CN207280670U - A kind of small two-way signal output pressure sensor structure - Google Patents
A kind of small two-way signal output pressure sensor structure Download PDFInfo
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- CN207280670U CN207280670U CN201721236574.4U CN201721236574U CN207280670U CN 207280670 U CN207280670 U CN 207280670U CN 201721236574 U CN201721236574 U CN 201721236574U CN 207280670 U CN207280670 U CN 207280670U
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- pressure sensor
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- sensitive diaphragm
- signal output
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Abstract
The utility model belongs to small two-way signal output pressure sensor appliance technology, more particularly to a kind of small two-way signal output pressure sensor structure.A kind of simple two-way signal pressure sensor output, is made of base, shell, sensitive diaphragm, panel seat, compensation circuit plate, signal extraction cable, is exported the signal by signal extraction cable.The beneficial effects of the utility model are：It ensure that the reliability of output signal, two paths of signals compares each other, reliability, high stability, it is and simple in structure, it is easily operated, do not increase the mechanical structure burden of total system additionally, it is achieved thereby that miniaturization target, inanimate matter thoroughly is realized, fundamentally solves the problems such as aging of organic gel.
Description
Technical field
The utility model belongs to small two-way signal output pressure sensor appliance technology, more particularly to a kind of small-sized
Simple two-way signal pressure sensor output structure.
Background technology
Pressure sensor is widely used in industrial production, military equipment, aerospace as most basic measuring unit
In the every field such as navigation.Although existing pressure sensor structure is varied, it is required for greatly between strain gauge and elastomer
By the way of glue sticking, and glue aging easily brings the harmful effects such as creep, sluggishness.
The content of the invention
The purpose of this utility model is that solve the problems, such as techniques discussed above, there is provided it is a kind of ensure that output signal can
By property, two paths of signals compares each other, reliability, high stability, and simple in structure, easily operated, and additionally increase is not overall
The mechanical structure burden of system, it is achieved thereby that miniaturization target, thoroughly realizes inanimate matter, fundamentally solves organic
The simple two-way signal pressure sensor output of the problems such as aging of glue, its technical solution are as follows：
A kind of small two-way signal output pressure sensor structure, it is characterised in that by base, shell, sensitive diaphragm, plate
Seat, compensation circuit plate, signal extraction cable are formed, and base is equipped with sensitive diaphragm and shell, and sensitive diaphragm is equipped with panel seat,
Sensitive diaphragm is equipped with two Wheatstone bridges, and each Wheatstone bridge is connected with compensation circuit plate, the connection of compensation circuit plate
Signal extraction cable, is deformed after sensitive diaphragm pressure-sensitive, and signal is drawn out on compensation circuit plate by gold thread, is being compensated
After being compensated on circuit board to signal, the signal is exported by signal extraction cable.
Preferred embodiment is that two Wheatstone bridges include 8 mutually independent strain resistors, and Internal and external cycle combination of two.
Preferred embodiment is to carry minor thread on the shell.
Preferred embodiment is that the sensitive diaphragm is made using sputtered film technique.
Preferred embodiment is, between sensitive diaphragm and base, between sensitive diaphragm and panel seat, between base and shell by swashing
Photocoagulation or electron beam welding are connected.
Small two-way signal output pressure sensor provided by the utility model, when in use, 1, in order to improve survey
Reliability, stability are measured, is exported using simple two-way signal, the realization of simple two-way signal output is by passing through photoetching on sensitive diaphragm
The technologies such as etching form the complete Wheatstone bridge of above-mentioned two, then are drawn by hot pressing so lder ball bonding technology gold thread
Go out onto compensation circuit plate, then it is by signal extraction cable that the pressure value that sensor measures is defeated by the form of mV signals
Go out.
2nd, in order to realize the target of miniaturization, the utility model is using minor thread is carried on sensor outer housing, directly
It is connected with structures such as measured medium pipelines, it is real that overall structure only has the intimate integrated structure of one of laser weld
It is existing, a certain parts are alternatively arranged as while being used as measuring unit and are used, do not increase the machinery knot of total system additionally
Structure is born, it is achieved thereby that miniaturization target.
3rd, in order to solve that conventional pressure sensor occurs in the long-term use caused by organic gel aging etc.
