CN207163965U - A kind of integrated form ampere detection sensor for micro-total analysis system chip - Google Patents

A kind of integrated form ampere detection sensor for micro-total analysis system chip Download PDF

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Publication number
CN207163965U
CN207163965U CN201720943616.1U CN201720943616U CN207163965U CN 207163965 U CN207163965 U CN 207163965U CN 201720943616 U CN201720943616 U CN 201720943616U CN 207163965 U CN207163965 U CN 207163965U
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sensor
electrode lead
working electrode
detection
electrode
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张贺
揣荣岩
李新
夏贝贝
张冰
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Shenyang University of Technology
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Shenyang University of Technology
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Abstract

The utility model discloses a kind of integrated form ampere detection sensor for micro-total analysis system chip, integrated form ampere detection sensor is by detection probe, reference electrode, working electrode lead, counter electrode lead and sensor outer housing composition, working electrode lead is soldered to working electrode by working electrode fairlead, counter electrode lead is connected to auxiliary electrode by counter electrode lead eyelet welding, working electrode lead and counter electrode lead are connected with electrochemical workstation, reference electrode cage connection is in the side of the epoxy glass fabric of sensor probe, it is connected by Ag/AgCl electrodes with electrochemical workstation, sensor outer housing is in working electrode lead, the periphery of reference electrode shell and counter electrode lead is provided with sensor outer housing.The utility model has the characteristics that small volume, high sensitivity, detection reappearance and stability is good, integration degree is high, expensive components are recyclable, meets portable, the integrated detection demand of different kinds of ions and its compound.

Description

A kind of integrated form ampere detection sensor for micro-total analysis system chip
Technical field
The utility model belongs to MEMS(Micro-electro Mechanical Systems, MEMS)Field, It is related to a kind of integrated form ampere detection sensor for micro-total analysis system chip.
Background technology
Micro-total analysis system(Micro total analysis systems, µTAS)Chip is existed using MEMS technology The system that the various structures such as micro- raceway groove, micro- liquid storage tank, micro-mixer are made on the base material of several centimetres of sizes, it is integrated simultaneously The functional modules such as Micropump, micro-valve and detection sensor, so as to complete the quick analysis to sample.In electrochemical assay Ampere detection(Amperometric Detection, AD)Method is determined using the redox reaction occurred on electrode The method of material composition content, ampere detection method not only possess many advantages, such as equipment is simple, is easily integrated, is easy to carry, And its sensitivity and versatility are also very good.Micro-total analysis system chip is combined with ampere detection technique, it is possible to achieve right The trace detection of a variety of samples, can be devised by a kind of portable online detection instrument, complied with detection technique equipment it is simple, Development trend portable, stability is strong, testing result favorable reproducibility and cost are cheap.
Ampere detection sensor is a three-electrode system being made up of working electrode, auxiliary electrode and reference electrode.Work The operation window of sensor is determined as electrode(The scanning voltage scope of relatively low background current can be obtained, to avoid response from believing Number flooded by ambient noise)It is the intensity key factor for influenceing detection signal;Auxiliary electrode provides closed-loop path for detection electric current, Ensure that the redox reaction between " electrode-solution " interface is smoothed out;Because the absolute potential of working electrode can not be surveyed directly It is fixed, it is necessary to select a stable reference value to measure its relative potentials, supplier of the reference electrode as reference potential, determine The degree of accuracy of ampere testing result.
Because function is different, the material and processing technology of three electrodes also have very big difference.The background of the noble metals such as platinum, gold Electric current is low, measurement accuracy is high, processing characteristics are current most widely used working electrode and auxiliary electrode material well.By wire The working electrode and auxiliary electrode that ampere detection sensor is can obtain on the base material of μ TAS chips are directly mounted to, but should The assembly precision of method is low, the poor reproducibility of detection signal.By sputtering, being deposited, the technique such as silk-screen printing can be in μ TAS chips Base material on be made accurate size, the metallic film working electrode and auxiliary electrode of various shapes.But the technique of this method It is complicated, costly, and the electrode made of noble metal can not be reused after chip failure.
