CN206650059U - A kind of UV dispergation machine - Google Patents
A kind of UV dispergation machine Download PDFInfo
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- CN206650059U CN206650059U CN201720410761.3U CN201720410761U CN206650059U CN 206650059 U CN206650059 U CN 206650059U CN 201720410761 U CN201720410761 U CN 201720410761U CN 206650059 U CN206650059 U CN 206650059U
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- drawer
- nitrogen
- blowing
- dispergation
- wafer
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Abstract
The utility model discloses a kind of UV dispergation machine, is related to UV machine technical fields.The UV dispergation machine includes：Blowing drawer (1), the blowing drawer (1) is arranged to drawing and pulling type, for placing illuminated wafer；UV light sources (10), the UV light sources use 300mm × 300mm faces matrix LED light source；Casing (2), the casing (2) are used to install the blowing drawer (1) and UV light sources, and the UV light sources are arranged on the lower section of the blowing drawer (1).The utility model has the advantage of：Using 300mm × 300mm faces matrix LED light source, illuminating area is big, and illuminated wafer need not be moved in irradiation process, and operating efficiency is high；Blowing drawer, the maloperation that can be placed in wafer irradiation process are locked by positioner.The top of blowing drawer is arranged in by nitrogen filling pipeline, using multiple exhaust outlets simultaneously to wafer upper surface supplying nitrogen, nitrogen is full of wafer surface rapidly, prevents that glued membrane reacts with oxygen during UV light irradiations.
Description
Technical field
It the utility model is related to UV machine technical fields, and in particular to a kind of UV dispergation machine.
Background technology
In semiconductor chip production technology, before chip scribing, wafer is fixed on framework with scribing glued membrane,
After the completion of scribing process, fixed glued membrane is irradiated with UV light, to reduce the viscosity that film is fixed in scribing, subsequently to encapsulate
The smooth production of process.UV dispergation machine of the prior art is more by the way of UV mercury lamps irradiate below static workpiece, mercury lamp
Caloric value is big, and short life, light intensity attenuation is fast, and the stability of irradiation is poor with uniformity, and operating efficiency is low, and dispergation effect is uneven
It is even, and thermal diffusivity is bad, service life is short, and security is poor, and practicality is not strong.
Utility model content
The purpose of this utility model is to provide a kind of UV dispergation machine, with solution or at least in the presence of mitigation background technology
The problem of at least one.
The technical solution adopted in the utility model is：A kind of UV dispergation machine is provided, comprising：
Blowing drawer, the blowing drawer is arranged to drawing and pulling type, for placing illuminated wafer；
UV light sources, the UV light sources use 300mm × 300mm faces matrix LED light source；
Casing, the casing are used to install the blowing drawer and UV light sources, and the UV light sources are arranged on the blowing and taken out
The lower section of drawer.
Preferably, the UV dispergation machine further includes cooling system, and the cooling system includes nitrogen adjustment valve and nitrogen
Gas fills pipeline, and the nitrogen adjustment valve is arranged on the outside of the casing, for adjusting the flow of nitrogen；The nitrogen filling
Pipeline is arranged on box house and positioned at the top of the blowing drawer.
Preferably, the nitrogen filling pipeline includes 6 nitrogen tubes, and 6 nitrogen tubes are upper the blowing drawer
Side is along the circumferential direction uniformly arranged, and multiple steam vents are provided with every nitrogen tube.
Preferably, a diameter of 2mm of the steam vent.
Preferably, the blowing drawer is provided with drawer positioning hole；The UV dispergation machine further includes positioner, institute
State positioner and include positioning cylinder and drawer alignment pin, the positioning cylinder is arranged on the framework in the casing, described
Positioning cylinder is used to drive the drawer alignment pin to insert the drawer positioning hole internal locking blowing drawer or for driving
Drawer alignment pin is stated to separate with drawer positioning hole.
Preferably, the blowing drawer has sealing baffle, and the sealing baffle is used to cooperatively form sealing with casing；Institute
State and handle is provided with the outside of sealing baffle, for blowing drawer described in push-and-pull；Two UV are additionally provided with the sealing baffle
Lamp watch window, the colored glass that can filter UV light is installed on the UV lamp watch window.
Preferably, wafer frame alignment pin is provided with the blowing drawer, the wafer frame alignment pin is used for and institute
The framework for stating wafer coordinates, for positioning the placement location of wafer.
Preferably, the UV dispergation machine further includes adapter ring, and the adapter ring is placed in the blowing drawer, uses
In the placement for meeting 8 cun or 12 cun wafers.
Preferably, in 300mm × 300mm faces matrix LED light source, LED UV lamps wavelength is 365 ± 5nm.
Preferably, the UV dispergation machine further includes touch display screen, and the touch display screen is arranged on casing, uses
In the regulation and control UV dispergation machine.