The bad phenomenons such as creep, sluggishness, the utility model employ advanced sputtered film technology, the technology be use from
Beamlet sputtering means, the form Direct Bonding that transition zone, insulating layer, resistive layer, gold solder disk, protective layer are passed through into intermolecular combination
On the elastomer of metallic substrates, inanimate matter is thoroughly realized, fundamentally solves the problems such as aging of organic gel.
The beneficial effects of the utility model are：It ensure that the reliability of output signal, two paths of signals compares each other, reliably
Property, high stability, it is and simple in structure, it is easily operated, do not increase the mechanical structure burden of total system additionally, so as to fulfill
Miniaturization target, thoroughly realizes inanimate matter, fundamentally solves the problems such as aging of organic gel.
Brief description of the drawings
Fig. 1 is the schematic diagram of the utility model.
Embodiment
With reference to Fig. 1 specific illustrative embodiments：
A kind of small two-way signal output pressure sensor structure, by base 1, shell 2, sensitive diaphragm 3, panel seat 4, compensation
Circuit board 5, signal extraction cable 6 are formed, and base 1 is equipped with sensitive diaphragm 3 and shell 2, and 3 on piece of sensitive membrane is equipped with panel seat 1,
Sensitive diaphragm is equipped with two Wheatstone bridges, and each Wheatstone bridge is connected with compensation circuit plate, the connection of compensation circuit plate
Signal extraction cable, is deformed after sensitive diaphragm pressure-sensitive, and signal is drawn out on compensation circuit plate by gold thread, is being compensated
After being compensated on circuit board to signal, the signal is exported by signal extraction cable.
Preferred embodiment is that two Wheatstone bridges include 8 mutually independent strain resistors, and Internal and external cycle combination of two.
Preferred embodiment is to carry minor thread on the shell.
Preferred embodiment is that the sensitive diaphragm is made using sputtered film technique.
Preferred embodiment is, between sensitive diaphragm and base, between sensitive diaphragm and panel seat, between base and shell by swashing
Photocoagulation or electron beam welding are connected.
After the gold thread drawn from sensitive diaphragm 3 by hot pressed gold ball bonding is welded to compensation circuit plate 5, drawn by signal
The electric signal that cable 6 measures sensor exports, and is linked into corresponding detection or modulate circuit system, it is achieved thereby that should
The sensor function of utility model.
Wherein base 1, shell 2, panel seat 4 etc. realize that high-accuracy mechanical is processed by external coordination, and compensation circuit plate 5 is conventional
Cooperation processing forms after PCB drawing, and signal extraction cable 6 is the conducting wire of satisfactory various specifications.Sensitive diaphragm 3 passes through
After mechanical processing realizes its basic shape, it is carried out at vacuum aging when 480 DEG C of application of vacuum stove inside holdings 4 are small first
Reason, is then polished to minute surface by abrasive polishing process by its surface, its surface roughness Ra≤0.02 μm, which passes through
Alcohol ultrasonic cleaning and acetone cleaning thoroughly clean and dry after enter vacuum chamber, adopted afterwards in the metal elastomer
It is with ion beam sputtering means, transition zone, insulating layer, resistive layer, gold solder disk, protective layer is direct by the form of intermolecular combination
It is bonded on the elastomer of metallic substrates, also has Twi-lithography and twice ion beam etch process in the technological process, so far, should
Sensitive diaphragm coating process is completed, and is tested afterwards by resistance value, is filtered out qualification after the dependence test such as Insulation test, humid test
Sensitive diaphragm after be put into vacuum drying oven and carry out degradation, carry out resistance value and Insulation test again afterwards, qualified products can be made
Used for sensitive diaphragm 3.
In sensor production between sensitive diaphragm 3 and base 1, between sensitive diaphragm 3 and panel seat 4, base 1 and shell 2 it
Between be to be welded by laser welding or electron beam welding, also ensure that while ensure that integrally-built intensity
The aesthetics of shape.
, it is necessary to which normal pressure calibration equipment is demarcated after small two-way signal output pressure sensor completion makes,
And can be sold after relevant product description is provided, product can in all kinds of complex industrial environment, Aeronautics and Astronautics, navigation
Realize extensive use in operating mode Deng high reliability requests such as environment and military equipments, this product is for industrialization development and some
Particular surroundings, the solution tool of specific question are of great significance.
