CN206225338U - A kind of anti-light laser process equipment that declines of full automatic solar cell piece - Google Patents
A kind of anti-light laser process equipment that declines of full automatic solar cell piece Download PDFInfo
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- CN206225338U CN206225338U CN201621300945.6U CN201621300945U CN206225338U CN 206225338 U CN206225338 U CN 206225338U CN 201621300945 U CN201621300945 U CN 201621300945U CN 206225338 U CN206225338 U CN 206225338U
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- 238000012545 processing Methods 0.000 claims abstract description 46
- 238000010521 absorption reaction Methods 0.000 claims abstract description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 33
- 238000001179 sorption measurement Methods 0.000 claims description 13
- 241000252254 Catostomidae Species 0.000 claims description 7
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- 230000009286 beneficial effect Effects 0.000 description 12
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- 238000004519 manufacturing process Methods 0.000 description 5
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- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
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- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
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- 239000004411 aluminium Substances 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model is related to a kind of anti-light laser process equipment that declines of full automatic solar cell piece, the mechanical swing arm assembly, rotating temperature controlled absorption workbench, cell piece transmission module are separately mounted on processing table top, the rotating temperature controlled absorption workbench and cell piece transmission module are distributed in the mechanical swing arm assembly both sides, and can horizontally rotate on the processing table top；Rotating temperature controlled absorption workbench upper end is provided with two groups of temperature control sucker modules arranged side by side and symmetrical, and mechanical swing arm assembly two ends have feeding sucker and cooling blanking sucker；In mechanical swing arm assembly rotation process, feeding sucker can respectively turn to the top of one of which temperature control sucker module or cell piece transmission module with cooling blanking sucker；Laser generator module is located at the top of another set temperature control sucker module.Advantage：Simple structure, it is easy to use, the quick cooling after preheating and processing is capable of achieving in cell piece process, processing efficiency is higher.
Description
Technical field
The utility model is related to cell piece processing technique field, and more particularly to a kind of full automatic solar cell piece is anti-light to decline
Laser process equipment.
Background technology
The main flow of green novel energy source is had developed into photovoltaic solar crystal-silicon battery slice, photovoltaic industry has had scale,
Lift the generating efficiency and photo attenuation rate of crystal-silicon battery slice, it has also become the target of the pursuit of industry.Crystal silicon solar energy battery
Piece causes the generation of LID phenomenons, boron-doped p-type cell piece power attenuation may be up to due to the formation of boron oxygen compound under illumination
5%；For p-type high efficiency cell configuration-PERC (passivation emitter with the back surface battery) technology for having realized volume production at present, due to
Its improved efficiency comes from the raising of cell piece passivating back and back reflection performance, and the presence of boron oxygen compound hinders carrier to support or oppose
Face migrates, and has greatly swallowed the power ascension that high efficiency cell configuration is brought, and causes PERC efficient configurations than conventional aluminium back surface field battery
There is more serious efficiency decay.Therefore, the solution of LID problems is not only the guarantee of conventional p-type battery structure efficiency, even more p
Type high-efficiency battery is able to the key point of real application.
At present, p-type high performance solar batteries piece light decay problem can be combined by suppressing the defect generation-boron oxygen of optical attenuation
The method of body is solved, and suppresses the method for boron oxygen complex and include 1. reducing oxygen content 2. to reduce boron concentration 3. p-type mixes gallium silicon wafer
Body (gallium substitution boron) 4. n-type silicon crystal (not boracic) 5. doped germanium of the same clan, tin and carbon silicon crystal 6. high-temperature heat treatment, but above-mentioned side
Method processing efficiency is undesirable, and technics comparing is complicated during treatment, is unsuitable for efficiently production.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of anti-light laser that declines of full automatic solar cell piece and adds
Construction equipment, effectively solves the defect of prior art.
The technical scheme that the utility model solves above-mentioned technical problem is as follows：A kind of full automatic solar cell piece is anti-light to decline
Laser process equipment, including processing table top, mechanical swing arm assembly, rotating temperature controlled absorption workbench, cell piece transmission module and
Laser generator module；
Above-mentioned mechanical swing arm assembly, rotating temperature controlled absorption workbench, cell piece transmission module are separately mounted to machine table
On face, above-mentioned rotating temperature controlled absorption workbench and cell piece transmission module are distributed in above-mentioned mechanical swing arm assembly both sides, and
Can horizontally rotate on above-mentioned processing table top；
Above-mentioned rotating temperature controlled absorption workbench upper end is provided with two groups of temperature control sucker modules arranged side by side and symmetrical, above-mentioned machine
Tool rotation arm assembly two ends have feeding sucker and cooling blanking sucker；
In above-mentioned mechanical swing arm assembly rotation process, above-mentioned feeding sucker and cooling blanking sucker can respectively turn to it
In one group of above-mentioned temperature control sucker module or cell piece transmission module top；
Above-mentioned laser generator module is arranged on processing table top by support, and positioned at the above-mentioned temperature control sucker of another set
The top of module.
The beneficial effects of the utility model are：Simple structure, it is easy to use, pre-add is capable of achieving in cell piece process
Quick cooling after heat and processing, processing efficiency is higher.
On the basis of above-mentioned technical proposal, the utility model can also do following improvement.
