CN206627147U - A kind of structure of temperature/pressure sensor and the measuring system of temperature and pressure - Google Patents
A kind of structure of temperature/pressure sensor and the measuring system of temperature and pressure Download PDFInfo
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- CN206627147U CN206627147U CN201720046429.3U CN201720046429U CN206627147U CN 206627147 U CN206627147 U CN 206627147U CN 201720046429 U CN201720046429 U CN 201720046429U CN 206627147 U CN206627147 U CN 206627147U
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Abstract
The utility model, which provides a kind of structure of temperature/pressure sensor and the measuring system of temperature and pressure, the structure of temperature/pressure sensor, to be included：The quartz glass tube of single-mode fiber and presetting length, wherein, one end of single-mode fiber and one end of quartz glass tube connect, the other end of quartz glass tube is covered by quartz thin film, so that the tube chamber of quartz glass tube forms the FPI chambers of the presetting length with quartz thin film, the FBG being formed with for detection temperature is write in the fibre core of single-mode fiber.In this way, a sensor will be integrated into the FBG for detection temperature for the FPI chambers for detecting pressure, it is possible to achieve detected while temperature and pressure, simplify the process complexity and installation complexity of temperature/pressure sensor processing.Because optical fibre thin film is high reflection surface, reflectivity is high, it is not necessary to which high reflection can be achieved in coating process, in addition, the chamber length of FPI chambers is presetting length in temperature/pressure sensor, the size of the FPI chambers is accurate, the precision of the pressure detected is improved, improves the reliability of temperature and measuring system.
Description
Technical field
The utility model is applied to fibre optical sensor field, more particularly to a kind of structure and temperature of temperature-pressure sensor
With the measuring system of pressure.
Background technology
In optics, the structure of Fabry-Perot interference (Fabry-P é rot interferometer, FPI) is applied to respectively
In type optical fiber sensor, sensing accuracy can be greatly improved.
However, existing FPI fibre optical sensors can only typically detect a kind of physical parameter, such as temperature or pressure, if will
Measurement temperature and pressure simultaneously are realized, it is necessary to install the sensing element of temperature and pressure simultaneously in the sensor, can so be increased
The process complexity and installation complexity of sensor processing.On the other hand, the method for existing making FPI fibre optical sensors is present
The drawbacks of certain, such as, the method for plating high reflection film using end face has high requirement to filming equipment and technique, causes anti-
The reflectivity for penetrating film is low so that the pressure precision of detection is low；The method of chemical attack needs to utilize corrosion in manufacturing process
Gas is corroded to inside of optical fibre to form FDC chambers, can make the FPI to be formed due to that cannot carry out accurate control to etchant gas
The size of interference cavity is not accurate enough, so as to cause the precision of pressure that detects low, so as to reduce temperature and pressure measuring system
Reliability.
Utility model content
Technical problem to be solved in the utility model is the offer a kind of structure and temperature and pressure of temperature-pressure sensor
Measuring system, it is intended to the process complexity that solves sensor processing is high, installation is complicated and the pressure precision that detects is low, temperature
The problem of degree is low with the reliability of pressure-measuring system.
A kind of structure of temperature-pressure sensor provided by the utility model, including：The quartzy glass of single-mode fiber and presetting length
Glass pipe, one end of the single-mode fiber are connected with one end of the quartz glass tube, and the other end of the quartz glass tube is by quartz thin film
Covering so that the tube chamber of the quartz glass tube forms the Fabry-Perot interference chamber of the presetting length with the quartz thin film, should
The Fiber Bragg Grating FBG being formed with for detection temperature is write in the fibre core of single-mode fiber.
The utility model provides a kind of temperature and pressure measuring system, including：Signal demodulating equipment and temperature-pressure sensor；
Temperature-pressure sensor is used to measure the temperature and pressure in environment to be measured, and will pass through Fabry-Perot interference chamber
The optical signal of interference and Fiber Bragg Grating FBG back reflection is sent to signal demodulating equipment, and signal demodulating equipment is used to believe the light
Number Wavelength demodulation is carried out, the pressure for obtaining optical signal drift value caused by the temperature change of the environment to be measured and the environment to be measured becomes
Optical signal drift value caused by change, signal demodulating equipment be used for optical signal drift value caused by the temperature change of environment to be measured and
Optical signal drift value caused by the ambient pressure variations to be measured is converted to the temperature value and pressure value of the environment to be measured, and by the temperature
Angle value and pressure value are shown.
