CN203509591U - Four-axis adjusting mechanism - Google Patents
Four-axis adjusting mechanism Download PDFInfo
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- CN203509591U CN203509591U CN201320633381.8U CN201320633381U CN203509591U CN 203509591 U CN203509591 U CN 203509591U CN 201320633381 U CN201320633381 U CN 201320633381U CN 203509591 U CN203509591 U CN 203509591U
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Abstract
The utility model relates to a four-axis adjusting mechanism which comprises a bottom plate, an X-axis mechanism, a Y-axis mechanism, a Z-axis mechanism and an R-axis mechanism. The Y-axis mechanism is arranged on the bottom plate. The X-axis mechanism is arranged on the Y-axis mechanism. A lifting fixing plate defined by four plates in a connecting mode in sequence is fixedly connected to the bottom of the X-axis mechanism. The Z-axis mechanism is arranged on the side face of the lifting fixing plate. The R-axis mechanism is placed in a middle zone defined by the lifting fixing plate. The Z-axis mechanism moves up and down and can drive the R-axis mechanism to move up and down. According to the four-axis adjusting mechanism, the four mechanisms have a synergistic effect, simultaneous adjusting in the X-axis direction, the Y-axis direction, the Z-axis direction and a rotating plane can be achieved, when a product is placed on a rotating shaft, the position of the product can be adjusted, meanwhile, the four-axis adjusting mechanism is suitable for various products, and space is saved through the arrangement.
Description
Technical field:
The utility model relates to a kind of guiding mechanism apparatus field, relates in particular a kind of four axial adjustment mechanisms.
Background technology:
When product is operated, product can need to be adjusted at X-direction, Y direction, Z-direction and R direction of principal axis four direction, just can make product arrive standard operation position, then product is carried out to next step operational sequence, now just need a kind of four axial adjustment mechanisms to realize aforesaid operations.
Utility model content:
The purpose of this utility model is for the deficiencies in the prior art part, and a kind of four axial adjustment mechanisms are provided, and by the synergy of Si Ge mechanism, can realize in X-direction, Y direction, Z-direction and Plane of rotation product space is regulated.
Technology solution of the present utility model is as follows:
Four axial adjustment mechanisms, it comprises base plate, X-axis mechanism, Y-axis mechanism, Z-axis mechanism and R axis mechanism, described Y-axis mechanism is arranged on base plate; Described X-axis mechanism is arranged in Y-axis mechanism; The bottom of described X-axis mechanism is fixedly connected with by four blocks of plates encloses successively and connects the lifting fixed head forming, and described Z-axis mechanism is arranged on lifting fixed head side; Described R axis mechanism is positioned at the zone line that lifting fixed head surrounds; Described Z-axis mechanism moves up and down and can drive R axis mechanism to move up and down.
Described Y-axis mechanism comprises y-axis motor, Y-axis shaft coupling, the linear module of Y-axis, Y-axis slide plate contiguous block, Y-axis slide rail, Y-axis slide block, Y-axis landing slab, Y-axis mounting bar, Y-axis photoelectric sensor and Y-axis sensing chip, the linear module of described Y-axis, Y-axis slide rail and Y-axis mounting bar are arranged on base plate respectively, and the linear module of Y-axis, Y-axis slide rail and Y-axis mounting bar are parallel to each other; Described Y-axis slide rail has two, on every Y-axis slide rail, coordinates respectively three above Y-axis slide blocks are installed, and Y-axis photoelectric sensor is installed on Y-axis mounting bar; Described y-axis motor links together by Y-axis shaft coupling and the linear module of Y-axis; Described Y-axis slide plate contiguous block is arranged on the linear module of Y-axis, and described Y-axis landing slab is arranged on Y-axis slide block top, and Y-axis slide plate contiguous block and Y-axis landing slab are fixed together; Described Y-axis sensing chip is arranged on the side of Y-axis slide plate contiguous block.
