CN206635455U - Graphite crucible seat for semiconductor grade monocrystal stove - Google Patents
Graphite crucible seat for semiconductor grade monocrystal stove Download PDFInfo
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- CN206635455U CN206635455U CN201720396622.XU CN201720396622U CN206635455U CN 206635455 U CN206635455 U CN 206635455U CN 201720396622 U CN201720396622 U CN 201720396622U CN 206635455 U CN206635455 U CN 206635455U
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- wall
- graphite crucible
- bucket
- weir
- bucket bottom
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Abstract
A kind of graphite crucible seat for semiconductor grade monocrystal stove is the utility model is related to, crucible mounting surface is provided with graphite crucible seat, it is characterised in that：The barrel shaped structure that graphite crucible seat is closed by forming periphery after the assembling splicing of four valve structure identical elementary cells, the joint portion of neighboring unit cells is installation binding face, the Inner wall crucible mounting surfaces at the bucket bottom of the barrel shaped structure after assembly, the outer wall at bucket bottom is weight-bearing surface, the outer rim of bucket bottom weight-bearing surface is provided with circular orientation weir, the inwall on circular orientation weir is provided with locking groove, and circular orientation weir connects to the secondary support surface transition between bucket wall by back taper, and the outside wall surface periphery of bucket wall is provided with lifting mouth.
Description
Technical field
It the utility model is related to a kind of crucible holder, especially a kind of graphite earthenware for vertical pulling method semiconductor grade monocrystal stove
Crucible seat.
Background technology
Monocrystalline silicon is the crystal with basic complete lattice structure, is a kind of good semi-conducting material, purity is reachable
To more than 99.9999999%, it can be used for diode level, rectifying device level, circuit-level and solar battery grade single crystal product article
Production and deep processing manufacture, its subsequent product integrated circuit and semiconductor separation part be widely used to every field,
Also occupy critical role in military avionic equipment, be inNew materialThe forward position of development.
Semiconductor grade monocrystal stove is crystal growth equipment important in monocrystalline silicon industrial chain, at present, in the world for silicon
The main stream approach of single crystal growth mainly has two kinds：One kind is zone-melting process, and another kind is vertical pulling method, and wherein vertical pulling method has growth
The advantages that monocrystalline quality is big, diameter is big, cost is cheap, production efficiency is high, it is always Main Means prepared by bulk silicon substrate.
Vertical pulling method requires that crucible is provided simultaneously with rotation and elevating function, simultaneously because crucible is in thermal field center, it is variable by hyperthermia radiation
Shape, therefore the stability, reliability and heat resistance that carry the graphite crucible seat of crucible are particularly important.At present, in monocrystal stove
Crucible holder uses three-clove style structure more, and because structure design is unreasonable, stress concentration after being heated, mechanics of materials intensity is relatively low, often
There is the phenomenon of temperature distortion and cracking, fault rate is high, has a strong impact on the stability and production efficiency of equipment.How stone is improved
Stability, reliability and the heat resistance of black crucible holder have become the problem of this area close attention.
Utility model content
It is an object of the invention to：It is unreasonable for existing three-clove style crucible holder structure design, stress concentration after being heated, material
Expect that mechanical strength is relatively low, a series of problems, such as easy temperature distortion and cracking, there is provided a kind of new to be reliably used for semiconductor grade silicon
The graphite crucible seat of single crystal growing furnace.
What the purpose of this utility model was realized in：A kind of graphite crucible seat for semiconductor grade monocrystal stove, stone
Crucible mounting surface is provided with black crucible holder, it is characterised in that：Graphite crucible seat is assembled by four valve structure identical elementary cells and spelled
The barrel shaped structure of periphery closure is formed after connecing, installation binding face is in the joint portion of neighboring unit cells, the barrel shaped structure after assembly
Bucket bottom Inner wall crucible mounting surfaces, the outer wall at bucket bottom is weight-bearing surface, and the outer rim of bucket bottom weight-bearing surface is provided with circular orientation weir, annular
The inwall on positioning weir is provided with locking groove, and circular orientation weir is connected between bucket wall by the transition of back taper secondary support surface, bucket
The outside wall surface periphery of wall is provided with lifting mouth.
In the utility model, each elementary cell is symmetrically set containing a locking groove and two lifting mouths, lifting mouth
On the outer wall of bucket wall line of symmetry both sides.
In the utility model, described graphite crucible seat is furnished with and pedestal, inwall and the barrel shaped structure after assembly of pedestal
Bucket bottom weight-bearing surface and secondary support surface matching, be provided with latch corresponding with the locking groove in pedestal.
In the utility model, four described valve structure identical elementary cells use high intensity isostatic pressing formed graphite system
Make, part must be through high temperature purification treatment after machining, and its purity requirement is 5 ppm.
The utility model has the advantage of：Due to using structure identical fFour piece type graphite seat splicing construction, improve whole
Body structural flexibility, help to resist temperature distortion；, can be effective due to setting locating surface, secondary support surface on every valve graphite seat
Eliminate thermal stress concentration problem；Due to being substantially reduced using high intensity, high purity graphite material, fault rate, production efficiency is able to
Significantly improve, the utility model can be lifted by lifting by crane mouth field combinations, easy to operate, even if indivedual elementary cell damages
, also maintenance cost can be greatlyd save by local replacing.
Brief description of the drawings
Fig. 1 is to the utility model is related to the overall structure diagram after embodiment assembling；
Fig. 2 is the basic cell structure schematic diagram that the utility model is disclosed by two panels elementary cell；
Fig. 3 is the Standard schematic diagram for the graphite crucible seat and pedestal that the utility model is related to；
Fig. 4 is the partial enlarged drawing for the locking groove that the utility model is related to.
