CN110207862A - A kind of tactile pressure sensor and signal acquisition method based on electrical impedance tomography - Google Patents
A kind of tactile pressure sensor and signal acquisition method based on electrical impedance tomography Download PDFInfo
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- CN110207862A CN110207862A CN201910450458.XA CN201910450458A CN110207862A CN 110207862 A CN110207862 A CN 110207862A CN 201910450458 A CN201910450458 A CN 201910450458A CN 110207862 A CN110207862 A CN 110207862A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
Abstract
The present invention proposes a kind of tactile pressure sensor and signal acquisition method based on electrical impedance tomography, belongs to sensor design and testing field.The excitation layer of inventive sensor is using the highly conductive fabric preparation for being coated with non-polar polymer, detecting layer is using the low conductive fabric preparation for being coated with low pole polymer, electrod-array is arranged at the edge of detecting layer, in measurement, select two electrodes, one is used as grounding point, another is as measurement point.The present invention is measured by the different electrodes two-by-two of gating, is based on electrical impedance tomography, calculates the size and location measurement of pressure applied.The high-precision distributed sensing of tactile sensing device of robot's skin properties and tactile form can be achieved in the present invention, the advantage that the sensor structure realized is simple, high reliablity, low-power consumption, flexibility are good and cheap, and improve pressure size and ease and accuracy that position measures.
Description
Technical field
The invention belongs to sensor design and testing field, it is related to the design of the sensor of novel pressure a kind of and is based on
The pressure size and location measurement method of the novel surface tactile of electrical impedance tomography.
Background technique
Pressure is the main feature of tactile, with the tactile for being measured as target of pressure or stress distribution on object of interest
Imaging is the important composition of touch sensing technology, and imaging-type touch sensor is also one of classification of touch sensor, such as:
Bibliography [1]-[2].It is passed for the tactile imagery technology of pressure perception and pressure size detection for disclosing tactile sensing device of robot
Behavior (control of snatch grip, manual guidance dexterity manipulation etc.) is perceived in sense technology and behavior perception (contacts and differentiates, contact point is fixed
Position, perception body form etc.) accurate information have important value.
Tactile imagery technology based on pressure measurement is the research hotspot in tactile sensing field, mainly utilizes array sensing
Element realizes the measurement of contact area pressure distribution, this has in robot skin and palm sensing and arm in terms of
Significance.Difference based on sensing principle and method, table one give the touch sensing technology studied jointly both at home and abroad at present
And its corresponding principle of induction, material, advantage and disadvantage compare (bibliography [3]~[4]).
Principle of induction, material, the merits and demerits of one touch sensing technology of table compare
Existing tactile imagery technology arranges that pressure cell array architecture, this array structure need using induction region
Complicated manufacturing process and applying to sensor configuration design limits, it is difficult to meet robot skin surface complex three-dimensional structure
Pressure measurement.
Bibliography:
[1]Dahiya R S,Metta G,Valle M,et al.Tactile Sensing—From Humans to
Humanoids[J].IEEE Transactions on Robotics,2010,26(1):1-20.
[2]Tiwana M I,Redmond S J,Lovell N H.A review of tactile sensing
technologies with applications in biomedical engineering[J].Sensors and
Actuators:A Physical,2012,179:17-31.
[3]Silvera-Tawil D,Rye D,Soleimani M,et al.Electrical Impedance
Tomography for Artificial Sensitive Robotic Skin:A Review[J].IEEE Sensors
Journal,2015,15(4):2001-2016.
[4] Deng Liuliu, Deng Yong, Zhang Lei intelligent robot touch sensor application status [J] modern Manufacturing Engineering,
2018.