Described X-axis mechanism comprises X-axis motor, X-axis shaft coupling, the linear module of X-axis, X-axis slide plate contiguous block, X-axis slide rail, X-axis slide block, X-axis landing slab, X-axis mounting bar, X-axis photoelectric sensor and X-axis sensing chip, the linear module of described X-axis, X-axis slide rail and X-axis mounting bar are arranged on respectively on Y-axis landing slab, and the linear module of X-axis, X-axis slide rail and X-axis mounting bar are parallel to each other; Described X-axis slide rail has two, on every X-axis slide rail, coordinates plural X-axis slide block is installed respectively, and X-axis photoelectric sensor is installed on X-axis mounting bar; Described X-axis motor links together by X-axis shaft coupling and the linear module of X-axis; Described X-axis slide plate contiguous block is arranged on the linear module of X-axis, and described X-axis landing slab is arranged on X-axis slide block top, and X-axis slide plate contiguous block and X-axis landing slab are fixed together; Described X-axis sensing chip is arranged on the side of X-axis slide plate contiguous block.
Described Z-axis mechanism comprises Z axis motor, motor fixing seat, Z axis shaft coupling, screw mandrel bearing, screw mandrel fixed block, screw mandrel cushion pad, screw mandrel bearing fixed block, Z axis slide rail, Z axis slide block, lifting photoelectric sensor and lifting sensing chip, described motor fixing seat, screw mandrel bearing and screw mandrel bearing fixed block are separately fixed at the side of lifting fixed head, Z axis motor is connected in motor fixing seat, Z axis motor is by Z axis shaft coupling connection wire rod, screw mandrel is through screw mandrel bearing, in the middle of screw mandrel, connecting screw mandrel fixed block, screw mandrel front end is supported on screw mandrel bearing fixed block, the bottom of screw mandrel bearing fixed block is connecting screw mandrel cushion pad, Z axis motor drives screw mandrel, can make screw mandrel fixed block move up and down.
Described R axis mechanism comprises R spindle motor, R axle shaft coupling, rotating shaft, rotating shaft holder, R axis mechanism mount pad, rotary photoelectric sensor and rotary inductive sheet, described R spindle motor links together by R axle shaft coupling and rotating shaft, and rotating shaft is by swivel bearing seat supports; Described R axis mechanism mount pad and rotating shaft holder are fixedly installed togather; Described R axis mechanism mount pad and screw mandrel fixed block are fixed together.
On four angles of described R axis mechanism mount pad, a Z axis slide rail is installed respectively, in described lifting fixed head, is matched Z axis slide block is installed with Z axis slide rail respectively; When driving R axis mechanism mount pad to move up and down, screw mandrel fixed block leads by Z axis slide rail.
The inner side of described R axis mechanism mount pad is connecting lifting sensing chip by a lifting sensing chip Connection Block, and described lifting fixed head outside is being fixedly connected with lifting photoelectric sensor.
The side of described rotating shaft is connecting rotary inductive sheet, on described rotating shaft holder, by a rotary inductive device Connection Block, is connecting rotary photoelectric sensor.
As preferably, described Y-axis slide plate contiguous block is provided with a boss a, and Y-axis landing slab is provided with a groove a, and boss a coordinates and is arranged in groove a and by bolt, Y-axis slide plate contiguous block and Y-axis landing slab is fixed together.
As preferably, described X-axis slide plate contiguous block is provided with a boss b, and X-axis landing slab is provided with a groove b, and boss b coordinates and is arranged in groove b and by bolt, X-axis slide plate contiguous block and X-axis landing slab is fixed together.
As preferably, described Y-axis photoelectric sensor has three, by Y-axis slide plate contiguous block, drives Y-axis sensing chip to move, and its move distance is determined by Y-axis photoelectric sensor.
As preferably, described X-axis photoelectric sensor has three, by X-axis slide plate contiguous block, drives X-axis sensing chip to move, and its move distance is determined by X-axis photoelectric sensor.
As preferably, described lifting photoelectric sensor has three, by R axis mechanism mount pad, drives lifting sensing chip to move, and its climb is determined by lifting photoelectric sensor.
As preferably, described rotary photoelectric sensor has three, by rotating shaft driven rotary sensing chip, rotates, and its anglec of rotation is determined by rotary photoelectric sensor.
