CN110108751B - Touch sensor capable of measuring thermal conductivity and thermal diffusivity and measuring method - Google Patents

Touch sensor capable of measuring thermal conductivity and thermal diffusivity and measuring method Download PDF

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CN110108751B
CN110108751B CN201910502216.0A CN201910502216A CN110108751B CN 110108751 B CN110108751 B CN 110108751B CN 201910502216 A CN201910502216 A CN 201910502216A CN 110108751 B CN110108751 B CN 110108751B
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measured
thermal
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measurement unit
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CN110108751A (en
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张旻
潘兵
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Shenzhen Graduate School Tsinghua University
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Shenzhen Graduate School Tsinghua University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00Measuring or testing not otherwise provided for
    • G01D21/02Measuring two or more variables by means not covered by a single other subclass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • G01N25/18Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • G01N25/20Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity

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  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
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  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

The tactile sensor comprises a substrate, a heat measuring unit and a pressure detecting unit, wherein the heat measuring unit and the pressure detecting unit are arranged on the substrate, the pressure detecting unit is used for sensing contact pressure, the heat measuring unit comprises a temperature measuring area and a heating area, the heating area is used for controllably heating the heat measuring unit, the temperature measuring area is used for respectively measuring initial temperature and actual measurement temperature change when the heat measuring unit is heated in a state that the heating area is not heated and is heated when the tactile sensor is contacted with an object to be measured, and the heat conductivity and the heat diffusivity of the object to be measured are obtained according to the measured initial temperature when the heat measuring unit is not heated, the actual measurement temperature change when the heat measuring unit is heated and the predetermined relation of the temperature change of the heat measuring unit when the tactile sensor is contacted with the object to be measured. The touch sensor can realize measurement of temperature, thermal conductivity and thermal diffusivity of a contact object, and has the advantages of high measurement precision, integration, microminiaturization and the like.

Description

Touch sensor capable of measuring thermal conductivity and thermal diffusivity and measuring method
Technical Field
The invention relates to a touch sensor, in particular to a touch sensor capable of measuring heat conductivity and thermal diffusivity and a measuring method.
Background
The human skin can realize rich touch perception, the touch sensor imitates a complex sensing system of the human skin, and can detect a plurality of important signals such as pressure, temperature, texture, vibration and the like, wherein the information such as temperature, heat transfer rate and the like obtained through the contact of the touch sensor and an object is an important research direction.
At present, the thermal conductivity and the thermal diffusivity of a material measured by a touch sensor can only be qualitatively measured, and the thermal conductivity and the thermal diffusivity of the contacted material can not be quantitatively measured. In the application scene of robot detection, how to realize the flexible thermal sense touch sensor which can accurately and quantitatively measure the thermal conductivity and the thermal diffusivity of various materials through the contact with the materials is a problem to be solved in the prior art.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a touch sensor capable of measuring heat conductivity and thermal diffusivity and a measuring method.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
The utility model provides a tactile sensor of measurable thermal conductivity and thermal diffusivity, includes the base and sets up thermal measurement unit and the pressure detection unit on the base, the pressure detection unit is used for perception contact pressure, thermal measurement unit includes temperature measurement district and zone of heating, the zone of heating is used for to the controllable heating of thermal measurement unit, the temperature measurement district is used for measuring the initial temperature and the actual measurement temperature variation when heating of thermal measurement unit respectively in the state of heating zone unheated and heated when tactile sensor and the object that awaits measuring contact, the thermal conductivity and the thermal diffusivity of the object that awaits measuring are obtained according to the initial temperature when thermal measurement unit unheated, the actual measurement temperature variation when heating, and the relation of the thermal measurement unit temperature variation with time of predetermined tactile sensor and the object that awaits measuring contact.
Further:
the temperature measuring region is located in a central region, and the heating region surrounds the temperature measuring region.
The heat measuring unit comprises a planar metal structure and a lead electrode, the temperature measuring area is the central part of the metal structure, the heating area is the peripheral part of the metal structure and forms a circuit-based serial relation with the temperature measuring area, the lead electrode is connected with the metal structure and is used for connecting the metal structure with a power supply and providing current and voltage signals of the heat measuring unit, and the measured temperature of the heat measuring unit to an object to be measured is obtained according to the resistance of the heat measuring unit determined by the voltage and the current and the relation between the resistance and the temperature of the heat measuring unit, which is obtained by calibration in advance.
The lead electrode comprises first to fourth leads, wherein the first lead and the second lead are respectively connected with two ends of the heating area, the current flowing through the metal structure is measured through the first lead and the second lead, the third lead and the fourth lead are respectively connected with two ends of the temperature measuring area, and the voltage flowing through two ends of the temperature measuring area is measured through the third lead and the fourth lead.
The metal structure is a roundabout bending coiled structure with two symmetrical sides.
The heat measuring unit and the pressure detecting unit are attached to an upper surface and a lower surface of the substrate, respectively.
And further includes insulating protective layers attached to outer side surfaces of the pressure detecting unit and the heat measuring unit, respectively.
The relationship of the temperature of the thermal measurement unit over time when the tactile sensor is in contact with the object to be measured is determined by:
Wherein, T 0 is the initial temperature, T 2 is the actual measurement temperature, x is the distance between the heat measurement unit and the contact surface of the object to be measured, T is the time, θ 2 is the value of T 2 after pull-type conversion, V j is the weight coefficient, and N is the order;
according to the formula (17), and the measured temperatures at different moments measured by the heat measurement unit, the heat conductivity and the heat diffusivity of the object to be measured are obtained by using a least square fitting method.
A method for measuring the thermal conductivity and thermal diffusivity of an object uses the tactile sensor to measure the thermal conductivity and thermal diffusivity of the object to be measured.
The invention has the following beneficial effects:
The invention provides a touch sensor capable of measuring heat conductivity and thermal diffusivity, which realizes quantitative measurement of the heat conductivity and thermal diffusivity of a contacted material. The structural design of the touch sensor enables the conditions met by the theoretical model for measurement to be close to the actual application scene, and the thermal conductivity and the thermal diffusivity of the material measured by using the touch sensor are simple and effective, and the accuracy is high. The touch sensor can be practically applied to occasions needing thermal sense sensing such as robot dexterous hands and intelligent artificial limbs, can realize measurement of temperature, thermal conductivity and thermal diffusivity of contact materials, and has the advantages of high measurement precision, integration, microminiaturization and the like. Preferably, the tactile sensor may further integrate a pressure detecting unit for sensing the contact pressure, thereby forming a tactile sensor having heat conductivity, thermal diffusivity, and tactile measurement functions at the same time.
Drawings
FIG. 1 is a schematic diagram of a measurement application scenario according to an embodiment of the present invention;
FIG. 2 is a schematic perspective exploded view of a tactile sensor according to an embodiment of the present invention;
FIGS. 3a and 3b are schematic structural views and partial enlarged metal structural views of a thermal measurement unit according to an embodiment of the present invention;
fig. 4a and 4b are a schematic measurement view and a schematic structural view of a tactile heat measuring unit in an embodiment of the present invention.
FIG. 5 is a measurement flow chart of an embodiment of the present invention;
FIG. 6 is a graph of haptic thermal measurement unit resistance versus temperature calibration in accordance with an embodiment of the present invention.
FIG. 7 is a graph of thermal measurement unit measurement data points and a fitted curve when a tactile sensor of an embodiment of the invention is in contact with an aluminum alloy.
Detailed Description
The following describes embodiments of the present invention in detail. It should be emphasized that the following description is merely exemplary in nature and is in no way intended to limit the scope of the invention or its applications.
Referring to fig. 1, in an application scenario, a tactile sensor 2 is attached to a robot finger 3 (a device applying the tactile sensor) and contacts an object 1 to be measured, so as to obtain a temperature of the contacted object to be measured.
