CN207362325U - A kind of modular manufacturing multipurpose devices of coiled vacuum coating machine - Google Patents

Abstract

The utility model, which discloses, provides a kind of modular manufacturing multipurpose devices of coiled vacuum coating machine, it includes at least two vacuum winding coating system units, connected between two adjacent vacuum winding coating system units by vacuum coupled valve, coiled strip to be coated is passed into next blank coil around coating system unit by the vacuum coupled valve；The vacuum winding coating system unit, which includes, unreels room, coating chamber, thermal chamber and winding room, four are equipped with and some can be used for being tensioned, transmit coiled strip to be coated, the spool of the coiled strip winding direction to be coated changed, coating chamber is equipped with plating film Grains, and coiled strip to be coated is realized in upper vacuum winding coating system unit realizes another side plated film after a face plated film because the spool changes its winding direction in next vacuum winding coating system unit.

Description

A kind of modular manufacturing multipurpose devices of coiled vacuum coating machine

Technical field

Vacuum coating, capacitor film manufacture and photoelectric display thin film fabrication industry are the utility model is related to, for flexibility Thin-film material realizes mono-/bis-face plated film, more particularly to a kind of modular manufacturing multipurpose devices of coiled vacuum coating machine.

Background technology

Vacuum coating is one kind of plasma technology application, i.e., under vacuum conditions, splashes the magnetic control equipped with material to be plated Cathode starter (thermal resistance evaporation mode is switched on heating coating materials crucible) is penetrated, magnetron cathode produces plasma, high-energy ion bombardment Target surface (coating materials) sputters coating materials particle to be plated, and the particle deposition sputtered out forms simple substance film, compound on workpiece to be plated Film etc..

Take-up type vacuum coating technique is widely used in the flexible materials such as capacitor, touch display, decorated package Function and decorative film's manufacturing field.

Winding mechanism is mostly single-chamber body or Multicarity used by conventional winding-type vacuum coater, for single-chamber body Equipment, its design feature are：A. a sealing vacuum tank (circular or rectangular cavities) is included；B. the interior metal partion (metp) of container every Separate out 1 and unreel area, 1 plated film area, 1 winding area；C. have the advantages that compact to design, floor space is small, low cost；D. lack Point is that each zone atmosphere isolation is poor, and dust pollution is more in work, and production membrane system is limited, and production capacity is low etc..Set for Multicarity Standby, the drawback is that the main hub production of single plated film, production membrane system is limited, and product variety is single, and equipment can only be customized by technique, is manufactured into Originally it is higher etc..

The design of above device structure is currently used several winding-type vacuum coater modes, the design and manufacture of equipment All it is the special equipment of the palpus independent design on the basis of Product Process is determined in advance, can only be all coated with single side film-forming products, it is raw When producing double-sided coating product, it is necessary to low with yield rate by (foil) turn-over secondary operation to be coated, low production efficiency；It is raw When producing simple membrane system product, the defects such as utilization rate of equipment and installations is low.

Utility model content

The purpose of this utility model is that the defects of being directed to the prior art and deficiency, there is provided a kind of modular manufacturing multipurpose Devices of coiled vacuum coating machine, it realizes mono-/bis-face plated film for flexible thin-film material.

To achieve the above object, the technical solution adopted in the utility model is：

A kind of modular manufacturing multipurpose devices of coiled vacuum coating machine, including at least two vacuum winding coating system lists Member, is connected by vacuum coupled valve between adjacent two vacuum winding coating system units, and coiled strip to be coated is by described true Empty coupled valve is passed into next blank coil around coating system unit；The vacuum winding coating system unit, which includes, to be unreeled Room, coating chamber, thermal chamber and winding room, four be equipped with it is some can be used for being tensioned, transmit coiled strip to be coated, change it is to be plated The spool of the coiled strip winding direction of film, coating chamber are equipped with Du Mo Grains, and coiled strip to be coated is in a upper vacuum winding coating system Realized after a face plated film is realized in unit because the spool changes its winding direction in next vacuum winding coating system unit Another side plated film.

