CN207480628U - The hand and transfer robot of a kind of transfer robot - Google Patents
The hand and transfer robot of a kind of transfer robot Download PDFInfo
- Publication number
- CN207480628U CN207480628U CN201721601801.9U CN201721601801U CN207480628U CN 207480628 U CN207480628 U CN 207480628U CN 201721601801 U CN201721601801 U CN 201721601801U CN 207480628 U CN207480628 U CN 207480628U
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- substrate
- plummer
- hand
- transfer robot
- support
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Abstract
The utility model is related to field of liquid crystal panel manufacture, more particularly to a kind of hand and transfer robot of transfer robot, the hand of the transfer robot includes the plummer for bearing substrate, and substrate includes at least one effective coverage and the border area around the setting of each effective coverage, wherein, the one side of plummer towards substrate is equipped with multiple support bases, and the border area of substrate is mounted on multiple support bases；Plummer is additionally provided with multiple gas holes, and the insufflation channel connected with multiple gas holes is equipped in plummer on one side towards substrate；Insufflation channel is used to convey gas to multiple gas holes, and gas is used to provide the support force of supporting substrate after the blowout of multiple gas holes.In above-described embodiment, using non-contacting support construction so that robot does not contact in the handling process with the effective coverage of substrate, has evaded the risk that particle contamination is generated in the effective coverage of substrate completely, has effectively increased cleanliness levels of the substrate in producing line.
Description
Technical field
The utility model is related to field of liquid crystal panel manufacture more particularly to the hands and conveying robot of a kind of transfer robot
People.
Background technology
In field of liquid crystal panel manufacture, the producing line of automated production is all to realize substrate between each process with robot
It transmits.Higher and higher to the purity requirements of substrate surface with the development of industry technology, robot is in the process of conveyance substrate
In have to contact with substrate, particle residue will be caused to influence the cleanliness factor of substrate on substrate in contact position.
In order to improve cleanliness factor, particle residue is reduced, in the prior art often through the material for promoting contact position cushion block
Can, reduce particle emission；Or reduce bearing area with the cushion block of substrate contact position, the involved area of substrate is reduced,
But it can not fundamentally solve the problems, such as the particle residue after contact.
Utility model content
The utility model provides a kind of hand and transfer robot of transfer robot, to improve substrate effective coverage
Cleanliness factor.
The utility model embodiment provides a kind of hand of transfer robot, and the hand of the transfer robot includes being used for
The plummer of bearing substrate, the substrate include at least one effective coverage and around the edge areas of each effective coverage setting
Domain, wherein,
The one side of the plummer towards the substrate is equipped with multiple support bases, and the border area on the substrate is mounted in
On the multiple support base；
The plummer is additionally provided with multiple gas holes on one side towards the substrate, and be equipped in the plummer with it is described
The insufflation channel of multiple gas hole connections；The insufflation channel is used to convey gas, the gas warp to the multiple gas hole
The support force of the substrate is supported after the multiple gas hole blowout for offer.
In above-described embodiment, the cleaning of substrate effective coverage is effectively increased by using contactless support construction
Degree；On the one hand, the support base on plummer is contacted with the border area of substrate, and provides upward support force, due to support base
It is not contacted with the effective coverage of substrate, therefore, particle residue will not be generated in the effective coverage of substrate, effectively increases substrate
The cleanliness factor of effective coverage；On the other hand, gas hole is additionally provided on plummer, the gas persistently purged in gas hole provides branch
The support force of support group plate makes substrate surface keep smooth, prevents substrate from generating plastic deformation and being recessed to plummer side.
During specific setting, each support base is equipped with suction hole, and is equipped in the plummer and is connected with each suction hole
Air intake passage；
The air intake passage is used to discharge the air between the support seating face and the substrate, makes the substrate adsorption
On the support base.In the handling process, substrate is attracted to support seating face, effectively inhibits the shaking of substrate, improves
Stability.
Preferably, the plummer towards the substrate be additionally provided on one side with the one-to-one nozzle of each gas hole,
And the nozzle is connected with corresponding gas hole.Gas is sprayed by the stomata on nozzle, is increased the forced area of substrate, is made
Substrate uniform force.
Preferably, each support base is detachably connected with the plummer.It in this way can be according to substrate effective coverage
Area adjust support base position.
