CN207263849U - Laser ageing test equipment - Google Patents
Laser ageing test equipment Download PDFInfo
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- CN207263849U CN207263849U CN201721182503.0U CN201721182503U CN207263849U CN 207263849 U CN207263849 U CN 207263849U CN 201721182503 U CN201721182503 U CN 201721182503U CN 207263849 U CN207263849 U CN 207263849U
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- power
- temperature lowering
- test equipment
- lowering board
- power detector
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- Testing Of Individual Semiconductor Devices (AREA)
- Semiconductor Lasers (AREA)
Abstract
A kind of laser ageing test equipment, burn-in test is carried out for noise spectra of semiconductor lasers, which includes temperature lowering board, power detector, power sector, the master controller being electrically connected with power sector and the liquid supply assembly being connected with temperature lowering board of testing jig, setting on the tester rack；Power sector is electrically connected with semiconductor laser, and power supply is provided to some semiconductor lasers；Power detector is corresponding with semiconductor laser, to detect luminous power of the semiconductor laser during burn-in test；Master controller is electrically connected with power detector；Power sector is equipped with electric energy delivery outlet, temperature detection mouth and data output；By setting power detector and master controller; luminescent properties of the semiconductor laser during burn-in test can be automatically analyzed; and implement protection control of the noise spectra of semiconductor lasers during burn-in test, aging can be carried out to multiple semiconductor lasers at the same time, improve the efficiency of test.
Description
Technical field
Detection device is the utility model is related to, more particularly to a kind of laser ageing test equipment.
Background technology
Semiconductor laser is after the completion of production, to ensure the qualification rate of product of dispatching from the factory, need to the product that production is completed into
Semiconductor laser, i.e., be powered by row burn-in test, so-called burn-in test, make its under certain condition one section of continuous firing when
Between, just allow to be supplied to client by the semiconductor laser of burn-in test, ensure that the semiconductor laser energy of sale
Continual and steady work.
In existing burn-in test mode, the various detection devices of manual operation are generally utilized to start burn-in test and record
Various electric parameters during burn-in test.Therefore, the detection efficiency of existing burn-in test is relatively low, can not meet that semiconductor swashs
The requirement of light device batch production.
Utility model content
Based on this, the utility model provides a kind of detection efficiency higher laser ageing test equipment.
In order to realize the purpose of this utility model, the utility model uses following technical scheme：
A kind of laser ageing test equipment, including testing jig, the temperature lowering board being arranged on the testing jig, power detection
Device, power sector, the master controller being electrically connected with the power sector and the liquid supply assembly being connected with the temperature lowering board；Institute
Stating testing jig includes being oppositely arranged the first side frame, the second side frame and between first side frame and second side frame
Assisting base plate, load substrate；The master controller is electrically connected with the power detector.
The laser ageing test equipment of the utility model can be automatically analyzed by setting power detector and master controller
Luminescent properties of the semiconductor laser during burn-in test, and implement noise spectra of semiconductor lasers during burn-in test
Multiple semiconductor lasers can be carried out aging at the same time, improve the efficiency of test by protection control.
In one of the embodiments, the power sector is equipped with electric energy delivery outlet, temperature detection mouth and data output
Mouthful；Thermometric groove is additionally provided with the temperature lowering board；Temperature control element is installed in thermometric groove on the temperature lowering board；The temperature control element
It is connected with the temperature detection mouth of the power sector.
In one of the embodiments, the data output of the power sector is connected with the master controller.
In one of the embodiments, the assisting base plate overlaps with the load substrate in vertical direction；It is described
Some temperature lowering boards are installed on load substrate；The power detector includes main part and is connected with the main part
Epitaxy part；The main part of the power detector is installed on the load substrate, and the side in the temperature lowering board.
In one of the embodiments, the temperature lowering board is corresponding with some power detectors；On the temperature lowering board
Temperature control element is corresponding with the power detector.
In one of the embodiments, the liquid supply assembly includes liquid feeding device and some catheters；Set on the temperature lowering board
There are some fluid courses；The delivery outlet of the liquid feeding device is connected to the fluid course on the temperature lowering board through the catheter.
In one of the embodiments, on the load substrate, described in the fluid course warp of the adjacent temperature lowering board
Catheter connects.
In one of the embodiments, the liquid supply assembly includes liquid feeding device and some catheters；The power detector
Main part in be equipped with through-flow chamber；The liquid feeding device is connected to logical in the main part of the power detector through the catheter
Flow chamber.
