CN207224313U - A kind of feed arrangement for diamond wire semiconductor silicon rod shear - Google Patents
A kind of feed arrangement for diamond wire semiconductor silicon rod shear Download PDFInfo
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- CN207224313U CN207224313U CN201720998946.0U CN201720998946U CN207224313U CN 207224313 U CN207224313 U CN 207224313U CN 201720998946 U CN201720998946 U CN 201720998946U CN 207224313 U CN207224313 U CN 207224313U
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Abstract
It the utility model is related to semiconductor processing technology, it is desirable to provide a kind of feed arrangement for diamond wire semiconductor silicon rod shear.The device sets guide rail to install feed unit backboard with activity on the column of gantry supporting rack, and is connected by feed screw nut's seat with vertical screw component；The swing guide wheel arm that two groups of retractable cable wheel assemblies, expansion guide wheel assembly, doubling guide wheel assembly and end are equipped with cutting guide wheel assembly has been arranged symmetrically on feed unit backboard；Diamond cutting secant is arranged such that on feed unit backboard to be arranged in two diamond cutting secants cut between guide wheel assembly in parallel lines；Two retractable cable wheel assemblies are connected to driving motor by transmission mechanism respectively and are rotated synchronously with realizing so that diamond cutting secant can move back and forth between two cutting guide wheel assemblies.The utility model can disposably obtain certain thickness monocrystalline silicon print；By adjusting the distance between swing guide wheel arm so that the line bow of diamond cutting secant reduces, and improves cutting efficiency.
Description
Technical field
The utility model patent belongs to the feed dress of semiconductor processing technology, more particularly to semiconductor monocrystal silicon rod shear
Put.
Background technology
The work flow that silicon single crystal rod is processed into monocrystalline silicon buffing sheet mainly has：Monocrystalline silicon growing, silicon single crystal rod block, are single
The cylindrical barreling of crystalline silicon rod, silicon single crystal rod section, chamfering, grinding, burn into polishing, cleaning, are finally packed.The purpose wherein blocked
It is head and the afterbody and beyond the part of goal standard for cutting off silicon single crystal rod, silicon single crystal rod is segmented into chopper and slicer to locate
The length of reason, cuts the characteristic of test piece measurement silicon single crystal rod.
Cheng Qian is crossed, it is necessary to certain thickness crystal silicon print be cut, for monocrystalline silicon piece what semiconductor monocrystal silicon rod blocked
Characteristic be detected.Current cutting mode is to carry out cutting silicon single crystal rod at twice, so that the list of thickness required for obtaining
Crystal silicon chip.But since the distance of silicon single crystal rod movement is difficult to accurately control so that monocrystalline silicon print thickness is difficult control.
Utility model content
The technical problems to be solved in the utility model is to overcome deficiency of the prior art, there is provided one kind is used for diamond wire
The feed arrangement of semiconductor silicon rod shear.
To solve technical problem, the solution of the utility model is：
A kind of feed arrangement for diamond wire semiconductor silicon rod shear is provided, includes gantry supporting rack of door shape；
Vertical guide rail is set respectively on two heel posts of gantry supporting rack, feed unit backboard is movably arranged on two guide rails, and
It is flexibly connected by feed screw nut's seat with the screw component being vertically arranged；The upper end of screw component passes through gantry bracing frame crossbeam
Center, and feed unit servomotor is connected to by gear reducer, the latter is fixedly mounted on crossbeam；
Two retractable cable wheel assemblies, two expansion guide wheel assemblies, two doublings have been arranged symmetrically on feed unit backboard
Guide wheel assembly and two ends are equipped with the swing guide wheel arm of cutting guide wheel assembly；Diamond cutting secant is on feed unit backboard
Arrangement is：The one ends wound of diamond cutting secant is preserved in the retractable cable wheel assembly of left side, is then led successively through left side expansion
Wheel assembly, left side cutting guide wheel assembly, right side cutting guide wheel assembly, right side doubling guide wheel assembly, left side doubling guide wheel assembly, a left side
After guide wheel assembly, right side cutting guide wheel assembly, right side expansion guide wheel assembly are cut in lateral incision, other end winding preserves right side folding and unfolding line wheel
In component；The guide wheel that two concatenations are respectively equipped with guide wheel assembly is cut at two so that between two cutting guide wheel assemblies
Diamond cutting secant in parallel lines arrange；Two retractable cable wheel assemblies are connected to driving motor with reality by transmission mechanism respectively
Now rotate synchronously so that diamond cutting secant can move back and forth between two cutting guide wheel assemblies.