Preferably, the vacuum winding coating system unit further includes the PLC control system of control coating process parameter.

Preferably, room, coating chamber, thermal chamber and the winding room of unreeling by independent vaccum-pumping equipment take out very Sky, vaccum-pumping equipment are connected with PLC control system control.

Preferably, it is described unreel room, coating chamber is vacuumized by independent vaccum-pumping equipment, thermal chamber and winding room One group of vaccum-pumping equipment is shared, all vaccum-pumping equipments are controlled with the PLC control system and connected.

Preferably, the coating chamber is equipped with multiple magnetic controlled sputtering targets, multiple magnetic controlled sputtering targets and the PLC control system control System connection.

Preferably, the room of unreeling is equipped with dismountable let off roll, and the winding room is equipped with dismountable wind-up roll.

Preferably, the thermal chamber is equipped with some heating units, and some heating units are controlled with the PLC control system Connection.

Preferably, room and the winding room of unreeling is symmetrical structure, both can be exchanged so as to change winding or unreel Position.

Preferably, the let off roll and wind-up roll are connected with PLC control system control.

The utility model has the beneficial effect that：

1st, designed by modularization coating system unit, each unit module has the function of that independent operation uses；

2nd, after each unit module is tied by independent vacuum attachment valve, each module can realize linkage；

3rd, the double of flexible material, face plated film can be achieved in the double designs of coating system unit and connection；

4th, modular high-temperature vacuum thermal chamber design, can carry out graphene composite manufacturing；

5th, the Design of Automatic Control System of high integration can realize the linkage of multi-system module unit and the independence of each unit Operation.

Figure of description

Fig. 1 is the system composition schematic diagram of the utility model embodiment 1；

Fig. 2 is principle schematic when the utility model embodiment 1 carries out coating single side；

Fig. 3 is principle schematic when the utility model embodiment 1 carries out double-sided coating.

Embodiment

In the description of the utility model, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width Degree ", " thickness ", " on ", " under ", "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outer ", " suitable The orientation or position relationship of the instruction such as hour hands ", " counterclockwise " are based on orientation shown in the drawings or position relationship, merely to just In description the utility model and simplified description, rather than indicate or imply that signified device or element must be with specifically square Position, with specific azimuth configuration and operation, therefore it is not intended that limitation to the utility model.

In addition, term " first ", " second " are only used for description purpose, and it is not intended that instruction or hint relative importance Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can be expressed or Implicitly include one or more this feature.In the description of the utility model, " multiple " are meant that two or two More than, unless otherwise specifically defined.

In the utility model, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " Gu It is fixed " etc. term should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or be integrally connected；Can To be mechanical connection or be electrically connected；It can be directly connected, can also be indirectly connected by intermediary, Ke Yishi Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood as the case may be Concrete meaning in the utility model.

In the utility model, unless otherwise clearly defined and limited, fisrt feature second feature it " on " or it " under " can directly be contacted including the first and second features, it is not directly to contact but lead to that can also include the first and second features Cross the other characterisation contact between them.Moreover, fisrt feature second feature " on ", " top " and " above " include the One feature is directly over second feature and oblique upper, or is merely representative of fisrt feature level height and is higher than second feature.First is special Sign second feature " under ", " lower section " and " below " including fisrt feature immediately below second feature and obliquely downward, or only Represent that fisrt feature level height is less than second feature.

The utility model is described in further detail below by embodiment combination attached drawing.