The reference electrode of stable reference current potential can be provided for ampere detection sensor at present mainly to be included standard hydrogen electrode, satisfies With three kinds of calomel electrode and Ag/AgCl electrodes.Standard hydrogen electrode is that the platinized platinum for being coated with platinum black is immersed in into hydrogen or hydrogen saturation electricity Formed in solution liquid, although the preferable assembling of its performance is difficult.And saturated calomel electrode is by mercury, calomel and containing Cl-Anion Solution composition(Hg|Hg2Cl2|KCl), harm of the mercury metal to environment and human body is limited its application.Ag/AgCl electrodes by The argent for being covered with silver chloride layer is immersed in saturated potassium chloride solution and formed, and needs to be immersed in containing Cl during use-Ion In solution, the integrative assembly to electrode brings very big difficulty.
The content of the invention
Purpose of utility model:
The utility model proposes a kind of integrated form ampere detection sensor structure for micro-total analysis system chip.Should Sensor has small volume, high sensitivity, detection reappearance and stability is good, integration degree is high, expensive components are recyclable etc. Feature.The utility model can solve numerous currently used for the integrated preparation technology of ampere detection sensor of micro-total analysis system chip It is trivial, cost is high, the problem of can not reusing, meet portable, the integrated detection demand of different kinds of ions and its compound.
Technical scheme:
A kind of integrated form ampere detection sensor for micro-total analysis system chip, it is characterised in that:Integrated form ampere Detection sensor is made up of detection probe, reference electrode, working electrode lead, counter electrode lead and sensor outer housing, detection Probe is made up of epoxy glass fabric, working electrode, chlorion exchange membrane and auxiliary electrode, and the one side of detection probe is three layers of splicing Structure, there are working electrode, auxiliary electrode and the chlorion exchange membrane being clipped in the middle respectively, the another side of detection probe is epoxy glass Glass cloth, epoxy glass fabric are provided with working electrode fairlead in the position corresponding with working electrode, epoxy glass fabric with auxiliary The corresponding position of electrode, is provided with counter electrode lead hole, and epoxy glass fabric is opened in the position corresponding with chlorion exchange membrane There is ion exchange hole, working electrode lead is soldered to working electrode by working electrode fairlead, and counter electrode lead passes through auxiliary Electrode lead hole is helped to be soldered to auxiliary electrode, working electrode lead and counter electrode lead are connected with electrochemical workstation, hollow Reference electrode cage connection sensor probe epoxy glass fabric side, in working electrode lead and counter electrode lead Between, ion exchange hole position is in the cavity end in reference electrode shell;Chlorion exchange membrane, reference electrode shell, Ag/AgCl Electrode, rubber stopper and the saturated potassium chloride solution of injection collectively form reference electrode, and it is remote that rubber stopper fills in reference electrode shell From one end of detection probe, via is provided among rubber stopper, Ag/AgCl electrodes pass through the via, and a part immerses reference electrode In the saturated potassium chloride solution poured in shell, another part is connected outside rubber stopper with electrochemical workstation, outside sensor Shell is connected to the epoxy glass fabric side of sensor probe, and sensor outer housing is in working electrode lead, reference electrode shell and auxiliary Help the periphery of contact conductor.
The reference electrode is nesting type structure, in embedded integrated form ampere detection sensor.
It is polyvinyl chloride that the chlorion, which exchanges membrane material, the plasticizer containing 50%wt-65%wt.
The sensor outer housing periphery is cased with a sensor interface, and sensor interface is an external screw thread rubber stopper, passes There is a via centre of sensor interface, and via is interference fitted with sensor outer housing.
