CN207408451U - Probe card device and its signal transmission module and rectangular probe - Google Patents
Probe card device and its signal transmission module and rectangular probe Download PDFInfo
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- CN207408451U CN207408451U CN201721439705.9U CN201721439705U CN207408451U CN 207408451 U CN207408451 U CN 207408451U CN 201721439705 U CN201721439705 U CN 201721439705U CN 207408451 U CN207408451 U CN 207408451U
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Abstract
The utility model discloses a kind of probe card device and its signal transmission module and rectangular probe.Probe card device includes pinboard, the first support plate, the second support plate and multiple rectangular probes.First plate face of pinboard is equipped with multiple metal balls.The first direction that first support plate is formed with position along vertical first plate face corresponds to multiple first perforations of multiple metal balls.Second support plate is formed with multiple first perforations in multiple second perforations shifted to install.Each rectangular probe has the first contact-segment and the second contact-segment positioned at opposite side.Multiple first contact-segments are pierced by multiple first perforations and connect multiple metal balls respectively.In each rectangular probe, the first contact-segment connects corresponding metal ball at least partially along the second direction non-parallel to first direction.Whereby, the contact area between the first contact-segment and metal ball can be effectively increased, and so as to strengthen the combination power between rectangular probe and pinboard, reduce the contact resistance between rectangular probe and pinboard.
Description
Technical field
The utility model is related to a kind of probe card more particularly to a kind of probe card devices and its signal transmission module and rectangle
Probe.
Background technology
When semiconductor chip is tested, test equipment is to be electrically connected by a probe card device with determinand, and
It is analyzed by signal transmission and signal, to obtain the test result of determinand.Existing probe card device is equipped with corresponding determinand
Electrical contact and multiple probes for arranging, with by above-mentioned multiple probes, the corresponding of point contact determinand is electrically connected with simultaneously
Point.
In more detail, the probe type of existing probe card device includes circular probe and rectangular probe, above-mentioned rectangle
The external form of probe can be shaped according to designer's demand.The rectangular probe is after plugging and being fixed on probe base, palpus and signal
Pinboard combines, with using the wiring of Signals Transfer Board by the signal transmission measured to tester table.
However, general rectangular probe backshank and Signals Transfer Board electrical contact (such as：Metallic tin ball or metal copper ball)
Contact it is ineffective, usually have with reference to power is bad, contact resistance is excessive and signal transmission the problems such as noise occurs and occurs.
Then, the present inventor's thoughts drawbacks described above can improve, and be that spy concentrates on studies and coordinates the utilization of the principles of science, finally
It proposes a kind of design rationally and is effectively improved the utility model of drawbacks described above.
Utility model content
The utility model embodiment is to provide a kind of probe card device and its signal transmission module and rectangular probe, can have
Effect ground improve existing probe card device institute there may be the defects of.
The utility model embodiment discloses a kind of probe card device, including a pinboard, one first support plate, one second support plate
And multiple rectangular probes.Pinboard has one first plate face and one second plate face positioned at opposite side, and the pinboard
Multiple metal balls are provided in first plate face；First support plate is formed with multiple first perforations, and multiple described first
The position of perforation is along a first direction of vertical first plate face and corresponding to multiple metal balls；Second support plate is formed with
Multiple second perforations, and multiple second perforations are in respectively to shift to install with multiple first perforations；Multiple rectangles are visited
Pin is installed on first support plate and second support plate, and each rectangular probe has one first contact positioned at opposite side
The second contact-segments of Duan Yuyi；Wherein, first contact-segment of multiple rectangular probes is pierced by first support plate respectively
Multiple first perforations and multiple metal balls are connected to, and second contact of multiple rectangular probes
Section is pierced by multiple second perforations of second support plate and to contact a wafer to be measured respectively；Wherein, in each institute
It states in rectangular probe, first contact-segment is connected at least partially along the second direction non-parallel to the first direction
In the corresponding metal ball.
Preferably, in each rectangular probe, the distal portion of first contact-segment is defined as a contact site, institute
Contact site is stated to be inserted in the corresponding metal ball, and the contact site at least partially along the second direction connect
It is connected to the corresponding metal ball.
Preferably, in each rectangular probe, the length of the contact site is at least the length of first contact-segment
The length of 25% or the contact site of degree is at least the 25% of the height of the corresponding metal ball.
Preferably, in each rectangular probe, the contact site plating is equipped with a coat of metal, and the metal-plated
The material of layer is identical to the material of the corresponding metal ball.