Referring to fig. 2 to 4b, in one embodiment, a tactile sensor capable of measuring thermal conductivity and thermal diffusivity includes a substrate 4, a thermal measurement unit 5 and a pressure detection unit 6 disposed on the substrate 4, the pressure detection unit 6 is used for sensing contact pressure, the thermal measurement unit 5 includes a temperature measurement area 11 and a heating area 12, the heating area 12 is used for controllably heating the thermal measurement unit 5, the temperature measurement area 11 is used for measuring initial temperature and measured temperature change during heating of the thermal measurement unit 5 in a state that the heating area 12 is unheated and heated respectively when the tactile sensor is in contact with an object to be measured, and the thermal conductivity and thermal diffusivity of the object to be measured are obtained according to a relationship between the measured initial temperature during unheated of the thermal measurement unit 5, the measured temperature change during heating, and the predetermined temperature change of the thermal measurement unit 5 when the tactile sensor is in contact with the object to be measured.
In a preferred embodiment, the temperature measuring zone 11 is located in a central region and the heating zone 12 surrounds the temperature measuring zone 11.
Referring to fig. 2 to 4b, in a more preferred embodiment, the heat measuring unit 5 includes a planar metal structure 9 and a lead electrode 10, the temperature measuring region 11 is a central portion of the metal structure 9, the heating region 12 is a peripheral portion of the metal structure 9 and forms a serial relationship on a circuit with the temperature measuring region 11, the lead electrode 10 is connected to the metal structure 9 and is used for powering on the metal structure 9 and providing current and voltage signals of the heat measuring unit 5, and the measured temperature of the object to be measured by the heat measuring unit 5 is obtained according to the resistance of the heat measuring unit 5 determined by the voltage and the current and the relationship of the resistance of the heat measuring unit 5 calibrated in advance and the temperature.
Referring to fig. 5, specifically, a small current is first introduced into the heat measuring unit 5 to measure the voltage and current at that time to obtain the initial temperature of the heat measuring unit 5 when the heating area 12 is not heated, and then a large current is introduced into the heat measuring unit 5 to measure the voltage and current at that time to obtain the temperature change of the heat measuring unit 5 when the heating area 12 is heated.
In a more preferred embodiment, the lead electrode 10 includes first to fourth leads, wherein a first lead a and a second lead D are connected to both ends of the heating region 12, respectively, the magnitude of the current flowing through the metal structure 9 is measured through the first lead a and the second lead D, and a third lead B and a fourth lead C are connected to both ends of the temperature measuring region 11, respectively, and the magnitude of the voltage flowing through both ends of the temperature measuring region 11 is measured through the third lead B and the fourth lead C.
By adopting the preferable scheme of the lead electrode, the influence of the lead resistance on resistance measurement can be avoided, and the measurement accuracy of the resistance of the thermal measurement unit can be improved.
Referring to fig. 3b and 4b, in a more preferred embodiment, the metal structure 9 is a bilaterally symmetrical meander coil structure.
In a specific embodiment, the pressure detecting unit 6 may include: the pressure sensitive material and the lead electrode, the pressure sensitive material can be laser induced graphene LIG.
In a preferred embodiment, the thermal measuring unit 5 and the pressure detecting unit 6 are attached to the upper and lower surfaces of the substrate 4, respectively.
Referring to fig. 2, in a preferred embodiment, the tactile sensor further includes insulating protective layers 7, 8 attached to the outer side surfaces of the heat measuring unit 5 and the pressure detecting unit 6, respectively.
In a preferred embodiment, the relationship of the temperature of the thermal measurement unit over time when the tactile sensor is in contact with the object to be measured is determined by:
Wherein, T 0 is the initial temperature, T 2 is the actual measurement temperature, x is the distance between the heat measuring unit and the contact surface of the object to be measured, T is the time, θ 2 is the value of T 2 after pull-type conversion, V j is the weight coefficient, and N is the order.
Referring to fig. 5, the relationship between the temperature of the thermal measurement unit and the time change when the tactile sensor is in contact with the object to be measured, which is determined according to equation (17), and the measured temperatures at different moments measured by the thermal measurement unit are fitted by a least square method to obtain the thermal conductivity and the thermal diffusivity of the object to be measured.
