CN110207862B - Tactile pressure sensor based on electrical impedance tomography and signal acquisition method - Google Patents

Tactile pressure sensor based on electrical impedance tomography and signal acquisition method Download PDF

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CN110207862B
CN110207862B CN201910450458.XA CN201910450458A CN110207862B CN 110207862 B CN110207862 B CN 110207862B CN 201910450458 A CN201910450458 A CN 201910450458A CN 110207862 B CN110207862 B CN 110207862B
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孙江涛
徐立军
陆方皞
田文斌
索鹏
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Beihang University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/14Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/18Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

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Abstract

The invention provides a tactile pressure sensor based on electrical impedance tomography and a signal acquisition method, and belongs to the field of sensor design and test. The excitation layer of the sensor is prepared by high-conductivity fabric coated with nonpolar polymer, the detection layer is prepared by low-conductivity fabric coated with weak polar polymer, the edge of the detection layer is provided with an electrode array, and two electrodes are selected during measurement, wherein one electrode is used as a grounding point, and the other electrode is used as a measurement point. The invention carries out measurement by gating different two electrodes, and calculates the size and position measurement of the applied pressure based on electrical impedance tomography. The invention can realize high-precision distributed sensing of the tactile skin characteristics and the tactile forms of the robot, and the realized sensor has the advantages of simple structure, high reliability, low power consumption, good flexibility and low price, and improves the simplicity and the accuracy of pressure and position measurement.

Description

Tactile pressure sensor based on electrical impedance tomography and signal acquisition method
Technical Field
The invention belongs to the field of sensor design and test, and relates to a novel pressure sensor design and a novel surface touch pressure size and position measuring method based on electrical impedance tomography.
Background
Pressure is a main characteristic of touch, and tactile imaging targeting measurement of pressure or stress distribution on an object of interest is an important component of tactile sensing technology, and imaging type tactile sensors are also one of the main categories of tactile sensors, such as: references [1] to [2 ]. The tactile imaging technology aiming at pressure sensing and pressure size detection has important value for revealing accurate information of sensing behaviors (grasping and holding power control, manual guiding and flexible manipulation and the like) and behavior sensing (contact judgment, contact point positioning, object shape sensing and the like) in the robot tactile sensing technology.
The tactile imaging technology based on pressure measurement is a research hotspot in the field of tactile sensing, and the array sensing element is mainly used for measuring the pressure distribution of a contact area, so that the technology has important significance in the aspects of robot skin and palm sensing, arm control and the like. Based on the difference between the sensing principle and the method, the first table shows the touch sensing technology and the corresponding sensing principle, material and advantage-disadvantage comparison thereof, which are commonly studied at home and abroad (reference documents [3] to [4 ]).
Comparison of sensing principles, materials, advantages and disadvantages of the epi-tactile sensing technique
Figure GDA0002494047130000011
Figure GDA0002494047130000021
The existing touch imaging technology adopts an array structure of pressure-sensitive elements arranged in a sensing area, the array structure needs a complex manufacturing process and imposes limitation on the shape design of a sensor, and the pressure measurement of a complex three-dimensional structure on the surface of the skin of a robot is difficult to meet.
Reference documents:
[1]Dahiya R S,Metta G,Valle M,et al.Tactile Sensing—From Humans toHumanoids[J].IEEE Transactions on Robotics,2010,26(1):1-20.
[2]Tiwana M I,Redmond S J,Lovell N H.A review of tactile sensingtechnologies with applications in biomedical engineering[J].Sensors andActuators:A Physical,2012,179:17-31.
[3]Silvera-Tawil D,Rye D,Soleimani M,et al.ElectricalImpedanceTomography for Artificial Sensitive Robotic Skin:A Review[J].IEEE SensorsJournal,2015,15(4):2001-2016.
[4] the current application situation of the touch sensor for the intelligent robot is [ J ] modern manufacturing engineering, 2018.
