CN206906303U - Multicomponent gas sensor - Google Patents

Multicomponent gas sensor Download PDF

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Publication number
CN206906303U
CN206906303U CN201720740078.6U CN201720740078U CN206906303U CN 206906303 U CN206906303 U CN 206906303U CN 201720740078 U CN201720740078 U CN 201720740078U CN 206906303 U CN206906303 U CN 206906303U
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China
Prior art keywords
heaters
gas
sensing element
gas sensor
metal oxide
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CN201720740078.6U
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Chinese (zh)
Inventor
汪晓波
郭功剑
吕晶
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Hangzhou Mai Peak Polytron Technologies Inc
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Hangzhou Mai Peak Polytron Technologies Inc
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Abstract

A kind of multicomponent gas sensor of the utility model design, including ECU, heating unit, Pt10 heaters and metal oxide sensing element are connected with ECU, heating unit is connected with Pt10 heaters, described metal oxide sensing element is laid in ceramic heat substrate, and ceramic heat substrate is bonded with Pt10 heaters, and described metal sensing element is multiple.In this configuration, it is critical piece by the use of Pt10 as heater, then it by its heating-up temperature value of its resistance value Real-time Feedback, can pass through the various composition of the tested gas of metal oxide sensing element detection as thermistor.

Description

Multicomponent gas sensor
Technical field
This utility patent is related to gas sensor domain, can more particularly to detect the sensor neck of multicomponent gas simultaneously Domain, in particular to the multicomponent gas sensor and its gas detection method of a kind of multi-temperature timesharing measurement.
Background technology
Gas sensor is that a kind of be converted into the information such as the composition of gas, concentration can be by personnel, instrument and meter, calculating The device for the information that machine etc. utilizes, certain gas volume fraction can be transformed into corresponding electric signal.Gas sensor for The response curve of different gas be sensor detection object gas composition and concentration basic foundation, gas sensor output by Two key parameters of composition and concentration of gas influence, and gas sensor has different curves to ring for different gas componants Answer rate of change, gas concentration is measurand, influence be curvilinear motion depth and amplitude.How a sensor is used To detect multicomponent gas, turn into a big focus of current gas sensor domain.There are various gases on the market now Sensor, using also quite extensive.But the gas sensor of in the market can only measure single type gas, for multi-component gas Body needs more gas sensor combinations just to measure, and multicomponent gas can be measured simultaneously relative to single gas sensor For, cost is greatly improved, and the volume of sensor is also relative to be become very large.This utility patent is directed to this problem, according to not With the gas responsiveness different to gas sensor at different temperature, employ using a gas sensor in difference At a temperature of timesharing measurement multicomponent gas detection method, multiple gases can be detected simultaneously by realizing single sensor, greatly Ground improves the cost performance and integrated level and the relative volume for reducing the gas sensor of the gas sensor.
Utility model content
To solve the above problems, this utility patent provides a kind of small volume, integration degree is high, has unique dimensionality reduction The detection of gas with multiple constituents and its gas detection method of algorithm.
A kind of multicomponent gas sensor of this practical design, including ECU, it is single that heating is connected with ECU Member, Pt10 heaters and metal oxide sensing element, heating unit are connected with Pt10 heaters, described metal oxide Sensing element is laid in ceramic heat substrate, and ceramic heat substrate is bonded with Pt10 heaters, and described metal is sensitive Element is multiple.In this configuration, it is critical piece by the use of Pt10 as heater, it can pass through it as thermistor Its heating-up temperature value of resistance value Real-time Feedback, the various composition of tested gas is then detected by metal oxide sensing element.
Further scheme is that described Pt10 heaters are membrane type structure.The quantity of described metal sensing element For 3, described heating unit and ECU are made up of MCU and the PWM of periphery control power supply circuits.
This multicomponent gas sensor, its metal oxide sensing element, which must operate under high temperature, could be carried out accurately Gasmetry, its surface area is bigger, thickness is smaller detects sensitiveer, therefore corresponding Pt10 heaters also design of thin to gas Film-type structure.And Pt10 can produce heat as load energization, therefore we control it by controlling Pt10 conduction time Heating-up temperature, and Pt10 enough detects the i.e. real-time resistance of the temperature of its own in real time as temperature sensor and can in itself, from And feed back to heating control circuit and form closed-loop control.
A kind of gas detection method using such as above-mentioned multicomponent gas sensor, by the temperature for controlling Pt10 heaters So that different metal sensing elements makes corresponding reaction to corresponding gas, then exported from metal sensing element Data, and the primary data to obtaining carries out dimensionality reduction computing, extract characteristic signal, the final species for calculating detection gas and dense Degree.
Further scheme is that the temperature of the control Pt10 heaters is the temperature of time-division transfer Pt10 heaters, i.e., Within a certain period of time so that Pt10 heaters are maintained in a temperature, following sessions are maintained in other temperature.
Further scheme is that described dimensionality reduction computing uses equation below:
Eigenmatrix