Referring to fig. 5, in another embodiment, a method of measuring thermal conductivity and thermal diffusivity of an object uses the tactile sensor to measure thermal conductivity and thermal diffusivity of an object under test. In various embodiments, the measurement method may employ the embodiments of any of the foregoing embodiments for measurement.
Specific embodiments of the tactile sensor and the measuring method are described in detail below.
The touch sensor includes a substrate, a pressure detecting unit, a heat measuring unit, and an insulating protective layer: the pressure detection unit is attached to the upper surface of the substrate and is used for sensing the contact pressure and judging that the touch sensor is in contact with the material to be detected through measuring the pressure value; the heat measuring unit is attached to the lower surface of the substrate, and the resistance of the heat measuring unit can be determined according to the voltage and the current by measuring the voltage and the current when the heat measuring unit is in contact with the material to be measured; determining the actual measurement temperature of the contact surface of the thermal measurement unit and the object to be measured according to the resistance of the thermal measurement unit and the relationship between the resistance and the temperature of the thermal measurement unit obtained by calibration in advance; according to the relation of the temperature change of the contact surface of the thermal measurement unit and the object to be measured when the touch sensor is contacted with the material to be measured and the actual measurement temperature of the contact surface of the thermal measurement unit and the object to be measured (including the initial temperature of the thermal measurement unit when the heating zone is not heated and the temperature change when the heating zone is heated), the thermal conductivity and the thermal diffusivity of the material to be measured are obtained; the temperature versus time relationship may be determined by a theoretical heat transfer model. The insulating protective layers are attached to the upper surfaces of the pressure detecting unit and the heat measuring unit, respectively.
In one embodiment, the pressure detection unit may include: the pressure sensitive material and the lead electrode, the pressure sensitive material can be laser induced graphene LIG;
in one embodiment, the thermal measurement unit comprises: a metal structure and a lead electrode, wherein the metal structure comprises:
The temperature measuring area is positioned at the center of the metal structure;
The heating zone is positioned at the edge of the metal structure and surrounds the temperature measuring zone;
Wherein the lead electrode includes:
the first lead and the second lead are connected with the metal structure heating area and the external ammeter; the magnitude of the current measured by the external ammeter is the magnitude of the current passing through the metal structure.
The third lead and the fourth lead are connected with the metal structure temperature measuring area and the external ammeter; the voltage measured by the external voltmeter is the voltage at two ends of the temperature measuring area of the metal structure;
in specific implementation, the four-wire method measurement scheme can avoid the influence of lead resistance on resistance measurement and improve the measurement accuracy of the resistance of the thermal measurement unit.
During implementation, the metal structure comprises a temperature measuring zone and a heating zone, the temperature measuring zone is positioned at the center of the metal structure, and the heating zone is positioned at the edge of the metal structure to surround the temperature measuring zone, so that the metal structure has the advantages that: heat transfer in other directions except the direction perpendicular to the contact surface in the measurement process is avoided as much as possible, so that the measurement process of the touch sensor is close to theoretical model setting.
In specific implementation, the touch sensor is placed on a robot finger, the robot controls the finger to be in contact with the material, and the touch sensor pressure detection unit detects a set pressure value to indicate that contact is achieved.
A small current is introduced into the heat measuring unit to measure the voltage and the current at the moment, the measuring principle is shown in fig. 4a and 4b, the current flows into the metal structure of the heat measuring unit from the end A, the current passes through the end D and the voltage at two ends B, C are measured to obtain the resistance of the temperature measuring area, and then the initial temperature of the heat measuring unit when not heated is obtained according to the relationship between the resistance of the temperature measuring area and the temperature obtained through calibration, as shown in fig. 6;
And a larger current is introduced into the heat measuring unit, and the voltage and the current at the moment are measured to obtain the temperature change of the heat measuring unit during heating.
And obtaining the thermal conductivity and the thermal diffusivity of the material to be measured according to the initial temperature of the thermal measurement unit, the temperature change during heating and the relationship of the temperature change of the thermal measurement unit along with time when the touch sensor is in contact with the object to be measured.
The relationship of the temperature change of the thermal measurement unit with time when the touch sensor is in contact with an object to be measured can be obtained by establishing a heat transfer model.