The utility model embodiment also discloses a kind of signal transmission module of probe card device, including a pinboard and multiple
Rectangular probe.Pinboard has one first plate face and one second plate face positioned at opposite side, and the pinboard is described the
Multiple metal balls are provided in one plate face, the pinboard defines a first direction of vertical first plate face；Multiple squares
Shape probe respectively has one first contact-segment and one second contact-segment positioned at opposite side；Wherein, the institute of multiple rectangular probes
It states the first contact-segment and is connected to multiple metal balls；Wherein, in each rectangular probe, first contact-segment
Be connected to the corresponding metal ball at least partially along the second direction non-parallel to the first direction.
Preferably, in each rectangular probe, the distal portion of first contact-segment is defined as a contact site, institute
Contact site is stated to be inserted in the corresponding metal ball, and the contact site at least partially along the second direction connect
It is connected to the corresponding metal ball.
Preferably, in each rectangular probe, the length of the contact site is at least the length of first contact-segment
The length of 25% or the contact site of degree is at least the 25% of the height of the corresponding metal ball.
Preferably, in each rectangular probe, the contact site plating is equipped with a coat of metal, and the metal-plated
The material of layer is identical to the material of the corresponding metal ball.
The utility model embodiment separately discloses a kind of rectangular probe of probe card device, is connect including an interlude, one first
Touch section and one second contact-segment, a pawl part.First contact-segment and the second contact-segment are located at opposite the two of the interlude respectively
Side, and the length direction of first contact-segment is defined as a first direction, and at least local of first contact-segment is used
To be connected to the metal ball on a pinboard along the second direction non-parallel to the first direction；Wherein, described
One contact-segment is equipped with an identification part, and the identification part is in asymmetric shape compared with first contact-segment；Pawl part is from institute
Interlude extension is stated to be formed.
Preferably, the distal portion of first contact-segment is defined as a contact site, and the length of the contact site is at least
The 25% of the length of first contact-segment, and contact site plating is equipped with one of a layer gold and a tin layers.
In conclusion the probe card device and its signal transmission module and rectangular probe of the utility model embodiment, can lead to
It is corresponding to cross being connected at least partially along the second direction non-parallel to above-mentioned first direction for first contact-segment
Metal ball, and so that the contact area between first contact-segment and metal ball is effectively increased, so as to effectively strengthen square
Combination power between shape probe and pinboard, the contact resistance being effectively reduced between rectangular probe and pinboard effectively promote letter
Number transmission reliability.
To be further understood that the feature of the utility model and technology contents, refer to below in connection with the detailed of the utility model
Describe bright and attached drawing in detail, however attached drawing is only provided and referred to illustrating to use, and is not used for making the scope of protection of the utility model any
Limitation.
Description of the drawings
Fig. 1 is the stereoscopic schematic diagram of the utility model embodiment probe card device.
Fig. 2 is schematic cross-sectional views of the Fig. 1 along II-II hatching lines.
Fig. 3 is schematic cross-sectional view of the contact site in the utility model embodiment rectangular probe in groove-like.
Fig. 4 is that the contact site in the utility model embodiment rectangular probe is in convex block-like schematic cross-sectional view.
Fig. 5 is length or metal ball of the contact site length in the utility model embodiment rectangular probe compared with contact-segment
Height have preferred proportion scope schematic cross-sectional view.
Fig. 6 is that the contact site in the utility model embodiment rectangular probe plates the schematic cross-sectional view for setting the coat of metal.
Fig. 7 is the schematic cross-sectional view of another embodiment probe card device of the utility model.
Fig. 8 is that identification part in another embodiment rectangular probe of the utility model with contact site is to be separated from each other cuing open for construction
Depending on schematic diagram.
Specific embodiment
It please refers to Fig.1 to Fig. 8, is the embodiment of the utility model, need to first illustrate, the present embodiment respective figure is carried
And correlated measure and external form, be only used for specifically describing the embodiment of the utility model, in order to understand the utility model
Content rather than for limiting to the scope of protection of the utility model.
Such as Fig. 1, the embodiment of the utility model discloses a kind of probe card device 100.Probe card device 100 includes a switching
Plate 1, a probe base 2 and multiple rectangular probes 3.Wherein, probe base 2 includes one first support plate 21 (upper die) and one the
Two support plates 22 (lower die), the first support plate 21 are in be positioned apart from each other with the second support plate 22, and the two of multiple rectangular probes 3
End is each passed through the first support plate 21 and the second support plate 22, and one end for being piercing in the first support plate 21 of multiple rectangular probes 3 is
It is electrically connected in pinboard 1.In addition, probe base 2 can also be provided between the first support plate 21 and the second support plate 22 between one
Partition plate (not shown), but the utility model is not only restricted to this.