Disclosure of Invention
The invention provides a novel tactile sensor based on an electrical impedance tomography principle and utilizing an electromechanical coupling effect of a double-layer conductive fabric material, aiming at solving the problems that the existing tactile imaging technology is difficult to meet the pressure measurement of a complex three-dimensional structure on the surface of the skin of a robot by adopting a mode of arranging pressure-sensitive elements with an array structure in an induction area, and the traditional tactile material tactile imaging sensor has complex process and high cost.
The invention provides a tactile pressure sensor based on electrical impedance tomography, which comprises: the device comprises an excitation layer positioned on the upper layer and connected with an excitation signal source, a detection layer positioned on the edge of the lower layer and provided with an electrode array, and an insulating layer positioned between the excitation layer and the detection layer. The preparation material of the excitation layer is a high-conductivity fabric coated with a nonpolar polymer, the dielectric constant epsilon of the nonpolar polymer is 0-2, and the conductivity of the high-conductivity fabric is 102—104Within the range of S/cm. The preparation material of the detection layer is a low-conductivity fabric coated with a weak-polarity polymer, the dielectric constant epsilon of the weak-polarity polymer is 3-10, and the conductivity of the low-conductivity fabric is in the range of 0.5-10S/cm. The excitation layer and the detection layer realize a zero-pressure non-contact state through the insulating layer. N electrodes are uniformly arranged on the edge of the detection layer, and N is a positive integer greater than 8. During measurement, two electrodes are selected, one as a grounding point and the other as a measurement point.
The N electrodes of the detection layer are respectively connected with one input end of a channel selector, and the output end of the channel selector is connected with a voltage measuring device. After the exciting layer applies exciting current, the channel selector gates two channels in turn at a set rate before and after applying pressure, and the voltage signal between the two electrodes is measured.
The signal acquisition method of the tactile pressure sensor based on the electrical impedance tomography comprises the following steps:
the measurement process comprises the following steps: during the application of a certain pressure, the multi-frequency sinusoidal current signals with different frequencies are used for sequential excitation, and the excitation is carried out at a set fixed speed rateSub-gating (1,2) (1,3) … (1, N) (2,3) (2,4) … (2, N) (3,4) … (N-1, N) to measure voltage signals, and measuring each group of electrodes to obtain a potential result Ec1,Ec2……Ecn
Decoupling process: establishing a linear equation according to a calculation formula of the voltage difference between the two electrodes, and solving the contact resistance RpWith the sensing layer connected in series to the impedance R in the circuitxyAnd Cxy
When the sensor is used for measurement, the contact impedance is set to be RpWhen the detection layer is contacted at a certain position (x, y), the resistance of the detection layer connected in series to the circuit is RxyAnd Cxy,RxyIs the real part of the impedance, CxyFor the imaginary part of the impedance, the potential E between the two electrodescThe following were used:
Figure GDA0002494047130000031
where I is the current of the excitation signal, j represents the imaginary part of the signal, w is the angular frequency of the excitation signal, and w is related to the excitation signal frequency f by w 2 pi f.
The magnitude of the applied pressure solves the process: due to contact resistance RpAnd an applied force P, denoted as Rp=αPγWherein α and gamma are constants determined by the material properties of the sensor, by acquiring R during the application of pressure during the measurement process and the decoupling processpChange of relative value of (c) to the impedance RpFitting with the pressure P, and calculating the size of the pressure P;
position solving process of applied pressure: obtaining the elements in the matrix psi according to the potential result of the measuring process
Figure GDA0002494047130000034
Potential E measured from selected electrodes i and jcObtained, calculated as follows:
Figure GDA0002494047130000032
calculating sensitivity matrix S corresponding to sensor image, reflecting measurement voltage change caused by unit conductivity change on each pixel point, and measuring pixel point position (x, y) through electrodes i and j to obtain mapping value Si,j(x, y) is as follows:
Figure GDA0002494047130000033
where p (x, y) represents the sensor image shape as a function of the pixel point location (x, y), E0i(x, y) represents a voltage detected at the position (x, y) of the electrode i in the absence of touch pressure, E0j(x, y) represents a voltage detected at the position (x, y) of the electrode j without touch-down, and the voltage Ii、IjRepresents the excitation current at the electrodes i, j, respectively;
calculating the gray matrix g ═ S-1Ψ, and determining the location and contact area of the pressure based on the maxima and gradient maxima in g.
Compared with the prior art, the invention has the following advantages: (1) the sensor design is based on the electromechanical coupling effect of the double-layer electric conductor, utilizes a bimodal coupling measurement mode of capacitance and electrical impedance, optimizes the process of decoupling the pressure and the position, and reduces the influence of pressure position change on the pressure measurement precision. (2) The measurement of the invention is based on the edge detection of the electrical impedance imaging technology, and has the characteristics of simple structure and low power consumption of the sensor compared with the traditional distributed measurement technology. (3) The data of the invention can be used for image reconstruction and has the characteristic of visual measurement result. The invention improves the sensitivity of the sensor and the simplicity of pressure estimation by developing the touch imaging sensor and the method with flexible volume, simple structure and high reliability.
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FIG. 1 is a schematic diagram of a pressure sensor design and pressure magnitude and position measurement based on electrical impedance tomography of the present invention;
FIG. 2 is a schematic diagram of the physical structure of a pressure sensor designed according to this invention;
FIG. 3 is a schematic diagram of signal acquisition in accordance with the present invention;
fig. 4 is an equivalent circuit diagram of the signal acquisition of the present invention.
Detailed Description
The present invention will be described in further detail and with reference to the accompanying drawings so that those skilled in the art can understand and practice the invention.
The invention adopts an electrical impedance imaging technology, reduces the structural complexity of the distributed pressure sensor by designing an electromechanical coupling effect based on a double-layer conductive fabric and providing a corresponding tactile imaging method, achieves the effects of high efficiency and low power consumption, and has the advantages of simple structure, high reliability, low power consumption, good flexibility and low price.
As shown in fig. 1, the implementation of the present invention includes three major parts, firstly, the design of the tactile pressure sensor, secondly, the signal acquisition by the designed sensor, and finally, the processing of the acquired multi-frequency voltage signal to obtain the pressure magnitude and position. The touch pressure sensor converts a touch pressure signal into a voltage signal which can be measured based on the electromechanical coupling effect of the double-layer conductive fabric, can further input the measured voltage signal into a direct image reconstruction algorithm to solve the inverse problem to obtain the potential distribution based on the boundary condition, and finally realizes the image visualization of the pressure distribution by utilizing the mapping from the potential to the pressure. The following describes the implementation of each part in turn.
Fig. 2 is a schematic diagram of a physical structure of the tactile pressure sensor of the present invention, which mainly includes an excitation layer, a detection layer, and an insulation layer. The excitation layer on the upper layer is connected with an excitation signal source, and the edge of the detection layer on the lower layer is provided with an electrode array.
The preparation material of the upper excitation layer is high-conductivity fabric coated with nonpolar high-molecular polymer with low dielectric constant, the dielectric constant epsilon of the nonpolar high-molecular polymer is 0-2, such as polypyrrole, polypropylene and the like, and the conductivity of the excitation layer is adjusted to 10 by doping conductive particles such as carbon black particles and the like in the nonpolar polymer2—104Within the range of S/cm. S/m is Siemens per meter.
The preparation material of the lower detection layer is a low-conductivity fabric coated with a low-polarity polymer material, the dielectric constant epsilon of the low-polarity polymer is 3-10, such as polyaniline, polystyrene and the like, conductive particles such as carbon black particles are added into the low-polarity polymer, and the conductivity of the detection layer is adjusted to be within the range of 0.5-10S/cm. N electrodes are uniformly arranged on the edge of the detection layer, N is not less than 8, preferably 12, and N is 12 in the embodiment of the invention. Two electrodes are selected in the test process, wherein one of the two electrodes is grounded, and the two electrodes are respectively a measuring electrode and a grounding electrode.
The excitation layer and the detection layer are isolated by small-sized insulating rubber to realize a zero-pressure state, namely a non-contact (high-resistance) state. The small insulating rubber can be realized by rubber balls. The rubber pellets are vulcanized natural rubber doped with conductive particles, and the conductivity is 102-10S/cm, modulus of elasticity of 102—105Pa is selected according to different pressure ranges. The size of the rubber pellets is preferably 1mm in diameter, and is generally limited to 3mm or less depending on the particular test object.
A tactile sensor is a device that converts a mechanical pressure signal into a measurable electrical signal. The invention utilizes the electromechanical coupling effect of the double-layer conductor to convert the interaction force in touch into an electrical signal, and deduces the boundary condition of the electrical signal based on the electrical impedance tomography principle. The implementation of signal acquisition using the tactile pressure sensor is described below.
As shown in fig. 3, a test system is constructed by combining the sensor structure shown in fig. 2, wherein a positive excitation section of a power supply is connected with an excitation layer of the sensor, 12 measuring electrodes are distributed on a detection layer, the 12 electrodes of the detection layer are respectively connected with one input end of a channel selector, and an output end of the channel selector is connected with a voltage measuring device.
Two channels are selected through the channel selector, as shown in fig. 4, the electrodes corresponding to the two selected channels are the measuring points 1 and 2, when pressure is applied to the tactile sensor, the excitation layer and the detection layer contact each other, and the contact impedance between the excitation layer and the detection layer generates a corresponding electric field in the detection layer, and at this time, the equivalent circuit model of the tactile sensor is as shown in fig. 4. In fig. 4, measurement point 1 and measurement point 2, one of which is a ground point and the other of which is a measurement point, measure the voltage of the signal ground at the measurement point.
In the embodiment of the invention, 12 electrodes are paired after excitation current is applied to an excitation layer, channels of (1,2) (1,3) … (1,12) (2,3) (2,4) … (2,12) (3,4) … (11,12) are sequentially gated at a rate of 100Hz before and after pressure is applied, voltage signals are tested, 100 groups of test voltage signals are generated within 1 second, and a test vector of 12 x (12-1)/2 dimensions is formed.
As shown in FIG. 4, the contact resistance with pressure change is represented as RpWhen touching at a specific location (x, y), the resistance of the probe layer in series with the circuit is RxyAnd Cxy,RxyIs the real part of the impedance, CxyFor the imaginary part of the impedance, let the potential between the measurement points 1 and 2 be EcThe formula is as follows:
Figure GDA0002494047130000051
where I is the current of the excitation signal, j represents the imaginary part of the signal, w is the angular frequency of the current excitation signal, and the relationship between w and the frequency f of the current excitation signal is w-2 pi f. The voltage V measured in FIGS. 1 and 2iI.e. potential Ec
Based on the principle of electrical impedance tomography, a pair of electrodes is selected to traverse on the electrodes of the detection layer for voltage signal measurement by current excitation from the excitation layer. From the measured voltage values, the potential distribution of the contact area can be inverted. After the voltage signal is acquired, the acquired voltage signal is firstly decoupled, and then the pressure and the position of the decoupled signal are reconstructed.
The steps of decoupling the collected multi-frequency voltage signals are as follows:
during the application of a certain pressure, different frequencies f are used1,f2……fnThe multi-frequency sinusoidal current signals are sequentially excited, and the measured potential result of each group of electrodes is Ec1,Ec2……Ecn,nFor positive integers, a linear equation is established using equation (1):
Figure GDA0002494047130000061
wherein E iscFor the voltage signal tested, i.e. Ec1,Ec2……EcnWhere I is the known excitation signal current and w is the angular frequency of the known excitation signal, R can be solved by least squaresp、Rxy、Cxy. The pressure magnitude and position of the decoupled signal are then reconstructed, including steps 1 and 2 as follows.
And step 1, fitting a pressure value.
The change in contact pressure causes a change in contact resistance and also a change in contact area. The mechanical interaction caused by contact between the contact layer and the probe layer can be reduced to the Herz contact problem, i.e. contact between any objects, the contact area being generally proportional to the applied pressure (reference [1 ])]). On the other hand, according to the pouille's law, the resistance of an object is inversely proportional to its cross-section, and it is deduced that the contact resistance is inversely proportional to the contact area. Therefore, there is an inverse relationship between contact resistance and applied force, and studies have shown that contact resistance RpThe relationship with the pressure P can be expressed as (reference [2]]):
Rp=αPγ(2)
Where α and gamma are constants determined by the material properties of the sensor, which can be obtained by a linear fitting method based on experimental measurements, i.e. the change in the magnitude of the contact pressure P, directly leads to R as in equation (2)pA change in (c).
By testing with sinusoidal current excitation signals of different frequencies, R is solved during the impedance test with applied pressurepThe relative value of the pressure P is changed, and the pressure P is calculated.
And 2, reconstructing the position of the applied pressure according to the information of the capacitance change.
At the same time, the position of point contact changes the potential distribution on the detection layer, and the electricity to be detectedPotential EcAnd forming a matrix psi, combining a sensitivity matrix S related to the sensitive field to generate a gray matrix g of the imaging result, and estimating the position according to the gray matrix.
The potential matrix Ψ is a vector of M ═ N (N-1)/2 dimensions, where the elements in Ψ
Figure GDA0002494047130000062
Derived from the potentials tested for the selected electrodes i and j,
Figure GDA0002494047130000066
n represents the number of electrodes, and example of the present invention is 12. The potential measured by some two electrodes is EcThen the elements in the potential matrix Ψ are calculated according to
Figure GDA0002494047130000063
Figure GDA0002494047130000064
The sensitivity matrix S is a two-dimensional matrix with the size of M x N, reflects the measurement voltage change caused by unit conductivity change on each pixel point, and the element calculation formula in S is as follows:
Figure GDA0002494047130000065
in the formula, i, j represents the serial number of the measuring electrode, x, y represents the position of the pixel point in the imaging picture, Si,j(x, y) represents the mapping of the measuring electrode information with the serial number i, j to the imaging point x, y, p (x, y) represents the shape of the sensor image as a function of the position of the pixel point (x, y), the above formula is the integral of the shape of the boundary of the sensor image, E0Indicating the voltage measured by the electrodes when the tactile pressure sensor is not in contact, E0i(x, y) represents a voltage detected at the position (x, y) of the electrode i in the absence of touch pressure, E0j(x, y) represents the voltage detected by the electrode j at the position (x, y) in the absence of touch pressure, and I represents the excitation current. The imaging picture corresponds to the image of the sensor (detection layer) and the position (x, y) is the detection layerPosition coordinates on a plane.
The gray matrix G represents a pixel image directly corresponding to the sensitive field, and the size is set to be G ═ A × B, and the coordinates x ∈ [1, A ] in the image],y∈[1,B]. A. B denotes the maximum value of the abscissa and the maximum value of the ordinate of the sensor image. According to g ═ S-1Ψ can calculate g. Since the coordinates of g correspond to the coordinates of the tactile sensor, the exact location and contact area of the pressure is determined from the maxima and gradient maxima in g.
Through the process, the invention is based on the electrical impedance tomography technology, utilizes the electromechanical coupling effect principle of the double-layer conductor to convert the interaction force in the touch into edge distributed electrical signals, and calculates the position and the size of the pressure through a reconstruction algorithm, thereby being simple and convenient to realize and having high accuracy.

Claims (6)

1. A tactile pressure sensor based on electrical impedance tomography, comprising: the excitation layer is positioned on the upper layer and connected with an excitation signal source, the detection layer is positioned on the edge of the lower layer and provided with an electrode array, and the insulating layer is positioned between the excitation layer and the detection layer; the preparation material of the excitation layer is a high-conductivity fabric coated with a nonpolar polymer, the dielectric constant epsilon of the nonpolar polymer is 0-2, and the conductivity of the high-conductivity fabric is 102—104Within the range of S/cm; the preparation material of the detection layer is a low-conductivity fabric coated with a weak-polarity polymer, the dielectric constant epsilon of the weak-polarity polymer is 3-10, and the conductivity of the low-conductivity fabric is in the range of 0.5-10S/cm; the excitation layer and the detection layer realize a zero-pressure non-contact state through an insulating layer; n electrodes are uniformly arranged on the edge of the detection layer, N is a positive integer larger than 8, and two electrodes are selected during measurement, wherein one electrode is used as a grounding point, and the other electrode is used as a measurement point.
2. The sensor according to claim 1, wherein the N electrodes of the detection layer are each connected to an input of a channel selector, the output of which is connected to a voltage measuring device; after the exciting layer applies exciting current, the channel selector gates two channels in turn at a set rate before and after applying pressure, and the voltage signal between the two electrodes is measured.
3. A sensor according to claim 1 or claim 2, wherein there are 12 electrodes.
4. A sensor according to claim 1 or 2, wherein the insulating layer has a conductivity of 102-10S/cm, modulus of elasticity of 102—105Pa。
5. The sensor of claim 2, wherein the sensor is configured to measure contact resistance RpWhen the detection layer is contacted at a certain position (x, y), the resistance of the detection layer connected in series to the circuit is RxyAnd Cxy,RxyIs the real part of the impedance, CxyFor the imaginary part of the impedance, the potential E between the two electrodescThe following were used:
Figure FDA0002494047120000011
where I is the current of the excitation signal, j represents the imaginary part of the signal, w is the angular frequency of the excitation signal, and w is related to the excitation signal frequency f by w 2 pi f.
6. A signal acquisition method based on the sensor of claim 1,2 or 5, comprising:
the measurement process comprises the following steps: in the process of applying a certain pressure, the pressure is sequentially excited by using multi-frequency sinusoidal current signals with different frequencies, channels of (1,2) (1,3) … (1, N) (2,3) (2,4) … (2, N) (3,4) … (N-1, N) are sequentially gated at a set fixed speed, voltage signals are measured, and a potential result E is obtained by measuring each group of electrodesc1,Ec2……Ecn
Decoupling process: establishing a linear equation according to a calculation formula of the potential between the two electrodes, and solving contact resistance RpWith the sensing layer connected in series to the impedance R in the circuitxyAnd Cxy
The magnitude of the applied pressure solves the process: due to contact resistance RpAnd an applied force P, denoted as Rp=αPγWherein α and gamma are constants determined by the material properties of the sensor, by acquiring R during the application of pressure during the measurement process and the decoupling processpChange of relative value of (c) to the impedance RpFitting with the pressure P, and calculating the size of the pressure P;
position solving process of applied pressure: obtaining the elements in the matrix psi according to the potential result of the measuring process
Figure FDA0002494047120000012
Potential E measured from selected electrodes i and jcObtained, calculated as follows:
Figure FDA0002494047120000021
calculating sensitivity matrix S corresponding to sensor image, reflecting measurement voltage change caused by unit conductivity change on each pixel point, and measuring pixel point position (x, y) through electrodes i and j to obtain mapping value Si,j(x, y) is as follows:
Figure FDA0002494047120000022
where p (x, y) represents the sensor image shape as a function of the pixel point location (x, y), E0i(x, y) represents a voltage detected at the position (x, y) of the electrode i in the absence of touch pressure, E0j(x, y) represents the voltage detected by the electrode j at the position (x, y) without touch pressure, and I represents the excitation current;
calculating the gray matrix g ═ S-1Ψ, and determining the location and contact area of the pressure based on the maxima and gradient maxima in g.
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