Advantage and effect:
Integrated form ampere detection sensor provided by the utility model for micro-total analysis system chip, comprising by working The standard three electrode system of electrode, auxiliary electrode and reference electrode composition.By interface, the sensor can be with different structure, function Micro-total analysis system chip combination, realize the integrated trace detection to different kinds of ions and its compound.The work of sensor Electrode and auxiliary electrode use standard PCB processes combination chemical gilding fabrication techniques, and preparation method is simple, cost is cheap, suitable Large-scale production.The reference electrode of sensor is by part groups such as chlorion exchange membrane, Ag/AgCl electrodes, saturated potassium chloride solutions Into by changing Ag/AgCl electrodes and saturated potassium chloride solution can ensure the activity of chlorine ions after repeated detection, being carried for sensor For continual and steady reference potential.Sensor using flowing through formula detection mode, can effectively reduce therewith associated with micro-total analysis system Chip of uniting prepares difficulty, while avoids the influence of channel structure change fluid properties.After micro-total analysis system chip failure, The sensor is detachable and is continuing with.After sensor failure, working electrode, auxiliary electrode and Ag/ made of noble metal AgCl electrodes can reclaim.
Brief description of the drawings
Fig. 1, this integrated form ampere detection sensor structural representation;
Fig. 2, this integrated form ampere detection sensor axial section structure chart;
Fig. 3, microelectrode structure chart;
Fig. 3-1 is microelectrode structure chart front view;
Fig. 3-2 is microelectrode structure chart rear view;
Fig. 3-3 is microelectrode structure chart longitudinal cross-sectional view;
Fig. 4, work and auxiliary electrode structure figure;
Fig. 4-1 is work and auxiliary electrode structure figure front view;
Fig. 4-2 is work and auxiliary electrode structure figure rear view;
Fig. 4-3 is work and auxiliary electrode structure figure longitudinal cross-sectional view;
Fig. 5, ion exchange hole and electrode lead hole structure chart;
Fig. 5-1 is ion exchange hole and electrode lead hole structure chart front view;
Fig. 5-2 is ion exchange hole and electrode lead hole structure chart rear view;
Fig. 5-3 is ion exchange hole and electrode lead hole structure chart longitudinal cross-sectional view;
Fig. 6, sensor detection probe structure chart;
Fig. 6-1 is sensor detection probe structure chart front view;
Fig. 6-2 is sensor detection probe structure chart rear view;
Fig. 6-3 is sensor detection probe structure chart longitudinal cross-sectional view;
Fig. 7, reference electrode shell installation diagram;
Fig. 7-1 is reference electrode shell installation diagram front view;
Fig. 7-2 is reference electrode shell installation diagram rear view;
Fig. 7-3 is reference electrode shell installation diagram longitudinal cross-sectional view;
Fig. 8, contact conductor installation diagram;
Fig. 8-1 is contact conductor installation diagram front view;
Fig. 8-2 is contact conductor installation diagram rear view;
Fig. 8-3 is contact conductor installation diagram longitudinal cross-sectional view;
Fig. 9, sensor outer housing installation diagram;
Fig. 9-1 is sensor outer housing installation diagram front view;
Fig. 9-2 is sensor outer housing installation diagram rear view;
Fig. 9-3 is sensor outer housing installation diagram longitudinal cross-sectional view;
Figure 10, reference electrode installation diagram;
Figure 10-1 is reference electrode installation diagram front view;
Figure 10-2 is reference electrode installation diagram rear view;
Figure 10-3 is reference electrode installation diagram longitudinal cross-sectional view;
The installation diagram of Figure 11, this integrated form ampere detection sensor on micro-total analysis system chip;
The installation sectional view of Figure 12, this integrated form ampere detection sensor on micro-total analysis system chip;
Figure 13, this integrated form ampere detection sensor testing process schematic diagram.
It is described to be labeled as:1. epoxy glass fabric, 2. working electrodes, 3. chlorion exchange membranes, 4. auxiliary electrodes, 5. work Electrode lead hole, 6. sensor outer housings, 7. working electrode leads, 8. reference electrode shells, 9. Ag/AgCl electrodes, 10. rubber Plug, 11. counter electrode lead holes, 12. counter electrode leads, 13. circular microelectrodes, 14. detection probes, 15. metal foils, 16. reference electrode, 17. ion exchange holes, 18. waste liquid port a, 19. buffer inlets, 20. sample inlets, 21. waste liquid port b, 22. Micro-total analysis system chip, 23. sensor interfaces, 24. detection raceway grooves, 25. sample introduction raceway grooves, 26. chips detection interface, 27. collection Accepted way of doing sth ampere detection sensor, 28. syringe pumps, 29. electrochemical workstations, 30 computers.