Preferably, each support base is the cushion block structure formed by rubber material or resin material making.
Preferably, the substrate includes an effective coverage.
In a specific embodiment, the plummer includes base portion and the multiple hand forks being connect with the base portion,
The multiple hand fork is arranged at intervals and is arranged side by side；
Each hand fork both ends are respectively equipped with a support base, and each hand fork is set between two support bases
There are multiple gas holes.
The utility model embodiment additionally provides a kind of transfer robot, which is included described in any of the above-described
Hand.
In above-described embodiment, which is provided with support base, and support base and substrate on the plummer of hand
Border area contact, so as to effectively increase the cleanliness factor of substrate effective coverage；Gas hole, gas hole are additionally provided on plummer
In the gas that persistently purges upward support force is provided for substrate, substrate surface is made to keep smooth, prevents substrate from generating flexible become
Shape.
Description of the drawings
Fig. 1 is the structure diagram of the hand of transfer robot that the utility model embodiment provides；
Fig. 2 is the vertical view of substrate that the utility model embodiment provides；
Fig. 3 is the hand of transfer robot and the matching chart of substrate that the utility model embodiment provides；
Fig. 4 is the side view of C portion in Fig. 3.
Reference numeral：
10- plummer 11- base portion 12- hand forks
20- substrate 21- effective coverages 22- border areas
30- support base 40- gas hole 50- nozzles
Specific embodiment
It is new to this practicality below in conjunction with the accompanying drawings in order to make the purpose of this utility model, technical solution and advantage clearer
Type is described in further detail, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than complete
Portion's embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making creative work premise
Lower all other embodiments obtained, shall fall within the protection scope of the present invention.
The utility model embodiment provides a kind of hand of transfer robot, and the hand of the transfer robot includes being used for
The plummer of bearing substrate, and substrate includes at least one effective coverage and around the edge area of each effective coverage setting
Domain, wherein,
The one side of plummer towards substrate is equipped with multiple support bases, and the border area on substrate is mounted in multiple support bases
On；
Plummer is additionally provided with multiple gas holes, and be equipped with what is connected with multiple gas holes in plummer on one side towards substrate
Insufflation channel；Insufflation channel is used to convey gas to multiple gas holes, and gas is used to provide support after the blowout of multiple gas holes
The support force of substrate.
In above-described embodiment, the cleanliness factor of substrate effective coverage is effectively increased by contactless support construction；One
Aspect sets multiple support bases on plummer, and the border area of substrate is made to be mounted on these support bases, on the other hand,
Multiple gas holes are set on plummer, and the gas of gas hole blowout provides upward support force for substrate, makes entire substrate table
Face keeps smooth.In this way, in the handling process, since the effective coverage of substrate does not contact, and will not generate soft with support base
Property deformation and to plummer side be recessed, therefore, evaded the risk by particle contamination completely, effectively increased substrate in producing line
On cleanliness levels.
It is existing for the ease of more understanding to understand the structure of the hand for the transfer robot that the utility model embodiment provides
It is described in detail with reference to attached drawing.
Together with reference to figure 1, Fig. 2, Fig. 3, the hand of the transfer robot includes the plummer 10 for bearing substrate 20, base
Plate 20 include at least one effective coverage 21 and around each effective coverage 21 setting border area 22, substrate 20 it is effective
Region 21 needs to keep higher cleanliness factor, and to meet the performance of product, border area 22 is set around effective coverage 21, to clean
The requirement of cleanliness is relatively low.In order to ensure the cleanliness factor of 20 effective coverage 21 of substrate, in the present embodiment, plummer 10 is towards substrate
20 one side is equipped with multiple support bases 30, and the border area 22 of substrate 20 is mounted on these support bases 30, and this avoid bases
The effective coverage 21 of plate 20 is contacted with support base 30, solves the residue problem of particle, improves the cleanliness factor of effective coverage 21；
Simultaneously as the effective coverage 21 of substrate 20 is not by the effective coverage of the support force from support base 30, in order to prevent substrate 20
21 towards 10 1 lateral lower recess of plummer, generates plastic deformation and is contacted with plummer 10, and plummer 10 is towards substrate 20
It is additionally provided with multiple gas holes 40 on one side, and the insufflation channel connected with these gas holes 40 is additionally provided in plummer 10, is using
When, for conveying gas into gas hole 40, gas provides support force for substrate 20 after the blowout of gas hole 40, makes insufflation channel
Substrate 20 keeps smooth, prevents substrate 20 from generating plastic deformation.