The beneficial effect of the utility model compared with prior art is：
1st, the form of simple two-way signal output ensure that the reliability and stability of output signal, even if wherein signal goes out all the way
Existing problem, the utility model sensor construction can also work normally, while simple two-way signal can also compare each other, signal it is credible
Degree higher, so as to improve the reliability of total system, total system is more reliable and more stable.
2nd, novel and unique in the structure design of the utility model, while sensor is used as pressure measurement cell in itself
The a certain construction unit for being alternatively arranged as total system uses, and does not increase integral mechanical structure burden additionally, and overall dimensions are smaller,
Realize the target of miniaturization.
3rd, the application of sputtered film technology solve that conventional pressure sensor occurs in the long-term use by
In the bad phenomenon such as creep, sluggishness caused by organic gel aging etc., which is to use ion beam sputtering means, by transition
Layer, insulating layer, resistive layer, gold solder disk, protective layer by the form Direct Bonding of intermolecular combination metallic substrates elastomer
On, inanimate matter is thoroughly realized, a series of problems that the aging of organic gel is brought fundamentally is solved, improves sensor
The Long-Term Properties of structure, substantially prolongs sensor service life.
The utility model simple two-way signal pressure sensor output, it is possible to achieve complicated in Aeronautics and Astronautics, navigation equivalent place
Application in environment, in directly contacting, additionally it is possible to the Special Ring such as the high vibrations of tolerance, HI high impact, ultra-high vacuum environment, big temperature difference
Border requires, while monnolithic case is compact, and overall structure only has a laser weld, and intimate integration forms, structure for
The influence of total system falls below lesser extent.
Claims (5)
1. a kind of small two-way signal output pressure sensor structure, it is characterised in that by base, shell, sensitive diaphragm, plate
Seat, compensation circuit plate, signal extraction cable are formed, and base is equipped with sensitive diaphragm and shell, and sensitive diaphragm is equipped with panel seat,
Sensitive diaphragm is equipped with two Wheatstone bridges, and each Wheatstone bridge is connected with compensation circuit plate, the connection of compensation circuit plate
Signal extraction cable, is deformed after sensitive diaphragm pressure-sensitive, and signal is drawn out on compensation circuit plate by gold thread, is being compensated
After being compensated on circuit board to signal, the signal is exported by signal extraction cable.
2. small two-way signal output pressure sensor structure as claimed in claim 1, it is characterised in that two favour stone electricity
Bridge includes 8 mutually independent strain resistors, and Internal and external cycle combination of two.
3. small two-way signal output pressure sensor structure as claimed in claim 1, it is characterised in that on the shell
Carry minor thread.
4. small two-way signal output pressure sensor structure as claimed in claim 1, it is characterised in that the sensitive membrane
Piece is made using sputtered film technique.
5. small two-way signal output pressure sensor structure as claimed in claim 1, it is characterised in that sensitive diaphragm and bottom
It is connected between seat, between sensitive diaphragm and panel seat, between base and shell by laser welding or electron beam welding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721236574.4U CN207280670U (en) | 2017-09-26 | 2017-09-26 | A kind of small two-way signal output pressure sensor structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721236574.4U CN207280670U (en) | 2017-09-26 | 2017-09-26 | A kind of small two-way signal output pressure sensor structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207280670U true CN207280670U (en) | 2018-04-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721236574.4U Expired - Fee Related CN207280670U (en) | 2017-09-26 | 2017-09-26 | A kind of small two-way signal output pressure sensor structure |
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| CN (1) | CN207280670U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107478378A (en) * | 2017-09-26 | 2017-12-15 | 航天南洋（浙江）科技有限公司 | A kind of small two-way signal output pressure sensor structure |
-
2017
- 2017-09-26 CN CN201721236574.4U patent/CN207280670U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107478378A (en) * | 2017-09-26 | 2017-12-15 | 航天南洋（浙江）科技有限公司 | A kind of small two-way signal output pressure sensor structure |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180427 |
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| CF01 | Termination of patent right due to non-payment of annual fee |