CN207099421U - Electron gun Special multi-station pretreatment unit - Google Patents
Electron gun Special multi-station pretreatment unit Download PDFInfo
- Publication number
- CN207099421U CN207099421U CN201720896452.1U CN201720896452U CN207099421U CN 207099421 U CN207099421 U CN 207099421U CN 201720896452 U CN201720896452 U CN 201720896452U CN 207099421 U CN207099421 U CN 207099421U
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- China
- Prior art keywords
- electron gun
- pretreatment unit
- station
- pipeline
- special multi
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model discloses a kind of electron gun Special multi-station pretreatment unit, is related to electron gun technology, more particularly to electron gun preconditioning technique;Technical problem to be solved in the utility model is branched electron gun can simultaneously to be pre-processed, improve the operating efficiency and convenience of processing;It is characterized in that:The device includes electron gun body storage pipeline, electron gun variable-diameter interface, ultrahigh vacuum valve, ionic pump etc.;Multiple electron gun variable-diameter interfaces are provided with the electron gun body storage duct wall;Due to using said structure, voltage-withstand test, decomposition, activation and the aging of branched electron gun can be carried out simultaneously, realize that the vacuum of every electron gun is independent, each station need not use simultaneously, the efficiency and convenience of electron gun pretreatment are improved, and the cycle that electron gun enters normal operating conditions can be greatly shortened.
Description
Technical field
It the utility model is related to electron gun technology, more particularly to electron gun preconditioning technique.
Background technology
Electron accelerator is the device for being accelerated charged particle, and wherein electron linear accelerator is to utilize high microwave work(
Rate establishes a kind of resonant mode accelerator that longitudinal electric field is accelerated to electron beam in traveling wave, standing wave accelerating structure, and it can be with
Great line is brought up to high energy, thus occupies the status of uniqueness in accelerator;Electron gun is that electronic line of sight adds
The indispensable important component of fast device, it launches the electricity with certain energy, a constant current strong, certain beam diameter and the angle of departure
Beamlet stream is injected into the accelerating tube of accelerator, and a kind of vacuum electron device.
After electron gun is completed, be delivered to waiting using producer, during installing out beam, have a transport,
Storage storage and the process of decomposition activation, are singly that decomposition activation just takes around many days, during which electron gun will be maintained persistently
Vacuum state, to realize the techniques such as voltage-withstand test, material degasification, cathode filament activation and aging;Before electron gun installation often
Need to test electron gun, with obtain include perveance, the electric data such as Current Voltage corresponding to cathode disintegration and activation, from
It is convenient to be compared with postrun parameter and the state parameter before being run to electron gun is demarcated and recorded, before also undergoing
State process;Furthermore the service life of a general electron gun is about thousands of hours, belongs to life, an electricity is often changed
Sub- rifle, it is required for carrying out above-mentioned pretreatment to it first, accelerator main frame can be connected and carry out normal work.Therefore one kind is needed
Device can realize above-mentioned pretreating process process under vacuum conditions.
Wang Gui really etc. reports a kind of pretreatment vacuum plant (the 20OMeV linear accelerator oxide-coated cathode grid-control of electron gun
The activation of electron gun and aging Chinese University of Science and Technologys journal, in March, 1985 supplementary issue:137-140.), it is to use Faraday cup
Structure, but the device can only handle an electron gun every time, and operating efficiency is low, and the batch production for being unfavorable for carrying out electron gun adds
The spending of work;Production cost is added if a set of corresponding device is all configured to each electron gun simultaneously, is also made troubles
Profit.In addition, it yet there are no the report of the electron gun and processing unit for batch production.
The content of the invention
Technical problem to be solved in the utility model is to provide a kind of electron gun Special multi-station pretreatment unit, energy
It is enough that branched electron gun is pre-processed simultaneously, improve operating efficiency and convenience.
To reach above-mentioned purpose, the technical solution of the utility model is that the device includes electron gun body storage pipeline
(3), electron gun variable-diameter interface (4), left end adapter flange (2) and right-hand member adapter flange (7), the ultrahigh vacuum for keeping vacuum
Valve (1) and ultrahigh vacuum flapper valve (5) also have ultrahigh vacuum push-pull valve (6), ionic pump (8), support platform (9);Electron gun master
The right-hand member of body storage pipeline (3) is provided with ultrahigh vacuum push-pull valve (6) and right-hand member adapter flange (7), is docked with ionic pump (8),
For establishing and maintaining pipeline vacuum degree, left end is provided with left end adapter flange (2), is docked with ultrahigh vacuum valve (1), for even
Connect molecular pump and carry out application of vacuum at initial stage;Multiple electron gun variable-diameter interfaces are provided with electron gun body storage pipeline (3) wall
(4), each interface can connect an electron gun;Support platform (9) is used to lay, fixes said apparatus.