The utility model provides a kind of structure of temperature-pressure sensor and the measuring system of temperature and pressure, and temperature-pressure passes
The structure of sensor includes：The quartz glass tube of single-mode fiber and presetting length, wherein, one end of single-mode fiber and quartz glass tube
One end connection, the other end of quartz glass tube covered by quartz thin film so that the tube chamber of quartz glass tube and quartz thin film shape
Into the FPI chambers of the presetting length, the FBG being formed with for detection temperature is write in the fibre core of single-mode fiber.In this way, detection pressure will to be used for
The FPI chambers of power are integrated into a sensor with the FBG for detection temperature, it is possible to achieve are detected while temperature and pressure, letter
The process complexity and installation complexity of temperature-pressure sensor processing are changed.Because optical fibre thin film is high reflection surface, reflectivity
It is high, it is not necessary to high reflection can be achieved in coating process, in addition, the chamber length of FPI chambers is presetting length in temperature-pressure sensor, should
The size of FPI chambers is accurate, improves the precision of the pressure detected, improves the reliability of temperature and measuring system.
Brief description of the drawings
Fig. 1 is a kind of structural representation for temperature-pressure sensor that the utility model embodiment provides；
Fig. 2 is a kind of temperature and pressure measuring system that the utility model embodiment provides；
Fig. 3 is another temperature and pressure measuring system that the utility model embodiment provides.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only explaining
The utility model, it is not used to limit the utility model.
As second embodiment of the present utility model, as shown in figure 1, the utility model embodiment provide a kind of temperature-
The structural representation of pressure sensor, the structure of the temperature-pressure sensor include：The quartz glass of single-mode fiber 101 and presetting length
Pipe 102；
Wherein, one end of single-mode fiber 101 is connected with one end of quartz glass tube 102.
The other end of quartz glass tube 102 is covered by quartz thin film 103 so that the tube chamber of quartz glass tube 102 and quartz
Film 103 forms the FPI chambers 104 of the presetting length.
The presetting length is the length of previously prepared FPI chambers, and the presetting length is generally 10- in actual applications
30um, preferably 20um.The FPI chambers 104 for closing inner chamber, in FPI chambers 104, quartz thin film 103 and with quartz thin film 103
The section constitution of relative single-mode fiber FPI two reflectings surface, when the pressure in environment to be measured changes, the quartz
Film 103 deforms upon, such that wavelength of the incident light after two reflectings surface are interfered changes, the temperature-pressure sensing
Pressure optical signal after interference is sent to signal demodulating equipment by device, and the drift of the pressure optical signal is detected by the signal demodulating equipment
Shifting amount, and then draw the pressure value of the environment to be measured.
Further, the quartz thin film 103 is covered by the other end welding with quartz glass tube 102.The stone
English film is the thin nano thin-film in thick middle both sides, so, more sensitive to pressure, increases the precision of pressure detecting.
Further, the center of quartz thin film 103 overlaps with the center of circle at the interface of quartz glass tube 102.
The FBG105 being formed with for detection temperature is write in the fibre core of single-mode fiber 101.
Wherein, FBG105 length is less than 1mm.The junction of single-mode fiber 101 and quartz glass tube 102 is smooth end
Mouthful.Due to being influenceed by the temperature of environment to be measured, the FBG sizes of space can be caused to change, the incident light reflects by the FBG
Afterwards, the wavelength of the optical signal of the temperature of output changes, and the temperature-pressure sensor sends the temperature optical signal to the signal solution
Device is adjusted, the drift value of the temperature optical signal is detected by the signal demodulating equipment, and then draw the pressure value of the environment to be measured.Need
It is noted that the pressure optical signal is different wave-length coverages from the temperature optical signal.
Further, the FBG by femtosecond laser point-or hatched manner write system.
