CN114279619A - Anti-permeation high-sensitivity graphene hydraulic sensor and processing technology thereof - Google Patents
Anti-permeation high-sensitivity graphene hydraulic sensor and processing technology thereof Download PDFInfo
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- CN114279619A CN114279619A CN202110977239.4A CN202110977239A CN114279619A CN 114279619 A CN114279619 A CN 114279619A CN 202110977239 A CN202110977239 A CN 202110977239A CN 114279619 A CN114279619 A CN 114279619A
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 42
- 229910021389 graphene Inorganic materials 0.000 title claims abstract description 42
- 238000012545 processing Methods 0.000 title claims abstract description 10
- 238000005516 engineering process Methods 0.000 title claims abstract description 8
- 239000013307 optical fiber Substances 0.000 claims abstract description 62
- 239000000835 fiber Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 14
- -1 graphite alkene Chemical class 0.000 claims description 13
- 238000001764 infiltration Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000004698 Polyethylene Substances 0.000 claims description 7
- 229920000573 polyethylene Polymers 0.000 claims description 7
- 239000000377 silicon dioxide Substances 0.000 claims description 7
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 6
- 238000000231 atomic layer deposition Methods 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 6
- 239000010439 graphite Substances 0.000 claims description 6
- 235000012239 silicon dioxide Nutrition 0.000 claims description 6
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 238000001259 photo etching Methods 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 4
- 239000012510 hollow fiber Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 2
- 239000011241 protective layer Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 12
- 238000010276 construction Methods 0.000 abstract description 2
- 230000035945 sensitivity Effects 0.000 description 16
- 238000001228 spectrum Methods 0.000 description 8
- 239000010410 layer Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 239000002356 single layer Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000004971 IR microspectroscopy Methods 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012060 immune response imaging Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
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Abstract
The invention discloses an anti-permeation high-sensitivity graphene hydraulic sensor and a processing technology thereof. Compared with the prior art, the invention can realize stable pressure detection. The external hydraulic pressure change is demodulated by utilizing the interference result of the microstructure of the optical fiber to the light, and the construction and demodulation of an optical fiber F-P cavity are related.
Description
Technical Field
The invention relates to the field of sensors, in particular to a permeation-resistant high-sensitivity graphene hydraulic sensor and a processing technology thereof.
Background
With the development of society, there is a higher requirement for the detection of various physical parameters, and in the application scenarios such as industrial production and health monitoring, a pressure sensor with higher sensitivity, stronger anti-interference capability and smaller size is a problem to be solved urgently.
The existing hydraulic pressure sensor can be mainly divided into an electrical pressure sensor and an optical pressure sensor, and the electrical pressure sensor has the defects of easy rusting and the like because the electrical pressure sensor needs to be protected in a liquid environment, so that the pressure detection of the electrical pressure sensor in the liquid environment has higher difficulty. Some common optical pressure sensors, such as those using laser displacement, have the advantage of high sensitivity, but their size is too large to perform the measurement task in some demanding measurement environments. The optical fiber pressure sensor has the advantages of small volume, electromagnetic interference resistance, low cost and the like, and can complete measurement tasks in a complex measurement environment due to the flexible characteristic of the optical fiber. The common structure of the optical fiber pressure sensor is an FBG structure or an F-P structure, but the FBG structure has great difficulty in demodulation due to the cross sensitivity of the FBG structure to pressure and temperature. The F-P structure is simple in structure, is widely concerned and applied, and low in cost provides conditions for mass production, but the sensitivity of the F-P structure sensor is influenced by the sensitive film, the sensitive film with high sensitivity is mostly formed by a two-dimensional material film at present, but the tightness of the two-dimensional material film and the F-P structure is always concerned when the sensor is manufactured, the optical sensor with poor tightness is easy to cause water leakage of the sensor due to poor tightness when the optical sensor measures hydraulic pressure, so that the failure of a measurement task is caused, the long-term stability and accuracy of the sensor work are greatly influenced, and the anti-permeation packaging of the F-P high-sensitivity hydraulic sensor is a very concerned problem.