2-10 electron gun variable-diameter interface (4) can be uniformly arranged on electron gun body storage pipeline (3) wall, so as to simultaneously
Handle more electron guns.
It can be deposited and extended using similar structure as electron gun body on the basis of electron gun body deposits pipeline (3)
Pipe, order are docked, and electron gun variable-diameter interface (4) is increased therewith, to handle more electron guns simultaneously.
Electron gun body storage pipeline (3) end face is provided with flange, the flange of right-hand member adapter flange (7) and ionic pump (8)
Docking, left end adapter flange (2) dock with ultrahigh vacuum valve (1), and left end can also extend when increasing station with main body storage
The flange docking of pipe.
Electron gun body storage pipeline (3) surface has an opening to weld a standard edge of a knife flange for installing cold rule
(11) pipeline vacuum degree, is read for connecting vacuum meter, pipeline vacuum degree is monitored.
Ultrahigh vacuum baffle plate is provided between tube chamber and electron gun body the storage pipeline (3) of electron gun variable-diameter interface (4)
Valve (5), to control the internal break-make with vacuum pipe vacuum environment of electron gun (12), and accomplish that any one electron gun can
Vacuum of the independent disassembling without destroying electron gun body storage pipeline (3).
Electron gun variable-diameter interface (4) is adapter flange joint, can meet the docking of various standard edge of a knife flanges, and coordinate
Ultrahigh vacuum flapper valve (5) realizes the break-make of each station electron gun and electron gun body storage pipeline (3);The flange reducing
Scope CF35-CF150.
The landing end of support platform (9) can not install movable pulley, and can also install universal wheel (10) turns into packaged type.
The utility model can meet the needs of carrying out branched electron gun pretreatment simultaneously, carry out the pressure-resistant survey of electron gun
Examination, decomposition, activation and aging, are tested after completing, the platform that can also be preserved as electron gun vacuum, and can be supervised in real time
The vacuum surveyed inside electron gun;The utility model realizes that the vacuum of every electron gun is independent by the control of vacuum flapper valve,
Each station state is independent of each other;It can realize that the electron gun of various flange-interfaces is located in advance by configuring different flange reducings
Reason;The efficiency and convenience of electron gun pretreatment are improved, and the week that electron gun enters normal operating conditions can be greatly shortened
Phase.
Brief description of the drawings
The technical solution of the utility model is described in further detail with reference to the accompanying drawings and detailed description;
Accompanying drawing 1:For electron gun Special multi-station pretreatment unit front view;
Accompanying drawing 2:For electron gun Special multi-station pretreatment unit top view;
In figure:
1st, ultrahigh vacuum valve;2nd, left end adapter flange;3rd, electron gun body storage pipeline;
4th, electron gun variable-diameter interface;5th, ultrahigh vacuum flapper valve;6th, ultrahigh vacuum push-pull valve;
7th, right-hand member adapter flange;8th, ionic pump;9th, support platform;
10th, universal wheel;11st, cold rule;12nd, electron gun;
Embodiment
Using the electron gun Special multi-station pretreatment unit with eight stations, by be completed six electron guns
(12) six stations being respectively arranged in (4) eight stations of electron gun variable-diameter interface, the ultrahigh vacuum baffle plate of six stations
Valve (5) is closed making electron gun deposit pipeline (3) disconnection, idle two station ultrahigh vacuum flapper valves with main body
(5) close, ultrahigh vacuum push-pull valve (6) is closed, and makes system closed.
By the external molecule pump assembly of ultrahigh vacuum valve (1), after operation, the pipe-line system of device starts vacuum foundation, and
Vacuum leak hunting is carried out by the helium mass spectrometer leak detector of connection molecule pump assembly to all flange-interfaces and electron gun to let out without vacuum
Leak, integrated piping winding heating tape, it is 150 DEG C -200 DEG C to control heating-up temperature, after progress vacuum establishes 24 hours, stops adding
Heat, when temperature is cooled to room temperature, the vacuum meter for opening cold rule (11) connection reads pipeline vacuum degree, if vacuum meets ion
The entry condition of pump (8), slowly open ultrahigh vacuum push-pull valve (6) and control electron gun and six stations of pipeline break-make
Ultrahigh vacuum flapper valve (5), ultrahigh vacuum valve (1) is closed, close molecule pump assembly and disconnect the connection with the present apparatus, now,
Main body storage pipeline (3) and electron gun carry ionic pump by ionic pump (8) and electron gun and maintain vacuum, now six electronics
Rifle is in pre-conditioning stage vacuum and preserves state.
Further pressure-resistant, decomposition, activation, test job are done to electron gun in this case, after continuing 15 days, wherein three
Branch electron gun needs to be sent to user's use, now the ultrahigh vacuum flapper valve of closing control three electron guns and pipeline communication
(5) entirety can be carried out to electron gun to pull down, this step does not destroy pipeline vacuum, and the electron gun for not pulling down platform is still vacuum
Environment, the electron gun pulled down, which carries out further vacuum sealing, can transport user scene, as early as possible into working condition.
