CN207123293U - Variable condenser, microphone, pressure and gas sensor, inertial sensor - Google Patents
Variable condenser, microphone, pressure and gas sensor, inertial sensor Download PDFInfo
- Publication number
- CN207123293U CN207123293U CN201720951972.8U CN201720951972U CN207123293U CN 207123293 U CN207123293 U CN 207123293U CN 201720951972 U CN201720951972 U CN 201720951972U CN 207123293 U CN207123293 U CN 207123293U
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- variable condenser
- electric conduction
- conduction electrode
- dielectric portion
- movable part
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- 239000003990 capacitor Substances 0.000 claims abstract description 24
- 238000006073 displacement reaction Methods 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 11
- 230000007613 environmental effect Effects 0.000 claims abstract description 3
- 239000000758 substrate Substances 0.000 claims description 16
- 239000012528 membrane Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
Abstract
A kind of variable condenser, microphone, pressure and gas sensor, inertial sensor, including at least two electric conduction electrode-plates are the utility model is related to, gap is formed between two electric conduction electrode-plates；At least one dielectric portion；For responding the movable part of environmental information；Matching relationship between the movable part, electric conduction electrode-plate, dielectric portion is as follows：Movable part is subjected to displacement under the influence of environment, and driving makes relative displacement occurs between dielectric portion and the gap, so that the signal for the capacitor exporting change that two electric conduction electrode-plates are formed.Variable condenser of the present utility model, make the electric signal of capacitor exporting change by changing the dielectric constant between two electric conduction electrode-plates, thus can improve the sensitivity of variable condenser by selecting the dielectric portion of unlike material.
Description
Technical field
Signal detection field is the utility model is related to, more specifically, the utility model is related to the sensor for detection.
Background technology
In existing sensor construction, such as a large amount of use is based on free vibrating diaphragm, backplane harden structure in MEMS microphone structure
Variable capacitance as signal change the mechanism.Because the volume of the capacitor arrangement wherein formed is extremely small, free vibrating diaphragm shakes
Dynamic amplitude is nano level, therefore its caused capacitance variation is extremely faint small, and this results in the electric current letter of output
It is number also very faint.
In the prior art, in order to improve the precision of microphone, sensitivity, it will usually compliance, increase from diaphragm oscillations
Effective area of vibrating diaphragm etc. is improved, but the lightening development of this and present chip is runed counter to.How to ensure
The sensitivity of sensor is improved on the basis of small area chip, turns into industry urgent problem.
Utility model content
A purpose of the present utility model there is provided a kind of variable condenser.
According to one side of the present utility model, there is provided a kind of variable condenser, including：
At least two electric conduction electrode-plates, gap is formed between two electric conduction electrode-plates；
At least one dielectric portion,
For responding the movable part of environmental information；
Matching relationship between the movable part, electric conduction electrode-plate, dielectric portion is as follows：Movable part is sent out under the influence of environment
Raw displacement, driving make relative displacement occurs between dielectric portion and the gap, so that the electric capacity that two electric conduction electrode-plates are formed
The signal of device exporting change.
Alternatively, in addition to substrate, the electric conduction electrode-plate are arranged on substrate；The dielectric portion is arranged on movable part
On.
Alternatively, in addition to substrate, the dielectric portion are arranged on substrate；The electric conduction electrode-plate is arranged on movable part
On.
Alternatively, the dielectric constant of the dielectric portion is more than air.
Alternatively, the dielectric portion selects silica or silicon nitride material.
Alternatively, the dielectric portion is stretched into the portion gap between two electric conduction electrode-plates, remaining position in the gap
For air.
Alternatively, the capacitor that the electric conduction electrode-plate is formed is multiple, and differential capacitance structure is formed between multiple capacitors.
Alternatively, the displacement of the dielectric portion is limited in the gap of two electric conduction electrode-plates.
