CN207393644U - Positioner - Google Patents

Abstract

The utility model is related to a kind of positioners, the bearing assembly and at least one slide assemblies being positioned including base assembly, compared with the base assembly along z-axis, on the one hand wherein described slide assemblies are movably disposed by substrate guide device along the baseline on the base assembly, and it is on the other hand movably disposed by rising guide apparatus along the riser on the bearing assembly, wherein riser and the baseline is run in parallel with each other along the projection of z-axis, and has each different constant cant angles compared with z-axis.The rising guide apparatus is provided to configure relative to each other by this method, i.e. at least one projection under z-axis situation, first and second risers or the third and fourth riser are respectively compared with z-axis inclination reversely with each other so that the slide assemblies generate the bearing assembly compared with the base assembly only along z-axis displacement compared with the synchronous shift of the base assembly.

Description

Positioner

Technical field

The utility model is related to a kind of positioners, including base assembly and bearing assembly, are slided by least two Transverse to the displacement of Z axis, which can be positioned component compared with the base assembly along z-axis.

Background technology

For example, from such positioner known to U.S. Patent No. 005731631A.In the described positioning of the patent Device includes substrate and bearing assembly, which has working surface and two parallel fortune reversed with the working surface Capable wedge-shaped surface.By two vertical linearity guide rails spaced apart, which is connected to the substrate, it is described linear Guide rail limits movement of the bearing assembly compared with the substrate, becomes along vertical z axial displacements.The positioner further wraps The wedge to run parallel being rigidly connected to each other as two of slide assemblies is included, they are separately positioned on the carrying group Between the wedge-shaped surface of part and the substrate, and the substrate is connected to by two linear guides spaced apart.By described two A linear guides, the wedge can be moved along the x-axis perpendicular to z-axis.In addition, pass through another linear guides, the wedge The upside of shape object is each displaceably connected to the wedge-shaped surface of the bearing assembly.Linear motor is used for moving along the x-axis the wedge Shape object, thus the bearing assembly be moved along the z-axis compared with the substrate.In this case, during being moved along the z-axis, in the base Described two vertical linearity guide rails between bottom and the bearing assembly prevent that the bearing assembly is additional along x-axis compared with the substrate It moves jointly on ground.

However the application for many in high accuracy positioning field, this positioner with vertical linearity guide rail System rigidity often deficiency.Particularly, vertical linearity guide rail does not ensure that vertical axis has the rotation of sufficient intensity firm Property.In addition, the design with displacement wedge and extra vertical linear guides is technically extremely complex and economically very It is expensive.

In addition, from a kind of tool known to 1 911 551 A1 of EP there are two parallel linear translatable actuator positioner, Surface is promoted via the inclination of two difference parallel orientations, the actuator is connected to bearing assembly to be positioned.It is described to push away Be tilted in relation to each other into both surfaces so that the synchronous shift of two actuator shafts cause the bearing assembly rising or under Drop.The inclined linear guides track of two difference being arranged on the bearing assembly opposite side forms described two tilt and promotes Surface.However the application for many in high accuracy positioning field, the system that this positioner does not provide sufficient intensity Rigidity, particularly also without the rotating stiff of offer sufficient intensity.

Utility model content

Therefore, on the one hand, the purpose of this utility model is that technically simplifying from known in the art has Slide Group The positioner of part, and on the other hand, improve their system rigidity.

The positioner of technical solution according to the present utility model realizes this purpose.Other skills of the utility model Art scheme is embodied from preferred embodiment.

Positioner (as example from known to 1 911 551 A1 of EP) according to the present utility model, including：Substrate Component, compared with the base assembly along z-axis bearing assembly to be positioned and at least one first and second slide assemblies, In, on the one hand by first or second substrate guide device along first or second baseline on the base assembly, and it is another Aspect is by first or second rising guide apparatus along first or second riser on the bearing assembly, this first or the Two slide assemblies are movably disposed.In this case, the first or second riser and the first or second baseline be each other The projection along z-axis is parallelly run on, and there is respectively different constant cant angle compared with z-axis.In this case, institute It states riser or baseline corresponds to respective rising guide apparatus or the path of navigation or displacement path of substrate guide device.