As an improvement the upper limb of the feed unit backboard is not contacted with the crossbeam of gantry supporting rack, a ranging
Sensor is fixed on below the crossbeam by mounting bracket.
As an improvement cooling water pipe component is additionally provided with the feed unit backboard, the outlet alignment of cooling water pipe
Diamond cutting secant between two cutting guide wheel assemblies.
As an improvement described two swing guide wheel arm are movably arranged on feed unit backboard by rotational pin, and
It can be changed by the combination of screw and mounting hole and adjust its installation direction.
As an improvement the screw component is ball screw component, and it is connected by key with gear reducer.
As an improvement gantry supporting rack is installed on the chassis of semiconductor monocrystal silicon rod shear by screw
On.
Operation principle describes：
Arrangement of the diamond cutting secant on multiple guide wheel assemblies, it is in parallel lines between two cutting guide wheel assemblies to make it
Arrangement；Motor is driven to drive two retractable cable wheel assemblies to rotate synchronously so that diamond cutting secant cuts guide wheel assembly at two
Between move back and forth, when silicon single crystal rod is cut below the supporting rack of gantry, can disposably obtain laminar monocrystalline
Silicon print.
Two retractable cable wheel assemblies, two expansion guide wheel assemblies, two doublings have been arranged symmetrically on feed unit backboard
Guide wheel assembly and two swing guide wheel arm, the end of swing guide wheel arm are equipped with the swing guide wheel arm of cutting guide wheel assembly.Retractable cable
Wheel assembly is used to winding and preserving diamond cutting secant；Expansion guide wheel assembly is walked for expanding diamond cutting secant layout with changing
To, avoid and other components touch；Doubling guide wheel assembly can be in cutting guide wheel for changing diamond cutting secant layout
Two of parallel side-by-side are formed between component.
Swing guide wheel arm can be rotated around rotational pin, when the silicon single crystal rod diameter change cut, adjust swing guide
The direction of wheel arm makes two cutting guide wheel assemblies keep suitable distance, then fixes swing guide wheel arm with screw.So set
Purpose be, in cutting silicon rod reduce diamond cutting secant line bow, improve processing silicon rod production efficiency.
Being worked by feed unit servomotor drives screw component to rotate, and feed unit backboard can be made to move up and down, removed
Carry out being adapted to different size single crystal silicon rods before starting cutting, should also progressively be moved down according to cutting progress in cutting process
To adapt to the change of cutting position.Distance measuring sensor is used for the distance for detecting feed unit backboard and gantry supporting rack, limits it
Displacement distance causes security incident to prevent mechanical collision.
Compared with prior art, the beneficial effects of the utility model are：
1st, certain thickness monocrystalline silicon print can be disposably obtained, for detecting the characteristic of monocrystalline silicon.
2nd, can be by adjusting the distance between swing guide wheel arm so that the line bow of diamond cutting secant reduces, and improves single
The cutting efficiency of crystalline silicon rod.
Brief description of the drawings
Fig. 1 is feed cell arrangement front view.
Reference numeral in Fig. 1：Gantry supporting rack 1；Guide rail；Feed unit backboard 3；Screw component 4；Gear reducer 5；Feed list
First servomotor 6；Retractable cable wheel assembly 7；Expand guide wheel assembly 8, doubling guide wheel assembly 9；Cut guide wheel assembly 10；Swing guide wheel
Arm 11；Diamond cutting secant 12；Distance measuring sensor 13；Cooling water pipe component 14.
Embodiment
The utility model is described further with operation embodiment below in conjunction with the accompanying drawings.
For gantry supporting rack 1 of the feed arrangement of diamond wire semiconductor silicon rod shear, including door shape, gantry supports, and 1
It is installed on by screw on the chassis of semiconductor monocrystal silicon rod shear.Set respectively on two heel posts of gantry supporting rack 1
Vertical guide rail 2, feed unit backboard 3 are movably arranged on two guide rails 2, and pass through feed screw nut's seat and the silk being vertically arranged
Bar assembly 4 is flexibly connected；The upper end of screw component 4 is connected to through the center of the crossbeam of gantry supporting rack 1 by gear reducer 5
Feed unit servomotor 6, the latter is fixedly mounted on crossbeam；The upper limb of feed unit backboard 3 and the crossbeam of gantry supporting rack 1
Do not contact, a distance measuring sensor 13 is fixed on below the crossbeam by mounting bracket.The optional ball screw component of screw component 4, and
It is connected by key with gear reducer 5.