Embodiment
The utility model is described further below in conjunction with the accompanying drawings:
As depicted in figs. 1 and 2, it is the structural representation of this integrated form ampere detection sensor.One kind is used for micro-total analysis The integrated form ampere detection sensor of System on Chip/SoC, integrated form ampere detection sensor 27 by detection probe 14, reference electrode 16, Working electrode lead 7, counter electrode lead 12 and sensor outer housing 6 form, and detection probe 14 is by epoxy glass fabric 1, work electricity Pole 2, chlorion exchange membrane 3 and auxiliary electrode 4 form, and the front of detection probe 14 will contact with sample to be tested, by with sample Between redox reaction obtain detection signal.The one side of detection probe 14 is three layers of splicing construction, have respectively working electrode 2, Auxiliary electrode 4 and the chlorion exchange membrane 3 being clipped in the middle, the another side of detection probe 14 are epoxy glass fabric 1, epoxy glass fabric 1 in the position corresponding with working electrode 2, is provided with working electrode fairlead 5, epoxy glass fabric 1 is corresponding with auxiliary electrode 4 Position, be provided with counter electrode lead hole 11, epoxy glass fabric 1 is provided with ion in the position corresponding with chlorion exchange membrane 3 Exchange hole 17, working electrode lead 7 are soldered to working electrode 2 by working electrode fairlead 5, and counter electrode lead 12 is by auxiliary Electrode lead hole 11 is helped to be soldered to auxiliary electrode 4, working electrode lead 7 and counter electrode lead 12 and the phase of electrochemical workstation 29 Even, detection signal is exported to electrochemical workstation 29 by working electrode lead 7 and counter electrode lead 12.Hollow reference Electrode shell 8 is connected to the side of the epoxy glass fabric 1 of sensor probe 14, in working electrode lead 7 and counter electrode lead Between 12, ion exchange hole 17 is located at the cavity end in reference electrode shell 8;Chlorion exchange membrane 3, reference electrode shell 8, The saturated potassium chloride solution of Ag/AgCl electrodes 9, rubber stopper 10 and injection collectively forms reference electrode 16, and reference electrode 16 is Nesting type structure, it is embedded in integrated form ampere detection sensor 27.Chlorion exchange membrane 3 and ginseng are realized using ion exchange hole 17 Than the ion exchange between the saturated potassium chloride solution of injection in electrode shell 8.Rubber stopper 10 fills in reference electrode shell 8 away from inspection One end of probing first 14, via is provided among rubber stopper 10, Ag/AgCl electrodes 9 pass through the via, and a part immerses reference electrode In the saturated potassium chloride solution poured in shell 8, another part is connected in the outside of rubber stopper 10 with electrochemical workstation 29, reference Electrode 16 is connected by the Ag/AgCl electrodes 9 being immersed in saturated potassium chloride solution with electrochemical workstation 29, is detection process Continual and steady reference potential is provided.Sensor outer housing 6 is connected to the side of epoxy glass fabric 1 of sensor probe 14, sensor Shell 6 is in the periphery of working electrode lead 7, reference electrode shell 8 and counter electrode lead 12.The periphery of sensor outer housing 6 is cased with One sensor interface 23, sensor interface 23 are an external screw thread rubber stoppers, and there is a via centre of sensor interface 23, Via is interference fitted with sensor outer housing 6.Sensor 27 passes through via, because rubber stopper itself is flexible, if the chi of via The very little size for being slightly less than sensor 27, then interface 23 can be realized with sensor 27 and fixed.
The material of chlorion exchange membrane 3 is polyvinyl chloride, the plasticizer containing 50%wt-65%wt.