Further it is provided that this first and second rising guide apparatus configure relative to each other in this manner, i.e., extremely In the case of a few projection is perpendicular to z-axis, this first and second riser compared with z-axis inclination reversely with each other.

The reverse configuration of this rising guide apparatus has the effect that, due to this first and second slide assemblies Compared with synchronous shift of the base assembly along the substrate guide device, the bearing assembly is compared with the base assembly only along z-axis Displacement, and thus prevent common movement of the bearing assembly transverse to z-axis.This is because their reversed dips as a result, This first and second rising guide apparatus each mutually prevent the bearing assembly along the first or second substrate channeling direction or The transverse shifting of baseline.Therefore it can save and limit the extra vertical guide rail that the bearing assembly is moved in z-axis.

" synchronous shifts of slide assemblies " in the utility model meaning refer to along the first or second baseline this first Respective displacement movement with the second slide assemblies matches in this manner each other, i.e., in the synchronization along the first or second baseline During displacement, this first and second slide assemblies bearing assembly is moved along the z-axis with equal amount.The slide assemblies it is each Inclination of the first or second riser compared with z-axis is depended on from displacement movement.

In order to improve system rigidity, the turn rigidity of the positioner is further particularly, it is according to the present utility model Positioner further includes the third and fourth slide assemblies.In this case, on the one hand guided by the 3rd or the 4th substrate Device is along the 3rd or the 4th baseline on the base assembly, and another aspect is by the 3rd or the 4th rising guide apparatus edge The the 3rd or the 4th riser on the bearing assembly, the 3rd or the 4th slide assemblies are movably disposed.3rd or Four risers and the 3rd or the 4th baseline run on the projection along z-axis in parallel with each other, and have respectively not compared with z-axis Same constant cant angle.In addition, the 3rd configures relative to each other in this manner with the 4th rising guide apparatus, i.e., It is at least one projection perpendicular to z-axis in the case of, the 3rd and the 4th riser compared with z-axis inclination reversely with each other, make It obtains the first, second, third and fourth slide assemblies and generates the bearing assembly phase compared with the synchronous shift of the base assembly For the base assembly only along the displacement of z-axis.

Instead of four slide assemblies, in principle with mutual interception to limit the position that the bearing assembly is moved along the z-axis The different number slide assemblies of shifting are also feasible.Thus, for example, configurable five or more slide assemblies are in polygon Construction, be evenly distributed in z-axis surrounding.However, it is preferred that the paired slide assemblies with mutual interception appear in In the case of each, their configurations relative to each other so that at least one projection under z-axis situation, respective part Riser is both with respect to z-axis inclination reversely with each other.

A preferred embodiment according to the present utility model, this first, second, third, and/or the 4th baseline run on Perpendicular to the plane of z-axis.It can further provide for this first, second, third and the 4th baseline equably divide in z-axis surrounding Cloth.Alternately or in addition, this first, second, third is configured to compared with z-axis with the 4th baseline into axial symmetry.Into one Step is it is possible that this first, second, third is configured to compared with z-axis with the 4th riser into axial symmetry.It is arranged as these It is applying as a result, especially simplifying the technical complexity of the positioning device structure.In addition, the slide assemblies are simplified along the base The movement of the synchronous shift of line.

The substrate guide device or baseline can substantially have arbitrary shape, they will not bend along z-axis herein, But with compared with constant cant angle of the z-axis more than 0 ° and less than 180 °.Apply equally to the rising guide apparatus or on The inclination angle of liter line, rising guide apparatus described herein or the riser is different from each corresponding substrate guiding The inclination angle of device or baseline.For example, configuration has the base of crooked outline in the plane perpendicular to z-axis and in the plane Bottom guide device is feasible.However it is particularly preferred that the substrate guide device and/or rising guide apparatus are configured to Linear guides.Therefore, a preferred embodiment according to the present utility model, it is straight to provide first and second baseline Line particularly runs parallel along the x-axis perpendicular to z-axis each other, and provides third and fourth baseline as straight line, especially It is to run parallel each other along the y-axis perpendicular to x-axis and z axis.