The beneficial effects of the utility model are:
The utility model X-axis motor drives, and makes X-axis slide plate contiguous block in X-direction, drive X-axis landing slab to move in X-direction by X-axis slide rail, and y-axis motor drives, and Y-axis slide plate contiguous block is moved in Y direction by Y-axis slide rail in Y direction.At Z axis motor, drive screw mandrel simultaneously, lifting fixed head is fixed in Z-direction, Z-axis mechanism is fixed on R axis mechanism mounting blocks by screw mandrel fixed block, Z axis motor drives screw mandrel, drive the rise and fall of R axis mechanism, rise and fall have Z axis slide rail guiding, and Z axis slide block is installed on lifting fixed head, and climb is determined by photoelectric sensor.R spindle motor drives, and rotating shaft can planar rotate with adjusting angle, and servo motor is fixed in Plane of rotation, and the anglec of rotation is determined by rotary photoelectric sensor.
The synergy of the utility model XZhou mechanism, Y-axis mechanism, Z-axis mechanism and R axis mechanism Si Ge mechanism, can realize in X-direction, Y direction, Z-direction and Plane of rotation and regulating simultaneously, while placing product on rotating shaft, can regulate product space, be applicable to all kinds product, and this kind arranges saving space simultaneously.
Accompanying drawing explanation:
Below in conjunction with accompanying drawing, the utility model is described further:
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the structural representation of HeYZhou mechanism of X-axis of the present utility model mechanism;
Fig. 3 is the rearview of Fig. 2;
Fig. 4 is the structural representation of Z-axis mechanism of the present utility model and R axis mechanism;
Fig. 5 is the structural representation during without lifting fixed head in Fig. 4;
Fig. 6 is the structural representation of R axis mechanism in Fig. 4;
In Fig. 1～6: 1-base plate; 2-y-axis motor; 3-Y-axis shaft coupling; The linear module of 4-Y-axis; 5-Y-axis slide plate contiguous block; 6-Y-axis slide rail; 7-Y-axis slide block; 8-Y-axis landing slab; 9-Y-axis mounting bar; 10-Y-axis photoelectric sensor; 11-Y-axis sensing chip; 12-X-axis motor; 13-X-axis shaft coupling; The linear module of 14-X-axis; 15-X-axis slide plate contiguous block; 16-X-axis slide rail; 17-X-axis slide block; 18-X-axis landing slab; 19-X-axis mounting bar; 20-X-axis photoelectric sensor; 21-X-axis sensing chip; 22-lifting fixed head; 23-Z axis motor; 24-motor fixing seat; 25-Z axis shaft coupling; 26-screw mandrel bearing; 27-screw mandrel fixed block; 28-screw mandrel cushion pad; 29-screw mandrel bearing fixed block; 30-Z axis slide rail; 31-Z axis slide block; 32-lifting photoelectric sensor; 33-lifting sensing chip; 34-R spindle motor; 35-R axle shaft coupling; 36-rotating shaft; 37-rotating shaft holder; 38-R axis mechanism mount pad; 39-rotary photoelectric sensor; 40-rotary inductive sheet.
The specific embodiment:
Embodiment, is shown in accompanying drawing 1, a kind of four axial adjustment mechanisms, and it comprises base plate 1, X-axis mechanism I, Y-axis mechanism II, Z-axis mechanism III and R axis mechanism IV, described Y-axis mechanism is arranged on base plate; Described X-axis mechanism is arranged in Y-axis mechanism; The bottom of described X-axis mechanism is fixedly connected with by four blocks of plates encloses successively and connects the lifting fixed head 22 forming, and described Z-axis mechanism is arranged on lifting fixed head side; Described R axis mechanism is positioned at the zone line that lifting fixed head surrounds; Described Z-axis mechanism moves up and down and can drive R axis mechanism to move up and down.
See accompanying drawing 2～3, described Y-axis mechanism comprises y-axis motor 2, Y-axis shaft coupling 3, the linear module 4 of Y-axis, Y-axis slide plate contiguous block 5, Y-axis slide rail 6, Y-axis slide block 7, Y-axis landing slab 8, Y-axis mounting bar 9, Y-axis photoelectric sensor 10 and Y-axis sensing chip 11, the linear module of described Y-axis, Y-axis slide rail and Y-axis mounting bar are arranged on base plate respectively, and the linear module of Y-axis, Y-axis slide rail and Y-axis mounting bar are parallel to each other; Described Y-axis slide rail has two, on every Y-axis slide rail, coordinates respectively three above Y-axis slide blocks are installed, and Y-axis photoelectric sensor is installed on Y-axis mounting bar; Described y-axis motor links together by Y-axis shaft coupling and the linear module of Y-axis; Described Y-axis slide plate contiguous block is arranged on the linear module of Y-axis, described Y-axis landing slab is arranged on Y-axis slide block top, Y-axis slide plate contiguous block is provided with a boss a, Y-axis landing slab is provided with a groove a, and boss a cooperation is arranged in groove a and by bolt, Y-axis slide plate contiguous block and Y-axis landing slab is fixed together; Described Y-axis sensing chip is arranged on the side of Y-axis slide plate contiguous block, and Y-axis photoelectric sensor has three, by Y-axis slide plate contiguous block, drives Y-axis sensing chip to move, and its move distance is determined by Y-axis photoelectric sensor.
