CN206670838U - Changeable fluid flexibility force snesor based on pneumatic variation rigidity - Google Patents
Changeable fluid flexibility force snesor based on pneumatic variation rigidity Download PDFInfo
- Publication number
- CN206670838U CN206670838U CN201720262042.1U CN201720262042U CN206670838U CN 206670838 U CN206670838 U CN 206670838U CN 201720262042 U CN201720262042 U CN 201720262042U CN 206670838 U CN206670838 U CN 206670838U
- Authority
- CN
- China
- Prior art keywords
- micro
- port
- sensor
- flexible
- bearer path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000012530 fluid Substances 0.000 title claims description 3
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000007788 liquid Substances 0.000 claims abstract description 9
- 238000005259 measurement Methods 0.000 abstract description 14
- 238000000691 measurement method Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 6
- 238000001514 detection method Methods 0.000 description 4
- 239000002585 base Substances 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 229910001128 Sn alloy Inorganic materials 0.000 description 2
- 230000007123 defense Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 210000004243 sweat Anatomy 0.000 description 1
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
一种基于气动变刚度的可变量程柔性力传感器及其测量方法,传感器包括扁长方体的柔性基体,在柔性基体内设有一气压空腔;在位于气压空腔上部设有上下两层Z字型首尾连接的微承载通道——第一微承载通道和第二微承载通道;第一微承载通道自第一端口经Z字型首尾连接的空腔至第三端口;第二微承载通道自第二端口经Z字型的首尾连接的空腔至第四端口,第三端口与第四端口相连通,从第一端口和第二端口分别引出两根导线用以连接信号采集模块;第一微承载通道和第二微承载通道注满液态压阻敏感元件。本实用新型通过调整刚度变化来改变传感器的量程,实现了力的变量程测量,改变了目前的柔性传感器只被应用在小量程力领域的测量。
A variable-range flexible force sensor based on aerodynamic variable stiffness and its measurement method. The sensor includes a flexible substrate of a flat cuboid, and an air pressure cavity is arranged in the flexible substrate; End-to-end connected micro-carrier channels—the first micro-carrier channel and the second micro-carrier channel; the first micro-carrier channel is from the first port to the third port through the zigzag end-to-tail connection cavity; the second micro-carrier channel is from the second port The two ports are connected to the fourth port through the Z-shaped end-to-end cavity, the third port is connected to the fourth port, and two wires are respectively drawn from the first port and the second port to connect the signal acquisition module; the first micro The carrying channel and the second micro-carrying channel are filled with liquid piezoresistive sensitive elements. The utility model changes the measuring range of the sensor by adjusting the stiffness change, realizes the variable range measurement of the force, and changes the current flexible sensor which is only used in the measurement of the small range force field.
Description
技术领域technical field
本实用新型属于测力及控制用检测装置领域,特别是一种基于气动变刚度的可变量程柔性力传感器,用于柔性大承载力的精确测量之中,提高了柔性力传感器的量程与精度。The utility model belongs to the field of detection devices for force measurement and control, in particular to a variable range flexible force sensor based on aerodynamic variable stiffness, which is used in the precise measurement of flexible large bearing capacity, and improves the range and precision of the flexible force sensor .
背景技术Background technique
在机器人前沿领域探索上,机器人技术的研究发展正面向高端制造、医疗康复、国防安全等国家重点战略领域稳步推进,在机器人的力检测技术上,柔性力检测技术以其高度的适应性、柔顺性,近几年来正飞速的发展。目前的柔性传感器大多采用柔性大变形材料作为基体,而柔性基体的非线性变形导致柔性传感器在大量程测量情况下的线性度不足。In the exploration of the frontier field of robotics, the research and development of robotics is steadily advancing towards national key strategic fields such as high-end manufacturing, medical rehabilitation, and national defense security. In the force detection technology of robots, the flexible force detection technology is characterized by its high adaptability, suppleness sex, has been developing rapidly in recent years. Most of the current flexible sensors use flexible large-deformation materials as the substrate, and the nonlinear deformation of the flexible substrate leads to insufficient linearity of the flexible sensor in the case of large-scale measurement.
