CN101614601B - Internal fiber integration type miniature Michelson interferometric sensor and manufacturing method thereof - Google Patents
Internal fiber integration type miniature Michelson interferometric sensor and manufacturing method thereof Download PDFInfo
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- CN101614601B CN101614601B CN2009101045795A CN200910104579A CN101614601B CN 101614601 B CN101614601 B CN 101614601B CN 2009101045795 A CN2009101045795 A CN 2009101045795A CN 200910104579 A CN200910104579 A CN 200910104579A CN 101614601 B CN101614601 B CN 101614601B
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Abstract
The invention discloses an internal fiber integration type miniature Michelson interferometric sensor and a manufacturing method thereof. The sensor comprises two single mode fibers with different external diameters and the same core diameters; the single mode fiber with small external diameter is fusion-jointed on the single mode fiber with large external diameter by axis dislocation; the core parts of the two single mode fibers are overlapped; the uncovered part of the end face of the core of the single mode fiber with large external diameter is the reflecting surface of a reference arm; the core end of the exposed end of the single mode fiber with small external diameter is the reflecting surface of a measuring arm; the cores of the two fibers are made of SiO2. The sensor has the beneficial technical effects of simple manufacturing, low cost, small volume, good electromagnetic interference resistance, good high temperature resistance and good electric insulativity.
Description
Technical field
The present invention relates to a kind of optical fiber sensing technology, relate in particular to a kind of internal fiber integration type miniature Michelson interferometric sensor and preparation method thereof.
Background technology
Optical fiber sensing technology is an emerging technology of late 1970s, and formed research in the whole world popular, runs neck and neck with optical fiber communication; Fibre Optical Sensor is owing to its superior performance enjoys favor, it has the following advantages: volume is little, light weight, anti-electromagnetic interference (EMI), anti-, sensitivity is very high, measure that bandwidth is very wide, detected electrons equipment and sensor can between advantage such as so far apart, can constitute sensing network.Fibre optic interferometer adopts interference of light technology, and its measuring accuracy is higher than the measuring accuracy of ordinary optic fibre sensor.
The optical fiber interference type sensor is because of its precision height, and anti-electromagnetic interference capability is subjected to people's favor by force.But common bragg grating adopts the thermal expansion of auxiliary material or heat conduction to measure high temperature because of itself non-refractory mostly, has reduced the integrated level of sensor.Long period fiber grating at high temperature its spectral line is still good, but long period fiber grating is owing to exist serious crooked susceptibility, thereby its measuring reliability is reduced.Owing to use the optical cement adhering method to make sensor, thereby the temperature of measuring is also very limited, generally is lower than 500 ℃ based on the pyrostat of extrinsic enamel amber.Adopted the method for arc welding to make in line style enamel amber chamber, its material therefor all is SiO
2, it has Stability Analysis of Structures, integrated level height, advantage such as high temperature resistant, but because SiO
2Thermal expansion less relatively, so temperature control is not high.But traditional miniature Michelson interference sensor is by two level crossings and the system that spectroscope is formed, and its assembly precision requires high; The miniature Michelson interference sensor of optical fiber is discrete because of reference arm and pickup arm, and it is big that reference arm is disturbed by extraneous vibration temperature etc.
Summary of the invention
The present invention proposes a kind of internal fiber integration type miniature Michelson interferometric sensor, it is by the external diameter difference, and two single-mode fibers that core diameter is identical are formed; The dislocation ground welding of little external diameter single-mode fiber axle center is on big external diameter single-mode fiber, and the core segment of two single-mode fibers overlaps; The part that big external diameter single-mode fiber fibre core end face is not capped is the reference arm reflecting surface, and the fibre core end face of little external diameter single-mode fiber exposed end is the gage beam reflecting surface.The core material of single-mode fiber is pure SiO
2
The invention allows for the method for making of aforementioned internal fiber integration type miniature Michelson interference sensor, this method step is as follows:
1) get two single-mode fibers, adopt chemical reagent (such as hydrofluorite etc.) or method for drawing optical fibers (general fibre-optical drawing producer all can draw) wherein a single-mode fiber attenuate, obtain little external diameter single-mode fiber, another root is big external diameter single-mode fiber;
2) the welding end-grain cutting of two single-mode fibers is flat, then little external diameter single-mode fiber and the dislocation ground welding of big external diameter single-mode fiber axle center are fixed; The fibre core of little external diameter single-mode fiber is by complete closed, and only some is capped the fibre core of big external diameter single-mode fiber, and another part contacts with air, forms the reference arm reflecting surface;
3) length is as required cut little external diameter single-mode fiber, and the cross section forms the gage beam reflecting surface.
