CN103691704B - A kind of cleaning device - Google Patents

A kind of cleaning device Download PDF

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Publication number
CN103691704B
CN103691704B CN201310705448.9A CN201310705448A CN103691704B CN 103691704 B CN103691704 B CN 103691704B CN 201310705448 A CN201310705448 A CN 201310705448A CN 103691704 B CN103691704 B CN 103691704B
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CN
China
Prior art keywords
adsorption
tube
cleaner plate
pump
hole
Prior art date
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Application number
CN201310705448.9A
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Chinese (zh)
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CN103691704A (en
Inventor
曲坤
权基瑛
周保全
罗强强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Hefei BOE Optoelectronics Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Hefei BOE Optoelectronics Technology Co Ltd
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Application filed by BOE Technology Group Co Ltd, Hefei BOE Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201310705448.9A priority Critical patent/CN103691704B/en
Publication of CN103691704A publication Critical patent/CN103691704A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04Cleaning by suction, with or without auxiliary action

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  • Cleaning In General (AREA)

Abstract

The invention discloses a kind of cleaning device, comprise: board, adsorption pump and adsorption tube, described adsorption tube is arranged on board, and the position of corresponding adsorption tube offers adsorption hole on board, and the position of the corresponding adsorption hole of adsorption tube is communicated with adsorption hole, all adsorption tubes are connected with adsorption pump.The present invention is by arranging above-mentioned cleaning device, replace the existing method removing cullet manually, cullet can not only be cleared up, the fragment article of other various shape can also be cleared up, this cleaning device is placed on board, cleaner plate overlaps with cullet, vacuumized by adsorption pump, by the adsorption hole in cleaner plate, cullet are drawn in adsorption hole, be adsorbed to further in adsorption tube, thus realize the removing of cullet, cleaning course is without the need to manually, reduce dangerous operation, avoid the scuffing to equipment such as vacuum chambers, proterctive equipment, the time of removing cullet can also be reduced simultaneously, improve cleaning efficiency, the mobility of equipment can also be improved further.

