CN206960027U - A kind of fibre optic compression sensor based on micro- ellipsoid air chamber - Google Patents
A kind of fibre optic compression sensor based on micro- ellipsoid air chamber Download PDFInfo
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- CN206960027U CN206960027U CN201720974265.0U CN201720974265U CN206960027U CN 206960027 U CN206960027 U CN 206960027U CN 201720974265 U CN201720974265 U CN 201720974265U CN 206960027 U CN206960027 U CN 206960027U
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Abstract
A kind of fibre optic compression sensor based on micro- ellipsoid air chamber is the utility model is related to, belongs to fibre optic compression sensor technical field.Including single-mode fiber, pressure sensitive film；The single-mode fiber upper end is fixedly connected with the pressure sensitive film lower end, and the single-mode fiber, the pressure sensitive film junction open up air Fabry Perot chamber.Material is silica in the utility model so that the utility model thermal coefficient of expansion is identical, avoids structural failure caused by different materials high temperature mismatch, temperature crosstalk is small, and cost is cheap；Sensor head construction technique only needs welding, cutting and grinding, and manufacture craft is simple；Confocal Fabry Perot chamber in the present apparatus is compared with the Fabry Perot chamber that etching process in the prior art or femto-second laser make, and interference cavity loss is small, and intetference-fit strengthening is high, and demodulation accuracy is high.
Description
Technical field
A kind of fibre optic compression sensor based on micro- ellipsoid air chamber is the utility model is related to, belongs to fibre optic compression sensor
Technical field.
Background technology
Conventional fibre optic compression sensor mainly has fiber bragg grating pressure sensor and optical fibre Fabry-perot pressure sensing
Two kinds of device.Compared with fiber bragg grating pressure sensor, optical fiber Fabry-Perot pressure sensor is to pressure signal caused by the external world
Reaction it is sharper, the requirement of different measuring ranges and sensitivity is disclosure satisfy that using different structural parameters, is had resistance to severe
Environment, anti-electromagnetism desiccation, the advantages that Temperature cross-over susceptibility is small.Applied to biologic medical, HTHP oil well, Aero-Space,
The pressure detecting in the fields such as bridge machinery.
Optical fiber Fabry-Perot pressure sensor has capillary pipe structure and diaphragm structure.Capillary pipe structure uses capillary
Axial deformation realizes the perception to pressure, available for the measurement of big pressure range, but due to low to pressure sensitivity of awareness, no
Suitable for the measurement high to required precision.Diaphragm structure uses forms Fabry-Perot interferometer to pressure-sensitive diaphragm
One reflecting surface, elastic deformation occurs for diaphragm when ambient pressure is acted on diaphragm, so that Fabry-Perot interferometer
Chamber length changes, and realizes the perception to pressure, has high sensitivity, and strong antijamming capability, the linearity is good, and it is excellent that dynamic range is big etc.
Point.
The pressure that the optical fiber Fabry-Perot pressure sensor of diaphragm structure be able to can be deformed by the cavity and stress of fiber end face
Power sensitive membrane is formed.The formation of cavity has chemical corrosion method [1,2] and femtosecond laser to prepare method [3].Chemical attack prepares method chamber
Interior etching control is difficult point, and lumen type is unmanageable and cavity loss is big；Femtosecond laser prepares method can accurate control interference cavity chamber
Type, but system of processing is expensive.Pressure sensitive film in document [1] is the monocrystalline silicon of specially treated, has corroded cavity with end face
Borosilicate optical fiber carries out anode linkage and forms sensing head.This fibre optic compression sensor complex manufacturing technology and different materials
It is different to the thermal coefficient of expansion of temperature, therefore when the temperature is changed, sensing head can produce stress, rapid wear due to thermal expansion difference
It is bad.Pressure sensitive film is quartz material in document [2] [3], and the fused fiber splice with having made cavity forms sensing head.This light
Fine pressure sensor thermal coefficient of expansion is consistent, Stability Analysis of Structures；The formation of fiber end face cavity and the welding needs with sensitive membrane
Two-step process；And due in cavity optical transmission loss it is larger, reflectance spectrum fringe contrast is smaller, Wavelength-tracking demodulate when pressure survey
Accuracy of measurement is not high enough.