If the baseline is straight line, i.e. the substrate guide device is configured to linear guides, and example is being implemented In, suitable situation is that each corresponding riser is also straight line or each corresponding lifting lead dress It puts and is configured to linear guides, because according to the utility model, the riser is along z-axis parallel to each corresponding base The projection operation of line.

Further preferred embodiment according to the present utility model, provide this first, second, third and/or the 4th base Line includes ball bearing, intersects ball bearing, rolling bearing or dovetail guide.Additionally or alternatively, it is possible to provide this first, 2nd, the 3rd and/or the 4th rising guide apparatus includes ball bearing, intersects ball bearing, rolling bearing or dovetail guide.

It is according to the present utility model further in order to realize the different inclination angle of respective corresponding baseline and riser Preferred embodiment, it is possible to provide this first, second, third and/or the 4th slide assemblies, each component includes sphenoid, in the wedge Physically preferably described corresponding substrate guide device and rising guide apparatus configure the opposite hair on the sphenoid Side is dissipated, the wedge-shaped angular aperture corresponds at the baseline tilt angle compared with z-axis and the corresponding riser inclination angle herein Between angle difference.

Similarly, it is possible to provide the bearing assembly includes first, second, third and/or the 4th sphenoid, in the wedge shape Respectively set on body this first, second, third or the 4th rising guide apparatus.The bearing assembly has first, second, the Three and/or the 4th inclined surface is also possible, respectively sets this in the inclined plane on first, second, third or the 4th Rise guide device.

Between moving along the slide assemblies displacement of the baseline and moving along the obtained displacement of the bearing assembly of z-axis Transfer can be by the inclination angle of respective riser and corresponding baseline be selected to adjust.In a particularly preferred reality Apply in example, this first, second, third and the 4th riser 45 °~85 ° of angle is each trapped among compared with z-axis, particularly Between 60 °~80 °, preferably between 71 °~79 °.

In the further preferred embodiment of the utility model, which includes plate, particularly with port Frame-like plate.Similarly, it is possible to provide the bearing assembly includes frame, particularly rectangular frame, preferably square-shaped frame Frame.This design the result is that with the stronger special rigid positioning device of system rigidity.

In the idea of the positioner very compact design, can further provide for by this first and this second rise draw Lead device be arranged on the opposite side of the bearing assembly, and/or provide by the 3rd and the 4th rising guide apparatus be arranged on On the opposite side of the bearing assembly.

It is according to the present utility model further for the synchronous shift of the first, second, third and fourth slide assemblies Embodiment, which may include at least one driving device, is particularly filled for the shared driving of all slide assemblies It puts or the respectively independent driving device for the first, second, third and fourth slide assemblies.

Any kind of driver is used equally for driving device, for example, linear actuators or revolving actuator, piezoelectricity cause Dynamic device, spindle driver, linear motor, stepper motor, servo motor etc..

A particularly preferred embodiment according to the present utility model, providing at least one driving device includes Rotating driver and connection component, the rotating driver have the rotation axis parallel to z-axis, and wherein the connection component is with this side Formula by the rotating driver be connected to this first, second, third and/or the 4th slide assemblies so that the rotating driver It is in rotary moving, the first, second, third and fourth slide assemblies is made to generate synchronous shift along the respective baseline.Mesh therefore , it is possible to provide the connection component includes rotary body rigidly connected with the rotation axis and at least one connecting elements, the connection structure Part with an end on one of the slide assemblies and another end and rotation axis on the rotary body are radially spaced apart Mode is rotatably installed compared with rotation axis.

Description of the drawings

The utility model example that the further object, advantage and possible application of the utility model can be described from attached drawing The middle acquisition described below of property embodiment.

In the accompanying drawings：

Fig. 1 shows the stereograms of the possible exemplary embodiment of positioner according to the present utility model；

Fig. 2 represents the exploded view of the positioner according to Fig. 1；

Fig. 3 represents the plan view of the positioner according to Fig. 1；

Fig. 4 is represented according to sectional view of the positioner of Fig. 1 along z-axis；With

Fig. 5 is represented according to side view of the positioner of Fig. 1 along y-axis.

Specific embodiment

Fig. 1~Fig. 5 represents the possible exemplary embodiment of positioner 1 according to the present utility model.The positioner 1 includes flat base assembly 2 and the bearing assembly 3 being positioned compared with the base assembly 2 along z-axis, 2 quilt of base assembly The plate 4 of the frame-like of port is configured with, which is also substantially configured to the form of square frame 5.