In one of the embodiments, on the load substrate, in the main part of the adjacent power detector
Through-flow chamber is interconnected through the catheter.
In one of the embodiments, the power sector is installed on assisting base plate.
Brief description of the drawings
Fig. 1 is the schematic perspective view of the laser ageing test equipment of a preferred embodiment of the utility model；
Structure diagrams of the Fig. 2 between the substrate in Fig. 1, temperature lowering board and power detector；
Fig. 3 is the enlarged drawing at the circle A in Fig. 2；
Fig. 4 is the enlarged drawing at the circle B in Fig. 2；
Fig. 5 A are the schematic perspective view of the temperature lowering board in Fig. 1；
Fig. 5 B are enlarged drawing at the C of the temperature lowering board in Fig. 5 A；
Annexation figures of the Fig. 6 between power sector, master controller and power detector.
Embodiment
For the ease of understanding the utility model, the utility model will be described more fully below.But this practicality
It is new to realize in many different forms, however it is not limited to embodiment described herein.On the contrary, provide these implementations
The purpose of example is the understanding more thorough and comprehensive made to the disclosure of the utility model.
Unless otherwise defined, all of technologies and scientific terms used here by the article is led with belonging to the technology of the utility model
The normally understood implication of technical staff in domain is identical.It is simply in the term used in the description of the utility model herein
The purpose of description specific embodiment, it is not intended that in limitation the utility model.
Please refer to Fig.1 to Fig. 6, be the laser ageing test equipment 100 of one better embodiment of the utility model, be used for
Noise spectra of semiconductor lasers 200 carries out burn-in test, and 200 both sides of semiconductor laser are equipped with location division 201, are set on location division 201
There is mounting hole 202.The laser ageing test equipment 100 includes testing jig 10, temperature lowering board 20, the work(being arranged on testing jig 10
Rate detector 30, power sector 40, the master controller 50 being electrically connected with power sector 40 and the feed flow being connected with temperature lowering board 20
Component 60；Power sector 40 is electrically connected with semiconductor laser 200, and power supply is provided to some semiconductor lasers 200；Power
Detector 30 is corresponding with semiconductor laser 200, to detect luminous work(of the semiconductor laser 200 during burn-in test
Rate；Master controller 50 is electrically connected with power detector 30；By setting power detector 30 and master controller 50, can divide automatically
Luminescent properties of the semiconductor laser 200 during burn-in test are analysed, and implement noise spectra of semiconductor lasers 200 in burn-in test
During protection control, aging can be carried out to multiple semiconductor lasers 200 at the same time, improve the efficiency of test.
Referring to Fig. 1, testing jig 10 includes being oppositely arranged the first side frame 11, the second side frame 12 and installed in the first side frame
11 and the second assisting base plate 13, load substrate 14 between side frame 12；Assisting base plate 13, load substrate 14 are horizontally disposed；Auxiliary
Substrate 13 overlaps with load substrate 14 in vertical direction.
Fig. 4, Fig. 5 A and Fig. 5 B are referred to, temperature lowering board 20 is equipped with some fluid courses 21；The horizontal connection of fluid course 21
The two side ends of temperature lowering board 20；Temperature lowering board 20 is equipped with pilot hole 22, the clamping part pair of pilot hole 22 and semiconductor laser 200
Should；Thermometric groove 23 is additionally provided with temperature lowering board 20；Temperature control element 24 is installed in thermometric groove 23 on temperature lowering board 20.
Referring to Fig. 3, power detector 30 includes main part 31 and the epitaxy part 32 being connected with main part 31；Power is examined
Survey in the main part 31 of device 30 and be equipped with through-flow chamber (not shown).
Referring to Fig. 1, master controller 50 is equipped with display screen 51；Liquid supply assembly 60 includes liquid feeding device 61 and some drains
Pipe 62；Liquid feeding device 61 exports coolant by catheter 62.
Please refer to Fig.1 to Fig.3, temperature lowering board 20 is installed on load substrate 14；It is provided with each load substrate 14 some
Temperature lowering board 20；The main part 31 of power detector 30 is installed on load substrate 14, and the side in temperature lowering board 20；Power machine
Structure 40 is installed on assisting base plate 13；Some power sectors 40 are installed on each assisting base plate 13；In the present embodiment, it is each
Temperature lowering board 20 is corresponding with some power detectors 30；Temperature control element 24 on temperature lowering board 20 is corresponding with power detector 30；Liquor charging
The delivery outlet of device 61 is connected to the fluid course 21 of temperature lowering board 20 through catheter 62；On load substrate 14, adjacent temperature lowering board
20 fluid course 21 is connected through catheter 62.