As shown in Fig. 3, Fig. 4, Fig. 5, Fig. 6, Fig. 7, Fig. 8, Fig. 9 and Figure 10, the integrated form for micro-total analysis system chip Ampere detection sensor preparation method:
1) working electrode 2, auxiliary electrode 4, working electrode is made using standard PCB processes and combination ultraprecise engraving machine to draw String holes 5 and the micro-structural of ion exchange hole 17;
2) prepare the viscous solution that is made up of PVC, saturated potassium chloride solution and plasticizer, pour obtain after solidification chlorine from Proton exchange 3;
3) in the back side of ampere detection sensor detection probe 14 assembling reference electrode shell 8 and welding job contact conductor 7 With counter electrode lead 12, last assembly sensor shell 6;
4) saturated potassium chloride solution is injected in reference electrode shell, the rubber stopper 10 with insertion Ag/AgCl electrodes 9 is close Envelope;
5) the assembly sensor interface 23 on sensor outer housing 6, itself and different structure micro-total analysis system chip 22 are passed through Detection interface 26 connect.
As shown in Figure 11, Figure 12 and Figure 13, the integrated form ampere detection sensor for micro-total analysis system chip is used Detection method:By the chip of micro-total analysis system chip 22 detect interface 26 by integrated form ampere detection sensor 27 with it is micro- Full analytical system chip 22 connects, then respectively by working electrode lead 7, counter electrode lead 12 and Ag/AgCl electrodes 9 with The corresponding interface connection of electrochemical workstation 29, connects buffer inlet 19 and sample inlets 20 are corresponding to syringe pump 28 respectively Mouth connection, sample to be tested and buffer solution are injected into sample introduction raceway groove 25 and detection raceway groove 24 using syringe pump 28, by installed in inspection The top of raceway groove 24 is surveyed, the integrated form ampere detection sensor 27 at waste liquid port b21 realizes the detection to sample to be tested concentration, Detection signal is exported to electrochemical workstation 29, and the concentration of heavy metal ion to be measured is shown using coupled computer 30 Value.
Design of the present utility model and preparation principle are as follows:
Integrated form ampere detection sensor in the utility model uses the three-electrode system structure of standard, by working electrode 2nd, chlorion exchange membrane 3 and auxiliary electrode 4 are stitched together forms sensor detection probe 14 with epoxy glass fabric 1.Sensor During detection, after applying constant voltage between working electrode 2 and auxiliary electrode 4 by electrochemical workstation 29, work as sample to be tested When flowing through working electrode surface, oxidation or reduction reaction occurs, caused electric current is using solution as conductor, in working electrode and auxiliary Flowed between electrode, the potential change of working electrode is measured using electrochemical workstation, you can obtain sample to be tested concentration.Due to The absolute potential of working electrode can not be determined directly, therefore must also increase a reference electrode 16 in the sensor, as steady Determine the supplier of reference potential.The Ag/AgCl reference electrodes of the utility model selection are soaked by the argent for being covered with silver chloride layer Formed in Klorvess Liquid(Ag|AgCl|Cl-), pass through the chlorion exchange membrane 3 and ion exchange of reference electrode cover top portion Ion exchange is realized in hole 17, and then stable reference potential is provided for detection architecture.
The integrated form ampere detection sensor for micro-total analysis system chip in the utility model uses nested type knot Structure, the reference electrode 16 filled with saturated potassium chloride solution is placed in sensor overall structure, can not only effectively reduce sensor Volume, and working electrode 2, auxiliary electrode 4 and reference electrode 16 are substantial access to, and ensure that the stability of detection architecture.
The integrated form ampere detection sensor for micro-total analysis system chip in the utility model with pcb board base material and Circular microelectrode 13 is made based on processing technology, this method technology maturation, high yield rate, cost are cheap, suitable for extensive business Product metaplasia is produced.But PCB technology obtains the not enough densification of the surface of metal foil 15 and purity is not high, is easily sent out in detection process with solution Raw reaction, trigger electrode poisoning, cause sensor failure.Need to carry out chemical gilding to metal foil 15 for this, to improve its table Face purity, and then prevent the generation of electrode intoxicating phenomenon, while extend electrode life.