According to another aspect of the present utility model, a kind of microphone, including above-mentioned variable condenser are additionally provided；It is described
Movable part is the vibrating diaphragm of sensing external sound information.
According to another aspect of the present utility model, a kind of pressure sensor, including above-mentioned variable condenser are additionally provided；
The movable part is the sensitive membrane of sensing ambient pressure information.
According to another aspect of the present utility model, a kind of gas sensor, including above-mentioned variable condenser are additionally provided；
The movable part is the sensitive membrane of sensing ambient atmos information.
According to another aspect of the present utility model, a kind of inertial sensor, including above-mentioned variable condenser are additionally provided；
The movable part is the mass of paratonic movement information.
Variable condenser of the present utility model, make capacitor defeated by changing the dielectric constant between two electric conduction electrode-plates
Go out the electric signal of change, thus can improve the sensitivity of variable condenser by selecting the dielectric portion of unlike material.This with
Traditional variable condenser is entirely different, breaches the improved thinking of traditional varactors, is following variable condenser hair
The main flow of exhibition.
It is of the present utility model other by referring to the drawings to the detailed description of exemplary embodiment of the present utility model
Feature and its advantage will be made apparent from.
Brief description of the drawings
The accompanying drawing of a part for constitution instruction describes embodiment of the present utility model, and uses together with the description
In explanation principle of the present utility model.
Fig. 1 is the structural representation of the utility model variable condenser.
Fig. 2 is dielectric portion and the cooperation schematic diagram in electric conduction electrode-plate gap in Fig. 1.
Fig. 3 is another implementation structural representation of the utility model variable condenser.
Fig. 4 is the test result of the utility model dielectric portion different duty.
Embodiment
Various exemplary embodiments of the present utility model are described in detail now with reference to accompanying drawing.It should be noted that：It is unless another
Illustrate outside, the part and the positioned opposite of step, numerical expression and numerical value otherwise illustrated in these embodiments is unlimited
The scope of the utility model processed.
The description only actually at least one exemplary embodiment is illustrative to be never used as to this practicality below
New and its application or any restrictions used.
It may be not discussed in detail for technology and equipment known to person of ordinary skill in the relevant, but in appropriate situation
Under, the technology and equipment should be considered as part for specification.
In shown here and discussion all examples, any occurrence should be construed as merely exemplary, without
It is as limitation.Therefore, other examples of exemplary embodiment can have different values.
It should be noted that：Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined, then it need not be further discussed in subsequent accompanying drawing in individual accompanying drawing.
With reference to figure 1, the utility model provides a kind of variable condenser, and it includes substrate 1, is set on the substrate 1
There are at least two electric conduction electrode-plates 2.Substrate 1 of the present utility model primarily serves the effect of support electric conduction electrode-plate 2, and it can use single
Crystal silicon material；Certainly, for a person skilled in the art, other can play can also be used to support electric conduction electrode-plate 2
Material, it will not enumerate herein.
Electric conduction electrode-plate 2 can be provided with multiple, and multiple electric conduction electrode-plates 2 arrange on substrate 1, two neighboring electric conduction electrode-plate 2
Between formed with gap so that two neighboring electric conduction electrode-plate 2 constitutes capacitor arrangement.Herein it should be noted that this two
Electric conduction electrode-plate 2 can not turn on together, otherwise not constitute capacitor arrangement.Therefore, when substrate uses monocrystalline silicon material, two
Electric conduction electrode-plate 2 can be set by insulation division on substrate 1, to ensure the insulation between two electric conduction electrode-plates 2；Or two led
Electrode slice 2 can be suspended at the top of substrate 1 by cantilever design respectively, and this structure belongs to the known normal of those skilled in the art
Know, no longer illustrate herein.
Variable condenser of the present utility model, in addition to movable part 4, the movable part 4 can respond the information of external environment
And it is subjected to displacement.