In figure：1st, elementary cell, 2, crucible mounting surface, 3, weight-bearing surface, 4, circular orientation weir, 5, installation binding face, 6, auxiliary
Help supporting surface, 7, bucket wall, 8, lifting mouth, 9, locking groove, 10, pedestal, 11, latch.
Embodiment
Accompanying drawing discloses a kind of concrete structure for the embodiment that the utility model is related to without limitation, below in conjunction with the accompanying drawings
The utility model is further described.
From Fig. 1 and Fig. 2, graphite crucible seat forms periphery after assembling splicing by four valve structure identical elementary cells 1
The barrel shaped structure of closure, the joint portion of neighboring unit cells 1 are to install binding face 5, the Inner at the bucket bottom of the barrel shaped structure after assembly
Wall crucible mounting surface 2, the outer wall at bucket bottom is weight-bearing surface 3, and the outer rim of bucket bottom weight-bearing surface 3 is provided with circular orientation weir 4, circular orientation weir
4 inwall is provided with locking groove 9, and circular orientation weir 4 is connected between arriving bucket wall 7 by the transition of secondary support surface 6 of back taper, bucket
The outside wall surface periphery of wall 7 is provided with lifting mouth 8.
In the present embodiment, each elementary cell 1 is containing a locking groove 9 and two lifting mouths 8, the lifting mouth 8
It is symmetrically arranged on the outer wall of the line of symmetry both sides of barrel wall 7.
As seen from Figure 3, described graphite crucible seat is furnished with and pedestal 10, the inwall of pedestal 10 and barrel shaped structure after assembly
Bucket bottom weight-bearing surface 3 and secondary support surface 6 are matched, and latch 11 corresponding with the locking groove 9 is provided with pedestal 10.
When it is implemented, four described valve structure identical elementary cells 1 are made using high intensity isostatic pressing formed graphite, zero
Part must be through high temperature purification treatment after machining, and its purity requirement is 5 ppm.
In use, two lifting mouths 8 are all provided with the outer wall of bucket wall 7 of each elementary cell 1, by lifting device to base
This unit 1 is carried and installed.Per the bottom of elementary cell 1 by setting on the circular orientation weir 4 at the edge of weight-bearing surface 3
Locking groove 9 coordinates with the latch 11 on pedestal 10, can prevent from being subjected to displacement with elementary cell 1.
Claims (4)
1. a kind of graphite crucible seat for semiconductor grade monocrystal stove, graphite crucible seat is interior to be provided with crucible mounting surface, its feature
It is：The barrel shaped structure that graphite crucible seat is closed by forming periphery after the assembling splicing of four valve structure identical elementary cells is adjacent
The joint portion of elementary cell is to install binding face, the Inner wall crucible mounting surfaces at the bucket bottom of the barrel shaped structure after assembly, outside bucket bottom
Wall is weight-bearing surface, and the outer rim of bucket bottom weight-bearing surface is provided with circular orientation weir, and the inwall on circular orientation weir is provided with locking groove, and annular is fixed
Position weir connects to the secondary support surface transition between bucket wall by back taper, and the outside wall surface periphery of bucket wall is provided with lifting mouth.
2. the graphite crucible seat according to claim 1 for semiconductor grade monocrystal stove, it is characterised in that：It is each basic
Unit is symmetrically arranged on barrel outer wall of wall line of symmetry both sides containing a locking groove and two lifting mouths, lifting mouth.
3. the graphite crucible seat according to claim 1 or 2 for semiconductor grade monocrystal stove, it is characterised in that：It is described
Graphite crucible seat be furnished with and pedestal, the inwall of pedestal with it is assembled after barrel shaped structure bucket bottom weight-bearing surface and secondary support surface
Match somebody with somebody, latch corresponding with the locking groove is provided with pedestal.
4. the graphite crucible seat according to claim 1 or 2 for semiconductor grade monocrystal stove, it is characterised in that：It is described
Four valve structure identical elementary cells using high intensity isostatic pressing formed graphite make, part must be through high temperature purification after machining
Processing, its purity requirement is 5 ppm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720396622.XU CN206635455U (en) | 2017-04-14 | 2017-04-14 | Graphite crucible seat for semiconductor grade monocrystal stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720396622.XU CN206635455U (en) | 2017-04-14 | 2017-04-14 | Graphite crucible seat for semiconductor grade monocrystal stove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206635455U true CN206635455U (en) | 2017-11-14 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720396622.XU Active CN206635455U (en) | 2017-04-14 | 2017-04-14 | Graphite crucible seat for semiconductor grade monocrystal stove |
Country Status (1)
| Country | Link |
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| CN (1) | CN206635455U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108895836A (en) * | 2018-08-23 | 2018-11-27 | 洛阳宏达炉业有限公司 | A kind of furnace chamber is the lift electric kiln of cylindrical structure |
| CN111996587A (en) * | 2020-07-13 | 2020-11-27 | 大同新成新材料股份有限公司 | Graphite crucible seat for semiconductor-grade silicon single crystal furnace |
-
2017
- 2017-04-14 CN CN201720396622.XU patent/CN206635455U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108895836A (en) * | 2018-08-23 | 2018-11-27 | 洛阳宏达炉业有限公司 | A kind of furnace chamber is the lift electric kiln of cylindrical structure |
| CN111996587A (en) * | 2020-07-13 | 2020-11-27 | 大同新成新材料股份有限公司 | Graphite crucible seat for semiconductor-grade silicon single crystal furnace |
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