For the displacement of the bearing assembly 3 along z-axis, which further comprises first, second, third and fourth Slide assemblies 11,12,13,14.In the case, four slide assemblies 11,12,13,14 be configured to can perpendicular to The common plane of z-axis carrys out displacement and can be evenly distributed between the bearing assembly 3 and the base assembly 2 in z axis surroundings Rectangular configuration carry out displacement.

First, second, third or the 4th in substrate guide device 21,22,23,24 and first, second, third or the 4th It rises guide device 31,32,33,34 and is respectively provided in the first, second, third and fourth slide assemblies 11,12,13,14 On.

By the first or second substrate guide device 21,22, which can be compared with The base assembly 2 is moved along first or second baseline 121,122, and baseline extends for x-axis of the edge perpendicular to z-axis.Therefore, By the 3rd or the 4th substrate guide device 23,24, the 3rd or the 4th slide assemblies 13,14 edge on the base assembly 2 3rd or the 4th baseline 123,124 is linearly displaceably set, and baseline is to extend along perpendicular to the y-axis of x and z-axis.

The respective substrate guide device 21,22,23,24 is separately positioned on the base of the slide assemblies 11,12,13,14 On bottom side, sphenoid is configured to.The respective rising guide apparatus 31,32,33,34 is disposed relative to each base On the bevel edge of the wedge-shaped slide assemblies 11,12,13,14 of bottom side, by the rising guide apparatus, the slide assemblies 11st, 12,13,14 can along first, second, third or 131,132,133,134 linear displacement of the 4th riser and with the carrying group The corresponding inclined surface connection of part 3.

The bevel edge on the bearing assembly 3 each by first, second, third or the 4th sphenoid 41,42,43, 44 and formed, described first, second, third or the 4th rising guide apparatus 31,32,33,34 be respectively provided in the bevel edge On.These sphenoids 41,42,43,44 are configured to rectangular construction corresponding to the wedge-shaped slide assemblies 11,12,13,14 And it is evenly distributed in z-axis surrounding on the outside of the frame-like bearing assembly 3.In order to make the sphenoid and the carrying group The frame 5 of part 3 preferably connects, and the four wall components constructed from the frame 5 are each protruded in a corner of the frame, are made The sphenoid 41,42,43,44 is each close proximity to two wall surfaces for configuring the frame 5 at right angles to each other.Whereby, often Extraly increase the system rigidity of the positioner 1.

Particularly, in fig. 3 and in fig. 5 as can be seen that as described in riser 131,132,133,134 and described corresponding Baseline 121,122,123,124 be mutually parallel and be configured at along in the projection of z-axis, in each case, especially conformably at that It is set between this.The each of each of four risers and corresponding four baselines, has compared with z-axis Fixed inclination angle, wherein each inclination angle of corresponding riser and baseline is different.In the present exemplary embodiment In, the baseline is 90 ° compared with the inclination angle of z-axis.In contrast, the wedge-shaped slide assemblies 11,12,13,14 are respective Riser or the inclined angle alpha that is surrounded compared with z-axis of inclined surface be about 76 °.Preferably the inclined angle alpha should be located at 71 °~79 ° In the range of.

In the projection along y-axis, mode according to the present utility model, the first and second slide assemblies 11 of the wedge shape, 12 and the inclined surface of corresponding first and second rising guide apparatus 31,32 orient relative to each other reversed dip. Similarly, in the projection along x axis, according to the utility model, the third and fourth slide assemblies 13,14 and phase of the wedge shape The inclined surface of corresponding third and fourth rising guide apparatus 33,34 orients reversed dip relative to each other.As a result, Since the reversed dip of the slide assemblies and the rising guide apparatus configures, realize this first and second Slide Group Part 11,12 along x-axis the synchronous shift of inverse direction and realize the 3rd and the 4th slide assemblies 13,14 along y-axis In the synchronous shift of inverse direction, the bearing assembly 3 is generated only along z-axis displacement.This is because the knot of their reversed dips Fruit, make this first and second rising guide apparatus 31,32 or third and fourth rising guide apparatus 33,34 each mutually Prevent transverse shifting of the bearing assembly along x-axis or y-axis.Therefore can save to limit what the bearing assembly was moved in z-axis Along the additional linear guides of z-axis.