The integrated form ampere detection sensor for micro-total analysis system chip in the utility model is using PVC as main material Material prepares chlorion exchange membrane 3.PVC material stable in physicochemical property, cost is cheap, and can be processed into arbitrary shape.But PVC materials In the curing process, it is firmly crisp to become quality, easily chaps, influences the stability of chlorion exchange membrane 3 for material.Therefore preparing During add plasticizer to improve the performance of chlorion exchange membrane 3, prevent it to be broken in use.
The integrated form ampere detection sensor for micro-total analysis system chip in the utility model, examined using the formula that flows through Survey mode, i.e., integrated form ampere detection sensor 27 is directly placed in the top of detection raceway groove 24, cancels traditional detection pool structure. Compared to traditional detection pool structure, the sample to be tested concentration area caused by chip structure changes can be effectively reduced by flowing through formula detection Band expansion phenomenon, and then improve the amplitude of detection signal.Numerical Simulation Results are shown, when testing conditions are consistent(Detection probe half Footpath R=500 μm, the fluid velocity by sensor detection probe areV in =5 μm/s,Re<0.1), detection sample is 5 × 10- 6Mol/L Hg2+During ion, detected using the formula that flows through(It is 200 μm to detect channel width)Obtained detection current peak is 0.265×10-6A, and when detection probe 24 is placed in the circle detection pond of radius R=600 μm, obtained detection current peak For 0.257 × 10-6A。
The integrated form ampere detection sensor for micro-total analysis system chip in the utility model, is led to by sensor Crossing interface 23 can be combined with the micro-total analysis system chip of various structures, function, realize the trace detection of sample.When micro- complete point After analysis system chip failure, integrated form ampere detection sensor 27 is detachable and is continuing with.After sensor failure, by your gold Working electrode 2, auxiliary electrode 4 and Ag/AgCl electrodes 9 can reclaim made of category, effectively reduce testing cost.
Embodiment:
The manufacture method of the micro-total analysis system chip of the integrated detection of heavy metal ion described in the utility model, its work Skill step is as follows:
1) Protel DXP Software on Drawing microelectrode schematic diagrams are used, using standard PCB processes by the He of epoxy glass fabric 1 Circular microelectrode 13 is made on the base material that metal foil 15 forms.Circular microelectrode structure is as shown in Figure 3;
2) it is 7 × 10 to prepare by concentration-3Mmo1/L Na3Au(SO3)2, concentration be 1.25 × 10-3Mo1/L Na2SO3With The sulfite chemical gold plating liquid that the HCHO that concentration is 0.6 mo1/L is formed, gold-plated operation is carried out to circular microelectrode 13.It is gold-plated In operating process, control ph scope is 10 ~ 12, and temperature range is at 2 DEG C ~ 5 DEG C;
3) metal foil 15 in the structure of circular microelectrode 13 after using the cutting of ultraprecise engraving machine gold-plated, obtains work electricity Pole 2 and auxiliary electrode 4.Working electrode and auxiliary electrode shape and process are as shown in Figure 4;
4) ultraprecise engraving machine processing work electrode lead hole 5, counter electrode lead hole 11 on epoxy glass fabric 1 are used With ion exchange hole 17.Work, counter electrode lead hole and ion exchange pore structure are as shown in Figure 5;
5) saturated potassium chloride solution, PVC and plasticizer O-NPOE are dissolved in suitable in 5wt%, 32 wt%, 63wt% ratios The tetrahydrochysene of the new distillation of amount, which is barked, mutters in solution.After being sufficiently stirred, by sticky liquid pouring on clean slide it is standby;
6) thick liquid on slide is cast in the space between working electrode 2 and auxiliary electrode 4, room temperature places 24 Chlorion exchange membrane 3 is obtained after hour solidification.The attachment on working electrode 2 and auxiliary electrode 4 is removed under the microscope, and is made Surface of metal electrode is cleaned repeatedly with alcohol and watery hydrochloric acid.The inspection being made up of working electrode, chlorion exchange membrane and auxiliary electrode Probing header structure is as shown in Figure 6;