Need to first it illustrate, for the ease of understanding the present embodiment, so the local structure of probe card device 100 is only presented in attached drawing
It makes (such as：Single rectangular probe 3 and its corresponding pinboard 1 and 2 position of probe base), in order to which probe card is clearly presented
Put 100 various components construction and connection relation.It will illustrate the various components structure of the present embodiment probe card device 100 respectively below
It makes and its connection relation.
Such as Fig. 1, pinboard 1 is a Signals Transfer Board (Signal Transfer Board, STB) in the present embodiment.Turn
Fishplate bar 1 has one first plate face 11 and one second plate face 12 positioned at opposite side, wherein, the first plate face 11 of pinboard 1 can be used
To be electrically connected at multiple rectangular probes 3, the second plate face 12 of pinboard 1 can be used to be electrically connected at a circuit board that (figure is not painted
Show), and pinboard 1 can be used to electrical contact that is arbitrarily enlarged or reducing between circuit board and multiple rectangular probes 3 and (scheme not mark
Number) correspondence ratio or distribution, that is to say, that the distribution of circuit board and multiple electrical contacts of pinboard 1 can be big
In or less than multiple rectangular probes 3 and the distribution of the electrical contact of pinboard 1.In more detail, such as Fig. 2, pinboard 1 exists
Multiple metal balls 13 are provided in first plate face 11 (such as：Metal copper ball or metallic tin ball), and the first plate face 11 of pinboard 1
It is that multiple rectangular probes 3 are electrically connected at by multiple metal balls 13.It is preferred that metal ball 13 is substantially in tablet convex block shape
(or hemispherical), and the material structure of metal ball is sequentially copper (Cu), nickel (Ni) and gold (Au) from inside to outside.In more detail
It says, metal ball 13 is the metal gasket (Pad) on the C4 layers of pinboard 1, but the utility model is not only restricted to this.
Such as Fig. 2, the first support plate 21 of probe base 2 is formed with multiple first perforations 211, and multiple first perforations 211
Position corresponds respectively to multiple metal balls 13 approximately along a first direction D1 of vertical first plate face 11.Second support plate 22 is substantially
Parallel to the first support plate 21, the second support plate 22 is formed with multiple second perforations 221, and multiple second perforations 221 are substantially distinguished
It is in shift to install with multiple first perforations 211.Wherein, each first perforation 211 has one first aperture (the non-label of figure), and every
A second perforation 221 has one second aperture (the non-label of figure) no more than the first aperture.
Multiple rectangular probes 3 are all electrically conductive in this present embodiment and with flexible vertical bar columnar structures.Each rectangle
The cross section of probe 3 is generally rectangular shaped (including square), and the material of each rectangular probe 3 may, for example, be golden (Au),
Silver-colored (Ag), copper (Cu), nickel (Ni), cobalt (Co) or its alloy, and the material of rectangular probe 3 is preferably copper, copper alloy, nickel cobalt
At least one of alloy, palladium-nickel alloy, nickel-manganese, nickel tungsten, nickel-phosphorus alloy and Pd-Co alloy, but this practicality is new
The rectangular probe 3 of type is not limited with above-mentioned material.
Multiple rectangular probes 3 are installed on the first support plate 21 and the second support plate 22, and are substantially in rectangular arrangement.Each square
Shape probe 3 have positioned at one first contact-segment 31 and one second contact-segment 32 of opposite side and positioned at the first contact-segment 31 and
An interlude 33 between second contact-segment 32.Wherein, the first contact-segment 31 of multiple rectangular probes 3 is pierced by the first support plate 21 respectively
Multiple first perforations 211 and be connected to multiple metal balls 13, and the second contact-segment 32 of multiple rectangular probes 3 is divided
It is not pierced by multiple second perforations 221 of the second support plate 22 and to contact a wafer to be measured (figure does not illustrate).
It should be noted that although multiple rectangular probes 3 of the present embodiment and pinboard 1 are to be made with arranging in pairs or groups in probe base 2
One explanation, but rectangular probe 3 and the practical application of pinboard 1 are not limited to this.For example, rectangular probe 3 can be single
Only component or rectangular probe 3 can also be combined with each other into a signal transmission module with pinboard 1, and applied to various
On the probe card device 100 of type.Furthermore although the rectangular probe 3 of the present embodiment is to use MEMS (MEMS) skill
It is described manufactured by art, but rectangular probe 3 is not limited to this when actually manufacturing.In other words, rectangular probe 3 can also
It is using manufactured by other technologies.