In the present example embodiment, all substrate guide devices 21,22,23,24 and rising guide apparatus 31,32, 33rd, 34 the linear guides with roller bearing are configured to.Certainly, other types and the linear guides of design are also feasible.

For the synchronous shift of four slide assemblies 11,12,13,14, positioning dress according to the present exemplary embodiment 1 is put, there is the common driving device for all four slide assemblies 11,12,13,14.The common driving device includes rotation Driver 9 and connection component 6, the rotating driver have the rotation axis parallel to z-axis, and the connection component drives the rotation Dynamic device be connected to this first, second, third and the 4th slide assemblies 11,12,13,14 so that the rotation of the rotating driver 9 The mobile first, second, third and fourth slide assemblies 11,12,13,14 that generate along the respective baseline, i.e., along x-axis or Y-axis synchronous shift.For this purpose, the connection component 6 is connected for four totally including rotary body 7 rigidly connected with the rotation axis and Component 8, the connecting elements are rotationally mounted to the every of the slide assemblies 11,12,13,14 with one end compared with rotation axis One upper and the other end and the rotation axis on the rotary body 7 are radially spaced apart.

Four rising guide apparatus 31,32,33,34 are compared with z-axis same tilt angle as a result, the driving fills The rotation put around z-axis brings the synchronous shift of all four slide assemblies 11,12,13,14, and slide assemblies are again equably along z Axis lifts the bearing assembly 3.Particularly, the feature of the rectangular or square configuration of four slide assemblies is for high-precision Spend the sufficient intensity system rigidity of application.

Symbol description

1 positioner

2 base assemblies

3 bearing assemblies

4 plates

5 frames

6 connection components

7 rotary bodies

8 connecting elements

9 driving devices

11 first slide assemblies

12 second slide assemblies

13 the 3rd slide assemblies

14 the 4th slide assemblies

21 first substrate guide devices

22 second substrate guide devices

23 the 3rd substrate guide devices

24 the 4th substrate guide devices

31 first rising guide apparatus

32 second rising guide apparatus

33 the 3rd rising guide apparatus

34 the 4th rising guide apparatus

41 first sphenoids

42 second sphenoids

43 the 3rd sphenoids

44 the 4th sphenoids

121 first baselines

122 second baselines

123 the 3rd baselines

124 the 4th baselines

131 first risers

132 second risers

133 the 3rd risers

134 the 4th risers

α inclinations angle.

Claims (18)

1. a kind of positioner (1), the carrying group being positioned including base assembly (2), compared with the base assembly (2) along z-axis Part (3) and at least one first and second slide assemblies (11,12), the wherein first or second slide assemblies (11,12) one Aspect by first or second substrate guide device (21,22) along on the base assembly (2) first or second baseline (121, 122) it is movably disposed, and on the other hand by first or second rising guide apparatus (31,32) along in the bearing assembly (3) On first or second riser (131,132) be movably disposed, wherein the first or second riser (131,132) and should First or second baseline (121,122) is extended parallel to each other along the projection of z-axis, and compared with z-axis with each different Constant cant angle, wherein first and second rising guide apparatus (31,32) configure relative to each other by this method, so that In at least one projection perpendicular to z-axis, which makes compared with z-axis inclination reversely with each other Must this first and second slide assemblies (11,12) cause the bearing assembly (3) compared with the synchronous shift of the base assembly (2) Compared with the base assembly (2) only along z-axis displacement, it is characterised in that the positioner (1) further includes the third and fourth Slide Group Part (13,14), wherein the 3rd or the 4th slide assemblies (13,14) on the one hand by the 3rd or the 4th substrate guide device (23, 24) it is movably disposed along the 3rd or the 4th baseline (123,124) on the base assembly (2), and on the other hand by the Three or the 4th rising guide apparatus (33,34) is removable along the 3rd or the 4th riser (133,134) on the bearing assembly (3) It sets dynamicly, wherein the 3rd or the 4th riser (133,134) and the 3rd or the 4th baseline (123,124) are along z-axis Projection extends parallel to each other, and has each different constant cant angles compared with z-axis, and on the wherein the 3rd and the 4th Guide device (33,34) is risen to configure relative to each other by this method, so that at least one projection perpendicular to z-axis, it should 3rd and the 4th riser (133,134) compared with z-axis inclination reversely with each other so that this first, second, third and the 4th Slide assemblies (11,12,13,14) cause the bearing assembly (3) compared with the base compared with the synchronous shift of the base assembly (2) Bottom component (2) is only along z-axis displacement.