The detection system structure of being made up of internal fiber integration type miniature Michelson interferometric sensor of the present invention is: it comprises wideband light source, 1 * 2 coupling mechanism, spectrometer, computing machine and an optical fiber Michelson interference type temperature sensor; Wherein, the band light source is connected to an end of 1 * 2 coupling mechanism, and the other end of coupling mechanism is connected to optical fiber Michelson interference type temperature sensor, form the reflection interference spectral line, be connected to spectrometer via 1 * 2 coupling mechanism, computing machine and spectrometer communicate to connect, and come deal with data.
Useful technique effect of the present invention is: make simple, with low cost, volume is little, anti-electromagnetic interference (EMI), anti-, electrical insulating property good.
Description of drawings
Fig. 1, sensor construction figure of the present invention;
Fig. 2, little external diameter single-mode fiber one side end face synoptic diagram;
The detection system structure drawing of device that Fig. 3, sensor of the present invention are called oneself;
Among the figure: reference arm reflecting surface 2, gage beam reflecting surface 1, internal fiber integration type miniature Michelson interferometric sensor 3,1 * 2 coupling mechanism 4, wideband light source 5, spectrometer 6, computing machine 7;
Embodiment
Referring to Fig. 1,2, as shown in the figure, internal fiber integration type miniature Michelson interferometric sensor 3 of the present invention, it is by the external diameter difference, and two single-mode fibers that core diameter is identical are formed; The dislocation ground welding of little external diameter single-mode fiber 9 axle center is on big external diameter single-mode fiber 8, and the core segment of two single-mode fibers overlaps; The part that big external diameter single-mode fiber 8 fibre core end faces are not capped is reference arm reflecting surface 2, and the fibre core end face of little external diameter single-mode fiber 9 exposed ends is gage beam reflecting surface 1.
Referring to Fig. 3, by the pick-up unit structure that sensor of the present invention is formed, it comprises: wideband light source 5,1 * 2 coupling mechanism 4, spectrometer 6, computing machine 7 and an internal fiber integration type miniature Michelson interferometric sensor 3; Wideband light source 5 is connected to an end of 1 * 2 coupling mechanism 4, the other end of 1 * 2 coupling mechanism 4 is connected on the internal fiber integration type miniature Michelson interferometric sensor 3, the reflection interference spectral line that in sensor, forms, be transferred to spectrometer 6 via 1 * 2 coupling mechanism 4 again, computing machine 7 communicates to connect with spectrometer 6.
The laser of the certain bandwidth wavelength of wideband light source 5 outputs (is generally C-band laser, 1520nm～1570nm), enter 1 * 2 coupling mechanism 4, laser enters by 1 * 2 coupling mechanism 4 and is divided into two bundles that intensity equates behind the sensor, shines gage beam reflecting surface 1 respectively and above the reference arm reflecting surface 2; Article two, light returns in 1 * 2 coupling mechanism 4 after each self-corresponding reflecting surface reflection again, when the optical path difference of two light beams in the sensor during less than the coherent length of light source, two-beam will interfere at the output terminal (that end links to each other with spectrometer 6) of 1 * 2 coupling mechanism 4; The interference signal of output enters spectrometer 6; Spectrometer 6 transmits the reflection interference spectrum and is stored in the computing machine 7, is handled by 7 pairs of data of computing machine.
Sensor of the present invention is placed in the temperature environment that needs to measure, because temperature influence, the refractive index of the gage beam of internal fiber integration type miniature Michelson interferometric sensor 3 changes, cause the optical path difference of sensor to change, survey this variation by spectrometer 6, can learn the value of temperature rapidly.
Adopt sensor of the present invention, temperature measurement range can be extended to 1200 degrees centigrade from subzero 20 degree, its temperature control also exceeds nearly 20 times than enamel amber temperature sensor, and therefore sensor of the present invention has boundless application prospect in industry.
Claims (3)
1. internal fiber integration type miniature Michelson interferometric sensor is characterized in that: it is by the external diameter difference, and two single-mode fibers that core diameter is identical are formed; The dislocation ground welding of little external diameter single-mode fiber (9) axle center is on big external diameter single-mode fiber (8), and the core segment of two single-mode fibers overlaps, and the fibre core of little external diameter single-mode fiber (9) is by complete closed; The part that big external diameter single-mode fiber (8) fibre core end face is not capped is reference arm reflecting surface (2), and the fibre core end face of little external diameter single-mode fiber (9) exposed end is gage beam reflecting surface (1).
2. internal fiber integration type miniature Michelson interferometric sensor according to claim 1 is characterized in that: the core material of single-mode fiber is pure SiO
2
3. the method for making of an internal fiber integration type miniature Michelson interferometric sensor is characterized in that:
1) get two single-mode fibers, employing chemical reagent or method for drawing optical fibers wherein a single-mode fiber attenuate, and obtain little external diameter single-mode fiber (9), and another root is big external diameter single-mode fiber (8);
2) the welding end-grain cutting of two single-mode fibers is flat, then little external diameter single-mode fiber (9) and the dislocation ground welding of big external diameter single-mode fiber (8) axle center are fixed; The fibre core of little external diameter single-mode fiber (9) is by complete closed, and only some is capped the fibre core of big external diameter single-mode fiber (8), and another part contacts with air, forms the reference arm reflecting surface;
3) length is as required cut little external diameter single-mode fiber, and the cross section forms the gage beam reflecting surface.