Above embodiment is merely to illustrate the technical solution of the utility model, rather than is limited;Although
The utility model is described in detail with reference to aforementioned embodiments, for the person of ordinary skill of the art, according to
The technical scheme described in aforementioned embodiments can so be modified, or which part technical characteristic is equally replaced
Change;And these modifications or substitutions, the essence of appropriate technical solution is departed from the utility model technical side claimed
The spirit and scope of case.
Claims (8)
- A kind of 1. electron gun Special multi-station pretreatment unit, it is characterised in that:The device includes electron gun body storage pipeline (3), electron gun variable-diameter interface (4), left end adapter flange (2) and right-hand member adapter flange (7), the ultrahigh vacuum for keeping vacuum Valve (1) and ultrahigh vacuum flapper valve (5) also have ultrahigh vacuum push-pull valve (6), ionic pump (8), support platform (9);The electronics The right-hand member of gun main body storage pipeline (3) is provided with ultrahigh vacuum push-pull valve (6) and right-hand member adapter flange (7), right with ionic pump (8) Connect;The left end of the electron gun body storage pipeline (3) is provided with left end adapter flange (2), is docked with ultrahigh vacuum valve (1); Multiple electron gun variable-diameter interfaces (4) are provided with described electron gun body storage pipeline (3) wall;The support platform (9) is used for Lay, fixed said apparatus.
- 2. electron gun Special multi-station pretreatment unit as claimed in claim 1, it is characterised in that:The electron gun body is deposited 2-10 electron gun variable-diameter interface (4) can be uniformly arranged by putting on pipeline (3) wall.
- 3. electron gun Special multi-station pretreatment unit as claimed in claim 1, it is characterised in that:In the electron gun body On the basis of depositing pipeline (3), extension tube is deposited using similar structure as electron gun body, order is docked, and makes electron gun reducing Interface (4) increases therewith.
- 4. electron gun Special multi-station pretreatment unit as claimed in claim 1, it is characterised in that:The electron gun body is deposited Put pipeline (3) end face and be provided with adapter flange, right-hand member adapter flange (7) docks with the flange of ionic pump (8), left end adapter flange (2) docked with ultrahigh vacuum valve (1), the flange that left end can also be when increasing station with main body storage extension tube docks.
- 5. electron gun Special multi-station pretreatment unit as claimed in claim 1, it is characterised in that:The electron gun body is deposited Putting pipeline (3) surface has an opening to weld a standard edge of a knife flange for installing cold rule (11).
- 6. electron gun Special multi-station pretreatment unit as claimed in claim 1, it is characterised in that:The electron gun reducing connects Ultrahigh vacuum flapper valve (5) is provided between tube chamber and electron gun body the storage pipeline (3) of mouth (4).
- 7. electron gun Special multi-station pretreatment unit as claimed in claim 1, it is characterised in that:The electron gun reducing connects Mouthful (4) are adapter flange joint, reducing scope CF35-CF150.
- 8. electron gun Special multi-station pretreatment unit as claimed in claim 1, it is characterised in that:The support platform (9) Landing end movable pulley can not be installed, universal wheel (10) can also be installed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201720896452.1U CN207099421U (en) | 2017-07-24 | 2017-07-24 | Electron gun Special multi-station pretreatment unit |
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CN201720896452.1U CN207099421U (en) | 2017-07-24 | 2017-07-24 | Electron gun Special multi-station pretreatment unit |
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CN201720896452.1U Withdrawn - After Issue CN207099421U (en) | 2017-07-24 | 2017-07-24 | Electron gun Special multi-station pretreatment unit |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107396527A (en) * | 2017-07-24 | 2017-11-24 | 山东蓝孚高能物理技术股份有限公司 | Electron gun Special multi-station pretreatment unit |
-
2017
- 2017-07-24 CN CN201720896452.1U patent/CN207099421U/en not_active Withdrawn - After Issue
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107396527A (en) * | 2017-07-24 | 2017-11-24 | 山东蓝孚高能物理技术股份有限公司 | Electron gun Special multi-station pretreatment unit |
CN107396527B (en) * | 2017-07-24 | 2023-06-09 | 山东蓝孚高能物理技术股份有限公司 | Multi-station pretreatment device special for electron gun |
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AV01 | Patent right actively abandoned |
Granted publication date: 20180313 Effective date of abandoning: 20230609 |
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AV01 | Patent right actively abandoned |
Granted publication date: 20180313 Effective date of abandoning: 20230609 |
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AV01 | Patent right actively abandoned | ||
AV01 | Patent right actively abandoned |