7) binder bonding reference electricity is used at the ion exchange hole 17 at the back side of ampere detection sensor detection probe 14 Pole shell 8.Reference electrode shell assembling process is as shown in Figure 7;
8) electrode lead hole 5 and counter electrode lead hole 11 are made by the back side of ampere detection sensor detection probe 14, Working electrode lead 7 and auxiliary electrode contact conductor 12 are soldered to working electrode 2 and auxiliary electrode 4 respectively, and use PUR Protect pad.Work, counter electrode lead assembling process are as shown in Figure 8;
9) reference electrode 16, working electrode lead 7 and auxiliary electrode contact conductor 12 are put into sensor outer housing 6, and Sensor outer housing 6 and sensor detection probe 14 are bonded.Sensor outer housing assembling process is as shown in Figure 9;
10) saturated potassium chloride solution is injected in reference electrode shell 8, rubber stopper 10 is used after insertion Ag/AgCl electrodes 9 Sealing.Reference electrode assembling process is as shown in Figure 10;
11) it is in two chip sizes:The wide long X height of X=4cm X 5cm X 1.5cm polymethyl methacrylate polymerization On thing base material, ultraprecise engraving machining waste liquid port a 18 as is illustrated by figs. 11 and 12, buffer inlet 19, examination are used Sample entrance 20, waste liquid port b 21, sensor interface 23, the detection micro-structural such as raceway groove 24 and sample introduction raceway groove 25;
12) V by volumeChloroform:VEthanol=1:10 prepare 110 milliliters of absolute ethyl alcohol and chloroform miscible solution.Use After chip substrate of the miscible solution wetting with micro-structural, fixed under the microscope using quartz glass fixture, after fixation Substrate is put into the culture dish for filling miscible solution.Culture dish is immediately placed in drying box, temperature is set at 40 °C, bonding 10min, you can obtain with integrated form ampere detection sensor associated with micro-total analysis system chip;
13) the assembly sensor interface 23 on sensor outer housing 8, its detection with micro-total analysis system chip 22 is passed through Interface 26 connects.Installation process of the integrated form ampere detection sensor on micro-total analysis system chip such as Figure 11 and Figure 12 institutes Show;
14) Figure 13 is the integrated form ampere detection sensor course of work schematic diagram for micro-total analysis system chip.According to According to the connected mode in Figure 13 by the micro-total analysis system chip 22 with integrated form ampere detection sensor 27 and syringe pump 28, Electrochemical workstation 29 and computer 30 connect;
15) compound concentration is 5 × 10-6mol/L、1×10-6mol/L、5×10-7Mol/L and 1 × 10-7Mol/L Hg2+ Solion, simulate sample to be tested.Selection phosphate carrys out adjusting sample pH value as buffer solution.Will be to be tested by syringe pump 28 Sample and buffer solution injection sample introduction raceway groove 25 and detection raceway groove 24, by above detection raceway groove 24, close waste liquid port b 21 The integrated form ampere detection sensor 27 at place realizes the detection to sample to be tested concentration, and detection signal is exported to electrochemical workstation 29, and show using coupled computer 30 concentration value of heavy metal ion to be measured.Work as Hg2+Ion concentration is 5 × 10- 6During mol/L, current peak is 0.262 × 10-6A;Work as Hg2+Ion concentration is 1 × 10-6During mol/L, current peak 0.186 ×10-6A;Work as Hg2+Ion concentration is 5 × 10-7During mol/L, current peak is 0.095 × 10-6A;Work as Hg2+Ion concentration is 1 ×10-7During mol/L, almost without peak current.It can be seen that the integrated form ampere detection sensor for micro-total analysis system chip can To realize to Hg2+The measure of ion concentration, and detect electric current and Hg2+Ion concentration is proportional.
