CN207452296U - A kind of new single crystal furnace heater structure - Google Patents
A kind of new single crystal furnace heater structure Download PDFInfo
- Publication number
- CN207452296U CN207452296U CN201720894778.0U CN201720894778U CN207452296U CN 207452296 U CN207452296 U CN 207452296U CN 201720894778 U CN201720894778 U CN 201720894778U CN 207452296 U CN207452296 U CN 207452296U
- Authority
- CN
- China
- Prior art keywords
- heating part
- heater
- single crystal
- main
- crystal furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 16
- 238000010438 heat treatment Methods 0.000 claims abstract description 113
- 238000005452 bending Methods 0.000 claims abstract description 16
- 125000004122 cyclic group Chemical group 0.000 claims 1
- 230000002277 temperature effect Effects 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a kind of new single crystal furnace heater structures, including primary heater and the secondary heater being arranged below primary heater, the primary heater is the cylindrical shape extended to form by heating plate bending, the primary heater has multiple short heating parts and long heating part, it is alternately distributed successively before and after the short heating part and long heating part and forms ring-shaped, the secondary heater does not have the crosswise heating plate that heating plate bending extends to form, using the heating part structure of length unevenness, ensure that required heterogeneity phantom is presented in thermal field, secondary heater is arranged on bottom, crosswise structure is presented in secondary heater, realize even temperature effect, thermal field combination can form entirety at upper and lower two.
Description
Technical field
The utility model belongs to heating unit field, and being used to prepare the dedicated thermal field of silicon single crystal institute especially suitable for one kind adds
Thermojunction.
Background technology
The production single crystal diameter of crystal pulling at this stage constantly increases, and inventory, which is only continuously improved, could improve yield rate and production
Amount.Particularly the major diameter single crystal of 8.5 inches of major diameter or more, the qualities such as oxygen and carbon content and minority carrier life time are most important.But
It is to add major diameter single crystal to frequently can lead to that heating part is complicated, and heating system thermal field is uneven, causes improvement cost larger,
Equipment failure rate is high, in order to which heater is more abundant, well-balanced to the heat of quartz crucible during melt, it is therefore desirable to provide a kind of
It reduces accident rate and avoided being complicated heating structure simultaneously,.
Utility model content
Purpose of utility model, the utility model is complex for above-mentioned existing heating structure, can not realize uniform heat
The problem of, and provide a kind of new heating structure, it is uniform with thermal field, it is simple in structure efficient the characteristics of.
Problem to be solved in the utility model is realized by following technical scheme：
A kind of new single crystal furnace heater structure is provided, including primary heater and is arranged below primary heater
Secondary heater, the primary heater are the cylindrical shape extended to form by heating plate bending, and the primary heater has multiple
Short heating part and long heating part are alternately distributed before and after the short heating part and long heating part and form ring-shaped successively；
The secondary heater does not have the crosswise heating plate that heating plate bending extends to form.
Further, the top of the short heating part and long heating part is flush.
Further, the secondary heater is by the first side heating part, the second side heating part, the first main heating part and second
Main heating part composition, the described first main heating part and the second main heating part are into symmetrical arranged, the first side heating part, the
Two sides heating part into being symmetrical arranged, two elongated ends of the first main heating part respectively with the first side heating part and the second side
Heating part connects, and the respective elongated end in the first side heating part and the second side heating part is led respectively with second correspondingly
The elongated end of heating part is connected to each other.
Further, set in primary heater bottom there are two bending hook, two bending hooks are symmetrical arranged into opposite.
Further, it is described to be connected to main electrode in the first main heating, it is connected to negative electrode in the second main heating part.
Further, the first side heating part, the second side heating part, the first main heating part and the second main heating part are all by bending
Heating plate composition.
The utility model has the advantage that for existing：
It using the heating part structure of length unevenness, arranges in pairs or groups successively, long heating part can be very good supplement middle part vacancy
Thermal field, and short heating part can ensure that required heterogeneity phantom is presented in thermal field.
Secondary heater is arranged on bottom, and crosswise structure is presented in secondary heater, it is ensured that warm at the center of bottom thermal field
Highest is spent, extending from center to both sides realizes even temperature effect, and thermal field, which combines, at upper and lower two can form entirety
Overall structure is simple, has good thermal field structure, and the long heating part of side rib protrusion can realize thermal field up and down
Connection, greatly improve the growth rate and accuracy of silicon rod.