Two retractable cable wheel assemblies, 7, two expansion guide wheel assemblies 6, two have been arranged symmetrically on feed unit backboard 3 simultaneously
Wire carrier component 9 and two ends are equipped with the swing guide wheel arm 11 of cutting guide wheel assembly 10；Diamond cutting secant 12 is in feed list
Arrangement on first backboard 3 is：The one ends wound of diamond cutting secant 12 is preserved in left side retractable cable wheel assembly 7, Ran Houyi
It is secondary to cut guide wheel assembly 10, right side doubling guide wheel assembly through left side expansion guide wheel assembly 8, left side cutting guide wheel assembly 10, right side
9th, left side doubling guide wheel assembly 9, left side cutting guide wheel assembly 10, right side cutting guide wheel assembly 10, right side expansion guide wheel assembly 8
Afterwards, other end winding is preserved in right side retractable cable wheel assembly 7；Two cut guide wheel assemblies 10 on be respectively equipped with two concatenation
Guide wheel so that arranged in the diamond cutting secant 12 that two are cut between guide wheel assembly 10 in parallel lines；Two folding and unfolding line wheel groups
Part 7 is connected to driving motor by transmission mechanism respectively and is rotated synchronously with realizing so that diamond cutting secant 12 can be cut at two
Cut and move back and forth between guide wheel assembly 10.
Cooling water pipe component 14 is additionally provided with feed unit backboard 3, the outlet of cooling water pipe is directed at two cutting guide wheel groups
Diamond cutting secant 12 between part 10.Two swing guide wheel arm 11 are movably arranged on feed unit backboard 3 by rotational pin,
And it can be changed by the combination of screw and mounting hole and adjust its installation direction.
Swing guide wheel arm 11 can be rotated around rotational pin, when the silicon single crystal rod diameter change cut, rotated and swung
Guide wheel arm 11 is fixed by screws on feed unit backboard 12 to suitable distance, during cutting silicon rod, it is possible to reduce diamond
The line bow of line of cut 12, improves the production efficiency of silicon single crystal rod.
Feed screw nut's seat, which is connected by screw, to be fixed on feed unit backboard 12, and screw component 11 and feed screw nut's seat are living
Dynamic connection, drives ball screw component 11 to rotate, so that feed unit by feed unit servomotor 6 by gear reducer 7
Backboard 12 can realize up and down motion.Ball screw component 11 passes through key connection with gear reducer 7.
Distance measuring sensor is installed under the crossbeam of gantry supporting rack 1, for measuring the displacement distance of feed unit backboard 12,
Alarm can closely be sent by such as crossing is acted with stopping feed unit servomotor 6, prevents feed unit backboard 12 from being sent out with gantry supporting rack 1
Raw mechanical collision, causes security incident.
Diamond cutting secant cabling mode can be obtained disposably as shown in Figure 1, by the winding displacement mode after putting into operation
The monocrystalline silicon print that thickness is 3mm is obtained, for detecting the characteristic of monocrystalline silicon.
Finally it should be noted that listed above is only specific embodiment of the utility model.Obviously, this practicality is new
Type is not limited to above example, can also there is many variations.Those of ordinary skill in the art can be from disclosed in the utility model
All deformations for directly exporting or associating in content, are considered as the scope of protection of the utility model.
Claims (6)
1. a kind of feed arrangement for diamond wire semiconductor silicon rod shear, includes gantry supporting rack of door shape；Its feature exists
In setting vertical guide rail respectively on two heel posts of gantry supporting rack, feed unit backboard is movably arranged on two guide rails
On, and be flexibly connected by feed screw nut's seat with the screw component being vertically arranged；The upper end of screw component passes through gantry supporting rack
The center of crossbeam, and feed unit servomotor is connected to by gear reducer, the latter is fixedly mounted on crossbeam；
Two retractable cable wheel assemblies, two expansion guide wheel assemblies, two and wire carriers have been arranged symmetrically on feed unit backboard
Component and two ends are equipped with the swing guide wheel arm of cutting guide wheel assembly；Arrangement of the diamond cutting secant on feed unit backboard
Mode is：The one ends wound of diamond cutting secant is preserved in the retractable cable wheel assembly of left side, then expands guide wheel group through left side successively
Part, left side cutting guide wheel assembly, right side cutting guide wheel assembly, right side doubling guide wheel assembly, left side doubling guide wheel assembly, left side are cut
After cutting guide wheel assembly, right side cutting guide wheel assembly, right side expansion guide wheel assembly, other end winding preserves right side retractable cable wheel assembly
In；The guide wheel that two concatenations are respectively equipped with guide wheel assembly is cut at two so that in the gold that two are cut between guide wheel assembly
Hard rock line of cut is arranged in parallel lines；It is same to realize that two retractable cable wheel assemblies are connected to driving motor by transmission mechanism respectively
Step rotates so that diamond cutting secant can move back and forth between two cutting guide wheel assemblies.