During specific setting, as shown in Fig. 2, including an effective coverage 21 on substrate 20, which is arranged on base
The center portion of plate 20, the outer frame part of substrate 20 are the border area 22 of effective coverage 21, and border area 22 surrounds effective district
Domain 21 is set；On plummer 10 and 20 corresponding region of substrate, support base 30 is set, and at least divide along the outline border in the region
Cloth is at the opposite both ends in the region, and to provide the support force of supporting substrate 20, the border area 22 of substrate 20 is mounted in these branch
It supports on seat 30；Gas hole 40 is distributed in the middle part in the region, and the gas that gas hole 40 persistently purges is to the effective coverage of substrate 20
21 form support, keep 20 surfacing of substrate, and effective coverage 21 is prevented to be recessed to 10 side of plummer.When 20 area of substrate compared with
When big, two or more effective coverages 21 are included on substrate 20, and be distributed in checkerboard type, the outer frame part of substrate 20 and adjacent
Two effective coverages 21 between part border area 22 is collectively formed；In plummer 10 and 20 corresponding region of substrate
On, support base 30 is set along the outline border in the region, alternatively, the middle section in the region can also be arranged on, and support base 30
Installation position is corresponding with the border area 22 on substrate 20, when carrying, the border area 22 on substrate 20 is made to be mounted in this
On a little support bases 30, plummer 10 is additionally provided with multiple gas holes 40, the gas shape that gas hole 40 persistently purges on the area
Into the support force of supporting substrate 20,20 surface of substrate is made to keep smooth.
With reference to figure 4, plummer 10 towards substrate 20 be additionally provided on one side with each 40 one-to-one nozzle 50 of gas hole,
And nozzle 50 is connected with corresponding gas hole 40, nozzle 50 is equipped with multiple stomatas, and the gas in insufflation channel flows through each
It is sprayed upwards by the stomata on nozzle 50 during gas hole 40, increases the forced area of substrate 20, make 20 stress of substrate more equal
It is even.In order to improve the stability of substrate 20 in the handling process, suction hole is additionally provided on each support base 30, and on plummer 10
Equipped with the air intake passage connected with each suction hole, air intake passage is used to discharge the sky between 30 surface of support base and substrate 20
Gas makes substrate 20 adsorb on support base 30, with inhibit in the handling process substrate 20 generate shaking or with plummer 10 it
Between relative movement.The hand of robot is when transporting substrate 20, using with suction hole in the border area 22 of substrate 20
The absorption of support base 30 and supporting substrate 20 are produced in the effective coverage of substrate 20 21 by the gas persistently purged from gas hole 40
Raw support force is so as to supporting substrate 20.
In addition, in the production line, the size of effective coverage 21 may be different on the substrate 20 of different batches, in order to make machine
People can carry the substrate 20 of different batches, and support base 30 is detachably connected with plummer 10, such as support base 30 and plummer 10
It is bolted, the position of support base 30 can be adjusted according to the size of effective coverage 21 on substrate 20 in this way, improve suitable
Ying Xing, ensureing the border area 22 of substrate 20 in handling process can be mounted on support base 30, and in setting, support base 30 can
With for the cushion block structure formed by rubber material or resin material making.
In a specific embodiment, as shown in Figure 1, plummer 10 includes base portion 11 and connect with base portion 11 more
A hand fork 12, multiple hand forks 12 are arranged at intervals and are arranged side by side；Each 12 both ends of hand fork are respectively equipped with a support base 30, and every
A hand fork 12 is equipped with multiple gas holes 40 between two support bases 30, be equipped with along its length inside each hand fork 12 and these
The insufflation channel that gas hole 40 connects；With continued reference to Fig. 1, on the plummer, a-quadrant represents to be provided with the region of support base 30,
Corresponding with the border area 22 on substrate 20, B area represents to be provided with the region of gas hole 40, with the effective district on substrate 20
Domain 21 is corresponding, and B area is located between two a-quadrants, support base 30 in B area and by the gas hole 40 in a-quadrant
The gas of blowout provides the support force of supporting substrate 20 jointly, while ensure that the clean water on 21 surface of effective coverage of substrate 20
It is flat.