The utility model is used for the integrated form ampere detection sensor of micro-total analysis system chip, and targetedly design passes Sensor structure, sensor is applied to various structures, the micro-total analysis system chip of function, and can realize to polytype sample Trace detection, reduce the integrated preparation of chip and using difficulty.After micro-total analysis system chip failure, the sensor can Dismantle and be continuing with.After sensor failure, working electrode, auxiliary electrode and Ag/AgCl electrodes can made of noble metal With recovery, testing cost is effectively controlled.
Preferably, the material of reference electrode shell and sensor outer housing is generally the plastic materials such as polypropylene, nylon.
Above content is to combine the detailed description that optimal technical scheme is done to the utility model, it is impossible to assert utility model Specific implementation be only limitted to these, for the simple deduction and replacement made under the premise of the utility model thought is not departed from, all The scope of protection of the utility model should be considered as.

Claims (4)

  1. A kind of 1. integrated form ampere detection sensor for micro-total analysis system chip, it is characterised in that:Integrated form ampere is examined Survey sensor to be made up of detection probe, reference electrode, working electrode lead, counter electrode lead and sensor outer housing, detection is visited Head is made up of epoxy glass fabric, working electrode, chlorion exchange membrane and auxiliary electrode, and the one side of detection probe is tied for three layers of splicing Structure, there are working electrode, auxiliary electrode and the chlorion exchange membrane being clipped in the middle respectively, the another side of detection probe is expoxy glass Cloth, epoxy glass fabric are provided with working electrode fairlead in the position corresponding with working electrode, epoxy glass fabric with auxiliary electricity Extremely corresponding position, is provided with counter electrode lead hole, and epoxy glass fabric is provided with the position corresponding with chlorion exchange membrane Ion exchange hole, working electrode lead are soldered to working electrode by working electrode fairlead, and counter electrode lead passes through auxiliary Electrode lead hole is soldered to auxiliary electrode, and working electrode lead and counter electrode lead are connected with electrochemical workstation, hollow Reference electrode cage connection in the side of the epoxy glass fabric of sensor probe, in working electrode lead and counter electrode lead it Between, ion exchange hole position is in the cavity end in reference electrode shell;Chlorion exchange membrane, reference electrode shell, Ag/AgCl electricity The saturated potassium chloride solution of pole, rubber stopper and injection collectively forms reference electrode, and it is remote that rubber stopper fills in reference electrode shell One end of detection probe, via is provided among rubber stopper, Ag/AgCl electrodes pass through the via, and a part is immersed outside reference electrode In the saturated potassium chloride solution poured in shell, another part is connected outside rubber stopper with electrochemical workstation, sensor outer housing The epoxy glass fabric side of sensor probe is connected to, sensor outer housing is in working electrode lead, reference electrode shell and auxiliary The periphery of contact conductor.
  2. 2. it is used for the integrated form ampere detection sensor of micro-total analysis system chip according to claim 1, it is characterised in that: The reference electrode is nesting type structure, in embedded integrated form ampere detection sensor.
  3. 3. the integrated form ampere detection sensor according to claim 1 for micro-total analysis system chip, its feature exists In:It is polyvinyl chloride that the chlorion, which exchanges membrane material, the plasticizer containing 50%wt-65%wt.
  4. 4. the integrated form ampere detection sensor according to claim 1 for micro-total analysis system chip, its feature exists In:The sensor outer housing periphery is cased with a sensor interface, and sensor interface is an external screw thread rubber stopper, and sensor connects There is a via centre of mouth, and via is interference fitted with sensor outer housing.
CN201720943616.1U 2017-07-31 2017-07-31 A kind of integrated form ampere detection sensor for micro-total analysis system chip Withdrawn - After Issue CN207163965U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107271525A (en) * 2017-07-31 2017-10-20 沈阳工业大学 A kind of integrated form ampere detection sensor for micro-total analysis system chip

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107271525A (en) * 2017-07-31 2017-10-20 沈阳工业大学 A kind of integrated form ampere detection sensor for micro-total analysis system chip
CN107271525B (en) * 2017-07-31 2023-08-08 沈阳工业大学 Integrated ampere detection sensor for micro total analysis system chip

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