[1] Ge Yixian, Wang Tingting, Zhang Chuan, emit a kind of Miniature optical fiber Fabry-Perot pressure sensors of dawn jasmine and its
Preparation method, patent of invention：201310524956.7 grant date：2015.11；
[2] Yang Chundi, Wang Ming, Ge Yixian, beautiful magnificent miniature extrinsics optical fiber Fabry-Perot pressure sensor is worn
[J], Acta Optica, 2010,30 (5): 1458-1461；
[3] Jiang Lan, Jiang Yi, Wang Peng, Wang Sumei, Liu up to a kind of optical fiber micro-nano method Fabry-Parot interferent type pressure sensors of and its
Preparation method, number of patent application：201510282041.9.
Utility model content
Technical problem to be solved in the utility model is the defects of overcoming prior art, there is provided a kind of manufacture craft letter
Single, the high fibre optic compression sensor based on micro- ellipsoid air Fabry-Perot-type cavity of measurement accuracy, the making of the sensor only need
Welding, cutting and grinding technics, and reflectance spectrum has very high fringe contrast, trough is sharp, and pressure measurement accuracy is high.
To reach above-mentioned purpose, the utility model provides a kind of fibre optic compression sensor based on micro- ellipsoid air chamber, bag
Include single-mode fiber, pressure sensitive film；The single-mode fiber upper end is fixedly connected with the pressure sensitive film lower end, the single-mode optics
Fine, described pressure sensitive film junction opens up air Fabry-Perot-type cavity.
Preferentially, the air Fabry-Perot-type cavity is micro- elliposoidal, and the air Fabry-Perot-type cavity is confocal cavity.
Preferentially, the chamber of the air Fabry-Perot-type cavity grows 40 μm -50 μm.
Preferentially, the presser sensor film thickness is 6-12 μm.
Preferentially, the single-mode fiber material is silica.
Preferentially, the presser sensor membrane material is silica.
The beneficial effect that the utility model is reached：
Material is silica in the utility model so that the utility model thermal coefficient of expansion is identical, avoids difference
Structural failure caused by material at high temperature mismatch, temperature crosstalk is small, and cost is cheap；Sensor head construction technique only needs welding, cutting
And grinding, manufacture craft is simple, realizability is strong；
The sensing head of the sensor in inside of optical fibre, tested pressure can directly in modulation optical fiber light wave characteristic parameter,
The size of sensor can be effectively reduced, reduces the influence of external interference and environmental factor；
Confocal Fabry-Perot cavity in the present apparatus, the method made with etching process in the prior art or femto-second laser
Fabry-Perot-type cavity is compared, and is had and is interfered cavity loss small, intetference-fit strengthening is high, the high advantage of demodulation accuracy.
Brief description of the drawings
Fig. 1 is the structure chart of the present apparatus；
Fig. 2 is the fabrication processing figure of the present apparatus；
Fig. 3 is the demodulating system of the present apparatus；
Fig. 4 is the experimental result picture of the present apparatus；
Fig. 5 is the reflectance spectrum of the optical fiber Fabry-Perot pressure sensor made in the prior art using etching process；
Fig. 6 is present apparatus reflectance spectrum.
Mark meaning in accompanying drawing, 1- single-mode fibers；2- pressure sensitive films；The micro- ellipsoid air Fabry-Perot-type cavities of 3-；4- is anti-
Penetrate face one；5- reflectings surface two；6- reflectings surface three；7- electrodes；8- optical fiber connectors；9- optical fiber lapping sand paper.
Embodiment
The utility model is further described below in conjunction with the accompanying drawings, following examples are only used for clearly illustrating this
The technical scheme of utility model, and the scope of protection of the utility model can not be limited with this.
A kind of fibre optic compression sensor based on micro- ellipsoid air chamber, including single-mode fiber, pressure sensitive film；The single mode
Optical fiber upper end is fixedly connected with the pressure sensitive film lower end, and the single-mode fiber, the pressure sensitive film junction open up air
Fabry-Perot-type cavity.
Further, the air Fabry-Perot-type cavity is micro- elliposoidal, and the air Fabry-Perot-type cavity is confocal
Chamber.
Further, the chamber of the air Fabry-Perot-type cavity grows 40 μm -50 μm.
Further, the presser sensor film thickness is 6-12 μm.
Further, single-mode fiber and the presser sensor membrane material is silica.
A kind of manufacture method of the fibre optic compression sensor based on micro- ellipsoid air chamber, comprises the following steps：
After the coat for divesting single-mode fiber and photonic crystal fiber, single-mode fiber and photonic crystal fiber are cleaned；
Cut single-mode fiber right side, photonic crystal fiber left side；
Single-mode fiber right side, photonic crystal fiber left side are placed on to the electrode both sides of heat sealing machine；
The electrode discharge of heat sealing machine is several times until single-mode fiber, the welding of photonic crystal fiber junction form chamber a length of 40
μm -50 μm of air Fabry-Perot-type cavity, the electrode discharge of heat sealing machine cause the airport of photonic crystal fiber to cave in form two
Silica subsidence area, control process display monitor the chamber length of air Fabry-Perot-type cavity by optical fiber sensing analyzer in real time
Change；
The right side of photonic crystal fiber is cut in vertical optical axis direction, and the silica for only leaving photonic crystal fiber collapses
Area forms pressure sensitive film；
By in the combination insertion optical fiber connector of single-mode fiber, pressure sensitive film, the upside down of pressure sensitive film is put
Put, with the upper surface reflecting surface three of sand paper grinding pressure sensitive membrane until the thickness of pressure sensitive film reaches 20-30 μm；
It is further continued for using sand paper grinding pressure sensitive membrane upper surface reflecting surface three, makes to press above air Fabry-Perot-type cavity
The central thickness of power sensitive membrane reaches 6-12 μm, and control process display is quick by optical fiber sensing analyzer monitoring pressure in real time
Feel the central thickness of film；
With the reflecting surface three of hydrofluoric acid corrosion pressure sensitive film, the reflecting surface three of pressure sensitive film is carried out at roughening
Reason.
Further, apart 50 μm of single-mode fiber right side, photonic crystal fiber left side, the electrode spacing single mode of heat sealing machine
20 μm of fiber end face；The electrode discharge of heat sealing machine 6 ~ 7 times；The right-hand member of photonic crystal fiber is cut in vertical optical axis direction, in formation
Entreat the silica sensitive membrane that thickness is 40 μm.
Further, the splicing parameter of heat sealing machine is welding current 7mA, weld time 650ms, 5 μm of z-axis push-in stroke.
Further, first with the reflecting surface three of 3 μm of sand paper grinding pressure sensitive membrane upper ends until pressure sensitive film center
Thickness reaches 20-30 μm；Make the thickness in pressure sensitive film center with the reflecting surface three of 0.5 μm of sand paper grinding pressure sensitive membrane upper end again
Degree is to 6-12 μm.
Light wave E0Through the vertical incidence sensing probe of single-mode fiber 1, respectively by reflecting surface 1, reflecting surface 25, reflecting surface 36
Three reflective surfaces, three beams reflected lightE 1 、E 2 WithE 3 Interfere, after reflecting surface 36 is roughened, can neglect
SlightlyE 3 , reflectance spectrum is approximatelyE 1 、E 2 Two-beam interference.When 2 compressive deformation of pressure sensitive film, reflectance spectrum change, pass through reflectance spectrum
The tracking of trough wavelength can demodulate additional pressure.
Micro- ellipsoid air Fabry-Perot-type cavity 3 is confocal cavity, i.e. the radius of curvature and Fabry-Perot of two cavitys
Chamber chamber length is equal, at this moment interferes cavity loss small, reflection spectral interference fringe is more acute sharp, greatly improves measurement accuracy.
The optical fiber Fabry-Perot pressure sensor being made based on the above method, utilize the demodulating system shown in Fig. 3
It is demodulated, as a result as shown in figure 4, the pressure sensor that this patent provides has preferably linear and multiplicity.Same
Under experiment condition, contrast is using the plane membrane pressure sensor of etching process in the prior art and the pressure sensing of this patent offer
Device, respective reflectance spectrum is as shown in Figure 5 and Figure 6.Fig. 6 reflectance spectrum contrast 30dB of the present apparatus are reacted, much larger than prior art
Fig. 5 of the plane membrane pressure sensor of middle etching process 10dB, sharp trough cause this patent propose based on micro- ellipsoid
The fibre optic compression sensor of air chamber has higher measurement accuracy.
Described above is only preferred embodiment of the present utility model, it is noted that for the common skill of the art
For art personnel, on the premise of the utility model technical principle is not departed from, some improvement and deformation can also be made, these change
Enter and deform and also should be regarded as the scope of protection of the utility model.
Claims (6)
1. a kind of fibre optic compression sensor based on micro- ellipsoid air chamber, it is characterised in that including single-mode fiber, presser sensor
Film；The single-mode fiber upper end is fixedly connected with the pressure sensitive film lower end, the single-mode fiber, pressure sensitive film connection
Place opens up air Fabry-Perot-type cavity.
2. a kind of fibre optic compression sensor based on micro- ellipsoid air chamber according to claim 1, it is characterised in that described
Air Fabry-Perot-type cavity is micro- elliposoidal, and the air Fabry-Perot-type cavity is confocal cavity.
3. a kind of fibre optic compression sensor based on micro- ellipsoid air chamber according to claim 1, it is characterised in that described
The chamber of air Fabry-Perot-type cavity grows 40 μm -50 μm.
4. a kind of fibre optic compression sensor based on micro- ellipsoid air chamber according to claim 1, it is characterised in that described
Presser sensor film thickness is 6-12 μm.
5. a kind of fibre optic compression sensor based on micro- ellipsoid air chamber according to claim 1, it is characterised in that described
Single-mode fiber material is silica.
6. a kind of fibre optic compression sensor based on micro- ellipsoid air chamber according to claim 1, it is characterised in that described
Presser sensor membrane material is silica.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107300437A (en) * | 2017-08-07 | 2017-10-27 | 南京信息工程大学 | A kind of fibre optic compression sensor and its manufacture method based on micro- ellipsoid air chamber |
| CN108168449A (en) * | 2017-12-31 | 2018-06-15 | 西北大学 | Miniature Fiber optic displacement sensor with high resolution |
| GB2575999A (en) * | 2018-07-31 | 2020-02-05 | Ucl Business Ltd | Method of fabricating a fibre-optic pressure and temperature sensor |
| US12121989B2 (en) * | 2018-07-31 | 2024-10-22 | Ucl Business Ltd | Method of fabricating a fibre-optic pressure and temperature sensor |
-
2017
- 2017-08-07 CN CN201720974265.0U patent/CN206960027U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107300437A (en) * | 2017-08-07 | 2017-10-27 | 南京信息工程大学 | A kind of fibre optic compression sensor and its manufacture method based on micro- ellipsoid air chamber |
| CN108168449A (en) * | 2017-12-31 | 2018-06-15 | 西北大学 | Miniature Fiber optic displacement sensor with high resolution |
| GB2575999A (en) * | 2018-07-31 | 2020-02-05 | Ucl Business Ltd | Method of fabricating a fibre-optic pressure and temperature sensor |
| WO2020025952A1 (en) * | 2018-07-31 | 2020-02-06 | Ucl Business Ltd | Method of fabricating a fibre-optic pressure and temperature sensor |
| US20210299782A1 (en) * | 2018-07-31 | 2021-09-30 | Ucl Business Ltd | Method of fabricating a fibre-optic pressure and temperature sensor |
| US12121989B2 (en) * | 2018-07-31 | 2024-10-22 | Ucl Business Ltd | Method of fabricating a fibre-optic pressure and temperature sensor |
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| TR01 | Transfer of patent right |
Effective date of registration: 20191227 Address after: 650000, No. 19, Bailong Road, Yunnan, Donghua, No. 1, building 2, Kunming Patentee after: Yunnan poly Tiantong Instrument Co. Ltd. Address before: 210044 No. 69 Olympic Sports street, Jianye District, Jiangsu, Nanjing Patentee before: Nanjing University of Information Science and Technology |
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| TR01 | Transfer of patent right | ||
| CP03 | Change of name, title or address |
Address after: 650000 2F, building 1, Donghua office, No. 19, Bailong Road, Panlong District, Kunming City, Yunnan Province Patentee after: Haiying Deep Sea Technology Co.,Ltd. Address before: 650000 2 floor, 1 building, Donghua office, 19 Bailong Road, Kunming, Yunnan. Patentee before: YUNNAN BAOLI TIANTONG INSTRUMENT Co.,Ltd. |
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| CP03 | Change of name, title or address |