Disclosure of Invention
The purpose of the invention is as follows: aiming at the defects of the prior art, particularly the defects of overlarge volume, low sensitivity and easy water leakage of an optical sensor in the prior sensor, the graphene hydraulic sensor with the permeation resistance and high sensitivity and the processing technology thereof are provided. The hydraulic pressure measuring device can well complete the task of hydraulic pressure measurement in a complex liquid environment, and has strong practicability and wide application prospect due to the characteristics of high sensitivity, permeation resistance and the like.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a high sensitive graphite alkene hydraulic pressure sensor of anti-infiltration, includes anti-infiltration film, graphite alkene film, hollow optic fibre, single mode fiber, and hollow optic fibre is upper portion open-ended hollow cylinder structure, has the hollow in the middle of the hollow optic fibre, and the one end of hollow optic fibre is connected in the single mode fiber tip, and graphite alkene film covers the other end of hollow optic fibre, the through-hole has been seted up at the center of anti-infiltration film, and anti-infiltration film covers on graphite alkene film, and wraps up in the tip of hollow optic fibre, and the through-hole at anti-infiltration film center is in the position of graphite alkene film; the graphene film, the hollow optical fiber and the single-mode optical fiber form an optical fiber F-P cavity structure.
As a further preferable scheme, the through hole in the center of the permeation resistant film is concentric with the graphene film and the hollow core of the hollow-core optical fiber.
As a further preferable mode, the diameter of the through hole at the center of the permeation resistant film is smaller than that of the graphene film.
As a further preferred option, the length of the hollow core fiber is 0.1 μm to 1000. mu.m.
A processing technology of a permeation-resistant high-sensitivity graphene hydraulic sensor comprises the following steps:
the method comprises the following steps: cutting or corroding the hollow optical fiber into proper length, and corroding the single-mode optical fiber by using hydrofluoric acid to perform surface flatness treatment;
step two: welding the processed hollow fiber and the processed single-mode fiber;
step three: attaching the graphene film to the port of the hollow optical fiber to form a sensor with an optical fiber F-P cavity structure;
step four: alternately plating a permeation-resistant film, a polyethylene film and a silicon dioxide film at the port of the treated hollow fiber by an atomic layer deposition method to serve as a permeation-resistant protective layer of the sensor;
step five: and (3) removing the anti-permeation film at the middle part of the graphene film by mask processing such as electron beam Exposure (EBL) or photoetching of the sensor plated with the anti-permeation film, and then finishing the manufacture of the whole sensor.
As a further preferable mode, the permeation resistant film is a polyethylene film and a silica film.
Advantageous effects
The anti-permeation high-sensitivity graphene hydraulic sensor and the preparation method thereof can realize stable pressure detection. The external hydraulic pressure change is demodulated by utilizing the interference result of the microstructure of the optical fiber to the light, and the construction and demodulation of an optical fiber F-P cavity are related.
Meanwhile, the invention has the following advantages: (1) the sensor has simple integral structure and is convenient to process and manufacture. (2) The signal transmission of the sensor adopts optical signals, and the anti-electromagnetic interference capability is strong. (3) The sensitivity of the sensor is mainly related to a rear end film of the F-P cavity, and the sensitivity of the sensor is greatly improved by a single-layer or few-layer graphene film structure. The pressure sensitivity of the sensor is 0.01mmHg (4), the sensor is small in size and integrated at the optical fiber head, and the size can be in the micrometer scale. The constructed optical fiber sensor has the characteristics of small volume, flexibility and the like, can finish the detection task (5) in a complex environment, has an anti-permeation film on the surface of the graphene, can well prevent the water leakage phenomenon of the sensor in a liquid environment, and ensures the working capacity of the sensor in measuring hydraulic pressure.
Drawings
Fig. 1 is a schematic structural diagram of a permeation-resistant highly sensitive graphene hydraulic sensor according to the present invention;
FIG. 2 is a schematic diagram of the detection of the sensor of the present invention;
FIG. 3 is a spectrum of a sensor of the present invention;
FIG. 4 is a schematic diagram of the preparation process of the present invention.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings.
Fig. 1 shows a schematic structural diagram of a permeation-resistant high-sensitivity graphene hydraulic sensor according to the present invention, which includes a permeation-resistant film 1, a graphene film 2, a hollow-core optical fiber 3, and a single-mode optical fiber 4, where the hollow-core optical fiber 3 may also be made of a glass tube.
In this embodiment, the hollow-core fiber 3 is taken as an example, the length of the hollow-core fiber 3 as the F-P cavity is 0.1 μm to 1000 μm, the tail end of the hollow-core fiber 3 is also connected with the single-mode fiber 4 by welding, and the length of the single-mode fiber 4 can be determined according to a specific application scenario. And then, transferring the prepared single-layer or few-layer graphene film to the upper end of the hollow optical fiber in a film picking or stamping mode, wherein the single-mode optical fiber, the hollow optical fiber and the graphene film form an optical fiber F-P cavity structure. The polyethylene film and the silicon dioxide film are alternately plated at the port of the optical fiber sensor by an Atomic Layer Deposition (ALD) method to serve as permeation-resistant films of the sensor, the thickness of the single-layer polyethylene film and the silicon dioxide film is 10nm-100nm, and the number of the alternate plating layers is 10-20. After the anti-permeation film is plated, the anti-permeation film at the middle part of the cross section of the sensor is removed by using a photoetching or electron beam exposure mode and the like, the lower graphene film is exposed, and the preparation work of the anti-permeation high-sensitivity graphene hydraulic sensor is finished.