In one embodiment, the heat transfer equation of the heat transfer model may be:
the starting conditions of the heat transfer equation may be:
T3(x,0)=T0; (4)
T2(x,0)=T0; (5)
T1(x,0)=T0; (6)
The boundary conditions of the heat transfer equation may be:
T1(x,t)|x=-∞=T0=T3(x,t)|x=∞; (10)
The heat transfer equation is subjected to Law transformation to obtain a general solution:
Wherein,
The boundary conditions are as follows: a 1=B3 =0;
And carrying out pull-type transformation on the boundary condition, and then bringing the general solution into the boundary condition after the pull-type transformation to obtain the following steps:
The equation set is a quaternary once equation set, and a unique solution exists, so that A 2 and B 2 can be obtained. Bringing A 2 and B 2 into In the formula, the function of the temperature change of the thermal measurement unit along with time when the touch sensor is in contact with an object to be measured can be obtained by carrying out inverse pull-type transformation according to the formula (17):
The function of the temperature change along with time is a relation of the temperature change along with time;
wherein T 0 is the initial temperature of the system, T 1 is the temperature of the material of the object to be detected, T 2 is the temperature of the thermal sense tactile sensor, T 3 is the temperature of the device applying the thermal sense tactile sensor, x is the distance between the contact surface of the thermal measuring unit and the object to be detected, T is time, alpha 1 is the thermal diffusivity of the material of the object to be detected, alpha 2 is the thermal diffusivity of the thermal sense tactile sensor, alpha 3 is the thermal diffusivity of the device applying the thermal sense tactile sensor, k 1 is the thermal conductivity of the material of the object to be detected, k 2 is the thermal conductivity of the thermal sense tactile sensor, k 3 is the thermal conductivity of the device applying the thermal sense tactile sensor, q v is an internal heat source existing in the thermal sense and touch sensor, L 1 is the thickness of the thermal sense and touch sensor, θ 1 is a value obtained by pull-converting T 1, θ 2 is a value obtained by pull-converting T 2, θ 3 is a value obtained by pull-converting T 3, V j is a weight coefficient, N is an order (for example, 10), a 1,A2,A3,B1,B2 and B 3 are unknowns to be solved in general solution, s is a complex variable, p 1,p2 and p 3 are intermediate variables, e is a natural constant, R 1 is a contact thermal resistance between the touch sensor and an object to be measured, and R 2 is a thermal resistance of the touch sensor pressure detection unit.
According to the formula (17), and the actual temperature values measured by the heat measuring unit at different moments, the thermal conductivity and the thermal diffusivity of the material to be measured can be obtained by least square fitting.
FIG. 7 is a graph showing the measured data points and a fitted curve of the thermal measurement unit when the tactile sensor is in contact with the aluminum alloy. A large number of experiments show that the error of the thermal conductivity of the fitting material of the touch sensor is within 4.5%, and the error of the thermal diffusivity of the fitting material is within 8.5%.
The foregoing is a further detailed description of the invention in connection with specific/preferred embodiments, and it is not intended that the invention be limited to such description. It will be apparent to those skilled in the art that several alternatives or modifications can be made to the described embodiments without departing from the spirit of the invention, and these alternatives or modifications should be considered to be within the scope of the invention.

Claims (8)

1. The utility model provides a tactile sensor of measurable thermal conductivity and thermal diffusivity, its characterized in that includes the basement and is provided with thermal measurement unit and the pressure detection unit on the basement, thermal measurement unit with pressure detection unit adheres to respectively the lower surface and the upper surface of basement, pressure detection unit is used for perception contact pressure, judges through measuring the pressure value whether tactile sensor and the object that awaits measuring contact, judges when detecting the set pressure value and realizes the contact with the object that awaits measuring, when judging and realize the contact with the object that awaits measuring, firstly let in a less electric current to thermal measurement unit in the thermal measurement unit before let in a great electric current in the thermal measurement unit, thermal measurement unit includes temperature measuring zone and zone, the zone of heating is used for carrying out controllable heating to thermal measurement unit, the temperature measuring zone is used for measuring the initial temperature of thermal measurement unit and the temperature variation when the object that awaits measuring when passing in the less electric current the zone and the state that the heating, the initial temperature of thermal measurement unit and the object that awaits measuring contact with the object, the initial temperature variation when the measured temperature variation when the thermal diffusivity of the object that awaits measuring the temperature of the heating and the object is not heated in the state of passing in the heating zone, the temperature measuring unit and the initial temperature variation when the initial temperature of the measured temperature of the initial temperature and the measured temperature variation when the measured temperature of the object and the measured temperature variation when the measured temperature measuring unit and the measured temperature of the initial temperature is measured and the measured temperature variation when the initial temperature.
