348520U CN216348520U CN202122171500.XU CN202122171500U CN216348520U CN 216348520 U CN216348520 U CN 216348520U CN 202122171500 U CN202122171500 U CN 202122171500U CN 216348520 U CN216348520 U CN 216348520U
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Abstract
The utility model provides a flatness inspection tool for a gas distributor, which comprises a tool body (1), wherein the tool body (1) comprises a positioning block (1-1) used for positioning the gas distributor (4) and a stop block (1-2) used for enabling the gas distributor (4) to be upright, the height of the stop block (1-2) is larger than the maximum height of the positioning block (1-1), a fixing hole (1-21) is formed in the stop block (1-2), and positioning plates (1-3) are symmetrically arranged on the periphery of the tool body (1). The utility model also provides a combined inspection tool, which comprises a plurality of the gas distributor flatness inspection tools and a connecting plate (2). The flatness inspection tool for the gas distributor is simple and practical in structure, double-side detection of the gas distributor can be realized without turning over, and batch detection of the gas distributor can be realized by the combined inspection tool.
Description
Technical Field
The utility model relates to the field of semiconductor device detection, in particular to a flatness inspection tool and a combined inspection tool for a gas distributor.
Background
The chemical vapor deposition atomic layer deposition is a key step for preparing a thin film device in a semiconductor process, and the main principle of the chemical vapor deposition atomic layer deposition is that the traditional chemical vapor deposition equipment comprises a chemical substance gas distributor, and chemical substances participating in reaction overflow from the gas distributor and finally enter a reaction area to be deposited on a semiconductor process piece. The basic requirements of film growth are uniform components, uniform thickness and steep interface, the improvement of the uniformity of film growth is a core task of continuously improving chemical vapor deposition equipment, and the improvement of the processing technology of a gas distributor is a main method for improving the uniformity. The structure of the gas distributor usually contains hundreds or even thousands of small holes with equal diameters, the tiny difference of each aperture direction in the processing directly affects the thickness uniformity of the deposition layer, the product characteristics lead to plane deformation in the processing process, and then the direction of the small holes directly changes, the three-coordinate measuring machine is used to detect the flatness of the working plane of the gas distributor after the product processing, the unqualified product of the flatness is removed, and the quality of the delivered product is ensured. The traditional inspection process is that one is inspected twice, is that the flatness of the front of the gas distributor is detected and the flatness of the back is detected respectively, and every single flatness is detected and is finished, needs manual operation turn-over, and the inspection next piece can not realize unmanned on duty inspection, occupies a large amount of manpower.
Disclosure of Invention
The utility model provides a flatness inspection tool for a gas distributor, which can enable the gas distributor to be convenient to clamp and does not need to turn over a product in the inspection process.
In order to achieve the technical purpose and achieve the technical requirements, a first aspect of the present invention provides a gas distributor flatness inspection tool, which includes a tool body, wherein the tool body includes a positioning block for positioning a gas distributor and a stop block for making the gas distributor upright, the height of the stop block is greater than the maximum height of the positioning block, the stop block is provided with a fixing hole, and positioning plates are symmetrically arranged around the tool body.
As a preferred technical scheme: the upper surface of the positioning block is an inwards concave cambered surface, and the cambered surface is matched with the arc edge of the gas distributor.
As a preferred technical scheme: the frock body respectively is provided with 1 at least locating plate in length direction's both sides, the frock body respectively is provided with 1 locating plate in width direction's both sides.
As a preferred technical scheme: the positioning block and the stop block are of an integrated structure.
The utility model provides a combined inspection tool, which comprises a plurality of gas distributor flatness inspection tools and a connecting plate, wherein the gas distributor flatness inspection tools are connected to form the combined inspection tool, every two gas distributor flatness inspection tools are connected through the connecting plate, and the connecting plate is fixedly connected with a positioning plate through a fastening device.
As a preferred technical scheme: the fastening device is a stepped positioning pin, a countersunk head pin hole corresponding to the stepped positioning pin is formed in the connecting plate, and a positioning pin hole corresponding to the countersunk head pin hole is formed in the positioning plate.
As a preferred technical scheme: the locating plate is further fixedly connected with the connecting plate through screws, screw through holes are symmetrically formed in the locating plate, screw blind holes corresponding to the screw through holes are formed in the connecting plate, and the screws penetrate through the screw through holes and enter the screw blind holes.