Described X-axis mechanism comprises X-axis motor 12, X-axis shaft coupling 13, the linear module 14 of X-axis, X-axis slide plate contiguous block 15, X-axis slide rail 16, X-axis slide block 17, X-axis landing slab 18, X-axis mounting bar 19, X-axis photoelectric sensor 20 and X-axis sensing chip 21, the linear module of described X-axis, X-axis slide rail and X-axis mounting bar are arranged on respectively on Y-axis landing slab, and the linear module of X-axis, X-axis slide rail and X-axis mounting bar are parallel to each other; Described X-axis slide rail has two, on every X-axis slide rail, coordinates plural X-axis slide block is installed respectively, and X-axis photoelectric sensor is installed on X-axis mounting bar; Described X-axis motor links together by X-axis shaft coupling and the linear module of X-axis; Described X-axis slide plate contiguous block is arranged on the linear module of X-axis, described X-axis landing slab is arranged on X-axis slide block top, X-axis slide plate contiguous block is provided with a boss b, X-axis landing slab is provided with a groove b, and boss b cooperation is arranged in groove b and by bolt, X-axis slide plate contiguous block and X-axis landing slab is fixed together; Described X-axis sensing chip is arranged on the side of X-axis slide plate contiguous block, and X-axis photoelectric sensor has three, by X-axis slide plate contiguous block, drives X-axis sensing chip to move, and its move distance is determined by X-axis photoelectric sensor.
See accompanying drawing 4～6, described Z-axis mechanism comprises Z axis motor 23, motor fixing seat 24, Z axis shaft coupling 25, screw mandrel bearing 26, screw mandrel fixed block 27, screw mandrel cushion pad 28, screw mandrel bearing fixed block 29, Z axis slide rail 30, Z axis slide block 31, lifting photoelectric sensor 32 and lifting sensing chip 33, described motor fixing seat, screw mandrel bearing and screw mandrel bearing fixed block are separately fixed at the side of lifting fixed head, Z axis motor is connected in motor fixing seat, Z axis motor is by Z axis shaft coupling connection wire rod, screw mandrel is through screw mandrel bearing, in the middle of screw mandrel, connecting screw mandrel fixed block, screw mandrel front end is supported on screw mandrel bearing fixed block, the bottom of screw mandrel bearing fixed block is connecting screw mandrel cushion pad, Z axis motor drives screw mandrel, can make screw mandrel fixed block move up and down.
Described R axis mechanism comprises R spindle motor 34, R axle shaft coupling 35, rotating shaft 36, rotating shaft holder 37, R axis mechanism mount pad 38, rotary photoelectric sensor 39 and rotary inductive sheet 40, described R spindle motor links together by R axle shaft coupling and rotating shaft, and rotating shaft is by swivel bearing seat supports; Described R axis mechanism mount pad and rotating shaft holder are fixedly installed togather; Described R axis mechanism mount pad and screw mandrel fixed block are fixed together.
On four angles of described R axis mechanism mount pad, a Z axis slide rail is installed respectively, in described lifting fixed head, is matched Z axis slide block is installed with Z axis slide rail respectively; When driving R axis mechanism mount pad to move up and down, screw mandrel fixed block leads by Z axis slide rail.
The inner side of described R axis mechanism mount pad is connecting lifting sensing chip by a lifting sensing chip Connection Block, described lifting fixed head outside is being fixedly connected with lifting photoelectric sensor, lifting photoelectric sensor has three, by R axis mechanism mount pad, drive lifting sensing chip to move, its climb is determined by lifting photoelectric sensor.
