CN206891938U - A kind of device for preparing two-dimensional layer material automatically based on shearing force - Google Patents
A kind of device for preparing two-dimensional layer material automatically based on shearing force Download PDFInfo
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- CN206891938U CN206891938U CN201720667180.8U CN201720667180U CN206891938U CN 206891938 U CN206891938 U CN 206891938U CN 201720667180 U CN201720667180 U CN 201720667180U CN 206891938 U CN206891938 U CN 206891938U
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- layer material
- dimensional layer
- objective table
- pressure detecting
- dynamometer
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Abstract
The utility model discloses a kind of device for preparing two-dimensional layer material automatically based on shearing force, including pressure detecting part, automatically control released part and detection display portion；The adhesive force that the utility model is surveyed between two-dimensional layer material and silicon chip substrate by pressure detecting portion go-on-go, three-D displacement platform is manipulated by the integrated control cabinet for automatically controlling released part, and then control the dissection scope between two-dimensional layer material and silicon chip substrate, the preparation process examinations of two-dimensional layer material are shown by detecting display portion, so as to be automatically performed the preparation of two-dimensional layer material, ensure to prepare area and prepare thickness to complete under stable and controllable process conditions, with easy to operate, preparation efficiency is high, the advantages of final product quality height and good quality stability.
Description
Technical field
Technical field of material is the utility model is related to, especially one kind prepares two-dimensional layer material automatically based on shearing force
The device of material.
Background technology
In recent years, be directed to every superiority Quality Research of various two-dimensional layer materials always, two-dimensional layer material by
In with excellent carrier mobility and huge specific surface area, it has good in electronic device, energy storage material etc.
Application prospect.The micromechanics stripping means of prior art is to peel off to use adhesive tape stripping means with improved based on liquid phase mostly,
The method that high quality two-dimensional layer material can be obtained at present is initiated by preparing the micromechanics stripping method of graphene --- by using
Peel off repeatedly and obtain few layer of two-dimensional layer material in the two sides that adhesive tape sticks two-dimensional layer material mother metal.The problem of existing
It is to be far below graphene due to the in-plane strength of two-dimensional layer material be present, it is difficult to cut caused by bearing in stripping process repeatedly
Shear force, finally results in that the two-dimensional layer material area of acquisition is small and the number of plies is more, can not meet research to two-dimensional layer material with
Using.Because the Their Exotic Properties such as many superconduction phase transformations of two-dimensional layer material, charge density wave phase transformation are only when its thickness is small
It can just show under conditions of certain value, so area is big and the preparation of the two-dimensional layer material of thickness of thin is particularly important.
Such as patent " preparation method of two-dimentional telluride gallium material "（The patent No. 201410819701.8）.However, this kind of method is due to technique
There is uncertain and poor controllability in condition, cause area and thickness to be difficult to ensure, influence finished product quality and quality it is steady
It is qualitative.To effectively push the research and application to two-dimensional layer material, high-precision, programmable, automatical and efficient two-dimensional layer is made
The stripping off device of shape material is particularly important.
Utility model content
One kind that the purpose of this utility model is in view of the shortcomings of the prior art and provided is based on shearing force and prepares two automatically
The device of stratified material is tieed up, the utility model is surveyed attached between two-dimensional layer material and silicon chip substrate by pressure detecting portion go-on-go
Put forth effort, the integrated control cabinet by automatically controlling released part manipulates three-D displacement platform, and then controls two-dimensional layer material and silicon
Dissection scope between piece substrate, the preparation process examinations of two-dimensional layer material are shown by detecting display portion, from
And it is automatically performed the preparation of two-dimensional layer material, it is ensured that prepare area and to prepare thickness complete under stable and controllable process conditions
Into with the advantages of easy to operate, preparation efficiency is high, and final product quality is high and quality stability is good.