Such as when variable condenser of the present utility model is applied in microphone, movable part 4 is that can sense extraneous sound
The vibrating diaphragm of sound signal.Structure, material and the operating principle of this vibrating diaphragm belong to the common knowledge of those skilled in the art, herein not
Illustrate again.
When variable condenser of the present utility model is applied in pressure sensor, movable part 4 is that can sense extraneous pressure
Power, the sensitive membrane of pressure information.Structure, material and the operating principle of this sensitive membrane belong to the known normal of those skilled in the art
Know, no longer illustrate herein.
When variable condenser of the present utility model is applied in gas sensor, movable part 4 is that can sense extraneous gas
The sensitive membrane of body information.Structure, material and the operating principle of this sensitive membrane belong to the common knowledge of those skilled in the art,
This is no longer illustrated.
When variable condenser of the present utility model is applied in inertial sensor, such as it is applied to accelerometer or top
In spiral shell instrument.Movable part 4 is can be with the mass of paratonic movement information.Structure, material and the operating principle of this mass belong to
The common knowledge of those skilled in the art, is no longer illustrated herein.
Microphone, pressure sensor, gas sensor, accelerometer or gyro are simply listed in an illustrative manner above
Instrument can apply above-mentioned variable condenser structure.It is appreciated that the various those skilled in the art knows the variable of the structure
Capacitor is also applied in other sensors, will not enumerate herein.
At least one dielectric portion 3 is provided with the movable part 4, the dielectric portion 3 is used to stretch into two neighboring lead
In gap between electrode slice 2, to change the dielectric constant between two electric conduction electrode-plates 2.The dielectric portion 3 is configured as：
Movable part 4 is subjected to displacement under the influence of external environment, thus drives dielectric portion 3 to stretch between two neighboring electric conduction electrode-plate 2
Gap in.
Variable condenser of the present utility model, when dielectric portion 3 is extend between two electric conduction electrode-plates 2 of capacitor,
The dielectric constant between two electric conduction electrode-plates 2 can be changed, thus make the capacitance hair of the capacitor of two compositions of electric conduction electrode-plates 2
Changing.The capacitance of the change can be used to characterize the degree of the deformation of movable part 4, and the mesh of measurement external environment information is reached with this
's.
Herein it should be noted that during original state, the dielectric portion 3 can be completely from the gap of electric conduction electrode-plate 2
Abjection, only when detection, the dielectric portion 3 is just stretched into the gap of two electric conduction electrode-plates 2.It is it is also possible that described
The position of dielectric portion 3 is limited in the gap of two electric conduction electrode-plates 2 all the time, and the degree that is stretched into by dielectric portion 3 changes
The dielectric constant become between two electric conduction electrode-plates 2.
Variable condenser of the present utility model, make capacitor defeated by changing the dielectric constant between two electric conduction electrode-plates
Go out the electric signal of change, thus can improve the sensitivity of variable condenser by selecting the dielectric portion of unlike material.This with
Traditional variable condenser is entirely different, breaches the improved thinking of traditional varactors, is following variable condenser hair
The main flow of exhibition.
In above-mentioned variable capacitor, what movable part 4 drove is that dielectric portion 3 is subjected to displacement.Certainly it is also possible that will
Dielectric portion 3 is set on substrate 1, and electric conduction electrode-plate 2 is then arranged on movable part 4 so that movable part 4 can drive conductive electrode
Piece 2 is subjected to displacement.This structure can equally make the gap between dielectric portion 3 and electric conduction electrode-plate 2 that relative displacement occur, with
Change the dielectric constant between two electric conduction electrode-plates 2.
It is the air gap, therefore, the utility model dielectric portion in traditional variable condenser, between two electric conduction electrode-plates
3 dielectric constant is preferably greater than air, so as to improve the changing value of electric capacity.In one specific embodiment party of the utility model
In formula, the dielectric portion 3 can select silica or silicon nitride material, it is, of course, also possible to from those skilled in the art
Known other dielectric constants are more than the solid material of air, no longer illustrate herein.
