CN206706250U - Seedholder and crystal growth equipment - Google Patents

Seedholder and crystal growth equipment Download PDF

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Publication number
CN206706250U
CN206706250U CN201720234579.7U CN201720234579U CN206706250U CN 206706250 U CN206706250 U CN 206706250U CN 201720234579 U CN201720234579 U CN 201720234579U CN 206706250 U CN206706250 U CN 206706250U
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CN
China
Prior art keywords
seed crystal
attachment structure
supporting rod
seedholder
fastener
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201720234579.7U
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Chinese (zh)
Inventor
戎峻
杨勇
陈翼
吴勇强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qinghai Jingyu Crystal Technology Co Ltd
Original Assignee
Qinghai Jingyu Crystal Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by Qinghai Jingyu Crystal Technology Co Ltd filed Critical Qinghai Jingyu Crystal Technology Co Ltd
Priority to CN201720234579.7U priority Critical patent/CN206706250U/en
Application granted granted Critical
Publication of CN206706250U publication Critical patent/CN206706250U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model provides a kind of seedholder and crystal growth equipment, it is related to kyropoulos and manufactures sapphire technical field, the seedholder includes seed crystal supporting rod and bindiny mechanism, seed crystal supporting rod is socketed with bindiny mechanism, and there is certain gap between seed crystal supporting rod and the inwall of bindiny mechanism, so that seed crystal supporting rod can be swung relative to bindiny mechanism, so as to discharge the cross force that crystal applies to seed crystal supporting rod, seed crystal is prevented to be broken or connect rod bending.

Description

Seedholder and crystal growth equipment
Technical field
It the utility model is related to kyropoulos and manufacture sapphire technical field, more particularly, to a kind of seedholder and crystalline substance Body growth apparatus.
Background technology
Sapphire crystal (being commonly called as corundum) has high optical transmittance, also with high mechanical properties, extremely low absorption system Number, high temperature refractoriness, good chemical stability, is excellent laser host material, is various optical elements and infrared military affairs Device, satellite spatial technology, the window material of high intensity laser beam.At present, sapphire growing method mainly has czochralski method, reverse mould Method, kyropoulos, heat-exchanging method etc..Wherein kyropoulos growing system possesses the optimum temperature gradation of suitable sapphire product body growth. During the growth or at the end of, crystal does not contact with crucible, greatly reduces its stress, can obtain the big crystalline substance of high quality Body, it is the main stream approach of current sapphire crystal growth.
Sapphire is produced using kyropoulos, raw material is first melted to the molten soup of formation after crucible is heated to fusing point, recycles seed After brilliant clamper fixes seed crystal, seed crystal is extend into crucible until touching molten soup surface, in seed crystal and solid-liquid circle of molten soup Start the sapphire single-crystal of growth and seed crystal same crystal structure on face.
Only it is connected through a screw thread between connecting rod on seedholder and seeded growth equipment, when in crystal growing process Crystal is shifted phenomenon, and crystal and seed crystal can be caused to misalign the phenomenon of the heart, so as to which seed crystal supporting rod can be by the horizontal stroke of crystal Effect to power, it is easy to the abnormal conditions such as seed crystal fracture or connection rod bending occur, so as to cause production to fail, waste into This.
Utility model content
The purpose of this utility model is to provide a kind of seedholder and crystal growth equipment, to solve existing seed chuck After crystal and seed crystal misalign the heart, seed crystal supporting rod can be acted on holder by the cross force of crystal, it is easy to seed crystal occurs The abnormal conditions such as fracture or connection rod bending, so as to cause production to fail, the technical problem of cost of idleness.
Seedholder provided by the utility model, including seed crystal supporting rod and bindiny mechanism, the seed crystal supporting rod bag Linkage section is included, the end set of the linkage section has the first attachment structure, and the seed crystal supporting rod is along its length to described The projection of first attachment structure falls in first attachment structure;
The bindiny mechanism includes the second attachment structure, and second attachment structure includes diameter from inside to outside and is gradually reduced Hole slot, the linkage section of the seed crystal supporting rod is socketed with the hole slot, and the bar wall of the linkage section and the hole slot inwall Between be provided with fastener, the fastener includes sleeve end and Taper Pipe end, and the end face at described sleeve pipe end is used to propping up described the One attachment structure, the outer wall at the Taper Pipe end is in the conical surface, for being offseted with the inwall of the hole slot, and the maximum of the fastener External diameter is more than the hole slot opening diameter, prevents the seed crystal supporting rod from departing from second attachment structure;
There is lateral clearance, the linkage section and the second attachment structure set between the outer wall and hole slot inwall at described sleeve pipe end After connecing, the inner side of first attachment structure has vertical gap, and the lateral clearance and vertical gap are used for the seed crystal Supporting rod provides swing space.
Further, the fastener includes the first clamping unit and the second clamping unit, first clamping unit and Second clamping unit is used for the bar wall for being clamped in the seed crystal supporting rod linkage section.
Further, it is correspondingly arranged on the binding face of first clamping unit and the second clamping unit raised and recessed Groove, after the projection combines with groove, ensure first clamping unit and the second clamping unit in the fastener length side There is identical motion state upwards.
Further, along the fastener length direction, the oriented Taper Pipe end is set to open on the outer wall of the fastener The fluting of mouth direction extension.
Further, the bindiny mechanism includes the 3rd attachment structure, and the 3rd attachment structure is used for and crystal growth Connecting rod connection in equipment, sets finite place piece between the 3rd attachment structure and fastener, the locating part is used to hinder Only the connecting rod on the crystal growth equipment is entered in the vertical gap.
Further, the locating part is the position-limiting tube with the socket of the first attachment structure.
Further, seed crystal supporting rod includes seed crystal neck, and first is correspondingly arranged in the seed crystal neck opposed inner walls Fixed structure, the first fixed structure are used to tangle seed crystal.
Further, face of the first fixed structure inside the seed crystal supporting rod is inclined-plane, from the connection To the seed crystal neck direction, the distance between two described inclined-planes are gradually reduced for mechanism.
Further, it is provided with winding slot on the outer wall of the seed crystal neck.
The crystal growth equipment that the utility model provides, including above-mentioned seedholder.
Seedholder provided by the utility model, including seed crystal supporting rod and bindiny mechanism, seed crystal supporting rod can lead to The connecting rod for crossing bindiny mechanism and crystal growth equipment links together.The seed crystal supporting rod includes linkage section, the connection The end set of section has the first attachment structure, the seed crystal supporting rod projection to first attachment structure along its length Fall in first attachment structure, seed chuck can be made to hold bar and be stuck in by the first attachment structure in bindiny mechanism.The company Connection mechanism includes the second attachment structure, and second attachment structure includes the hole slot that diameter is gradually reduced from inside to outside, the seed The linkage section of brilliant supporting rod is socketed with the hole slot, and is provided with fastening between the bar wall of the linkage section and the hole slot inwall Part, fastener are used to seed crystal supporting rod being fixed in hole slot.The fastener includes sleeve end and Taper Pipe end, described sleeve pipe end End face be used for prop up first attachment structure, the outer wall at the Taper Pipe end is in the conical surface, for the inwall phase with the hole slot Support, and the maximum outside diameter of the fastener is more than the hole slot opening diameter.Between the outer wall and hole slot inwall at described sleeve pipe end With lateral clearance, after the linkage section and the socket of the second attachment structure, the inner side of first attachment structure have it is vertical between Gap.When the seed crystal that the lower end of seed crystal supporting rod is hung starts growth, it may occur that crystal and seed crystal misalign heart phenomenon, make Thrust into seed crystal supporting rod by horizontal direction.At this moment, linkage section drives bindiny mechanism to be slided obliquely in hole slot, can be with Seed crystal supporting rod is swung within the specific limits, by the change of seed crystal supporting rod relative position, crystal is applied to seed Cross force release on brilliant supporting rod, prevents seed crystal to be broken or connect rod bending.
The crystal growth equipment that the utility model provides, including above-mentioned seedholder.When under seed crystal supporting rod When the seed crystal of end suspension starts growth, it may occur that crystal and seed crystal misalign heart phenomenon, cause seed crystal supporting rod by water Square to thrust.At this moment, linkage section drives bindiny mechanism to be slided obliquely in hole slot, and seed chuck can be made to hold bar certain In the range of swing, by the change of seed crystal supporting rod relative position, crystal is applied to the cross force on seed crystal supporting rod Release, seed crystal is prevented to be broken or connect rod bending.
Brief description of the drawings
, below will be right in order to illustrate more clearly of the utility model embodiment or technical scheme of the prior art The required accompanying drawing used is briefly described in embodiment or description of the prior art, it should be apparent that, describe below In accompanying drawing be some embodiments of the present utility model, for those of ordinary skill in the art, do not paying creativeness On the premise of work, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is the schematic diagram for the seedholder that the utility model embodiment provides;
Fig. 2 is the quick-fried according to figure of the seedholder that the utility model embodiment provides;
Fig. 3 is the profile for the seedholder that the utility model embodiment provides;
Fig. 4 is the schematic diagram of the fastener for the seedholder that the utility model embodiment provides;
Fig. 5 is the schematic diagram of the first clamping unit of the seedholder that the utility model embodiment provides;
Fig. 6 is the profile for the seedholder another kind seed crystal neck that the utility model embodiment provides.
Icon:100- seed crystal supporting rods;The attachment structures of 110- first;200- bindiny mechanisms;300- fasteners;310- first Clamping unit;The clamping units of 320- second;330- sleeve ends;340- Taper Pipes end;350- slots;400- lateral clearances;500- is erected To gap;600- position-limiting tubes;700- seed crystal necks;710- first fixed structures;The fixed structures of 720- second.
Embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with accompanying drawing, it is clear that described Embodiment is the utility model part of the embodiment, rather than whole embodiments.Based on the embodiment in the utility model, sheet The every other embodiment that field those of ordinary skill is obtained under the premise of creative work is not made, belongs to this practicality Novel protected scope.
, it is necessary to explanation in description of the present utility model, term " " center ", " on ", " under ", it is "left", "right", " perpendicular Directly ", the orientation of the instruction such as " level ", " interior ", " outer " or position relationship are based on orientation shown in the drawings or position relationship, are only Described for the ease of description the utility model and simplifying, rather than instruction or imply signified device or element must have it is specific Orientation, with specific azimuth configuration and operation, therefore it is not intended that to limitation of the present utility model.In addition, term " the One ", " second ", " the 3rd " are only used for describing purpose, and it is not intended that instruction or hint relative importance.
As Figure 1-3, seedholder provided by the utility model, including seed crystal supporting rod 100 and bindiny mechanism 200, seed crystal supporting rod 100 can be linked together by bindiny mechanism 200 and the connecting rod of crystal growth equipment.The seed crystal Supporting rod 100 includes linkage section, and the end set of the linkage section has the first attachment structure 110, the edge of seed crystal supporting rod 100 Projection of its length direction to first attachment structure 110 falls in first attachment structure 110, can hold seed chuck Bar 100 is stuck in bindiny mechanism 200 by the first attachment structure 110.The bindiny mechanism 200 includes the second attachment structure, institute Stating the second attachment structure includes diameter is gradually reduced from inside to outside hole slot, the linkage section of the seed crystal supporting rod 100 with it is described Hole slot is socketed, and fastener 300 is provided between the bar wall of the linkage section and the hole slot inwall, and fastener 300 is used for will Seed crystal supporting rod 100 is fixed in hole slot.The fastener 300 includes sleeve end 330 and Taper Pipe end 340, described sleeve pipe end 330 End face be used for prop up first attachment structure 110, the outer wall at the Taper Pipe end 340 is in the conical surface, for the hole slot Inwall offsets, and the maximum outside diameter of the fastener 300 is more than the hole slot opening diameter.The outer wall at described sleeve pipe end 330 with After there is lateral clearance 400, the linkage section and the second attachment structure to be socketed between hole slot inwall, first attachment structure 110 inner side has vertical gap 500.When the seed crystal that the lower end of seed crystal supporting rod 100 is hung starts growth, the liquid of melting The skew of (2045 degree of high temperature) cold heart, or when the reason such as other thermal fields causes the crystal growth to shift, in crystal and seed crystal The heart may not cause thrust of the seed crystal supporting rod 100 by horizontal direction on a position.At this moment, linkage section, which drives, connects Connection mechanism 200 is slided obliquely in hole slot, and seed chuck can be made to hold bar 100 and swung within the specific limits, pass through seed crystal The change of the relative position of supporting rod 100, cross force crystal being applied on seed crystal supporting rod 100 discharge, and prevent seed crystal to be broken Or connection rod bending.
Preferably, as shown in figure 4, the fastener 300 includes the first clamping unit 310 and the second clamping unit 320.Seed Brilliant supporting rod 100 is detachably connected with bindiny mechanism 200, and the linkage section of seed crystal supporting rod 100 can be from the opening of hole slot It extend into hole slot, then additionally stretches out a part of seed crystal supporting rod 100, in the other end of hole slot, by the He of the first clamping unit 310 Second clamping unit 320 is clamped on the bar wall of linkage section, pulls downward on seed crystal supporting rod 100, the first attachment structure 110 card master The upper surface of fastener 300, fastener 300 is driven to enter in hole slot, connection is very convenient.
As shown in figure 5, it is correspondingly arranged on the binding face of the clamping unit 320 of the first clamping unit 310 and second convex Rise and groove, after the first clamping unit 310 and the second clamping unit 320 are bonded, protrude out into groove, in fastener On 300 length directions, the two has identical motion state, and the two together can enter hole slot with seed crystal supporting rod 100 It is interior, prevent after fastener 300 enters hole slot, the first clamping unit 310 and the vertical height of the second clamping unit 320 are not Together.
Preferably, along the length direction of fastener 300, the oriented Taper Pipe is set on the outer wall of the fastener 300 The fluting 350 for holding 340 opening directions to extend.Because the growth of seed crystal is carried out at high temperature under high pressure, and in growth course One attachment structure 110 is pressed down against fastener 300, by being provided with fluting 350 on fastener 300, can cause fastener 300 after by external force, and certain deformation can be produced in default scope, absorbs it at some by partial deformation The external force being subject on point, prevent from causing structural break damaged because external force can not discharge.
The bindiny mechanism 200 includes the 3rd attachment structure, and the 3rd attachment structure is used for and crystal growth equipment Connecting rod connection, the 3rd attachment structure can be threaded connection, be provided between the 3rd attachment structure and fastener 300 Locating part, when the connecting rod of attachment structure and crystal growth equipment is connected, if connecting rod is screwed into bindiny mechanism 200 Connection pole length it is long, it will occupy the vertical gap of part, so easily cause seed crystal supporting rod 100 first connection Structure 110 is offseted with connecting rod, and seed crystal supporting rod 100 can not be made persistently to be moved in hole slot.
Preferably, the locating part is the position-limiting tube 600 with the socket of the first attachment structure 110.One end of position-limiting tube 600 is supported On the end face of fastener 300, the length of position-limiting tube 600 is more than the height of the first attachment structure 110, so as to ensure that seed crystal clamps Bar 100 can be realized in position-limiting tube 600 and moved up and down.
Preferably, seed crystal supporting rod 100 includes seed crystal neck 700, is correspondingly arranged in the opposed inner walls of seed crystal neck 700 There is first fixed structure 710, the first fixed structure 710 is used to tangle seed crystal.First fixed structure 710 can be relative sets Two projections put, projection serve fixation to seed crystal.
As shown in fig. 6, face of the first fixed structure 710 inside the seed crystal supporting rod 100 can be inclined-plane, From the bindiny mechanism 200 to the direction of seed crystal neck 700, the distance between two described inclined-planes are gradually reduced.In crystal Growth course in, two inclined-planes serve main suspension effect to crystal.Compared with the plane of routine, inclined-plane increase is set The contact area of seed crystal and first fixed structure 710, fixed effect are more preferable.
Multipair second fixed structure 720, the second fixed structure are also provided with the lower section of first fixed structure 710 720 can be boss, because in the growth course of crystal, two inclined-planes serve main suspension effect, the portion to crystal The crystal divided and the maximum that influences each other of cercis neck diameter, so this part is easiest to fracture, and the second fixed knot Structure 720 can play fixed effect, prevent crystal from dropping into crucible.
Winding slot is provided with the outer wall of the seed crystal neck 700, after seed crystal is placed on into seed crystal neck 700, uses tungsten filament Line winds winding slot, by seed crystal bundled fixed in seed crystal neck 700, prevents seed crystal from dropping in crucible.
In the lateral opening of seed crystal neck 700, a plane is offered vertically, in order to increase contact of the tungsten filament with seed crystal Area, so as to reach fixed seed crystal effect superior technique effect.
The quantity of the winding slot can be multiple, repeatedly wind so as to reach the purpose of increase fixed effect.
Along the axial direction of the seed crystal neck 700, the winding slot can be helical form.Can be by seed by tungsten filament line Crystalline substance is fixed in seed crystal neck 700, eliminates repeatedly fixed trouble.
In summary, seedholder provided by the utility model, including seed crystal supporting rod 100 and bindiny mechanism 200, seed Brilliant supporting rod 100 can be linked together by bindiny mechanism 200 and the connecting rod of crystal growth equipment.The seed crystal supporting rod 100 include linkage section, and the end set of the linkage section has the first attachment structure 110, and the seed crystal supporting rod 100 is along its length Projection of the direction to first attachment structure 110 falls in first attachment structure 110, and seed chuck can be made to hold bar 100 It is stuck in by the first attachment structure 110 in bindiny mechanism 200.The bindiny mechanism 200 includes the second attachment structure, and described Two attachment structures include the hole slot that diameter is gradually reduced from inside to outside, linkage section and the hole slot of the seed crystal supporting rod 100 Socket, and fastener 300 is provided between the bar wall of the linkage section and the hole slot inwall, fastener 300 is used for seed crystal Supporting rod 100 is fixed in hole slot.The fastener 300 includes sleeve end 330 and Taper Pipe end 340, the end at described sleeve pipe end 330 Face is used to prop up first attachment structure 110, and the outer wall at the Taper Pipe end 340 is in the conical surface, for the inwall with the hole slot Offset, and the maximum outside diameter of the fastener 300 is more than the hole slot opening diameter.The outer wall and hole slot at described sleeve pipe end 330 After there is lateral clearance 400, the linkage section and the second attachment structure to be socketed between inwall, first attachment structure 110 Inner side has vertical gap 500.When the seed crystal that the lower end of seed crystal supporting rod 100 is hung starts growth, the liquid (2045 of melting The high temperature of degree) skew of the cold heart, or when the reason such as other thermal fields causes the crystal growth to shift, crystal and seed crystal center may Thrust of the seed crystal supporting rod 100 by horizontal direction can be caused not on a position.At this moment, linkage section drives bindiny mechanism 200 are slided obliquely in hole slot, and seed chuck can be made to hold bar 100 and swung within the specific limits, pass through seed crystal supporting rod The change of 100 relative positions, cross force crystal being applied on seed crystal supporting rod 100 discharge, and prevent seed crystal to be broken or connect Extension bar is bent.
The crystal growth equipment that the utility model provides, including above-mentioned seedholder.When seed crystal supporting rod 100 Lower end suspension seed crystal start growth when, it may occur that crystal and seed crystal misalign heart phenomenon, cause seed crystal supporting rod 100 by To the thrust of horizontal direction.At this moment, linkage section drives bindiny mechanism 200 to be slided obliquely in hole slot, can hold seed chuck Bar 100 is swung within the specific limits, and by the change of the relative position of seed crystal supporting rod 100, crystal is applied into seed chuck The cross force release on bar 100 is held, prevents seed crystal to be broken or connect rod bending.
Finally it should be noted that:Various embodiments above is only to illustrate the technical solution of the utility model, rather than it is limited System;Although the utility model is described in detail with reference to foregoing embodiments, one of ordinary skill in the art should Understand:It can still modify to the technical scheme described in foregoing embodiments, either to which part or whole Technical characteristic carries out equivalent substitution;And these modifications or replacement, the essence of appropriate technical solution is departed from this practicality newly The scope of each embodiment technical scheme of type.

Claims (10)

1. a kind of seedholder, it is characterised in that including seed crystal supporting rod and bindiny mechanism, the seed crystal supporting rod includes connecting Section is connect, the end set of the linkage section has the first attachment structure, and the seed crystal supporting rod is along its length to described first The projection of attachment structure falls in first attachment structure;
The bindiny mechanism includes the second attachment structure, and second attachment structure includes the hole that diameter is gradually reduced from inside to outside Groove, linkage section and the hole slot of the seed crystal supporting rod are socketed, and between the bar wall of the linkage section and the hole slot inwall Fastener is provided with, the fastener includes sleeve end and Taper Pipe end, and the end face at described sleeve pipe end is used to prop up first company Binding structure, the outer wall at the Taper Pipe end is in the conical surface, for being offseted with the inwall of the hole slot, and the maximum outside diameter of the fastener More than the hole slot opening diameter, prevent the seed crystal supporting rod from departing from second attachment structure;
There is lateral clearance, the linkage section and the second attachment structure are socketed between the outer wall and hole slot inwall at described sleeve pipe end Afterwards, the inner side of first attachment structure has vertical gap, and the lateral clearance and vertical gap are used for the seed chuck Hold bar and swing space is provided.
2. seedholder according to claim 1, it is characterised in that the fastener includes the first clamping unit and the Two clamping units, first clamping unit and the second clamping unit are used for the bar wall for being clamped in the seed crystal supporting rod linkage section On.
3. seedholder according to claim 2, it is characterised in that first clamping unit and the second clamping unit Binding face on be correspondingly arranged on raised and groove, after projection combines with groove, guarantee first clamping unit and the Two clamping units have identical motion state on the fastener length direction.
4. seedholder according to claim 2, it is characterised in that along the fastener length direction, the fastening The fluting of the oriented Taper Pipe end opening direction extension is set on the outer wall of part.
5. seedholder according to claim 1, it is characterised in that the bindiny mechanism includes the 3rd attachment structure, 3rd attachment structure is used to be connected with the connecting rod on crystal growth equipment, between the 3rd attachment structure and fastener Finite place piece is set, and the locating part is used to prevent the connecting rod on the crystal growth equipment from entering the vertical gap It is interior.
6. seedholder according to claim 5, it is characterised in that the locating part is to be socketed with the first attachment structure Position-limiting tube.
7. seedholder according to claim 1, it is characterised in that seed crystal supporting rod includes seed crystal neck, the seed First fixed structure is correspondingly arranged in brilliant neck opposed inner walls, the first fixed structure is used to tangle seed crystal.
8. seedholder according to claim 7, it is characterised in that the first fixed structure is close to the seed chuck It is inclined-plane to hold the face inside bar, from the bindiny mechanism to the seed crystal neck direction, the distance between two described inclined-planes by It is decrescence small.
9. seedholder according to claim 7, it is characterised in that be provided with coiling on the outer wall of the seed crystal neck Groove.
10. a kind of crystal growth equipment, it is characterised in that including the seedholder described in claim 1-9 any one.
CN201720234579.7U 2017-03-09 2017-03-09 Seedholder and crystal growth equipment Expired - Fee Related CN206706250U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720234579.7U CN206706250U (en) 2017-03-09 2017-03-09 Seedholder and crystal growth equipment

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Application Number Priority Date Filing Date Title
CN201720234579.7U CN206706250U (en) 2017-03-09 2017-03-09 Seedholder and crystal growth equipment

Publications (1)

Publication Number Publication Date
CN206706250U true CN206706250U (en) 2017-12-05

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Application Number Title Priority Date Filing Date
CN201720234579.7U Expired - Fee Related CN206706250U (en) 2017-03-09 2017-03-09 Seedholder and crystal growth equipment

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113122912A (en) * 2021-04-25 2021-07-16 弘元新材料(包头)有限公司 Large-size silicon single crystal furnace pressure-changing and shoulder-setting survival rate improving device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113122912A (en) * 2021-04-25 2021-07-16 弘元新材料(包头)有限公司 Large-size silicon single crystal furnace pressure-changing and shoulder-setting survival rate improving device

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