Since the construction of multiple rectangular probes 3 of the present embodiment is all roughly the same, so attached drawing and the description below are with list
Exemplified by a rectangular probe 3, but the utility model is not only restricted to this.For example, in the embodiment not illustrated in the utility model,
Multiple rectangular probes 3 can also be with construction different each other.
Please continue to refer to Fig. 2, the first contact-segment 31 of rectangular probe 3 at least partially along non-parallel to above-mentioned first party
Corresponding metal ball 13 is connected to a second direction D2 of D1.
Whereby, probe card device 100 can be by the first contact-segment 31 at least partially along non-parallel to above-mentioned first party
Corresponding metal ball 13 is connected to a second direction D2 of D1, and causes the contact between metal ball 13 of the first contact-segment 31
Area is effectively increased, so as to effectively strengthen the combination power between rectangular probe 3 and pinboard 1, be effectively reduced rectangle spy
Contact resistance between pin 3 and pinboard 1 and the effectively reliability of promotion signal transmission.
More specifically, in the present embodiment, the distal portion of the first contact-segment 31 of rectangular probe 3 is defined as a contact
Portion 311, contact site 311 is inserted in corresponding metal ball 13 (mode plugged can be joggle or mutually embedding), and contacts
Portion 311 is connected to corresponding metal ball 13 at least partially along second direction D2.
Whereby, probe card device 100 can be inserted in corresponding metal ball 13 by contact site 311, and contact site
311 at least partially along second direction D2 are connected to corresponding metal ball 13 so that have between rectangular probe 3 and pinboard 1
There are good fixed effect (being not easy to slip) and low contact resistance, so as to promote the quality of probe card device 100 with using the longevity
Life.
It should be noted that in the present embodiment, contact site 311 is in asymmetric shape (such as Fig. 3 compared with the first contact-segment 31
Inclined plane shape), but the utility model is not only restricted to this.For example, contact site 311 can also be in compared with the first contact-segment 31
Symmetry shape (groove-like of such as Fig. 3 or the convex block shape of Fig. 4).In addition, the shape of the contact site 311 of the present embodiment can pass through lithographic
It is processed, can also be processed by way of laser, the utility model is not limited with reference to the mode of plating.
Such as Fig. 5, in the present embodiment, the length L1 of contact site 311 has a preferable proportion.More particularly, connect
The length L1 that the length L1 of contact portion 311 is at least 25% or the contact site 311 of the length L2 of the first contact-segment 31 is at least phase
The 25% of the height H of corresponding metal ball 13, but the utility model is not only restricted to this.
Such as Fig. 6, in order to promote the combination power between the metal ball 13 of the contact site 311 of rectangular probe 3 and pinboard 1, contact
Portion 311 preferably plates and is equipped with a coat of metal 312, and the material of the coat of metal 312 is identical to corresponding metal ball 13
Material (such as：Copper or tin).
Another embodiment of the utility model discloses a kind of probe card device 100.The probe card device 100 of the present embodiment with
Above-described embodiment is roughly the same, and difference is in the structure design of rectangular probe 3.
Such as Fig. 7, in more detail, the rectangular probe 3 of the present embodiment includes an interlude 33, is located at 33 phase of interlude respectively
One first contact-segment 31 of anti-both sides and one second contact-segment 32 and the formed pawl part 331 that extends from interlude 33.The
The length direction of one contact-segment 31 is defined as a first direction D1, and the first contact-segment 31 is at least local to along non-parallel
The metal ball 13 being connected in a second direction D2 of first direction D1 on a pinboard 1.Wherein, the first contact-segment 31 is equipped with
One identification part 313, and identification part 313 is in asymmetric shape compared with the first contact-segment 31.In addition, the end of the first contact-segment 31
Position is defined as a contact site 311.
Whereby, rectangular probe 3 can be equipped with an identification part 313 by the first contact-segment 31 and identification part 313 is compared with first
Contact-segment 31 is in the structure design of asymmetric shape, and so that rectangular probe 3, can be by identification part 313 after probe base 2 is arranged in
It is whether consistent with the start orientation of other rectangular probes 3 to recognize each rectangular probe 3, so as to which probe card device 100 be substantially improved
Manufacture efficiency and quality.