Description of the drawings
Fig. 1 is the side structure schematic view of the utility model.
Fig. 2 is the overlooking the structure diagram of the utility model.
Wherein, primary heater 1, secondary heater 3, short heating part 1a, long heating part 1b, the first main heating part 3a, the first side
Heating part 3b, the second main heating part 3c, the second side heating part 3d.
Specific embodiment
Shown in reference picture 1, Fig. 2, a kind of new single crystal furnace heater structure including primary heater 1 and is arranged on master
Secondary heater 3 below heater, the primary heater be by the cylindrical shape that extends to form of heating plate bending, it is described short plus
The top of hot portion and long heating part is flush, and the primary heater has multiple short heating part 1a and long heating part 1b, described
Short heating part and long heating part before and after be alternately distributed successively and form ring-shaped, set that there are two bendings in primary heater bottom
Hook, two bending hooks are symmetrical arranged into opposite.；The secondary heater does not have the crosswise heating that heating plate bending extends to form
Plate.
As shown in Fig. 2, the secondary heater is by the first side heating part 3b, the second side heating part 3d, the first main heating part
The main heating part 3c compositions of 3a and second, the described first main heating part and the second main heating part are into symmetrical arranged, and described first
Into being symmetrical arranged, two elongated ends of the first main heating part add respectively with the first side for side heating part, the second side heating part
Hot portion is connected with the second side heating part, and the respective elongated end difference in the first side heating part and the second side heating part is one by one
The corresponding elongated end with the second main heating part is connected to each other, described to be connected to main electrode in the first main heating, is added in the second master
Hot portion is connected to negative electrode.First side heating part, the second side heating part, the first main heating part and the second main heating part are all by bending
Heating plate forms.
The utility model is described further below according to attached drawing：
In use, primary heater 1 circularizes distribution, and short heating part and long heating part are gradually heated up can gradual shape
It is zigzag thermal field into bottom, in the crosswise thermal field of secondary heater, connects gradually form special-shaped thermal field up and down, pass through adjusting
The direction of secondary heater can change thermal field center.
Claims (6)
1. a kind of new single crystal furnace heater structure, it is characterised in that：Including primary heater (1) and it is arranged under primary heater
The secondary heater (3) of side, the primary heater are the cylindrical shape extended to form by heating plate bending, and the primary heater has
There are multiple short heating parts (1a) and long heating part (1b), be alternately distributed successively before and after the short heating part and long heating part and group
Cyclic shape；
The secondary heater does not have the crosswise heating plate that heating plate bending extends to form.
2. a kind of new single crystal furnace heater structure according to claim 1, it is characterised in that：The short heating part
It is flush with the top of long heating part.
3. a kind of new single crystal furnace heater structure according to claim 1, it is characterised in that：The secondary heater
It is made of the first side heating part (3b), the second side heating part (3d), the first main heating part (3a) and the second main heating part (3c), institute
The the first main heating part stated and the second main heating part are into symmetrical arranged, and the first side heating part, the second side heating part are paired
Claim to set, two elongated ends of the described first main heating part are connected respectively with the first side heating part and the second side heating part, institute
The extension with the second main heating part correspondingly respectively of the respective elongated end in the first side heating part stated and the second side heating part
End is connected to each other.
4. a kind of new single crystal furnace heater structure according to claim 1, it is characterised in that：In primary heater bottom
It sets there are two bending hook, two bending hooks are symmetrical arranged into opposite.
5. a kind of new single crystal furnace heater structure according to claim 3, it is characterised in that：Described leads first
Main electrode is connected in heating, negative electrode is connected in the second main heating part.
6. a kind of new single crystal furnace heater structure according to claim 3, it is characterised in that：First side heating part,
The second side heating part, the first main heating part and the second main heating part are all made of the heating plate bent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720894778.0U CN207452296U (en) | 2017-07-21 | 2017-07-21 | A kind of new single crystal furnace heater structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720894778.0U CN207452296U (en) | 2017-07-21 | 2017-07-21 | A kind of new single crystal furnace heater structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207452296U true CN207452296U (en) | 2018-06-05 |
Family
ID=62247728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720894778.0U Expired - Fee Related CN207452296U (en) | 2017-07-21 | 2017-07-21 | A kind of new single crystal furnace heater structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207452296U (en) |
-
2017
- 2017-07-21 CN CN201720894778.0U patent/CN207452296U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180605 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |