CN205562090U - Pressure sensor - Google Patents

Pressure sensor Download PDF

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Publication number
CN205562090U
CN205562090U CN201620019094.1U CN201620019094U CN205562090U CN 205562090 U CN205562090 U CN 205562090U CN 201620019094 U CN201620019094 U CN 201620019094U CN 205562090 U CN205562090 U CN 205562090U
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circuit
circuit layer
pressure sensor
stereochemical structure
substrate
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CN201620019094.1U
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金虎
尉长虹
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Changzhou Two-Dimension Photoelectric Technology Co Ltd
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Changzhou Two-Dimension Photoelectric Technology Co Ltd
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Abstract

The utility model discloses a pressure sensor, including last basement, lower basement, body circuit layer and extraction electrode, going up the basement and being elasticity organic material with lower basement, it simultaneously is the same spatial structure, and has spatial structure's one side to set up relatively, the body circuit layer is flexible, sets up conducting material on it and makes the conducting wire layer, body circuit layer clamp is established in last basement under and between the basement, and the planar circuit graphic structure covers on the spatial structure of last basement and basement down functionally, just distinguishes extraction electrode at the both ends of body circuit layer. The utility model discloses an apply the three -dimensional type change of strength production substrate at the flexible substrate surface of sensor, the three -dimensional type of substrate becomes the three -dimensional type of circuit structure formation that is arranged in the solid of substrate simultaneously and becomes to formation resistance changes, and the change calculates the pressure value according to resistance, simple structure, and measuring result is accurate, and sensitivity is high moreover.

Description

A kind of pressure sensor
Technical field
The utility model relates to a kind of pressure sensor.
Background technology
Pressure sensor is widely used in intelligence manufacture industry, but existing pressure sensor, sensing mode and internal structure are the most complicated, need far more precise electronic control system, production cost is too high, and size thickness etc. are the most restricted, it is impossible to make ultra-thin pressure sensor, sensitivity is also extremely limited, and cannot accurately record for accurate slight pressure.
Utility model content
The purpose of this utility model is to provide the pressure sensor of a kind of energy Sensitive Detection slight pressure.
The technical scheme realizing the utility model purpose is a kind of pressure sensor, including upper substrate, lower substrate, body circuit layer and extraction electrode;Described upper substrate and lower substrate are elastic organic material, and its one side is identical stereochemical structure, and has the one side of stereochemical structure to be oppositely arranged;Described body circuit layer is flexible, it arranges conductive material and makes conductive circuit layer;Described body circuit layer is folded between substrate and lower substrate, and uniform fold is in the stereochemical structure of upper substrate and lower substrate, and the extraction electrode respectively at the two ends of body circuit layer.
Described upper substrate and under the cross section of suprabasil stereochemical structure be continuous print V-arrangement;Or cross section is continuous print U-shaped;Or cross section is continuous print sinusoidal waveform;Or stereochemical structure is equally distributed triangular pyramid;Or stereochemical structure is equally distributed equivalently-sized sphere stereoscopic structure;Or the combination of aforementioned stereochemical structure;Aforementioned stereochemical structure is designed to equivalently-sized or that size is different continuous structure according to functional requirement.
The elastic modelling quantity of described upper substrate and lower substrate is 0.002~0.05Gpa, and Poisson's ratio is 0.1~1, and thickness is for for 0.02~5mm.
The conductive circuit layer of described body circuit layer is graphene conductive circuit;Or CNT carbon-based conductive circuit;Or metal conductive oxide circuit;Or metal and carbon back composite conducting circuit;Or organic conductive material conducting wire;Or the composite conducting circuit of organic conductive material and carbon-based material;Or organic conductive material and metal composite conducting wire.
Described extraction electrode is the electrode plating conducting film at the bottom of elastic carbon back conductive electrode or metal electrode or FPC electrode or organic group.
The conducting wire of described body circuit layer includes power supply signal circuit, signal acquisition circuit, D/A converting circuit, MCU governor circuit and signal output apparatus;Described power supply signal circuit is that MCU governor circuit is powered, and provides signal source for pressure sensor;Described signal acquisition circuit gathers the resistance change that body circuit layer deformation brings;Described D/A converting circuit carries out digital-to-analogue conversion to the data of signal acquisition circuit collection, these data is passed to MCU governor circuit and is analyzed, and analysis result is exported to terminal device master control by signal output apparatus.
After have employed technique scheme, the utility model has following positive effect: (1) the utility model produces base material solid type by the strength being applied to the flexible substrates surface of sensor and becomes, base material solid type becomes the three-dimensional circuit structure being simultaneously positioned in base material and forms three-dimensional deformation, thus form resistance variations, constant current or constant voltage or square wave or the power supply of other waveforms is loaded by electrode, measure current change quantity or voltage variety i.e. can obtain resistance change, by calculating the elastic modelling quantity characteristic of material and demarcating the type variable of unit resistance variable quantity, the force value received can be calculated, simple in construction, measurement result is accurate, and it is highly sensitive.
(2) the utility model is by the regulation stereochemical structure of body circuit and the characteristic of substrate and thickness structure, can obtain the sensor of different pressures resolution ratio.
(3) a kind of preferred version of the present utility model is that body circuit uses graphene film, conduct electricity very well, thickness is the thinnest, therefore ultra-thin pressure sensor can be obtained, and Graphene is the highest to the sensitivity of pressure, the resolution ratio of pressure sensor can measure the pressure of 0.01g~200KG, it is achieved that the detection to small pressure.
Accompanying drawing explanation
In order to make content of the present utility model be easier to be clearly understood, below according to specific embodiment and combine accompanying drawing, the utility model is described in further detail, wherein
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the structural representation of deformation after the utility model presses.
Fig. 3 is the circuit diagram of body circuit layer.
Accompanying drawing is numbered:
Upper substrate 1, lower substrate 2, body circuit layer 3, power supply signal circuit 31, signal acquisition circuit 32, D/A converting circuit 33, MCU governor circuit 34, signal output apparatus 35, extraction electrode 4, terminal device master control 5.
Detailed description of the invention
(embodiment 1)
Seeing Fig. 1, a kind of pressure sensor of the present embodiment, including upper substrate 1, lower substrate 2, body circuit layer 3 and extraction electrode 4;Upper substrate 1 and lower substrate 2 are elastic organic material, and its one side is identical stereochemical structure, and has the one side of stereochemical structure to be oppositely arranged;Body circuit layer 3 is flexible, it arranges conductive material and makes conductive circuit layer;Body circuit layer 3 is folded between substrate 1 and lower substrate 2, and uniform fold is in the stereochemical structure of upper substrate 1 and lower substrate 2, and the extraction electrode 4 respectively at the two ends of body circuit layer 3.The cross section of the stereochemical structure in upper substrate 1 and lower substrate 2 is the V-arrangement that continuous print is equivalently-sized;Or cross section is the U-shaped that continuous print is equivalently-sized;Or cross section is the sinusoidal waveform that continuous print is equivalently-sized;Or stereochemical structure is equally distributed equivalently-sized triangular pyramid;Say that stereochemical structure is equally distributed equivalently-sized sphere.The elastic modelling quantity of upper substrate 1 and lower substrate 2 is 0.002~0.05Gpa, and Poisson's ratio is 0.1~1, and thickness is 0.02~5mm, and hardness number is 0~20 degree.The conductive circuit layer of body circuit layer 3 is graphene conductive circuit;Or CNT carbon-based conductive circuit;Or metal conductive oxide circuit;Or metal and carbon back composite conducting circuit;Or organic conductive material conducting wire;Or the composite conducting circuit of organic conductive material and carbon-based material;Or organic conductive material and metal composite conducting wire.Extraction electrode 4 is the electrode plating conducting film at the bottom of elastic carbon back conductive electrode or metal electrode or FPC electrode or organic group.
See that Fig. 3, the conducting wire of body circuit layer 3 include power supply signal circuit 31, signal acquisition circuit 32, D/A converting circuit 33, MCU governor circuit 34 and signal output apparatus 35;Power supply signal circuit 31 is powered for MCU governor circuit 34, provides signal source for pressure sensor;Signal acquisition circuit 32 gathers the resistance change that body circuit layer 3 deformation brings;The data that signal acquisition circuit 32 is gathered by D/A converting circuit 33 carry out digital-to-analogue conversion, these data are passed to MCU governor circuit 34 and is analyzed, and analysis result is exported to terminal device master control 5 by signal output apparatus 35.Power supply signal circuit 31 loads constant voltage or constant current or square-wave signal source to sensor;After sensor is under pressure (as in figure 2 it is shown, finger pressing), 3 deformation layer by layer of body circuit, signal acquisition circuit 32 gathers the resistance change that body circuit layer 3 deformation brings;The data that signal acquisition circuit 32 is gathered by D/A converting circuit 33 carry out digital-to-analogue conversion, these data are passed to MCU governor circuit 34 be analyzed, calculate change in resistance amount, the material characteristic parameter become according to base material type, obtaining force value by normal pressure calibration, force value is exported to terminal device master control 5 by signal output apparatus 35.
Particular embodiments described above; the purpose of this utility model, technical scheme and beneficial effect are further described; it is it should be understood that; the foregoing is only specific embodiment of the utility model; it is not limited to the utility model; all within spirit of the present utility model and principle, any modification, equivalent substitution and improvement etc. done, within should be included in protection domain of the present utility model.

Claims (6)

1. a pressure sensor, it is characterised in that: include substrate (1), lower substrate (2), body circuit layer (3) and extraction electrode (4);Described upper substrate (1) and lower substrate (2) are elastic organic material, and its one side is identical stereochemical structure, and has the one side of stereochemical structure to be oppositely arranged;Described body circuit layer (3) is flexible, it arranges conductive material and makes conductive circuit layer;Described body circuit layer (3) is folded between substrate (1) and lower substrate (2), uniform fold is in the stereochemical structure of upper substrate (1) and lower substrate (2), and the extraction electrode (4) respectively at the two ends of body circuit layer (3).
A kind of pressure sensor the most according to claim 1, it is characterised in that: the cross section of the stereochemical structure on described upper substrate (1) and lower substrate (2) is continuous print V-arrangement;Or cross section is continuous print U-shaped;Or cross section is continuous print sinusoidal waveform;Or stereochemical structure is equally distributed triangular pyramid;Or stereochemical structure is equally distributed equivalently-sized sphere stereoscopic structure;Or the combination of aforementioned stereochemical structure;Aforementioned stereochemical structure is designed to equivalently-sized or that size is different continuous structure according to functional requirement.
A kind of pressure sensor the most according to claim 2, it is characterized in that: the elastic modelling quantity of described upper substrate (1) and lower substrate (2) is 0.002~0.05Gpa, Poisson's ratio is 0.1~1, and thickness is 0.02~5mm, and hardness number is 0~20 degree.
A kind of pressure sensor the most according to claim 3, it is characterised in that: the conductive circuit layer of described body circuit layer (3) is graphene conductive circuit;Or CNT carbon-based conductive circuit;Or metal conductive oxide circuit;Or metal and carbon back composite conducting circuit;Or organic conductive material conducting wire;Or the composite conducting circuit of organic conductive material and carbon-based material;Or organic conductive material and metal composite conducting wire.
A kind of pressure sensor the most according to claim 4, it is characterised in that: described extraction electrode (4) be the electrode of plating conducting film at the bottom of elastic carbon back conductive electrode or metal electrode or FPC electrode or organic group.
A kind of pressure sensor the most according to claim 5, it is characterised in that: the conducting wire of described body circuit layer (3) includes power supply signal circuit (31), signal acquisition circuit (32), D/A converting circuit (33), MCU governor circuit (34) and signal output apparatus (35);Described power supply signal circuit (31) is MCU governor circuit (34) power supply, provides signal source for pressure sensor;Described signal acquisition circuit (32) gathers the resistance change that body circuit layer (3) deformation brings;The data that signal acquisition circuit (32) is gathered by described D/A converting circuit (33) carry out digital-to-analogue conversion, these data being passed to MCU governor circuit (34) be analyzed, analysis result is exported to terminal device master control (5) by signal output apparatus (35).
CN201620019094.1U 2016-01-07 2016-01-07 Pressure sensor Active CN205562090U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201620019094.1U CN205562090U (en) 2016-01-07 2016-01-07 Pressure sensor

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Application Number Priority Date Filing Date Title
CN201620019094.1U CN205562090U (en) 2016-01-07 2016-01-07 Pressure sensor

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105509937A (en) * 2016-01-07 2016-04-20 常州二维光电科技有限公司 Pressure sensor, pressure detection method and manufacturing process
TWI679405B (en) * 2017-09-27 2019-12-11 日商佳能化成股份有限公司 Pressure sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105509937A (en) * 2016-01-07 2016-04-20 常州二维光电科技有限公司 Pressure sensor, pressure detection method and manufacturing process
CN105509937B (en) * 2016-01-07 2018-12-25 常州二维光电科技有限公司 A kind of pressure sensor, pressure detection method and manufacturing process
TWI679405B (en) * 2017-09-27 2019-12-11 日商佳能化成股份有限公司 Pressure sensor

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