The beneficial effects of the utility model are：
UV dispergation machine of the present utility model uses 300mm × 300mm faces matrix LED light source, and illuminating area is big；Conventional equipment UV
Light as the range of linearity, it is necessary to which mobile irradiated object is scanned irradiation, it is necessary to which the time is grown；The UV dispergation machine of the application is shining
Illuminated wafer need not be moved during penetrating, operating efficiency is high；Compared to existing high-pressure sodium lamp and lamp tube type UV dispergation
Machine, there is the small advantage of caloric value, service life is longer, endangers element without mercury etc., has the feature of environmental protection；UV light sources open work
When do not need preheating time, can be achieved instant on switch working method, reduce UV lamp sky irradiation time.
LED UV lamps wavelength is 365 ± 5nm, almost without infrared clutter, is radiated at hot caused by irradiated object surface
Measure extremely low, temperature-sensitive class product can be irradiated safely；Up to more than 95% effective power utilization rate.
Blowing drawer for placing wafer is provided with positioner, and blowing drawer is locked by positioner, can be with
The maloperation being placed in wafer irradiation process.
The UV dispergation machines of the application are provided with cooling system, and the top of blowing drawer is arranged in by nitrogen filling pipeline,
Multiple exhaust outlets are provided with every nitrogen filling pipeline, by multiple exhaust outlets simultaneously to wafer upper surface supplying nitrogen,
Nitrogen is full of wafer surface rapidly, prevents that glued membrane reacts with oxygen during UV light irradiations.
Brief description of the drawings
Fig. 1 is the schematic diagram of the UV dispergation machines of the embodiment of the utility model one.
Fig. 2 is the partial schematic diagram of the UV dispergation machines described in Fig. 1.
Fig. 3 is another Local map of the UV dispergation machines shown in Fig. 1.
Fig. 4 is the schematic diagram of the nitrogen filling pipeline in Fig. 3.
Fig. 5 is the schematic diagram of the blowing drawer in the UV dispergation machines shown in Fig. 1.
Fig. 6 is another schematic diagram of the blowing drawer shown in Fig. 5.
Fig. 7 is the schematic diagram of positioner.
Wherein, 1- blowings drawer, 11- drawer positioning holes, 12- sealing baffles, 13- handles, 14-UV lamp watch windows, 2-
Casing, 3- nitrogen adjustment valves, 4- nitrogen filling pipeline, 41- nitrogen tubes, 42- steam vents, 5- positioning cylinders, 6- drawer alignment pins,
7- wafer frame alignment pins, 8- adapter rings, 9- touch display screens, 10-UV light sources.
Embodiment
To make the purpose, technical scheme and advantage that the utility model is implemented clearer, below in conjunction with the utility model
Accompanying drawing in embodiment, the technical scheme in the embodiment of the utility model is further described in more detail.In the accompanying drawings, from beginning
Same or similar element is represented to same or similar label eventually or there is the element of same or like function.Described reality
It is the utility model part of the embodiment to apply example, rather than whole embodiments.Below with reference to the embodiment of accompanying drawing description
It is exemplary, it is intended to for explaining the utility model, and it is not intended that to limitation of the present utility model.It is new based on this practicality
Embodiment in type, the every other implementation that those of ordinary skill in the art are obtained under the premise of creative work is not made
Example, belong to the scope of the utility model protection.Embodiment of the present utility model is described in detail below in conjunction with the accompanying drawings.
In description of the present utility model, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", "front", "rear",
The orientation or position relationship of the instruction such as "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outer " is based on accompanying drawing institutes
The orientation or position relationship shown, it is for only for ease of description the utility model and simplifies description, rather than indicates or imply and be signified
Device or element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to this practicality
The limitation of novel protected scope.
As shown in Figures 1 to 7, a kind of UV dispergation machine, blowing drawer 1, casing 2 and UV light sources 0 are included.Blowing drawer 1 is set
Drawing and pulling type is set to, for placing illuminated wafer；UV light sources use 300mm × 300mm faces matrix LED light source；Casing 2 is used for
Installation blowing drawer 1 and UV light sources 10, UV light sources 10 are arranged on the lower section of blowing drawer 1.
UV dispergation machine of the present utility model uses 300mm × 300mm faces matrix LED light source, and illuminating area is big；Conventional equipment UV
Light as the range of linearity, it is necessary to which mobile irradiated object is scanned irradiation, it is necessary to which the time is grown；The UV dispergation machine of the application is shining
Illuminated wafer need not be moved during penetrating, operating efficiency is high；Compared to existing high-pressure sodium lamp and lamp tube type UV dispergation
Machine, there is the small advantage of caloric value, service life is longer, endangers element without mercury etc., has the feature of environmental protection；UV light sources open work
When do not need preheating time, can be achieved instant on switch working method, reduce UV lamp sky irradiation time.