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| CN2009101045795A CN101614601B (en) | 2009-08-10 | 2009-08-10 | Internal fiber integration type miniature Michelson interferometric sensor and manufacturing method thereof |
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| CN2009101045795A CN101614601B (en) | 2009-08-10 | 2009-08-10 | Internal fiber integration type miniature Michelson interferometric sensor and manufacturing method thereof |
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| CN101614601B true CN101614601B (en) | 2010-09-08 |
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| CN102507076B (en) * | 2011-10-18 | 2013-08-07 | 浙江师范大学 | Hydraulic sensing method based on gold-plated optical fiber sensing head |
| CN102354018B (en) * | 2011-11-10 | 2013-01-23 | 重庆大学 | All-fiber band-pass filter |
| CN103940355A (en) * | 2014-02-26 | 2014-07-23 | 深圳大学 | Intensity-modulating-type optical-fiber Michelson strain sensor and manufacturing method thereof |
| CN104236602B (en) * | 2014-09-26 | 2017-05-10 | 安徽大学 | Full-optical-fiber sensor capable of measuring temperature and humidity at same time |
| CN105180977B (en) * | 2015-05-27 | 2017-08-25 | 三峡大学 | A kind of single fiber Michelson interference sensor and sensor-based system |
| CN105115623B (en) * | 2015-08-12 | 2017-12-01 | 天津大学 | Based on the theoretical mini optical fibre pyrostat of Michelson interference and preparation method |
| CN105092084A (en) * | 2015-09-01 | 2015-11-25 | 河南师范大学 | Temperature optimized measurement method on basis of analysis on interference spectrum of core-dislocated fibers in BP neural network |
| CN105092086A (en) * | 2015-09-01 | 2015-11-25 | 河南师范大学 | Dual-coupling structure-based single-mode core-dislocated fiber temperature measurement method |
| CN106405447A (en) * | 2016-08-26 | 2017-02-15 | 北京信息科技大学 | Method utilizing fiber core mismatch interference structure to measure magnetic field |
| CN106596471A (en) * | 2017-01-19 | 2017-04-26 | 中国计量大学 | Chitosan-based Michelson optical fiber humidity sensor |
| CN107101960B (en) * | 2017-06-21 | 2023-03-28 | 深圳大学 | Micro-nano optical fiber Michelson interference type hydrogen sensor and preparation method thereof |
| CN110320181A (en) * | 2019-07-30 | 2019-10-11 | 南京信息工程大学 | A kind of optical fibre Michelson interferometric sensor and the method for sensing based on the sensor |
| CN115435923B (en) * | 2022-11-07 | 2023-05-30 | 中国科学院新疆理化技术研究所 | Optical fiber sensing head and temperature sensor |
| CN115435924B (en) * | 2022-11-09 | 2023-02-07 | 中国科学院新疆理化技术研究所 | Temperature sensor based on double-hole optical fiber |
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| CN1908577A (en) * | 2006-08-22 | 2007-02-07 | 哈尔滨工程大学 | Michelson's interferometer integrated into single optical fiber |
| CN101458363A (en) * | 2009-01-04 | 2009-06-17 | 上海大学 | Michelson interferometer based on coaxial optical fiber |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1908577A (en) * | 2006-08-22 | 2007-02-07 | 哈尔滨工程大学 | Michelson's interferometer integrated into single optical fiber |
| CN101458363A (en) * | 2009-01-04 | 2009-06-17 | 上海大学 | Michelson interferometer based on coaxial optical fiber |
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| 刘均琦等.基于迈克尔逊干涉原理的光纤传感器简述.传感器世界.2009,(6),10-13. * |
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Owner name: WUXI CHENGDIAN OPTICAL FIBER SENSOR TECHNOLOGY CO. Free format text: FORMER OWNER: CHONGQING UNIVERSITY Effective date: 20130115 |
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Effective date of registration: 20170427 Address after: 610017 Sichuan City, Chengdu province high tech Zone (West), No. 77 Tianmu Road, poly champagne international, building 2, unit 727-728, No. 1, No. Patentee after: Sichuan Light Technology Co., Ltd. Address before: 214000 Jiangsu province Wuxi city Wuxi District Linghu Road No. 97 Taihu international science and Technology Park of University Science Park Innovation building two South five floor Patentee before: Wuxi Chengdian Optical Fiber Sensor Technology Co., Ltd. |