Compared with the traditional structure, the utility model has the beneficial effects that:
1) the gas distributor is positioned by utilizing the positioning block, then the gas distributor is in an upright state through the stop block, the stop block is provided with the fixing hole, and finally the gas distributor is fixed through fixing devices such as screws, pins and the like, so that the flatness of two surfaces of the gas distributor can be detected at one time without turning over, the operation is simple and easy, and the detection efficiency is improved;
2) preferably, the upper surface of the positioning block is an inwards concave cambered surface, so that the positioning effect is better, and the precision is high;
3) the combined inspection tool can be used for batch inspection of the gas distributors, unattended operation can be realized, and the inspection efficiency is high;
4) preferably, the stepped positioning pin is convenient to mount and dismount and is suitable for different apertures;
5) preferably, a coordinate system can be quickly established through the matching of the positioning pin holes in the connecting plate and the positioning plate, the positioning efficiency is high, and the detection efficiency and the detection precision are improved.
Drawings
FIG. 1 is a three-dimensional view of the present invention;
FIG. 2 is a three-dimensional view of a combination inspection tool;
FIG. 3 is an internal view of the connection plate;
fig. 4 is a structural view of the stepped positioning pin.
In the drawings of fig. 1-4, 1 is a tool body, 1-1 is a positioning block, 1-2 is a stop block, 1-21 is a fixing hole, 1-3 is a positioning plate, 1-31 is a positioning pin hole, 1-32 is a screw through hole, 2 is a connecting plate, 2-1 is a countersunk pin hole, 2-2 is a screw blind hole, 3 is a fastening device, and 4 is a gas distributor.
Detailed Description
The utility model is further described below with reference to the accompanying drawings.
The same or similar reference numerals in the drawings of the embodiments of the present invention correspond to the same or similar components; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right", "front", "back", "inner", "outer", etc. indicate an orientation or a positional relationship based on the orientation or the positional relationship shown in the drawings, it is only for convenience of description of the present invention, but does not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and are not to be construed as limiting the present patent, and the specific meanings of the terms may be understood by those skilled in the art according to specific situations.
Referring to fig. 1-4, a flatness inspection tool for a gas distributor comprises a tool body 1, wherein the tool body 1 comprises a positioning block 1-1 for positioning the gas distributor 4 and a stop block 1-2 for enabling the gas distributor 4 to stand upright, the stop block 1-2 is higher than the maximum height of the positioning block 1-1, so that the gas distributor 4 can stand upright, the stop block 1-2 is provided with fixing holes 1-21, the periphery of the tool body 1 is symmetrically provided with positioning plates 1-3, the positioning block 1-1 positions the gas distributor 4, the stop block 1-2 is higher than the maximum height of the positioning block 1-1 and abuts against the gas distributor 4 to enable the gas distributor 4 to be in an upright state, the gas distributor 4 is provided with a plurality of mounting holes which are circumferentially arranged, and the fixing holes 1-21 are matched with the mounting holes, after the gas distributor 4 is placed, the gas distributor 4 is fixed by screwing down fixing devices such as screws and pins, so that the gas distributor 4 can be stably in an upright state, the flatness detection is more convenient, both sides can be detected, the detection efficiency is improved, and further, the positioning block 1-1 and the stop block 1-2 are of an integrated structure.
As shown in fig. 1-4, the upper surface of the positioning block 1-1 is a concave arc surface, and the arc surface is matched with the arc edge of the gas distributor 4, so that the arc edge of the gas distributor 4 is attached to the upper surface of the positioning block 1-1, the positioning effect is better, and the stability is also better.
As shown in fig. 1 to 4, at least 1 positioning plate 1-3 is respectively arranged on both sides of the tool body 1 in the length direction, 1 positioning plate 1-3 is respectively arranged on both sides of the tool body 1 in the width direction, and further, 1 or 2 or 3 positioning plates 1-3 are respectively arranged on both sides of the tool body in the length direction, so that the inspection tool can be connected with 1 inspection tool all around.
Referring to fig. 1-4, the utility model further provides a combined inspection tool, which comprises a gas distributor flatness inspection tool and a connecting plate 2, wherein a plurality of gas distributor flatness inspection tools are connected to form the combined inspection tool, every two gas distributor flatness inspection tools are connected through the connecting plate 2, and the connecting plate 2 is fixedly connected with the positioning plates 1-3 through fastening devices 3; because the gas distributors 4 generally need to be detected in batches, a plurality of gas distributor flatness detection tools are connected to form a combined detection tool, further, the fastening devices 3 are stepped positioning pins, the connecting plate 2 is provided with corresponding countersunk pin holes 2-1, the connecting plate 2 can not only connect the gas distributor flatness detection tools together, but also can adapt to a flatness detector by setting the distance between the two positioning pin holes as a standard distance, so that the gas distributors can be detected accurately and in batches without personnel on duty; the positioning plate 1-3 is provided with positioning pin holes 1-31 corresponding to the countersunk head pin holes 2-1, and the stepped positioning pins are matched with the countersunk head pin holes 2-1 and the positioning pin holes 1-31, so that the rapid assembly can be realized, a detection coordinate system is formed, and the detection efficiency is improved.