To avoid power detector 30 from being damaged because being persistently subject to laser to irradiate, liquid feeding device 61 is also connected to through catheter 62
The main part 31 of power detector 30；On load substrate 14, the through-flow chamber of the main part 31 of adjacent power detector 30 leads to
Catheter 62 is crossed to be interconnected.
Referring to Fig. 6, power sector 40 is equipped with electric energy delivery outlet, temperature detection mouth and data output.Temperature control element 24
It is connected with the temperature detection mouth of power sector 40；The data output of power sector 40 is connected with master controller 50.
Swash in laser ageing test equipment 100 in use, installing some semiconductors to be tested on each temperature lowering board 20
Light device 200, the mounting hole 202 on semiconductor laser 200 is corresponding with the pilot hole 22 on temperature lowering board 20, to facilitate using fixing
Semiconductor laser 200 is fixed on temperature lowering board 20 by part (not shown)；Semiconductor laser 200 is fixed on temperature lowering board 20
Afterwards, thermometric groove 23 and temperature control element 24 are located at the lower section of semiconductor laser 200.
Liquid feeding device 61 pumps out coolant, and then coolant flows through the fluid course 21 of each temperature lowering board 20, to reduce because of half
The temperature rise that conductor laser 200 is produced by operation；Coolant additionally flows through the through-flow chamber of each power detector 30.
Semiconductor laser 200 is coupled with power detector 30 by optical fiber 300；Optical fiber 300 enters after epitaxy part 32
In the main part 31 of semiconductor laser 200；Photodiode is equipped with the main part 31 of power detector 30, to check power
The intensity for the laser beam that 30 internal optical fiber 300 of detector is conducted.
Semiconductor laser 200 is connected with the electric energy delivery outlet of power sector 40；Power sector 40 is to each semiconductor laser
Device 200 exports electric energy, while power sector 40 detects the voltage exported to each semiconductor laser 200 and size of current.
Power sector 40 obtains the heat condition of each semiconductor laser 200 by temperature control element 24, works as semiconductor laser
After the temperature of device 200 exceedes certain upper limit, power sector 40 stops to all semiconductor lasers on corresponding temperature lowering board 20
Device 200 provides electric energy, impaired to avoid semiconductor laser in test 200 or laser ageing test equipment 100, while power supply
Mechanism 40 sends warning signal to master controller 50.In the present embodiment, temperature control element 24 is thermistor；In other implementations
In mode, temperature control element 24 is thermocouple.
Luminous power of the semiconductor laser 200 during burn-in test is detected data sending extremely by power detector 30
Master controller 50；Meanwhile power sector 40 will be defeated to the output voltage of semiconductor laser 200 and the related data of output current
Go out to master controller 50；Master controller 50 detects data according to luminous power, voltage and current data judge each semiconductor laser
200 working performance, and directly can show testing result by display screen 51.
In the present embodiment, by making load substrate 14 and assisting base plate 13 overlapping in vertical direction, laser can be saved
The occupied space of aging testing apparatus 100, meanwhile, facilitate semiconductor laser 200 to install and take out.Carried by temperature lowering board 20
The semiconductor laser 200 of burn-in test, and fluid course 21 of the liquid feeding device 61 by coolant by loading plate are carried out, makes partly to lead
Body laser 200 will not will not be excessive and impaired because of temperature during burn-in test.
In the present embodiment, by the connection of power sector, master controller and semiconductor laser and power detector is utilized
The luminous power of semiconductor laser is detected, realizes the automatic progress of semiconductor laser ageing test process, can be right at the same time
Multiple semiconductor lasers carry out burn-in test, improve the efficiency of detection.
Embodiment described above only expresses the several embodiments of the utility model, its description is more specific and detailed,
But therefore it can not be interpreted as the limitation to utility model patent scope.It should be pointed out that the common skill for this area
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (10)
1. a kind of laser ageing test equipment, it is characterised in that including testing jig, the cooling being arranged on the testing jig
Plate, power detector, power sector, with the master controller of power sector electrical connection and being connected with the temperature lowering board
Liquid supply assembly；The testing jig includes being oppositely arranged the first side frame, the second side frame and installed in first side frame and described the
Assisting base plate, load substrate between two side frames；The master controller is electrically connected with the power detector.