In addition, the pawl part 331 of rectangular probe 3 can be used to one first support plate 21 or one being resisted against in a probe base 2
Two support plates 22 limit space of the rectangular probe 3 compared with probe base start about 2 whereby.Wherein, the pawl part of rectangular probe 3
331 is all identical with the relative position of identification part 313.
Since after rectangular probe 3 is arranged in probe base 2, interlude 33 and the pawl part 331 of rectangular probe 3 can be by first
21 or second support plate 22 of support plate blocks, so that it is difficult to be identified that whether pawl part 331, which fixes upper in correct position, and in
Between section 33 whether also be difficult to be identified towards being correctly oriented bending.
Compared with drawbacks described above, the probe card device 100 of the utility model embodiment can pass through the pawl part of rectangular probe 3
331 structure designs all identical with the relative position of identification part 313, so that the fixed position and centre of pawl part 331
The bending direction of section 33 can be identified by the orientation of identification part 313.
More specifically, the identification part 313 of rectangular probe 3 includes an inclined-plane, and a normal line vector on inclined-plane (do not mark by figure
Number) parallel to second direction D2, and inclined-plane is connected to corresponding metal ball 13 along second direction D2.In other words,
In the present embodiment, identification part 313 is located on contact site 311, but the utility model is not only restricted to this.For example, identify
Portion 313 can also be the construction being separated from each other with contact site 311, and identification part 313 is in non-right compared with the first contact-segment 31
Claim shape (small lugs for protruding from 31 one side of the first contact-segment of such as Fig. 8).
[technique effect of the utility model embodiment]
In conclusion the probe card device 100 and its signal transmission module of the utility model embodiment, can connect by first
That touches section 31 is connected to corresponding metal ball at least partially along the second direction D2 non-parallel to above-mentioned first direction D1
13, and so that the contact area between the first contact-segment 31 and metal ball 13 is effectively increased, it is visited so as to effectively strengthen rectangle
It combination power between pin 3 and pinboard 1, the contact resistance being effectively reduced between rectangular probe 3 and pinboard 1 and effectively carries
Rise the reliability of signal transmission.
Furthermore the probe card device 100 and its signal transmission module of the utility model embodiment can pass through rectangular probe 3
The plating of contact site 311 be equipped with a coat of metal 312, and the material of the coat of metal 312 is identical to corresponding metal ball 13
Material is (such as：Copper or tin), so as to promote the combination power between the metal ball 13 of the contact site 311 of rectangular probe 3 and pinboard 1.
In addition, the rectangular probe 3 of the probe card device 100 disclosed in the utility model embodiment, can pass through the first contact
Section 31 is equipped with an identification part 313 and identification part 313 is compared with the structure design that the first contact-segment 31 is in asymmetric shape, and causes square
Shape probe 3 can recognize the work of each rectangular probe 3 and other rectangular probes 3 after probe base 2 is arranged in by identification part 313
Whether dynamic orientation is consistent, so as to which the manufacture efficiency of probe card device 100 and quality be substantially improved.
Finally, the rectangular probe 3 of the probe card device 100 disclosed in the utility model embodiment can pass through pawl part 331
The all identical structure design with the relative position of identification part 313, so that after rectangular probe 3 is arranged in probe base 2, trip
The fixed position in portion 331 and the bending direction of interlude 33 can be identified by the orientation of identification part 313.
The foregoing is merely the preferred possible embodiments of the utility model, are not used for the protection model for limiting to the utility model
It encloses, all equivalent changes and modifications done according to the utility model claims should all belong to claims of the utility model
Protection domain.
Claims (10)
1. a kind of probe card device, which is characterized in that the probe card device includes：
One pinboard has one first plate face and one second plate face positioned at opposite side, and the pinboard is described first
Multiple metal balls are provided in plate face；
One first support plate, is formed with multiple first perforations, and the position of multiple first perforations is along vertical first plate
One first direction in face and corresponding to multiple metal balls；
One second support plate, is formed with multiple second perforations, and multiple second perforations respectively with multiple first perforations
In shifting to install；And
Multiple rectangular probes are installed on first support plate and second support plate, and each rectangular probe, which has, is located at phase
One first contact-segment tossed about and one second contact-segment；Wherein, first contact-segment of multiple rectangular probes is worn respectively
Go out multiple first perforations of first support plate and be connected to multiple metal balls, and multiple rectangles are visited
Second contact-segment of pin is pierced by multiple second perforations of second support plate and respectively to contact a crystalline substance to be measured
Circle；
Wherein, in each rectangular probe, first contact-segment at least partially along non-parallel to the first party
To a second direction be connected to the corresponding metal ball.