2. The tactile sensor of claim 1, wherein said thermometry zone is located in a central region and said heating zone surrounds said thermometry zone.
3. The touch sensor of claim 1, wherein the thermal measurement unit comprises a planar metal structure, the temperature measurement region is a central portion of the metal structure, the heating region is a peripheral portion of the metal structure and is in electrical series relation with the temperature measurement region, and a lead electrode is connected to the metal structure for powering the metal structure on and providing current and voltage signals of the thermal measurement unit, and the measured temperature of the thermal measurement unit to the object to be measured is obtained based on the resistance of the thermal measurement unit determined by the voltage and the current and a pre-calibrated relationship of the resistance of the thermal measurement unit to temperature.
4. The touch sensor of claim 3, wherein the lead electrode includes first to fourth leads, wherein first and second leads are connected to both ends of the heating region, respectively, through which the magnitude of the current flowing through the metal structure is measured, and third and fourth leads are connected to both ends of the temperature measuring region, respectively, through which the magnitude of the voltage flowing through both ends of the temperature measuring region is measured.
5. A tactile sensor according to claim 3 or 4, wherein the metal structure is a bilaterally symmetrical meander coil structure.
6. The tactile sensor according to any one of claims 1 to 4, further comprising insulating protective layers attached to outer side surfaces of the pressure detecting unit and the heat measuring unit, respectively.
7. A tactile sensor according to claim 1 to 4, wherein,
The relationship of the temperature of the thermal measurement unit over time when the tactile sensor is in contact with the object to be measured is determined by:
Wherein, T 0 is the initial temperature, T 2 is the actual measurement temperature, x is the distance between the heat measurement unit and the contact surface of the object to be measured, T is the time, θ 2 is the value of T 2 after pull-type conversion, V j is the weight coefficient, and N is the order;
according to the formula (17), and the measured temperatures at different moments measured by the heat measurement unit, the heat conductivity and the heat diffusivity of the object to be measured are obtained by using a least square fitting method.
8. A method of measuring thermal conductivity and thermal diffusivity of an object, characterized in that the thermal conductivity and thermal diffusivity of the object to be measured is measured using a tactile sensor according to any one of claims 1 to 7.
CN201910502216.0A 2019-06-11 2019-06-11 Touch sensor capable of measuring thermal conductivity and thermal diffusivity and measuring method Active CN110108751B (en)

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CN111276731B (en) * 2020-03-31 2023-03-03 湖北亿纬动力有限公司 Hot-pressing temperature compensation method, battery cell and battery module
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Publication number Priority date Publication date Assignee Title
WO2006037312A1 (en) * 2004-10-06 2006-04-13 Richard Heuschmidt Method for maintaining the temperature of an electrically heated sensor on load changes
WO2009124211A1 (en) * 2008-04-02 2009-10-08 University Of Southern California Enhancements to improve the function of a biomimetic tactile sensor
CN201497592U (en) * 2009-09-08 2010-06-02 东南大学 Temperature tactile sensing device
CN201548504U (en) * 2009-11-19 2010-08-11 杭州电子科技大学 Thermal conductive sensor
CN107037079A (en) * 2017-05-11 2017-08-11 西安交通大学 One kind support beam type MEMS fluids thermal conductivity and thermal diffusion coefficient sensor and its preparation and method of testing
CN109540961A (en) * 2018-11-06 2019-03-29 清华大学深圳研究生院 Measure the method, apparatus and thermal sensor of thermal parameters

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