As shown in fig. 1-4, the positioning plate 1-3 is further fixedly connected with the connecting plate 2 through screws, the positioning plate 1-3 is further symmetrically provided with screw through holes 1-32, the connecting plate 2 is provided with screw blind holes 2-2 corresponding to the screw through holes 1-32, the screws penetrate through the screw through holes 1-32 and enter the screw blind holes 2-2, the positioning plate 1-3 and the connecting plate 2 are further fastened through additional screws, the stability of the combined detection tool is improved, the mounting mode is that the connecting plate 2 is arranged on the upper surface of the positioning plate 1-3, and the screw blind holes 2-2 are downward corresponding to the screw through holes 1-32.
The foregoing examples are given solely for the purpose of illustrating the utility model and are not to be construed as limiting the embodiments, and other variations and modifications in form thereof will be suggested to those skilled in the art upon reading the foregoing description, and it is not necessary or necessary to exhaustively enumerate all embodiments and all such obvious variations and modifications are deemed to be within the scope of the utility model.
Claims (7)
1. The utility model provides a gas distributor flatness inspection frock which characterized in that: the tool comprises a tool body (1), wherein the tool body (1) comprises a positioning block (1-1) for positioning a gas distributor (4) and a stop block (1-2) for enabling the gas distributor (4) to be upright, fixing holes (1-21) are formed in the stop block (1-2), and positioning plates (1-3) are symmetrically arranged on the periphery of the tool body (1).
2. The gas distributor flatness inspection tool of claim 1, wherein: the upper surface of the positioning block (1-1) is an inwards concave arc surface, and the arc surface is matched with the arc edge of the gas distributor (4).
3. The gas distributor flatness inspection tool of claim 1, wherein: the tool body (1) is provided with at least 1 positioning plate (1-3) on each side in the length direction, and the tool body (1) is provided with 1 positioning plate (1-3) on each side in the width direction.
4. The gas distributor flatness inspection tool of claim 1, wherein: the positioning block (1-1) and the stop block (1-2) are of an integrated structure.
5. The utility model provides a combination inspection frock which characterized in that: the gas distributor flatness inspection tool comprises the gas distributor flatness inspection tool and a connecting plate (2) according to any one of claims 1 to 4, wherein the gas distributor flatness inspection tools are connected to form a combined inspection tool, every two gas distributor flatness inspection tools are connected through the connecting plate (2), and the connecting plate (2) is fixedly connected with positioning plates (1-3) through fastening devices (3).
6. The combination inspection tool of claim 5, wherein: the fastening device (3) is a stepped positioning pin, a countersunk head pin hole (2-1) corresponding to the stepped positioning pin is formed in the connecting plate (2), and a positioning pin hole (1-31) corresponding to the countersunk head pin hole (2-1) is formed in the positioning plate (1-3).
7. The gas distributor flatness inspection tool of claim 5, wherein: the positioning plate (1-3) is fixedly connected with the connecting plate (2) through screws, screw through holes (1-32) are symmetrically formed in the positioning plate (1-3), screw blind holes (2-2) corresponding to the screw through holes (1-32) are formed in the connecting plate (2), and the screws penetrate through the screw through holes (1-32) and enter the screw blind holes (2-2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122171500.XU CN216348520U (en) | 2021-09-09 | 2021-09-09 | Gas distributor flatness inspection tool and combined inspection tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122171500.XU CN216348520U (en) | 2021-09-09 | 2021-09-09 | Gas distributor flatness inspection tool and combined inspection tool |
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| Publication Number | Publication Date |
|---|---|
| CN216348520U true CN216348520U (en) | 2022-04-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202122171500.XU Active CN216348520U (en) | 2021-09-09 | 2021-09-09 | Gas distributor flatness inspection tool and combined inspection tool |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116642452A (en) * | 2023-06-08 | 2023-08-25 | 江苏先锋精密科技股份有限公司 | Wafer carrying mechanical arm flatness inspection tool and inspection method |
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2021
- 2021-09-09 CN CN202122171500.XU patent/CN216348520U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116642452A (en) * | 2023-06-08 | 2023-08-25 | 江苏先锋精密科技股份有限公司 | Wafer carrying mechanical arm flatness inspection tool and inspection method |
| CN116642452B (en) * | 2023-06-08 | 2024-03-05 | 江苏先锋精密科技股份有限公司 | Wafer carrying mechanical arm flatness inspection tool and inspection method |
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Address after: 214500 No. 195, Xingang Avenue, Jingjiang Economic Development Zone, Taizhou City, Jiangsu Province Patentee after: Jiangsu Xianfeng Precision Technology Co.,Ltd. Address before: 214500 No. 195, Xingang Avenue, Jingjiang Economic Development Zone, Taizhou City, Jiangsu Province Patentee before: JINGJIANG XIANFENG SEMICONDUCTOR TECHNOLOGY CO.,LTD. |
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