The detection light enters the sensor through the tail end of the optical fiber, the sensor is located in a detected environment, the structure of the F-P cavity is changed due to pressure change in the detected environment, spectral characteristics in the reflected light are changed, and the pressure change of the external environment can be detected in real time through demodulation.
Fig. 2 shows a detection process of the sensor, where 1, 2, and 3 are 3 ports of the circulator, a light source emits a broad-spectrum light, which enters the circulator through the port 1, and then the broad-spectrum light enters the sensor through the port 2, the sensor is in an environment to be detected, a structure of the sensor changes due to a change in a related physical parameter of the environment to be detected, so as to complete modulation of an incident light spectrum, and a reflected light reflected from the sensor carries modulation information to enter a data acquisition system through the port 3 of the circulator for data acquisition and demodulation, thereby achieving a purpose of detecting a corresponding parameter of the environment to be detected.
The wide-spectrum light is incident into the sensor, the sensor structure modulates the incident light under the influence of external environment change, the reflected light carries modulation information and enters the data acquisition module through the circulator, and then detection information is obtained through demodulation.
According to the invention, the external hydraulic pressure change can be effectively measured through the reflection spectrum of the F-P cavity, meanwhile, the short cavity structure is adopted, the spatial resolution of the sensor is very high, the graphene film is adopted as the sensitive film of the sensor, the sensitivity of the sensor is higher, the sensor adopts a structure of alternately overlapping an organic film and an inorganic film in the anti-seepage aspect, the sealing performance is good, the anti-seepage cavity is formed, the optical fiber is adopted as the main structure of the sensor, the mechanical property is good, and the detection work can be completed in a complex environment due to the flexibility, high temperature resistance and strong anti-electromagnetic interference capability of the optical fiber.
FIG. 3 is a calculated spectrum of the sensor, the correlation parameters are respectively F-P cavity length of 30 μm, and the pressure sensitivity of FP is 0.01mmHg by correlation calculation.
The sensor preparation method of the embodiment comprises the following steps:
as shown in fig. 4:
(1) the hollow optical fiber 3 or the capillary glass tube is cut or etched to a suitable length, approximately ranging from 0.1 μm to 1000 μm, and the single mode optical fiber 4 is etched with hydrofluoric acid for surface flatness treatment.
(2) The processed hollow optical fiber 3 or the capillary glass tube is fused with the processed single mode optical fiber 4.
(3) And transferring the single-layer or few-layer graphene film to the other end of the hollow optical fiber or the capillary glass tube in a film picking or poking mode, wherein the graphene film, the hollow optical fiber and the single-mode optical fiber form an optical fiber F-P cavity structure.
(4) And alternately plating a polyethylene film and a silicon dioxide film on the port of the optical fiber sensor by an Atomic Layer Deposition (ALD) method to form a permeation-resistant film so as to ensure that the sensor stably works in a liquid environment.
(5) And removing the anti-permeation film at the central part of the cross section of the sensor in a mask mode such as photoetching or electron beam exposure and the like, and exposing the graphene film at the bottom layer to ensure the sensitivity of the sensor, so that the preparation of the sensor is finished.
In the manufacturing engineering of the sensor, the length of the hollow-core optical fiber 3 needs to be controlled well, the length of the hollow-core optical fiber is taken as the cavity length of the F-P cavity, which has important influence on the spectrum demodulation of the pressure sensor, and the flatness of the rear end graphene film also has great influence on the sensitivity of the sensor, so that certain requirements are required on the selection of the graphene film. The number of layers and the thickness of the permeation-resistant film and the film forming quality have great influence on the permeation-resistant capability of the permeation-resistant film, the preparation process needs to be accurately controlled, and the hydraulic sensor is simple in structure and easy to manufacture.
The relevant principle formula of the F-P cavity used in the present invention is given below:
wherein, IRIs the intensity of reflected light, I0The light intensity of incident light, R is the end face reflectivity, n is the F-P air cavity refractive index, L is the cavity length, and lambda is the wavelength of the incident light.