Summary of the invention
The present invention is directed to current tactile imagery technology by the way of the pressure cell of induction region arrangement array architecture,
It is difficult to meet the pressure measurement of robot skin surface complex three-dimensional structure, and traditional pressure sensitive material tactile imagery sensor work
Skill complexity, problem at high cost provide a kind of based on electrical impedance imaging principle and using with bilayer conductive textile material electromechanics
The novel touch sensor of coupling effect, the pressure sensor based on electrical impedance tomography carry out size and the position of pressure
The high-precision distributed sensing of tactile sensing device of robot's skin properties and tactile form is realized in measurement.
A kind of tactile pressure sensor based on electrical impedance tomography provided by the invention, comprising: the company positioned at upper layer
The excitation layer for connecing exciting signal source is disposed with the detecting layer of electrod-array positioned at the edge of lower layer, is located at excitation layer and detecting layer
Between insulating layer.The material for preparing of the excitation layer is the highly conductive fabric for being coated with non-polar polymer, apolar polymeric
Permittivity ε=0~2 of object, the conductivity of highly conductive fabric is 102—104Within the scope of S/cm.The preparation of the detecting layer
Material is the low conductive fabric for being coated with low pole polymer, permittivity ε=3~10 of low pole polymer, low conductive fabric
Conductivity be 0.5-10S/cm within the scope of.The excitation layer and detecting layer realizes the contactless state of zero pressure by insulating layer.
The edge of the detecting layer has been evenly arranged N number of electrode, and N is the positive integer greater than 8.In measurement, two electrodes are selected, one
A to be used as grounding point, another is as measurement point.
N number of electrode of detecting layer is separately connected an input terminal of channel to channel adapter, the output end connection of channel to channel adapter
Voltage measuring apparatus.After excitation layer applies exciting current, before and after applying pressure, channel to channel adapter is successively selected with setting rate
Lead to two channels, measures two interelectrode voltage signals.
The signal acquisition method of tactile pressure sensor based on above-mentioned electrical impedance tomography, includes the following steps:
Measurement process: during the application of a certain pressure, successively swashed using the multifrequency sine current signal of different frequency
Encourage, (1, N) (2,3) (2,4) are successively gated (1,2) (1,3) ... with the fixed rate of setting ... (2, N) (3,4) ... (N-1, N's)
Channel carries out the measurement of voltage signal, obtains potential results E to every group of electrode measurementc1,Ec2……Ecn；
Uncoupled procedure: linear equation is established according to the calculation formula of two interelectrode voltage differences, solves contact impedance Rp, visit
It surveys layer and is parallel to the impedance R in circuitxyAnd Cxy；
The sensor is in measurement, if contact impedance is Rp, in a certain position (x, the y) contact of detecting layer, detection
It is R that layer, which is parallel to the impedance in circuit,xyAnd Cxy, RxyFor impedance real part, CxyFor imaginary impedance, then two interelectrode voltage differences
EcIt is as follows:
Wherein, I is the electric current of pumping signal, and j indicates the imaginary part of signal, and w is the angular frequency of pumping signal, and w and excitation are believed
The relationship of number frequency f is w=2 π f.
Apply stressed size solution procedure: due to contact impedance RpApply between active force P there are inversely prroportional relationship,
It is expressed as Rp=α Pγ, wherein α and γ is constant, is determined by the material property of sensor；By measurement process and decoupling
Journey obtains R during applying pressurepRelative value variation, to impedance RpIt is fitted with pressure P, resolves pressure P size；
It applies stressed position solution procedure: according to the potential results of measurement process, obtaining matrix Ψ, element in Ψ
According to potential E measured by the electrode i and j of selectioncIt obtains, calculates as follows:
The sensitivity matrix S, S for calculating respective sensor image reflect the variation of the Their unit conductance rate on each pixel
Caused measurement voltage change is measured by electrode i and j for pixel position (x, y), obtains mapping value SI, j(x, y) such as
Under:
In formula, p (x, y) indicates function of the sensor image shape about pixel position (x, y), E0i(x, y) indicate without
The voltage that electrode i is detected at position (x, y) when pressing, E0j(x, y) is indicated without the electricity that electrode j is detected at position (x, y) when pressing
Pressure, voltage Ii、IjIt is illustrated respectively in the exciting current of electrode i, j；
Calculate gray matrix g=S-1Ψ determines the position and contact zone of pressure according to maximum value in g and maximum of gradients
Domain.
Compared with prior art, the present invention having the advantage that the design of (1) sensor of the invention is based on bilayer conductive
The electromechanical Coupling of body is utilized the coupling measurement mode of the bimodal of capacitor and electrical impedance, optimizes pressure size and position
The process of decoupling is set, to reduce influence of the pressure position variation to pressure size measurement accuracy.(2) measurement of the invention is base
In the edge detection of Review of Electrical Impedance Tomography, relatively traditional distributed measurement technology has structure simple, and biosensor power consumption is low
The characteristics of.(3) data of the invention can carry out image reconstruction, have the characteristics that measurement result is visual.The present invention is by grinding
Volume processed is flexible, structure is simple, the tactile imagery sensor of high reliablity and method, improves transducer sensitivity and pressure is estimated
The ease of meter.
Detailed description of the invention
Fig. 1 is that the present invention is based on what the pressure sensor design of electrical impedance tomography and pressure size and position measured to show
It is intended to；
Fig. 2 is a schematic diagram of the physical structure for the pressure sensor that the present invention designs；
Fig. 3 is the schematic diagram of signal acquisition of the present invention；
Fig. 4 is the equivalent circuit diagram of signal acquisition of the present invention.
Specific embodiment
The present invention is understood and implemented for the ease of those of ordinary skill in the art, and the present invention is made into one with reference to the accompanying drawing
The detailed and deep description of step.
Present invention employs Review of Electrical Impedance Tomography, by design it is a kind of based on bilayer conductive fabric electromechanical Coupling with
It proposes corresponding tactile imagery method, so that distributed pressure sensor structure complexity reduces, has reached efficient low-power consumption
Effect, have structure it is simple, high reliablity, the good and cheap advantage of low-power consumption, flexibility.
As shown in Figure 1, realization of the invention includes three parts, it is the design of tactile pressure sensor first, followed by
Signal acquisition is carried out using the sensor of design, is finally to handle the multifrequency voltage signal of acquisition, obtains pressure size
The position and.Tactile pressure sensor of the invention is based on bilayer conductive fabric electromechanical Coupling, and touch pressure signal is changed
For the voltage signal that can be measured, the voltage signal input through image algorithm for reconstructing of measurement further can be solved into inverse problem
The Potential Distributing based on boundary condition is obtained, finally using potential to pressure mapping, realizes the image viewing of pressure distribution.Under
Face successively illustrates the realization of each section.
As shown in Fig. 2, for tactile pressure sensor of the invention a physical structure illustrate, mainly include excitation layer,
Detecting layer and insulating layer.Excitation layer positioned at upper layer connects exciting signal source, and the edge positioned at the detecting layer of lower layer is disposed with electricity
Pole array.
The material for preparing of upper layer excitation layer is the highly conductive fabric for being coated with the non-polar high polymer polymer of low-k,
Permittivity ε=0~2 of non-polar high polymer polymer, such as polypyrrole, polypropylene etc., by being mixed in non-polar polymer
The conductive particles such as miscellaneous carbon black pellet, the conductivity for adjusting excitation layer is 102—104Within the scope of S/cm.S/m is every meter of Siemens.
The material for preparing of lower layer's detecting layer is the low conductive fabric for being coated with the polymer material of low pole, low pole polymer
Permittivity ε=3~10, such as polyaniline, polystyrene etc., by participating in such as carbon black pellet in the polymer of low pole
Conductive particle, the conductivity for adjusting detecting layer is within the scope of 0.5-10S/cm.The edge of detecting layer has been evenly arranged N number of electrode,
N is no less than 8, preferably may be configured as 12, and N is 12 in the embodiment of the present invention.Two electrodes are chosen during the test, wherein
One ground connection, two electrodes are respectively measuring electrode and grounding electrode.
Excitation layer, which is isolated with detecting layer by small-sized electro-insulating rubber, realizes i.e. contactless (high resistant) state of zero pressure.Small-sized insulation
Rubber can be realized with rubber bead.Rubber bead uses the natural rubber after over cure of doping conductive particle, and conductivity is
102- 10S/cm, elasticity modulus is 102—105Pa, it is selected with specific reference to different pressure ranges.The size of rubber bead is preferred
Diameter is 1mm, is generally limited to 3mm or less according to specific test object.
Touch sensor is that mechanical pressure signal is changed into the electrical signal that can be measured.The present invention is led using bilayer
Interaction force in touch is changed into electrical signal by the electromechanical Coupling of electric body, is based on electrical impedance tomography principle
To derive its boundary condition.Illustrate the realization that signal acquisition is carried out using the tactile pressure sensor below.
As shown in figure 3, sensor structure as shown in connection with fig. 2, test system building, wherein the positive energize section connection of power supply
The excitation layer of sensor, is dispersed with 12 measuring electrodes on detecting layer, 12 electrodes of detecting layer respectively with channel to channel adapter
One input terminal connection, the output end of channel to channel adapter connect voltage measuring apparatus.
Two channels are selected by channel to channel adapter, as shown in figure 4, the corresponding electrode in selected two channels is exactly to survey
Amount point 1 and 2, when bringing pressure to bear on touch sensor, excitation layer is contacted with each other with detecting layer, the contact impedance meeting between them
Corresponding electric field is generated in detecting layer, at this point, the equivalent-circuit model of touch sensor is as shown in Figure 4.In Fig. 4,1 He of measurement point
Measurement point 2, as grounding point, another measures the measurement a little to the voltage of signal ground as measurement point for one of them.
It in the embodiment of the present invention, after excitation layer applies exciting current, carries out 12 electrodes and organizes two-by-two pair, applying pressure
Front and back successively gates (1,2) (1,3) ... (1,12) (2,3) (2,4) ... (2,12) (3,4) ... (11,12) with the rate of 100Hz
Channel, carry out the test of voltage signal, generate 100 groups of test voltage signals in 1 second, form the survey of 12* (12-1)/2 dimension
Try vector.
As shown in figure 4, contact impedance when with pressure change is expressed as Rp, contacted in a certain specific position (x, y)
When, it is R that detecting layer, which is parallel to the impedance in circuit,xyAnd Cxy, RxyFor impedance real part, CxyFor imaginary impedance, if measurement point 1 and 2 it
Between voltage difference be Ec, it is calculated and is obtained by following formula:
Wherein, I is the electric current of pumping signal, and j indicates the imaginary part of signal, and w is the angular frequency of current excitation signal, w and electricity
The relationship for flowing exciting signal frequency f is w=2 π f.The voltage V measured in Fig. 1 and Fig. 2iThat is voltage difference Ec。
Principle based on electrical impedance tomography, by carrying out current excitation from excitation layer, in the electrode on time of detecting layer
It goes through selection a pair of electrodes and carries out voltage signal measurement.According to the voltage value of measurement, the Potential Distributing of contact area can be finally inversed by.
After collecting voltage signal, first the voltage signal of acquisition is decoupled, then to the pressure of the signal after decoupling
Size is rebuild with position.
The step of decoupling to the multifrequency voltage signal of acquisition is as follows:
During the application of a certain pressure, different frequency f is utilized1,f2……fnMultifrequency sine current signal successively swash
It encourages, the potential results for measuring every group of electrode measurement are Ec1,Ec2……Ecn, n is positive integer, then establishes linear side using formula (1)
Journey:
Wherein, EcFor the voltage signal tested, i.e. Ec1,Ec2……Ecn, I is known pumping signal electric current, and w is
Know the angular frequency of pumping signal, and then R can be solved by least square methodp、Rxy、Cxy.Then to the pressure of the signal after decoupling
Power size is rebuild with position, includes the following steps 1 and 2.
Step 1 carries out pressure value fitting.
The variation of contact pressure can cause the variation of contact impedance, can also cause the variation of contact area.Contact layer and spy
Surveying mechanical interaction caused by layer contacts can simplify as Herz contact problems, i.e., contacts between any object, contact area
(reference paper [1]) usually directly proportional to the pressure of application.On the other hand, according to Pouillet rule, object resistance and its cross
Section is inversely proportional, and derives that contact impedance is inversely proportional with contact area.Therefore, exist between contact impedance and application active force anti-
Proportionate relationship, existing research prove contact impedance Rp(reference paper [2]) can be expressed as with the relationship of pressure P:
Rp=α Pγ (2)
Wherein, α and γ is constant, is determined by the material property of sensor, and the Linear Quasi based on experiment measurement can be passed through
Conjunction method obtains.That is the variation of contact pressure P size directly causes such as the R in formula (2)pVariation.
It is tested by using the sinusoidal current pumping signal of different frequency, solves and applying stressed testing impedance
R in the processpRelative value variation, resolve pressure P size.
Step 2, the information according to capacitance variations, carry out applying stressed position reconstruction.
Meanwhile the position of point contact, the Potential Distributing in detecting layer is changed, the potential E that will be measuredcMatrix Ψ is formed,
In conjunction with sensitivity matrix S relevant to sensitivity field, the gray matrix g of imaging results is generated, according to gray matrix, position is carried out and estimates
It calculates.
Potential matrix Ψ is the vector of a M=N (N-1)/2 dimension, element in ΨIt is surveyed according to the electrode i and j of selection
The potential of examination obtains,N indicates number of electrodes, this
Inventive embodiments are 12.The potential of certain two electrode measurement is Ec, then element in potential matrix Ψ is calculated according to the following formula
Sensitivity matrix S is the two-dimensional matrix that size is M*N, reflects the Their unit conductance rate variation on each pixel
Caused voltage change can be measured, element calculation formula is as follows in S:
In formula, i, j indicate measuring electrode serial number, and x, y indicate the pixel position in imaging picture, Si,j(x, y) indicates sequence
It number is i, the measuring electrode information of j indicates sensor image shape about pixel position imaging point x, the mapping of y, p (x, y)
The function of (x, y), above-mentioned formula are the integral to the boundary shape of sensor image, E0Expression does not connect in tactile pressure sensor
The voltage that electrode measures when touching, E0i(x, y) is indicated without the voltage that electrode i is detected at position (x, y) when pressing, E0j(x,y)
Indicate that, without the voltage that electrode j is detected at position (x, y) when pressing, I indicates exciting current.(the detection of picture respective sensor is imaged
Layer) image, position (x, y) be detection layer plane on position coordinates.
Gray matrix g indicates a pixel point image directly corresponding with sensitivity field, if size is G=A*B, in image
Coordinate x ∈ [1, A], y ∈ [1, B].A, B indicates the abscissa maximum value and ordinate maximum value of sensor image.According to g=S-1
Ψ can calculate g.Since the coordinate of g corresponds to the coordinate of touch sensor, thus it is true according to maximum value in g and maximum of gradients
The accurate location and contact area of constant-pressure.
By process above, the present invention is based on electrical impedance tomography technologies, are imitated using the mechanical-electric coupling of bilayer conductive body
Principle is answered, the interaction force in touch is changed into edge distribution formula electrical signal, pressure is calculated by algorithm for reconstructing
Position and size, realize simple and convenient, accuracy rate is high.
Claims (6)
1. a kind of tactile pressure sensor based on electrical impedance tomography characterized by comprising the connection positioned at upper layer swashs
The excitation layer for encouraging signal source is disposed with the detecting layer of electrod-array positioned at the edge of lower layer, between excitation layer and detecting layer
Insulating layer；The material for preparing of the excitation layer is the highly conductive fabric for being coated with non-polar polymer, non-polar polymer
Permittivity ε=0~2, the conductivity of highly conductive fabric is 102—104Within the scope of S/cm；The detecting layer prepares material
For the low conductive fabric for being coated with low pole polymer, permittivity ε=3~10 of low pole polymer, the electricity of low conductive fabric
Conductance is within the scope of 0.5-10S/cm；The excitation layer and detecting layer realizes the contactless state of zero pressure by insulating layer；It is described
The edge of detecting layer be evenly arranged N number of electrode, N is the positive integer greater than 8, in measurement, selects two electrodes, a work
For grounding point, another is as measurement point.
2. sensor according to claim 1, which is characterized in that N number of electrode of the detecting layer is separately connected channel
The output end of one input terminal of selector, channel to channel adapter connects voltage measuring apparatus；After excitation layer applies exciting current,
Before and after applying pressure, channel to channel adapter successively gates two channels to set rate, measures two interelectrode voltage signals.
3. sensor according to claim 1 or 2, which is characterized in that the electrode has 12.
4. sensor according to claim 1 or 2, which is characterized in that the insulating layer conductivity is 102- 10S/cm,
Elasticity modulus is 102—105Pa。
5. sensor according to claim 2, which is characterized in that the sensor is in measurement, if contact impedance is
Rp, in a certain position (x, the y) contact of detecting layer, it is R that detecting layer, which is parallel to the impedance in circuit,xyAnd Cxy, RxyFor impedance reality
Portion, CxyFor imaginary impedance, then two interelectrode voltage difference EcIt is as follows:
Wherein, I is the electric current of pumping signal, and j indicates the imaginary part of signal, and w is the angular frequency of pumping signal, w and pumping signal frequency
The relationship of rate f is w=2 π f.
6. a kind of signal acquisition method based on sensor described in claim 1,2 or 5 characterized by comprising
Measurement process: during the application of a certain pressure, successively being motivated using the multifrequency sine current signal of different frequency, with
The fixed rate of setting successively gates (1,2) (1,3) ... (1, N) (2,3) (2,4) ... (2, N) (3,4) ... channel of (N-1, N),
The measurement for carrying out voltage signal, obtains potential results E to every group of electrode measurementc1,Ec2……Ecn；
Uncoupled procedure: linear equation is established according to the calculation formula of two interelectrode voltage differences, solves contact impedance Rp, detecting layer
The impedance R being parallel in circuitxyAnd Cxy；
Apply stressed size solution procedure: due to contact impedance RpThere are inversely prroportional relationships between application active force P, indicate
For Rp=α Pγ, wherein α and γ is constant, is determined by the material property of sensor；By being obtained in measurement process and Uncoupled procedure
Take R during applying pressurepRelative value variation, to impedance RpIt is fitted with pressure P, resolves pressure P size；
It applies stressed position solution procedure: according to the potential results of measurement process, obtaining matrix Ψ, element in ΨAccording to choosing
Potential E measured by the electrode i and j takencIt obtains, calculates as follows:
The sensitivity matrix S, S for calculating respective sensor image, which reflect the variation of the Their unit conductance rate on each pixel, to be caused
Measurement voltage change pixel position (x, y) is measured by electrode i and j, obtains mapping value Si,j(x, y) is as follows:
In formula, p (x, y) indicates function of the sensor image shape about pixel position (x, y), E0i(x, y) is indicated without pressing
When the voltage that is detected at position (x, y) of electrode i, E0j(x, y) is indicated without the voltage that electrode j is detected at position (x, y) when pressing, I
Indicate exciting current；
Calculate gray matrix g=S-1Ψ determines position and the contact area of pressure according to maximum value in g and maximum of gradients.
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| CN111289154A (en) * | 2020-02-24 | 2020-06-16 | 南京工业大学 | Method for applying pressure positioning to touch sensor based on computer algorithm |
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