2. laser ageing test equipment according to claim 1, it is characterised in that it is defeated that the power sector is equipped with electric energy
Outlet, temperature detection mouth and data output；Thermometric groove is additionally provided with the temperature lowering board；In thermometric groove on the temperature lowering board
Temperature control element is installed；The temperature control element is connected with the temperature detection mouth of the power sector.
3. laser ageing test equipment according to claim 2, it is characterised in that the data output of the power sector
Mouth is connected with the master controller.
4. laser ageing test equipment according to claim 2, it is characterised in that the assisting base plate and the load
Substrate overlaps in vertical direction；Some temperature lowering boards are installed on the load substrate；The power detector includes
Main part and the epitaxy part being connected with the main part；The main part of the power detector is installed on the load substrate,
And the side in the temperature lowering board.
5. laser ageing test equipment according to claim 4, it is characterised in that the temperature lowering board and some work(
Rate detector corresponds to；Temperature control element on the temperature lowering board is corresponding with the power detector.
6. laser ageing test equipment according to claim 5, it is characterised in that the liquid supply assembly includes liquor charging
Device and some catheters；The temperature lowering board is equipped with some fluid courses；The delivery outlet of the liquid feeding device connects through the catheter
The fluid course being connected on the temperature lowering board.
7. laser ageing test equipment according to claim 6, it is characterised in that adjacent on the load substrate
The fluid course of the temperature lowering board connected through the catheter.
8. laser ageing test equipment according to claim 5, it is characterised in that the liquid supply assembly includes liquor charging
Device and some catheters；Through-flow chamber is equipped with the main part of the power detector；The liquid feeding device is connected through the catheter
Through-flow chamber to the main part of the power detector.
9. laser ageing test equipment according to claim 8, it is characterised in that adjacent on the load substrate
The power detector main part in through-flow chamber be interconnected through the catheter.
10. laser ageing test equipment according to claim 4, it is characterised in that the power sector is installed on auxiliary
Help on substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721182503.0U CN207263849U (en) | 2017-09-14 | 2017-09-14 | Laser ageing test equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721182503.0U CN207263849U (en) | 2017-09-14 | 2017-09-14 | Laser ageing test equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207263849U true CN207263849U (en) | 2018-04-20 |
Family
ID=61921731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721182503.0U Active CN207263849U (en) | 2017-09-14 | 2017-09-14 | Laser ageing test equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN207263849U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108444682A (en) * | 2018-06-08 | 2018-08-24 | 深圳市杰普特光电股份有限公司 | Semiconductor laser automatic functional testing system |
| CN109324213A (en) * | 2018-11-02 | 2019-02-12 | 武汉电信器件有限公司 | A kind of aging equipment and aging method of chip of laser |
| CN110207954A (en) * | 2019-07-04 | 2019-09-06 | 泛波激光设备(杭州)有限公司 | A kind of BAR aging testing system |
| CN112345906A (en) * | 2020-09-28 | 2021-02-09 | 杭州大和热磁电子有限公司 | Multi-path parallel aging testing device |
| CN112423540A (en) * | 2019-08-21 | 2021-02-26 | 美光科技公司 | Heat sink for semiconductor device testing, such as pot machine testing |
-
2017
- 2017-09-14 CN CN201721182503.0U patent/CN207263849U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108444682A (en) * | 2018-06-08 | 2018-08-24 | 深圳市杰普特光电股份有限公司 | Semiconductor laser automatic functional testing system |
| CN108444682B (en) * | 2018-06-08 | 2023-10-03 | 深圳市杰普特光电股份有限公司 | Automatic function test system for semiconductor laser |
| CN109324213A (en) * | 2018-11-02 | 2019-02-12 | 武汉电信器件有限公司 | A kind of aging equipment and aging method of chip of laser |
| CN110207954A (en) * | 2019-07-04 | 2019-09-06 | 泛波激光设备(杭州)有限公司 | A kind of BAR aging testing system |
| CN112423540A (en) * | 2019-08-21 | 2021-02-26 | 美光科技公司 | Heat sink for semiconductor device testing, such as pot machine testing |
| CN112345906A (en) * | 2020-09-28 | 2021-02-09 | 杭州大和热磁电子有限公司 | Multi-path parallel aging testing device |
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