2. positioner (1) as described in claim 1, which is characterized in that this first, second, third and/or the 4th baseline (121,122,123,124) extend in the plane perpendicular to z-axis.

3. positioner (1) as claimed in claim 1 or 2, which is characterized in that

A. the first, second, third and fourth baseline (121,122,123,124) is evenly distributed in z-axis surrounding；

B. the first, second, third and fourth baseline (121,122,123,124) is configured to compared with z-axis into axial symmetry； And/or

C. or the first, second, third and fourth riser (131,132,133,134) be configured to compared with z-axis into Axial symmetry.

4. positioner (1) as claimed in claim 1 or 2, which is characterized in that first and second baseline (121,122) with And third and fourth baseline (123,124) be straight line.

5. positioner (1) as claimed in claim 4, which is characterized in that first and second baseline (121,122) along hang down It is directly extended parallel to each other in the x-axis of z-axis, and third and fourth baseline (123,124) is along the y-axis perpendicular to x-axis and z-axis It extends parallel to each other.

6. positioner (1) as claimed in claim 1 or 2, which is characterized in that

A. this first, second, third and/or the 4th baseline (121,122,123,124) include ball bearing, intersect ball bearing, Rolling bearing or dovetail guide；And/or

B. this first, second, third and/or the 4th rising guide apparatus (31,32,33,34) include ball bearing, intersect ball axis It holds, rolling bearing or dovetail guide.

7. positioner (1) as claimed in claim 1 or 2, which is characterized in that this first, second, third and/or the 4th slide Each of dynamic component (11,12,13,14) includes sphenoid.

8. positioner (1) as claimed in claim 1 or 2, which is characterized in that the bearing assembly (3) include first, second, 3rd and/or the 4th sphenoid (41,42,43,44), this first, second, third or the 4th rising guide apparatus (31,32,33, 34) it is respectively provided in thereon.

9. positioner (1) as claimed in claim 1 or 2, which is characterized in that the first, second, third and fourth riser (131,132,133,134) each enclose at 45 °~85 ° of angle (α) compared with z-axis.

10. positioner (1) as claimed in claim 1 or 2, which is characterized in that the first, second, third and fourth rises Line (131,132,133,134) each surrounds 60 °~80 ° of angle (α) compared with z-axis.

11. positioner (1) as claimed in claim 1 or 2, which is characterized in that the first, second, third and fourth rises Line (131,132,133,134) each surrounds 71 °~79 ° of angle (α) compared with z-axis.

12. positioner (1) as claimed in claim 1 or 2, which is characterized in that the base assembly (2) includes plate (4).

13. positioner (1) as claimed in claim 12, which is characterized in that the plate (4) is configured to the frame with port The plate of shape.

14. positioner (1) as claimed in claim 1 or 2, which is characterized in that the bearing assembly (3) includes frame (5).

15. positioner (1) as claimed in claim 14, which is characterized in that the frame (5) is configured to rectangular frame.

16. positioner (1) as claimed in claim 15, which is characterized in that the frame (5) is configured to square frame.

17. positioner (1) as claimed in claim 1 or 2, which is characterized in that first and second rising guide apparatus (31,32) are arranged on the opposite side of the bearing assembly (3)；And/or the 3rd and the 4th rising guide apparatus (33,34) It is arranged on the opposite side of the bearing assembly (3).

18. positioner (1) as claimed in claim 1 or 2, which is characterized in that for the first, second, third and fourth The synchronous shift of slide assemblies (11,12,13,14), the positioner (1) include:

A. at least one driving device (9)；Or

B. respective one independent driving device for being used for the first, second, third and fourth slide assemblies (11,12,13,14).