Realizing the concrete technical scheme of the utility model purpose is：
A kind of device for preparing two-dimensional layer material automatically based on shearing force, its feature include pressure detecting part, automatic
Control released part and detection display portion；The pressure detecting part is by optics anti-vibration platform, screw rod testing jig, digital display dynamometry
Meter, mother metal objective table are formed；Wherein, screw rod testing jig is provided with handwheel and the force application rod of screw drive, and force application rod, which is provided with, to be surveyed
Power meter seat；Digital display dynamometer is provided with dynamometry touch head；The mother metal objective table is located on the dynamometry touch head of digital display dynamometer,
Digital display dynamometer is on the dynamometer seat of screw rod testing jig, and screw rod testing jig is on optics anti-vibration platform；
The released part that automatically controls is by substrate objective table, electrothermal tube, tracheae, three-D displacement platform and integrated control cabinet structure
Into；Wherein, substrate objective table is provided with electric heating interface tube and gas seat；Three-D displacement platform is provided with driver and Mobile base；
For the substrate objective table on the Mobile base of three-D displacement platform, electrothermal tube, tracheae are respectively arranged on substrate objective table
Electric heating interface tube and gas seat on, integrated control cabinet electrically connects with the driver of electrothermal tube and three-D displacement platform, integrated control cabinet
It is connected with tracheae gas；
The three-D displacement platform for automatically controlling released part is located on the optics anti-vibration platform of pressure detecting part, and from
The substrate objective table of dynamic control released part is located at the lower section of the mother metal objective table of pressure detecting part；
The detection display portion is made up of digit microscope and display screen；The digit microscope is two pieces, respectively edge
On the optics anti-vibration platform for laterally and longitudinally setting and being fixed on pressure detecting part of dynamometer seat, display screen is located at pressure inspection
Survey on the optics anti-vibration platform of part, digit microscope and display screen and the integrated control cabinet photoelectricity company for automatically controlling released part
Connect.
Described integrated control cabinet is the interior control for setting power supply and heater switch, source of the gas and air pump switch and program controller
Cabinet.
The adhesive force that the utility model is surveyed between two-dimensional layer material and silicon chip substrate by pressure detecting portion go-on-go, passes through
The integrated control cabinet manipulation three-D displacement platform of released part is automatically controlled, and then is controlled between two-dimensional layer material and silicon chip substrate
Dissection scope, the preparation process examinations of two-dimensional layer material are shown by detecting display portion, so as to be automatically performed
The preparation of two-dimensional layer material, it is ensured that prepare area and prepare thickness and completed under stable and controllable process conditions, there is behaviour
The advantages of work is easy, and preparation efficiency is high, and final product quality is high and quality stability is good.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is use state diagram of the present utility model.
Embodiment
Refering to Fig. 1, the utility model includes pressure detecting part 1, automatically controls released part 2 and detects display portion 3.
The pressure detecting part 1 is by optics anti-vibration platform 11, screw rod testing jig 12, digital display dynamometer 13, mother metal loading
Platform 14 is formed；Wherein, screw rod testing jig 12 is provided with the force application rod 122 that handwheel and screw rod 121 drive, and force application rod 122 is provided with
Dynamometer seat 123；Digital display dynamometer 13 is provided with dynamometry touch head 131；The mother metal objective table 14 is located at digital display dynamometer 13
Dynamometry touch head 131 on, digital display dynamometer 13 located at screw rod testing jig 12 dynamometer seat 123 on, screw rod testing jig 12 is set
In on optics anti-vibration platform 11.
The released part 2 that automatically controls is by substrate objective table 21, electrothermal tube 22, tracheae 23, three-D displacement platform 24 and comprehensive
Switch board 25 is closed to form；Wherein, substrate objective table 21 is provided with electric heating interface tube and gas seat；Three-D displacement platform 24 is provided with driving
Device and Mobile base 241.
On the Mobile base 241 of three-D displacement platform 24, electrothermal tube 22, tracheae 23 are respectively arranged on the substrate objective table 21
On the electric heating interface tube and gas seat of substrate objective table 21, integrated control cabinet 25 and electrothermal tube 22 and the driver of three-D displacement platform 24
Electrical connection, integrated control cabinet 25 are connected with the gas of tracheae 23.
The three-D displacement platform 24 for automatically controlling released part 2 is located at the optics anti-vibration platform 11 of pressure detecting part 1
On, and the substrate objective table 21 for automatically controlling released part 2 is located at the lower section of the mother metal objective table 14 of pressure detecting part 1.
The detection display portion 3 is made up of digit microscope 31 and display screen 32；The digit microscope 31 is two pieces,
Respectively along the optics anti-vibration platform 11 for laterally and longitudinally setting and being fixed on pressure detecting part 1 of dynamometer seat 123, display
Screen 32 is located on the optics anti-vibration platform 11 of pressure detecting part 1, and digit microscope 31 and display screen 32 are with automatically controlling stripping
The photoelectricity of integrated control cabinet 25 connection of part 2.
Described integrated control cabinet 25 is the interior control for setting power supply and heater switch, source of the gas and air pump switch and program controller
Cabinet.
Embodiment
Refering to Fig. 1, Fig. 2, the process that the utility model prepares two-dimensional layer material is as follows：Need to prepare two-dimensional layer before preparation
Material mother metal 5 and silicon chip substrate 4.
Step 1：Hole silicon chip substrate 4 Jing Guo oxygen plasma hydrophilicity-imparting treatment being covered on substrate objective table 21
On, the air pump switch in integrated control cabinet 25 is opened, is firmly adsorbed silicon chip substrate 4 in substrate loading by tracheae 23 and gas seat
On platform 21.
Step 2：Selection surface is smooth and the two-dimensional layer material mother metal 5 of corrugationless uses sticking double faced adhesive tape in mother metal objective table
On 14.
Step 3：Start the driver that integrated control cabinet 25 drives three-D displacement platform 24, three-D displacement platform 24 is prevented in optics
Plane interior edge X-axis and the Y-axis movement of platform 11 are shaken, silicon chip substrate 4 is located at the underface of two-dimensional layer material mother metal 5.
Step 4：Handwheel on rotary screw testing jig 12, force application rod 122, digital display dynamometer 13 are driven by screw rod 121
And mother metal objective table 14 is descending so that two-dimensional layer material mother metal 5 touches silicon chip substrate 4, by the number for being arranged on two orientation
Code microscope 31 monitors the vertical range between mother metal objective table 14 and substrate objective table 21, and shows silicon chip on the display screen 32
Substrate 4 touches the image of state with two-dimensional layer material mother metal 5, and is 0.002 by reading positive pressure value on digital display dynamometer 13
N。
Step 5：Start the driver of the program controller driving three-D displacement platform 24 of integrated control cabinet 25, make three-D displacement platform 24
Moved towards the vertical direction of the plane of optics anti-vibration platform 11 along Z axis, adjustment two-dimensional layer material mother metal 5 and silicon chip substrate 4 it
Between contact force, and by digital display dynamometer 13 read positive pressure value be 0.3N.
Movement locus of the three-D displacement platform 24 in X-axis and Y direction is set by the program controller of integrated control cabinet 25, and will
Movement velocity is set to 2 mm/s.
Step 6：The heater switch in integrated control cabinet 25 is opened, sets the temperature of electrothermal tube 22 as 100 DEG C, during holding
Between be 5 minutes so that peeled off between two-dimensional layer material mother metal 5 and silicon chip substrate 4 in shearing shape, realize that area is big and thickness of thin
Two-dimensional layer material preparation.
Step 7：Handwheel on rotary screw testing jig 12, force application rod 122, digital display dynamometer 13 are driven by screw rod 121
And mother metal objective table 14 is up so that two-dimensional layer material mother metal 5 departs from silicon chip substrate 4, is monitored by digit microscope 31
Vertical range between mother metal objective table 14 and substrate objective table 21, and silicon chip substrate 4 and two-dimensional layer are shown on the display screen 32
The image of the disengaged position of shape material mother metal 5；The air pump switch closed in integrated control cabinet 25, substrate objective table 21 is to silicon chip substrate
4 lose absorption, and silicon chip substrate 4 is removed from substrate objective table 21, complete the preparation of two-dimensional layer material.
To improve the adhesive force between two-dimensional layer material and silicon chip substrate 4, the utility model is on substrate objective table 21
There is provided electrothermal tube 22, passes through the heater switch in integrated control cabinet 25, the operating temperature of control electrothermal tube 22, beneficial to two-dimensional layer
The preparation of shape material, it prepares area and prepares thickness and is completed under stable and controllable process conditions, it is ensured that the quality of finished product
And the stability of quality.
Claims (2)
1. a kind of device for preparing two-dimensional layer material automatically based on shearing force, it is characterised in that it includes pressure detecting part
（1）, automatically control released part（2）And detection display portion（3）；The pressure detecting part（1）By optics anti-vibration platform
（11）, screw rod testing jig（12）, digital display dynamometer（13）And mother metal objective table（14）Form；Wherein, screw rod testing jig（12）On
Provided with handwheel and screw rod（121）The force application rod of driving（122）, force application rod（122）It is provided with dynamometer seat（123）；Digital display dynamometry
Meter（13）It is provided with dynamometry touch head（131）；The mother metal objective table（14）Located at digital display dynamometer（13）Dynamometry touch head
（131）On, digital display dynamometer（13）Located at screw rod testing jig（12）Dynamometer seat（123）On, screw rod testing jig（12）It is located at
Optics anti-vibration platform（11）On；
It is described to automatically control released part（2）By substrate objective table（21）, electrothermal tube（22）, tracheae（23）, three-D displacement platform
（24）And integrated control cabinet（25）Form；Wherein, substrate objective table（21）It is provided with electric heating interface tube and gas seat；Three-D displacement platform
（24）It is provided with driver and Mobile base（241）；The substrate objective table（21）Located at three-D displacement platform（24）Mobile base
（241）On, electrothermal tube（22）, tracheae（23）It is respectively arranged on substrate objective table（21）Electric heating interface tube and gas seat on, comprehensive control
Cabinet processed（25）With electrothermal tube（22）And three-D displacement platform（24）Driver electrical connection, integrated control cabinet（25）With tracheae（23）Gas
Connection；
It is described to automatically control released part（2）Three-D displacement platform（24）Located at pressure detecting part（1）Optics anti-vibration platform
（11）On, automatically control released part（2）Substrate objective table（21）Positioned at pressure detecting part（1）Mother metal objective table（14）
Lower section；
The detection display portion（3）By digit microscope（31）And display screen（32）Form；The digit microscope（31）For
Two pieces, respectively along dynamometer seat（123）Laterally and longitudinally setting and be fixed on pressure detecting part（1）Anti-vibration platform（11）
On, display screen（32）It is located at pressure detecting part（1）Optics anti-vibration platform（11）On, digit microscope（31）And display screen
（32）With automatically controlling released part（2）Integrated control cabinet（25）Connection.
2. the device according to claim 1 for preparing two-dimensional layer material automatically based on shearing force, it is characterised in that comprehensive
Switch board（25）For the interior switch board for setting power supply and heater switch, source of the gas and air pump switch and program controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720667180.8U CN206891938U (en) | 2017-06-09 | 2017-06-09 | A kind of device for preparing two-dimensional layer material automatically based on shearing force |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720667180.8U CN206891938U (en) | 2017-06-09 | 2017-06-09 | A kind of device for preparing two-dimensional layer material automatically based on shearing force |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206891938U true CN206891938U (en) | 2018-01-16 |
Family
ID=61317520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720667180.8U Active CN206891938U (en) | 2017-06-09 | 2017-06-09 | A kind of device for preparing two-dimensional layer material automatically based on shearing force |
Country Status (1)
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| CN (1) | CN206891938U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107167424A (en) * | 2017-06-09 | 2017-09-15 | 华东师范大学 | A kind of device for preparing two-dimensional layer material automatically based on shearing force |
| CN114778246A (en) * | 2022-04-19 | 2022-07-22 | 山东金力王实业有限公司 | Kaolin preparation device based on Internet of things and control method |
-
2017
- 2017-06-09 CN CN201720667180.8U patent/CN206891938U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107167424A (en) * | 2017-06-09 | 2017-09-15 | 华东师范大学 | A kind of device for preparing two-dimensional layer material automatically based on shearing force |
| CN114778246A (en) * | 2022-04-19 | 2022-07-22 | 山东金力王实业有限公司 | Kaolin preparation device based on Internet of things and control method |
| CN114778246B (en) * | 2022-04-19 | 2022-11-01 | 山东金力王实业有限公司 | Kaolin preparation device based on Internet of things and control method |
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