为了克服这类问题,目前国内外的研究主要集中于结构优化及控制算法的研究中,并没有从变刚度的角度来研究。In order to overcome this kind of problem, the current domestic and foreign research mainly focuses on the research of structure optimization and control algorithm, and does not study from the angle of variable stiffness.
发明内容Contents of the invention
本实用新型克服了现有技术中的缺点,提供一种基于气动变刚度的可变量程柔性力传感器。The utility model overcomes the shortcomings in the prior art, and provides a variable-range flexible force sensor based on aerodynamic variable stiffness.
为了解决上述存在的技术问题,本实用新型是通过以下技术方案实现的:In order to solve the above-mentioned technical problems, the utility model is achieved through the following technical solutions:
一种基于气动变刚度的可变量程柔性力传感器,包括扁长方体的柔性基体1,在柔性基体1内部的主要承载部位设有一气压空腔2,所述的气压空腔设有进气口4;在所述柔性基体1中位于气压空腔上部设有上下两层Z字型首尾连接的微承载通道——第一微承载通道3和第二微承载通道10;所述第一微承载通道3自第一端口6经Z字型首尾连接的空腔至第三端口8;所述第二微承载通道10自第二端口7经Z字型的首尾连接的空腔至第四端口9,所述第一微承载通道3的第三端口8与所述第二微承载通道10的第四端口9相连通,从第一端口6和第二端口7分别引出两根导线用以连接信号采集模块;所述第一微承载通道3和第二微承载通道10注满液态压阻敏感元件。A variable-range flexible force sensor based on aerodynamic variable stiffness, comprising a flat rectangular parallelepiped flexible substrate 1, an air pressure cavity 2 is provided at the main bearing part inside the flexible substrate 1, and the air pressure cavity is provided with an air inlet 4 ; In the flexible matrix 1, the upper part of the air pressure cavity is provided with two layers of Z-shaped end-to-end micro-carrying channels—the first micro-carrying channel 3 and the second micro-carrying channel 10; the first micro-carrying channel 3 from the first port 6 to the third port 8 through the zigzag end-to-end cavity; the second microcarrier channel 10 is from the second port 7 to the fourth port 9 through the zigzag end-to-end cavity, The third port 8 of the first micro-carrier channel 3 communicates with the fourth port 9 of the second micro-carrier channel 10, and two wires are respectively drawn from the first port 6 and the second port 7 to connect the signal acquisition Module; the first micro-carrier channel 3 and the second micro-carrier channel 10 are filled with liquid piezoresistive sensitive elements.
由于采用上述技术方案,本实用新型提出的基于气动变刚度的可变量程柔性力传感器,与现有技术相比具有这样的有益效果:Due to the adoption of the above-mentioned technical scheme, the variable-range flexible force sensor based on aerodynamic variable stiffness proposed by the utility model has the following beneficial effects compared with the prior art:
本实用新型引入气动变刚度机理,通过调整传感器力检测位置的刚度变化来改变传感器的量程,解决了以柔性大变形材料为基体的柔性传感器实际应用中量程不足导致的应用受限的问题,提高了大变形柔性传感器在大承载条件下的应用价值,实现了力的变量程测量,改变了目前的柔性传感器只被应用在小量程力领域的测量。此外,本实用新型本体结构简单,体积小,重量轻,柔顺性强,在检测力的同时,缓冲受力,减小力对受力双方的破坏;性能稳定,耐酸碱腐蚀,能克服恶劣环境,在矿山、海洋等极端环境下也能稳定的使用;不受人体汗液腐蚀,无毒,能够与皮肤直接接触。因此,本实用新型能在工业生产,康复医疗,国防军工得到广泛的应用。The utility model introduces the mechanism of aerodynamic variable stiffness, and changes the range of the sensor by adjusting the stiffness change of the force detection position of the sensor, which solves the problem of limited application caused by insufficient range in the actual application of the flexible sensor with a flexible large deformation material as the base, and improves The application value of the large deformation flexible sensor under the condition of large load is realized, and the variable range measurement of the force is realized, which changes the current flexible sensor which is only used in the measurement of the small range force field. In addition, the utility model has a simple body structure, small size, light weight, and strong flexibility. While detecting the force, it can buffer the force and reduce the damage of the force to both sides of the force; it has stable performance, acid and alkali corrosion resistance, and can overcome harsh conditions. environment, it can be used stably in extreme environments such as mines and oceans; it is not corroded by human sweat, non-toxic, and can be in direct contact with the skin. Therefore, the utility model can be widely used in industrial production, rehabilitation medical treatment, national defense and military industry.
附图说明Description of drawings
图1为本实用新型一种基于气动变刚度的可变量程柔性力传感器结构图;Fig. 1 is a structural diagram of a variable range flexible force sensor based on aerodynamic variable stiffness of the present invention;
图2为图1中A方向放大视图;Figure 2 is an enlarged view of direction A in Figure 1;
图3为本实用新型一种基于气动变刚度的可变量程柔性力传感器中微通道放大示意图;Fig. 3 is an enlarged schematic view of the microchannel in a variable range flexible force sensor based on aerodynamic variable stiffness of the present invention;
图4为本实用新型一种基于气动变刚度的可变量程柔性力传感器测量方法的流程图。Fig. 4 is a flow chart of a measurement method of a variable-range flexible force sensor based on aerodynamic variable stiffness of the present invention.
图中:1为传感器的柔性基体,2为气压空腔,3为第一微承载通道,4为进气口,5为引出导线,6为第一端口,7为第二端口;8为第三端口,9为第四端口;10为第二微承载通道。In the figure: 1 is the flexible substrate of the sensor, 2 is the air pressure cavity, 3 is the first micro-bearing channel, 4 is the air inlet, 5 is the lead wire, 6 is the first port, 7 is the second port; 8 is the second port Three ports, 9 is the fourth port; 10 is the second micro bearer channel.
具体实施方式detailed description
下面将结合附图中对本实用新型加以详细说明。The utility model will be described in detail below in conjunction with the accompanying drawings.
一种基于气动变刚度的可变量程柔性力传感器,如图1—3所示,它包括扁长方体的柔性基体1,在柔性基体1内部的主要承载部位设有一气压空腔2,所述的气压空腔设有进气口4;在传感器端部设有进气口4,引出进气管,外部接有微型气压输入及控制装置,进行气压空腔内部的压力控制。在所述柔性基体1中位于气压空腔上部成型出设有上下两层Z字型首尾连接的微微承通道——第一微承载通道3和第二微承载通道10;所述第一微承载通道3自第一端口6经Z字型首尾连接的空腔至第三端口8;所述第二微承载通道10自第二端口7经Z字型的首尾连接的空腔至第四端口9,所述第一微承载通道3的第三端口8与所述第二微承载通道10的第四端口9相连通,从第一端口6和第二端口7分别引出两根导线用以连接信号采集模块;所述第一微承载通道3和第二微承载通道10注满液态压阻敏感元件。镓铟锡合金或其它符合性能要求的液态压阻材料为敏感元件;为保证传感器柔顺性,在流体处均采用柔性胶水实现整体密封。同时,可保证传感器在恶劣环境下工作的稳定性。A variable-range flexible force sensor based on aerodynamic variable stiffness, as shown in Figure 1-3, it includes a flat rectangular parallelepiped flexible base 1, and an air pressure cavity 2 is provided at the main bearing part inside the flexible base 1, the described The air pressure cavity is provided with an air inlet 4; an air inlet 4 is provided at the end of the sensor, leading to an air intake pipe, and a micro air pressure input and control device is connected externally to control the pressure inside the air pressure cavity. The upper part of the air pressure cavity in the flexible matrix 1 is formed with two upper and lower layers of Z-shaped end-to-end micro bearing channels—the first micro bearing channel 3 and the second micro bearing channel 10; the first micro bearing channel The channel 3 is from the first port 6 to the third port 8 through the zigzag end-to-end cavity; the second microcarrier channel 10 is from the second port 7 to the fourth port 9 through the zigzag end-to-end cavity , the third port 8 of the first micro-carrier channel 3 communicates with the fourth port 9 of the second micro-carrier channel 10, and two wires are respectively drawn from the first port 6 and the second port 7 to connect signals Acquisition module; the first micro-carrier channel 3 and the second micro-carrier channel 10 are filled with liquid piezoresistive sensitive elements. Gallium indium tin alloy or other liquid piezoresistive materials that meet the performance requirements are the sensitive elements; in order to ensure the flexibility of the sensor, flexible glue is used at the fluid to achieve overall sealing. At the same time, it can ensure the stability of the sensor working in harsh environments.
图中1为本实用新型一种基于气动变刚度的可变量程柔性力传感器结构图,传感器的柔性基体1作为柔性传感器的主要承载结构,采用柔性硅橡胶或其它符合性能要求的高弹性材料制成。1 in the figure is a structural diagram of a variable-range flexible force sensor based on aerodynamic variable stiffness of the present invention. The flexible substrate 1 of the sensor is used as the main load-bearing structure of the flexible sensor, and is made of flexible silicone rubber or other high-elastic materials that meet performance requirements. become.
图2为图1中A方向放大视图,从传感器柔性基体中成型出的气压空腔2,即为传感器的变刚度模块,通过在气动空腔中通入一定压力的气体来改变传感器的整体刚度,使得传感器在拉伸时,在横向上产生一定的内应力,能够抵抗柔性基体的拉伸。Figure 2 is an enlarged view of the A direction in Figure 1. The air pressure cavity 2 formed from the flexible substrate of the sensor is the variable stiffness module of the sensor. The overall stiffness of the sensor is changed by passing a certain pressure of gas into the pneumatic cavity. , so that when the sensor is stretched, a certain internal stress is generated in the transverse direction, which can resist the stretching of the flexible substrate.
传感器承载敏感元件的微通道,共分为上下两层,如图3所示,上层部分为第一微承载通道由第一端口6引入经呈Z字型分布至第三端口8,再引到下层部分为第二微承载通道由第二端口7引入经呈Z字型分布至第四端口9;在所述的微承载空腔中注满液态压阻敏感元件,如液态镓铟锡合金等压阻性能满足要求的材料。所述的第一微承载通道和第二微承载通道的直径为0.01mm,单程长度为65mm;所述的液态敏感元件电阻值为5mΩ-20mΩ。图中4为通入传感器变刚度模块中的进气口,直径为3mm,通过胶管接入微气源。其中,接口处采用柔性胶水进行密封。The microchannel carrying the sensitive element of the sensor is divided into upper and lower layers. As shown in Figure 3, the upper part is the first microcarrying channel, which is introduced from the first port 6 and distributed in a Z shape to the third port 8, and then to the third port 8. The lower part is that the second micro-carrier channel is introduced from the second port 7 and distributed in a zigzag to the fourth port 9; the micro-carrier cavity is filled with liquid piezoresistive sensitive elements, such as liquid gallium indium tin alloy, etc. Materials with piezoresistive properties that meet the requirements. The diameter of the first micro-carrying channel and the second micro-carrying channel is 0.01mm, and the one-way length is 65mm; the resistance value of the liquid sensitive element is 5mΩ-20mΩ. 4 in the figure is the air inlet leading into the variable stiffness module of the sensor, with a diameter of 3mm, which is connected to the micro air source through the rubber hose. Wherein, the interface is sealed with flexible glue.
图1中标号5所示为两根引出导线,从微通道的端口6、7分别引出,并通过处理电路,将传感器的接收信号转入到采集卡中,测量出力的大小。引线处也采用柔性胶水密封。Number 5 in Figure 1 shows two lead wires, which are respectively led out from ports 6 and 7 of the microchannel, and through the processing circuit, the received signal of the sensor is transferred to the acquisition card to measure the output force. The leads are also sealed with flexible glue.
本实用新型的一种基于气动变刚度的可变量程柔性力传感器的测量方法,如图4所示当传感器受到拉伸时,柔性基体受拉变形,其内部微承载通道纵向变长,截面变小,导致承载的内部液态元件的总电阻变大,通过惠斯通电桥,将需要检测的电阻值,转化为电压值,输出电压信号;通过信号采集系统检测传感器的输出信号,判断该次测量是否超过传感器的当前量程,如果此次测量没有超过该传感器的当前量程,输出传感器的测量结果,该结果为精确值;而当传感器的受力过大时,基体拉伸变形大于20%时,传感器信号的非线性明显增加,如果此次测量超过该传感器的当前量程,则控制气源向传感器的气压空腔2中输入一定压力的气体,增加传感器的整体刚度,使传感器在受到大载荷力的情况下依然能使基体中微承载通道中的变形保持在线性区,在增加了传感器测量量程的同时也提高了测量的精度;由于采用的材料为超弹性不可压缩材料,故通过影响传感器横向的受力来改变传感器的纵向拉伸性能,因此,可等效于改变传感器基体1的刚度,进而降低了传感器的受力变形程度,提高了传感器在线性区的测量量程;重复所述进行信号检测、判断及变刚度过程,直到检测到传感器在其变形线性区输出的信号为止,最后根据最终输出信号与通入的气体压力可得到待测量的力的大小。According to the measurement method of a variable-range flexible force sensor based on aerodynamically variable stiffness of the present invention, as shown in Figure 4, when the sensor is stretched, the flexible substrate is stretched and deformed, and the internal micro-carrying channel becomes longitudinally longer and the cross-section becomes longer. Small, resulting in the total resistance of the internal liquid components carried by the load becomes larger, through the Wheatstone bridge, the resistance value to be detected is converted into a voltage value, and the voltage signal is output; the output signal of the sensor is detected by the signal acquisition system to judge the measurement Whether it exceeds the current range of the sensor, if this measurement does not exceed the current range of the sensor, output the measurement result of the sensor, which is an accurate value; and when the force of the sensor is too large and the tensile deformation of the substrate is greater than 20%, The non-linearity of the sensor signal increases significantly. If the measurement exceeds the current range of the sensor, the control air source will input a certain pressure of gas into the air pressure cavity 2 of the sensor to increase the overall stiffness of the sensor, so that the sensor is subjected to a large load. The deformation in the micro-carrying channel in the matrix can still be kept in the linear region, which increases the measurement range of the sensor and improves the accuracy of the measurement; because the material used is a superelastic incompressible material, so by affecting the lateral direction of the sensor Therefore, it can be equivalent to changing the stiffness of the sensor substrate 1, thereby reducing the force deformation of the sensor, and improving the measurement range of the sensor in the linear region; repeat the signal The process of detecting, judging and changing the stiffness is until the signal output by the sensor in its deformation linear region is detected, and finally the magnitude of the force to be measured can be obtained according to the final output signal and the pressure of the gas passed in.
在不脱离本实用新型实质的前提下,采用各种不同形式的实现方法,不经创造性地设计出与本实用新型相类似的结构形状或布局(如改变微通道及变刚度模块的分布,尺寸等),均属本实用新型的保护范围。Under the premise of not departing from the essence of the present utility model, adopt various different forms of realization methods, without creatively designing structural shapes or layouts similar to the utility model (as changing the distribution and size of microchannels and variable stiffness modules etc.), all belong to the protection scope of the present utility model.
Claims (1)
- A kind of 1. changeable fluid flexibility force snesor based on pneumatic variation rigidity, it is characterised in that:The sensor includes prolate side The flexible substrate (1) of body, an air pressure cavity (2) is provided with the internal main carrying position of flexible substrate (1), described air pressure is empty Chamber is provided with air inlet (4);Upper and lower two layers of Z-shaped head and the tail are provided with the flexible substrate (1) positioned at air pressure cavity top to connect Micro- bearer path --- first micro- bearer path (3) and second micro- bearer path (10);First micro- bearer path (3) is certainly First port (6) is through the cavity that Z-shaped head and the tail connect to the 3rd port (8);Second micro- bearer path (10) is from the second end The cavity of head and the tail connection of mouthful (7) through Z-shaped is to the 4th port (9), the 3rd port (8) of first micro- bearer path (3) It is connected with the 4th port (9) of described second micro- bearer path (10), draws respectively from first port (6) and second port (7) Go out two wires to connect signal acquisition module;First micro- bearer path (3) and second micro- bearer path (10) fill Liquid resistance sensing element of pressure.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201720262042.1U CN206670838U (en) | 2017-03-17 | 2017-03-17 | Changeable fluid flexibility force snesor based on pneumatic variation rigidity |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201720262042.1U CN206670838U (en) | 2017-03-17 | 2017-03-17 | Changeable fluid flexibility force snesor based on pneumatic variation rigidity |
Publications (1)
Publication Number | Publication Date |
---|---|
CN206670838U true CN206670838U (en) | 2017-11-24 |
Family
ID=60376561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201720262042.1U Expired - Fee Related CN206670838U (en) | 2017-03-17 | 2017-03-17 | Changeable fluid flexibility force snesor based on pneumatic variation rigidity |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN206670838U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106644183A (en) * | 2017-03-17 | 2017-05-10 | 燕山大学 | Changeable range flexible power sensor based on pneumatic variable stiffness and measurement method thereof |
CN109781313A (en) * | 2019-03-04 | 2019-05-21 | 重庆大学 | High-sensitivity tensile force sensor based on liquid metal and its manufacturing method |
CN115674276A (en) * | 2022-09-28 | 2023-02-03 | 哈尔滨工业大学 | Triboelectric type variable-stiffness soft paw state monitoring sensor and testing method thereof |
-
2017
- 2017-03-17 CN CN201720262042.1U patent/CN206670838U/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106644183A (en) * | 2017-03-17 | 2017-05-10 | 燕山大学 | Changeable range flexible power sensor based on pneumatic variable stiffness and measurement method thereof |
CN109781313A (en) * | 2019-03-04 | 2019-05-21 | 重庆大学 | High-sensitivity tensile force sensor based on liquid metal and its manufacturing method |
CN115674276A (en) * | 2022-09-28 | 2023-02-03 | 哈尔滨工业大学 | Triboelectric type variable-stiffness soft paw state monitoring sensor and testing method thereof |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106644183B (en) | Measurement Method of Variable Range Flexible Force Sensor Based on Pneumatic Variable Stiffness | |
CN206670838U (en) | Changeable fluid flexibility force snesor based on pneumatic variation rigidity | |
CN104048791A (en) | Double cross beam type six-dimensional force and torque sensor based on low-dimensional coupling | |
CN107144389B (en) | Embeddable strip-shaped fully-flexible multi-dimensional force sensor | |
CN205449351U (en) | Small -size three -dimensional force transducer | |
CN102620865B (en) | Beam-film double island structure micro-pressure high-overload sensor chip | |
CN102636298A (en) | Beam-film four-land structured micro-pressure high-overload sensor chip | |
CN102830248B (en) | Micro temperature-compensating servo circuit for quartz accelerometer | |
CN106643463A (en) | Flexible full-bridge resistance strain sheet | |
CN1325879C (en) | Temperature, wind speed, wind direction and air pressure integration sensor | |
CN203191141U (en) | Silicon piezoresistive MEMS pressure transducer for gas and liquid pressure measurement | |
CN202974545U (en) | Sensor capable of reducing errors | |
CN101261112A (en) | Hydraulic support linear displacement sensor detection device and detection method | |
CN204882605U (en) | Wind speed tester based on singlechip | |
CN103017948A (en) | Piezoresistive type pressure sensor | |
CN105928989A (en) | Phi-shaped huge-piezoresistance structure-based humidity sensor and temperature drift correction method thereof | |
CN106895886B (en) | High-sensitivity gas flow measuring device and method based on giant piezoresistive sensor | |
CN205426392U (en) | Dot matrix pressure detecting system based on flexible pressure drag material | |
CN202024932U (en) | Strain gage integration device used under triaxial fluid confining pressure function | |
CN209541957U (en) | A kind of dot matrix pliable pressure distributed sensor device | |
CN107741287A (en) | An integrated force sensor | |
JP6650525B2 (en) | A kind of integrated stress sensor | |
CN205826583U (en) | Humidity sensor based on the huge piezo-resistive arrangement of π type | |
CN205246696U (en) | Liquid acceleration measurement device | |
CN115575661A (en) | Two-dimensional capacitive differential MEMS wind speed and direction sensor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20171124 Termination date: 20210317 |