2. device according to claim 1, it is characterised in that the upper limb of the feed unit backboard and gantry supporting rack
Crossbeam does not contact, and a distance measuring sensor is fixed on below the crossbeam by mounting bracket.
3. device according to claim 1, it is characterised in that be additionally provided with cooling water pipe group on the feed unit backboard
Part, two diamond cutting secants cut between guide wheel assemblies of outlet alignment of cooling water pipe.
4. device according to claim 1, it is characterised in that described two swing guide wheel arm are installed by rotational pin activity
On feed unit backboard, and it can be changed by the combination of screw and mounting hole and adjust its installation direction.
5. device according to claim 1, it is characterised in that the screw component is ball screw component, and passes through key
It is connected with gear reducer.
6. according to the device described in claim 1 to 5 any one, it is characterised in that gantry supporting rack passes through screw
On the chassis of semiconductor monocrystal silicon rod shear.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720998946.0U CN207224313U (en) | 2017-08-10 | 2017-08-10 | A kind of feed arrangement for diamond wire semiconductor silicon rod shear |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720998946.0U CN207224313U (en) | 2017-08-10 | 2017-08-10 | A kind of feed arrangement for diamond wire semiconductor silicon rod shear |
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| Publication Number | Publication Date |
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| CN207224313U true CN207224313U (en) | 2018-04-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201720998946.0U Active CN207224313U (en) | 2017-08-10 | 2017-08-10 | A kind of feed arrangement for diamond wire semiconductor silicon rod shear |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108407119A (en) * | 2018-05-14 | 2018-08-17 | 福州天瑞线锯科技有限公司 | A kind of silicon single crystal rod processing unit (plant) |
| CN108748752A (en) * | 2018-08-13 | 2018-11-06 | 江苏鑫华半导体材料科技有限公司 | A kind of the cutting separator and cutting method of silicon rod U-bend |
| CN111283887A (en) * | 2018-12-10 | 2020-06-16 | 玉山机械(株) | Longitudinal cutting device for bar-shaped processed object and wire saw mounted on same |
| CN110421222B (en) * | 2019-08-12 | 2020-07-14 | 烟台德丰精密钣金有限公司 | Full-automatic cutting unit |
| CN111673933A (en) * | 2020-05-14 | 2020-09-18 | 郑州元素工具技术有限公司 | Internet of things carrier cutting system and method |
| CN114654596A (en) * | 2022-04-20 | 2022-06-24 | 昆山顺之晟精密机械有限公司 | Gantry type wire rack moving horizontal cutting form |
-
2017
- 2017-08-10 CN CN201720998946.0U patent/CN207224313U/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108407119A (en) * | 2018-05-14 | 2018-08-17 | 福州天瑞线锯科技有限公司 | A kind of silicon single crystal rod processing unit (plant) |
| CN108407119B (en) * | 2018-05-14 | 2023-12-15 | 福州天瑞线锯科技有限公司 | Monocrystalline silicon rod processing device |
| CN108748752A (en) * | 2018-08-13 | 2018-11-06 | 江苏鑫华半导体材料科技有限公司 | A kind of the cutting separator and cutting method of silicon rod U-bend |
| CN108748752B (en) * | 2018-08-13 | 2024-02-09 | 江苏鑫华半导体科技股份有限公司 | Cutting and separating device and cutting method for U-shaped bend of silicon rod |
| CN111283887A (en) * | 2018-12-10 | 2020-06-16 | 玉山机械(株) | Longitudinal cutting device for bar-shaped processed object and wire saw mounted on same |
| CN110421222B (en) * | 2019-08-12 | 2020-07-14 | 烟台德丰精密钣金有限公司 | Full-automatic cutting unit |
| CN111673933A (en) * | 2020-05-14 | 2020-09-18 | 郑州元素工具技术有限公司 | Internet of things carrier cutting system and method |
| CN114654596A (en) * | 2022-04-20 | 2022-06-24 | 昆山顺之晟精密机械有限公司 | Gantry type wire rack moving horizontal cutting form |
| CN114654596B (en) * | 2022-04-20 | 2024-05-17 | 昆山顺之晟精密机械有限公司 | Gantry type wire frame moving horizontal cutting mode |
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