The side of described rotating shaft is connecting rotary inductive sheet, on described rotating shaft holder, by a rotary inductive device Connection Block, connecting rotary photoelectric sensor, rotary photoelectric sensor has three, by rotating shaft driven rotary sensing chip, rotates, and its anglec of rotation is determined by rotary photoelectric sensor.
Above-described embodiment is the specific descriptions that the utility model is carried out; just the utility model is further described; can not be interpreted as the restriction to the utility model protection domain, within those skilled in the art makes some nonessential improvement according to the content of above-mentioned utility model and adjusts and all to fall into protection domain of the present utility model.
Claims (7)
1. a Zhong Si axial adjustment mechanism, is characterized in that: it comprises base plate, X-axis mechanism, Y-axis mechanism, Z-axis mechanism and R axis mechanism, and described Y-axis mechanism is arranged on base plate; Described X-axis mechanism is arranged in Y-axis mechanism; The bottom of described X-axis mechanism is fixedly connected with by four blocks of plates encloses successively and connects the lifting fixed head forming, and described Z-axis mechanism is arranged on lifting fixed head side; Described R axis mechanism is positioned at the zone line that lifting fixed head surrounds; Described Z-axis mechanism moves up and down and can drive R axis mechanism to move up and down;
Described Y-axis mechanism comprises y-axis motor, Y-axis shaft coupling, the linear module of Y-axis, Y-axis slide plate contiguous block, Y-axis slide rail, Y-axis slide block, Y-axis landing slab, Y-axis mounting bar, Y-axis photoelectric sensor and Y-axis sensing chip, the linear module of described Y-axis, Y-axis slide rail and Y-axis mounting bar are arranged on base plate respectively, and the linear module of Y-axis, Y-axis slide rail and Y-axis mounting bar are parallel to each other; Described Y-axis slide rail has two, on every Y-axis slide rail, coordinates respectively three above Y-axis slide blocks are installed, and Y-axis photoelectric sensor is installed on Y-axis mounting bar; Described y-axis motor links together by Y-axis shaft coupling and the linear module of Y-axis; Described Y-axis slide plate contiguous block is arranged on the linear module of Y-axis, and described Y-axis landing slab is arranged on Y-axis slide block top, and Y-axis slide plate contiguous block and Y-axis landing slab are fixed together; Described Y-axis sensing chip is arranged on the side of Y-axis slide plate contiguous block;
Described X-axis mechanism comprises X-axis motor, X-axis shaft coupling, the linear module of X-axis, X-axis slide plate contiguous block, X-axis slide rail, X-axis slide block, X-axis landing slab, X-axis mounting bar, X-axis photoelectric sensor and X-axis sensing chip, the linear module of described X-axis, X-axis slide rail and X-axis mounting bar are arranged on respectively on Y-axis landing slab, and the linear module of X-axis, X-axis slide rail and X-axis mounting bar are parallel to each other; Described X-axis slide rail has two, on every X-axis slide rail, coordinates plural X-axis slide block is installed respectively, and X-axis photoelectric sensor is installed on X-axis mounting bar; Described X-axis motor links together by X-axis shaft coupling and the linear module of X-axis; Described X-axis slide plate contiguous block is arranged on the linear module of X-axis, and described X-axis landing slab is arranged on X-axis slide block top, and X-axis slide plate contiguous block and X-axis landing slab are fixed together; Described X-axis sensing chip is arranged on the side of X-axis slide plate contiguous block;
Described Z-axis mechanism comprises Z axis motor, motor fixing seat, Z axis shaft coupling, screw mandrel bearing, screw mandrel fixed block, screw mandrel cushion pad, screw mandrel bearing fixed block, Z axis slide rail, Z axis slide block, lifting photoelectric sensor and lifting sensing chip, described motor fixing seat, screw mandrel bearing and screw mandrel bearing fixed block are separately fixed at the side of lifting fixed head, Z axis motor is connected in motor fixing seat, Z axis motor is by Z axis shaft coupling connection wire rod, screw mandrel is through screw mandrel bearing, in the middle of screw mandrel, connecting screw mandrel fixed block, screw mandrel front end is supported on screw mandrel bearing fixed block, the bottom of screw mandrel bearing fixed block is connecting screw mandrel cushion pad, Z axis motor drives screw mandrel, can make screw mandrel fixed block move up and down,
Described R axis mechanism comprises R spindle motor, R axle shaft coupling, rotating shaft, rotating shaft holder, R axis mechanism mount pad, rotary photoelectric sensor and rotary inductive sheet, described R spindle motor links together by R axle shaft coupling and rotating shaft, and rotating shaft is by swivel bearing seat supports; Described R axis mechanism mount pad and rotating shaft holder are fixedly installed togather; Described R axis mechanism mount pad and screw mandrel fixed block are fixed together;
On four angles of described R axis mechanism mount pad, a Z axis slide rail is installed respectively, in described lifting fixed head, is matched Z axis slide block is installed with Z axis slide rail respectively; When driving R axis mechanism mount pad to move up and down, screw mandrel fixed block leads by Z axis slide rail;
The inner side of described R axis mechanism mount pad is connecting lifting sensing chip by a lifting sensing chip Connection Block, and described lifting fixed head outside is being fixedly connected with lifting photoelectric sensor;
The side of described rotating shaft is connecting rotary inductive sheet, on described rotating shaft holder, by a rotary inductive device Connection Block, is connecting rotary photoelectric sensor.