In the utility model embodiment, the structure of temperature-pressure sensor includes：The quartz of single-mode fiber 101 and presetting length
Glass tube 102, wherein, one end of single-mode fiber 101 is connected with one end of quartz glass tube 102, quartz glass tube 102 it is another
End is covered by quartz thin film 103 so that the tube chamber of quartz glass tube 101 forms the FPI chambers of the presetting length with quartz thin film 103
104, the FBG105 being formed with for detection temperature is write in the fibre core of single-mode fiber 101.In this way, by the FPI chambers for detecting pressure
With being integrated into a sensor for the FBG of detection temperature, it is possible to achieve detected while temperature and pressure, simplify temperature-pressure
The process complexity and installation complexity of sensor processing.Because optical fibre thin film is high reflection surface, reflectivity is high, it is not necessary to plates
High reflection can be achieved in membrane process, in addition, the chamber length of FPI chambers is presetting length in temperature-pressure sensor, the size of the FPI chambers
Precisely, the precision of the pressure detected is improved, improves the reliability of temperature and measuring system.
Referring to Fig. 2, the structure that Fig. 2 is the measuring system for the temperature and pressure that the utility model second embodiment provides is shown
It is intended to, for convenience of description, illustrate only the part related to the utility model embodiment.The temperature and pressure of Fig. 2 examples
Measuring system, mainly include：Signal demodulating equipment 111 and temperature-pressure sensor 112.Each functional module describes in detail as follows above：
Temperature-pressure sensor 112, for measuring the temperature and pressure in environment to be measured, and the interference of FPI chambers and FBG will be passed through
The optical signal of reflection is sent to the signal demodulating equipment 111.
In practical application, temperature-pressure sensor 112 is connected with signal demodulating equipment 111 by single-mode fiber, is additionally operable to receive
The light that signal demodulating equipment 111 is launched.The light that signal demodulating equipment 111 is launched is defeated after FPI chambers are interfered and FBG reflects
The wavelength of optical signals can change, and temperature-pressure sensor 112 sends optical signal to signal demodulating equipment by single-mode fiber
111。
Signal demodulating equipment 111, for carrying out Wavelength demodulation to the optical signal, the temperature change for obtaining the environment to be measured is drawn
Optical signal drift value caused by the optical signal drift value and the pressure change of the environment to be measured risen.
Signal demodulating equipment 111, for optical signal drift value caused by the temperature change of the environment to be measured is to be measured with this
Optical signal drift value caused by ambient pressure variations is converted to the temperature value and pressure value of the environment to be measured, and by the temperature value and
Pressure value is shown.
In practical application, as shown in figure 3, the signal demodulating equipment 111 includes：White light source 1111,3dB couplers
1112 and (FBG) demodulator 1113.The light is transmitted into three-dB coupler by the white light source in signal demodulating equipment 111 by single-mode fiber
1112, the light of the preset wavelength is transmitted into the temperature-pressure sensor 112 by three-dB coupler 1112 by single-mode fiber.The preset ripple
A length of signal demodulating equipment 111 pre-set is sent to the wavelength of the incident light in temperature-pressure sensor 112.The preset wavelength
The wavelength of wavelength and set pressure signal including preset temperature signal.
Further, signal demodulating equipment 111, for by optical signal drift value caused by the temperature change of the environment to be measured
With the pressure change of the environment to be measured caused by optical signal drift value be converted to temperature signal and electric pressure signal.
For example, the drift value 1nm of the temperature optical signal is converted to temperature signal Xmv by signal demodulating equipment 111,
Drift value-the 1nm of the pressure optical signal is converted to temperature signal-Xmv by signal demodulating equipment 111.
Signal demodulating equipment 111, for being mended using preset offset to the temperature signal and the electric pressure signal
Repay and calibrate, and using preset temperature correction value and preset pressure correction value respectively to the temperature signal after compensation and compensation after
Electric pressure signal be modified.
The preset offset is the numerical value compensated to the temperature signal and the electric pressure signal pre-set.Should
Preset offset can be calculated by compensation formula, or the numerical value of a certain fixation.The preset temperature correction value is
By the numerical value of experimental calibration, for correcting interference of the electric pressure signal to the temperature signal.The preset pressure correction value
For by the numerical value of experimental calibration, for correcting interference of the temperature signal to the electric pressure signal.
Signal demodulating equipment 111, for respectively changing revised temperature signal and revised electric pressure signal
For the temperature value and the pressure value.
The utility model embodiment, temperature-pressure sensor 112 are used to measuring temperature and pressure in environment to be measured, and will be through
The optical signal for crossing the interference of Fabry-Perot interference chamber and Fiber Bragg Grating FBG back reflection is sent to signal demodulating equipment 111,
Signal demodulating equipment 111 is used to carry out Wavelength demodulation to the optical signal, obtains optical signal caused by the temperature change of environment to be measured
Optical signal drift value caused by the pressure change of drift value and the environment to be measured, signal demodulating equipment 111 are used for this is to be measured
Optical signal drift value caused by optical signal drift value caused by the temperature change of environment and the ambient pressure variations to be measured is converted to
The temperature value and pressure value of the environment to be measured, and the temperature value and pressure value are shown.So, on the one hand, due to temperature-pressure
Sensor detects while can realizing temperature and pressure, and process complexity and the installation for simplifying temperature-pressure sensor processing are multiple
Miscellaneous degree；On the other hand, due in the temperature-pressure sensor single-mode fiber be high reflection surface, reflectivity is high, it is not necessary to coating process
High reflection can be achieved, in addition, the size of Fabry-Perot interference chamber is accurate in temperature-pressure sensor, improve what is detected
The precision of pressure, improve the reliability of temperature and measuring system.
Preferred embodiment of the present utility model is the foregoing is only, it is all at this not to limit the utility model
All any modification, equivalent and improvement made within the spirit and principle of utility model etc., should be included in the utility model
Protection domain within.
Claims (8)
1. a kind of structure of temperature-pressure sensor, it is characterised in that the temperature-pressure sensor includes：Single-mode fiber and presetting length
Quartz glass tube, one end of the single-mode fiber is connected with one end of the quartz glass tube；
The other end of the quartz glass tube is covered by quartz thin film so that the tube chamber of the quartz glass tube and the quartz are thin
Film forms the Fabry-Perot interference chamber of the presetting length；
The Fiber Bragg Grating FBG being formed with for detection temperature is write in the fibre core of the single-mode fiber.
2. structure according to claim 1, it is characterised in that
The length of the Fiber Bragg Grating FBG is less than 1mm.
3. structure according to claim 1, it is characterised in that
The junction of the single-mode fiber and the quartz glass tube is smooth port.
4. structure according to claim 1, it is characterised in that
The quartz thin film is covered by being fetched with the other end of the quartz glass tube.
5. structure according to claim 1, it is characterised in that
The quartz thin film is the thin nano thin-film in thick middle both sides, and the center of the quartz thin film and the quartz glass tube
The center of circle in section overlaps.
6. structure according to claim 1, it is characterised in that the Fiber Bragg Grating FBG by femtosecond laser point-or
Hatched manner writes system.
7. a kind of measuring system of temperature and pressure, it is characterised in that the system includes：With any one of claim 1-6
Temperature-the pressure sensor and signal demodulating equipment of the structure；
Temperature-the pressure sensor is connected by single-fiber optical film with the signal demodulating equipment, for measuring the temperature in environment to be measured
Degree and pressure, and the optical signal by the interference of Fabry-Perot interference chamber and Fiber Bragg Grating FBG back reflection is sent to institute
State signal demodulating equipment；
The signal demodulating equipment, for carrying out Wavelength demodulation to the optical signal, obtain the temperature change of the environment to be measured
Optical signal drift value caused by the pressure change of caused optical signal drift value and the environment to be measured；
The signal demodulating equipment, for by optical signal drift value caused by the temperature change of the environment to be measured and described to be measured
Optical signal drift value caused by ambient pressure variations is converted to the temperature value and pressure value of the environment to be measured, and by the temperature
Value and pressure value are shown.