The signal acquisition and spectral analysis of the present invention is as follows: a beam of broad-spectrum light is injected into the optical fiber, the light is reflected by the F-P cavity to form a backward reflection spectrum, and the wavelength change of the wave crest and the wave trough of the reflection spectrum can be observed generally, or the intermediate value lambda of the wave crest and the wave trough wavelength is selectedQAnd reading the intensity change (considering that the change is approximately linear nearby) to realize signal demodulation. In practice, the waveform can be varied by designing the length of the F-P cavity, and the best demodulation wavelength position is generally selected by this method.
Compared with the existing F-P structure sensor, the high-sensitivity hydraulic sensor is difficult to manufacture, the anti-seepage film design solves the problem that the F-P structure sensor is easy to leak water in a liquid environment, the working stability of the sensor is greatly improved, and the sensor provided by the invention has small volume which can be in millimeter order, so that hydraulic detection tasks in complex environments can be completed.
Compared with the existing sensor, the sensor has the advantages that: the volume is small, the integration level is high, and the optical fiber can stably work in a complex measuring environment due to the flexibility of the optical fiber. The sensor adopts an optical fiber F-P structure, has a simple structure and is convenient to manufacture. A single-layer or few-layer graphene film is used as a rear-end film of the F-P structure, so that the sensitivity is higher, and the detection is more accurate. The addition of the anti-seepage film protects the sensor working in a liquid environment, so that the stability of the sensor is greatly improved.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (6)
1. The utility model provides a high sensitive graphite alkene hydraulic pressure sensor of anti-penetration which characterized in that: the anti-infiltration optical fiber comprises an anti-infiltration film (1), a graphene film (2), a hollow optical fiber (3) and a single-mode optical fiber (4), wherein the hollow optical fiber (3) is of a hollow cylinder structure with an upper opening, a hollow core is arranged in the middle of the hollow optical fiber (3), one end of the hollow optical fiber (3) is connected to the end part of the single-mode optical fiber (4), the graphene film (2) covers the other end of the hollow optical fiber (3), a through hole is formed in the center of the anti-infiltration film (1), the anti-infiltration film (1) covers the graphene film (2) and wraps the end part of the hollow optical fiber (3), and the through hole in the center of the anti-infiltration film (1) is located at the position of the graphene film (2); the graphene film (2), the hollow optical fiber (3) and the single-mode optical fiber (4) form an optical fiber F-P cavity structure.
2. The permeation-resistant high-sensitivity graphene hydraulic sensor according to claim 1, is characterized in that: the through hole in the center of the anti-permeation film (1) is concentric with the graphene film (2) and the hollow core of the hollow-core optical fiber (3).
3. The permeation-resistant high-sensitivity graphene hydraulic sensor according to claim 2, is characterized in that: the diameter of a through hole in the center of the anti-permeation film (1) is smaller than that of the graphene film (2).
4. The permeation-resistant high-sensitivity graphene hydraulic sensor according to claim 1, is characterized in that: the length of the hollow-core optical fiber (3) is 0.1-1000 μm.
5. The processing technology of the permeation-resistant high-sensitivity graphene hydraulic sensor according to any one of claims 1 to 4, characterized by comprising the following steps:
the method comprises the following steps: cutting or corroding the hollow optical fiber (3) into a proper length, and corroding the single-mode optical fiber by using hydrofluoric acid to perform surface flatness treatment;
step two: welding the processed hollow fiber (3) with the processed single-mode fiber (4);
step three: attaching the graphene film (2) to the port of the hollow optical fiber to form a sensor with an optical fiber F-P cavity structure;
step four: alternately plating anti-permeation films (1), polyethylene films and silicon dioxide films at the processed hollow optical fiber port by an atomic layer deposition method to serve as an anti-permeation protective layer of the sensor;
step five: and (3) removing the permeation-resistant film (1) at the middle part of the graphene film (2) by mask processing such as electron beam exposure or photoetching of the sensor plated with the permeation-resistant film (1), and then finishing the manufacture of the whole sensor.
6. The processing technology of the permeation-resistant high-sensitivity graphene hydraulic sensor according to claim 5, is characterized in that: the anti-permeation film (1) is a polyethylene film and a silicon dioxide film.
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Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050062979A1 (en) * | 2003-09-04 | 2005-03-24 | Yizheng Zhu | Optical fiber pressure and acceleration sensor fabricated on a fiber endface |
| CN102591041A (en) * | 2012-03-15 | 2012-07-18 | 电子科技大学 | Integrated type online electro-optic modulator with graphene thin film and D-type optical fiber |
| CN103994851A (en) * | 2014-05-15 | 2014-08-20 | 香港理工大学深圳研究院 | Resonant type Fabry-Perot optical fiber sensor, manufacturing method and air pressure detecting method |
| CN104215368A (en) * | 2014-09-15 | 2014-12-17 | 江苏昂德光电科技有限公司 | F-P cavity optical fiber pressure sensing device and demodulation method thereof |
| CN105300574A (en) * | 2015-11-13 | 2016-02-03 | 常州二维碳素科技股份有限公司 | Graphene pressure sensor, manufacturing method thereof and purpose thereof |
| CN105987784A (en) * | 2015-01-27 | 2016-10-05 | 成都凯天电子股份有限公司 | High-vacuum optical fiber F-P pressure sensor |
| CN106768527A (en) * | 2016-12-30 | 2017-05-31 | 南京信息工程大学 | A kind of Graphene fibre optic compression sensor and preparation method and pressure tester and pressure testing method |
| CN206627147U (en) * | 2017-01-16 | 2017-11-10 | 深圳大学 | A kind of structure of temperature/pressure sensor and the measuring system of temperature and pressure |
| CN110057479A (en) * | 2019-04-17 | 2019-07-26 | 中国地质大学（武汉） | Plating laminar double-layer sensitive film and preparation method for FP chamber fibre optic compression sensor |
| CN110487454A (en) * | 2019-09-18 | 2019-11-22 | 大连理工大学 | A kind of miniature film chip optical fiber end FP pressure sensor, production method and application |
| CN111272330A (en) * | 2020-02-19 | 2020-06-12 | 黑龙江大学 | Optical fiber gas pressure sensor and preparation method thereof |
| JP3231199U (en) * | 2020-08-04 | 2021-03-18 | 北京航空航天大学 | Waveform graphene diaphragm optical fiber FP sound pressure sensor |
| CN112880887A (en) * | 2021-01-12 | 2021-06-01 | 北京航空航天大学 | Vacuum-packaged graphene resonant optical fiber pressure sensor and manufacturing method thereof |
-
2021
- 2021-08-24 CN CN202110977239.4A patent/CN114279619B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050062979A1 (en) * | 2003-09-04 | 2005-03-24 | Yizheng Zhu | Optical fiber pressure and acceleration sensor fabricated on a fiber endface |
| CN102591041A (en) * | 2012-03-15 | 2012-07-18 | 电子科技大学 | Integrated type online electro-optic modulator with graphene thin film and D-type optical fiber |
| CN103994851A (en) * | 2014-05-15 | 2014-08-20 | 香港理工大学深圳研究院 | Resonant type Fabry-Perot optical fiber sensor, manufacturing method and air pressure detecting method |
| CN104215368A (en) * | 2014-09-15 | 2014-12-17 | 江苏昂德光电科技有限公司 | F-P cavity optical fiber pressure sensing device and demodulation method thereof |
| CN105987784A (en) * | 2015-01-27 | 2016-10-05 | 成都凯天电子股份有限公司 | High-vacuum optical fiber F-P pressure sensor |
| CN105300574A (en) * | 2015-11-13 | 2016-02-03 | 常州二维碳素科技股份有限公司 | Graphene pressure sensor, manufacturing method thereof and purpose thereof |
| CN106768527A (en) * | 2016-12-30 | 2017-05-31 | 南京信息工程大学 | A kind of Graphene fibre optic compression sensor and preparation method and pressure tester and pressure testing method |
| CN206627147U (en) * | 2017-01-16 | 2017-11-10 | 深圳大学 | A kind of structure of temperature/pressure sensor and the measuring system of temperature and pressure |
| CN110057479A (en) * | 2019-04-17 | 2019-07-26 | 中国地质大学（武汉） | Plating laminar double-layer sensitive film and preparation method for FP chamber fibre optic compression sensor |
| CN110487454A (en) * | 2019-09-18 | 2019-11-22 | 大连理工大学 | A kind of miniature film chip optical fiber end FP pressure sensor, production method and application |
| CN111272330A (en) * | 2020-02-19 | 2020-06-12 | 黑龙江大学 | Optical fiber gas pressure sensor and preparation method thereof |
| JP3231199U (en) * | 2020-08-04 | 2021-03-18 | 北京航空航天大学 | Waveform graphene diaphragm optical fiber FP sound pressure sensor |
| CN112880887A (en) * | 2021-01-12 | 2021-06-01 | 北京航空航天大学 | Vacuum-packaged graphene resonant optical fiber pressure sensor and manufacturing method thereof |
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