Wherein X is the matrix of sensor, and Xnn is the element of eigenmatrix, is obtained according to metal sensing element material property;
Described feature extraction uses equation below:
Dimensionality reduction extracts
Wherein S1, S2, S3 are the readings of three metal sensing elements, by dimensionality reduction extract to obtain element Ya in matrix Y, Yb、Yc;
Final calculating gas and concentration use equation below:
Result of calculation
Wherein K is calibration coefficient, and C is corresponding gas concentration.
Compared with prior art, this practicality have the advantage that for:
Because this practicality is using the structure of the single multiple metal sensing elements of gas sensor laying, while further make By the use of Pt10 as heating and temperature control critical piece, the volume and effective detection rate of sensor are greatly reduced, has reached single and has only passed Sensor detects the effect of multiple gases component, greatly reduces the cost of sensor, and sensor cost performance has very big carry Rise, sensor integration degree greatly improves, and dramatically reduces the volume of sensor.On the other hand, this practicality have also been devised special Dimensionality reduction computation rule, while the data of three metal sensing elements are read, and it is effectively handled, it is effective so as to reach Gas component purpose is distinguished, good with gas-selectively, gas sensor domain has very big versatility and ductility, has It is widely applied.
Brief description of the drawings
Fig. 1 is the structural representation of gas sensor Pt10 heaters and metal oxide metal sensing element.
Fig. 2 is gas sensor basic function module schematic diagram.
Fig. 3 is that the timesharing of gas sensor multi-temperature detects basic schematic diagram.
Embodiment
Below in conjunction with the accompanying drawing in this practical embodiment, the technical scheme in this practical embodiment is carried out clear, complete Site preparation describes.
Embodiment 1
Fig. 1~3 and this practical optional embodiment is following description described to instruct those skilled in the art how real Apply and reproduce this practicality.In order to instruct this practical technique scheme, simplify or eliminate some conventional aspects.People in the art Member is it should be appreciated that being derived from the deformation of these embodiments or replacing in this practical scope.Those skilled in the art should Understanding following characteristics can combine to form multiple modifications of this practicality in a variety of ways.Thus, this practicality is not limited to down Optional embodiment is stated, and is only limited by claim and their coordinate.
The multicomponent gas sensor of the present embodiment description, including ECU, be connected with ECU heating unit, Pt10 heaters 1 and metal oxide sensing element 3, heating unit are connected with Pt10 heaters 1, described metal oxide Sensing element 3 is laid in ceramic heat substrate 2, and ceramic heat substrate 2 is bonded with Pt10 heaters 1, and described metal Sensing element 3 is 3.Wherein described Pt10 heaters 1 are membrane type structure.Described heating unit and ECU by MCU and the PWM of periphery control power supply circuit compositions.
Using the gas detection method of such as above-mentioned multicomponent gas sensor, by the temperature for controlling Pt10 heaters Different metal sensing elements make corresponding reaction to corresponding gas, and output number is then obtained from metal sensing element According to, and the primary data to obtaining carries out dimensionality reduction computing, extracts characteristic signal, the final species and concentration for calculating detection gas.
The temperature of the control Pt10 heaters is the temperature of time-division transfer Pt10 heaters, i.e., makes within a certain period of time Obtain Pt10 heaters to be maintained in a temperature, following sessions are maintained in other temperature.
Described dimensionality reduction computing uses equation below:
Eigenmatrix
Wherein X is the matrix of sensor, and Xnn is the element of eigenmatrix, is obtained according to metal sensing element material property;
Described feature extraction uses equation below:
Dimensionality reduction extracts
Wherein S1, S2, S3 are the readings of three metal sensing elements, by dimensionality reduction extract to obtain element Ya in matrix Y, Yb、Yc;
Final calculating gas and concentration use equation below:
Result of calculation
Wherein K is calibration coefficient, according to the material of metal sensing element, the error of electronic equipment, the characteristic of object gas Obtain.C is corresponding gas concentration.
During work:The multicomponent gas sensor detecting method of described multi-temperature timesharing inspection is by described automatically controlled list The peripheral power supply circuit of MCU output pwm signals control heating unit in member, by controlling the dutycycle in power-up period, comes To described Pt10 heating installation power supplies, described Pt10 heaters are thermistor in itself, and it, which can be powered, produces heat conduct Heater, described ECU can be also fed back to by its resistance value and calculates the temperature for appearing in described Pt10 heaters Value.As shown in Fig. 3, PWM export ratios power-on time is adjusted come described Pt10 heaters by described ECU Reach target temperature.And heating source of the described Pt10 heaters as described metal oxide sensing element so that institute The metal oxide sensing element stated possesses gas detection function, it comprises three different metal sensing elements, for not Same gas has different response changes, and each metal sensing element has different resistance changes, passes through described electricity The resistance signal that unit gathers three metal sensing elements is controlled, obtains three measured values.Then using three metal sensing elements as Reference axis establishes three-dimensional system of coordinate in space, by described multicomponent gas concentration computation model, to gas sensor Magnanimity output signal carries out dimensionality reduction, therefrom extracts characteristic signal, and final acquisition result is calculated for different gas.