By above description as can be seen that the utility model embodiment provides a kind of hand of contactless transfer robot
Portion, on the one hand, multiple support bases 30 on plummer 10 are set, and the border area 22 of substrate 20 is made to be mounted in these support bases
On 30, on the other hand, multiple gas holes 40 are set on plummer 10, the gas that gas hole 40 persistently purges is provided for substrate 20
Upward support force makes entire 20 surface of substrate keep smooth.In this way, in the handling process, due to the effective coverage of substrate 20
21 do not contact with support base 30, and will not occur plastic deformation and be recessed to 10 side of plummer, therefore, evaded completely by
The risk of particle contamination effectively increases cleanliness levels of the substrate 20 in producing line.
The utility model embodiment additionally provides a kind of transfer robot, which is included described in any of the above-described
Hand.Robot does not contact in the handling process with the effective coverage of substrate 20 21, has evaded completely in the effective of substrate 20
The risk of particle contamination is generated in region 21, effectively provides cleanliness levels of the substrate 20 in producing line.
Obviously, those skilled in the art can carry out the utility model various modification and variations without departing from this practicality
Novel spirit and scope.If in this way, these modifications and variations of the present invention belong to the utility model claims and
Within the scope of its equivalent technologies, then the utility model is also intended to include these modifications and variations.
Claims (8)
1. a kind of hand of transfer robot, which is characterized in that the plummer including being used for bearing substrate, the substrate are included extremely
A few effective coverage and the border area around the setting of each effective coverage, wherein,
The one side of the plummer towards the substrate is equipped with multiple support bases, and the border area on the substrate is mounted in described
On multiple support bases；
The plummer is additionally provided with multiple gas holes on one side towards the substrate, and be equipped in the plummer with it is the multiple
The insufflation channel of gas hole connection；The insufflation channel is used to convey gas to the multiple gas hole, described in gas warp
The support force of the substrate is supported after multiple gas hole blowouts for offer.
2. the hand of transfer robot as described in claim 1, which is characterized in that each support base is equipped with suction hole, and
The air intake passage connected with each suction hole is equipped in the plummer；
The air intake passage is used to discharge the air between the support seating face and the substrate, makes the substrate adsorption in institute
It states on support base.
3. the hand of transfer robot as described in claim 1, which is characterized in that the plummer is towards the one of the substrate
Face be additionally provided with the one-to-one nozzle of each gas hole, and the nozzle is connected with corresponding gas hole.
4. the hand of transfer robot as claimed in claim 2, which is characterized in that each support base and the plummer
It is detachably connected.
5. the hand of transfer robot as claimed in claim 4, which is characterized in that each support base for rubber material or
The cushion block structure that resin material making forms.
6. the hand of transfer robot as described in claim 1, which is characterized in that the substrate includes an effective district
Domain.
7. such as the hand of claim 1~6 any one of them transfer robot, which is characterized in that the plummer includes base
Portion and the multiple hand forks being connect with the base portion, the multiple hand fork are arranged at intervals and are arranged side by side；
Each hand fork both ends are respectively equipped with a support base, and each hand fork is equipped with more between two support bases
A gas hole.
8. a kind of transfer robot, which is characterized in that include the hand of such as claim 1~7 any one of them transfer robot
Portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721601801.9U CN207480628U (en) | 2017-11-27 | 2017-11-27 | The hand and transfer robot of a kind of transfer robot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721601801.9U CN207480628U (en) | 2017-11-27 | 2017-11-27 | The hand and transfer robot of a kind of transfer robot |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207480628U true CN207480628U (en) | 2018-06-12 |
Family
ID=62471825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721601801.9U Active CN207480628U (en) | 2017-11-27 | 2017-11-27 | The hand and transfer robot of a kind of transfer robot |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207480628U (en) |
-
2017
- 2017-11-27 CN CN201721601801.9U patent/CN207480628U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 230013 Southwest District of Hefei City, Anhui Province Patentee after: Hefei xinyihua Intelligent Machine Co.,Ltd. Address before: 230013 Southwest District of Hefei City, Anhui Province Patentee before: HEFEI SINEVA INTELLIGENT MACHINE Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |