CN206789520U - High-power wide cut deflection of a beam of electrons scanning means - Google Patents
High-power wide cut deflection of a beam of electrons scanning means Download PDFInfo
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- CN206789520U CN206789520U CN201720481928.5U CN201720481928U CN206789520U CN 206789520 U CN206789520 U CN 206789520U CN 201720481928 U CN201720481928 U CN 201720481928U CN 206789520 U CN206789520 U CN 206789520U
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Abstract
A kind of high-power wide cut deflection of a beam of electrons scanning means, the device uses two independent coils, one to produce the deflection coil in deflection of a beam of electrons magnetic field, another be used for produce high frequency sweep magnetic field, realize the scanning coil of deflection of a beam of electrons function and scan function respectively；Described deflection coil provides power supply by deflection power, and described scanning coil provides power supply by scanning power supply.Utilize the separated structure of independent deflection coil and scanning coil, solves the problem that traditional single coil structure is difficult to high-power more than the 300mm wide cuts deflection of a beam of electrons scanning machinings of more than 30kw, and setting scan synthesis track and complex part processing can be programmed by CNC system, available for the great-power electronic beam process equipment such as great-power electronic beam welding machine, electron beam furnace, electron beam 3 D-printing and its E.B surface treatment.
Description
Technical field
A kind of deflection of a beam of electrons scanning means is the utility model is related to, more particularly to one kind can realize high-power wide cut electricity
The device of beamlet deflection scanning processing, belongs to great-power electronic beam manufacture field.
Background technology
Traditional deflection of a beam of electrons scanning system is coiling x directions and y directions deflection coil on same annular core,
Electron beam is set to produce deflection by adding d. c. voltage signal on deflection coil, the amplitude of d. c. voltage signal determines electron beam
The angular dimension of deflection；An AC signal is superimposed on deflection coil again, the amplitude of AC signal determines electron beam scanning
Amplitude；The frequency of AC signal determines the speed of electron beam scanning.Such deflection and scanning system for routine 30kw with
Narrow electron-beam scanning system within interior small-power, 2khz low frequency, 100mm is suitable.
Documents 1, disclose in the Chinese patent literature of Application No. 201310346506. 3 and a kind of be used for electron beam
The electromagnetic deflection scanning coil structure and winding method of processing, there is provided a kind of Distribution of Magnetic Field is uniform, eddy-current loss is low is used for electricity
The electromagnetic deflection scanning coil of beamlet processing, reduces the size and weight of coil, has saved manufacturing cost.Suitable for electron beam
The small power electric beamlet such as welding equipment processing space closes, and the scanning coil is the winding deflection coil on same iron core, is realized simultaneously
Deflection and scan function.
Documents 2, electricity can be realized by disclosing one kind in the Chinese patent literature of Application No. 201510814394.9
Control device, method and the increasing material manufacturing equipment that can realize electron beam broad width scanning of beamlet broad width scanning, have used one
Kind astigmatism coil, to produce the astigmatism magnetic that disappears, disappears astigmatism magnetic field to control astigmatism degree by caused；Not only can be by changing
Become focus coil current to make electron beam well focussed, astigmatism coil current can also be disappeared by changing to eliminate the picture of electron beam
Dissipate so that beam spot remains in that better quality.The utility model is also the winding deflection coil on same iron core, while is realized inclined
Turn and scan function.The electron beam process equipment for being adapted to power to be not more than 3kw.
With the continuous development of electron Beam Machining, electron beam process power requirement increases to 30-300kw, scanning frequency
Rate will also increase to more than 3-30khz, and sweep length increases to 100mm-300mm.Such working condition, conventional deflection are swept
The needs of electron beam process equipment can not have been met by retouching system.Specific manifestation is in the following areas：First, the increase of power causes electricity
Beamlet stream increases and accelerating potential increase, and wherein electronic beam current increase means the increase of electron beam spot area, it is desirable to deflection wire
Loop diameter increase, and the increase of deflection coil diameter certainly will cause magnetic deflection field uneven, so easily cause part electronics diverging
And electron gun bottom is got to, or even can get on deflection coil, cause deflection coil to damage；The raising of accelerating potential can cause
Electron beam velocity increase, the deflection angle that reach same require to provide bigger deflection power, and the increasing of deflection power,
The increase of deflection coil operating temperature can be made, it is unfavorable that deflection coil is insulated.Secondly, scan frequency increase, it is meant that coil reactance
Increase, the supply voltage amplitude that producing same deflection angle needs require higher, and some occasion high voltages can reach thousands of volts,
So high voltage magnitude can damage coil insulation.Iron core is it is necessary that with high-frequency soft magnetic iron core simultaneously, and high-frequency soft magnetic iron core
Its permeability is often very low, and this can reduce the magnetic field intensity of deflection coil.Broad width scanning is needed the angle increasing of deflection of a beam of electrons
Greatly, that is, deflection scanning DC component require increase, excessive DC component, which is added on iron core, can cause iron core magnetic bias, make
Coil inductance reduce, can not only reduce stray magnetic field strength, can also it is non-linear due to inductance and cause electron beam scanning energy
Skewness, influence electron beam process quality.High-power high-frequency wide cut is not suitable for it to solve traditional deflection and scanning system
Electron beam process demand, utility model people of the present utility model pass through continuous experimental study, develop the utility model finally.
Utility model content
The purpose of this utility model is to propose a kind of dress that can realize high-power wide cut deflection of a beam of electrons scanning machining
Put, high-power wide cut electron beam is realized using the separated structure of independent deflection coil and scanning coil and its CNC control systems
Deflection scanning is processed, available for great-power electronic beam welding machine, electron beam furnace, electron beam 3 D-printing and its electron beam surface
The great-power electronic beam process equipments such as processing.
To realize above-mentioned purpose of utility model, the technical solution adopted in the utility model is as follows：
A kind of high-power wide cut deflection of a beam of electrons scanning means, the device use two independent coils, and one producing
The deflection coil 1 in raw deflection of a beam of electrons magnetic field, another is used to produce high frequency sweep magnetic field, realize deflection of a beam of electrons function respectively
With the scanning coil 2 of scan function；Described deflection coil 1 provides power supply by deflection power 3, and described scanning coil 2 is by sweeping
Retouch power supply 4 and power supply is provided.
Described high-power wide cut deflection of a beam of electrons scanning means, the device include：For the upper of numerical programming program
Control computer 5, the next programmable controller（PLC）6；It is inclined that described deflection coil 1 includes deflection coil iron core 1-1, x directions
Switch coil 1-2 and y directions deflection coil 1-3, described scanning coil 2 include scanning coil iron core 2-1, x scanning direction line
Enclose 2-2 and y scanning direction coils 2-3；Described deflection power 3 gives x directions deflection coil 1-2 and y directions deflection coil 1-3
Power supply, described scanning power supply 4 are powered to x scanning direction coil 2-2 and y scanning direction coils 2-3；Described upper control meter
Calculation machine 5 connects described the next programmable controller by communication bus（PLC）6, described the next programmable controller（PLC）
6 convert digital signals into analog signal and control signal are output into described deflection power 3 and described scanning power supply 4,
Deflection current is linked into described deflection coil 1 by described deflection power 3, realizes deflection of a beam of electrons；Described scanning power supply 4
Sweep current is linked into described scanning coil 2, realizes electron beam scanning；Described deflection coil 1 and described scan line
Below electron gun focusing coil 7, described deflection coil 1 is arranged on above described scanning coil 2 circle 2.
Described high-power wide cut deflection of a beam of electrons scanning means, described deflection coil 1 and described scanning coil 2 it
Between turn ratio be 5:1 to 10:Between 1.
Described high-power wide cut deflection of a beam of electrons scanning means, described x directions deflection coil 1-2 and described y side
It is 1 to the turn ratio between deflection coil 1-3：1, described x scanning direction coil 2-2 and described y scanning direction coils 2-3
Between turn ratio be 1：1.
Described high-power wide cut deflection of a beam of electrons scanning means, after electron beam enters described deflection coil 1, electricity
The sub angle that in the presence of magnetic deflection field, one ± 15 ° of disalignment；Electron beam enters after described scanning coil 2,
In the presence of AC magnetic field is scanned, multiple scanning is realized according to the scanning patter and frequency of program setting, so as to realize electronics
Beam scanning is processed.
Described high-power wide cut deflection of a beam of electrons scanning means, the deflection coil iron core 1-1 choosings of described deflection coil 1
With the glass that permeability is high, mechanical strength is good not alloy-iron core material；The scanning coil iron core 2-1 of described scanning coil 2 is selected
High-frequency soft magnetic iron core.
Described high-power wide cut deflection of a beam of electrons scanning means, the x directions deflection coil of described deflection coil 1（1-
2）With y directions deflection coil（1-3）It is wound on respectively on iron core 1-1, the model of the number of ampere turns of deflection coil 1 in 800-1000 ampere-turns
In enclosing, number of turn scope uses 1600-2000 circles, can so reduce exciting current so that and exciting current is no more than 0.5 ampere,
Reduce coil heating amount.
Described high-power wide cut deflection of a beam of electrons scanning means, described scanning coil（2）X scanning direction coils（2-
2）With y scanning direction coils（2-3）It is wound on respectively on iron core, scanning coil（2）Number of ampere turns in 500-800 ampere-turn scopes
Interior, number of turn scope is used between 200-400, can reduce high frequency reactance, reduces winding volume, and additional space can be with
Increase the thickness of insulating layer of coil, so as to improve scanning coil（2）High-tension ability is born, coil stress levels can reach
10kV。
It is using the beneficial effects of the utility model：Using the separated structure of independent deflection coil and scanning coil,
Solve the problem that traditional single coil structure is difficult to high-power wide cut deflection of a beam of electrons scanning machining, and CNC systems can be passed through
Unified editing journey sets scan synthesis track and complex part processing, available for great-power electronic beam welding machine, electron beam furnace, electronics
The great-power electronic beam process equipment such as beam 3 D-printing and its E.B surface treatment., can be very due to using two coil configuration
It is convenient to need to set a variety of sweep waveforms, sweep length and scan frequency according to various different application occasions.Cause
There are two groups of mutually perpendicular coils of x directions deflection coil and y directions deflection coil respectively for deflection coil, it is possible to achieve x directions
With the deflection of a beam of electrons in y directions normal thereto；Scanning coil also has two groups of lines of x scanning directions coil and y scanning directions coil
Circle, it is possible to achieve the electron beam scanning in x directions and y directions normal thereto.Every group of coil provides independent power supply, can be with
The input of each power supply is set by computer control system, so as to adjust electron-beam position and translational speed, mark can be passed through
Electron beam scanning machining locus and process control are realized in quasi- CNC numerical controls Programming with Pascal Language, and pass through the different combination of four direction
Realize the electron beam scanning processing of complex part.
Brief description of the drawings
Fig. 1 is the schematic diagram of high-power wide cut deflection of a beam of electrons scanning means described in the utility model；
Fig. 2 shows the one embodiment for having used electron beam scanning processing of the present utility model；
Fig. 3 electron gun substructure schematic diagrames.
Embodiment
Structure of the present utility model and the course of work are described in detail below in conjunction with the accompanying drawings.
As shown in Figure 1, Figure 3, it is high-power wide cut deflection of a beam of electrons scanning means described in the utility model, under electron gun
The structural representation in portion；A kind of high-power wide cut deflection of a beam of electrons scanning means, the device use two independent coils, one
To produce the deflection coil 1 in deflection of a beam of electrons magnetic field, another is used to produce high frequency sweep magnetic field, realize that electron beam is inclined respectively
The scanning coil 2 of rotating function and scan function；Described deflection coil 1 provides power supply, described scanning coil by deflection power 3
2 provide power supply by scanning power supply 4；The device includes：Upper control computer 5, bottom for numerical programming program is programmable
Controller（PLC）6；Described deflection coil 1 deflects comprising deflection coil iron core 1-1, x directions deflection coil 1-2 and y directions
Coil 1-3, described scanning coil 2 include scanning coil iron core 2-1, x scanning direction coil 2-2 and y scanning direction coil
2-3；Described deflection power 3 is powered to x directions deflection coil 1-2 and y directions deflection coil 1-3, and described scanning power supply 4 is given
X scanning direction coil 2-2 and y scanning direction coils 2-3 powers；Described upper control computer 5 is connected by communication bus
Described the next programmable controller（PLC）6, described the next programmable controller（PLC）6 convert digital signals into simulation
Control signal is simultaneously output to described deflection power 3 and described scanning power supply 4 by signal, and described deflection power 3 will deflect
Electric current is linked into described deflection coil 1, realizes deflection of a beam of electrons；Sweep current is linked into described by described scanning power supply 4
Scanning coil 2, realize electron beam scanning；Described deflection coil 1 and described scanning coil 2 are mounted in electron gun focusing coil
Below 7, described deflection coil 1 is arranged on above described scanning coil 2；Described deflection coil 1 and described scan line
Turn ratio between circle 2 is 5:1 to 10:Between 1；Described x directions deflection coil 1-2 and described y directions deflection coil 1-3
Between turn ratio be 1：Turn ratio between 1, described x scanning direction coil 2-2 and described y scanning direction coils 2-3
For 1：1；After electron beam enters described deflection coil 1, electronics in the presence of magnetic deflection field, disalignment one ±
15 ° of angle；Electron beam enters after described scanning coil 2, in the presence of AC magnetic field is scanned, according to program setting
Scanning patter and frequency realize multiple scanning, so as to realize that electron beam scanning is processed；The deflection coil iron of described deflection coil 1
Core 1-1 selects the good glass of permeability height, mechanical strength not alloy-iron core material；The scanning coil iron core of described scanning coil 2
2-1 selects high-frequency soft magnetic iron core.
In Fig. 1, upper control computer 5 realizes digital control processing Programming with Pascal Language, can process needs according to equipment, will add
Work process and numerical control program pre-enter computer, and electron beam process equipment will be added according to technique as defined in numerical control program
Work.Upper control computer 5 connects the next programmable controller by communication bus（PLC）6, the next programmable controller
（PLC）6 convert digital signals into analog signal and control signal are output into deflection power 3 and scanning power supply 4.Deflection power
Deflection current is linked into deflection coil 1 by 3, realizes deflection of a beam of electrons.Sweep current is linked into scanning coil 2 by scanning power supply 4,
Realize electron beam scanning.Deflection coil 1 and scanning coil 2 are below electron gun focusing coil.Deflection coil 1 is mounted in scan line
Above circle 2, after electron beam enters deflection coil 1, electronics is in the presence of magnetic deflection field, one angle of disalignment,
Deflection scanning device deflection angle of the present utility model can reach ± 15 °, can realize wide cut electron beam process.Electron beam enters
After entering scanning coil 2, in the presence of AC magnetic field is scanned, realized according to the scanning patter and frequency of program setting and repeat to sweep
Retouch, so as to realize that electron beam scanning is processed.
Deflection coil mainly realizes deflection of a beam of electrons function, because magnetic deflection field is mainly used in beam spot positioning, there is provided
Electric current be mainly DC component, the frequency of electron beam movement need not too high-frequency, can select that permeability is high, mechanical strength
Good glass not alloy-iron core material.X directions deflection coil and y directions deflection coil are wound on iron core respectively, and deflection coil exists
In the case of certain number of ampere turns, the higher number of turn can be used, and reduces exciting current.So deflection power can reduce, so as to
Reduce coil heating amount.
Scanning coil mainly realizes electron beam scanning function, and periodically fortune is done because scanning magnetic field is mainly used in electron beam
It is dynamic, there is provided mainly AC compounent, electron beam travel frequency is often very high, and some application requirements frequencies reach 30khz, so
High-frequency soft magnetic iron core can be selected.X scanning directions coil and y scanning direction coils are wound on iron core respectively, and scanning coil exists
In the case of certain number of ampere turns, the relatively low number of turn can be used, to reduce high frequency reactance, while reduces winding volume, increase excitation
Electric current, although such scan power increases, because volume is reduced, there are enough spaces to increase coil insulation intensity, so as to
Improve scanning coil and bear high-tension ability, coil stress levels can reach 10kV, so as to meet high-power wider area of high-frequency
The needs of electron beam scanning processing.
The utility model realizes high-power wide cut electricity using independent deflection coil and scanning coil and its CNC control systems
Beamlet deflection scanning is processed, available for great-power electronic beam welding machine, electron beam furnace, electron beam 3 D-printing and its electron beam
The great-power electronic beam process equipments such as surface treatment.
The utility model realizes deflection of a beam of electrons and scan function respectively using two coil configuration, and deflection coil produces deflection
Magnetic field, deflection of a beam of electrons function is realized, magnetic deflection field is mainly used in beam spot positioning, and control electronics is located at processing stand, scanned
Coil produces scanning magnetic field, realizes electron beam scanning function, and scanning magnetic field is mainly used in controlling electron beam to do cycle movement, allowed
Electron beam can be set in motion and workpieces processing on workpiece by preset program.It is inclined that two coil configuration can effectively solve traditional unicoil
Transfer from one department to another system and process technological deficiency existing for occasion in high-power high-frequency broad width scanning, first, the increase of power causes electronic beam current
Increase and accelerating potential increase, wherein electronic beam current increase mean the increase of electron beam spot area, it is desirable to deflection coil diameter
Increase, and be worth and require higher, some occasion high voltages can reach thousands of volts, and so high voltage magnitude can damage coil and deflect absolutely
Coil diameter increase certainly will cause magnetic deflection field uneven, so easily cause part electronics diverging and get under electron gun
Portion, or even can get on deflection coil, cause deflection coil to damage；The raising of accelerating potential can cause electron beam velocity to increase,
The deflection angle for reaching same requires to provide bigger deflection power, and the increasing of deflection power, can make deflection coil work
Make temperature increase, it is unfavorable that deflection coil is insulated.Two coil configuration deflection and scanning system structure is led because its deflection coil uses
The high core material of magnetic rate, under conditions of core volume is not increased, it can be increased by way of increasing coil turn partially
Turn magnetic field intensity, and the uniformity of space magnetic field can also improve, it is strong to increase magnetic field without the mode by increasing exciting power
Degree, thus will not also cause coil to overheat.Secondly, scan frequency increase, it is meant that coil reactance increase, produce same deflection
The supply voltage width edge that angle needs.Iron core is it is necessary that with high-frequency soft magnetic iron core simultaneously, and high-frequency soft magnetic iron core its permeability
Often very low, this can reduce the magnetic field intensity of deflection coil.Using two coil configuration, deflection coil only provides the deflection magnetic of low frequency
, it is possible to achieve electron beam wide-angle wide cut deflects, and scanning coil uses soft magnetic materials iron core, can be adapted to scan frequency 30khz-
50khz scan frequency.And the scanning coil number of turn relative can be reduced, and have enough space coiling high-strength insulating materials, with
High frequency coil stress levels are improved, coil compressive resistance can reach 10kV.Deflection coil and scanning coil are separated, can be effective
Solves the contradiction that unicoil low-and high-frequency characteristic can not be taken into account.3rd, in traditional single coil structure deflection and scanning system, wide cut is swept
Retouching needs the angle increase of deflection of a beam of electrons, that is, the DC component of deflection scanning requiring increase, excessive DC component
Iron core magnetic bias can be caused by being added on iron core so that coil inductance reduces, and can not only reduce stray magnetic field strength, can also be due to inductance
It is non-linear and cause electron beam scanning Energy distribution it is uneven, influence electron beam process quality.Swept using two coil configuration deflection
System is retouched, deflection coil deflects for electron beam wide-angle wide cut, and coil turn, which improves, can increase coil inductance, due to deflection
Magnetic field need not change direction rapidly, so the induction reactance that D.C. magnetic biasing does not interfere with coil be present.And scanning coil only needs to control
Electron beam processed does high frequency sweep, it is not necessary to controls electron beam to do and significantly deflects, in the absence of DC component, so scanning coil work
The linear zone of magnetization curve can be always worked in by making point.It so can guarantee that electron beam scanning Energy distribution is uniform, so as to ensure electricity
Beamlet crudy.
In the embodiment depicted in figure 2, the twin coil great-power electronic beamwidth width deflection scanning device of utility model is applied to
In electron beam surface modification process equipment.Electron beam surface modification technology has at conventional surface as a kind of emerging technology
The unexistent advantage of reason technology.For mould surface be modified for, electron beam can be accurately controlled surface be modified position and
Energy.With cleaning, efficiently, low energy consumption the advantages of.And the heating of electron beam surface modification process in which materials surface moment, cooling,
Modified effect will be substantially better than normative heat treatment.At present, by electron beam surface modification technology be applied to mould industry in China still
In conceptual phase, still there is very big distance apart from industrialized level.Fig. 2 show the outline drawing of certain military project diel,
Sectional area is the circular staking punch that various different-diameters are dispersed with 800mmx600mm region, in order to improve mould strength,
Need to coat one layer of refractory metal alloy layer in each punching press head surface, technological requirement carries out electron beam surface to each staking punch
It is modified, because staking punch distribution is wide, quantity is more and size specification differs, determine to scan using twin coil wide cut deflection of a beam of electrons
Device is programmed processing, first by the center where deflection of a beam of electrons to staking punch, recycles electron beam circular scan ripple
Shape, which carries out the parameters such as quick scanning heating, sweep radius, time and frequency to staking punch, to be set by the programming of CNC numerical control programs
It is fixed.Electron beam process region can cover whole workpiece, it is desirable to which deflection of a beam of electrons angle reaches ± 15 °, electron beam process power
Reach 80kW, high-power wide cut deflection scanning device provided by the utility model can meet the needs of the application scenario.
It is described above to be merely exemplary for the utility model, and nonrestrictive, those of ordinary skill in the art
Understand, in the case where not departing from the spirit and scope that claim is limited, many modifications, change or equivalent can be made, but
Fall within the scope of protection of the utility model.
Claims (8)
- A kind of 1. high-power wide cut deflection of a beam of electrons scanning means, it is characterised in that the device uses two independent coils, and one It is individual producing the deflection coil in deflection of a beam of electrons magnetic field（1）, another is used to produce high frequency sweep magnetic field, realize electronics respectively The scanning coil of beam steering function and scan function（2）；Described deflection coil（1）By deflection power（3）Power supply is provided, it is described Scanning coil（2）By scanning power supply（4）Power supply is provided.
- 2. high-power wide cut deflection of a beam of electrons scanning means according to claim 1, it is characterised in that the device includes： Upper control computer for numerical programming program（5）, the next programmable controller PLC（6）；Described deflection coil（1） Include deflection coil iron core（1-1）, x directions deflection coil（1-2）And y directions deflection coil（1-3）, described scanning coil （2）Include scanning coil iron core（2-1）, x scanning direction coils（2-2）And y scanning direction coils（2-3）；Described deflection Power supply（3）Give x directions deflection coil（1-2）With y directions deflection coil（1-3）Power supply, described scanning power supply（4）Give x directions Scanning coil（2-2）With y scanning direction coils（2-3）Power supply；Described upper control computer（5）Pass through the described the next programmable controller PLC of communication bus connection（6）, it is described The next programmable controller PLC（6）Convert digital signals into analog signal and control signal is output to described deflection Power supply（3）With described scanning power supply（4）, described deflection power（3）Deflection current is linked into described deflection coil （1）, realize deflection of a beam of electrons；Described scanning power supply（4）Sweep current is linked into described scanning coil（2）, realize electricity Beamlet scans；Described deflection coil（1）With described scanning coil（2）Mounted in electron gun focusing coil（7）Below, it is described Deflection coil（1）Installed in described scanning coil（2）Above.
- 3. high-power wide cut deflection of a beam of electrons scanning means according to claim 1, it is characterised in that described deflection wire Circle（1）With described scanning coil（2）Between turn ratio be 5:1 to 10:Between 1.
- 4. high-power wide cut deflection of a beam of electrons scanning means according to claim 2, it is characterised in that described x directions Deflection coil（1-2）With described y directions deflection coil（1-3）Between turn ratio be 1：1, described x scanning direction coils （2-2）With described y scanning direction coils（2-3）Between turn ratio be 1：1.
- 5. high-power wide cut deflection of a beam of electrons scanning means according to claim 1 or 2, it is characterised in that work as electron beam Into described deflection coil（1）Afterwards, electronics is in the presence of magnetic deflection field, the angle that one ± 15 ° of disalignment；Electricity Beamlet enters described scanning coil（2）Afterwards, in the presence of AC magnetic field is scanned, according to program setting scanning patter and Frequency realizes multiple scanning, so as to realize that electron beam scanning is processed.
- 6. high-power wide cut deflection of a beam of electrons scanning means according to claim 1 or 2, it is characterised in that described is inclined Switch coil（1）Deflection coil iron core（1-1）From the glass that permeability is high, mechanical strength is good not alloy-iron core material；Described Scanning coil（2）Scanning coil iron core（2-1）From high-frequency soft magnetic iron core.
- 7. high-power wide cut deflection of a beam of electrons scanning means according to claim 2, it is characterised in that described deflection wire Circle（1）X directions deflection coil（1-2）With y directions deflection coil（1-3）It is wound on respectively on iron core, deflection coil（1） In the case of 800-1000 numbers of ampere turns, the number of turn can use 1600-2000 circles, can so reduce exciting current so that excitation electricity Stream is no more than 0.5 ampere, so as to reduce coil heating amount.
- 8. high-power wide cut deflection of a beam of electrons scanning means according to claim 2, it is characterised in that described scan line Circle（2）X scanning direction coils（2-2）With y scanning direction coils（2-3）It is wound on respectively on iron core, scanning coil（2）In 500- In the case of 800 numbers of ampere turns, the relatively low number of turn can be used, number of turn scope is in 200-400 circles, to reduce high frequency reactance, reduction Winding volume, increase exciting current, improve scanning coil（2）High-tension ability is born, coil stress levels can reach 10kV。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720481928.5U CN206789520U (en) | 2017-05-03 | 2017-05-03 | High-power wide cut deflection of a beam of electrons scanning means |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720481928.5U CN206789520U (en) | 2017-05-03 | 2017-05-03 | High-power wide cut deflection of a beam of electrons scanning means |
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| CN206789520U true CN206789520U (en) | 2017-12-22 |
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| CN201720481928.5U Expired - Fee Related CN206789520U (en) | 2017-05-03 | 2017-05-03 | High-power wide cut deflection of a beam of electrons scanning means |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111673259A (en) * | 2020-07-13 | 2020-09-18 | 广东省焊接技术研究所（广东省中乌研究院） | Split type electron beam deflection coil and electron beam equipment |
-
2017
- 2017-05-03 CN CN201720481928.5U patent/CN206789520U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111673259A (en) * | 2020-07-13 | 2020-09-18 | 广东省焊接技术研究所（广东省中乌研究院） | Split type electron beam deflection coil and electron beam equipment |
| CN111673259B (en) * | 2020-07-13 | 2023-10-31 | 广东省焊接技术研究所（广东省中乌研究院） | Split type electron beam deflection yoke and electron beam apparatus |
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