Variable condenser of the present utility model, the portion that the dielectric portion 3 can be stretched between two neighboring electric conduction electrode-plate 2
In subdivided gap.With reference to figure 2, dielectric portion 3 can extend into the half depth in gap；Remaining position in gap is air 5.This is just
So that the dielectric between two electric conduction electrode-plates 2 has two kinds, one kind is dielectric portion 3, another then be air 5.
The degree that dielectric portion 3 stretches into gap also determines the variable quantity of capacitor；Volume of the dielectric portion 3 in gap
It is dutycycle with the ratio between the cumulative volume in gap.From Fig. 4 test result, when dutycycle is bigger, the then change of capacitor
It is then sensitiveer.
Variable condenser of the present utility model can use MEMS technology to manufacture, it is of course also possible to use capacitor area
Other known techniques.No longer illustrate herein, can be more in order to which the error caused by common-mode signal can be eliminated
Differential capacitance structure is formed between individual capacitor.The principle of this differential configuration belongs to the common knowledge of those skilled in the art,
No longer illustrate herein.
In addition, the composition of electric capacity can be various, such as shown in figure 1, multiple electric conduction electrode-plates 2 are arranged in order, per phase
A capacitor is formed between adjacent two electric conduction electrode-plates 2.In multiple capacitors that the plurality of electric conduction electrode-plate 2 is formed, some are led
Electrode slice 2 is shared.In the utility model another embodiment, with reference to figure 3, the single structure of electric conduction electrode-plate 2 of each two
Into a single capacitor, shared situation is not present between electric conduction electrode-plate 2.But no matter use the electric capacity of which kind of form
Device combines, and when signal is drawn, can be drawn the signal of each electric capacity respectively by lead, can also be by each electric capacity
Rear common extraction together in parallel or in series.The combination of capacitor belongs to the common knowledge of those skilled in the art, herein not
Illustrate again.
Although some specific embodiments of the present utility model are described in detail by example, this area
It is to be understood by the skilled artisans that above example merely to illustrate, rather than in order to limit the scope of the utility model.This
Field it is to be understood by the skilled artisans that can not depart from the scope of the utility model and spirit in the case of, to above example
Modify.The scope of the utility model is defined by the following claims.
Claims (12)
- A kind of 1. variable condenser, it is characterised in that including：At least two electric conduction electrode-plates (2), gap is formed between two electric conduction electrode-plates (2)；At least one dielectric portion (3)；For responding the movable part (4) of environmental information；Matching relationship between the movable part (4), electric conduction electrode-plate (2), dielectric portion (3) is as follows：Movable part (4) is in environment Under the influence of be subjected to displacement, driving make relative displacement occurs between dielectric portion (3) and the gap so that two electric conduction electrode-plates (2) signal of the capacitor exporting change formed.
- 2. variable condenser according to claim 1, it is characterised in that also including substrate (1), the electric conduction electrode-plate (2) It is arranged on substrate (1)；The dielectric portion (3) is arranged on movable part (4).
- 3. variable condenser according to claim 1, it is characterised in that also including substrate (1), the dielectric portion (3) It is arranged on substrate (1)；The electric conduction electrode-plate (2) is arranged on movable part (4).
- 4. variable condenser according to claim 1, it is characterised in that：The dielectric constant of the dielectric portion (3) is more than Air.
- 5. variable condenser according to claim 1, it is characterised in that：The dielectric portion (3) from silica or Silicon nitride material.
- 6. variable condenser according to claim 1, it is characterised in that：The dielectric portion (3) stretches into two conductive electrodes In portion gap between piece (2), remaining position in the gap is air (5).
- 7. variable condenser according to claim 1, it is characterised in that：The capacitor that the electric conduction electrode-plate (2) is formed is It is multiple, form differential capacitance structure between multiple capacitors.