Embodiment 1, referring to figs. 1 to shown in Fig. 3, a kind of modular manufacturing multipurpose devices of coiled vacuum coating machine, including two A vacuum winding coating system unit 100, is connected by vacuum coupled valve 1 between two vacuum winding coating system units 100, Coiled strip 21 to be coated is passed into next blank coil around coating system unit 100 by vacuum coupled valve 1；Vacuum winding plates membrane system System unit 100 include unreels room 2, coating chamber 3, thermal chamber 4 and winding room 5, four be equipped with it is some can be used for be tensioned, pass Coiled strip to be coated, the spool 6 of the coiled strip winding direction to be coated changed are sent, coating chamber 3 is equipped with Du Mo Grains 7, as figure shows, treats The coiled strip 21 of plated film is realized after a face plated film in upper vacuum winding coating system unit because spool changes its winding direction Another side plated film is realized in next vacuum winding coating system unit.

Preferably, vacuum winding coating system unit further includes the PLC control system 11 of control coating process parameter. PLC can input the technological parameter of needs, when equipment is run, go to perform according to these parameters, when technique is joined as control centre In the case of number is unsuitable, it can adjust or change according to being actually needed, it is however generally that, in the utility model, PLC can control Parameter have coiled strip advance speed, body vacuum, processing atmosphere, heating-up temperature, ion source power and magnetic control sputtering cathode Power etc..

Preferably, unreel that room 2, coating chamber 3 vacuumize unit 8 by first respectively, the second vacuum pump set 9 is vacuumized, Thermal chamber 4 and winding room 5 share one group of the 3rd vacuum pump set 10 of vaccum-pumping equipment, and all units that vacuumize are controlled with PLC System control connection.Certainly, as another embodiment of the utility model, room 2, coating chamber 3, thermal chamber and winding room are unreeled It can also be vacuumized by independent vaccum-pumping equipment, vaccum-pumping equipment is connected with PLC control system control.

Preferably, coating chamber is equipped with 3 magnetic controlled sputtering targets, 12,3 magnetic controlled sputtering targets 12 and connects with the control of PLC control system 11 Connect, PLC control system 11 can control the magnetic control sputtering cathode power of magnetic controlled sputtering target 12.Certainly, as the utility model its Its embodiment, the quantity of magnetic controlled sputtering target 12 can also be other quantity, and usually, multiple magnetic controlled sputtering targets 12 should be equidistant Equably set to Du Mo Grains.

Preferably, unreel room 2 and be equipped with dismountable let off roll 13, winding room is equipped with dismountable wind-up roll 14.

Preferably, thermal chamber 4 is equipped with some heating units 15, and some heating units 15 are controlled with PLC control system 11 Connection.

Preferably, it is symmetrical structure to unreel room 2 with winding room 5, both can exchange the position so as to change winding or unreel, With reference to shown in figure 2 and Fig. 3, if for example, only needing coating single side, then two vacuum winding coating system units 100 can be made Plated film is carried out for independent coating system, coiled strip 21 to be coated includes one group, and first vacuum winding on the left side plates respectively Membranous system unit 100 and second vacuum winding coating system unit 100 on the right carry out coating film treatment, in two vacuum windings In coating system unit 100, plated film can be carried out at the same time, and asynchronous can also be carried out；If necessary to carry out double-sided coating, then by the right Winding room 5 in second vacuum winding coating system unit 100 and unreel room 2 and exchange, so as to become in original winding room Unreeled, after carrying out coating single side in second vacuum winding coating system unit 100 on the right, coiled strip 21 to be coated Enter first vacuum winding coating system unit 100 on the left side by vacuum attachment valve 1, due to there is provided spool 6, by changing Become the winding direction of coiled strip 21 to be coated, coiled strip 21 to be coated enters first vacuum winding coating system unit on the left side After 100, uncoated one faces to magnetic controlled sputtering target 12, can then carry out the second face plated film, after the completion of the second face plated film, on a left side Wound in the winding room 5 of first vacuum winding coating system unit 100 on side.

In embodiment, two vacuum winding coating system units 100 are preferred with independent PLC control system control, When carrying out double-sided coating, it should ensure that the Du Mo Grains rotating speeds in two vacuum winding coating system units 100 are consistent.