Further, above-mentioned processing table top lower end is provided with cabinet, and pumped vacuum systems is provided with above-mentioned cabinet, above-mentioned to vacuumize
System connects every group of temperature control sucker module and feeding sucker and cooling blanking sucker by pipeline respectively.
It is whole equipment compact conformation using the beneficial effect of above-mentioned further scheme, using simple, convenient.
Further, above-mentioned mechanical swing arm assembly includes the first rotating driving device and mechanical arm, and above-mentioned first rotation is driven
Dynamic device is arranged on above-mentioned processing table top, and its drive end is upwards, and above-mentioned mechanical arm is horizontally arranged at above-mentioned first rotation and drives
The drive end of dynamic device, and above-mentioned mechanical arm middle part is fixedly connected with the drive end of above-mentioned first rotating driving device, it is above-mentioned on
Material sucker and cooling blanking sucker are separately fixed at the two ends of above-mentioned mechanical arm.
It is simple mechanical swing arm assembly structure using the beneficial effect of above-mentioned further scheme, it is easy to use.
Further, above-mentioned rotating temperature controlled absorption workbench includes the second rotating driving device and installing plate, above-mentioned second rotation
Rotary driving device is arranged on processing table top, and its drive end is upwards, and above-mentioned installing plate is horizontally fixed on above-mentioned second rotation and drives
The drive end of device is moved, and the middle part of its bottom is fixedly connected with the drive end of above-mentioned second rotating driving device, two groups are above-mentioned
Temperature control sucker module by backing plate it is arranged side by side and symmetrical on above-mentioned installing plate.
It is rotating temperature controlled absorption workbench simple structure using the beneficial effect of above-mentioned further scheme, easy to use, temperature
Control sucker module is rationally distributed, is easy to double to process.
Further, also including the water-cooling circulating system being arranged in cabinet there is Water-cooling circulating chamber in above-mentioned installing plate, on
State water supply connector and the water out adapter for having on installing plate and being respectively communicated with Water-cooling circulating chamber, the input of above-mentioned water-cooling circulating system
Water out adapter and water supply connector are connected by pipeline respectively with output end.
It is easy for being circulated water to installing plate by water-cooling circulating system using the beneficial effect of above-mentioned further scheme
It is cold so that whole rotating temperature controlled absorption workbench environment temperature reduction, it is to avoid the dangerous accident of high temperature initiation occur.
Further, every group of above-mentioned temperature control sucker module is constituted by least two arranged side by side and horizontally disposed temperature control suckers,
Each above-mentioned temperature control sucker is arranged on above-mentioned installing plate by backing plate, and above-mentioned feeding sucker and cooling blanking sucker set respectively
It is equipped with least two, and corresponds with least two of one of which above-mentioned temperature control suckers respectively, above-mentioned feeding sucker and cold
But blanking sucker is disposed in parallel in the two ends of above-mentioned mechanical arm respectively, in above-mentioned mechanical swing arm assembly rotation process, on each
Stating feeding sucker and cooling blanking sucker can respectively turn to the upper of corresponding above-mentioned temperature control sucker and cell piece transmission module
Side, each above-mentioned temperature control sucker connects above-mentioned pumped vacuum systems by pipeline respectively.
It is reasonable temperature control sucker module design using the beneficial effect of above-mentioned further scheme, is easy to implement multi-disc cell piece
Processing, improve overall processing efficiency.
Further, each above-mentioned temperature control sucker including sucker body and is arranged on the intrinsic heater of sucker, on
Stating has independent cooling air-flow flowing wind chamber and vacuumizes chamber in sucker body；Above-mentioned sucker body be provided be respectively communicated with it is cold
But the air inlet and air outlet in air current flow wind chamber, above-mentioned air inlet connection is provided with tool in the first gas-tpe fitting, above-mentioned cabinet
There is air cooling system, above-mentioned air cooling system connects above-mentioned first gas-tpe fitting；Above-mentioned vacuumizing is communicated with above-mentioned sucker body
The vacuum orifice in chamber, connection is provided with the second gas-tpe fitting at above-mentioned vacuum orifice, and above-mentioned second gas-tpe fitting connection is above-mentioned to take out true
Empty set is united；Above-mentioned sucker body upper end end face is set to adsorption plane, multiple is provided with above-mentioned adsorption plane is evenly arranged and connects and takes out true
The adsorption hole of cavity, above-mentioned adsorption hole vacuumizes chamber airflow connection with above-mentioned.
It is simple temperature control sucker structure using the beneficial effect of above-mentioned further scheme, it is reasonable in design, can be by adjusting temperature
Degree is preheated or cooling treatment to cell piece.
Further, above-mentioned first rotating driving device and the second rotating driving device are DD motors, and its middle part is coaxial
It is provided with and runs through its through hole up and down.
It is easy for by the first rotating driving device and the second rotation driving using the beneficial effect of above-mentioned further scheme
Through hole arrangement pipeline in the middle part of device so that whole equipment compact conformation, good appearance.
Further, it is provided between two groups of above-mentioned temperature control sucker modules and sequentially pass through from top to bottom installing plate, the second rotation drive
The shunt of dynamic device middle through-hole and processing table top, have in above-mentioned shunt separate vacuum suction cavity, intake antrum,
Water chamber and air-cooled chamber, above-mentioned shunt upper and lower end are respectively arranged with and above-mentioned vacuum suction cavity, intake antrum, water chamber and air-cooled
The joint of chamber correspondence connection, each above-mentioned second gas-tpe fitting connects above-mentioned shunt upper end correspondence vacuum suction cavity by pipeline
Joint, each above-mentioned first gas-tpe fitting connects the joint in the above-mentioned shunt upper end air-cooled chamber of correspondence by pipeline, each
Above-mentioned water supply connector connects the joint of above-mentioned shunt upper end correspondence intake antrum by pipeline, and each above-mentioned water out adapter leads to
The joint that pipeline connects above-mentioned shunt upper end correspondence water chamber is crossed, the joint of above-mentioned shunt lower end correspondence vacuum suction cavity passes through
The above-mentioned pumped vacuum systems of pipeline connection, the joint in the above-mentioned air-cooled chamber of shunt lower end correspondence passes through the above-mentioned air-cooled system of pipeline connection
System, the joint of above-mentioned shunt lower end correspondence intake antrum passes through the output end of the above-mentioned water-cooling circulating system of pipeline connection, above-mentioned point
The input that the joint of road device lower end correspondence water chamber passes through the above-mentioned water-cooling circulating system of pipeline connection.
It is that pumped vacuum systems in cabinet, air-cooled can be connected by shunt using the beneficial effect of above-mentioned further scheme
System is connected with water-cooling circulating system, it is to avoid pipeline arrangement is complicated in whole equipment, and influence is normally used.
Further, each above-mentioned feeding sucker and cooling blanking sucker are by logical through the first rotating driving device middle part
The pipeline in hole is connected with above-mentioned pumped vacuum systems.
It is to avoid feeding sucker and cooling blanking sucker and pumped vacuum systems using the beneficial effect of above-mentioned further scheme
Between pipeline arrangement it is complicated, the normal situation for using of influence occurs.
Further, above-mentioned cell piece transmission module includes that linear distributing feeding transmission module, at least two cachings are passed
Module and blanking transmission module, at least two above-mentioned caching transmission modules is sent to be set in sequence in feeding transmission module and blanking successively
Between transmission module, and correspond with above-mentioned feeding sucker and cooling blanking sucker respectively, above-mentioned mechanical swing arm assembly turns
During dynamic, above-mentioned feeding sucker and cooling blanking sucker can respectively turn to corresponding above-mentioned caching transmission module top.
Cell piece transmission module simple structure using the beneficial effect of above-mentioned further scheme, it is easy to use, be easy to it is upper,
Blanking and caching cell piece.
Brief description of the drawings
Fig. 1 is the structural representation of the anti-light laser process equipment that declines of full automatic solar cell piece of the present utility model；
Fig. 2 is the structural representation of mechanical swing arm assembly in the utility model；
Fig. 3 is the structural representation of rotating temperature controlled absorption workbench in the utility model；
Fig. 4 is the structural representation of temperature control sucker in the utility model；
Fig. 5 is the present invention looks up structural representation of rotating temperature controlled absorption workbench in the utility model；
Fig. 6 is the structural representation of another embodiment of rotating temperature controlled absorption workbench in the utility model；
Fig. 7 is cell piece transmission module in the anti-light laser process equipment that declines of full automatic solar cell piece of the present utility model
Structural representation；
Fig. 8 is the structural representation of cooling blanking sucker in the utility model；
Fig. 9 is the structural representation of coldplate in the utility model.
In accompanying drawing, the list of parts representated by each label is as follows：
1st, table top is processed, 2, mechanical swing arm assembly, 3, rotating temperature controlled absorption workbench, 4, cell piece transmission module, 5,
Laser generator module, 6, temperature control sucker module, 7, shunt, 11, support, 12, cabinet, the 21, first rotating driving device,
22nd, mechanical arm, 23, feeding sucker, 24, cooling blanking sucker, the 31, second rotating driving device, 32, installing plate, 33, backing plate,
41st, feeding transmission module, 42, caching transmission module, 43, blanking transmission module, 51, laser generator, 61, temperature control sucker, 71,
Protective cover, 241, coldplate, 242, coolant seal plate, 243, suction disc, 321, water supply connector, 322, water out adapter, 323, coil pipe,
611st, sucker body, 612, heater, 2411, groove, 2412, air intake passage, 2413, coolant circulation groove, 2422, feed liquor
Joint, 2423, go out liquid joint, 2431, stomata, the 6111, first gas-tpe fitting, the 6112, second gas-tpe fitting, 6113, adsorption hole.
Specific embodiment
Principle of the present utility model and feature are described below in conjunction with accompanying drawing, example is served only for explaining this practicality
It is new, it is not intended to limit scope of the present utility model.
Embodiment：As shown in figure 1, the anti-light laser process equipment that declines of the full automatic solar cell piece of the present embodiment, including
Processing table top 1, mechanical swing arm assembly 2, rotating temperature controlled absorption workbench 3, cell piece transmission module 4 and laser generator module
5；
Above-mentioned mechanical swing arm assembly 2, rotating temperature controlled absorption workbench 3, cell piece transmission module 4 are separately mounted to processing
On table top 1, above-mentioned rotating temperature controlled absorption workbench 3 and cell piece transmission module 4 are distributed in 2 liang of above-mentioned mechanical swing arm assembly
Side, and can horizontally rotate on above-mentioned processing table top 1；
The above-mentioned upper end of rotating temperature controlled absorption workbench 3 is provided with two groups of temperature control sucker modules 6 arranged side by side and symmetrical, above-mentioned
The two ends of mechanical swing arm assembly 2 have feeding sucker 23 and cooling blanking sucker 24；
In the above-mentioned rotation process of mechanical swing arm assembly 2, above-mentioned feeding sucker 23 and cooling blanking sucker 24 can turn respectively
Move the top to the above-mentioned temperature control sucker module 6 of one of which or cell piece transmission module 4；
Above-mentioned laser generator module 5 is arranged on processing table top 1 by support 11, and positioned at the above-mentioned temperature control of another set
The top of sucker module 6.
In production process, cell piece is sequentially transmitted in cell piece transmission module 4, and mechanical swing arm assembly 2 passes through feeding
Sucker 23 is drawn after cell piece rotates 180 ° and is placed on the one of which temperature control sucker module 6 of rotating temperature controlled absorption workbench 3
Adsorbed by it, cell piece is preheated by temperature control sucker module 6, afterwards, rotating temperature controlled absorption workbench 3 rotates
180 °, one group of above-mentioned temperature control sucker module 6 for being adsorbed with cell piece turns to the lower section of laser generator module 5, laser generator
Module 5 is processed to cell piece, and in process, rotating temperature controlled absorption workbench 3 is adjustable to reduce Laser Processing to the sun
The influence of energy cell piece temperature rise, synchronous, mechanical swing arm assembly 2 is machined in the film releasing of another group of above-mentioned temperature control sucker module 6
Afterwards, rotating temperature controlled absorption workbench 3 is turned round, and another group of above-mentioned temperature control sucker module 6 turns to the lower section of laser generator module 5 and enter
Row processing, mechanical swing arm assembly 2 is drawn by cooling down the cell piece that blanking sucker 24 will be processed and is placed after turning round 180 °
Sent out in cell piece transmission module 4, in process, feeding and blowing can be synchronously realized in cell piece transmission module 4
Action, whole equipment can preheat to rotating temperature controlled absorption workbench 3 to cell piece in process, meanwhile,
The cell piece fast cooling treatment that cooling blanking sucker 24 will can be processed, effectively reduces LID phenomenons after cell piece processing
Problem occur.
It is considered that rotating temperature controlled absorption workbench 3 and feeding sucker 23 and cooling blanking sucker 24 are both needed to intervention and take out very
Empty set is united, and is provided with cabinet 12, above-mentioned cabinet 12 in the above-mentioned lower end of processing table top 1 and is provided with pumped vacuum systems, above-mentioned to vacuumize
System connects every group of above-mentioned temperature control sucker module 6 and feeding sucker 23 and cooling blanking sucker 24 by pipeline respectively so that
Whole equipment can be produced and processed independently, its compact conformation, easy to use.
Preferably, as shown in Fig. 2 above-mentioned mechanical swing arm assembly 2 includes the first rotating driving device 21 and mechanical arm 22,
Above-mentioned first rotating driving device 21 is arranged on above-mentioned processing table top 1, and its drive end is upwards, the level of above-mentioned mechanical arm 22 peace
Mounted in the drive end of above-mentioned first rotating driving device 21, and the middle part of above-mentioned mechanical arm 22 and above-mentioned first rotating driving device 21
Drive end be fixedly connected, above-mentioned feeding sucker 23 and cooling blanking sucker 24 are separately fixed at the two ends of above-mentioned mechanical arm 22,
When using, the first rotating driving device 21 drives mechanical arm 22 to realize that 180 ° rotate and turn round so that feeding sucker 23 and cold
But blanking sucker 24 can be turned in the corresponding position of rotating temperature controlled absorption workbench 3 and cell piece transmission module 4 respectively, be entered
Row feeding and the operation of blanking.
Preferably, as shown in figure 3, above-mentioned rotating temperature controlled absorption workbench 3 includes the second rotating driving device 31 and installs
Plate 32, above-mentioned second rotating driving device 31 is arranged on processing table top 1, and its drive end is upwards, the level of above-mentioned installing plate 32
It is fixed on the drive end of above-mentioned second rotating driving device 31, and the middle part of its bottom and above-mentioned second rotating driving device 31
Drive end is fixedly connected, two groups of above-mentioned temperature control sucker modules 6 by backing plate 33 it is arranged side by side and symmetrical installed in above-mentioned peace
On dress plate 32, processing and the cell piece pre-heating technique of double are realized, realize efficient processing, meanwhile, backing plate 33 can be kept away
Exempt from high temperature of the temperature control sucker module 6 in processing to be delivered on the rotating driving device 31 of installing plate 32 and second to installing
The rotating driving device 31 of plate 32 or second causes to damage.
Preferably, every group of above-mentioned temperature control sucker module 6 is by least two arranged side by side and horizontally disposed 61 groups of temperature control suckers
Into each above-mentioned temperature control sucker 61 is arranged on above-mentioned installing plate 32 by backing plate 33, under above-mentioned feeding sucker 23 and cooling
Material sucker 24 is respectively arranged with least two, and corresponds with least two of one of which above-mentioned temperature control suckers 61 respectively,
Above-mentioned feeding sucker 23 and cooling blanking sucker 24 are disposed in parallel in the two ends of above-mentioned mechanical arm 22, above-mentioned mechanical swing arm respectively
In the rotation process of assembly 2, each above-mentioned feeding sucker 23 and cooling blanking sucker 24 can respectively turn to corresponding above-mentioned temperature control
The top of sucker 61 and cell piece transmission module 4, each above-mentioned temperature control sucker 61 connects above-mentioned vacuumizing by pipeline respectively
System, in process, each above-mentioned temperature control sucker 61 carries out film releasing, you can realize on every group of above-mentioned temperature control sucker module 6
Place at least two cell pieces to synchronize processing and synchronously pick and place piece operation, realize double multi-disc cooked mode, it is ensured that
Production and processing is efficiently carried out.
It is furthermore preferred that every group of above-mentioned temperature control sucker module 6 is constituted by two arranged side by side and horizontally disposed temperature control suckers 61.
Preferably, as shown in figure 4, each above-mentioned temperature control sucker 61 includes sucker body 611 and is arranged on sucker body
Heater 612 in 611, above-mentioned heater 612 is arranged in sucker body 611, is had in above-mentioned sucker body 611 only
Vertical cooling air-flow flows wind chamber and vacuumizes chamber；Above-mentioned sucker body 611 is provided with and is respectively communicated with cooling air-flow flowing wind chamber
Air inlet and air outlet, the connection of above-mentioned air inlet is provided with has air-cooled system in the first gas-tpe fitting 6111, above-mentioned cabinet 12
System, above-mentioned air cooling system connects above-mentioned first gas-tpe fitting 6111；It is communicated with above-mentioned vacuumizing chamber on above-mentioned sucker body 611
Vacuum orifice, connection is provided with the second gas-tpe fitting 6112 at above-mentioned vacuum orifice, in the above-mentioned connection of second gas-tpe fitting 6112
State pumped vacuum systems；The upper end end face of above-mentioned sucker body 611 is set to adsorption plane, and being provided with multiple on above-mentioned adsorption plane is evenly arranged simultaneously
Connection vacuumizes the adsorption hole 6113 in chamber, and above-mentioned adsorption hole 6113 vacuumizes chamber airflow connection, the knot of temperature control sucker 61 with above-mentioned
Structure is simple, easy to use, in production process, temperature control sucker 61 can be heated by heater 612, can also be by air-cooled
System imports cold wind and carries out cooling treatment to whole temperature control sucker 61 to cooling air-flow flowing wind chamber, it is ensured that to cell piece in laser
Constant temperature treatment in preheating and laser processing procedure is carried out before processing.
Above-mentioned heater 612 is heating rod.
In certain embodiments, as shown in figure 1, also including the water-cooling circulating system being arranged in cabinet 12, above-mentioned installation
There is Water-cooling circulating chamber in plate 32, there is the water supply connector 321 and water outlet for being respectively communicated with Water-cooling circulating chamber on above-mentioned installing plate 32
Joint 322, the input and output end of above-mentioned water-cooling circulating system connect water out adapter 322 and water supply connector by pipeline respectively
321, because temperature control sucker 61 is in heating process, in meeting radiations heat energy to surrounding environment, therefore, by water-cooling circulating system to peace
Dress plate 32 is circulated cooling, can avoid damage of the high temperature to the route of pipe line and motor.
Preferably, the rotating driving device 31 of above-mentioned first rotating driving device 21 and second is DD motors, and its middle part is
It is coaxially provided with up and down through its through hole, through hole may pass through pipeline and carry out associated pipe arrangement, it is to avoid pipeline is crisscross when arranging
Complex effects are normally used.
Preferably, installing plate is sequentially passed through from top to bottom as shown in figure 3, being provided between two groups of above-mentioned temperature control sucker modules 6
32nd, the shunt 7 of the middle through-hole of the second rotating driving device 31 and processing table top 1, has separate in above-mentioned shunt 7
Vacuum suction cavity, intake antrum, water chamber and air-cooled chamber, the upper and lower end of above-mentioned shunt 7 be respectively arranged with above-mentioned vacuum suction cavity,
The joint that intake antrum, water chamber are connected with air-cooled chamber correspondence, each above-mentioned second gas-tpe fitting 6112 is connected by pipeline
The joint of the upper end of shunt 7 correspondence vacuum suction cavity is stated, each above-mentioned first gas-tpe fitting 6111 connects above-mentioned point by pipeline
The joint in the upper end of the road device 7 air-cooled chamber of correspondence, each above-mentioned water supply connector 321 connects the upper end pair of above-mentioned shunt 7 by pipeline
The joint of intake antrum is answered, each above-mentioned water out adapter 322 connects connecing for the upper end of above-mentioned shunt 7 correspondence water chamber by pipeline
Head, the joint of the lower end of above-mentioned shunt 7 correspondence vacuum suction cavity passes through the above-mentioned pumped vacuum systems of pipeline connection, under above-mentioned shunt 7
The joint in the end air-cooled chamber of correspondence is led to by the above-mentioned air cooling system of pipeline connection, the joint of the lower end of above-mentioned shunt 7 correspondence intake antrum
The output end of the above-mentioned water-cooling circulating system of pipeline connection is crossed, the joint of the lower end of above-mentioned shunt 7 correspondence water chamber is connected by pipeline
Lead to above-mentioned water-cooling circulating system input, by shunt 7 can preferably arrange with pumped vacuum systems, water-cooling circulating system and
The pipeline connection of air cooling system, is that the pipeline being related in whole equipment can be arranged preferably cabling, is compact equipment, profile
It is attractive in appearance.
Preferably, as shown in figure 5, the bottom of above-mentioned installing plate 32 correspondence each above-mentioned temperature control sucker 61 position be equipped with
The above-mentioned one-to-one coil pipe 323 of temperature control sucker 61, one end of each above-mentioned coil pipe 323 is above-mentioned with corresponding by pipeline respectively
Second gas-tpe fitting 6112, the other end connects the joint of the upper end of above-mentioned shunt 7 correspondence vacuum suction cavity by pipeline respectively, passes through
Coil pipe 323 can preferably connect the second gas-tpe fitting 6112 and the connection of shunt 7 on each above-mentioned temperature control sucker 61, shorten pipe
The size on road, beneficial to the layout of overall pipeline.
As shown in fig. 6, above-mentioned shunt 7 is overcoating to be covered with protective cover 71, safety can be carried out to shunt 7 by protective cover
Protection, it is to avoid the situation for being damaged shunt 7 due to maloperation in laser processing procedure is occurred.
Preferably, each above-mentioned feeding sucker 23 and cooling blanking sucker 24 are by through the first rotating driving device 21
The pipeline of middle through-hole is connected with above-mentioned pumped vacuum systems, it is ensured that feeding sucker 23 and cooling blanking sucker 24 and pumped vacuum systems
Between connect pipeline can be partly hidden in the first rotating driving device 21 so that pipeline do not influence feeding sucker 23 and cooling
The piece that takes, puts of blanking sucker 24 is acted.
Preferably, as shown in fig. 7, above-mentioned cell piece transmission module 4 includes linear distributing feeding transmission module 41, extremely
Few two cachings transmission module 42 and blanking transmission module 43, at least two above-mentioned caching transmission modules 42 are set in sequence in successively
Between feeding transmission module 41 and blanking transmission module 43, and respectively with above-mentioned feeding sucker 23 and cooling blanking sucker 24 one by one
Correspondence, in the above-mentioned rotation process of mechanical swing arm assembly 2, above-mentioned feeding sucker 23 and cooling blanking sucker 24 can be turned to respectively
The top of corresponding above-mentioned caching transmission module 42, and ensure that each caching transmission module 42 caches a cell piece, when taking piece, on
Material sucker 23 carries out taking piece in corresponding caching transmission module 42, takes piece and finishes 180 ° of the rotation of rear mechanical arm 22 corresponding one
Film releasing is carried out on the above-mentioned temperature control sucker module 6 of group, after completion of processing, cooling blanking sucker 24 is rotated to corresponding above-mentioned temperature control
Carry out taking piece on sucker module 6, and during piece is taken, cooling blanking sucker 24 carries out fast quickly cooling to the cell piece of completion of processing
But cooling treatment, being rotated in afterwards in corresponding caching transmission module 42 carries out film releasing, is finally transmitted by blanking transmission module 43
Go out.
In certain embodiments, as shown in FIG. 8 and 9, above-mentioned cooling blanking sucker 24 includes coldplate 241 and seals respectively
It is fixed on coolant seal plate 242 and suction disc 243 on the upper and lower end face of coldplate 241；
The lower surface of above-mentioned coldplate 241 is provided with groove 2411, and above-mentioned suction disc 243 covers above-mentioned groove 2411, above-mentioned suction
Air cavity is formed between plate 243 and groove 2411；
Above-mentioned coldplate 241 is provided with the air intake passage 2412 for simultaneously connecting above-mentioned air cavity through it up and down, and above-mentioned cooling is close
The position of correspondence air intake passage 2412 is provided with up and down through its pilot hole 2421, the upper surface of above-mentioned coldplate 241 on shrouding 242
Coolant circulation groove 2413 is provided with, above-mentioned coolant seal plate 242 covers above-mentioned coolant circulation groove 2413, and above-mentioned cooling is close
The liquid inlet joint 2422 that is connected with above-mentioned coolant circulation groove 2413 respectively is installed on shrouding 242 and goes out liquid joint 2423；
Above-mentioned suction disc 243 is provided with multiple and is uniformly arranged and up and down through its stomata 2431, and above-mentioned stomata 2431 is equal
Connected with air cavity；Above-mentioned air intake passage 2412 is with vacuumizing by the pipeline through the middle through-hole of the first rotating driving device 21
System connection, is provided with coolant circulation supply system in above-mentioned cabinet 12, the output end of above-mentioned coolant circulation supply system and defeated
Enter end and by the pipeline through the middle through-hole of the first rotating driving device 21 and liquid inlet joint 2422 and go out liquid joint 2423 respectively
Connection, when taking piece, suction disc adsorbs the cell piece of completion of processing, and cell piece heat transfer is flowed through coolant to suction disc 243, heat
The coolant of circulation groove 2413 absorbs and takes away so that suction disc 243 quickly cools, and then reaches cell piece is carried out quickly
The purpose of cooling treatment.
Above-mentioned suction disc 243 and coldplate 241 are made of aluminum alloy materials, and its light weight, intensity is high, heat transfer effect
It is good.
Above-mentioned laser generator module 5 be set up in parallel including at least two and with every group of middle temperature of above-mentioned temperature control sucker module 6
The control one-to-one laser generator 51 of sucker 61, in process, there is downwards light beam and beat in each laser generator 51
It is processed on cell piece on corresponding temperature control sucker 61.
Preferred embodiment of the present utility model is the foregoing is only, is not used to limit the utility model, it is all in this practicality
Within new spirit and principle, any modification, equivalent substitution and improvements made etc. should be included in guarantor of the present utility model
Within the scope of shield.
Claims (11)
1. the anti-light laser process equipment that declines of a kind of full automatic solar cell piece, it is characterised in that：Including processing table top (1), machine
Tool rotates arm assembly (2), rotating temperature controlled absorption workbench (3), cell piece transmission module (4) and laser generator module (5)；
The mechanical swing arm assembly (2), rotating temperature controlled absorption workbench (3), cell piece transmission module (4) are separately mounted to add
On work table top (1), the rotating temperature controlled absorption workbench (3) and cell piece transmission module (4) are distributed in the mechanical swing arm
Assembly (2) both sides, and can horizontally rotate on processing table top (1)；
Rotating temperature controlled absorption workbench (3) upper end is provided with two groups of temperature control suckers module (6) arranged side by side and symmetrical, described
Mechanical swing arm assembly (2) two ends have feeding sucker (23) and cooling blanking sucker (24)；
In mechanical swing arm assembly (2) rotation process, the feeding sucker (23) and cooling blanking sucker (24) can be respectively
Turn to the top of temperature control sucker module (6) or cell piece transmission module (4) described in one of which；
The laser generator module (5) by support (11) in processing table top (1), and positioned at temperature described in another set
The top of control sucker module (6).
2. the anti-light laser process equipment that declines of a kind of full automatic solar cell piece according to claim 1, it is characterised in that：
Described processing table top (1) lower end is provided with cabinet (12), the cabinet (12) and is provided with pumped vacuum systems, the pumped vacuum systems
Temperature control sucker module (6) described in every group and feeding sucker (23) and cooling blanking sucker (24) are connected by pipeline respectively.
3. the anti-light laser process equipment that declines of a kind of full automatic solar cell piece according to claim 2, it is characterised in that：
The mechanical swing arm assembly (2) includes the first rotating driving device (21) and mechanical arm (22), the first rotation driving dress
(21) are put on processing table top (1), and its drive end is upwards, the mechanical arm (22) is horizontally arranged at described first
With the driving of first rotating driving device (21) in the middle part of the drive end of rotating driving device (21), and the mechanical arm (22)
End is fixedly connected, and the feeding sucker (23) and cooling blanking sucker (24) are separately fixed at the two ends of the mechanical arm (22).
4. the anti-light laser process equipment that declines of a kind of full automatic solar cell piece according to claim 3, it is characterised in that：
The rotating temperature controlled absorption workbench (3) includes the second rotating driving device (31) and installing plate (32), and second rotation is driven
Dynamic device (31) is in processing table top (1), and its drive end is upwards, and the installing plate (32) is horizontally fixed on described second
The drive end of rotating driving device (31), and the middle part of its bottom fixes with the drive end of second rotating driving device (31)
Connection, temperature control sucker module (6) described in two groups by backing plate (33) it is arranged side by side and symmetrical installed in the installing plate
(32) on.
5. the anti-light laser process equipment that declines of a kind of full automatic solar cell piece according to claim 4, it is characterised in that：
Temperature control sucker module (6) described in every group is arranged side by side by least two and horizontally disposed temperature control suckers (61) constitute, described in each
Temperature control sucker (61) by backing plate (33) on the installing plate (32), inhale by the feeding sucker (23) and cooling blanking
Disk (24) is respectively arranged with least two, and corresponds with temperature control sucker (61) described at least two of one of which respectively,
The feeding sucker (23) and cooling blanking sucker (24) are disposed in parallel in the two ends of the mechanical arm (22), the machinery respectively
Rotation arm assembly (2) rotation process in, each described feeding sucker (23) and cool down blanking sucker (24) can turn to respectively it is right
The temperature control sucker (61) answered and the top of cell piece transmission module (4), each described temperature control sucker (61) pass through respectively
Pipeline connects the pumped vacuum systems.
6. the anti-light laser process equipment that declines of a kind of full automatic solar cell piece according to claim 5, it is characterised in that：
Each described temperature control sucker (61) includes sucker body (611) and the heater being arranged in sucker body (611)
(612), there is independent cooling air-flow flowing wind chamber in the sucker body (611) and chamber is vacuumized；The sucker body
(611) air inlet and air outlet for being respectively communicated with cooling air-flow flowing wind chamber are provided with, the air inlet connection is provided with first
There is air cooling system, the air cooling system connects first gas-tpe fitting in gas-tpe fitting (6111), the cabinet (12)
(6111)；The vacuum orifice for vacuumizing chamber is communicated with the sucker body (611), connection sets at the vacuum orifice
There is the second gas-tpe fitting (6112), second gas-tpe fitting (6112) connects the pumped vacuum systems；The sucker body
(611) upper end end face is set to adsorption plane, multiple is provided with the adsorption plane and is evenly arranged and connects the adsorption hole for vacuumizing chamber
(6113), the adsorption hole (6113) vacuumizes chamber airflow connection with described.
7. the anti-light laser process equipment that declines of a kind of full automatic solar cell piece according to claim 6, it is characterised in that：
Also include the water-cooling circulating system being arranged in cabinet (12), there is Water-cooling circulating chamber, the installation in the installing plate (32)
There is water supply connector (321) and the water out adapter (322) for being respectively communicated with Water-cooling circulating chamber, the water-cooling circulating system on plate (32)
Input and output end water out adapter (322) and water supply connector (321) is connected by pipeline respectively.
8. the anti-light laser process equipment that declines of a kind of full automatic solar cell piece according to claim 7, it is characterised in that：
First rotating driving device (21) and the second rotating driving device (31) are DD motors, and its middle part is coaxially provided with up and down
Through its through hole.
9. the anti-light laser process equipment that declines of a kind of full automatic solar cell piece according to claim 8, it is characterised in that：
It is provided between temperature control sucker module (6) described in two groups and sequentially pass through from top to bottom installing plate (32), the second rotating driving device
(31) middle through-hole and the shunt (7) of processing table top (1), have in the shunt (7) separate vacuum suction cavity,
Intake antrum, water chamber and air-cooled chamber, shunt (7) upper and lower end be respectively arranged with the vacuum suction cavity, intake antrum, go out
The joint that water cavity is connected with air-cooled chamber correspondence, each described second gas-tpe fitting (6112) connects the shunt by pipeline
(7) joint of upper end correspondence vacuum suction cavity, each described first gas-tpe fitting (6111) connects the shunt by pipeline
(7) joint in the air-cooled chamber of upper end correspondence, each described water supply connector (321) connects the shunt (7) upper end by pipeline
The joint of correspondence intake antrum, each described water out adapter (322) connects the correspondence water outlet of the shunt (7) upper end by pipeline
The joint in chamber, the joint of shunt (7) the lower end correspondence vacuum suction cavity is by pumped vacuum systems described in pipeline connection, described point
The joint in road device (7) lower end air-cooled chamber of correspondence is intake by air cooling system described in pipeline connection, shunt (7) the lower end correspondence
The output end that the joint in chamber passes through water-cooling circulating system described in pipeline connection, shunt (7) lower end corresponds to connecing for water chamber
The input that head passes through water-cooling circulating system described in pipeline connection.
10. a kind of anti-light laser process equipment that declines of full automatic solar cell piece according to claim 9, its feature exists
In：Each described feeding sucker (23) and cooling blanking sucker (24) are by logical through the first rotating driving device (21) middle part
The pipeline in hole is connected with the pumped vacuum systems.
A kind of 11. anti-light laser process equipment that declines of full automatic solar cell piece according to any one of claim 1 to 10,
It is characterized in that：The cell piece transmission module (4) includes linear distributing feeding transmission module (41), at least two cachings
Transmission module (42) and blanking transmission module (43), cache transmission module (42) and are set in sequence in feeding successively described at least two
Between transmission module (41) and blanking transmission module (43), and respectively with the feeding sucker (23) and cooling blanking sucker (24)
Correspond, in mechanical swing arm assembly (2) rotation process, the feeding sucker (23) and cooling blanking sucker (24) can
Corresponding caching transmission module (42) top is turned to respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621300945.6U CN206225338U (en) | 2016-11-30 | 2016-11-30 | A kind of anti-light laser process equipment that declines of full automatic solar cell piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621300945.6U CN206225338U (en) | 2016-11-30 | 2016-11-30 | A kind of anti-light laser process equipment that declines of full automatic solar cell piece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206225338U true CN206225338U (en) | 2017-06-06 |
Family
ID=58787183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621300945.6U Active CN206225338U (en) | 2016-11-30 | 2016-11-30 | A kind of anti-light laser process equipment that declines of full automatic solar cell piece |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206225338U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106505019A (en) * | 2016-11-30 | 2017-03-15 | 武汉帝尔激光科技股份有限公司 | A kind of anti-light laser process equipment that declines of full automatic solar cell piece |
| CN114935234A (en) * | 2022-07-26 | 2022-08-23 | 山东沂光集成电路有限公司 | Cooling device for integrated circuit semiconductor processing |
-
2016
- 2016-11-30 CN CN201621300945.6U patent/CN206225338U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106505019A (en) * | 2016-11-30 | 2017-03-15 | 武汉帝尔激光科技股份有限公司 | A kind of anti-light laser process equipment that declines of full automatic solar cell piece |
| CN106505019B (en) * | 2016-11-30 | 2023-09-08 | 武汉帝尔激光科技股份有限公司 | Full-automatic solar cell anti-light-attenuation laser processing equipment |
| CN114935234A (en) * | 2022-07-26 | 2022-08-23 | 山东沂光集成电路有限公司 | Cooling device for integrated circuit semiconductor processing |
| CN114935234B (en) * | 2022-07-26 | 2022-10-21 | 山东沂光集成电路有限公司 | Cooling device for integrated circuit semiconductor processing |
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Address after: No. 88 Jiulonghu Street, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430223 Patentee after: WUHAN DR LASER TECHNOLOGY Co.,Ltd. Address before: No. 4, Huashiyuan 2nd Road, Guanggu Industrial Park, Donghu Development Zone, Wuhan City, Hubei Province, 430223 Patentee before: WUHAN DR LASER TECHNOLOGY Co.,Ltd. |