Description

A kind of cleaning device
Technical field
The present invention relates to Display Technique field, particularly a kind of cleaning device.
Background technology
At TFT(ThinFilmTransistor, thin film field-effect pipe transistor) production in, may cause the substrate of glass material that fragmentation occurs owing to being subject to equipment extruding or operate miss etc. in manufacturing process, need to clear up the glass of these fragmentations in time, in order to avoid affect the carrying out of subsequent substrate and follow-up flow process.
If glass is broken in protractor (Indexer) or on manipulator, deal with also more convenient, if but it is broken inside vacuum chamber, dealing with will relative complex, on the one hand in the process that the cullet in vacuum chamber are processed, cullet may by the surface tear of some equipment (such as vacuum chamber), and these equipment once be scratched cannot continue to use, if artificially manual on the other hand, cullet are processed, also virtually can add the danger to operating personnel, easily hand be scratched.
Based on above-mentioned, carry out manually in processing procedure in prior art to cullet, the danger of scuffing hand usually bringing the danger that scratches equipment and bring to operating personnel, also increases labour simultaneously.
Summary of the invention
(1) technical problem that will solve
The technical problem to be solved in the present invention how to eliminate the danger of manual handle broken glass, avoids causing scuffing to equipment.
(2) technical scheme
For solving the problems of the technologies described above, the invention provides a kind of cleaning device, comprise: cleaner plate, adsorption pump and adsorption tube, described adsorption tube is arranged in cleaner plate, and the position of corresponding adsorption tube offers adsorption hole in cleaner plate, and the position of the corresponding adsorption hole of adsorption tube is communicated with adsorption hole, all adsorption tubes are connected with adsorption pump.
Further, the distribution pattern of described adsorption hole in described cleaner plate is square, rhombus, circular family or ellipse.
Further, when described adsorption hole in cleaner plate with square distribution, described adsorption tube vertically in bar shaped arrange, a corresponding row adsorption hole.
Further, when described adsorption hole distributes with rhombus in cleaner plate, the adsorption holes of adjacent two row stagger in the horizontal direction mutually, and described adsorption tube is vertically arranged in bar shaped, a corresponding row adsorption hole.
Further, when described adsorption hole distributes with circular or ellipse in cleaner plate, adsorption hole is the outwards distribution in concentric circles from cleaner plate center, and described adsorption tube is that annular is arranged along adsorption hole.
Further, described adsorption tube also comprises tube connector before being connected to adsorption pump, and one end of adsorption tube is closed, and the other end is provided with connectivity port, is connected to adsorption pump by tube connector.
Further, described adsorption tube also comprises tube connector before being connected to adsorption pump, described annular adsorption tube is provided with connectivity port, and is connected to adsorption pump by tube connector.
Further, also comprise handle, be arranged on the both sides of described cleaner plate.
Further, also comprise operating grip, be arranged on described adsorption pump, control the opening and closing of adsorption pump vacuum.
Further, the back side of described cleaner plate is also provided with the support bar of diagonal.
(3) beneficial effect
A kind of cleaning device that the embodiment of the present invention provides, comprise: board, adsorption pump and adsorption tube, described adsorption tube is arranged on board, and the position of corresponding adsorption tube offers adsorption hole on board, and the position of the corresponding adsorption hole of adsorption tube is communicated with adsorption hole, all adsorption tubes are connected with adsorption pump.The present invention is by arranging above-mentioned cleaning device, replace the existing method removing cullet manually, cullet can not only be cleared up, the fragment article of other various shape can also be cleared up, this clear cleaning device is placed on board, cleaner plate overlaps with cullet, vacuumized by adsorption pump, by the adsorption hole in cleaner plate, cullet are drawn in adsorption hole, be adsorbed to further in adsorption tube, thus realize the removing of cullet, cleaning course is without the need to manually, reduce dangerous operation, avoid the scuffing to equipment such as vacuum chambers, proterctive equipment, the time of removing cullet can also be reduced simultaneously, improve cleaning efficiency, the mobility of equipment can also be improved further.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of cleaning device that the embodiment of the present invention provides;
Fig. 2 is that in the embodiment of the present invention, adsorption hole is square graphical distribution schematic diagram;
Fig. 3 is that in the embodiment of the present invention, adsorption hole assumes diamond in shape graphical distribution schematic diagram;
Fig. 4 is the schematic diagram of the first scheme tube connector that the embodiment of the present invention provides;
Fig. 5 is the schematic diagram of the first scheme tube connector that the embodiment of the present invention provides;
Fig. 6 is the schematic diagram of the first scheme tube connector that the embodiment of the present invention provides
Fig. 7 is the cleaning device schematic rear view that the embodiment of the present invention provides.
Detailed description of the invention
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples for illustration of the present invention, but are not used for limiting the scope of the invention.
Embodiments provide a kind of cleaning device, schematic diagram as shown in Figure 1, this cleaning device is mainly used for the clean of cullet in array substrate machining process, specifically comprise: cleaner plate 1, adsorption pump 2 and adsorption tube 3, adsorption tube 3 is arranged in cleaner plate, and the position of corresponding adsorption tube 3 offers adsorption hole M in cleaner plate 1, and the position of the corresponding adsorption hole M of adsorption tube 3 is communicated with adsorption hole M, and all adsorption tubes 3 are connected with adsorption pump 2.
By arranging adsorption hole M in cleaner plate 1, cleaner plate 1 being arranged on cullet, by vacuum suction, cullet absorption being got up, realizing cleaning cullet.
It should be noted that, be described to utilize this cleaning device to clear up cullet in the present embodiment, but this cleaning device can not only clear up cullet, can also clear up the fragment article of other various shape, application is more extensive.
Preferably, the distribution pattern of adsorption hole M in the present embodiment in cleaner plate 1 is square, rhombus, circular family or ellipse, wherein adsorption hole M is square graphical distribution schematic diagram as shown in Figure 2, adsorption hole M assumes diamond in shape graphical distribution schematic diagram as shown in Figure 3, in addition, adsorption hole M can also the distribution of rounded or elliptical graphic, is wherein be described to be distributed as example according to the square figure of Fig. 2 in Fig. 1.
Preferably, several scheme is provided in the present embodiment:
The first scheme: when adsorption hole M as Fig. 2 in cleaner plate 1 with square distribution, so adsorption tube 3 is arranged along vertical in bar shaped, a corresponding row adsorption hole M, as shown in Figure 4.Further, adsorption tube 3 also comprises tube connector 4 before being connected to adsorption pump 2, and one end of adsorption tube 3 is closed, and the other end is provided with connectivity port, is connected to adsorption pump 2 by tube connector 4.Tube connector 4 wherein comprises two parts, and a part is horizontal segment, and be connected with adsorption tube 3 terminal, another part is vertical section, and the adsorption tube 3 of above-mentioned vertical section is connected to adsorption pump 2.
First scheme: as adsorption hole M as Fig. 3 distributes with rhombus in cleaner plate 1, the adsorption hole M of adjacent two row stagger in the horizontal direction mutually, and so adsorption tube 3 is vertically arranged in bar shaped, a corresponding row adsorption hole M, as shown in Figure 5.Further, adsorption tube 3 also comprises tube connector 4 before being connected to adsorption pump 2, and one end of adsorption tube 3 is closed, and the other end is provided with connectivity port, is connected to adsorption pump 2 by tube connector 4.
Above-mentioned two schemes is all that cleaner plate 1 is in square situation, below providing a kind of cleaner plate is if circular, the third scheme i.e.: when adsorption hole M in cleaner plate 1 with circular distribution, adsorption hole M is the outwards distribution in concentric circles from cleaner plate 1 center, adsorption tube 3 is that annular is arranged along adsorption hole M, as shown in Figure 6.Further, adsorption tube 3 also comprises tube connector 4 before being connected to adsorption pump 2, and one end of adsorption tube 3 is closed, and the other end is provided with connectivity port, is connected to adsorption pump 2 by tube connector 4.
In addition, cleaner plate 1 is also oval, and adsorption hole also ovalize distribution, the same circular configuration of adsorption tube, connecting pipe structure, repeats no more herein.
It should be noted that, in the present embodiment adsorption hole M distribution pattern except above-mentioned three kinds of schemes can also be the distribution of other figures, but principle is identical, is namely all be provided with adsorption hole M in cleaner plate 1, is adsorbed the cullet under cleaner plate 1 by these adsorption holes M.
It should be noted that, the adsorption pump 2 in the present embodiment is dry pump, realizes the connection between adsorption hole M and dry pump by adsorption tube 3 and tube connector 4, realizes the effect of inhaling vacuum.
Preferably, the cleaning device in the present embodiment also comprises handle, is arranged on the both sides of cleaner plate 1, also comprises operating grip in addition, is arranged on adsorption pump 2, controls the opening and closing of adsorption pump 2 vacuum.When operating operating grip, when opening adsorption pump 2, adsorption pump 2 just forms vacuum, thus the absorption of the cullet at adsorption hole M place is come in.Afterwards, by adjustment operation handle, close adsorption pump 2, then the cullet that absorption is come in are discharged into outside, realize cleaning function.
Preferably, the back side of the cleaning device cleaner plate 1 in the present embodiment is also provided with the support bar 6 of diagonal, and the schematic rear view of this cleaning device as shown in Figure 7.
Based on above-mentioned, the process that the cleaning device that the present embodiment provides cleans cullet is specific as follows:
Directly this cleaning device is put on board, ensures that cleaner plate 1 can cover cullet completely or cullet can be covered completely through translation, start motor afterwards, vacuumize, in time acquiring a certain degree, lift this cleaner plate by two people on both sides, direct pull-up process.After treating that vacuum sucks, directly lift handle and be put into and realize on ready cystosepiment or plastics, directly decontrol vacuum, cullet drop immediately, directly process.If also have remaining chip, can process with dust catcher, but directly can once siphon away a large amount of cullet with this cleaning device, save the time.
In sum, by the cleaning device using the present embodiment to provide, replace the existing method removing cullet manually, cullet can not only be cleared up, the fragment article of other various shape can also be cleared up, this clear cleaning device is placed on board, cleaner plate overlaps with cullet, vacuumized by adsorption pump, by the adsorption hole in cleaner plate, cullet are drawn in adsorption hole, be adsorbed to further in adsorption tube, thus realize the removing of cullet, cleaning course is without the need to manually, reduce dangerous operation, avoid the scuffing to equipment such as vacuum chambers, proterctive equipment, the time of removing cullet can also be reduced simultaneously, improve cleaning efficiency, the mobility of equipment can also be improved further.
Above embodiment is only for illustration of the present invention; and be not limitation of the present invention; the those of ordinary skill of relevant technical field; without departing from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all equivalent technical schemes also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.

Claims (8)

1. a cleaning device, it is characterized in that, comprise: cleaner plate, adsorption pump and adsorption tube, described adsorption tube is arranged in cleaner plate, and the position of corresponding adsorption tube offers adsorption hole in cleaner plate, and the position of the corresponding adsorption hole of adsorption tube is communicated with adsorption hole, all adsorption tubes are connected with adsorption pump; The distribution pattern of described adsorption hole in described cleaner plate is square or rhombus; Wherein, when described adsorption hole in cleaner plate with square distribution, described adsorption tube is vertically arranged in bar shaped, a corresponding row adsorption hole, when described adsorption hole distributes with rhombus in cleaner plate, the adsorption hole of adjacent two row staggers in the horizontal direction mutually, and described adsorption tube is vertically arranged in bar shaped, a corresponding row adsorption hole; Described adsorption tube also comprises tube connector before being connected to adsorption pump, and one end of adsorption tube is closed, and the other end is provided with connectivity port, is connected to adsorption pump by tube connector.
2. cleaning device as claimed in claim 1, is characterized in that, also comprise handle, be arranged on the both sides of described cleaner plate.
3. cleaning device as claimed in claim 1, is characterized in that, also comprise operating grip, be arranged on described adsorption pump, controls the opening and closing of adsorption pump vacuum.
4. cleaning device as claimed in claim 1, it is characterized in that, the back side of described cleaner plate is also provided with the support bar of diagonal.
5. a cleaning device, it is characterized in that, comprise: cleaner plate, adsorption pump and adsorption tube, described adsorption tube is arranged in cleaner plate, and the position of corresponding adsorption tube offers adsorption hole in cleaner plate, and the position of the corresponding adsorption hole of adsorption tube is communicated with adsorption hole, all adsorption tubes are connected with adsorption pump; The distribution pattern of described adsorption hole in described cleaner plate is circular or oval, and adsorption hole is the outwards distribution in concentric circles from cleaner plate center, and described adsorption tube is that annular is arranged along adsorption hole; Described adsorption tube also comprises tube connector before being connected to adsorption pump, described annular adsorption tube is provided with connectivity port, and is connected to adsorption pump by tube connector.
6. cleaning device as claimed in claim 5, is characterized in that, also comprise handle, be arranged on the both sides of described cleaner plate.
7. cleaning device as claimed in claim 5, is characterized in that, also comprise operating grip, be arranged on described adsorption pump, controls the opening and closing of adsorption pump vacuum.
8. cleaning device as claimed in claim 5, it is characterized in that, the back side of described cleaner plate is also provided with the support bar of diagonal.
CN201310705448.9A 2013-12-19 2013-12-19 A kind of cleaning device Active CN103691704B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310705448.9A CN103691704B (en) 2013-12-19 2013-12-19 A kind of cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310705448.9A CN103691704B (en) 2013-12-19 2013-12-19 A kind of cleaning device

Publications (2)

Publication Number Publication Date
CN103691704A CN103691704A (en) 2014-04-02
CN103691704B true CN103691704B (en) 2015-12-09

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104404595B (en) * 2014-12-22 2017-10-20 天全君力电子材料有限公司 A kind of broken paper tinsel cleaner
CN106269767A (en) * 2016-10-09 2017-01-04 无锡宏纳科技有限公司 Integrated circuit workshop is with taking out dirt system
CN107363795A (en) * 2017-08-29 2017-11-21 太仓望虞机械科技有限公司 A kind of dustless rotary table of ring-type

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997008741A1 (en) * 1995-08-22 1997-03-06 Siemens Aktiengesellschaft Suction plate for wafer
JP2009233831A (en) * 2008-03-28 2009-10-15 Fuji Heavy Ind Ltd Vacuum chuck
KR20100030240A (en) * 2008-09-10 2010-03-18 수양트레이딩 주식회사 Vacuum cleaner for sticks
CN102950690A (en) * 2011-08-17 2013-03-06 钱德洪 Trimming tooling for sunroof outer boards

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997008741A1 (en) * 1995-08-22 1997-03-06 Siemens Aktiengesellschaft Suction plate for wafer
JP2009233831A (en) * 2008-03-28 2009-10-15 Fuji Heavy Ind Ltd Vacuum chuck
KR20100030240A (en) * 2008-09-10 2010-03-18 수양트레이딩 주식회사 Vacuum cleaner for sticks
CN102950690A (en) * 2011-08-17 2013-03-06 钱德洪 Trimming tooling for sunroof outer boards

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