Certainly, the other embodiments as the utility model, the quantity of vacuum winding coating system unit 100 can also be Other quantity more than 2, these multiple vacuum winding coating system units 100, which connect, can form single-side multi-layer coating system Or double-sided multi-layer coating system, in this way, then single-side multi-layer coating film treatment can be carried out, or carry out two-sided in single process Multicoating system, for traditional equipment, flexibility is high, is greatly improved throughput rate, saves manufacture cost.

While there has been shown and described that the embodiment of the utility model, for those of ordinary skill in the art Speech, it is possible to understand that can carry out a variety of changes to these embodiments in the case where not departing from the principle of the utility model and spirit Change, change, replacing and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.

In the description of this specification, reference term " embodiment ", " some embodiments ", " an implementation The description of example ", " some embodiments ", " example ", " specific example " or " some examples " etc. means to combine the embodiment or example Particular features, structures, materials, or characteristics described are contained at least one embodiment or example of the utility model.At this In specification, schematic expression of the above terms may not refer to the same embodiment or example.Moreover, description is specific Feature, structure, material or feature can combine in an appropriate manner in any one or more embodiments or example.

Above content is to combine specific embodiment further detailed description of the utility model, it is impossible to is assert The specific implementation of the utility model is confined to these explanations.For the utility model person of an ordinary skill in the technical field For, without departing from the concept of the premise utility, some simple deduction or replace can also be made.

Claims (9)

1. a kind of modular manufacturing multipurpose devices of coiled vacuum coating machine, it is characterised in that including at least two vacuum winding plated films System unit, is connected by vacuum coupled valve between adjacent two vacuum winding coating system units, coiled strip to be coated by The vacuum coupled valve is passed into next blank coil around coating system unit；The vacuum winding coating system unit includes Unreel room, coating chamber, thermal chamber and winding room, four are equipped with and some can be used for being tensioned, transmit coiled strip to be coated, change The spool of coiled strip winding direction to be coated, coating chamber are equipped with Du Mo Grains, and coiled strip to be coated is in a upper vacuum winding plated film Realized in system unit after a face plated film because the spool changes its winding direction in next vacuum winding coating system unit Realize another side plated film.

2. a kind of modular manufacturing multipurpose devices of coiled vacuum coating machine according to claim 1, it is characterised in that described Vacuum winding coating system unit further includes the PLC control system of control coating process parameter.

3. a kind of modular manufacturing multipurpose devices of coiled vacuum coating machine according to claim 2, it is characterised in that described Unreel room, coating chamber, thermal chamber and winding room vacuumized by independent vaccum-pumping equipment, vaccum-pumping equipment with it is described PLC control system control connection.

4. a kind of modular manufacturing multipurpose devices of coiled vacuum coating machine according to claim 2, it is characterised in that described Unreel room, coating chamber is vacuumized by independent vaccum-pumping equipment, thermal chamber and winding room share one group of vaccum-pumping equipment, All vaccum-pumping equipments are controlled with the PLC control system and connected.

5. a kind of modular manufacturing multipurpose devices of coiled vacuum coating machine according to claim 2, it is characterised in that described Coating chamber is equipped with multiple magnetic controlled sputtering targets, and multiple magnetic controlled sputtering targets are connected with PLC control system control.

6. a kind of modular manufacturing multipurpose devices of coiled vacuum coating machine according to claim 2, it is characterised in that described Unreel room and be equipped with dismountable let off roll, the winding room is equipped with dismountable wind-up roll.

7. a kind of modular manufacturing multipurpose devices of coiled vacuum coating machine according to claim 2, it is characterised in that described Thermal chamber is equipped with some heating units, and some heating units are connected with PLC control system control.

8. according to a kind of modular manufacturing multipurpose devices of coiled vacuum coating machine of claim 1-7 any one of them, its feature It is that room and the winding room of unreeling is symmetrical structure, both can exchange the position so as to change winding or unreel.

9. a kind of modular manufacturing multipurpose devices of coiled vacuum coating machine according to claim 6, it is characterised in that described Let off roll and wind-up roll are connected with PLC control system control.