- 8. variable condenser according to claim 1, it is characterised in that：The displacement of the dielectric portion (3) is limited in In the gap of two electric conduction electrode-plates (2).
- A kind of 9. microphone, it is characterised in that：Including the variable condenser according to any one of claim 1 to 8；It is described can Dynamic portion (4) are the vibrating diaphragm of sensing external sound information.
- A kind of 10. pressure sensor, it is characterised in that：Including the variable condenser according to any one of claim 1 to 8； The movable part (4) is the sensitive membrane of sensing ambient pressure information.
- A kind of 11. gas sensor, it is characterised in that：Including the variable condenser according to any one of claim 1 to 8； The movable part (4) is the sensitive membrane of sensing ambient atmos information.
- A kind of 12. inertial sensor, it is characterised in that：Including the variable condenser according to any one of claim 1 to 8； The movable part (4) is the mass of paratonic movement information.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720951972.8U CN207123293U (en) | 2017-08-01 | 2017-08-01 | Variable condenser, microphone, pressure and gas sensor, inertial sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720951972.8U CN207123293U (en) | 2017-08-01 | 2017-08-01 | Variable condenser, microphone, pressure and gas sensor, inertial sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207123293U true CN207123293U (en) | 2018-03-20 |
Family
ID=61613507
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720951972.8U Active CN207123293U (en) | 2017-08-01 | 2017-08-01 | Variable condenser, microphone, pressure and gas sensor, inertial sensor |
Country Status (1)
| Country | Link |
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| CN (1) | CN207123293U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110345972A (en) * | 2019-06-25 | 2019-10-18 | 歌尔股份有限公司 | A kind of sensor and electronic equipment |
| CN111757224A (en) * | 2020-06-19 | 2020-10-09 | 歌尔微电子有限公司 | Microphone and audio equipment |
| CN112125275A (en) * | 2020-11-26 | 2020-12-25 | 南京高华科技股份有限公司 | MEMS capacitive sensor and preparation method thereof |
| CN112362199A (en) * | 2020-10-30 | 2021-02-12 | 华中科技大学 | Medium insertion type capacitive pressure sensor and preparation method thereof |
| CN114754904A (en) * | 2022-03-30 | 2022-07-15 | 青岛歌尔智能传感器有限公司 | MEMS capacitive sensor and preparation method thereof |
-
2017
- 2017-08-01 CN CN201720951972.8U patent/CN207123293U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110345972A (en) * | 2019-06-25 | 2019-10-18 | 歌尔股份有限公司 | A kind of sensor and electronic equipment |
| CN110345972B (en) * | 2019-06-25 | 2021-12-31 | 潍坊歌尔微电子有限公司 | Sensor and electronic equipment |
| CN111757224A (en) * | 2020-06-19 | 2020-10-09 | 歌尔微电子有限公司 | Microphone and audio equipment |
| CN112362199A (en) * | 2020-10-30 | 2021-02-12 | 华中科技大学 | Medium insertion type capacitive pressure sensor and preparation method thereof |
| CN112125275A (en) * | 2020-11-26 | 2020-12-25 | 南京高华科技股份有限公司 | MEMS capacitive sensor and preparation method thereof |
| CN112125275B (en) * | 2020-11-26 | 2021-04-06 | 南京高华科技股份有限公司 | MEMS capacitive sensor and preparation method thereof |
| CN114754904A (en) * | 2022-03-30 | 2022-07-15 | 青岛歌尔智能传感器有限公司 | MEMS capacitive sensor and preparation method thereof |
| CN114754904B (en) * | 2022-03-30 | 2023-09-29 | 青岛歌尔智能传感器有限公司 | MEMS capacitive sensor and preparation method thereof |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200618 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 266104 Laoshan Qingdao District North House Street investment service center room, Room 308, Shandong Patentee before: GOERTEK TECHNOLOGY Co.,Ltd. |