Claims (3)

1. a kind of multicomponent gas sensor, including ECU, it is characterized in that being connected with heating unit, Pt10 on ECU Heater and metal oxide sensing element, heating unit are connected with Pt10 heaters, described metal oxide sensing element In the ceramic heat that is laid in substrate, and ceramic heat substrate is bonded with Pt10 heaters, and the sensitive member of described metal oxide Part is multiple.
2. multicomponent gas sensor according to claim 1, it is characterized in that described Pt10 heaters are film-type knot Structure.
3. multicomponent gas sensor according to claim 1 or 2, it is characterized in that the quantity of described metal sensing element For 3, described heating unit and ECU are made up of MCU and the PWM of periphery control power supply circuits.
CN201720740078.6U 2017-06-23 2017-06-23 Multicomponent gas sensor Active CN206906303U (en)

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Application Number Priority Date Filing Date Title
CN201720740078.6U CN206906303U (en) 2017-06-23 2017-06-23 Multicomponent gas sensor

Publications (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107478687A (en) * 2017-06-23 2017-12-15 杭州麦乐克科技股份有限公司 Multicomponent gas sensor and its gas detection method
CN110031591A (en) * 2019-04-19 2019-07-19 东北大学 A kind of micro-nano gas sensor array dynamic testing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107478687A (en) * 2017-06-23 2017-12-15 杭州麦乐克科技股份有限公司 Multicomponent gas sensor and its gas detection method
CN110031591A (en) * 2019-04-19 2019-07-19 东北大学 A kind of micro-nano gas sensor array dynamic testing method

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PE01 Entry into force of the registration of the contract for pledge of patent right

Denomination of utility model: A multi-component gas sensor and a gas detection method

Effective date of registration: 20181228

Granted publication date: 20180119

Pledgee: Hangzhou United Rural Commercial Bank, Limited by Share Ltd branch of science and technology

Pledgor: Hangzhou Mai peak Polytron Technologies Inc

Registration number: 2018330000534

PE01 Entry into force of the registration of the contract for pledge of patent right
PC01 Cancellation of the registration of the contract for pledge of patent right

Date of cancellation: 20210425

Granted publication date: 20180119

Pledgee: Hangzhou United Rural Commercial Bank Limited by Share Ltd. branch of science and technology

Pledgor: HANGZHOU MULTI IR TECHNOLOGY Co.,Ltd.

Registration number: 2018330000534

PC01 Cancellation of the registration of the contract for pledge of patent right