In the present embodiment, it is equipment electrical control system and UV light source controls that casing 2, which divides for upper and lower two parts, lower half,
Device, this part frame are welded using 40 square steel；The first half is drawer feed mechanism, UV light sources, drawer locking, nitrogen filling
The working motion such as system mechanism, this part frame are built using 40 aluminium section bars, facilitate the installation of various working motion mechanisms.
In the present embodiment, UV dispergation machine further includes cooling system, the cooling system include nitrogen adjustment valve 3 and
Nitrogen fills pipeline 4, and nitrogen adjustment valve 3 is arranged on the outside of casing 2, for adjusting the flow of nitrogen；Nitrogen filling pipeline 4 is set
Put in box house and positioned at the top of the blowing drawer 1, before UV light irradiations, fill nitrogen to wafer upper surface, prevent
Only glued membrane reacts with oxygen during UV light irradiations.Nitrogen filling pipeline includes 6 nitrogen tubes, 41,6 nitrogen tubes 41 in blowing
The top of drawer 1 is along the circumferential direction uniformly arranged, and a diameter of of multiple steam vents of steam vent 42 is provided with every nitrogen tube
2mm。
The top of blowing drawer is arranged in by nitrogen filling pipeline, multiple exhausts are provided with every nitrogen filling pipeline
Mouthful, by multiple exhaust outlets simultaneously to wafer upper surface supplying nitrogen, nitrogen is full of wafer surface rapidly, prevents UV light
Glued membrane reacts with oxygen during irradiation.
It is understood that nitrogen filling pipeline 4 can also be set according to actual conditions.For example, in an alternative implementation
In example, nitrogen filling pipeline sets 8 nitrogen tubes, and multiple a diameter of 3mm exhaust outlet is provided with each nitrogen tube.
In the present embodiment, blowing drawer 1 is provided with drawer positioning hole 11；The UV dispergation machine is further comprising positioning dress
Put, the positioner includes positioning cylinder 5 and drawer alignment pin 6, and positioning cylinder 5 is arranged on the framework in casing 2, described
Positioning cylinder 5 is used to drive the drawer alignment pin 6 to insert the drawer positioning hole internal locking blowing drawer or for driving
The drawer alignment pin 6 separates with drawer positioning hole 11.
When wafer is when during illuminated, positioning cylinder 5 drives drawer alignment pin 6 to insert in drawer positioning hole 11,
Now blowing drawer is locked, can not pull open；After the completion of wafer irradiation, positioning cylinder 5 returns, while by drawer alignment pin
6 pull out out of drawer positioning hole 11, can now pull out blowing drawer, take out wafer；By the positioning for setting blowing drawer
Device, the maloperation that can be placed in wafer irradiation process.
In the present embodiment, blowing drawer 1 has a sealing baffle 12, and sealing baffle 12 is used to cooperatively forming with casing 2 close
Envelope；The outside of sealing baffle 12 is provided with handle 13, for push-and-pull blowing drawer 1；Two UV are additionally provided with sealing baffle 12
Lamp watch window 14, two UV lamp watch windows 14 are separately positioned on the both ends of handle 13, are easy to the whole illuminated crystalline substance of observation
Disk, the colored glass that can filter UV light is installed on UV lamp watch window 14.It is understood that the colored glass should
From the glass that color is deeper.
In the present embodiment, wafer frame alignment pin 7 is provided with blowing drawer 1, wafer frame alignment pin 7 is used for and institute
The framework for stating wafer coordinates, for positioning the placement location of wafer.
In the present embodiment, the UV dispergation machine further includes adapter ring 8, and adapter ring 8 is placed in blowing drawer 1,
For meeting the placement of 8 cun or 12 cun wafers.
In the present embodiment, in 300mm × 300mm faces matrix LED light source, LED UV lamps wavelength is 365 ± 5nm.
LED UV lamps wavelength is 365 ± 5nm, and almost without infrared clutter, it is extremely low to be radiated at heat caused by irradiated object surface, can
Safety irradiation temperature-sensitive class product；Up to more than 95% effective power utilization rate.In 10mm apart from upper, UV photo-irradiation intensities are more than etc.
In 100mW/cm2, exposure intensity is up to 115100mW/cm in range of exposures2, minimum value be ± 85mW/cm2.UV light source lifes
It can reach 1.5 ten thousand hours, light source can be opened and closed frequently.
It is understood that UV light energies can be set according to being actually needed, to adapt to different products.
In the present embodiment, the UV dispergation machine further includes touch display screen 9, and touch display screen 9 is arranged on casing 2
On, for regulating and controlling the UV dispergation machine, operation is more convenient.
It is last it is to be noted that：Above example is only to illustrate the technical solution of the utility model, rather than it is limited
System.Although the utility model is described in detail with reference to the foregoing embodiments, one of ordinary skill in the art should manage
Solution：It can still be modified to the technical scheme described in foregoing embodiments, or which part technical characteristic is entered
Row equivalent substitution；And these modifications or replacement, the essence of appropriate technical solution is departed from various embodiments of the utility model
The spirit and scope of technical scheme.
Claims (10)
1. a kind of UV dispergation machine, it is characterised in that include：
Blowing drawer (1), the blowing drawer (1) is arranged to drawing and pulling type, for placing illuminated wafer；
UV light sources (10), the UV light sources use 300mm × 300mm faces matrix LED light source；
Casing (2), the casing (2) are used to install the blowing drawer (1) and UV light sources, and the UV light sources are arranged on described put
Expect the lower section of drawer (1).
2. UV dispergation machine as claimed in claim 1, it is characterised in that：The UV dispergation machine further includes cooling system, institute
State cooling system and be arranged on the casing comprising nitrogen adjustment valve (3) and nitrogen filling pipeline (4), the nitrogen adjustment valve (3)
(2) outside, for adjusting the flow of nitrogen；The nitrogen filling pipeline (4) is arranged on casing (2) inside and put positioned at described
Expect the top of drawer (1).
3. UV dispergation machine as claimed in claim 2, it is characterised in that：The nitrogen filling pipeline (4) includes 6 nitrogen tubes
(41), 6 nitrogen tubes (41) are along the circumferential direction uniformly arranged in the top of the blowing drawer (1), every nitrogen tube
(41) multiple steam vents (42) are provided with.
4. UV dispergation machine as claimed in claim 3, it is characterised in that：A diameter of 2mm of the steam vent (42).
5. UV dispergation machine as claimed in claim 4, it is characterised in that：The blowing drawer (1) is provided with drawer positioning hole
(11)；The UV dispergation machine further includes positioner, and the positioner includes positioning cylinder (5) and drawer alignment pin
(6), the positioning cylinder (5) is arranged on the framework in the casing, and the positioning cylinder is used to drive the drawer to position
Pin inserts the drawer positioning hole internal locking blowing drawer or for driving the drawer alignment pin to be separated with drawer positioning hole.
6. UV dispergation machine as claimed in claim 5, it is characterised in that：The blowing drawer has sealing baffle (12), described
Sealing baffle (12) is used to cooperatively form sealing with casing；Handle (13) is provided with the outside of the sealing baffle (12), is used for
Blowing drawer described in push-and-pull；Two UV lamp watch windows (14), the UV lamp observation are additionally provided with the sealing baffle (12)
Window is provided with the colored glass that can filter UV light on (14).
7. UV dispergation machine as claimed in claim 6, it is characterised in that：Wafer frame alignment pin is provided with the blowing drawer
(7), the wafer frame alignment pin (7) is used to coordinate with the framework of the wafer, for positioning the placement location of wafer.
8. UV dispergation machine as claimed in claim 7, it is characterised in that：The UV dispergation machine further includes adapter ring (8), institute
State adapter ring (8) to be placed in the blowing drawer, for meeting the placement of 8 cun or 12 cun wafers.
9. UV dispergation machine as claimed in claim 8, it is characterised in that：In 300mm × 300mm faces matrix LED light source,
LED UV lamps wavelength is 365 ± 5nm.
10. the UV dispergation machines as described in any one of claim 1 to 9, it is characterised in that：The UV dispergation machine is further comprising tactile
Display screen (9) is touched, the touch display screen is arranged on casing, for regulating and controlling the UV dispergation machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720410761.3U CN206650059U (en) | 2017-04-19 | 2017-04-19 | A kind of UV dispergation machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720410761.3U CN206650059U (en) | 2017-04-19 | 2017-04-19 | A kind of UV dispergation machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206650059U true CN206650059U (en) | 2017-11-17 |
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ID=60277802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720410761.3U Active CN206650059U (en) | 2017-04-19 | 2017-04-19 | A kind of UV dispergation machine |
Country Status (1)
| Country | Link |
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| CN (1) | CN206650059U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112645051A (en) * | 2020-12-08 | 2021-04-13 | 歌尔光学科技有限公司 | Irradiation glue-dissolving equipment |
| CN113314442A (en) * | 2021-06-21 | 2021-08-27 | 上海技垚科技有限公司 | Efficient full-automatic ultraviolet ray peptizer |
-
2017
- 2017-04-19 CN CN201720410761.3U patent/CN206650059U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112645051A (en) * | 2020-12-08 | 2021-04-13 | 歌尔光学科技有限公司 | Irradiation glue-dissolving equipment |
| CN113314442A (en) * | 2021-06-21 | 2021-08-27 | 上海技垚科技有限公司 | Efficient full-automatic ultraviolet ray peptizer |
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