8. system according to claim 7, it is characterised in that system includes：
The signal demodulating equipment, for by optical signal drift value caused by the temperature change of the environment to be measured and described to be measured
Optical signal drift value is converted to temperature signal and electric pressure signal caused by the pressure change of environment；
The signal demodulating equipment, for being mended using preset offset to the temperature signal and the electric pressure signal
Repay and calibrate, and using preset temperature correction value and preset pressure correction value respectively to the temperature signal after compensation and compensation after
Electric pressure signal be modified；
The signal demodulating equipment, for revised temperature signal and revised electric pressure signal to be converted into institute respectively
State temperature value and the pressure value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720046429.3U CN206627147U (en) | 2017-01-16 | 2017-01-16 | A kind of structure of temperature/pressure sensor and the measuring system of temperature and pressure |
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| CN201720046429.3U CN206627147U (en) | 2017-01-16 | 2017-01-16 | A kind of structure of temperature/pressure sensor and the measuring system of temperature and pressure |
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| CN106643908A (en) * | 2017-01-16 | 2017-05-10 | 深圳大学 | Method for preparing temperature-pressure sensor, temperature-pressure sensor structure and temperature-pressure measuring system and method |
| CN108489597A (en) * | 2018-04-08 | 2018-09-04 | 盐城工学院 | A kind of acoustic detector and method based on hollow-core photonic crystal fiber |
| CN108507616A (en) * | 2018-04-11 | 2018-09-07 | 中国科学院武汉物理与数学研究所 | The zero thermal expansion temperature spot and fineness rapid measurement device and method of Fabry Perot chamber |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106643908A (en) * | 2017-01-16 | 2017-05-10 | 深圳大学 | Method for preparing temperature-pressure sensor, temperature-pressure sensor structure and temperature-pressure measuring system and method |
| CN108489597A (en) * | 2018-04-08 | 2018-09-04 | 盐城工学院 | A kind of acoustic detector and method based on hollow-core photonic crystal fiber |
| CN108507616A (en) * | 2018-04-11 | 2018-09-07 | 中国科学院武汉物理与数学研究所 | The zero thermal expansion temperature spot and fineness rapid measurement device and method of Fabry Perot chamber |
| CN108507616B (en) * | 2018-04-11 | 2019-08-06 | 中国科学院武汉物理与数学研究所 | The zero thermal expansion temperature spot and fineness rapid measurement device and method of Fabry Perot chamber |
| CN112525237A (en) * | 2019-09-17 | 2021-03-19 | 武汉理工大学 | EFPI-FBG composite pressure and temperature sensor based on epoxy resin packaging and measuring method |
| CN112525237B (en) * | 2019-09-17 | 2023-03-24 | 武汉理工大学 | EFPI-FBG composite pressure and temperature sensor based on epoxy resin packaging and measuring method |
| CN110838604B (en) * | 2019-11-21 | 2020-10-20 | 北京理工大学 | Power battery based on fiber Bragg grating and monitoring system and method thereof |
| CN110838604A (en) * | 2019-11-21 | 2020-02-25 | 北京理工大学 | Power battery based on fiber Bragg grating and monitoring system and method thereof |
| CN113432642A (en) * | 2021-06-09 | 2021-09-24 | 西安交通大学 | Embedded multi-parameter optical fiber composite sensor and manufacturing method thereof |
| CN114279619A (en) * | 2021-08-24 | 2022-04-05 | 南京大学 | Anti-permeation high-sensitivity graphene hydraulic sensor and processing technology thereof |
| CN114279619B (en) * | 2021-08-24 | 2022-11-11 | 南京大学 | Anti-permeation high-sensitivity graphene hydraulic sensor and processing technology thereof |
| CN114018432A (en) * | 2021-09-29 | 2022-02-08 | 南京大学 | All-fiber end face integrated minimum temperature hydraulic sensor and construction method thereof |
| CN116336970A (en) * | 2022-12-28 | 2023-06-27 | 深圳大学 | Fiber cladding grating sensor, inclinometry method thereof and fiber cladding grating inclinometer |
| CN116336970B (en) * | 2022-12-28 | 2023-10-03 | 深圳大学 | Fiber cladding grating sensor, inclinometry method thereof and fiber cladding grating inclinometer |
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