2. probe card device according to claim 1, which is characterized in that in each rectangular probe, described first
The distal portion of contact-segment is defined as a contact site, and the contact site is inserted in the corresponding metal ball, and described
Contact site is connected to the corresponding metal ball at least partially along the second direction.
3. probe card device according to claim 2, which is characterized in that in each rectangular probe, the contact
The length in portion be at least the 25% of the length of first contact-segment or the length of the contact site be at least it is corresponding described
The 25% of the height of metal ball.
4. probe card device according to claim 2, which is characterized in that in each rectangular probe, the contact
Portion's plating is equipped with a coat of metal, and the material of the coat of metal is identical to the material of the corresponding metal ball.
A kind of 5. signal transmission module of probe card device, which is characterized in that the signal transmission module bag of the probe card device
It includes：
One pinboard has one first plate face and one second plate face positioned at opposite side, and the pinboard is described first
Multiple metal balls are provided in plate face, the pinboard defines a first direction of vertical first plate face；And
Multiple rectangular probes respectively have one first contact-segment and one second contact-segment positioned at opposite side；Wherein, multiple squares
First contact-segment of shape probe is connected to multiple metal balls；
Wherein, in each rectangular probe, first contact-segment at least partially along non-parallel to the first party
To a second direction be connected to the corresponding metal ball.
6. the signal transmission module of probe card device according to claim 5, which is characterized in that visited in each rectangle
In pin, the distal portion of first contact-segment is defined as a contact site, and the contact site is inserted in the corresponding metal
In ball, and the contact site at least partially along the second direction is connected to the corresponding metal ball.
7. the signal transmission module of probe card device according to claim 6, which is characterized in that visited in each rectangle
In pin, the length of the contact site is at least the length of 25% or the contact site of the length of first contact-segment extremely
It is the 25% of the height of the corresponding metal ball less.
8. the signal transmission module of probe card device according to claim 6, which is characterized in that visited in each rectangle
In pin, the contact site plating is equipped with a coat of metal, and the material of the coat of metal is identical to the corresponding metal ball
Material.
9. a kind of rectangular probe of probe card device, which is characterized in that the rectangular probe of the probe card device includes：
One interlude；
One first contact-segment and one second contact-segment, respectively positioned at the two opposite sides of the interlude, and described first contacts
The length direction of section is defined as a first direction, and first contact-segment is at least local to along non-parallel to described the
One second direction in one direction is connected to the metal ball on a pinboard；Wherein, first contact-segment is equipped with an identification part,
And the identification part is in asymmetric shape compared with first contact-segment；And
One pawl part is formed from interlude extension.
10. the rectangular probe of probe card device according to claim 9, which is characterized in that the end of first contact-segment
End position is defined as a contact site, and the length of the contact site is at least the 25% of the length of first contact-segment, and institute
It states contact site plating and is equipped with one of a layer gold and a tin layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721439705.9U CN207408451U (en) | 2017-11-01 | 2017-11-01 | Probe card device and its signal transmission module and rectangular probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721439705.9U CN207408451U (en) | 2017-11-01 | 2017-11-01 | Probe card device and its signal transmission module and rectangular probe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207408451U true CN207408451U (en) | 2018-05-25 |
Family
ID=62317793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721439705.9U Active CN207408451U (en) | 2017-11-01 | 2017-11-01 | Probe card device and its signal transmission module and rectangular probe |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207408451U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109752576A (en) * | 2017-11-01 | 2019-05-14 | 中华精测科技股份有限公司 | probe card device and its signal transmission module |
| CN111474391A (en) * | 2019-01-23 | 2020-07-31 | 中华精测科技股份有限公司 | High-speed probe card device and rectangular probe thereof |
-
2017
- 2017-11-01 CN CN201721439705.9U patent/CN207408451U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109752576A (en) * | 2017-11-01 | 2019-05-14 | 中华精测科技股份有限公司 | probe card device and its signal transmission module |
| CN109752576B (en) * | 2017-11-01 | 2021-01-08 | 中华精测科技股份有限公司 | Probe card device and signal transmission module thereof |
| CN111474391A (en) * | 2019-01-23 | 2020-07-31 | 中华精测科技股份有限公司 | High-speed probe card device and rectangular probe thereof |
| CN111474391B (en) * | 2019-01-23 | 2022-11-01 | 台湾中华精测科技股份有限公司 | High-speed probe card device and rectangular probe thereof |
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