2. a kind of four axial adjustment mechanisms according to claim 1, it is characterized in that: described Y-axis slide plate contiguous block is provided with a boss a, Y-axis landing slab is provided with a groove a, and boss a cooperation is arranged in groove a and by bolt, Y-axis slide plate contiguous block and Y-axis landing slab is fixed together.
3. a kind of four axial adjustment mechanisms according to claim 1, it is characterized in that: described X-axis slide plate contiguous block is provided with a boss b, X-axis landing slab is provided with a groove b, and boss b cooperation is arranged in groove b and by bolt, X-axis slide plate contiguous block and X-axis landing slab is fixed together.
4. a kind of four axial adjustment mechanisms according to claim 1, is characterized in that: described Y-axis photoelectric sensor has three, by Y-axis slide plate contiguous block, drive Y-axis sensing chip to move, and its move distance is determined by Y-axis photoelectric sensor.
5. a kind of four axial adjustment mechanisms according to claim 1, is characterized in that: described X-axis photoelectric sensor has three, by X-axis slide plate contiguous block, drive X-axis sensing chip to move, and its move distance is determined by X-axis photoelectric sensor.
6. a kind of four axial adjustment mechanisms according to claim 1, is characterized in that: described lifting photoelectric sensor has three, by R axis mechanism mount pad, drive lifting sensing chip to move, and its climb is determined by lifting photoelectric sensor.
7. a kind of four axial adjustment mechanisms according to claim 1, is characterized in that: described rotary photoelectric sensor has three, and by rotating shaft driven rotary sensing chip, rotate, its anglec of rotation is determined by rotary photoelectric sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320633381.8U CN203509591U (en) | 2013-10-14 | 2013-10-14 | Four-axis adjusting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320633381.8U CN203509591U (en) | 2013-10-14 | 2013-10-14 | Four-axis adjusting mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203509591U true CN203509591U (en) | 2014-04-02 |
Family
ID=50368573
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320633381.8U Withdrawn - After Issue CN203509591U (en) | 2013-10-14 | 2013-10-14 | Four-axis adjusting mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203509591U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103522084A (en) * | 2013-10-14 | 2014-01-22 | 吴江市博众精工科技有限公司 | Four-axis adjusting mechanism |
| CN107851599A (en) * | 2015-07-30 | 2018-03-27 | 日本精工株式会社 | Table device, positioner, flat panel display manufacturing apparatus and precision optical machinery |
-
2013
- 2013-10-14 CN CN201320633381.8U patent/CN203509591U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103522084A (en) * | 2013-10-14 | 2014-01-22 | 吴江市博众精工科技有限公司 | Four-axis adjusting mechanism |
| CN103522084B (en) * | 2013-10-14 | 2015-12-16 | 苏州博众精工科技有限公司 | A kind of four axial adjustment mechanisms |
| CN107851599A (en) * | 2015-07-30 | 2018-03-27 | 日本精工株式会社 | Table device, positioner, flat panel display manufacturing apparatus and precision optical machinery |
| CN107851599B (en) * | 2015-07-30 | 2022-02-08 | 日本精工株式会社 | Stage device, positioning device, flat panel display manufacturing device, and precision machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20140402 Effective date of abandoning: 20151216 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |